CN107388836A - A kind of pipeline cold-trap of HCD boards with cooling temperature adjustment function - Google Patents
A kind of pipeline cold-trap of HCD boards with cooling temperature adjustment function Download PDFInfo
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- CN107388836A CN107388836A CN201710613875.2A CN201710613875A CN107388836A CN 107388836 A CN107388836 A CN 107388836A CN 201710613875 A CN201710613875 A CN 201710613875A CN 107388836 A CN107388836 A CN 107388836A
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- Prior art keywords
- trap
- pipeline
- cooling
- pipeline cold
- cold
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D17/00—Arrangements for using waste heat; Arrangements for using, or disposing of, waste gases
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- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
Abstract
The present invention proposes a kind of pipeline cold-trap of HCD boards with cooling temperature adjustment function, tube wall is double layer hollow metal structure, its hollow space is around the hollow pipeline of shape, hollow pipeline uses upper tightly lower sparse comb mode, the type of cooling is using cooling water or cooling air as temperature-reducing medium, its controller carried can be with auto-measuring pipeline cold-trap chilling temperature, output control signal is to regulating valve after being calculated compared with set temperature value, realization automatically adjusts cooling medium consumption, and then realizes the purpose for automatically adjusting pipeline cold-trap chilling temperature.The present invention can effectively realize that the accessory substance in process gas uniformly cools down deposition in pipeline cold-trap inwall, the maintenance frequency of pipeline cold-trap is greatly reduced, the adjustability of pipeline cold-trap chilling temperature is realized simultaneously, so that process byproducts are stably attached to pipeline cold-trap inwall, effectively prevent because situations such as temperature change causes accessory substance local shedding to cause vavuum pump to block, process abnormality interrupts, product rejection occurs.
Description
Technical field
The present invention relates to semiconductor integrated circuit manufacturing technology field, and more particularly to a kind of HCD boards are used to have and cooled down
The pipeline cold-trap of temperature adjustment function.
Background technology
HCD boards are low temperature silicon nitride stove (furnace tube device), may be implemented under the conditions of relative low temperature, are passed through into boiler tube
HCD and NH3, in technique initialization environment under low pressure is met, chemical reaction generation silicon nitride occurs in silicon chip surface, belongs to low pressure
Vapour deposition (LPCVD) technique is learned, wherein HCD gas componants are silicon hexachloride (Si2Cl6)。
Process gas will produce many accessory substances after reactor growth area is left, and these accessory substances are cold in vacuum pipe
But dust, particle will be turned into afterwards, some will be adsorbed in vacuum pipe, valve interior surface, block vacuum pipe, valve, particularly
The sealing property of valve is had a strong impact on, some is inhaled into vavuum pump, influences the performance and service life of pump.Therefore, go out
The technical measures that cold-trap is set on vacuum pipe close to reactor end are showed, to stop that these dust enter vacuum system.
After piping cold-trap, its temperature can be reduced gradually technique discharge gas, but in the initial portion for entering pipeline cold-trap
Point, because cooling extent is inadequate, causes accessory substance originally will not condense attachment in the part respective tube roadbed, thus, and then cause
In pipeline cold-trap part, condensation is gathered in pipeline latter half to process gas accessory substance mostly, not only influences accessory substance and collects effect
Fruit, when certain thickness thickness is arrived in accumulation, pipeline cold-trap must carry out replacing maintenance.
Conventional cold-trap must take cold-trap apart when being cleaned so that vacuum line is frequently exposed in air.HCD machines
Platform technique is very sensitive to the oxygen in air and other minimum gas, it is desirable to which vacuum pipe is not exposed in air as far as possible.Again
Then, toxic and harmful gas is mostly related in technique, the complete toxic gas of these unreacteds or in-between product are adsorbed with cold-trap,
Will be abnormally dangerous during disassembly, cleaning are carried out to conventional cold-trap, easily cause personnel or equipment damage.
The content of the invention
The present invention proposes a kind of pipeline cold-trap of HCD boards with cooling temperature adjustment function, can effectively realize process gas
In accessory substance uniformly cool down deposition in pipeline cold-trap inwall, the maintenance frequency of pipeline cold-trap is greatly reduced, simultaneously as real
The adjustability of pipeline cold-trap chilling temperature is showed so that process byproducts are stably attached to pipeline cold-trap inwall, effectively prevent
Because situations such as temperature change causes accessory substance local shedding to cause vavuum pump to block, process abnormality interrupts, product rejection, occurs.
In order to achieve the above object, the present invention proposes a kind of pipeline cold-trap of HCD boards with cooling temperature adjustment function, institute
It is double layer hollow metal structure to state pipeline cold-trap tube wall, and its hollow space is provided with around the hollow pipeline of shape, the hollow pipeline
Inside has cooling medium；
The hollow pipeline porch is provided with regulating valve, for adjusting internal cooling rate-of flow；
Wherein, the pipeline cold-trap is provided with controller, for auto-measuring pipeline cold-trap chilling temperature, and it is warm with setting
For output control signal to the regulating valve, realization automatically adjusts cooling medium consumption, and then realizes after angle value is compared calculating
Automatically adjust pipeline cold-trap chilling temperature.
Further, the hollow pipeline uses upper tightly lower sparse comb mode, improves technique discharge gas into pipeline
The cooling effect of cold-trap initial part.
Further, the cooling medium uses cooling water or cooling air as temperature-reducing medium according to cooling demand.
Further, the cooling medium enters from the hollow line entry of pipeline cold-trap upper end, the hollow tube from lower end
Way outlet flows out.
Further, the controller includes temperature sensor, and it is arranged on the pipeline cold-trap, by pipeline cold-trap
Temperature data is transferred to the controller.
Pipeline cold-trap of the HCD boards proposed by the present invention with cooling temperature adjustment function, pipeline cold-trap tube wall is in bilayer
Empty metal structure, its hollow space are to use upper tightly lower sparse comb mode, type of cooling root around the hollow pipeline of shape, hollow pipeline
It can use cooling water or cooling air can be with auto-measuring pipeline as temperature-reducing medium, its controller carried according to cooling demand
Cold-trap chilling temperature, output control signal automatically adjusts cooling to regulating valve, realization after being calculated compared with set temperature value
Rate-of flow, and then realize the purpose for automatically adjusting pipeline cold-trap chilling temperature.
The present invention can effectively realize that the accessory substance in process gas uniformly cools down deposition in pipeline cold-trap inwall, be greatly decreased
The maintenance frequency of pipeline cold-trap, simultaneously as realizing the adjustability of pipeline cold-trap chilling temperature so that process byproducts are steady
Surely pipeline cold-trap inwall is attached to, effectively prevent because temperature change causes accessory substance local shedding to cause vavuum pump blocking, work
Situations such as skill abnormal interrupt, product rejection, occurs.
Brief description of the drawings
The HCD boards that Fig. 1 show present pre-ferred embodiments use the pipeline cold-trap structure with cooling temperature adjustment function to show
It is intended to.
Embodiment
The embodiment of the present invention is provided below in conjunction with accompanying drawing, but the invention is not restricted to following embodiment.Root
According to following explanation and claims, advantages and features of the invention will become apparent from.It should be noted that accompanying drawing is using very simple
The form of change and non-accurately ratio is used, be only used for conveniently, lucidly aiding in illustrating the purpose of the embodiment of the present invention.
Fig. 1 is refer to, Fig. 1 show pipeline of the HCD boards with cooling temperature adjustment function of present pre-ferred embodiments
Cold-trap structure schematic diagram.The present invention proposes a kind of pipeline cold-trap 100 of HCD boards with cooling temperature adjustment function, the pipeline
Cold-trap tube wall 200 is double layer hollow metal structure, and its hollow space is provided with around the hollow pipeline 300 of shape, the hollow pipeline
300 inside have cooling medium；
The hollow pipeline porch 400 is provided with regulating valve 600, for adjusting internal cooling rate-of flow；
Wherein, the pipeline cold-trap 100 is provided with controller 700, for the chilling temperature of auto-measuring pipeline cold-trap 100,
And output control signal gives the regulating valve 600 after being calculated compared with set temperature value, realization automatically adjusts cooling medium
Flow, and then realize and automatically adjust the chilling temperature of pipeline cold-trap 100.
According to present pre-ferred embodiments, the hollow pipeline 300 uses upper tightly lower sparse comb mode, improves technique discharge
Gas is entering the cooling effect of the initial part of pipeline cold-trap 100.
The cooling medium is according to cooling demand using cooling water or cooling air as temperature-reducing medium.
Effectively to realize that cooling extent is consistent, and the accessory substance in process gas is set uniformly to be cooled down on pipeline cold-trap inwall
Deposition, the cooling medium enter from the hollow line entry 400 of pipeline cold-trap upper end, the hollow tube outlet 500 from lower end
Outflow.
The controller 700 includes temperature sensor 800, and it is arranged on the pipeline cold-trap 100, by pipeline cold-trap
100 temperature data is transferred to the controller 700.
In summary, pipeline cold-trap of the HCD boards proposed by the present invention with cooling temperature adjustment function, pipeline cold-trap tube wall
For double layer hollow metal structure, its hollow space is that hollow pipeline uses upper tightly lower sparse comb mode, cold around the hollow pipeline of shape
But mode can be using cooling water or cooling air as temperature-reducing medium according to cooling demand, and its controller carried can be automatic
Pipeline cold-trap chilling temperature is measured, output control signal is realized automatic to regulating valve after being calculated compared with set temperature value
Cooling medium consumption is adjusted, and then realizes the purpose for automatically adjusting pipeline cold-trap chilling temperature.
The present invention can effectively realize that the accessory substance in process gas uniformly cools down deposition in pipeline cold-trap inwall, be greatly decreased
The maintenance frequency of pipeline cold-trap, simultaneously as realizing the adjustability of pipeline cold-trap chilling temperature so that process byproducts are steady
Surely pipeline cold-trap inwall is attached to, effectively prevent because temperature change causes accessory substance local shedding to cause vavuum pump blocking, work
Situations such as skill abnormal interrupt, product rejection, occurs.
Although the present invention is disclosed above with preferred embodiment, so it is not limited to the present invention.Skill belonging to the present invention
Has usually intellectual in art field, without departing from the spirit and scope of the present invention, when can be used for a variety of modifications and variations.Cause
This, the scope of protection of the present invention is defined by those of the claims.
Claims (5)
- A kind of 1. pipeline cold-trap of HCD boards with cooling temperature adjustment function, it is characterised in that：The pipeline cold-trap tube wall is double layer hollow metal structure, and its hollow space, which is provided with, surround the hollow pipeline of shape, in described Empty channel interior has cooling medium；The hollow pipeline porch is provided with regulating valve, for adjusting internal cooling rate-of flow；Wherein, the pipeline cold-trap is provided with controller, for auto-measuring pipeline cold-trap chilling temperature, and and set temperature value For output control signal to the regulating valve, realization automatically adjusts cooling medium consumption after being compared calculating, and then realizes automatic Adjust pipeline cold-trap chilling temperature.
- 2. pipeline cold-trap of the HCD boards according to claim 1 with cooling temperature adjustment function, it is characterised in that：It is described Hollow pipeline uses upper tightly lower sparse comb mode, improves technique discharge gas and is imitated in the cooling for entering pipeline cold-trap initial part Fruit.
- 3. pipeline cold-trap of the HCD boards according to claim 1 with cooling temperature adjustment function, it is characterised in that：It is described Cooling medium is according to cooling demand using cooling water or cooling air as temperature-reducing medium.
- 4. pipeline cold-trap of the HCD boards according to claim 1 with cooling temperature adjustment function, it is characterised in that：It is described Cooling medium enters from the hollow line entry of pipeline cold-trap upper end, is flowed out from the hollow tube outlet of lower end.
- 5. pipeline cold-trap of the HCD boards according to claim 1 with cooling temperature adjustment function, it is characterised in that：It is described Controller includes temperature sensor, and it is arranged on the pipeline cold-trap, and the temperature data of pipeline cold-trap is transferred into the control Device processed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710613875.2A CN107388836A (en) | 2017-07-25 | 2017-07-25 | A kind of pipeline cold-trap of HCD boards with cooling temperature adjustment function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710613875.2A CN107388836A (en) | 2017-07-25 | 2017-07-25 | A kind of pipeline cold-trap of HCD boards with cooling temperature adjustment function |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107388836A true CN107388836A (en) | 2017-11-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710613875.2A Pending CN107388836A (en) | 2017-07-25 | 2017-07-25 | A kind of pipeline cold-trap of HCD boards with cooling temperature adjustment function |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202173796U (en) * | 2011-07-19 | 2012-03-28 | 北京百利嘉通润滑油科技发展有限公司 | Circulation cooling system for molecular distillation equipment |
| CN203710732U (en) * | 2014-02-20 | 2014-07-16 | 武汉大学 | Cold trap capable of externally connecting coolant |
| CN204122101U (en) * | 2014-08-29 | 2015-01-28 | 南通中泰化工有限公司 | A kind of acrylic acid adhesive coil pipe reactor |
| CN105709452A (en) * | 2014-12-17 | 2016-06-29 | 住友重机械工业株式会社 | Cold trap and control method of cold trap |
| CN205549657U (en) * | 2016-02-18 | 2016-09-07 | 国网河南省电力公司济源供电公司 | A cold -trap for gas separation |
| KR20170011411A (en) * | 2015-07-22 | 2017-02-02 | 반채헌 | Cold trap |
-
2017
- 2017-07-25 CN CN201710613875.2A patent/CN107388836A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202173796U (en) * | 2011-07-19 | 2012-03-28 | 北京百利嘉通润滑油科技发展有限公司 | Circulation cooling system for molecular distillation equipment |
| CN203710732U (en) * | 2014-02-20 | 2014-07-16 | 武汉大学 | Cold trap capable of externally connecting coolant |
| CN204122101U (en) * | 2014-08-29 | 2015-01-28 | 南通中泰化工有限公司 | A kind of acrylic acid adhesive coil pipe reactor |
| CN105709452A (en) * | 2014-12-17 | 2016-06-29 | 住友重机械工业株式会社 | Cold trap and control method of cold trap |
| KR20170011411A (en) * | 2015-07-22 | 2017-02-02 | 반채헌 | Cold trap |
| CN205549657U (en) * | 2016-02-18 | 2016-09-07 | 国网河南省电力公司济源供电公司 | A cold -trap for gas separation |
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Application publication date: 20171124 |
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