CN107367580A - Sensor detector and method - Google Patents
Sensor detector and method Download PDFInfo
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- CN107367580A CN107367580A CN201710587629.4A CN201710587629A CN107367580A CN 107367580 A CN107367580 A CN 107367580A CN 201710587629 A CN201710587629 A CN 201710587629A CN 107367580 A CN107367580 A CN 107367580A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0006—Calibrating gas analysers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/007—Arrangements to check the analyser
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/007—Arrangements to check the analyser
- G01N2033/0072—Arrangements to check the analyser by generating a test gas
Abstract
The present invention relates to technical field of measurement and test, more particularly to a kind of sensor detector and method, it is arranged at including test platform, light source, caisson, air distributing device, test cavity, optical assay device, the joints of optical fibre and terminal device, gas sensor to be detected in the test chamber body.The test cavity is arranged at the test platform, the caisson connects with the air distributing device, the air distributing device connects with the test cavity, gas flow control device is connected between the air distributing device and the test cavity, described gas sensor one end to be detected is connected by the joints of optical fibre with the light source, the other end is connected by the joints of optical fibre with the optical assay device, and the optical assay device is connected with the terminal device.Realize the performance test of the measuring accuracy to the gas sensor to be detected, response speed and testing result accuracy.
Description
Technical field
The present invention relates to technical field of measurement and test, in particular to a kind of sensor detector and method.
Background technology
Hydrogen energy source as a kind of new green power, have widely distributed (have water can hydrogen manufacturing), it is renewable it is never exhausted,
Pollution-free, energy density is big and wide application etc. is increasingly favored by people, and is obtained in industries such as chemical industry, space flight, military projects
To extensive development and application.
Hydrogen is flammable explosive gas, mixes with air and easily explodes.In order to ensure the industrial production that hydrogen be present
Process and the security that uses are, it is necessary to which hydrogen gas sensor detects.Hydrogen detection technique develops basic as hydrogen energy source
One of key technology, its research and development become more and more important, and national 921 manned astro-engineerings handle continuously displays 0-2%
Density of hydrogen is classified as research topic.Therefore, study high performance hydrogen gas sensor and have become national economy field and national defence
Important need, the performance of hydrogen gas sensor is an important factor for influenceing testing result accuracy, to realize hydrogen in actual applications
The performance detection accuracy of sensor is current urgent problem to be solved.
The content of the invention
In view of this, it is an object of the invention to provide a kind of sensor detector, by setting test platform, light
Source, caisson, air distributing device, test cavity, optical assay device, the joints of optical fibre and terminal device, and filled in distribution
Put and test between cavity and gas flow control device is set, realize the measuring accuracy to the gas sensor to be detected,
The performance test of response speed and testing result accuracy.
It is an object of the invention to provide a kind of sensor testing method, method is based on by being provided with test platform, light
Source, caisson, air distributing device, the sensor test for testing cavity, optical assay device, the joints of optical fibre and terminal device
Device is realized, and sets gas flow control device between air distributing device and test cavity, realizes to the gas to be detected
The performance test of the measuring accuracy of body sensor, response speed and testing result accuracy.
To achieve the above object, the embodiment of the present invention adopts the following technical scheme that：
A kind of sensor detector, including test platform, light source, caisson, air distributing device, test cavity, optics
Analytical equipment, the joints of optical fibre and terminal device, gas sensor to be detected are arranged in the test chamber body；
The test cavity is arranged at the test platform, and the caisson connects with the air distributing device, described to match somebody with somebody
Device of air connects with the test cavity, and being connected with gas flow control between the air distributing device and the test cavity fills
Put, described gas sensor one end to be detected is connected by the joints of optical fibre with the light source, the other end is connected by the optical fiber
Connect device to be connected with the optical assay device, the optical assay device is connected with the terminal device；
The caisson is multiple, and each caisson connects with the air distributing device respectively, the air distributing device
Gas in different caissons is obtained according to default distribution standard and is well mixed, afterwards in the gas flow control device
Control under, the air distributing device added according to scheduled rate into the test cavity it is well mixed after gas, the light
The light that credit analysis apparatus is sent at interval of the preset duration acquisition light source passes through the number before and after the gas sensor to be detected
According to so obtain the testing result of the gas sensor to be detected at different moments, the terminal device obtains inspection at different moments
Survey result and contrasted with the performance indications that prestore, analysis obtains the measuring accuracy of the gas sensor to be detected, response speed
The performance of degree and testing result accuracy.
Optionally, in the sensor test device, the light source is LASER Light Source, the gas sensor to be detected
For hydrogen sensor, multiple caissons include the caisson for being stored with nitrogen, and the test cavity is with being stored with nitrogen
Caisson connects.
Optionally, in the sensor test device, the sensor detector also include temperature control equipment and
Humidity conditioner, the temperature control equipment are arranged in the test chamber body and detect and/or adjust the test cavity
Interior temperature, the humidity conditioner are arranged in the test chamber body and detect and/or adjust in the test chamber body
Humidity.
Optionally, in the sensor test device, the gas sensor to be detected includes induction part, the sensing
Device test device also includes electrical signal detection device and two probe displacement adjustment devices, and the electrical signal detection device is used to examine
The electric signal at the induction part both ends is surveyed, analysis obtains the electrical property of the gas sensor to be detected；
One of them described probe displacement adjustment device is arranged at one end of the induction part and the electrical signal detection fills
Between putting, another described probe is arranged between the other end of the induction part and the signal supervisory instrument.
Optionally, in the sensor test device, the joints of optical fibre include Single mode communication optical fiber, multi-mode communication
Optical fiber and/or nuditing fiber.
Optionally, in the sensor test device, the air distributing device is dynamic gas mixer, the air distributing device
Distribution precision be 10ppb levels concentration.
The present invention also provides a kind of sensor testing method, applied to above-mentioned sensor detector, methods described bag
Include：
Open light source, optical assay device；
Air distributing device obtains the gas in each caisson according to default distribution standard and is well mixed；
Mixed gas is delivered in test cavity by gas flow control device according to the transmission rate that prestores；
Optical assay device obtains light source by the data before and after gas sensor to be detected at interval of preset duration, and obtains
Obtain the testing result of the gas sensor to be detected at different moments；
Terminal device obtains testing result at different moments and contrasted with the performance indications that prestore, and analysis obtains described treat
The performance of the measuring accuracy of detection gas sensor, response speed and testing result.
Optionally, in the sensor method of testing, also wrapped in unlatching light source, optical assay device foregoing description method
Include：
The test is cleaned by being passed through nitrogen into the test cavity with the caisson that the test cavity connects
Cavity.
Optionally, in the sensor method of testing, methods described also includes：
Temperature control equipment controls the temperature in the test chamber body to reach preset temperature value, humidity conditioner control institute
State the humidity in test chamber body and reach default humidity value.
Optionally, in the sensor method of testing, methods described also includes：
Respectively sensing of two probes to the gas sensor to be detected is adjusted by two probe displacement adjustment devices
Behind the distance between portion both ends, electric signal sensor test device detects the electric signal of the gas sensor to be detected.
A kind of sensor detector provided by the invention and method, by set test platform, light source, caisson,
Air distributing device, test cavity, optical assay device, the joints of optical fibre and terminal device, and in air distributing device and test cavity
Between gas flow control device is set, realize measuring accuracy, response speed and inspection to the gas sensor to be detected
Survey the performance test of result accuracy.
To enable the above objects, features and advantages of the present invention to become apparent, preferred embodiment cited below particularly, and coordinate
Appended accompanying drawing, is described in detail below.
Brief description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below by embodiment it is required use it is attached
Figure is briefly described, it will be appreciated that the following drawings illustrate only the section Example of the present invention, therefore be not construed as pair
The restriction of the scope of the present invention, for those of ordinary skill in the art, on the premise of not paying creative work, also
Other related accompanying drawings can be obtained according to these accompanying drawings.
Fig. 1 is a kind of structural representation of sensor detector provided in an embodiment of the present invention.
Fig. 2 is a kind of another structural representation of sensor detector provided in an embodiment of the present invention.
Fig. 3 is a kind of another structural representation of sensor detector provided in an embodiment of the present invention.
Fig. 4 is a kind of schematic flow sheet of sensor testing method provided in an embodiment of the present invention.
Fig. 5 is a kind of another schematic flow sheet of sensor testing method provided in an embodiment of the present invention.
Icon：10- sensor detectors；20- gas sensors to be detected；110- test platforms；130- light sources；150-
Caisson；170- air distributing devices；180- gas flow control devices；190- tests cavity；210- optical assay devices；230-
Temperature control equipment；250- humidity conditioners；The 270- joints of optical fibre；290- terminal devices；310- electrical signal detection devices；
330- probe displacement adjustment devices；350- vacuum extractors.
Embodiment
To make the purpose, technical scheme and advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention
In accompanying drawing, the present invention is applied by the technical scheme in example is clearly and completely described, it is clear that described embodiment is this
Invention part of the embodiment, rather than whole embodiments.The embodiment of the present invention for generally describing and showing in this figure
Component can be configured to arrange and design with a variety of.
Therefore, below the detailed description of the embodiments of the invention to providing in the accompanying drawings be not intended to limit it is claimed
The scope of the present invention, but be merely representative of the present invention selected embodiment.It is common based on the embodiment in the present invention, this area
The every other embodiment that technical staff is obtained under the premise of creative work is not made, belong to the model that the present invention protects
Enclose.
It should be noted that：Similar label and letter represents similar terms in following accompanying drawing, therefore, once a certain Xiang Yi
It is defined, then it further need not be defined and explained in subsequent accompanying drawing in individual accompanying drawing.
In the description of the invention, it is also necessary to explanation, unless otherwise clearly defined and limited, term " setting ",
" connection " should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected, or be integrally connected；Can be
Mechanically connect or electrically connect；Can be joined directly together, can also be indirectly connected by intermediary, can be two
The connection of element internal.For the ordinary skill in the art, with concrete condition above-mentioned term can be understood in the present invention
In concrete meaning.
Incorporated by reference to Fig. 1, Fig. 2 and Fig. 3, the present invention provides a kind of sensor detector 10, the sensor test dress
10 performances for being used to detect gas sensor 20 to be detected are put, the sensor detector 10 includes：Test platform 110, light
Source 130, caisson 150, air distributing device 170, test cavity 190, optical assay device 210, the joints of optical fibre 270 and end
End equipment 290, gas sensor 20 to be detected are arranged in the test cavity 190.
The test cavity 190 is arranged at the test platform 110, the caisson 150 and the air distributing device 170
Connection, the air distributing device 170 with it is described test cavity 190 connect, the air distributing device 170 with it is described test cavity 190 it
Between be connected with gas flow control device 180, described one end of gas sensor 20 to be detected by the joints of optical fibre 270 with it is described
Light source 130 is connected, the other end is connected by the joints of optical fibre 270 with the optical assay device 210, the optical analysis
Device 210 is connected with the terminal device 290.
In the present embodiment, the light source 130 is LASER Light Source.The test platform 110 is used for optical assay device
210 play support or fixed effect with test cavity 190 and light source 130.The test platform 110 can be also used for institute
State caisson 150 and air distributing device 170 is played a supporting role, the shape size of the test platform 110 can not be done specifically
Limit, according to the actual requirements and facilitate user to treat detection gas sensor 20 and carry out test to be configured.
The caisson 150 has good air-tightness, and each caisson 150 can be used for storing different gas
Body, it is used to store gas of the same race there may also be two or more caisson 150.It is each in the present embodiment described
The gas that caisson 150 stores is different.The gas can be but not limited to rare gas, toxic gas, fuel gas, oxygen
Gas, nitrogen, air, carbon dioxide and/or hydrogen.
Optionally, in multiple caissons 150, a caisson 150 be present and connect with the test cavity 190
It is logical, and the gas stored in the caisson 150 is the gas that the gas sensor to be detected 20 can not detect, by upper
State and set so that being not present what the gas sensor 20 to be detected was able to detect that under original state in the caisson 150
Gas, to ensure the reliability of testing result.In the present embodiment, multiple caissons 150 include being stored with the storage of nitrogen
Device of air 150, the test cavity 190 connect with being stored with the caisson 150 of nitrogen.
The air distributing device 170 can be dynamic air-distributing device, and the dynamic air-distributing device possesses two level distribution ability, can
Wide scope and wide range distribution of the ppb magnitudes to 10% magnitude are realized automatically for the target source of the gas of various concentrations.In this implementation
In example, the gas dilution ratio of the dynamic air-distributing device is up to 10000000:1, pressure-resistant 1.6Mpa, and gas leak rate is less than 10- 8Pa.m3/s.The dynamic air-distributing device can realize the full-automatic distribution of wide scope low concentration for the target source of the gas of various concentrations,
And there are two kinds of regulative modes of Concentration mode and flow rate mode.It need to only pre-set with gas concentration, the dynamic air-distributing device
Whether need secondary distribution, realize the distribution of wide scope low concentration if automatically selecting.Maximum dilution ratio (relative to N2)：Once match somebody with somebody
Gas maximum dilution ratio is 1L/0.1mL=10000 times, beyond the dilution ratio, i.e., carries out secondary distribution, secondary distribution automatically
After realize that distribution precision is 10ppb levels.
The gas flow control device 180 is used to control the air distributing device 170 to transmit into the test cavity 190
Transfer rate during gas.By setting the gas flow control device 180 energy of gas sensor 20 to be detected
The enough gas to various concentrations detects, and obtains the gas sensor to be detected 20 and detects testing result under various concentrations
Accuracy.
The test cavity 190 has good air-tightness, specifically, the test cavity 190 can use negative pressure, positive densification
Envelope, the leak rate of the test cavity 190 are less than 10-8Pa.m3/s.The shape of the cavity can be square, cuboid, cylinder
Body or irregular cavity, detected as long as can realize and treat detection gas sensor 20.Specifically, the test chamber
The capacity of body 190 is additionally provided with an observation window between 0.8L to the test cavity 190 between 2L, to facilitate user's observation experiment
During test cavity 190 in situation.
Optionally, the test cavity 190 is additionally provided with a vacuum extractor 350, the vacuum extractor 350 and institute
Test cavity 190 is stated to connect., can more secondary controls and the test before treating detection gas sensor 20 and carrying out performance test
The caisson 150 that cavity 190 connects is filled with nitrogen into the test cavity 190, is extracted out afterwards by vacuum extractor 350
Nitrogen in the test cavity 190 is ensured in detection process because external factor influences to treat with cleaning the test cavity 190
The performance test results of detection gas sensor 20.
Pass through above-mentioned setting so that the gas sensor 20 to be detected when carrying out performance test, effectively prevent because
The situation of such environmental effects test result, and research and development for gas sensor 20 to be detected and gas sensitive and application provide
A kind of new test approach.
The gas sensor to be detected 20 can be rare gas detection sensor, toxic gas detection sensor, can
Combustion gas body detecting sensor or oxygen detection sensor, carbon dioxide detection sensor or hydrogen detection sensor.In this implementation
In example, the gas sensor 20 to be detected is hydrogen detection sensor.
The optical assay device 210 passes through the gas sensing to be detected for obtaining the light that the light source 130 is sent
Data before and after device 20, the data include light intensity and optical wavelength etc., and obtain testing result according to the data.Specifically,
The testing result can be according to optical wavelength changing value and/or intensity variation value and optical wavelength rate of change and/or light
The response speed and measuring accuracy of gas sensor 20 to be detected corresponding to strong rate of change etc..
The terminal device 290, which can be but not limited to computer, tablet personal computer etc., has the equipment of data-handling capacity, institute
Stating terminal device 290 includes the performance indications that prestore, and the terminal device 290 can be used for obtaining the optical assay device
Testing result in 210, and contrasted according to testing result and the performance indications that prestore, analysis obtains the gas to be detected and passed
The performance of the measuring accuracy of sensor 20, response speed and testing result.
Specifically, when treating detection gas sensor 20 and being detected, the air distributing device 170 is according to default distribution mark
Standard obtains the gas in different caissons 150 and is well mixed, afterwards in the control of the gas flow control device 180
Under, the air distributing device 170 adds the gas after being well mixed, the light according to scheduled rate into the test cavity 190
The light that credit analysis apparatus 210 is sent at interval of the preset duration acquisition light source 130 passes through the gas sensor 20 to be detected
Front and rear data and then the testing result of the acquisition gas sensor 20 to be detected at different moments, the terminal device 290 obtain
Take testing result at different moments and contrasted with the performance indications that prestore, analysis obtains the gas sensor to be detected 20
The performance of measuring accuracy, response speed and testing result.
Wherein, the performance indications that prestore include performance rate, measuring accuracy corresponding to the response speed of device to be detected
Good and bad grade corresponding to corresponding performance rate, testing result accuracy.It can be realized to described to be detected by above-mentioned setting
The performance test of the measuring accuracy of gas sensor 20, response speed and testing result.
Optionally, the sensor detector 10 also includes temperature control equipment 230 and humidity conditioner 250, institute
Temperature control equipment 230 is stated to be arranged in the test cavity 190 and detect and/or adjust the temperature in the test cavity 190
Degree, the humidity conditioner 250 are arranged in the test cavity 190 and detect and/or adjust in the test cavity 190
Humidity.By setting the temperature control equipment 230 and humidity conditioner 250 to test different temperatures and/or humidity
Measuring accuracy, response speed and the testing result of gas sensor 20 to be detected under environment.
It should be noted that the gas sensor to be detected 20 has induction part, the sensor detector 10 is also
Including electrical signal detection device 310, the electrical signal detection device 310 is connected to the both ends of the induction part.By will to institute
State the progress of gas sensor 20 electrical signal detection to be detected and further detect the gas sensor to be detected 20 in detection process
In electric conductivity.The electrical signal detection device 310 includes resistance detection device, current sensing device and/or voltage detecting
Device.
The electrical signal detection device 310 obtains resistance, the voltage of gas sensor 20 to be detected at interval of preset duration
Data, the data that data and the electrical signal detection device 310 obtained according to the optical assay device 210 detects with it is pre-
Deposit performance indications to be compared, so as to draw the more accurately measuring accuracy of gas sensor 20 to be detected, response speed, again
The results of property such as multiple stability.
Optionally, the both ends of the electrical signal detection device 310 are connected by probe with the both ends of the induction part respectively,
The sensor detector 10 also includes probe displacement adjustment device 330, and the probe displacement adjustment device 330 is two,
One of them described probe displacement adjustment device 330 is arranged at one end of the induction part and the electrical signal detection device 310
Between, another described probe is arranged between the other end of the induction part and the electrical signal detection device 310.To institute
When stating the progress of gas sensor 20 electrical signal detection to be detected, the probe is may move, to detect the telecommunications between different parts
Number.
Optionally, the sensor detector 10 also includes the joints of optical fibre 270, and the joints of optical fibre 270 connect
Between the light source 130 and the gas sensor to be detected 20 and/or the optical assay device 210 with it is described to be detected
Between gas sensor 20, the joints of optical fibre 270 include Single mode communication optical fiber, multi-mode communication optical fiber and/or nuditing fiber.
By using the joints of optical fibre 270 to test different optical fiber to being influenceed caused by the gas sensor 20 to be detected, enter one
It is accurate that step detects response speed, measuring accuracy and test result of the gas sensor 20 to be detected under different interface units
The performance of true property.
It can also be two that the joints of optical fibre 270, which can be one, in the present embodiment, the joints of optical fibre
270 be two, namely the joints of optical fibre 270 include first joints of optical fibre and second joints of optical fibre, first light
Fiber connector is connected between the light source 130 and the gas sensor to be detected 20, second joints of optical fibre connection
Between the optical assay device 210 and the gas sensor to be detected 20.By using first joints of optical fibre
The sensor detector 10 is enabled to treat detection gas in the case of realizing different optical transports with second joints of optical fibre
The carry out performance test of sensor 20.
Incorporated by reference to Fig. 4, the present invention also provides a kind of sensor testing method, and the sensor testing method is based on above-mentioned
Sensor detector 10 realizes that the sensor testing method comprises the following steps：
Step S120：Open light source 130, optical assay device 210.
Step S140：Air distributing device 170 obtains the gas in each caisson 150 according to default distribution standard and mixed equal
It is even.
The default distribution standard can be set according to the measuring accuracy of user's request and gas sensor to be detected 20
Put, the default distribution standard can be in unit volume, during the detectable gas of the gas sensor 20 to be detected accounts for
Gas volume is preset value, and the preset value can be modified according to the actual requirements；It can also be gas sensor 20 to be detected
It is preset value that the quality of detectable gas, which accounts for total gaseous mass, and the preset value can be configured according to the actual requirements.
This is not specifically limited.
Step S160：Mixed gas is delivered to test by gas flow control device 180 according to the transmission rate that prestores
In cavity 190.
Wherein, the transmission rate that prestores can be set according to actual conditions, and the transmission rate that prestores can tried
Test during progress and modify, it zero can also be arbitrary value that the speed, which can be, be not specifically limited herein.
Step S180：Optical assay device 210 obtains light source 130 at interval of preset duration and passes through gas sensor to be detected
Data before and after 20, and obtain the testing result of the gas sensor to be detected 20 at different moments.
Wherein, the preset duration can be configured with several seconds, several milliseconds or a few microseconds according to actual conditions, as long as
Light source 130 at different moments can be obtained, by the data before and after gas sensor 20 to be detected, to be not specifically limited herein.
Step S200：Terminal device 290 obtains testing result at different moments and contrasted with the performance indications that prestore, point
Analyse the performance of the measuring accuracy for obtaining the gas sensor to be detected 20, response speed and testing result.
The measuring accuracy for treating detection gas sensor 20, corresponding speed and testing result are realized by the above method
The performance evaluation of accuracy.
Incorporated by reference to Fig. 5, optionally, to avoid, when treating the progress performance test of detection gas sensor 20, testing cavity
The gas that the gas sensor to be detected 20 is able to detect that in 190 be present and cause error.In the present embodiment, optionally exist
Before opening light source 130, optical assay device 210, methods described also includes：
Step S220：By leading to the caisson 150 that the test cavity 190 connects into the test cavity 190
Enter the nitrogen cleaning test cavity 190.
It should be noted that the accuracy of the performance evaluation of detection gas sensor 20 is treated for guarantee, in the present embodiment,
Pure nitrogen gas can be passed through by the caisson 150 that the test cavity 190 connects, and be purged according to 1000ml/min speed
About 30min, about 10pa is then evacuated to, inner vacuum state is kept after purging evacuates 3 times repeatedly.
Optionally, to detect the stability of gas sensor 20 to be detected, obtain under different detection environment to described to be checked
Influence caused by surveying gas sensor 20.In the present embodiment, the sensor testing method also includes：
Step S240：Temperature control equipment 230 controls the temperature in the test cavity 190 to reach preset temperature value, wet
Degree control device 250 controls the humidity in the test cavity 190 to reach default humidity value.
Optionally, further to ensure the accuracy of testing result, in the present embodiment, the sensor testing method is also
Including：
Step S260：Two probes are adjusted to the gas to be detected by two probe displacement adjustment devices 330 respectively
Behind the distance between induction part both ends of sensor 20, electric signal sensor test device 10 detects the gas sensing to be detected
The electric signal of device 20.
To sum up, a kind of sensor detector 10 provided in an embodiment of the present invention and method, the sensor detector
10 by setting test platform 110, light source 130, test cavity 190, caisson 150, air distributing device 170, optical analysis to fill
Putting 210, terminal device 290 and gas flow control device 180 realizes measuring accuracy, the sound of gas sensor 20 to be detected
Answer the performance detection of duration and testing result accuracy.Further, by setting temperature control equipment 230 and humid control
Device 250 realizes the performance test of gas sensor to be detected 20 under different temperatures and/or different humidity environment.Further
, by setting the electrical signal detection device 310 and probe displacement adjustment device 330 to detect gas sensor 20 to be detected
The change of electric signal in test process simultaneously obtains the performance of the gas sensor to be detected 20 according to change in electric.Enter
One step, realize the performance test of gas sensor 20 to be detected under different transmission mediums by setting the joints of optical fibre 270.
It should be noted that herein, the relational terms of such as " first ", " second " and " the 3rd " or the like are only used
By an entity or operation with another entity or operate make a distinction, and not necessarily require or imply these entities or
Any this actual relation or order between operation be present.Moreover, term " comprising " or any other variant are intended to contain
Lid nonexcludability includes, so that process, article or equipment including a series of elements not only include those key elements, and
And also include the other element that is not expressly set out, or also include for this process, article or equipment intrinsic want
Element.In the absence of more restrictions, the key element limited by sentence "including a ...", it is not excluded that wanted including described
Other identical element also be present in the process of element, article or equipment.
The foregoing is only a specific embodiment of the invention, but protection scope of the present invention is not limited thereto, any
Those familiar with the art the invention discloses technical scope in, change or replacement can be readily occurred in, should all be contained
Cover within protection scope of the present invention.Therefore, protection scope of the present invention described should be defined by scope of the claims.
Claims (10)
1. a kind of sensor detector, it is characterised in that including test platform, light source, caisson, air distributing device, test
Cavity, optical assay device, the joints of optical fibre and terminal device, gas sensor to be detected are arranged at the test cavity
It is interior；
The test cavity is arranged at the test platform, and the caisson connects with the air distributing device, the distribution dress
Put and connected with the test cavity, be connected with gas flow control device between the air distributing device and the test cavity, institute
State gas sensor one end to be detected be connected by the joints of optical fibre with the light source, the other end by the joints of optical fibre with
The optical assay device connection, the optical assay device are connected with the terminal device；
To be multiple, each caisson connects the caisson with the air distributing device respectively, the air distributing device according to
Default distribution standard obtains the gas in different caissons and is well mixed, afterwards in the control of the gas flow control device
Under system, the air distributing device adds the gas after being well mixed, the optics point according to scheduled rate into the test cavity
The light that analysis apparatus is sent at interval of the preset duration acquisition light source is entered by the data before and after the gas sensor to be detected
And the testing result of the gas sensor to be detected at different moments is obtained, the terminal device obtains detection knot at different moments
Fruit is simultaneously contrasted with the performance indications that prestore, analysis obtain the measuring accuracy of the gas sensor to be detected, response speed and
The performance of testing result accuracy.
2. sensor detector according to claim 1, it is characterised in that the light source is LASER Light Source, described to treat
Detection gas sensor is hydrogen sensor, and multiple caissons include the caisson for being stored with nitrogen, the test cavity
Connected with the caisson for being stored with nitrogen.
3. sensor detector according to claim 1, it is characterised in that the sensor detector also includes temperature
Control device and humidity conditioner are spent, the temperature control equipment is arranged in the test chamber body and detects and/or adjust
Temperature in the test chamber body, the humidity conditioner be arranged in the test chamber body and detect and/or adjustment described in
Humidity in test chamber body.
4. sensor detector according to claim 1, it is characterised in that the gas sensor to be detected includes sense
Portion is answered, the sensor detector also includes electrical signal detection device and two probe displacement adjustment devices, the electric signal
Detection means is used for the electric signal for detecting the induction part both ends, and analysis obtains the electrical property of the gas sensor to be detected；
One of them described probe displacement adjustment device be arranged at one end of the induction part and the electrical signal detection device it
Between, another described probe is arranged between the other end of the induction part and the signal supervisory instrument.
5. sensor detector according to claim 1, it is characterised in that the joints of optical fibre include Single mode communication
Optical fiber, multi-mode communication optical fiber and/or nuditing fiber.
6. sensor detector according to claim 1, it is characterised in that the air distributing device is dynamic air-distributing system
System, the distribution precision of the air distributing device is 10ppb levels.
7. a kind of sensor testing method, applied to the sensor detector described in any one of claim 4-6, its feature
It is, methods described includes：
Open light source, optical assay device；
Air distributing device obtains the gas in each caisson according to default distribution standard and is well mixed；
Mixed gas is delivered in test cavity by gas flow control device according to the transmission rate that prestores；
Optical assay device obtains light source by the data before and after gas sensor to be detected at interval of preset duration, and obtains institute
State the testing result of gas sensor to be detected at different moments；
Terminal device obtains testing result at different moments and contrasted with the performance indications that prestore, and analysis obtains described to be detected
The performance of the measuring accuracy of gas sensor, response speed and testing result.
8. sensor testing method according to claim 7, it is characterised in that open light source, optical assay device it
Preceding methods described also includes：
The test cavity is cleaned by being passed through nitrogen into the test cavity with the caisson that the test cavity connects.
9. sensor testing method according to claim 7, it is characterised in that methods described also includes：
Temperature control equipment controls the temperature in the test chamber body to reach preset temperature value, and humidity conditioner controls the survey
Humidity in examination cavity reaches default humidity value.
10. sensor testing method according to claim 7, it is characterised in that methods described also includes：
Two probes are adjusted to the induction part two of the gas sensor to be detected by two probe displacement adjustment devices respectively
Behind the distance between end, electric signal sensor test device detects the electric signal of the gas sensor to be detected.
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