CN107454729A - A kind of loop coil ring type electrode structural dielectric barrier electric discharge fluidic device - Google Patents
A kind of loop coil ring type electrode structural dielectric barrier electric discharge fluidic device Download PDFInfo
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- CN107454729A CN107454729A CN201710945703.5A CN201710945703A CN107454729A CN 107454729 A CN107454729 A CN 107454729A CN 201710945703 A CN201710945703 A CN 201710945703A CN 107454729 A CN107454729 A CN 107454729A
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- Prior art keywords
- gas
- quartz glass
- density
- detection
- dielectric barrier
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
- H05H1/2465—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated by inductive coupling, e.g. using coiled electrodes
Abstract
A kind of loop coil ring type electrode structural dielectric barrier electric discharge fluidic device, the high-field electrode of described device is internal diameter 6.5mm, external diameter 8.5mm, long 85mm stainless steel helix tube, and an internal diameter 8.3mm, external diameter 12mm, long 125mm quartz glass tube are closely covered in its outer layer；The lower end of quartz glass tube is similar to cone, and the gas vent for having an aperture to be 2.5mm；The effective power and gas temperature of the plasma jet are relatively low, and effective power, the gas molecule for detection rotates temperature and vibration temperature, Electron Excited Temperature, gas atom density, the density of gas molecules for detection and average electron density for detection increase with the increase of crest voltage, wherein the order of magnitude of the atomic density for detection gas, the molecular density for detection gas and average electron density has respectively reached the very low order of magnitude.
Description
Technical field
Patent of the present invention is related to a kind of dielectric barrier discharge device, is more specifically a kind of loop coil-ring type electrode knot
Structure dielectric barrier discharge fluidic device.
Background technology
In atmospheric medium barrier discharge, it is body dielectric barrier discharge to have one kind, and another situation is along face dielectric impedance
Electric discharge；The height of the gas breakdown voltage ratio surface dielectric barrier discharge of described body dielectric barrier discharge simultaneously；Simultaneously described
Body dielectric barrier discharge caused active particle type and quantity under identical energy are fewer than surface dielectric barrier discharge, also
It is to say that the former does not discharge uniformly；Surface dielectric barrier discharge can be divided into " coplanar type " according to electrode structure along face dielectric impedance again
Discharge electrode structure and " non-co-planar type " surface dielectric barrier discharge electrode structure." coplanar type " surface dielectric barrier discharge electrode
Structure is doubled because high-field electrode and low-field electrode are in the same side of medium equivalent to dielectric thickness, thus with it is " non-co-planar
Type " surface dielectric barrier discharge electrode structure is compared, and gas breakdown voltage is relatively high, and caused work under identical energy
Property particle kind and quantity are relatively few.
The content of the invention
Patent of the present invention overcomes prior art condition deficiency, there is provided a kind of loop coil-ring type electrode structural dielectric barrier is put
Electric fluidic device, the technical scheme that patent of the present invention solves are：The high-field electrode of patent described device of the present invention is internal diameter
6.5mm, external diameter 8.5mm, long 85mm stainless steel helix tube, its outer layer closely covering one internal diameter 8.3mm, external diameter 12mm,
Long 125mm quartz glass tube；The lower end of quartz glass tube is cone shape, and the gas for having an aperture to be 2.5mm
Outlet；Quartz glass tube outer wall away from gas vent 12mm at, be closely wound long 45mm, thick 0.28mm copper foil, and make
For ring earthing electrode；Described device collection is away from during the spectral signal of jet, level is put in this place at 5.3mm below gas vent
Quartz glass plate is removed when having put thick 1.5mm quartz glass plate, and having measured jet length；Patent of the present invention is using high
Purity gases (purity 99.999%) enter from overhead gas entrance, and it is 2lpm to control its flow using mass flowmenter；
Power supply uses amplitude 0-25 kV, and frequency is 10 kHz AC power；Electric power output voltage is obtained using high-voltage probe measurement,
Described device output current is obtained by measuring the voltage on 100 Ohmic resistances connected with grounding electrode simultaneously, described device
Lissajous figures obtained by 150 nF electric capacity of being connected with grounding electrode, and be recorded in used in device on oscillograph；Institute
State characteristic emission spectrum to be collected by 1000 grooves/mm gratings of spectrometer, and fibre-optical probe is fixed on quartzy glass
Below glass plate at 4 mm；Electric discharge photo is to take pictures to obtain by Nikon digital camera (COOLPIX S600) with jet length.
The beneficial effect of patent of the present invention：Described device can reduce the crest voltage of plasma jet source work, make
Plasma jet source can be under crest voltage 2.01KV, by gas breakdown, while can improve active oxygen atom density.
Brief description of the drawings
Fig. 1 is the system structure diagram of patent of the present invention.
Fig. 2 is the crest voltage 2.01KV exemplary waveform diagrams of patent of the present invention.
Dielectric capacitance wave period variation diagram when Fig. 3 is patent crest voltage 6.5KV of the present invention.
Fig. 4 is patent crest voltage 6.5KV exemplary waveform diagrams of the present invention.
Fig. 5 is variation diagram of the patent effective power of the present invention with crest voltage.
Fig. 6 is the photo figure that patent plasma jet length of the present invention changes with crest voltage.
Embodiment
General remark is carried out to patent of the present invention using instantiation below.
Embodiment：For patent of the present invention mainly using high-pure gas as experimental gas, patent of the present invention have input crest voltage
For 2.01 kV and 6.3 kV, operating voltage, total current, displacement current, the typical waveform for conducting electric current, and peak value electricity are drawn
Press for 2.01 kV when, dielectric capacitanceChange within two cycles.From figure 2 it can be seen that when crest voltage is 2.01kV
When, it was observed that displacement current peak value is different from conduction current spikes, displacement current is bigger, in this experiment effect figure
In, it is relatively many that can analyze displacement current ratio shared in total current；Simultaneously described conduction electric current and total
Electric current is compared to much smaller；The positive negative peak of the conduction electric current is 1.04mA and 1.019mA, while the total current is positive and negative
Peak value is 2.14mA and 2.10mA.
From figure 3, it can be seen that dielectric capacitanceOccur 4 maximum and 3 minimums within two cycles, this is
BecauseIt is average to it afterwards by caused by zero point, eliminating multiple extreme values, it is resultingIt is worth for 11.60 pF.It is situated between
Matter electric capacityThere is negative value when changing over time, because displacement currentWithIt is asynchronous in phase to lead
Cause.Figure 4, it is seen that when crest voltage is 6.5 kv, conduction electric current is much larger than displacement current, that is to say, that total current
The composition of middle displacement current occupies the ratio of very little, the phenomenon in such case and Fig. 2 be it is different, can be with by the phenomenon
Draw, in the case where operating voltage increases, the maximum of total current gradually approaches with the maximum for conducting electric current；Simultaneously by institute
Phenomenon is stated it is observed that the positive negative peak of conduction electric current is respectively 8.63mA and 9.33mA, while the total current is positive and negative
Peak value is 12.25mA and 12.85mA.
As shown in Figure 5, it can be seen that in the case where voltage increases, effective power is also with corresponding increase；Simultaneously
The phenomenon is it is recognised that the increase form class liny increase of the two；Simultaneously in minimum 5.0 kV of crest voltage, effectively
Power is 4.71W, when crest voltage is 7.017 kV, effective power 8.71W.
The photo of described device is it can be appreciated that in the case where crest voltage gradually increases, the length of plasma jet
Degree is also corresponding increase；When the crest voltage is changed into 6.61 kV, the change of the plasma jet length is just compared
Unobvious；The crest voltage gradually increases, and the migration rate that the axial electric field and electronics of jet area have gradually increases,
Increase simultaneously with high-pure gas atomic contacts, the jet length increase；Described device continues after increasing crest voltage, as a result
It is unsatisfactory, after the high-pure gas atomic collision is excessively frequent, electronics and the high-pure gas atom will be reduced
Mobility, while they diffusion rate increase；The electronics and atom can be from the different gas of gas ions jet near its circumference
Body molecule collides operation, causes the electron transfer rate bigger.
Plasma jet length undergoes laminar flow pattern first in the presence of gas flow, through going through after this pattern
It is excessive pattern, after first two model lives through, the model finally undergone is turbulent model；, will in the laminar flow pattern
The gas flow carries out increase processing, and the axial velocity of the gas increases, and its jet concentration is also in this case
Increase；The radial flow speed of the jet of the gas is corresponding to diminish, while the radial gas concentration diminishes accordingly；This
Kind situation ultimately results in the increase of jet length；In transition mode, in the case of increasing gas flow, the radial direction of gas jet
Flow velocity will become bigger, while the supply of air can be caused to increase in this case；Under normal circumstances, device institute
The high-pure gas of use is easier to ionize, and this is in the case where being compared with air, and such case is mostly due to sky
Electronegative gas in gas is relatively more, easily attracts electronics, the rubbing machine between the high-pure gas atom and different electronics
It will can tail off accordingly；Such case can cause diminishing for jet length.
Described gas flow increases in turbulence model, and the inlet of air can compare more while corresponding axially speed
Degree can also become bigger, and what the air content penetrated into inside jet can be corresponding tails off；High-pure gas in jet simultaneously
Collision frequency between atom and electronics maintains fixed level, and such case ensures that the constant of jet length.
The shape of plasma jet far-end is similar to cone by patent of the present invention, the reason for so setting be etc. from
The gas vent of daughter jet is axisymmetric, while is exporting distant place, and air radially diffuses into high-purity
The concentration of gas jet compare it is larger, thus can the far-end of plasma jet form a conical grade from
Sublayer Air Interface；The high-field electrode of the plasma jet device is stainless steel helix tube, and low-field electrode is copper foil ring-type
Electrode；Diagnosed by carrying out detailed electrical and optical properties to it, it is found that effective power, nitrogen molecular rotate temperature and vibration temperature
Degree, Electron Excited Temperature, oxygen atom density, nitrogen molecular density and average electron density are with the increase of crest voltage, almost line
Increase to property.
Part is not described in detail for patent of the present invention, is the known technology of those skilled in the art of the present technique.
Claims (1)
1. a kind of loop coil-ring type electrode structural dielectric barrier electric discharge fluidic device, it is characterized in that high-field electrode be internal diameter 6.5mm,
The mm of external diameter 8.5, long 85mm stainless steel helix tube, an internal diameter 8.3mm, external diameter 12mm, length are closely covered in its outer layer
125mm quartz glass tube；The lower end of quartz glass tube is cone shape, and the gas for having an aperture to be 2.5mm goes out
Mouthful；Quartz glass tube outer wall away from gas vent 12mm at, be closely wound long 45mm, thick 0.28mm copper foil, and conduct
Ring earthing electrode；Described device collection is horizontal positioned in this place away from 5.3mm below gas vent during the spectral signal of jet
One thick 1.5mm quartz glass plate, and quartz glass plate is removed when measuring jet length.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710945703.5A CN107454729A (en) | 2017-10-12 | 2017-10-12 | A kind of loop coil ring type electrode structural dielectric barrier electric discharge fluidic device |
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| CN201710945703.5A CN107454729A (en) | 2017-10-12 | 2017-10-12 | A kind of loop coil ring type electrode structural dielectric barrier electric discharge fluidic device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108366482A (en) * | 2018-02-05 | 2018-08-03 | 河海大学 | A kind of capacitively coupled plasma diagnostic device and diagnostic method |
| CN114501760A (en) * | 2021-12-30 | 2022-05-13 | 南京施迈艾库智能科技有限公司 | Multiple medium unsteady state strong ion tube of three electrode structure |
| CN115884487A (en) * | 2023-02-16 | 2023-03-31 | 浙大城市学院 | Dielectric barrier discharge tube based on needle type cooperation double helix electrode |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN206422966U (en) * | 2016-11-11 | 2017-08-18 | 哈尔滨理工大学 | A kind of loop coil ring type electrode structural dielectric barrier electric discharge fluidic device |
| CN107105566A (en) * | 2017-05-19 | 2017-08-29 | 哈尔滨理工大学 | Pipe ring type electrode atmospheric pressure surface dielectric barrier discharge jet source device |
-
2017
- 2017-10-12 CN CN201710945703.5A patent/CN107454729A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN206422966U (en) * | 2016-11-11 | 2017-08-18 | 哈尔滨理工大学 | A kind of loop coil ring type electrode structural dielectric barrier electric discharge fluidic device |
| CN107105566A (en) * | 2017-05-19 | 2017-08-29 | 哈尔滨理工大学 | Pipe ring type electrode atmospheric pressure surface dielectric barrier discharge jet source device |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108366482A (en) * | 2018-02-05 | 2018-08-03 | 河海大学 | A kind of capacitively coupled plasma diagnostic device and diagnostic method |
| CN114501760A (en) * | 2021-12-30 | 2022-05-13 | 南京施迈艾库智能科技有限公司 | Multiple medium unsteady state strong ion tube of three electrode structure |
| CN114501760B (en) * | 2021-12-30 | 2024-02-23 | 南京施迈艾库智能科技有限公司 | Multi-medium unsteady-state strong ion tube with three-electrode structure |
| CN115884487A (en) * | 2023-02-16 | 2023-03-31 | 浙大城市学院 | Dielectric barrier discharge tube based on needle type cooperation double helix electrode |
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