CN107443543A - A kind of cold isostatic compaction and preparation method of ITO rotary targets - Google Patents
A kind of cold isostatic compaction and preparation method of ITO rotary targets Download PDFInfo
- Publication number
- CN107443543A CN107443543A CN201710708859.1A CN201710708859A CN107443543A CN 107443543 A CN107443543 A CN 107443543A CN 201710708859 A CN201710708859 A CN 201710708859A CN 107443543 A CN107443543 A CN 107443543A
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- China
- Prior art keywords
- ito
- rotary targets
- cold isostatic
- powder
- tubulose
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B3/00—Producing shaped articles from the material by using presses; Presses specially adapted therefor
- B28B3/003—Pressing by means acting upon the material via flexible mould wall parts, e.g. by means of inflatable cores, isostatic presses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B11/00—Apparatus or processes for treating or working the shaped or preshaped articles
- B28B11/24—Apparatus or processes for treating or working the shaped or preshaped articles for curing, setting or hardening
- B28B11/243—Setting, e.g. drying, dehydrating or firing ceramic articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B17/00—Details of, or accessories for, apparatus for shaping the material; Auxiliary measures taken in connection with such shaping
- B28B17/02—Conditioning the material prior to shaping
- B28B17/026—Conditioning ceramic materials
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- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Structural Engineering (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Physical Vapour Deposition (AREA)
Abstract
A kind of cold isostatic pressing method of ITO rotary targets, first ITO powder is fitted into mould, pressurized treatments close 1-20 minutes its internal void under 50-200MPa pressure, are removed from the molds are crushed and crossed 40-100 mesh sieves afterwards, it is 2.2-2.8g/cm to form apparent density3The solid powders of ITO, then the solid powders of ITO are fitted into tubulose flexible die again, ITO tubulose biscuits are being made through isostatic cool pressing.Before ITO powder loads mould cold isostatic compaction, first to ITO powder pressurized treatments to improve its compactness, the ITO powders for crushing to obtain afterwards are full particle, and the grading effect of particle is good, and apparent density is big, can reach 2.2 ~ 2.8g/cm3, can effectively improve the mold filling performance of ITO powder.The biscuit obtained after isostatic pressed, density is high, and relative density can reach more than 72%, and intensity is big, is not easy to ftracture in transport, process.
Description
Technical field
The present invention relates to a kind of technology of preparing of ceramic rotary target, particularly a kind of cold isostatic compaction of ITO rotary targets
And preparation method.
Background technology
In rotary magnetic control sputtering device, the inner side of target is provided with fixed magnetic patch, can rotate while sputter, make
Obtain target surface uniformly to be etched by 360 °, therefore, the service efficiency of rotary target can reach more than 70%, be 2 times of flat target（20~
30%）.Moreover, compared with traditional flat target, the power that rotary target per unit area can input becomes big, so as to obtain compared with
High film forming speed.
In early days, the preparation method of ITO rotary targets mainly has plasma spraying method and hot isostatic pressing method, and both approaches use
Equipment it is expensive, the ITO rotations target density of preparation is relatively low, during sputtering, phenomena such as easily producing cracking, paradoxical discharge and dross.
In order to obtain the ITO rotary targets of high-compactness, the preparation method of main flow is at present：Powder processed, shaping and sintering.The side of forming of green body
Method generally has two kinds：Injection forming and cold isostatic compaction.Injection forming is that powder is made into slurry, reinjects in mould and is allowed to
As biscuit.Make the more difficult highdensity biscuit of acquisition in this way, be unfavorable for sintering.Cold isostatic compaction is to load powder
Flexible die, then be placed in isostatic cool pressing equipment, biscuit is obtained under high pressure.The pressure that cold isostatic compaction uses is higher, and one
As be 100 ~ 500MPa, therefore obtained biscuit density is higher for injection forming, it is easier to obtains high-compactness
Sintered body.
ITO rotary targets biscuit is hollow and thin-walled structure, easily in transport, is ftractureed in process, thus to properties of powder, into
The factors dictates such as type technique are higher.Common ITO powders grading effect is bad, and apparent density is relatively low, generally 1.65 g/cm3
Hereinafter, by its performance impact, the problem of biscuit through cold isostatic compaction still has easy cracking, it is therefore prevented that ITO biscuits
Cracking during shaping, transport, processing etc., it is the Key technique problem that moulding process needs to solve.
The content of the invention
The invention aims to effectively solve problem of Cracking of the ITO biscuits during shaping, transport, processing etc.,
A kind of cold isostatic compaction and preparation method of ITO rotary targets are provided.
The present invention is that technical scheme is used by solving above-mentioned technical problem：A kind of isostatic cool pressing of ITO rotary targets into
Type method, first ITO powder is fitted into mould, pressurized treatments make its internal void for 1-20 minutes under 50-200MPa pressure
Closing, it is removed from the molds is crushed and crossed 40-100 mesh sieves afterwards, it is 2.2-2.8g/cm to form apparent density3ITO
Solid powder, then the solid powders of ITO are fitted into tubulose flexible die again, ITO tubulose biscuits are made through isostatic cool pressing.
Further, the ITO powder is bag-type dust during ITO nano powders, ITO pelletizings or ITO powder mist projection granulatings
The fine powder that device is collected.
Further, the mass ratio of indium oxide and tin oxide is In in the ITO powder2O3:SnO2=90—97:3—10。
Further, the material of the tubular flexible mould is any one in polyurethane, silicon rubber, PVC, neoprene
Kind.
Further, the pressure of the isostatic cool pressing is 150-400MPa.
A kind of preparation method of ITO rotary targets, oxygen atmosphere sintering will be put into by manufactured ITO tubuloses biscuit according to the method described above
In stove, the pressure that oxygen keeps 0.3-0.8MPa is passed through, ITO rotary targets are made in heat preservation sintering.
Further, described sintering temperature is 1500-1800 DEG C, and soaking time is 20-60 hours.
The beneficial effects of the invention are as follows：Before ITO powder loads mould cold isostatic compaction, first to ITO powder pressurized treatments
To improve its compactness, the ITO powders for crushing to obtain afterwards are full particle, and the grading effect of particle is good, and apparent density is big,
It can reach 2.2 ~ 2.8g/cm3, can effectively improve the mold filling performance of ITO powder.Tubulose flexible die, filling are loaded using the powder
Compactness is high, and uniformity is good, can prevent the cracking of ITO biscuits during isostatic cool pressing.The biscuit obtained after isostatic pressed, it is close
Degree is high, and relative density can reach more than 72%（Relative to theoretical value）, intensity is big, is not easy to ftracture in transport, process.Should
Biscuit is sintered the ITO rotary targets that can obtain relative density more than 99% in oxygen atmosphere sintering stove.
It is wider to the adaptability of raw material because the present invention carries out pressurized treatments to ITO powder in advance, ITO nanometers can be used
Powder, ITO pelletizings, or the waste material reclaimed during mist projection granulating, as collected in cyclone separator or sack cleaner
Thinner ITO pelletizings.These waste materials can effectively be recycled using the method for the present invention, reduce material consumption, drop
Low production cost.
Embodiment
Embodiments of the present invention are illustrated with reference to embodiments.
The cold isostatic pressing method that the present invention uses is compared with previous methods, ITO powder loading flexible die is cold etc.
Before hydrostatic profile, first ITO powder is fitted into mould, pressurized treatments certain time, makes powder under 50-200MPa pressure
Particle is mutually assembled, and internal void, which is pressurized, to be closed, and to improve compactness, usual pressurizing time is between 1-20 minutes.Add
Raw material is removed from the molds after pressure processing and crushed, feed particles are easier never blind bore gap part in crushing process
Division, thus it is full particle to crush obtained ITO powders.40-100 mesh sieves are crossed after crushing, forming apparent density is
2.2—2.8g/cm3ITO powders, then ITO powders are fitted into tubulose flexible die again, ITO is being made through isostatic cool pressing
Tubulose biscuit.
ITO powder used can be ITO nano powders, ITO pelletizings, or during mist projection granulating, cyclone separator or
The thinner ITO pelletizings collected in sack cleaner.Wherein, the mass ratio of indium oxide and tin oxide is In2O3:SnO2=90~
97:3~10.Pressurized treatments can use hydraulic press, cold isostatic press etc., and in the case of hydraulic press, ITO powder is fitted into punching block
Suppressed；In the case of cold isostatic press, ITO powder, which is fitted into flexible die, to be suppressed.The shape and shape of mould therefor
State does not limit, and can be circle, rectangle, rhombus, plate shaped, tubular, square-tube-shaped, cylinder etc..
The material of tubular flexible mould used in isostatic cool pressing is any in polyurethane, silicon rubber, PVC, neoprene
One kind, the pressure of isostatic cool pressing is 150-400MPa.
Further to prepare ITO rotary targets, oxygen atmosphere sintering will be put into by manufactured ITO tubuloses biscuit according to the method described above
In stove, the oxygen of purity more than 99.99% is passed through, keeps 0.3-0.8MPa pressure, is warming up to 1500-1800 DEG C, insulation
ITO rotary targets, relative density more than 99% is made in sintering within 20-60 hours.Obtained ITO rotary targets carry out sharp processing, then
It is bound to titanium tube outer surface.
Embodiment 1
A kind of cold isostatic pressing method of ITO rotary targets, step are as follows：
By ITO pelletizings（In2O3:SnO2=90:10）It is put into the punching block of hydraulic press（300×300mm）In, pressure is adjusted to 60MPa,
Carry out pressurized treatments 2 minutes.Crushed after pressurized treatments, cross 60 mesh mesh screens.Obtained ITO powder is fitted into tubulose polyurethane mould,
Cold isostatic compaction is carried out under 180MPa pressure, obtains the ITO tubulose biscuits of relative density 69%.Biscuit is put into oxygen
In atmosphere sintering furnace, the oxygen that purity is 99.99% is passed through, holding pressure is 0.5MPa, is warming up to 1600 DEG C, is incubated 40 hours.
The target of sintering, relative density 99.55%.Obtained target is processed into required size and precision, binding
In the titanium tube surface that purity is 99.99%.
Embodiment 2
A kind of cold isostatic pressing method of ITO rotary targets, step are as follows：
By ITO nano powders（In2O3:SnO2=95:5）It is fitted into aluminium foil bag, sack is sealed, is put into isostatic pressing machine,
Under 150MPa pressure, pressurized treatments are carried out 6 minutes, crushed afterwards, cross 80 mesh mesh screens.Obtained ITO powder loads tubulose silica gel
In mould, cold isostatic compaction is carried out under 250MPa pressure, obtains the ITO tubulose biscuits of relative density 71%.Biscuit is put
Enter in oxygen atmosphere sintering stove, be passed through the oxygen that purity is 99.99%, holding pressure is 0.6MPa, is warming up to 1700 DEG C, insulation 30
Hour.
The target of sintering, relative density 99.63%.Obtained target is processed into required size and precision, binding
In the titanium tube surface that purity is 99.99%.
Embodiment 3
A kind of cold isostatic pressing method of ITO rotary targets, step are as follows：
During mist projection granulating, the thinner ITO pelletizings collected in cyclone separator or sack cleaner（In2O3:SnO2=
97:3）, load column flexible die, be put into isostatic pressing machine, under 180MPa pressure, carry out pressurized treatments 15 minutes, it
Take out and crush afterwards, cross 60 mesh mesh screens.Obtained ITO powder is fitted into tubulose silica gel mould, is carried out under 250MPa pressure cold etc.
Hydrostatic profile, obtain the ITO tubulose biscuits of relative density 74%.Biscuit is put into oxygen atmosphere sintering stove, being passed through purity is
99.99% oxygen, holding pressure are 0.7MPa, are warming up to 1800 DEG C, are incubated 20 hours.
The target of sintering, relative density 99.72%.Obtained target is processed into required size and precision, binding
In the titanium tube surface that purity is 99.99%.
Embodiment 4
A kind of cold isostatic pressing method of ITO rotary targets, step are as follows：
By ITO pelletizings（In2O3:SnO2=90:10）It is put into the punching block of hydraulic press（300×300mm）In, pressure is adjusted to 50MPa,
Carry out pressurized treatments 1 minute.Crushed after pressurized treatments, cross 100 mesh mesh screens.Obtained ITO powder is fitted into tubulose polyurethane mould,
Cold isostatic compaction is carried out under 250MPa pressure, obtains the ITO tubulose biscuits of relative density 68%.Biscuit is put into oxygen
In atmosphere sintering furnace, the oxygen that purity is 99.99% is passed through, holding pressure is 0.3MPa, is warming up to 1500 DEG C, is incubated 60 hours.
The target of sintering, relative density 99.58%.Obtained target is processed into required size and precision, binding
In the titanium tube surface that purity is 99.99%.
Embodiment 5
A kind of cold isostatic pressing method of ITO rotary targets, step are as follows：
By ITO nano powders（In2O3:SnO2=97:3）It is fitted into aluminium foil bag, sack is sealed, is put into isostatic pressing machine,
Under 200MPa pressure, pressurized treatments are carried out 20 minutes, crushed afterwards, cross 40 mesh mesh screens.Obtained ITO powder loads tubulose silica gel
In mould, cold isostatic compaction is carried out under 250MPa pressure, obtains the ITO tubulose biscuits of relative density 71%.Biscuit is put
Enter in oxygen atmosphere sintering stove, be passed through the oxygen that purity is 99.99%, holding pressure is 0.8MPa, is warming up to 1700 DEG C, insulation 30
Hour.
The target of sintering, relative density 99.63%.Obtained target is processed into required size and precision, binding
In the titanium tube surface that purity is 99.99%.
Embodiment 6
A kind of cold isostatic pressing method of ITO rotary targets, by ITO powder（In2O3:SnO2=90:10）Load tubulose polyurethane mould
In tool, it is placed under 300MPa pressure and carries out cold isostatic compaction, selects in forming process or transportation after shaping
Middle cracking, the base substrate of deformation, are crushed, and cross 40 mesh mesh screens.Obtained ITO powder is fitted into tubulose polyurethane mould,
Cold isostatic compaction is carried out under 300MPa pressure, obtains the ITO tubulose biscuits of relative density 68%.Biscuit is put into oxygen atmosphere
In sintering furnace, the oxygen that purity is 99.99% is passed through, holding pressure is 0.7MPa, is warming up to 1600 DEG C, is incubated 40 hours.
The target of sintering, relative density 99.77%.Obtained target is processed into required size and precision, binding
In the titanium tube surface that purity is 99.99%.
Claims (7)
- A kind of 1. cold isostatic pressing method of ITO rotary targets, it is characterised in that：First ITO powder is fitted into mould, 50- Pressurized treatments close 1-20 minutes its internal void under 200MPa pressure, are removed from the molds are crushed and mistake afterwards 40-100 mesh sieves, it is 2.2-2.8g/cm to form apparent density3The solid powders of ITO, then the solid powders of ITO are loaded again In tubular flexible mould, ITO tubulose biscuits are made through isostatic cool pressing.
- A kind of 2. cold isostatic pressing method of ITO rotary targets as claimed in claim 1, it is characterised in that：The ITO powder is The fine powder that sack cleaner is collected during ITO nano powders, ITO pelletizings or ITO powder mist projection granulatings.
- A kind of 3. cold isostatic pressing method of ITO rotary targets as claimed in claim 2, it is characterised in that：In the ITO powder The mass ratio of indium oxide and tin oxide is In2O3:SnO2=90—97:3—10。
- A kind of 4. cold isostatic pressing method of ITO rotary targets as claimed in claim 1, it is characterised in that：The tubulose is soft Property mould material be polyurethane, silicon rubber, PVC, any one in neoprene.
- A kind of 5. cold isostatic pressing method of ITO rotary targets as claimed in claim 1, it is characterised in that：Isostatic cool pressing Pressure is 150-400MPa.
- A kind of 6. preparation method of ITO rotary targets, it is characterised in that：It will be managed according to ITO made of any one of claim 1-5 Shape biscuit is put into oxygen atmosphere sintering stove, is passed through the pressure that oxygen keeps 0.3-0.8MPa, and ITO rotary targets are made in heat preservation sintering.
- A kind of 7. preparation method of ITO rotary targets as claimed in claim 6, it is characterised in that：Described sintering temperature is 1500-1800 DEG C, soaking time is 20-60 hours.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710708859.1A CN107443543A (en) | 2017-08-17 | 2017-08-17 | A kind of cold isostatic compaction and preparation method of ITO rotary targets |
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| CN201710708859.1A CN107443543A (en) | 2017-08-17 | 2017-08-17 | A kind of cold isostatic compaction and preparation method of ITO rotary targets |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111152333A (en) * | 2018-11-08 | 2020-05-15 | 唐安泰 | Cold isostatic pressing method based on rigid mold and application thereof |
| CN112919900A (en) * | 2021-02-02 | 2021-06-08 | 株洲火炬安泰新材料有限公司 | Target material forming and pressing method based on cold isostatic pressing |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04127998A (en) * | 1990-05-29 | 1992-04-28 | Nkk Corp | Method for molding powder of metal, ceramics, or the like |
| CN101786885A (en) * | 2009-12-24 | 2010-07-28 | 中国船舶重工集团公司第七二五研究所 | Method for controlling grain size to produce ITO target |
| CN103693945A (en) * | 2012-09-28 | 2014-04-02 | 柳州华锡铟材料有限责任公司 | Method for producing ITO target material for touch screens |
| CN104592964A (en) * | 2015-01-07 | 2015-05-06 | 山东理工大学 | Method for preparing oil well cementing test block resistant to high temperatures and high pressures from silicozirconium ceramic microspheres |
| CN105712719A (en) * | 2016-04-19 | 2016-06-29 | 北京冶科纳米科技有限公司 | Normal-pressure sintering and manufacturing method for large-sized high-density fine-grain ITO target material |
| CN105712703A (en) * | 2014-12-05 | 2016-06-29 | 广东先导稀材股份有限公司 | Preparation method of ITO target material with high purity and high density |
| CN105801091A (en) * | 2016-02-29 | 2016-07-27 | 芜湖映日科技有限公司 | Preparation technology of rotary ITO target material |
| CN106830925A (en) * | 2016-12-20 | 2017-06-13 | 西北稀有金属材料研究院 | The method that sieving improves ito powder apparent density and tap density is crushed by biscuit |
-
2017
- 2017-08-17 CN CN201710708859.1A patent/CN107443543A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04127998A (en) * | 1990-05-29 | 1992-04-28 | Nkk Corp | Method for molding powder of metal, ceramics, or the like |
| CN101786885A (en) * | 2009-12-24 | 2010-07-28 | 中国船舶重工集团公司第七二五研究所 | Method for controlling grain size to produce ITO target |
| CN103693945A (en) * | 2012-09-28 | 2014-04-02 | 柳州华锡铟材料有限责任公司 | Method for producing ITO target material for touch screens |
| CN105712703A (en) * | 2014-12-05 | 2016-06-29 | 广东先导稀材股份有限公司 | Preparation method of ITO target material with high purity and high density |
| CN104592964A (en) * | 2015-01-07 | 2015-05-06 | 山东理工大学 | Method for preparing oil well cementing test block resistant to high temperatures and high pressures from silicozirconium ceramic microspheres |
| CN105801091A (en) * | 2016-02-29 | 2016-07-27 | 芜湖映日科技有限公司 | Preparation technology of rotary ITO target material |
| CN105712719A (en) * | 2016-04-19 | 2016-06-29 | 北京冶科纳米科技有限公司 | Normal-pressure sintering and manufacturing method for large-sized high-density fine-grain ITO target material |
| CN106830925A (en) * | 2016-12-20 | 2017-06-13 | 西北稀有金属材料研究院 | The method that sieving improves ito powder apparent density and tap density is crushed by biscuit |
Non-Patent Citations (1)
| Title |
|---|
| 王树楷: "《铟冶金》", 30 April 2006, 冶金工业出版社 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111152333A (en) * | 2018-11-08 | 2020-05-15 | 唐安泰 | Cold isostatic pressing method based on rigid mold and application thereof |
| CN112919900A (en) * | 2021-02-02 | 2021-06-08 | 株洲火炬安泰新材料有限公司 | Target material forming and pressing method based on cold isostatic pressing |
| CN112919900B (en) * | 2021-02-02 | 2022-12-02 | 株洲火炬安泰新材料有限公司 | Target material forming and pressing method based on cold isostatic pressing |
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Application publication date: 20171208 |