CN107477351A - A kind of special cylinder for being used to load solid metallic organic source - Google Patents
A kind of special cylinder for being used to load solid metallic organic source Download PDFInfo
- Publication number
- CN107477351A CN107477351A CN201710679244.0A CN201710679244A CN107477351A CN 107477351 A CN107477351 A CN 107477351A CN 201710679244 A CN201710679244 A CN 201710679244A CN 107477351 A CN107477351 A CN 107477351A
- Authority
- CN
- China
- Prior art keywords
- organic source
- solid metallic
- metallic organic
- admission line
- load solid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007787 solid Substances 0.000 title claims abstract description 25
- 239000006185 dispersion Substances 0.000 claims abstract description 25
- 239000000945 filler Substances 0.000 claims abstract description 7
- 229910000831 Steel Inorganic materials 0.000 claims description 10
- 239000010959 steel Substances 0.000 claims description 10
- 239000012159 carrier gas Substances 0.000 claims description 6
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims 5
- 239000002184 metal Substances 0.000 abstract description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C1/00—Pressure vessels, e.g. gas cylinder, gas tank, replaceable cartridge
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/04—Arrangement or mounting of valves
Abstract
The present invention provides a kind of special cylinder for being used to load solid metallic organic source, including body, admission line and outlet pipe are provided with the body, the admission line lower end is provided with airflow dispersion device, air intake valve is provided with the admission line, outlet valve is provided with the outlet pipe, the admission line upper end is provided with air inlet VCR joints, outlet pipe upper end is provided with outlet VCR joints, and the admission line side is provided with filler.Solid metallic organic source is loaded by filler, and metal organic source is used by admission line and outlet pipe, the airflow direction for being entered admission line by airflow dispersion device by being changed to horizontal direction vertically downward, and V-type is set to bore bottom, improve service efficiency, and airflow direction is changed by the airflow dispersion device of different structure, improves the utilization rate of metal organic source.
Description
Technical field
The present invention relates to metal organic source field, more particularly to a kind of special-purpose steel for being used to load solid metallic organic source
Bottle.
Background technology
At present when manufacturing metal organic source, it is necessary to solid metallic organic source is loaded into steel cylinder, it is easy to carry out it
Transport uses, and is loaded at present to solid metallic organic source, and usually used is exactly common steel cylinder, is held when in use
The problem of solid metallic organic source residual easily occurs, causes solid metallic organic source to waste, and at present for above mentioned problem not
Have and solved by the transformation to steel cylinder.Therefore, the steel cylinder for solving filling solid metallic organic source easily occurs using endless
The problem of complete, is just particularly important.
The content of the invention
It is an object of the invention to provide a kind of special cylinder for being used to load solid metallic organic source, by filler to solid
State metal organic source is loaded, and metal organic source is used by admission line and outlet pipe, passes through air-flow
The airflow direction that admission line enters by being changed to horizontal direction vertically downward, and is set V-type to bore bottom by dispersal device, and raising makes
With efficiency, the steel cylinder for solving filling solid metallic organic source easily occurs using incomplete problem.
The present invention provides a kind of special cylinder for being used to load solid metallic organic source, including body, is set on the body
Admission line and outlet pipe are equipped with, the admission line lower end is provided with airflow dispersion device, set on the admission line
There is air intake valve, outlet valve is provided with the outlet pipe, the admission line upper end is provided with air inlet VCR joints, gone out
Feed channel upper end is provided with outlet VCR joints, and the admission line side is provided with filler.
Further improvement is that：The air inlet VCR joints, outlet VCR joints connect with client MOCVD system connectors respectively
Connect.
Further improvement is that：The admission line is arranged on body central upper portion, from steel cylinder top center air inlet, air-flow
Airflow dispersion device is from top to bottom, carrier gas stream is passed through, and airflow direction by being changed to horizontal direction vertically downward in direction.
Further improvement is that：The lower end of the outlet pipe extends the lower central in body, and the body bottom is V
Type bores bottom.
Further improvement is that：The airflow dispersion device is Flapper type, including support and baffle plate, baffle plate are pacified by support
Mounted in admission line lower end.
Further improvement is that：The airflow dispersion device is endless tube spout type, including endless tube, the endless tube upper end open up
There is through hole.
Further improvement is that：The airflow dispersion device is cylinder slit-type, including the box that keeps out the wind, the box both sides of keeping out the wind
Offer slit.
Further improvement is that：The airflow dispersion device is circular cone spout type, including Conical flask, the Conical flask side
It is provided with venthole.
Further improvement is that：The airflow dispersion device is block spout type, including triangle block, the triangle
Block upper end is provided with wind dispersing block.
Equipment provides carrier gas and enters steel cylinder along air intake valve and admission line, and is connect with the metal organic source of filling
Touch, carrier gas will carry solid-state organic source distillation steam and enter MOCVD device reaction chamber along outlet valve and outlet pipe, body
The solid-state organic source of interior filling, which persistently distils, compensates the consumption of cavity gaseous parts.
The carrier gas is high-purity hydrogen or high pure nitrogen.
The beneficial effects of the invention are as follows：Solid metallic organic source is loaded by filler, and passes through air inlet pipe
Road and outlet pipe are used metal organic source, and the airflow direction for being entered admission line by airflow dispersion device is by hanging down
Horizontal direction has directly been changed to downwards, and has set V-type to bore bottom, improves service efficiency, and dress is disperseed by the air-flow of different structure
Put and change airflow direction, improve the utilization rate of metal organic source.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention.
Fig. 2 is the Flapper type structural representation of the airflow dispersion device of the present invention.
Fig. 3 is the endless tube spout type structural representation of the airflow dispersion device of the present invention.
Fig. 4 is the cylinder slit-type structural representation of the airflow dispersion device of the present invention.
Fig. 5 is the circular cone spout type structural representation of the airflow dispersion device of the present invention.
Fig. 6 is the block spout type structural representation of the airflow dispersion device of the present invention.
Wherein：1- bodies, 2- admission lines, 3- outlet pipes, 4- airflow dispersion devices, 5- air intake valves, 6- air outlet valves
Door, 7- air inlet VCR joints, 8- outlet VCR joints, 9- fillers, 10- supports, 11- baffle plates, 12- endless tubes, 13- through holes, 14- gears
Wind box, 15- slits, 16- Conical flasks, 17- ventholes, 18- triangle blocks, 19- wind dispersing blocks.
Embodiment
In order to deepen the understanding of the present invention, below in conjunction with embodiment, the invention will be further described, the embodiment
It is only used for explaining the present invention, is not intended to limit the scope of the present invention..
Embodiment one
As shown in Figure 1-2, a kind of special cylinder for being used to load solid metallic organic source, including body 1 are present embodiments provided,
Admission line 2 and outlet pipe 3 are provided with the body 1, the lower end of admission line 2 is provided with airflow dispersion device 4, institute
State and air intake valve 5 is provided with admission line 2, outlet valve 6, the upper end of admission line 2 are provided with the outlet pipe 3
Air inlet VCR joints 7 are provided with, the upper end of outlet pipe 3 is provided with outlet VCR joints 8, and the side of admission line 2 is provided with dress
Fill out mouth 9.The air inlet VCR joints 7, outlet VCR joints 8 are connected with client's MOCVD system connectors respectively.The admission line 2
The central upper portion of body 1 is arranged on, from steel cylinder top center air inlet, airflow direction is from top to bottom, carrier gas stream is by air-flow point
In bulk to put 4, airflow direction by being changed to horizontal direction vertically downward.The lower end of the outlet pipe 2 extends the bottom in body 1
Center, the bottom of body 1 are that V-type bores bottom.
The airflow dispersion device 4 is Flapper type, including support 10 and baffle plate 11, baffle plate 11 by support 10 be arranged on into
The lower end of feed channel 2.
Embodiment two
As shown in figure 3, the airflow dispersion device 4 is endless tube spout type, including endless tube 12, the upper end of endless tube 12 offer logical
Hole 13, other guide are consistent with embodiment one.
Embodiment three
As shown in figure 4, the airflow dispersion device 4 is cylinder slit-type, including the box 14 that keeps out the wind, the both sides of box 14 of keeping out the wind open up
There is a slit 15, other guide is consistent with embodiment one.
Example IV
As shown in figure 5, the airflow dispersion device 4 is circular cone spout type, including Conical flask 16, the side of Conical flask 16 are set
There is a venthole 17, other guide is consistent with embodiment one.
Embodiment five
As shown in fig. 6, the airflow dispersion device 4 is block spout type, including triangle block 18, the triangle block 18
Upper end is provided with wind dispersing block 19, and other guide is consistent with embodiment one.
Claims (9)
1. a kind of special cylinder for being used to load solid metallic organic source, including body（1）, the body（1）On be provided with into
Feed channel（2）And outlet pipe（3）, it is characterised in that：The admission line（2）Lower end is provided with airflow dispersion device（4）, institute
State admission line（2）On be provided with air intake valve（5）, the outlet pipe（3）On be provided with outlet valve（6）, the air inlet
Pipeline（2）Upper end is provided with air inlet VCR joints（7）, outlet pipe（3）Upper end is provided with outlet VCR joints（8）, the air inlet
Pipeline（2）Side is provided with filler（9）.
A kind of 2. special cylinder for being used to load solid metallic organic source as claimed in claim 1, it is characterised in that：It is described enter
Gas VCR joints（7）, outlet VCR joints（8）It is connected respectively with client's MOCVD system connectors.
A kind of 3. special cylinder for being used to load solid metallic organic source as claimed in claim 1, it is characterised in that：It is described enter
Feed channel（2）It is arranged on body（1）Central upper portion, from steel cylinder top center air inlet, airflow direction is from top to bottom carrier gas stream
By airflow dispersion device（4）, airflow direction by being changed to horizontal direction vertically downward.
A kind of 4. special cylinder for being used to load solid metallic organic source as claimed in claim 1, it is characterised in that：It is described go out
Feed channel（2）Lower end extend body（1）Interior lower central, the body（1）Bottom is that V-type bores bottom.
A kind of 5. special cylinder for being used to load solid metallic organic source as claimed in claim 1, it is characterised in that：The gas
Flow dispersal device（4）For Flapper type, including support（10）And baffle plate（11）, baffle plate（11）Pass through support（10）Installed in air inlet pipe
Road（2）Lower end.
A kind of 6. special cylinder for being used to load solid metallic organic source as claimed in claim 1, it is characterised in that：The gas
Flow dispersal device（4）For endless tube spout type, including endless tube（12）, the endless tube（12）Upper end offers through hole（13）.
A kind of 7. special cylinder for being used to load solid metallic organic source as claimed in claim 1, it is characterised in that：The gas
Flow dispersal device（4）For cylinder slit-type, including the box that keeps out the wind（14）, the box that keeps out the wind（14）Both sides offer slit（15）.
A kind of 8. special cylinder for being used to load solid metallic organic source as claimed in claim 1, it is characterised in that：The gas
Flow dispersal device（4）For circular cone spout type, including Conical flask（16）, the Conical flask（16）Side is provided with venthole（17）.
A kind of 9. special cylinder for being used to load solid metallic organic source as claimed in claim 1, it is characterised in that：The gas
Flow dispersal device（4）For block spout type, including triangle block（18）, the triangle block（18）Upper end is provided with a point wind
Block（19）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710679244.0A CN107477351A (en) | 2017-08-10 | 2017-08-10 | A kind of special cylinder for being used to load solid metallic organic source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710679244.0A CN107477351A (en) | 2017-08-10 | 2017-08-10 | A kind of special cylinder for being used to load solid metallic organic source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107477351A true CN107477351A (en) | 2017-12-15 |
Family
ID=60599111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710679244.0A Pending CN107477351A (en) | 2017-08-10 | 2017-08-10 | A kind of special cylinder for being used to load solid metallic organic source |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107477351A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111172513A (en) * | 2020-03-09 | 2020-05-19 | 江苏南大光电材料股份有限公司 | Container for packaging solid high-purity metal organic compound and application thereof |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1804117A (en) * | 2005-01-14 | 2006-07-19 | 江苏南大光电材料股份有限公司 | Solid metal-organic compound package container and application thereof |
| CN101660136A (en) * | 2009-09-17 | 2010-03-03 | 江苏南大光电材料股份有限公司 | Container for packing solid high-purity metal organic compounds and application thereof |
| CN102373440A (en) * | 2010-08-12 | 2012-03-14 | Snt能源技术有限公司 | Chemical vapor deposition device |
| CN203782229U (en) * | 2014-03-17 | 2014-08-20 | 江苏南大光电材料股份有限公司 | Solid metal organic compound encapsulation container series system |
| CN104928650A (en) * | 2014-03-17 | 2015-09-23 | 江苏南大光电材料股份有限公司 | Liquid metal organic compound supply system |
| CN105695957A (en) * | 2014-11-28 | 2016-06-22 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Air inlet device and semiconductor processing equipment |
| CN205473974U (en) * | 2016-03-23 | 2016-08-17 | 安徽三安光电有限公司 | Metal organic compound container |
| CN207230150U (en) * | 2017-08-10 | 2018-04-13 | 安徽亚格盛电子新材料有限公司 | A kind of special cylinder for being used to load solid metallic organic source |
-
2017
- 2017-08-10 CN CN201710679244.0A patent/CN107477351A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1804117A (en) * | 2005-01-14 | 2006-07-19 | 江苏南大光电材料股份有限公司 | Solid metal-organic compound package container and application thereof |
| CN101660136A (en) * | 2009-09-17 | 2010-03-03 | 江苏南大光电材料股份有限公司 | Container for packing solid high-purity metal organic compounds and application thereof |
| CN102373440A (en) * | 2010-08-12 | 2012-03-14 | Snt能源技术有限公司 | Chemical vapor deposition device |
| CN203782229U (en) * | 2014-03-17 | 2014-08-20 | 江苏南大光电材料股份有限公司 | Solid metal organic compound encapsulation container series system |
| CN104928650A (en) * | 2014-03-17 | 2015-09-23 | 江苏南大光电材料股份有限公司 | Liquid metal organic compound supply system |
| CN105695957A (en) * | 2014-11-28 | 2016-06-22 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Air inlet device and semiconductor processing equipment |
| CN205473974U (en) * | 2016-03-23 | 2016-08-17 | 安徽三安光电有限公司 | Metal organic compound container |
| CN207230150U (en) * | 2017-08-10 | 2018-04-13 | 安徽亚格盛电子新材料有限公司 | A kind of special cylinder for being used to load solid metallic organic source |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111172513A (en) * | 2020-03-09 | 2020-05-19 | 江苏南大光电材料股份有限公司 | Container for packaging solid high-purity metal organic compound and application thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20171215 |
|
| RJ01 | Rejection of invention patent application after publication |