CN107457688A - Big substrate erratic star wheel - Google Patents
Big substrate erratic star wheel Download PDFInfo
- Publication number
- CN107457688A CN107457688A CN201710924026.9A CN201710924026A CN107457688A CN 107457688 A CN107457688 A CN 107457688A CN 201710924026 A CN201710924026 A CN 201710924026A CN 107457688 A CN107457688 A CN 107457688A
- Authority
- CN
- China
- Prior art keywords
- star wheel
- erratic star
- workpiece
- installation position
- big substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 13
- 238000009434 installation Methods 0.000 claims abstract description 17
- 238000003754 machining Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 3
- 238000005498 polishing Methods 0.000 abstract description 3
- 239000007795 chemical reaction product Substances 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
The big substrate erratic star wheel that the present invention designs, including erratic star wheel body, a diameter of 640mm of described erratic star wheel, its center has mounting hole, the inner ring of described mounting hole is provided with tooth, three workpiece installation positions, a length of 300mm of described workpiece installation position, a width of 150mm are evenly equipped with described erratic star wheel circumference.This big substrate erratic star wheel, considerably increase the area of workpiece installation position, the workpiece of corresponding common shape, its working (finishing) area can correspond to the size of workpiece installation position, reach 150*300mm, and respective elongated class workpiece, with the use of wear-resisting fixed inserted sheet, maximum machining length can obtain 335mm.Due to wear-resisting fixed inserted sheet can be coordinated to use, the work pieces process for small area that it is also backward compatible.Therefore, this big substrate erratic star wheel substantially increases the utilization rate of card, is especially suitable for the production in enormous quantities of low-end product, the processing limitation for solving 9B Twp-sided polishing machines, effectively increases yield, and its yield can reach more than one times of original yield.
Description
Technical field
The present invention relates to a kind of semiconductor processing, particularly a kind of wandering star as semiconductor finishing grinding carrier
Wheel.
Background technology
Existing 9B types Twp-sided polishing machine, the processing bit quantity on its erratic star wheel is more, and the area of machining position is smaller, maximum
The range of work is 200mm so that the utilization rate of mill is relatively low, while can not process the workpiece of larger area.
The content of the invention
To solve the above problems, the present invention proposes that mill utilization rate can be effectively improved, workpieces processing volume is improved, it is especially suitable
Should be with the big substrate erratic star wheel of processing slender type workpiece.
The big substrate erratic star wheel that the present invention designs, including erratic star wheel body, a diameter of 640mm of described erratic star wheel, its
Center has mounting hole, and the inner ring of described mounting hole is provided with tooth, and three workpiece peaces are evenly equipped with described erratic star wheel circumference
Fill position, a width of 150mm of a length of 300mm of described workpiece installation position.
Further, wear-resisting fixed inserted sheet, the shape of described wear-resisting fixed inserted sheet are provided with described workpiece installation position
For right angled triangle or trapezoidal.
Further, described wear-resisting fixed inserted sheet is symmetricly set in workpiece installation position.
Compared with prior art, the big substrate erratic star wheel obtained by the present invention, the area of workpiece installation position is considerably increased,
The workpiece of corresponding common shape, its working (finishing) area can correspond to the size of workpiece installation position, reach 150*300mm, and corresponding thin
Long class workpiece, with the use of wear-resisting fixed inserted sheet, maximum machining length can obtain 335mm.Due to wear-resisting fixation can be coordinated
Inserted sheet uses, the work pieces process for small area that it is also backward compatible.Therefore, this big substrate erratic star wheel substantially increases card
Utilization rate, the production in enormous quantities of low-end product is especially suitable for, the processing limitation for solving 9B Twp-sided polishing machines, effectively increased
Yield, its yield can reach more than one times of original yield.
Brief description of the drawings
Fig. 1 is the front view of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes.
Embodiment 1.
As shown in figure 1, the big substrate erratic star wheel of the present embodiment description, including the body of erratic star wheel 1, described erratic star wheel 1
A diameter of 640mm, its center have mounting hole 2, and the inner ring of described mounting hole 2 is provided with tooth 3, the described circumference of erratic star wheel 1
On be evenly equipped with three workpiece installation positions 4, a width of 150mm of a length of 300mm of described workpiece installation position 4.
It is provided with the first wear-resisting fixed wear-resisting fixed inserted sheet 6 of inserted sheet 5 and second in described workpiece installation position 4, described the
One wear-resisting fixed inserted sheet 5 is shaped as right angled triangle, and being shaped as the second wear-resisting fixed inserted sheet 6 is trapezoidal.Described is wear-resisting solid
Determine inserted sheet to be symmetricly set in workpiece installation position 4.
Claims (3)
1. a kind of big substrate erratic star wheel, including erratic star wheel body, it is characterized in that a diameter of 640mm of described erratic star wheel, wherein
The heart has mounting hole, and the inner ring of described mounting hole is provided with tooth, and three workpiece installations are evenly equipped with described erratic star wheel circumference
Position, a width of 150mm of a length of 300mm of described workpiece installation position.
2. big substrate erratic star wheel according to claim 1, it is characterized in that being provided with wear-resisting fixation in described workpiece installation position
Inserted sheet, described wear-resisting fixed inserted sheet are shaped as right angled triangle or trapezoidal.
3. big substrate erratic star wheel according to claim 2, it is characterized in that described wear-resisting fixed inserted sheet is symmetricly set on work
In part installation position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710924026.9A CN107457688A (en) | 2017-10-01 | 2017-10-01 | Big substrate erratic star wheel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710924026.9A CN107457688A (en) | 2017-10-01 | 2017-10-01 | Big substrate erratic star wheel |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107457688A true CN107457688A (en) | 2017-12-12 |
Family
ID=60554089
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710924026.9A Pending CN107457688A (en) | 2017-10-01 | 2017-10-01 | Big substrate erratic star wheel |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107457688A (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4512113A (en) * | 1982-09-23 | 1985-04-23 | Budinger William D | Workpiece holder for polishing operation |
| JPH0451358U (en) * | 1990-09-07 | 1992-04-30 | ||
| JPH0731260U (en) * | 1993-11-24 | 1995-06-13 | 日本板硝子株式会社 | Object to be polished |
| US6030280A (en) * | 1997-07-23 | 2000-02-29 | Speedfam Corporation | Apparatus for holding workpieces during lapping, honing, and polishing |
| CN204553511U (en) * | 2015-04-12 | 2015-08-12 | 长春黄金研究院 | A kind of combined type rectangular pad |
| CN205703742U (en) * | 2016-05-09 | 2016-11-23 | 四川天乐信达光电有限公司 | A kind of compound erratic star wheel |
| CN206123440U (en) * | 2016-10-27 | 2017-04-26 | 中国建筑材料科学研究总院 | Wandering star wheel and work piece steps up device, twin polishing machine and double side grinder thereof |
| CN206253995U (en) * | 2016-11-14 | 2017-06-16 | 蓝思科技（长沙）有限公司 | A kind of grinding machine sun gear expansion fixture |
| CN207344308U (en) * | 2017-10-01 | 2018-05-11 | 德清凯晶光电科技有限公司 | Big substrate erratic star wheel |
-
2017
- 2017-10-01 CN CN201710924026.9A patent/CN107457688A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4512113A (en) * | 1982-09-23 | 1985-04-23 | Budinger William D | Workpiece holder for polishing operation |
| JPH0451358U (en) * | 1990-09-07 | 1992-04-30 | ||
| JPH0731260U (en) * | 1993-11-24 | 1995-06-13 | 日本板硝子株式会社 | Object to be polished |
| US6030280A (en) * | 1997-07-23 | 2000-02-29 | Speedfam Corporation | Apparatus for holding workpieces during lapping, honing, and polishing |
| CN204553511U (en) * | 2015-04-12 | 2015-08-12 | 长春黄金研究院 | A kind of combined type rectangular pad |
| CN205703742U (en) * | 2016-05-09 | 2016-11-23 | 四川天乐信达光电有限公司 | A kind of compound erratic star wheel |
| CN206123440U (en) * | 2016-10-27 | 2017-04-26 | 中国建筑材料科学研究总院 | Wandering star wheel and work piece steps up device, twin polishing machine and double side grinder thereof |
| CN206253995U (en) * | 2016-11-14 | 2017-06-16 | 蓝思科技（长沙）有限公司 | A kind of grinding machine sun gear expansion fixture |
| CN207344308U (en) * | 2017-10-01 | 2018-05-11 | 德清凯晶光电科技有限公司 | Big substrate erratic star wheel |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20171212 |