CN107449375A - A kind of increment type Circular gratings chi grating Angular Displacement Detecting System and method - Google Patents

A kind of increment type Circular gratings chi grating Angular Displacement Detecting System and method Download PDF

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CN107449375A
CN107449375A CN201710773144.4A CN201710773144A CN107449375A CN 107449375 A CN107449375 A CN 107449375A CN 201710773144 A CN201710773144 A CN 201710773144A CN 107449375 A CN107449375 A CN 107449375A
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angular displacement
grating
photoelectric sensor
incremental
signal
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杨志军
李彦锋
蔡铁根
李乾
陈新
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Guangdong University of Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

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Abstract

本发明涉及一种增量式圆光栅尺光栅角位移检测系统及方法,系统包括平行光源、增量式圆光栅尺、光电传感器阵列、信号处理单元、角位移显示单元以及高速电压比较器;其中,增量式圆光栅尺垂直平行光源的照射方向;光电传感器阵列放置于该增量式圆光栅尺光栅栅距内,并呈阶梯型均匀分布;高速电压比较器连接于光电传感器阵列和信号处理单元之间,对光电传感器阵列输出信号进行整形以及对整形得出的方波信号进行电平转换;所述信号处理单元与角位移显示单元连接,将计算得到的角位移值显示在角位移显示单元上。本发明具有构成简单、检测成本低、测量精度高、检测速度快、实用性强等优点。

The invention relates to a system and method for detecting angular displacement of an incremental circular grating ruler. The system includes a parallel light source, an incremental circular grating ruler, a photoelectric sensor array, a signal processing unit, an angular displacement display unit, and a high-speed voltage comparator; , the incremental circular grating ruler is perpendicular to the irradiation direction of the light source; the photoelectric sensor array is placed in the grating pitch of the incremental circular grating ruler, and is uniformly distributed in a stepped manner; the high-speed voltage comparator is connected to the photoelectric sensor array and signal processing Between the units, the output signal of the photoelectric sensor array is reshaped and the square wave signal obtained by the reshaping is converted; the signal processing unit is connected with the angular displacement display unit, and the calculated angular displacement value is displayed on the angular displacement display on the unit. The invention has the advantages of simple structure, low detection cost, high measurement precision, fast detection speed, strong practicability and the like.

Description

一种增量式圆光栅尺光栅角位移检测系统及方法A system and method for detecting angular displacement of an incremental circular grating ruler

技术领域technical field

本发明涉及精密测量的技术领域,尤其涉及到一种增量式圆光栅尺光栅角位移检测系统及方法。The invention relates to the technical field of precision measurement, in particular to an incremental circular grating ruler grating angular displacement detection system and method.

背景技术Background technique

在精密测量中,圆光栅尺作为重要的工具,利用光栅的光学原理,主要进行线位移和角位移的测量。In precision measurement, the circular grating scale is an important tool, using the optical principle of the grating, mainly for the measurement of linear displacement and angular displacement.

圆光栅尺的关键技术和难点主要是在光栅的制造上,光栅的质量直接会影响到检测结果的精度和可靠性。现有的圆光栅尺主要有玻璃圆光栅尺和金属圆光栅尺,其形式有增量式圆光栅尺和绝对式圆光栅尺两种。The key technology and difficulty of the circular grating ruler is mainly in the manufacture of the grating, the quality of the grating will directly affect the accuracy and reliability of the detection results. The existing circular grating scales mainly include glass circular grating scales and metal circular grating scales, and their forms include incremental circular grating scales and absolute circular grating scales.

其中,增量式圆光栅尺需要参考信号(相对零点),上电时须执行参考点回零操作。当掉电后,光栅尺必须重新回零,使得设备不能恢复操作。另外,在速度过快时,会产生脉冲信号丢失而影响准确性。而绝对式圆光栅尺是在标尺光栅上刻划一条带有绝对位置编码的码道,每一个位置对应一个固定的码道,测量示值只与测量的起始和终止的位置有关,与中间测量过程无关,掉电后还可以恢复当前位置,抗干扰性好。但是绝对式光栅尺编码复杂,制造成本高,读取速度慢,需要在标尺光栅上进行刻线,其测量精度与标尺光栅的精度有很大关系,因此在高精度测量中,对标尺光栅刻线要求很高,从而增加了加工成本。Among them, the incremental circular grating ruler needs a reference signal (relative to the zero point), and the reference point must be returned to zero when the power is turned on. When power is lost, the scale must be reset to zero so that the device cannot resume operation. In addition, when the speed is too fast, the pulse signal will be lost and the accuracy will be affected. The absolute circular grating scale is to engrave a code track with an absolute position code on the scale grating, and each position corresponds to a fixed code track. The measured value is only related to the starting and ending positions of the measurement, and the middle The measurement process is irrelevant, and the current position can be restored after power failure, with good anti-interference performance. However, the encoding of the absolute grating scale is complicated, the manufacturing cost is high, and the reading speed is slow. It needs to be engraved on the scale grating. The wire requirements are very high, which increases the processing cost.

如何在检测成本较低的情况下高精度及高速度地测量光栅角位移,成为亟待解决的问题。How to measure the angular displacement of the grating with high precision and high speed under the condition of low detection cost has become an urgent problem to be solved.

发明内容Contents of the invention

本发明的目的在于克服现有技术的不足,提供一种构成简单、检测成本低、测量精度高、检测速度快、实用性强的增量式圆光栅尺光栅角位移检测系统。The object of the present invention is to overcome the deficiencies of the prior art, and provide an incremental circular grating ruler grating angular displacement detection system with simple structure, low detection cost, high measurement accuracy, fast detection speed and strong practicability.

为实现上述目的,本发明所提供的技术方案为:In order to achieve the above object, the technical scheme provided by the present invention is:

一种增量式圆光栅尺光栅角位移检测系统,其包括平行光源、增量式圆光栅尺、光电传感器阵列、信号处理单元、角位移显示单元以及高速电压比较器;其中,增量式圆光栅尺垂直平行光源的照射方向;光电传感器阵列放置于该增量式圆光栅尺光栅栅距内,并呈阶梯型均匀分布;高速电压比较器连接于光电传感器阵列和信号处理单元之间,对光电传感器阵列输出信号进行整形以及对整形得出的方波信号进行电平转换;所述信号处理单元与角位移显示单元连接,将计算得到的角位移值显示在角位移显示单元上。An incremental circular grating ruler grating angular displacement detection system, which includes a parallel light source, an incremental circular grating ruler, a photoelectric sensor array, a signal processing unit, an angular displacement display unit, and a high-speed voltage comparator; wherein, the incremental circular grating The grating ruler is vertical and parallel to the irradiation direction of the light source; the photoelectric sensor array is placed in the grating pitch of the incremental circular grating ruler, and is uniformly distributed in a stepped manner; the high-speed voltage comparator is connected between the photoelectric sensor array and the signal processing unit, Reshaping the output signal of the photoelectric sensor array and performing level conversion on the square wave signal obtained by shaping; the signal processing unit is connected with the angular displacement display unit, and displays the calculated angular displacement value on the angular displacement display unit.

进一步地,光电传感器个数n=(H-D)/(D+L)+1;错位角度x=(w-q)/(n-1);其中,q为第n个光电传感器所对应的角度,w为两条栅纹之间的角度;H为栅线长度;D为光电传感器在栅线长度方向的宽度;x为相邻两光电传感器在圆光栅尺旋转方向上错位角度;L为相邻间隙。Further, the number of photoelectric sensors n=(H-D)/(D+L)+1; misalignment angle x=(w-q)/(n-1); wherein, q is the angle corresponding to the nth photoelectric sensor, w is the angle between two grating lines; H is the length of the grating line; D is the width of the photoelectric sensor in the direction of the length of the grating line; x is the misalignment angle of two adjacent photoelectric sensors in the rotation direction of the circular scale; L is the adjacent gap .

为实现上述目的,本发明另外提供一种用于上述系统的增量式圆光栅尺光栅角位移检测方法:包括以下步骤:In order to achieve the above object, the present invention additionally provides a method for detecting angular displacement of the incremental circular grating ruler for the above system: comprising the following steps:

S1、从平行光源发出的光照射到增量式圆光栅尺上;S1. The light emitted from the parallel light source shines on the incremental circular grating scale;

S2、光电传感器阵列接收光照,根据被光栅栅线遮挡与否输出高电平信号和低电平信号;S2. The photoelectric sensor array receives light, and outputs a high-level signal and a low-level signal according to whether it is blocked by the grating line;

S3、高速电压比较器对输出的电平信号进行整形以及电平转换;S3. The high-speed voltage comparator performs shaping and level conversion on the output level signal;

S4、信号处理单元接收已整形以及电平转换的信号,对其进行信号边沿检测、判断光栅运动方向并计数,得出角位移值;S4. The signal processing unit receives the shaped and level-converted signal, detects the signal edge, judges the moving direction of the grating and counts it, and obtains the angular displacement value;

S5、角位移显示单元显示信号处理单元处理得出的角位移值。S5. The angular displacement display unit displays the angular displacement value processed by the signal processing unit.

进一步地,步骤S4中运动方向利用组合逻辑根据相邻三个光电传感器分别输出的信号A、B、C的特点进行判断;顺时针运动的情况下,运动方向为逆时针运动的情况下,运动方向为 Further, in step S4, the direction of motion is judged by combination logic according to the characteristics of the signals A, B, and C respectively output by three adjacent photoelectric sensors; in the case of clockwise motion, the direction of motion is In the case of counterclockwise movement, the direction of movement is

进一步地,信号处理单元利用边沿检测法进行脉冲边沿检测并计数,所需检测边沿为脉冲的上升边沿。Further, the signal processing unit uses an edge detection method to detect and count pulse edges, and the required detection edge is the rising edge of the pulse.

进一步地,光栅角位移值计算过程如下:Further, the calculation process of the angular displacement value of the grating is as follows:

光栅顺时针运动时,角位移计算公式为:其中,为前一次的角位移值,ω为一个栅距所对应的角位移,N为一个栅距内所放置的传感器数量,M为计数的脉冲数目;光栅逆时针运动时, When the grating moves clockwise, the angular displacement The calculation formula is: in, is the previous angular displacement value, ω is the angular displacement corresponding to a grating pitch, N is the number of sensors placed within a grating pitch, M is the number of counted pulses; when the grating moves counterclockwise,

与现有技术相比,本方案原理如下:Compared with the existing technology, the principle of this scheme is as follows:

平行光源照射到增量式圆光栅尺上,由于光电传感器对光照强度敏感度高,未被光栅尺栅线遮挡的光电传感器接受全部光照,输出高电平信号,被遮挡的光电传感器接受部分光照或不接受光照,光照强度低,输出低电平信号。由于光电传感器在检测光照强度变化时,输出的波形不是理想方波信号,需要对输出的信号进行整形。本方案采用高速电压比较器对光电传感器输出信号进行整形,输出方波信号,并将信号进行高低电平转换输出至信号处理单元,进行脉冲信号边沿检测和判断光栅运动方向并计数,最后得到光栅角位移值。The parallel light source shines on the incremental circular grating scale. Since the photoelectric sensor is highly sensitive to light intensity, the photoelectric sensor not blocked by the grating line receives all the light and outputs a high-level signal, and the blocked photoelectric sensor receives part of the light. Or do not receive light, the light intensity is low, and output a low-level signal. Since the output waveform of the photoelectric sensor is not an ideal square wave signal when detecting changes in light intensity, it is necessary to reshape the output signal. This program uses a high-speed voltage comparator to shape the output signal of the photoelectric sensor, output a square wave signal, and convert the signal from high to low level and output it to the signal processing unit, detect the edge of the pulse signal and judge the moving direction of the grating and count, and finally get the grating Angular displacement value.

与现有技术相比,具有以下优点:Compared with the prior art, it has the following advantages:

1.位移检测方法信号由光电传感器直接输出,检测速度快;1. The signal of the displacement detection method is directly output by the photoelectric sensor, and the detection speed is fast;

2.系统简化,检测成本低廉;2. The system is simplified and the detection cost is low;

3.实用性强:对光电传感器要求较低,只需对整形后的脉冲边沿进行检测并计数即可得到位移值。3. Strong practicability: low requirements for photoelectric sensors, only need to detect and count the shaped pulse edges to get the displacement value.

附图说明Description of drawings

图1为本发明中一种增量式圆光栅尺光栅角位移检测系统的结构示意图;Fig. 1 is the structural representation of a kind of incremental circular grating ruler grating angular displacement detection system among the present invention;

图2为图1中101部分的局部放大图;Fig. 2 is a partial enlarged view of part 101 in Fig. 1;

图3为本发明实施例中光电传感器在光栅栅距内的分布图;Fig. 3 is the distribution diagram of the photoelectric sensor in the grating pitch in the embodiment of the present invention;

图4为本发明实施例中光栅尺顺时针移动的初始位置示意图;Fig. 4 is a schematic diagram of the initial position of the clockwise movement of the grating ruler in the embodiment of the present invention;

图5、图6、图7、图8、图9、图10、图11为本发明实施例中增量式圆光栅尺顺时针运动过程所经历的七个位置及其所对应的输出信号的示意图;Fig. 5, Fig. 6, Fig. 7, Fig. 8, Fig. 9, Fig. 10 and Fig. 11 are the seven positions experienced by the clockwise movement of the incremental circular grating ruler in the embodiment of the present invention and the corresponding output signals schematic diagram;

图12为本发明实施例中顺时针运动方向判断所依据的输出信号的特点的示意图;12 is a schematic diagram of the characteristics of the output signal based on which the clockwise motion direction is judged in the embodiment of the present invention;

图13、图14、图15、图16、图17、图18、图19为本发明实施例中增量式圆光栅尺在顺时针运动过程中突然换向运动后所经历的七个位置及其所对应的输出信号的示意图;Fig. 13, Fig. 14, Fig. 15, Fig. 16, Fig. 17, Fig. 18, and Fig. 19 are the seven positions experienced by the incremental circular grating ruler in the clockwise movement process after the sudden reversing movement in the embodiment of the present invention and A schematic diagram of the corresponding output signal;

图20为本发明实施例中光栅尺在顺时针运动时突然换向运动方向判断所依据的输出信号的特点的示意图;Fig. 20 is a schematic diagram of the characteristics of the output signal on which the judgment of the direction of motion is suddenly reversed when the grating scale is moving clockwise in the embodiment of the present invention;

图21为本发明实施例中用于判断方向的组合逻辑电路图。Fig. 21 is a circuit diagram of combinational logic for judging direction in the embodiment of the present invention.

具体实施方式detailed description

下面结合具体实施例对本发明作进一步说明:The present invention will be further described below in conjunction with specific embodiment:

参见附图1-3所示,本实施例所述的一种增量式圆光栅尺光栅角位移检测系统,包括平行光源1、增量式圆光栅尺2、光电传感器阵列3、信号处理单元4、角位移显示单元5以及高速电压比较器6;其中,增量式圆光栅尺2垂直平行光源1的照射方向;光电传感器阵列3放置于该增量式圆光栅尺2光栅栅距内,并呈阶梯型均匀分布;光电传感器个数n=(栅线长度H-光电传感器在栅线长度方向的宽度D)/(光电传感器在栅线长度方向的宽度D+光电传感器间相邻间隙L);错位角度x=(两条栅纹之间的角度w-第n个光电传感器所对应的角度q)/(光电传感器个数n-1);高速电压比较器6连接于光电传感器阵列3和信号处理单元4之间,对光电传感器阵列3输出信号进行整形以及对整形得出的方波信号进行电平转换;所述信号处理单元4与角位移显示单元5连接。Referring to the accompanying drawings 1-3, the angular displacement detection system of an incremental circular grating ruler described in this embodiment includes a parallel light source 1, an incremental circular grating ruler 2, a photoelectric sensor array 3, and a signal processing unit 4. The angular displacement display unit 5 and the high-speed voltage comparator 6; wherein, the incremental circular grating ruler 2 is perpendicular to the irradiation direction of the light source 1; the photoelectric sensor array 3 is placed in the grating pitch of the incremental circular grating ruler 2, And it is uniformly distributed in a stepwise shape; the number of photoelectric sensors n=(grid line length H-the width D of the photoelectric sensor in the length direction of the grid line)/(the width D of the photoelectric sensor in the length direction of the grid line D+the adjacent gap L between the photoelectric sensors) Misalignment angle x=(angle w between two grating lines-angle q corresponding to the nth photoelectric sensor)/(photoelectric sensor number n-1); High-speed voltage comparator 6 is connected to photoelectric sensor array 3 and Between the signal processing unit 4 , the output signal of the photoelectric sensor array 3 is reshaped and the square wave signal obtained by the reshaping is transformed; the signal processing unit 4 is connected with the angular displacement display unit 5 .

系统工作过程如下:The working process of the system is as follows:

S1、从平行光源1发出的光照射到增量式圆光栅尺2上;S1. The light emitted from the parallel light source 1 is irradiated onto the incremental circular grating scale 2;

S2、光电传感器阵列3接收光照,根据被光栅栅线遮挡与否输出高电平信号和低电平信号;S2. The photoelectric sensor array 3 receives light, and outputs a high-level signal and a low-level signal according to whether it is blocked by the grating line;

S3、高速电压比较器6对输出的电平信号进行整形以及电平转换;S3. The high-speed voltage comparator 6 performs shaping and level conversion on the output level signal;

S4、信号处理单元4接收已整形以及电平转换的信号,对其进行信号边沿检测、判断光栅运动方向并计数,得出角位移值;具体步骤为:S4. The signal processing unit 4 receives the shaped and level-converted signal, detects the signal edge, judges the moving direction of the grating and counts it, and obtains the angular displacement value; the specific steps are:

S41、假设增量式圆光栅尺2相对于光电传感器顺时针运动,初始时刻0,光电传感器在光栅栅距内的分布及其所对应的输出信号,如图4所示;S41. Assuming that the incremental circular grating ruler 2 moves clockwise relative to the photoelectric sensor, at the initial time 0, the distribution of the photoelectric sensor within the grating pitch and the corresponding output signal are shown in Figure 4;

S42、在运动的时刻1,光电传感器被光栅栅线遮挡,未被遮挡的光电传感器输出高电平,被遮挡的光电传感器输出低电平,本实施例为了检测方便,将信号进行反转,即被遮挡的传感器输出高电平,反之则输出低电平(以下各描述以此为准),如图5所示;S42. At moment 1 of the movement, the photoelectric sensor is blocked by the grating line, the unblocked photoelectric sensor outputs a high level, and the blocked photoelectric sensor outputs a low level. In this embodiment, for the convenience of detection, the signal is reversed, That is, the blocked sensor outputs a high level, otherwise it outputs a low level (the following descriptions shall prevail), as shown in Figure 5;

S43、继续正向运动至时刻2、3、4、5、6、7,所对应的信号分别如图6、图7、图8、图9、图10、图11所示;S43. Continue to move forward to time 2, 3, 4, 5, 6, 7, and the corresponding signals are shown in Fig. 6, Fig. 7, Fig. 8, Fig. 9, Fig. 10 and Fig. 11 respectively;

S44、根据相邻三个光电传感器输出信号的特点利用组合逻辑进行方向判断,组合逻辑电路如图21所示;假设光电传感器1、2、3的输出信号分别对应A、B、C;在顺时针运动的情况下,运动方向为如图12所示;反之,若光栅尺相对于传感器逆时针运动,则信号输出是从光电传感器编号n开始输出,运动方向为 S44, utilize combinational logic to carry out direction judgment according to the characteristics of adjacent three photoelectric sensor output signals, the combined logic circuit is as shown in Figure 21; Assume that the output signals of photoelectric sensors 1, 2, 3 correspond to A, B, C respectively; In the case of clockwise motion, the direction of motion is As shown in Figure 12; on the contrary, if the grating ruler moves counterclockwise relative to the sensor, the signal output starts from the number n of the photoelectric sensor, and the moving direction is

S45、假设运动过程中突然变向,同样利用组合逻辑进行方向判断,逆时针运动至时刻8、9、10、11、12、13、14,所对应的信号分别如图13、14、15、16、17、18、19所示;S45. Assuming a sudden change of direction during the movement, the combination logic is also used to judge the direction, and the counterclockwise movement reaches the time 8, 9, 10, 11, 12, 13, and 14. The corresponding signals are shown in Figures 13, 14, 15, and 16, 17, 18, 19;

S46、信号处理单元4利用边沿检测法进行脉冲边沿检测并计数,所需检测边沿为脉冲的上升边沿;光栅角位移值计算过程如下:S46, the signal processing unit 4 utilizes the edge detection method to detect and count the pulse edge, and the required detection edge is the rising edge of the pulse; the calculation process of the grating angular displacement value is as follows:

光栅顺时针运动时,角位移计算公式为:其中,为前一次的角位移值,ω为一个栅距所对应的角位移,N为一个栅距内所放置的传感器数量,M为计数的脉冲数目;光栅逆时针运动时, When the grating moves clockwise, the angular displacement The calculation formula is: in, is the previous angular displacement value, ω is the angular displacement corresponding to a grating pitch, N is the number of sensors placed within a grating pitch, M is the number of counted pulses; when the grating moves counterclockwise,

S5、角位移显示单元5显示信号处理单元4处理得出的位移值。S5. The angular displacement display unit 5 displays the displacement value processed by the signal processing unit 4 .

本实施例具有构成简单、检测成本低、测量精度高、检测速度快、实用性强等优点。This embodiment has the advantages of simple structure, low detection cost, high measurement accuracy, fast detection speed and strong practicability.

以上所述之实施例子只为本发明之较佳实施例,并非以此限制本发明的实施范围,故凡依本发明之形状、原理所作的变化,均应涵盖在本发明的保护范围内。The implementation examples described above are only preferred embodiments of the present invention, and are not intended to limit the scope of the present invention. Therefore, all changes made according to the shape and principle of the present invention should be covered within the scope of protection of the present invention.

Claims (6)

1.一种增量式圆光栅尺光栅角位移检测系统,其特征在于:包括平行光源(1)、增量式圆光栅尺(2)、光电传感器阵列(3)、信号处理单元(4)、角位移显示单元(5)以及高速电压比较器(6);其中,增量式圆光栅尺(2)垂直平行光源(1)的照射方向;光电传感器阵列(3)放置于该增量式圆光栅尺(2)光栅栅距内,并呈阶梯型均匀分布;高速电压比较器(6)连接于光电传感器阵列(3)和信号处理单元(4)之间,对光电传感器阵列(3)输出信号进行整形以及对整形得出的方波信号进行电平转换;所述信号处理单元(4)与角位移显示单元(5)连接,将计算得到的角位移值显示在角位移显示单元(5)上。1. An incremental circular grating ruler grating angular displacement detection system, characterized in that: comprising a parallel light source (1), an incremental circular grating ruler (2), a photoelectric sensor array (3), and a signal processing unit (4) , an angular displacement display unit (5) and a high-speed voltage comparator (6); wherein, the incremental circular grating scale (2) is perpendicular to the irradiation direction of the light source (1); the photoelectric sensor array (3) is placed on the incremental The circular grating scale (2) is within the grating pitch, and is evenly distributed in a stepped shape; the high-speed voltage comparator (6) is connected between the photoelectric sensor array (3) and the signal processing unit (4), and the photoelectric sensor array (3) The output signal is reshaped and the square wave signal obtained by reshaping is carried out level conversion; the signal processing unit (4) is connected with the angular displacement display unit (5), and the calculated angular displacement value is displayed on the angular displacement display unit ( 5) on. 2.根据权利要求1所述的一种增量式圆光栅尺光栅角位移检测系统,其特征在于:所述光电传感器个数n=(H-D)/(D+L)+1;错位角度x=(w-q)/(n-1);其中,q为第n个光电传感器所对应的角度,w为两条栅纹之间的角度;H为栅线长度;D为光电传感器在栅线长度方向的宽度;x为相邻两光电传感器在圆光栅尺旋转方向上错位角度;L为相邻间隙。2. A kind of incremental circular grating scale grating angular displacement detection system according to claim 1, is characterized in that: the number n=(H-D)/(D+L)+1 of described photoelectric sensor; Misalignment angle x =(w-q)/(n-1); where, q is the angle corresponding to the nth photoelectric sensor, w is the angle between two grating lines; H is the length of the grid line; D is the length of the photoelectric sensor at the grid line The width in the direction; x is the misalignment angle of two adjacent photoelectric sensors in the rotation direction of the circular scale; L is the adjacent gap. 3.一种用于权利要求1所述系统的增量式圆光栅尺光栅角位移检测方法,其特征在于:包括以下步骤:3. A method for detecting the angular displacement of the incremental circular grating ruler grating for the system according to claim 1, characterized in that: comprising the following steps: S1、从平行光源发出的光照射到增量式圆光栅尺上;S1. The light emitted from the parallel light source shines on the incremental circular grating scale; S2、光电传感器阵列接收光照,根据被光栅栅线遮挡与否输出高电平信号和低电平信号;S2. The photoelectric sensor array receives light, and outputs a high-level signal and a low-level signal according to whether it is blocked by the grating line; S3、高速电压比较器对输出的电平信号进行整形以及电平转换;S3. The high-speed voltage comparator performs shaping and level conversion on the output level signal; S4、信号处理单元接收已整形以及电平转换的信号,对其进行信号边沿检测、判断光栅运动方向并计数,得出角位移值;S4. The signal processing unit receives the shaped and level-converted signal, detects the signal edge, judges the moving direction of the grating and counts it, and obtains the angular displacement value; S5、角位移显示单元显示信号处理单元处理得出的角位移值。S5. The angular displacement display unit displays the angular displacement value processed by the signal processing unit. 4.根据权利要求3所述的一种增量式圆光栅尺光栅角位移检测方法,其特征在于:所述信号处理单元利用边沿检测法进行脉冲边沿检测并计数,所需检测边沿为脉冲的上升边沿。4. A kind of incremental circular grating ruler grating angular displacement detection method according to claim 3, is characterized in that: described signal processing unit utilizes edge detection method to carry out pulse edge detection and counting, and the required detection edge is pulse rising edge. 5.根据权利要求3所述的一种增量式圆光栅尺光栅角位移检测方法,其特征在于:所述步骤S4中运动方向利用组合逻辑根据相邻三个光电传感器分别输出的信号A、B、C的特点进行判断;顺时针运动的情况下,运动方向为逆时针运动的情况下,运动方向为 5. A kind of incremental circular grating ruler grating angular displacement detection method according to claim 3, is characterized in that: in described step S4, direction of motion utilizes combinational logic to output respectively according to adjacent three photoelectric sensors A, The characteristics of B and C are judged; in the case of clockwise movement, the direction of movement is In the case of counterclockwise movement, the direction of movement is 6.根据权利要求3所述的一种增量式圆光栅尺光栅角位移检测方法,其特征在于:所述光栅角位移值计算过程如下:6. A kind of incremental circular grating ruler grating angular displacement detection method according to claim 3, is characterized in that: described grating angular displacement value calculation process is as follows: 光栅顺时针运动时,角位移计算公式为:其中,为前一次的角位移值,ω为一个栅距所对应的角位移,N为一个栅距内所放置的传感器数量,M为计数的脉冲数目;光栅逆时针运动时, When the grating moves clockwise, the angular displacement The calculation formula is: in, is the previous angular displacement value, ω is the angular displacement corresponding to a grating pitch, N is the number of sensors placed within a grating pitch, M is the number of counted pulses; when the grating moves counterclockwise,
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Application publication date: 20171208