CN107404329A - The self-powered microwave receiver front end of internet of things oriented - Google Patents
The self-powered microwave receiver front end of internet of things oriented Download PDFInfo
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- CN107404329A CN107404329A CN201710697256.6A CN201710697256A CN107404329A CN 107404329 A CN107404329 A CN 107404329A CN 201710697256 A CN201710697256 A CN 201710697256A CN 107404329 A CN107404329 A CN 107404329A
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
- H04B1/06—Receivers
- H04B1/16—Circuits
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
- H04B1/06—Receivers
- H04B1/10—Means associated with receiver for limiting or suppressing noise or interference
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
- H04B1/06—Receivers
- H04B1/16—Circuits
- H04B1/1607—Supply circuits
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Abstract
The self-powered microwave receiver front end of internet of things oriented of the present invention uses microwave antenna reception signal by microwave antenna, the signal received accesses the standing wave energy collection tunable filter based on cantilever beam and is filtered, cantilever beam perseverance width device, low-noise amplifier, the cantilever beam frequency mixer of oscillation signals leak collection of energy that the excess energy of Autonomous test is collected then are sequentially connected, finally gives intermediate frequency output.AC/DC modular converters are by the cantilever beam perseverance width device that the standing wave energy based on cantilever beam collects tunable filter, the excess energy of Autonomous test is collected and three kinds of energy conversions that the cantilever beam frequency mixer of oscillation signals leak collection of energy is collected into being stored among battery after DC voltage, after rechargeable battery is in parallel with dc source, powered for active circuit.This structure can collect the energy of standing wave energy, unnecessary energy and leakage, improve electromagnetic compatible environment, protect low-noise amplifier, prevent local oscillated signal self-mixing, reduce power consumption, improve the stability of system.
Description
Technical field
The present invention proposes a kind of self-powered microwave receiver front end of internet of things oriented, belongs to microelectromechanical systems
(MEMS) technical field.
Background technology
Microwave receiver front end, generally comprise microwave antenna, microwave filter, low-noise amplifier, frequency mixer, local shake
Swing device and intermediate-frequency filter.In recent years, Internet of Things development is swift and violent, and the socio-economic development and the level of IT application of whole country are carried
Rising has great significance.One of core technology as Internet of Things, some defects that traditional microwave receiver front end has
Limit its application in Internet of Things, for example the passband central frequency of filters internal is non-adjustable, outside wave filter frequency range
Microwave signal can form standing wave, cause very strong electromagnetic interference；Gain using AGC technical controlling low-noise amplifiers makes output
The control mode of signal stabilization, when the signal that antenna receives becomes big suddenly, easily cause internal components and burn, reliability is not
It is high；In addition, part local oscillated signal leaks into low-noise amplifier through being mixed device, then it is blocked producing back wave, this
Back wave is mixed with local oscillated signal again, then can produce direct current signal in the output end of frequency mixer, can not only cause direct current
Imbalance, can also increase DC power.In recent years, with the fast development of MEMS technology, and to MEMS energy collection technologies and
MEMS filter technology conducts in-depth research so that the self-powered microwave receiver front end of internet of things oriented has what is realized
May.
The content of the invention
Technical problem：It is an object of the invention to provide a kind of self-powered microwave receiver front end of internet of things oriented.Receive
Machine uses microwave antenna reception signal, accesses the collection tunable filter of the standing wave energy based on cantilever beam and is filtered, reaches simultaneously
Collected to standing wave energy, reduce the purpose of standing wave electromagnetic interference.What the excess energy that filtered signal enters Autonomous test was collected
Cantilever beam perseverance width device, excess energy is collected again, and realize that output signal is constant by Autonomous test, while it is low to change rear end
The direct current biasing point of noise amplifier so that the AGC modules of complexity are no longer needed in low-noise amplifier, low noise is improved and puts
The linearity of big device, microwave antenna it is sudden receive super large microwave signal when, can effectively act as protecting low noise to put
The effect of big device.The cantilever beam perseverance width device that the excess energy of Autonomous test is collected exports constant microwave signal and enters low noise amplification
Device amplifies, and exaggerated microwave signal enters the cantilever beam frequency mixer of oscillation signals leak collection of energy, is realizing conventional mixer
While, DC maladjustment caused by local oscillated signal self-mixing is eliminated, and collect the local oscillations letter of mixing structure leakage
Number energy, the signal after mixing connects intermediate-frequency filter, finally realizes that intermediate frequency exports.Three kinds of energy being collected above simultaneously by
AC/DC modular converters are stored in rechargeable battery after being converted into DC voltage, after rechargeable battery is in parallel with dc source with it is active
Circuit is connected, and realizes the self-powered of active circuit.
Technical scheme：Connect in order to solve the above technical problems, the present invention proposes a kind of self-powered microwave of internet of things oriented
Receipts machine front end.The self-powered microwave receiver front end of the internet of things oriented includes:Microwave antenna, the standing wave energy based on cantilever beam
Collect tunable filter, rechargeable battery, Autonomous test excess energy collect cantilever beam perseverance width device, low-noise amplifier, vibration
Cantilever beam frequency mixer, local oscillator, intermediate-frequency filter, the dc source of signals leakiness collection of energy.
Microwave antenna, for receiving microwave signal.
Standing wave energy based on cantilever beam collects tunable filter, is by LC variable band-pass filters, the first LC adjustable bands
It is defeated to hinder wave filter, the 2nd LC tunable band-stop filters, the first AC/DC modular converters, the 2nd AC/DC modular converters, microwave signal
Inbound port and microwave signal output port are formed.Wherein the first LC tunable band-stop filters and the 2nd LC tunable band-stop filter knots
Structure is just the same, and the frequency domain of its stopband is identical with the frequency domain of LC bandpass filter passbands, forms complementary, the first LC tunable band-stops filter
The passband frequency domain of ripple device and the 2nd LC tunable band-stop filters is identical with the frequency domain of standing wave signal, can collect the filter of LC tunable band-pass
The standing wave energy at ripple device both ends, and can realize that filter filtering frequency range is adjustable.
Rechargeable battery is by the first AC/DC modular converters, the 2nd AC/DC modular converters, the 3rd AC/DC modular converters, the 4th
The DC voltage energy storage that AC/DC modular converters and AC/DC modular converters obtain is among battery, while with dc source simultaneously
Connection, self-powered is realized to active circuit.
The cantilever beam perseverance width device that the excess energy of Autonomous test is collected, is by 4 coplanar waveguide structures, 2 cantilever beams and 4
Pole plate is formed.The input of main signal line and ground wire form CPW as signal input part, first pair of cantilever beam respectively across
It is hanging between signal wire on CPW two ground wires, there are two pole plates to be located at two first respectively between CPW signal wire and ground wire
Below cantilever beam, capacitive sensor structure is formed；In the middle part of main signal line, second pair of cantilever beam respectively with the first anchor area and second
Anchor area forms cantilever beam and is suspended from above signal wire, forms coupled capacitor structure, the first anchor area and the second anchor area of the second cantilever beam
Signal wire of transmission line CPW, the Liang Gemao area respectively as coupling branch road of two branch roads, the second cantilever beam lower section are formed with ground wire
There are two drop-down pole plates between anchor area and main signal line respectively, the CPW that the first anchor area and the second anchor area are formed with ground wire connects respectively
3rd AC/DC modular converters and the 4th AC/DC modular converters, collect unnecessary microwave energy；The output end of main signal line and ground
Line forms CPW as signal output part.The cantilever beam perseverance width device that the excess energy of Autonomous test is collected is at the microwave signal of input
The signal output of fixed amplitude is managed into, is effectively protected late-class circuit, while the straight of rear end low-noise amplifier need not be changed
Flow bias point so that the AGC modules of complexity are no longer needed in low-noise amplifier, improve the linearity of low-noise amplifier.
Low-noise amplifier, amplify the microwave letter of the stabilization of the cantilever beam perseverance width device output of the excess energy collection of Autonomous test
Number, and access the cantilever beam frequency mixer of oscillation signals leak collection of energy.
The cantilever beam frequency mixer of oscillation signals leak collection of energy, it is by bandpass filter, AC/DC modular converters and mixing
Structure is formed.Mixing structure is three-port network, connects signal input port, local oscillator and mixed frequency signal output respectively
Port, the input of bandpass filter are connected with being mixed the input of structure, and local oscillator shakes with being mixed the local of structure
Swing signal input port to be connected, the output termination AC/DC modular converters of bandpass filter, AC/DC modular converters and rechargeable battery
It is connected and realizes collection of energy.The wherein centre frequency of bandpass filter and the frequency of local oscillated signal is identical, can collect by
The energy that local oscillated signal leaks through being mixed structure, solves the problems, such as the local oscillated signal self-mixing of leakage, and collect
By local oscillated signal through being mixed the energy of structure leakage；And input signal belongs to the stopband frequency domain of bandpass filter, its frequency
Rate is in beyond the passband of bandpass filter, will not be directly entered mixing structure by bandpass filter.
Local oscillator, produce local oscillated signal.
Intermediate-frequency filter, intermediate-freuqncy signal is exported after filtering.
Beneficial effect:The present invention has advantages below relative to existing microwave receiver：
1. include the standing wave energy based on cantilever beam in the self-powered microwave receiver front end of internet of things oriented of the present invention
Collect tunable filter.Described wave filter only needs the size of the drop-down driving voltage of simple control condenser type cantilever beam,
Can adjusts the filtering of wave filter, not only simple to operate, and positive effect.In addition, two structures in the present invention are complete
The frequency domain of the same LC tunable band-stop filter stopbands is identical with the frequency domain of LC bandpass filter passbands, forms complementation, LC is adjustable
Microwave signal outside the passband frequency range of bandpass filter forms standing wave, the first LC tunable band-stop filters and the 2nd LC at its both ends
The passband frequency range of tunable band-stop filter is identical with standing wave signal frequency range, can collect staying for LC variable band-pass filters both ends
Ripple, and DC voltage is converted into using AC/DC modular converters, it is ultimately stored in rechargeable battery, while filtering, also improves
The electromagnetic compatible environment of circuit；
What 2. the excess energy that the self-powered microwave receiver front end of internet of things oriented of the present invention includes Autonomous test was collected
Cantilever beam perseverance width device.Described permanent width device is only needed under additional direct voltage drive, and control cantilever beam is to different input power
The degree of coupling of signal, you can ensure the signal of output constant amplitude, while the signal coupled is converted to direct current by AC/DC modules
Voltage, it is ultimately stored in rechargeable battery.When microwave antenna receives the signal of super large, microwave signal of the permanent width device input
The signal output of fixed amplitude is processed into, rear class amplifier circuit in low noise is effectively protected, before improving microwave receiver
The anti-of end burns level, in addition, need not change the direct current biasing point of rear end low-noise amplifier so that in low-noise amplifier not
The AGC modules of complexity are needed again, improve the linearity of low-noise amplifier；
3. the self-powered microwave receiver front end of internet of things oriented of the present invention includes oscillation signals leak collection of energy
Cantilever beam frequency mixer.Described frequency mixer has added bandpass filter, the center frequency of bandpass filter before traditional mixing structure
Rate is identical with the frequency of local oscillated signal, can be by the energy absorption leaked by local oscillated signal by mixing structure, can
By by energy absorption of the local oscillated signal by mixing structure leakage, to solve the local oscillated signal self-mixing of leakage
Problem, and input signal belongs to the stopband frequency domain of bandpass filter, its frequency is in beyond the passband of bandpass filter, Bu Huitong
Bandpass filter is crossed, is directly entered mixing structure, this, which is designed, causes the energy of leakage to be collected, and is finally stored in charging electricity
Chi Zhong, reduce DC power；
4. rechargeable battery is in parallel with dc source, self-powered is realized to active circuit.
Brief description of the drawings:
Fig. 1 is the theory diagram of the self-powered microwave receiver front end of internet of things oriented of the present invention.
Fig. 2 is the structured flowchart that the standing wave energy based on cantilever beam collects tunable filter.
Fig. 3 is the schematic diagram of LC variable band-pass filters and bandpass filter 33.
Fig. 4 is the schematic diagram of the first LC tunable band-stop filters and the 2nd LC tunable band-stop filters 11.
Fig. 5 is in LC variable band-pass filters, the first LC tunable band-stop filters and the 2nd LC tunable band-stop filters
The top view of condenser type cantilever beam.
Fig. 6 is in LC variable band-pass filters, the first LC tunable band-stop filters and the 2nd LC tunable band-stop filters
BB ' the faces profile of condenser type cantilever beam.
Fig. 7 is the top view for the cantilever beam perseverance width device that the excess energy of Autonomous test is collected.
Fig. 8 is the profile in the cantilever beam perseverance width device AA ' directions that the excess energy of Autonomous test is collected.
Fig. 9 is the profile in the cantilever beam perseverance width device BB ' directions that the excess energy of Autonomous test is collected.
Figure 10 is the structure chart of the cantilever beam frequency mixer of oscillation signals leak collection of energy.
The theory diagram of the self-powered microwave receiver front end of internet of things oriented includes：Microwave antenna 1, based on cantilever beam
Standing wave energy collect tunable filter 2, rechargeable battery 3, the cantilever beam perseverance width device 4 that the excess energy of Autonomous test is collected, low noise
Acoustic amplifier 5, frequency mixer 6, local oscillator 7, intermediate-frequency filter 8, intermediate frequency output 9, dc source 32；Staying based on cantilever beam
Wave energy collects tunable filter 2 by LC variable band-pass filters, the first LC tunable band-stop filters 10, the 2nd LC tunable band-stops
Wave filter 11, the first AC/DC modular converter 12-1, the 2nd AC/DC modular converter 12-2, microwave signal input port, microwave letter
Number output port, LC variable band-pass filters, bandpass filter 33 and LC tunable band-stop filters are by planar inductor and electric capacity
Formula cantilever beam is formed；Condenser type cantilever beam by silicon substrate 20, pull-down electrode 13, first paragraph transmission line 15, second segment transmission line 14,
Second silicon nitride medium floor 16, the first silicon nitride medium floor 17, anchor area 18 and cantilever beam 19 are formed；The excess energy of Autonomous test is received
The cantilever beam perseverance width device 4 of collection is by main signal line 21, the first ground wire 22-1, the second ground wire 22-2, the 3rd ground wire 22-3, the 4th ground wire
22-4, the first cantilever beam 23, the first capacitor plate 24-1, the second capacitor plate 24-2, the second cantilever beam 25, the first anchor area 26-
1, the second anchor area 26-2, first pull down pole plate 27-1, the second drop-down pole plate 27-2, Si3N4Dielectric layer 28-1, Si3N4Dielectric layer
28-2, SiO2Layer 29, silicon substrate 30, the 3rd AC/DC modular converters 31-1 and the 4th AC/DC modular converters 31-2 are formed；Vibration
The cantilever beam frequency mixer 6 of signals leakiness collection of energy is by signal input port 36, mixed frequency signal output port 37, bandpass filter
33, AC/DC modular converters 34, are mixed structure 38 and local oscillated signal input port 35 is formed.
Embodiment
The specific embodiment of the self-powered microwave receiver front end of internet of things oriented of the present invention is as follows：
The present invention proposes that the self-powered microwave receiver front end of internet of things oriented includes：Microwave antenna 1, based on cantilever beam
Standing wave energy collects tunable filter 2, rechargeable battery 3, the cantilever beam perseverance width device 4 of the excess energy collection of Autonomous test, low noise
Amplifier 5, frequency mixer 6, local oscillator 7, intermediate-frequency filter 8, intermediate frequency output 9, dc source 32.Standing wave based on cantilever beam
Collection of energy tunable filter 2 is by LC variable band-pass filters, the first LC tunable band-stop filters 10, the filter of the 2nd LC tunable band-stops
Ripple device 11, the first AC/DC modular converter 12-1, the 2nd AC/DC modular converter 12-2, microwave signal input port, microwave signal
Output port, LC variable band-pass filters, bandpass filter 33 and LC tunable band-stop filters are by planar inductor and condenser type
Cantilever beam is formed.Condenser type cantilever beam is by silicon substrate 20, pull-down electrode 13, first paragraph transmission line 15, second segment transmission line 14,
Nitride silicon dielectric layer 16, the first silicon nitride medium floor 17, anchor area 18 and cantilever beam 19 are formed.The excess energy of Autonomous test is collected
Cantilever beam perseverance width device 4 by main signal line 21, the first ground wire 22-1, the second ground wire 22-2, the 3rd ground wire 22-3, the 4th ground wire
22-4, the first cantilever beam 23, the first capacitor plate 24-1, the second capacitor plate 24-2, the second cantilever beam 25, the first anchor area 26-
1, the second anchor area 26-2, first pull down pole plate 27-1, the second drop-down pole plate 27-2, Si3N4Dielectric layer 28-1, Si3N4Dielectric layer
28-2, SiO2Layer 29, silicon substrate 30, the 3rd AC/DC modular converters 31-1 and the 4th AC/DC modular converters 31-2 are formed.Vibration
The cantilever beam frequency mixer 6 of signals leakiness collection of energy is by signal input port 36, mixed frequency signal output port 37, bandpass filter
33, AC/DC modular converters 34, are mixed structure 38 and local oscillated signal input port 35 is formed.
As shown in figure 1, microwave antenna 1 receives microwave signal, the signal is collected by the standing wave energy based on cantilever beam
After tunable filter 2, realizing that the standing wave energy that bandpass filter both ends are formed can be by the bandreject filtering at both ends while filtering
The wave filter of device absorbs.Then signal reaches the cantilever beam perseverance width device 4 that the excess energy of the Autonomous test of next stage is collected, Autonomous test
Excess energy collect cantilever beam perseverance width device 4 realize signal power size by measuring capacitance size between cantilever beam and pole plate
Detection, and pass through coupled beams couple different proportion input signal so that export the constant amplitude of microwave signal.Firm power
Microwave signal access fixed gain low-noise amplifier 5, then exaggerated microwave signal passes through oscillation signals leak energy
Measure the cantilever beam frequency mixer 6 collected, the function that input signal is downconverted to intermediate-freuqncy signal except realizing conventional mixer structure
Outside, the energy for being mixed the local oscillated signal that structure leaks can be collected.Signal after mixing filters by intermediate-frequency filter 8
Afterwards, manageable intermediate-freuqncy signal 9 can be obtained.Standing wave energy based on cantilever beam collect tunable filter 2, Autonomous test it is more
The cantilever beam perseverance width device 4 and the AC/DC modular converters of the cantilever beam frequency mixer 6 of oscillation signals leak collection of energy that complementary energy is collected
Rechargeable battery 3 is connected respectively, and after rechargeable battery 3 is in parallel with dc source 32, common is low-noise amplifier 5, and oscillator signal is let out
The cantilever beam frequency mixer 6 and local oscillator 7 for leaking collection of energy provide energy.
Filtered as shown in Fig. 2 the standing wave energy based on cantilever beam collects tunable filter 2 including LC tunable band-pass
Device, the first LC tunable band-stop filters 10, the 2nd LC tunable band-stop filters 11, the first AC/DC modular converters 12-1, second
AC/DC modular converters 12-2, microwave signal input port and microwave signal output port；The duplicate LC of two of which structure
The frequency domain of tunable band-stop filter stopband is identical with the frequency domain of LC variable band-pass filter passbands, forms complementary, LC tunable band-pass
Microwave signal outside the passband frequency range of wave filter forms standing wave, LC tunable band-stop filters 10 and the filter of LC tunable band-stops at its both ends
The passband frequency range of ripple device 11 is identical with standing wave signal frequency range, can collect the standing wave at LC variable band-pass filters both ends.
As shown in figure 3, described LC variable band-pass filters and bandpass filter 33 are by planar inductor L1, planar inductor
L2 and condenser type cantilever beam K1, condenser type cantilever beam K2 are formed.Wherein condenser type cantilever beam K1 one end is defeated as microwave signal
Inbound port, the other end connection planar inductor L1, condenser type cantilever beam K1 metal pad connections ground, the planar inductor L1 other end
It is connected with planar inductor L2, condenser type cantilever beam K2, planar inductor L2 other end ground connection, the condenser type cantilever beam K1 other end
Vacantly, output end of the condenser type cantilever beam K1 metal pad leads as wave filter, by controlling condenser type cantilever beam K1 and electricity
Appearance formula cantilever beam K2 drop-down driving voltage can adjust electric capacity C1, C2 of access size so as to adjust the passband of wave filter frequency
Domain.
As shown in figure 4, the first described LC tunable band-stop filters 10 and the 2nd LC tunable band-stop filters 11 are by plane
Inductance L2, planar inductor L1 and condenser type cantilever beam K2, condenser type cantilever beam K1 are formed.Wherein condenser type cantilever beam K2 one end
As microwave signal input port, the other end connection planar inductor L2, condenser type cantilever beam K2 metal pad connections ground, plane
The inductance L2 other end is connected with planar inductor L1, condenser type cantilever beam K1, and planar inductor L1 other end ground connection, condenser type hangs
The arm beam K1 other end is hanging, the output end of condenser type cantilever beam K1 metal pad leads as wave filter, by controlling electric capacity
Formula cantilever beam K1 and condenser type cantilever beam K1 drop-down driving voltage can adjust the capacitance size of access so as to adjust wave filter
Passband frequency domain.
If Fig. 5 is the top view of the condenser type cantilever beam in LC variable band-pass filters and LC tunable band-stop filters, Fig. 6
It is the BB ＇ faces profile of the condenser type cantilever beam in LC variable band-pass filters and LC tunable band-stop filters.Such as Fig. 5, Fig. 6 institute
Show, the condenser type cantilever beam in LC variable band-pass filters and LC tunable band-stop filters has first paragraph at the both ends of silicon substrate 20
Transmission line 15 and second segment transmission line 14, there is the second silicon nitride medium layer 16 in the inside upper part of first paragraph transmission line 15, under
Pulling electrode 13 is provided with the first silicon nitride medium layer 17, in the Shang Youmao areas 18 of second segment transmission line 14, anchor area 18 and cantilever beam 19
One end be connected, cantilever beam 19 is vacantly in the top of the first silicon nitride medium layer 17 and the second silicon nitride medium layer 16.
Fig. 7, Fig. 8 and Fig. 9 be Autonomous test excess energy collect cantilever beam perseverance width device schematic diagram, Autonomous test it is unnecessary
The cantilever beam perseverance width device 4 of collection of energy is made based on silicon substrate 30, is by main signal line 21, the first ground wire 22-1, second
Ground wire 22-2, the 3rd ground wire 22-3, the 4th ground wire 22-4, the first cantilever beam 23, the first capacitor plate 24-1, the second capacitor plate
24-2, the second cantilever beam 25, the first anchor area 26-1, the second anchor area 26-2, the first drop-down pole plate 27-1, the second drop-down pole plate 27-2
Formed；Signal inputs from the input 21-1 of main signal line 21, the input 21-1 of main signal line 21 and the first ground wire 22-1,
Second ground wire 22-2 forms CPW, and the first cantilever beam 23 is respectively across on CPW the first ground wire 22-1 and the second ground wire 22-2, and the
One capacitor plate 24-1 is located at the underface of the first cantilever beam 23 between the ground wire 22-1 of main signal line 21 and first, the second electric capacity
Pole plate 24-2 is located at the underface of the first cantilever beam 23 between the ground wire 22-2 of main signal line 21 and second, this pair of pole plates on
Main signal line 21 is symmetrical, on the signal wire immediately below the first cantilever beam 23 and is also covered with one layer of Si3N4 on capacitor plate and is situated between
Matter layer 28-1；Second cantilever beam 25 is suspended from above main signal line 21 structure that is connected respectively with the first anchor area 26-1 and the second anchor area 26-2
Into cantilever beam structure, the first drop-down pole plate 27-1 is located at the second cantilever beam 25 between the anchor area 26-1 of main signal line 21 and first
Underface, second drop-down pole plate 27-2 be located at the second cantilever beam 25 between the anchor area 26-2 of main signal line 21 and second just under
Side, two drop-down pole plates are symmetrical on main signal line 21, and in the first drop-down pole plate 27-1, the second drop-down pole plate 27-2 and the
One layer of Si3N4 dielectric layers 28-2, the first anchor area 26-1 and the second anchor area are also covered with signal wire immediately below two cantilever beam 25
26-2 forms CPW, the first anchor area 26-1 and the CPW that ground wire is formed as coupling branch road output end with ground wire and is connected the 3rd AC/
DC modular converters 31-1, the second anchor area 26-2, which are used as coupling branch road output end with the CPW that ground wire is formed and are connected the 4th AC/DC, to be turned
Block 31-2 is changed the mold, the output end 21-2 and the 3rd ground wire 22-3, the 4th ground wire 22-4 of main signal line 21 form CPW as output
End, signal export from the output end 21-2 of main signal line 21.
Figure 10 is the structure chart of the cantilever beam frequency mixer of oscillation signals leak collection of energy, oscillation signals leak collection of energy
Cantilever beam frequency mixer be by bandpass filter 33, AC/DC modular converters 34, signal input port 36, mixed frequency signal output end
Mouth 37, and mixing structure 38 are formed, wherein mixing structure 38 is three-port network；Signal input port 36 and bandpass filter 33
Input be connected after, then the input with being mixed structure 38 is connected, the output end of bandpass filter 33 connection AC/DC moduluss of conversion
Block 34, the local oscillated signal input port 35 of mixing structure 38 connect the output end of local oscillator 7, ultimately mixing structure 38
Intermediate-freuqncy signal after output port output mixing；The centre frequency of bandpass filter 33 is identical with the frequency of local oscillated signal,
By the energy absorption leaked by local oscillated signal by mixing structure, the local oscillated signal self-mixing of leakage can be solved
The problem of, and the input signal of the frequency mixer of oscillator signal leakage collection of energy belongs to the stopband frequency domain of bandpass filter 33, its
Frequency is in beyond the passband of bandpass filter 33, will not be directly entered mixing structure by bandpass filter 33.
The self-powered cantilever beam microwave receiver front end of internet of things oriented of the present invention includes the standing wave energy based on cantilever beam
Amount collects tunable filter.Standing wave energy based on cantilever beam collects tunable filter using LC variable band-pass filters to microwave
Signal is filtered, LC variable band-pass filters filtering frequency range outside microwave signal can its both ends formed standing wave signal, first
The passband frequency range of the LC tunable band-stop filters 11 of LC tunable band-stop filters 10 and the 2nd is identical with standing wave signal frequency range, Ke Yishou
Collect the standing wave at LC variable band-pass filters both ends, and DC voltage is converted into using AC/DC modular converters, be ultimately stored on charging
In battery, and the frequency domain of the frequency domain of the duplicate LC tunable band-stop filters stopband of two structures and LC bandpass filter passbands
It is identical, complementation is formed, this design also improves the electromagnetic compatible environment of circuit while filtering.
The excess energy that the self-powered microwave receiver front end of internet of things oriented of the present invention includes Autonomous test is collected outstanding
Arm beam perseverance width device.The cantilever beam perseverance width device that the excess energy of Autonomous test is collected employs CPW transmission lines and cantilever beam structure.Self-test
Part is surveyed, electric capacity is formed with pole plate using the first cantilever beam 23, because input signal makes to the electrostatic force of the first cantilever beam
Obtain beam and produce drop-down displacement, the detection of input signal power is realized by surveying capacitance size between beam and pole plate；According to online electricity
Watt level measured by appearance formula power sensor, under additional DC voltage control, the second cantilever beam 25 is set to produce drop-down position
Move, so as to change the coupled capacitor between the first cantilever beam 25 and signal wire, the input signal of different capacity is by cantilever beam with difference
Ratio is coupled out, and realizes the permanent width output of signal, meanwhile, the energy being coupled out is collected by AC/DC change-over circuits, and
Storage is in the battery；When microwave antenna receives the signal of super large, permanent width device is the microwave signal process of input into fixed width
The signal output of degree, rear class amplifier circuit in low noise is effectively protected, improves the anti-of microwave receiver front end and burn water
It is flat, in addition, the direct current biasing point of rear end low-noise amplifier need not be changed so that no longer need complexity in low-noise amplifier
AGC modules, improve the linearity of low-noise amplifier.
The self-powered microwave receiver front end of internet of things oriented of the present invention includes the outstanding of oscillation signals leak collection of energy
Arm beam frequency mixer.The cantilever beam frequency mixer of oscillation signals leak collection of energy bandpass filtering in parallel before traditional mixing structure
Device and AC/DC modular converters are collecting the local oscillated signal energy leaked by mixing structure.Bandpass filter is by plane
Inductance and condenser type cantilever beam are formed, and access filtering is adjusted by simply controlling the drop-down driving voltage of condenser type cantilever beam
The size of the electric capacity of network, so as to adjust the passband frequency domain of wave filter so that input signal will not be filtered out by the wave filter, and by
The oscillator signal that mixing structure leakage comes can reach AC/DC modular converters by wave filter, and be converted to direct current signal collection
Get up, be stored among rechargeable battery.
The self-powered microwave receiver front end of internet of things oriented of the present invention includes rechargeable battery 3.Rechargeable battery 3 and direct current
It is low-noise amplifier 5 after the parallel connection of power supply 32, the cantilever beam frequency mixer 6 of oscillation signals leak collection of energy, local oscillator 7
Power supply, realize the self-powered of active circuit.
Meet that the structure of conditions above can be considered the self-powered microwave receiver front end of internet of things oriented of the present invention.
Claims (5)
1. the self-powered microwave receiver front end of internet of things oriented, it is characterised in that by microwave antenna (1), based on cantilever beam
Standing wave energy collect tunable filter (2), rechargeable battery (3), Autonomous test excess energy collect cantilever beam perseverance width device (4),
Low-noise amplifier (5), the cantilever beam frequency mixer (6) of oscillation signals leak collection of energy, local oscillator (7), intermediate frequency filtering
Device (8), intermediate frequency output (9) are formed and dc source (32) is formed；The annexation of concrete structure is as follows：Microwave antenna (1) is even
The input that the standing wave energy based on cantilever beam collects tunable filter (2) is connected to, the standing wave energy based on cantilever beam is collected can
The input for the cantilever beam perseverance width device (4) that tunable filter (2) output end is collected with the excess energy of Autonomous test is connected, Autonomous test
The output of cantilever beam perseverance width device (4) collected of excess energy be connected with the input of low-noise amplifier (5), low noise amplification
The signal input port (36) of the cantilever beam frequency mixer (6) of the output connection oscillation signals leak collection of energy of device (5), locally shakes
Swing the local oscillated signal input port of the output end of device (7) and the cantilever beam frequency mixer (6) of oscillation signals leak collection of energy
(35) it is connected, mixed frequency signal output port (37) and the intermediate frequency of the cantilever beam frequency mixer (6) of oscillation signals leak collection of energy are filtered
Ripple device (8) input is connected, and the output end of intermediate-frequency filter obtains the accessible metastable intermediate frequency in microwave receiver rear end
Signal (9)；Standing wave energy based on cantilever beam collects the AC/DC modular converters of tunable filter (2), the excess energy of Autonomous test
The AC/DC modular converters of the cantilever beam perseverance width device (4) of collection and the cantilever beam frequency mixer (6) of oscillation signals leak collection of energy
AC/DC modular converters (34) connect rechargeable battery (3) respectively, be low noise after rechargeable battery (3) is in parallel with dc source (32)
Acoustic amplifier (5), cantilever beam frequency mixer (6) and local oscillator (7) the offer energy of oscillation signals leak collection of energy are simultaneously real
Existing self-powered；The described standing wave energy based on cantilever beam, which collects tunable filter (2) and collects the energy of standing wave and be stored in, to be filled
In battery (3), electromagnetic compatible environment is improved；It is unnecessary that the cantilever beam perseverance width device (4) that the excess energy of Autonomous test is collected is collected
Energy is simultaneously stored in rechargeable battery (3), is effectively protected the low-noise amplifier (5) of rear class so that low-noise amplifier
(5) the AGC modules of complexity are no longer needed in, improve the linearity of low-noise amplifier (5)；Oscillation signals leak collection of energy
Cantilever beam frequency mixer (6) have collected by local oscillated signal by mixing structure leakage energy and be stored in rechargeable battery
(3) in, local oscillated signal self-mixing is avoided, reduces DC power.
2. the self-powered microwave receiver front end of internet of things oriented according to claim 1, it is characterised in that based on cantilever
It is by LC variable band-pass filters, the first LC tunable band-stop filters (10), second that the standing wave energy of beam, which collects tunable filter,
LC tunable band-stop filters (11), the first AC/DC modular converters (12-1), the 2nd AC/DC modular converters (12-2), microwave signal
Input port and microwave signal output port are formed；Described LC variable band-pass filters, the first LC tunable band-stop filters
(10), the 2nd LC tunable band-stop filters (11), the first AC/DC modular converters (12-1) and the 2nd AC/DC modular converters (12-
2) all it is two-port network；The input of LC variable band-pass filters connects the first LC tunable band-stop filters (10) input；
The output end of LC variable band-pass filters connects the 2nd LC tunable band-stop filters (11) input；First LC tunable band-stops filter
The output end of device (10) connects the input of the first AC/DC modular converters (12-1), the first AC/DC modular converters (12-1) it is defeated
Go out end connection rechargeable battery (3)；The output end of 2nd LC tunable band-stop filters (11) connects the 2nd AC/DC modular converters (12-
2) input, the output end connection rechargeable battery (3) of the 2nd AC/DC modular converters (12-2)；It is described based on cantilever beam
Standing wave energy collects the microwave signal of tunable filter from LC variable band-pass filters and the first LC tunable band-stop filters (10)
Between microwave signal input port input, between LC variable band-pass filters and the 2nd LC tunable band-stop filters (11)
Microwave signal output port exports；The first described LC tunable band-stop filters (10) and the 2nd LC tunable band-stop filters (11)
Structure is just the same, and the frequency domain of its stopband is identical with the frequency domain of LC bandpass filter passbands, complementation is formed, to collect LC adjustable bands
The standing wave energy at bandpass filter both ends.
3. the standing wave energy according to claim 2 based on cantilever beam collects tunable filter, it is characterised in that described
LC variable band-pass filters and LC tunable band-stop filters include condenser type cantilever beam, when upper pole of the transmission line (14) as electric capacity
Plate is simultaneously used as microwave signal output port, and when transmission line (15) is used as bottom crown and connects ground, the condenser type cantilever beam is equivalent to
Shunt capacitance；When top crown of the transmission line (14) as electric capacity, transmission line (15) is as bottom crown and connects microwave signal output
During port, the condenser type cantilever beam is equivalent to series capacitance；In drop-down driving electrodes (13) by controlling condenser type cantilever beam
Drop-down driving voltage can adjust access electric capacity size so as to adjusting the passband frequency domain of wave filter so that the first LC is adjustable
Bandstop filter (10) and the 2nd passband frequency range of LC tunable band-stop filters (11) and staying for LC variable band-pass filters both ends
Ripple signal frequency range is identical, and the frequency domain of the duplicate LC tunable band-stop filters stopband of two structures leads to LC bandpass filters
The frequency domain of band is identical, is formed complementary.
4. the self-powered microwave receiver front end of internet of things oriented according to claim 1, it is characterised in that it is described from
The cantilever beam perseverance width device (4) that the excess energy of detection is collected is made based on silicon substrate (30), is by main signal line (21), the
One ground wire (22-1), the second ground wire (22-2), the 3rd ground wire (22-3), the 4th ground wire (22-4), the first cantilever beam (23), first
Capacitor plate (24-1), the second capacitor plate (24-2), the second cantilever beam (25), the first anchor area (26-1), the second anchor area (26-
2), the first drop-down pole plate (27-1), the second drop-down pole plate (27-2) are formed, and the annexation of concrete structure is as follows：Signal from
Input (21-1) input of main signal line (21), the input (21-1) of signal wire (21) and the first ground wire (22-1), second
Ground wire (22-2) forms CPW, and the first cantilever beam (23) is respectively across CPW the first ground wire (22-1) and the second ground wire (22-2)
On, the first capacitor plate (24-1) is being located at the first cantilever beam (23) between main signal line (21) and the first ground wire (22-1) just
Lower section, the second capacitor plate (24-2) are located at the first cantilever beam (23) between main signal line (21) and the second ground wire (22-2)
Underface, this pair of pole plates on main signal line (21) symmetrically, on the signal wire immediately below the first cantilever beam (23) and electric capacity
One layer of Si is also covered with pole plate3N4Dielectric layer (28-1)；Second cantilever beam (25) is suspended from above main signal line (21) respectively with the
One anchor area (26-1) is connected with the second anchor area (26-2) forms cantilever beam structure, and the first drop-down pole plate (27-1) is located at main signal line
(21) underface of the second cantilever beam (25) between the first anchor area (26-1), the second drop-down pole plate (27-2) are located at main signal
The underface of second cantilever beam (25) between line (21) and the second anchor area (26-2), two drop-down pole plates are on main signal line (21)
Symmetrically, the signal immediately below the first drop-down pole plate (27-1), the second drop-down pole plate (27-2) and the second cantilever beam (25)
One layer of Si is also covered with line3N4Dielectric layer (28-2), the first anchor area (26-1) and the second anchor area (26-2) form CPW with ground wire,
First anchor area (26-1) as coupling branch road output end and is connected the 3rd AC/DC modular converters (31-1) with the CPW that ground wire is formed,
Second anchor area (26-2) as coupling branch road output end and is connected the 4th AC/DC modular converters (31-2) with the CPW that ground wire is formed,
The output end (21-2) of main signal line (21) forms CPW as output end, letter with the 3rd ground wire (22-3), the 4th ground wire (22-4)
Number exported from the output ends (21-2) of main signal line (21)；When microwave antenna receives the signal of super large, Autonomous test it is unnecessary
The cantilever beam perseverance width device (4) of collection of energy into the signal output of fixed amplitude, is effectively protected the microwave signal process of input
Rear class low-noise amplifier (5), improve the anti-of microwave receiver front end and burn level, in addition, need not change rear class low noise
The direct current biasing point of acoustic amplifier (5) so that the AGC modules of complexity are no longer needed in low-noise amplifier (5), improve low noise
The linearity of acoustic amplifier (5), meanwhile, the energy being coupled out is collected by AC/DC modular converters, and stores in the battery.
5. the self-powered microwave receiver front end of internet of things oriented according to claim 1, it is characterised in that described shakes
The cantilever beam frequency mixer for swinging signals leakiness collection of energy is by bandpass filter (33), AC/DC modular converters (34), signal input
Port (36), mixed frequency signal output port (37) and mixing structure (38) are formed, wherein mixing structure (38) is three-port network；
After signal input port (36) is connected with the input of bandpass filter (33), then the input with being mixed structure (38) is connected,
The output end connection AC/DC modular converters (34) of bandpass filter (33), the local oscillated signal input of mixing structure (38)
The output end of mouth (35) connection local oscillator (7), the intermediate-freuqncy signal after the output mixing of ultimately mixing structure (38) output port；
The cantilever beam frequency mixer of described oscillation signals leak collection of energy has added bandpass filter (33) before traditional mixing structure,
The centre frequency of bandpass filter (33) is identical with the frequency of local oscillated signal, can will be passed through by local oscillated signal and is mixed
The energy absorption of structure (38) leakage, solves the problems, such as the local oscillated signal self-mixing of leakage, and input signal belongs to band
The stopband frequency domain of bandpass filter (33), its frequency are in beyond the passband of bandpass filter (33), will not pass through bandpass filter
(33), it is directly entered mixing structure (38).
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