CN107404255A - Piezo-activator, laminated actuator, piezo-electric motor, robot, hand unit and pump - Google Patents
Piezo-activator, laminated actuator, piezo-electric motor, robot, hand unit and pump Download PDFInfo
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- CN107404255A CN107404255A CN201710152710.XA CN201710152710A CN107404255A CN 107404255 A CN107404255 A CN 107404255A CN 201710152710 A CN201710152710 A CN 201710152710A CN 107404255 A CN107404255 A CN 107404255A
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- 239000000919 ceramic Substances 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
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- 239000010703 silicon Substances 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
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- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
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- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
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- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 1
- BSLXDFGQRZUAAR-UHFFFAOYSA-N [Sc].[Pb] Chemical compound [Sc].[Pb] BSLXDFGQRZUAAR-UHFFFAOYSA-N 0.000 description 1
- OEBXVKWKYKWDDA-UHFFFAOYSA-N [Ta].[Bi].[Sr] Chemical compound [Ta].[Bi].[Sr] OEBXVKWKYKWDDA-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
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- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- VOLIIUVAEXIKFU-UHFFFAOYSA-N niobium zinc Chemical compound [Zn].[Zn].[Zn].[Nb] VOLIIUVAEXIKFU-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- UKDIAJWKFXFVFG-UHFFFAOYSA-N potassium;oxido(dioxo)niobium Chemical compound [K+].[O-][Nb](=O)=O UKDIAJWKFXFVFG-UHFFFAOYSA-N 0.000 description 1
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- XMVONEAAOPAGAO-UHFFFAOYSA-N sodium tungstate Chemical compound [Na+].[Na+].[O-][W]([O-])(=O)=O XMVONEAAOPAGAO-UHFFFAOYSA-N 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
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- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/12—Constructional details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0611—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/0045—Driving devices, e.g. vibrators using longitudinal or radial modes combined with torsion or shear modes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/005—Mechanical details, e.g. housings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
- H10N30/082—Shaping or machining of piezoelectric or electrostrictive bodies by etching, e.g. lithography
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S901/00—Robots
- Y10S901/19—Drive system for arm
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The present invention provides a kind of piezo-activator, laminated actuator, piezo-electric motor, robot, hand unit and pump.The problem of the present invention is the generation for reducing the crack of support.Piezo-activator possesses：Vibration section, it carries out flexural vibrations in the in-plane direction；Connecting portion, it is connected on the direction of vibration of above-mentioned vibration section with above-mentioned vibration section；Support, it supports above-mentioned vibration section via above-mentioned connecting portion；And rib, it is arranged at the side opposite with above-mentioned vibration section of above-mentioned support on the direction parallel with the direction of above-mentioned vibration section and the arrangement of above-mentioned connecting portion.
Description
Technical field
The present invention relates to piezo-activator and the laminated actuator, piezo-electric motor, machine of the piezo-activator are used
People, hand unit and pump.
Background technology
It is known have be pasted with driving piezoelectric element displacement mechanism portion (vibration section) and support it is piezoelectric actuated
Device (such as patent document 1).If driving receives the input of drive signal with piezoelectric element, produced in driving with piezoelectric element
Raw deformation, and displacement mechanism portion is vibrated relative to support.
Patent document 1：Japanese Unexamined Patent Publication 2001-111128 publications
In the above-described techniques, exist causes to produce the load of crack equivalent damage in the outside of support because of the vibration of vibration section
Sorrow, wherein, above-mentioned outside is the side opposite with vibration section.Production especially in the case where support is by fragile material formational situation be present
The worry of raw crack equivalent damage.
The content of the invention
The present invention is completed to solve above-mentioned problem, can be realized as following mode.
(1) according to the mode of the present invention, there is provided a kind of piezo-activator.The piezo-activator possesses：Vibration section, its
Flexural vibrations are carried out in face on direction；Connecting portion, it is connected on the direction of vibration of above-mentioned vibration section with above-mentioned vibration section；Supporting
Portion, it supports above-mentioned vibration section via above-mentioned connecting portion；And rib, it is arranged with above-mentioned vibration section and above-mentioned connecting portion
The parallel direction in direction on, be arranged at the side opposite with above-mentioned vibration section of above-mentioned support.
According to which, due to possessing the rib on the surface for the side opposite with vibration section for being arranged at support, institute
Cause the generation in the crack of support can further be reduced by the vibration of vibration section by rib.
(2) in aforesaid way, above-mentioned support can also include fragile material.
In the case where support includes fragile material, due to easily producing crack, so the reduction based on rib is split
The caused effect of seam is stronger.
(3) in aforesaid way, above-mentioned vibration section, above-mentioned connecting portion and above-mentioned support may be integrally formed.
According to which, because vibration section, connecting portion and support are integrally formed, so easy to manufacture.
(4) in aforesaid way, above-mentioned rib can include resin.
According to which, because rib includes resin, so easily can strengthen support.
(5) in aforesaid way, above-mentioned resin can have the characteristic solidified by ultraviolet.
According to which, because resin has the characteristic solidified by ultraviolet, so need not be heated or cooled,
Can be easily by the way that easily resin be coated to support and irradiates ultraviolet to be solidified.
(6) in aforesaid way, above-mentioned rib can be arranged at the tie-rod cutting portion of above-mentioned support.
According to which, because the tie-rod cutting portion of support easily sustains damage in cut-out, it is advantageous to by adding
Strong portion strengthens the tie-rod cutting portion of support.
(7) according to the mode of the present invention, there is provided a kind of laminated actuator.The laminated actuator is laminated with multiple above-mentioned sides
Piezo-activator described in any one of formula.
According to which, it is possible to increase driving force.
The present invention can be realized by various modes, for example, except by Piexoelectric actuator, piezo-activator it
Outside, additionally it is possible to by piezo-electric motor, possess the robot of piezo-electric motor, possess the hand unit of piezo-electric motor and possess piezoelectricity
The various modes such as the pump of motor are realized.
Brief description of the drawings
Fig. 1 is the top view of the brief configuration for the Piexoelectric actuator for representing first embodiment.
Fig. 2 is the explanation figure by the use of Piexoelectric actuator as the example of piezo-electric motor.
Fig. 3 is to represent that the stage in the midway of manufacturing process is formed at the top view of the Piexoelectric actuator on substrate.
Fig. 4 is the explanation figure for representing the substrate after etching.
Fig. 5 is the explanation figure in the region near the tie-rod in enlarged representation Fig. 4.
Fig. 6 is the explanation figure near the tie-rod cutting portion after the cut-out of enlarged representation tie-rod.
Fig. 7 is the explanation figure for representing to be provided with the state of rib in tie-rod cutting portion.
Fig. 8 is the top view of the brief configuration for the Piexoelectric actuator for representing second embodiment.
Fig. 9 is the top view of the brief configuration for the Piexoelectric actuator for representing the 3rd embodiment.
Figure 10 is the explanation figure for an example for representing robot.
Figure 11 is the explanation figure of the wrist of robot.
Figure 12 is the explanation figure for representing finger servicing unit.
Figure 13 is the explanation figure for an example for representing pump.
Embodiment
First embodiment：
Fig. 1 is the top view of the brief configuration for the Piexoelectric actuator (piezo-activator) 10 for representing first embodiment.
Piexoelectric actuator 10 possesses substrate 200 and piezoelectric element 110.In order to facilitate diagram, hacures are added in substrate 200.Base
Plate 200 possesses vibration section 210, support 220 and connecting portion 230.It is in generally rectangular part that vibration section 210, which is, and is carried
It is equipped with piezoelectric element 110.
A short side in two short sides of vibration section 210 is provided with the contact element 20 contacted with driven member.
Support 220 is configured to surround the only about half of of vibration section 210 in the side opposite with contact element 20 of vibration section 210.Branch
Bearing portion 220 is connected by connecting portion 230 with vibration section 210 in the substantial middle of the long side of vibration section 210, so as to support vibration
Portion 210.In the support 220 from the direction parallel with the direction AR of vibration section 210 and the arrangement of connecting portion 230, propping up
The surface (side) of the side opposite with vibration section 210 of bearing portion 220 has tie-rod cutting portion 240.Also, cut with covering tie-rod
The mode in disconnected portion 240 is provided with rib 250.Tie-rod cutting portion 240 is by the trace after used tie-rod cut-out during fabrication
Mark.It will be explained hereinafter for the point.If flexible by piezoelectric element 110 is vibrated vibration section 210, easily
The crack caused by vibration is formed in tie-rod cutting portion 240, therefore sets rib 250 to reduce the generation in crack.Strengthen
Portion 250 preferably comprises resin.Herein, as resin, preferably using ultraviolet curable resin.If ultraviolet curable resin, then
It need not heat, cool down in resin solidification, softening is made, so as to reduce the influence of heat.In addition, can be by by for example
Pour into a mould to coat the resin before solidification and irradiate ultraviolet, so as to easily be solidified, therefore be able to easily form reinforcement
Portion 250.In addition it is also possible to rib 250 is referred to as " diaphragm ".
Piezoelectric element 110 possesses first electrode 130 (due to being formed as film-form, so also referred to as " first electrode film
130”.), be formed at first electrode 130 top piezoelectrics 140 (due to being formed as film-form, thus also referred to as " piezoelectrics
Film 140 ".) and be formed at piezoelectrics 140 top second electrode 150 (due to being formed as film-form, so also referred to as " the
Two electrode films 150 ".), first electrode 130 clamps piezoelectrics 140 with second electrode 150.First electrode 130, second electrode 150
It is the film formed for example, by sputtering.As the material of first electrode 130, second electrode 150, such as Al can be utilized
The higher arbitrary material of the electric conductivity such as (aluminium), Ni (nickel), Au (gold), Pt (platinum), Ir (iridium), Cu (copper).
Piezoelectrics 140 are formed for example, by sol-gel process, sputtering method, and have film shape.As piezoelectrics 140
Material can utilize use ABO3The ceramics of the perovskite construction of type wait, the arbitrary material of display piezoelectric effect.As adopting
Use ABO3The ceramics of the perovskite construction of type can use such as lead zirconate titanate (PZT), barium titanate, lead titanates, potassium niobate, niobic acid
Lithium, lithium tantalate, sodium tungstate, zinc oxide, barium strontium titanate (BST), strontium bismuth tantalum (SBT), lead meta-columbute, niobium zinc, scandium lead niobate etc..Separately
Outside, the material of the display piezoelectric effect in addition to ceramics, such as Kynoar, crystal etc. can also be used.Piezoelectrics 140
Thickness be preferably less than 20 μm of more than such as 50nm (0.05 μm) scope.The piezoelectrics 140 of thickness with the scope
Film can utilize film formation process (also referred to as " film formation process ".) be readily formed.If the thickness of piezoelectrics 140 is set to
More than 0.05 μm, then can be according to the fully big power of the flexible generation of piezoelectrics 140.If in addition, the thickness of piezoelectrics 140 is set
For less than 20 μm, then Piexoelectric actuator 10 can fully be minimized.But it is also possible to piezoelectrics 140 are not set to thin
Film, and it is set to the film bigger than above-mentioned thickness.In addition, block piezoelectrics can be used as piezoelectrics 140.
In the first embodiment, Piexoelectric actuator 10 as piezoelectric element 110 include five piezoelectric element 110a,
110b、110c、110d、110e.Piezoelectric element 110e is shaped generally as rectangular shape, and in the width of vibration section 210
Center, formed along the long side direction of vibration section 210.Piezoelectric element 110a, 110b, 110c, 110d are formed at vibration section 210
Corner position.In addition, in Fig. 1, though it is shown that piezoelectric element 110 is formed at the example on a surface of vibration section 210
Son, but piezoelectric element 110 can also be formed at two surfaces of vibration section 210.In such a situation it is preferred that the pressure on a surface
Electric device 110a~110e and piezoelectric element 110a~the 110e on another surface is configured at pair with vibration section 210 for the plane of symmetry
Claim position.
Substrate 200 by film formation process as forming first electrode 130, piezoelectrics 140 and second electrode 150
Substrate uses.Also, the vibration section 210 of substrate 200 also has the function as the oscillating plate mechanically vibrated.Substrate
200 for example can be by being used as Si, Al of fragile material2O3、ZrO2Deng formation.Substrate 200 as silicon (Si) system is (also referred to as
" silicon substrate 200 ".) silicon wafer of such as semiconductor manufacturing can be utilized.The thickness of substrate 200 be preferably set to such as 10 μm with
Upper less than 100 μm of scope., can in the film process on substrate 200 if the thickness of substrate 200 is set into more than 10 μm
Relatively easily substrate 200 is operated.If in addition, the thickness of substrate 200 is set into more than 50 μm, can further hold
Change places and substrate 200 is operated.If in addition, the thickness of substrate 200 (vibration section 210) is set into less than 100 μm, according to by
Stretching for the piezoelectrics 140 that film is formed, can vibrate easily vibration section 210.
Fig. 2 is to represent the explanation figure by the use of Piexoelectric actuator 10 as the example of piezo-electric motor 11.Piexoelectric actuator
10 contact element 20 contacts with the periphery of the rotor 50 as driven member, so as to form piezo-electric motor 11.Shown in Fig. 2
Example in, two piezoelectric elements 110a, 110d are applied with alternating voltages or pulsating volage, piezoelectric element 110a, 110d are along arrow
Stretch in head x direction.Correspondingly, the vibration section 210 of Piexoelectric actuator 10 is carried out curved in the plane of vibration section 210
Qu Zhendong and tortuous shape (S word shapes) deform, the direction of the front end of contact element 20 along arrow y move back and forth or
Person's elliptic motion.As a result, rotor 50 rotates around its center 51 to defined direction z (in fig. 2 for clockwise).This
Outside, in the case where applying alternating voltage or pulsating volage to two piezoelectric elements 110b, 110c, rotor 50 is round about
(counter clockwise direction) rotates.In addition, if alternating voltage or pulsating volage, Piezoelectric Driving are applied to the piezoelectric element 110e in center
Device 10 is stretched along long side direction, so as to further increase the power that rotor 50 is put on from contact element 20.In addition,
Such action for Piexoelectric actuator 10, it is recorded in above-mentioned prior art literature 1 (Japanese Unexamined Patent Publication 2004-320979
Publication, or corresponding U.S. Patent No. 7224102), the disclosure of which is by referring to being introduced into the present invention.
Fig. 3 is the vertical view of Piexoelectric actuator 10 for representing to be formed in the stage of the midway of manufacturing process on substrate 200
Figure.Thin film fabrication process can be utilized for the process untill forming Piexoelectric actuator 10 on substrate 200, therefore omits and says
It is bright.In figure 3, although total 6 Piexoelectric actuators 10 of 2 rows 3 row are illustrated on substrate 200, in fact, in substrate
Two-dimensionally formed with many Piexoelectric actuators 10 on 200.In figure 3, illustrate for convenience, only the piezoelectricity in upper right side drives
Dynamic device 10 is marked with piezoelectric element 110a~110e reference, but each Piexoelectric actuator 10 all possesses piezoelectric element
110a~110e.The etching region being removed by the region representation that hacures are shown by etching of the inner side of dotted line shown in Fig. 3
Domain 260.
Fig. 4 is the explanation figure for representing the substrate 200 after etching.In addition, in Fig. 4, only illustrating substrate 200, and omit
Piezoelectric element 110a~110e diagram.The region represented by hacures is by etching the region left.That is, if substrate 200
It is etched, then is left vibration section 210, support 220, connecting portion 230, tie-rod 242 and frame portion 270, vibration section 210, supporting
The part that portion 220 and connecting portion 230 are integrally formed.The support 220 of each Piexoelectric actuator 10 is configured to by 4
Tie-rod 242 and the construction that is connected with frame portion 270.In process afterwards, monolithic can be obtained by cutting off tie-rod 242
Piexoelectric actuator 10.In addition, in the case where forming laminated actuator described later, with by the singualtion of Piexoelectric actuator 10 it
The mode being laminated again afterwards is compared, before singualtion in the state of be laminated, then carry out singualtion again so as to obtain
The mode of each laminated actuator is more effective.
Fig. 5 is the explanation figure in the region 5 near enlarged representation Fig. 4 tie-rod 242.Tie-rod 242 is connection support 220
With the bar-shaped part of frame portion 270, in the first embodiment, there are 3 root system bars 242.As long as the radical of tie-rod 242 1
Any can be thought above.In the first embodiment, recess is set in support 220, and passes through the coupling recess portion of tie-rod 242
Bottom and frame portion 270, but recess can also be not provided with and flat support 220 and frame portion 270 are connected by tie-rod 242.
Fig. 6 is the explanation figure near the tie-rod cutting portion 240 after the cut-out of enlarged representation tie-rod.Tie-rod 242 (Fig. 5) is for example
It can be cut off in a manner of the bar-shaped fixture that pushes and fracture, or be cut off as section by outer peripheral teeth, or it is logical
Laser is crossed to be cut off.The vestige formed after cut-out tie-rod 242 is above-mentioned tie-rod cutting portion 240.Tie-rod 242 when cut-off,
Because effect has stress, so tie-rod cutting portion 240 is changed into easily producing the state in crack.Also, for the fracture of tie-rod 242
For face 244, surface configuration easily becomes thick, if effect has stress, is easily changed into the starting point in crack.If in cut-out tie-rod
Tie-rod cutting portion 240 after 242 forms rib 250, then is also difficult to deform and is difficult to from starting point even if being stressed
Produce crack.
Fig. 7 is the explanation figure for representing to be provided with the state of rib 250 in tie-rod cutting portion 240.In first embodiment
In, if vibration section 210 (Fig. 1) vibrates, as described above, easily producing crack in tie-rod cutting portion 240, and crack expansion be present
Big worry, in the first embodiment, in order to reduce the generation in crack, expand, rib is set in tie-rod cutting portion 240
250.Even if effect has stress, also it can reduce deformation by rib 250, therefore can reduce with tie-rod cutting portion 240
For the generation in the crack of starting point.In addition, as described above, it is preferred to rib 250 includes resin, used as resin with ultraviolet
The resin of curing characteristics.
Material as rib 250 can utilize the other materials in addition to resin.For example, it is also possible to using passing through
The rigid insulation film that CVD is formed is as rib 250.If forming rib 250 by insulating materials, substrate 200 is being improved
Insulating properties point on it is preferred.
More than, according to first embodiment, because Piexoelectric actuator 10 in tie-rod cutting portion 240 possesses rib 250,
So the situation in the generation of support 220 crack, caused crack growth can be reduced.Especially in support 220 by crisp
Property material formed in the case of, due to easily produce crack, so effectively.
In the above-described first embodiment, it is illustrated using the example with tie-rod cutting portion 240, but produces and split
The reason for seam, is not dependent on tie-rod cutting portion 240.In the first embodiment, the direction (vibration section in its face of vibration section 210
The parallel direction on 210 formation surface) on carry out flexural vibrations, support 220 on the direction of vibration of vibration section 210 via
Connecting portion 230 is connected with vibration section 210.In this case, stress be present as caused by the vibration of vibration section 210 via connecting portion
230 are transferred to support 220, so as on the direction parallel with the direction of vibration section 210 and the arrangement of connecting portion 230, prop up
The surface of the side opposite with vibration section 210 of bearing portion 220 produces the situation (i.e. caused by direction of vibration) in crack.Thus,
In the case of without tie-rod cutting portion 240, if rib 250 is in the side with vibration section 210 and the arrangement of connecting portion 230
To on parallel direction, the surface of the side opposite with vibration section 210 of support 220 is arranged at, then can be reduced so
(caused by direction of vibration) crack generation.In addition, with tie-rod cutting portion 240 and be above-mentioned direction of vibration
In the case of structure, it is stronger that rib 250 reduces effect caused by crack.
Second embodiment：
Fig. 8 is the top view of the brief configuration for the Piexoelectric actuator 12 for representing second embodiment.First embodiment
Piexoelectric actuator 10 possess rib 250 in tie-rod cutting portion 240, and the Piexoelectric actuator 12 of second embodiment exists
The entirety on the surface (side) of the side opposite with vibration section 210 of the outer edge side of support 220, i.e. support 220, which possesses, to be added
Strong portion 250.So, possesses rib 250 by the wide scope in the periphery of support 220, so as to further reduce
Support 220 produces the situation in crack.In this second embodiment, rib 250 also covers tie-rod cutting portion 240.In addition, branch
Side 220s in the side of the outer edge side of bearing portion 220, parallel with the short side of vibration section 210 can not also possess rib
250.This is due to sometimes in side 220s connections circuit board described later.
3rd embodiment：
Fig. 9 is the top view of the brief configuration for the laminated actuator 13 for representing the 3rd embodiment.Laminated actuator 13 has
It is standby to be laminated multiple (being in fig.9 5) Piexoelectric actuator 10 and the electric power for supplying each Piexoelectric actuator 10
Circuit board 300.Circuit board 300 is for example made up of flexible base plate.In addition, the rib 250 of laminated actuator 13 has edge
The shape of the stacked direction of Piexoelectric actuator 10.In such laminated actuator 13, the piezoelectricity with first embodiment
Drive device 10 similarly, in tie-rod cutting portion 240 possesses rib 250, is split thus, it is possible to reduce to produce in support 220
Seam, the situation of caused crack growth.In addition, instead of the Piexoelectric actuator 10 of first embodiment, can be laminated multiple
The Piexoelectric actuator 12 of second embodiment.
Other embodiment：
Above-mentioned Piexoelectric actuator 10,12, laminated actuator 13 are (in the following embodiments so that " Piezoelectric Driving fills
The term for putting 10 " is representative to use.) it is so as to the dress to the larger power of driven member application by using resonance
Put, can be applied to various devices as piezo-electric motor.Piexoelectric actuator 10 can for example be used as (including the ministry of electronics industry of robot
Part handling device (IC processors)), administrable pump, the calendar pusher of clock and watch, printing equipment (such as paper advance mechanism) etc. it is each
The drive device of kind of equipment uses.Hereinafter, illustrated for representative embodiment.
Figure 10 is the explanation figure for representing make use of an example of the robot 2050 of above-mentioned Piexoelectric actuator 10.Machine
Device people 2050 has arm 2010 (being referred to as " arm "), and the arm 2010 possesses more link rod parts 2012 and (is referred to as
" linkage component ") and the state can rotate or bend connect multiple joint portions between these link rod parts 2012
2020.Above-mentioned Piexoelectric actuator 10 is built-in with each joint portion 2020, pass can be made using Piexoelectric actuator 10
Section portion 2020 rotates or bent arbitrary angle.In addition, in Fig. 10, illustrating for convenience, only illustrate a piezoelectricity and drive
Dynamic device 10.Hand unit 2000 is connected with the front end of arm 2010.Hand unit 2000 possesses a pair of handle parts 2003.In hand unit
Also Piexoelectric actuator 10 is built-in with 2000, handle part 2003 can be opened and closed using Piexoelectric actuator 10 so as to hold thing
Product.In addition, being also equipped with Piexoelectric actuator 10 between hand unit 2000 and arm 2010, Piexoelectric actuator 10 can be utilized
To make hand unit 2000 be rotated relative to arm 2010.
Figure 11 is the explanation figure of the wrist of the robot 2050 shown in Figure 10.The joint portion 2020 of wrist clamps wrist
Rotation section 2022, the link rod part 2012 of wrist are installed on hand in a manner of it can be rotated around the central shaft O of wrist rotation section 2022
Wrist rotation section 2022.Wrist rotation portion 2022 possesses Piexoelectric actuator 10, and Piexoelectric actuator 10 makes the link rod part of wrist
2012 and hand unit 2000 around central shaft O rotate.Multiple handle parts 2003 are equipped with hand unit 2000.Handle part 2003
Base end part can move in hand unit 2000, and be equipped with Piexoelectric actuator 10 in the root of the handle part 2003.Therefore,
By making Piexoelectric actuator 10 work, the movement of handle part 2003 can be made to carry out holding object.
It is more than two multi-arm machines in the quantity of arm in addition, being not limited to the robot of single armed as robot
Piexoelectric actuator 10 can also be applied in people.Herein, the inside of the joint portion 2020 in wrist, hand unit 2000 is except piezoelectricity
Outside drive device 10, in addition to power line, transmission signal to the various unit feeding electric power such as force snesor, gyrosensor
Signal wire etc., it is necessary to very more wiring.Therefore, it is very tired in the inside laying-out and wiring of joint portion 2020, hand unit 2000
It is difficult.However, Piexoelectric actuator 10 and common electro-motor, existing Piexoelectric actuator due to above-mentioned embodiment
Compare, driving current can be reduced, so even in joint portion 2020 (the especially joint portion of the front end of arm 2010), hand unit
2000 such less spaces also being capable of laying-out and wiring.
In the above description, to be illustrated exemplified by the robot 2050 for possessing hand unit 2000, but hand unit
2000 can also serve not only as the part of robot 2050 and be used as single product to form.
Figure 12 is the explanation figure for representing make use of the finger servicing unit 1000 of above-mentioned Piexoelectric actuator 10.Finger is auxiliary
Help device 1000 to possess the first finger assisted parts 1001, second finger assisted parts 1002 and base component 1003, and be installed on
Finger 700.First finger assisted parts 1001 possesses Piexoelectric actuator 10, reductor 501 and finger support portion 701.Second
Finger assisted parts 1002 possesses Piexoelectric actuator 10, reductor 502, finger support portion 702 and hand unit 703.Except hand
Part 703, the first finger assisted parts 1001 are almost identical structure with second finger assisted parts 1002.Hand unit 703 is from hand
The veutro for referring to 700 fixes second finger assisted parts 1002.In addition, hand unit 703 is also disposed on the first finger assisted parts 1001, but
Omit in fig. 12.Finger servicing unit 1000 carrys out bending and stretching for assisted finger 700 by Piexoelectric actuator 10.In addition, at this
In embodiment, the situation about bending and stretching of the assisted finger 700 of finger servicing unit 1000 is illustrated, but hand can also be replaced
Refer to the hand unit that 700 ground use robot, make hand unit integrally formed with finger servicing unit 1000.In this case, hand
Part is bent and stretched by the driving of Piexoelectric actuator 10.
Figure 13 is an example for being denoted as make use of the liquid-feeding pump 2200 of the pump of above-mentioned Piexoelectric actuator 10
Illustrate figure.Liquid-feeding pump 2200 in the housing 2230 comprising reservoir 2211, pipe 2212, Piexoelectric actuator 10, rotor 2222, subtract
Fast transmission mechanism 2223, cam 2202 and multiple finger pieces 2213,2214,2215,2216,2217,2218,2219.Storage
Device 2211 is the resettlement section for housing the liquid as object conveyor.Pipe 2212 is sent out for conveying from reservoir 2211
The pipe of liquid.To push the setting of the state of the side of rotor 2222, Piezoelectric Driving fills the contact element 20 of Piexoelectric actuator 10
Put 10 rotation driving rotors 2222.The revolving force of rotor 2222 is transferred to cam 2202 via deceleration transmission mechanism 2223.Finger-like
Thing 2213~2219 is the part for sealed tube 2212.If cam 2202 rotates, pass through the jut 2202A of cam 2202
Make finger piece 2213~2219 in order to extruding on the outside of radiation direction.Finger piece 2213~2219 is from conveying direction upstream side
(side of reservoir 2211) sealed tube 2212 in order.Thus, the liquid in pipe 2212 is made to be delivered to downstream in order.Such one
Come, can accurately convey the liquid of seldom amount, and small-sized liquid-feeding pump 2200 can be realized.In addition, each part is matched somebody with somebody
Put the configuration for being not limited to diagram.Alternatively, it is also possible to not possess the parts such as finger piece, and be disposed on the spheroid of rotor 2222 etc.
Carry out the structure of sealed tube 2212.Liquid-feeding pump 2200 as described above can apply flexibly in by the injecting liquid drugs such as insulin to human body to
Medicine device etc..Herein, can be than existing Piexoelectric actuator by using the Piexoelectric actuator 10 of above-mentioned embodiment
Reduce driving current, therefore the consumption electric power of doser can be suppressed.Therefore, it is special in the case of battery power doser
It is ineffective.
More than, embodiments of the present invention are illustrated based on some embodiments, but the embodiment party of above-mentioned invention
Formula is completed to be readily appreciated that the present invention, does not limit the present invention.The self-evident present invention can not depart from its purport
And claims changed, improved, and the present invention also include its equivalent.
Description of reference numerals：
5 ... regions；10 ... Piexoelectric actuators (piezo-activator)；11 ... piezo-electric motors；12 ... Piexoelectric actuators；
13 ... laminated actuators；20 ... contact elements；50 ... rotors；51 ... centers；110 ... piezoelectric elements；110a ... piezoelectric elements；
110b ... piezoelectric elements；110c ... piezoelectric elements；110d ... piezoelectric elements；110e ... piezoelectric elements；130 ... first electrodes；
140 ... piezoelectrics；150 ... second electrodes；200 ... substrates；210 ... vibration sections；220 ... supports；220s ... sides；230…
Connecting portion；240 ... tie-rod cutting portions；242 ... tie-rods；244 ... the planes of disruption；250 ... ribs；260 ... etching areas；270…
Frame portion；300 ... circuit boards；501 ... reductors；502 ... reductors；700 ... fingers；701 ... finger support portions；702 ... hands
Refer to support；703 ... hand units；1000 ... finger servicing units；1001 ... first finger assisted parts；1002 ... second fingers are auxiliary
Help portion；1003 ... base components；2000 ... hand units；2003 ... handle parts；2010 ... arms；2012 ... link rod parts；2020 ... close
Section portion；2022 ... wrist rotation portions；2050 ... robots；2200 ... liquid-feeding pumps；2202 ... cams；2202A ... juts；
2211 ... reservoirs；2212 ... pipes；2213~2219 ... finger pieces；2222 ... rotors；2223 ... deceleration transmission mechanisms；2230…
Housing；O ... central shafts；X ... arrows；Y ... arrows；Z ... directions.
Claims (11)
1. a kind of piezo-activator, possesses：
Vibration section, it carries out flexural vibrations in the in-plane direction；
Connecting portion, it is connected on the direction of vibration of the vibration section with the vibration section；
Support, it supports the vibration section via the connecting portion；And
Rib, it is arranged at the branch on the direction parallel with the direction of the vibration section and connecting portion arrangement
The side opposite with the vibration section of bearing portion.
2. piezo-activator according to claim 1,
The support includes fragile material.
3. piezo-activator according to claim 1,
The vibration section, the connecting portion and the support are integrally formed.
4. piezo-activator according to claim 1,
The rib includes resin.
5. piezo-activator according to claim 4,
The resin has the characteristic solidified by ultraviolet.
6. piezo-activator according to claim 1,
The rib is arranged at the tie-rod cutting portion of the support.
7. a kind of laminated actuator,
It is laminated with the piezo-activator described in multiple claims 1.
8. a kind of piezo-electric motor,
It possesses the laminated actuator described in piezo-activator or claim 7 described in claim 1.
9. a kind of robot,
It possesses the piezo-electric motor described in claim 8.
10. a kind of hand unit,
It possesses the piezo-electric motor described in claim 8.
11. a kind of pump,
It possesses the piezo-electric motor described in claim 8.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016056602A JP2017175695A (en) | 2016-03-22 | 2016-03-22 | Piezoelectric actuator, lamination actuator, piezoelectric motor, robot, hand, and pump |
| JP2016-056602 | 2016-03-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107404255A true CN107404255A (en) | 2017-11-28 |
Family
ID=59896502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710152710.XA Pending CN107404255A (en) | 2016-03-22 | 2017-03-15 | Piezo-activator, laminated actuator, piezo-electric motor, robot, hand unit and pump |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20170279032A1 (en) |
| JP (1) | JP2017175695A (en) |
| CN (1) | CN107404255A (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004072993A (en) * | 2002-06-14 | 2004-03-04 | Seiko Epson Corp | Piezoelectric actuator, power transmission with the same, liquid discharge device, and clock |
| JP2006340503A (en) * | 2005-06-02 | 2006-12-14 | Seiko Epson Corp | Piezoelectric actuator and apparatus equipped with it |
| JP2009159795A (en) * | 2007-12-27 | 2009-07-16 | Olympus Corp | Ultrasonic motor |
| JP2010259160A (en) * | 2009-04-22 | 2010-11-11 | Sumitomo Precision Prod Co Ltd | Power generation device and method of manufacturing silicon piece |
| JP6268999B2 (en) * | 2013-12-06 | 2018-01-31 | セイコーエプソン株式会社 | Piezoelectric motor, robot hand, robot, finger assist device, electronic component transport device, electronic component inspection device, liquid feed pump, printing device, electronic clock, projection device |
-
2016
- 2016-03-22 JP JP2016056602A patent/JP2017175695A/en not_active Withdrawn
-
2017
- 2017-03-15 CN CN201710152710.XA patent/CN107404255A/en active Pending
- 2017-03-20 US US15/463,408 patent/US20170279032A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| JP2017175695A (en) | 2017-09-28 |
| US20170279032A1 (en) | 2017-09-28 |
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