CN107367515A - A kind of ultrathin flexible IC substrate ink foreign matter detection systems and method - Google Patents

A kind of ultrathin flexible IC substrate ink foreign matter detection systems and method Download PDF

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CN107367515A
CN107367515A CN201710576558.8A CN201710576558A CN107367515A CN 107367515 A CN107367515 A CN 107367515A CN 201710576558 A CN201710576558 A CN 201710576558A CN 107367515 A CN107367515 A CN 107367515A
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foreign matter
flexible
image
substrates
point
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CN107367515B (en
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胡跃明
钟智彦
罗家祥
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South China University of Technology SCUT
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/0008—Industrial image inspection checking presence/absence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G01N2021/945—Liquid or solid deposits of macroscopic size on surfaces, e.g. drops, films, or clustered contaminants
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10024—Color image
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20212—Image combination
    • G06T2207/20221—Image fusion; Image merging
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer

Abstract

The present invention discloses a kind of ultrathin flexible IC substrates ink foreign matter detection system, including：Micro-imaging acquisition system, including video camera and the high resolution digital image by camera acquisition flexibility IC substrate each several parts；Image fusion system, for by all image mosaics after the completion of shooting into complete flexible IC substrate images；Ink foreign matter rapid detection system, ink foreign matter region is determined for carrying out color space conversion and the connective judgement of manifold to the flexible IC substrates high-definition picture spliced.The invention also discloses a kind of ultrathin flexible IC substrates ink foreign matter detecting method.The present invention solves the ink foreign matter defect quick detection problem during flexible IC substrate productions, and detection is fast and reliable.

Description

A kind of ultrathin flexible IC substrate ink foreign matter detection systems and method
Technical field
The present invention relates to ultrathin flexible IC substrates field, more particularly to a kind of flexible IC substrates ink foreign matter defect is quick Detecting system and method.
Technical background
Flexible IC substrates have a wide range of applications in many industries, mechanical, electrical including car industry, military, aerospace, calculating Letter, medical treatment and consumer products etc..The place that flexible IC substrates are infected with by ink foreign matter in process of production can be because activator Absorption is insufficient and causes chemical copper to cover sex chromosome mosaicism, so as to influence the performance of flexible IC substrates.It follows that ultrathin flexible IC bases The importance of plate ink foreign bodies detection in process of production.
The content of the invention
For above-mentioned technical problem, the present invention solves ink foreign matter defect quick detection during flexible IC substrate productions Problem, there is provided a kind of system and method that can quickly and accurately detect flexible IC substrates ink foreign matter.
The present invention is achieved through the following technical solutions：
A kind of ultrathin flexible IC substrates ink foreign matter detection system, including：
Micro-imaging acquisition system, including video camera and the high-resolution by camera acquisition flexibility IC substrate each several parts Digital picture；
Image fusion system, for by all image mosaics after the completion of shooting into complete flexible IC substrate images；
Ink foreign matter rapid detection system, for carrying out color space to the flexible IC substrates high-definition picture spliced Conversion and the connective judgement of manifold determine ink foreign matter region.
Further, described video camera is high-definition camera.
A kind of ultrathin flexible IC substrate ink foreign matter detecting methods based on the system, including step：
The digital picture that step (1) passes through camera acquisition flexibility IC substrate each several parts；
Step (2) by all image mosaics after the completion of shooting into complete flexible IC substrate images, due to using high-precision Degree video camera is taken pictures, and the fraction image of flexible IC substrates is once only photographed by moving stage, only completes shooting Complete flexible IC substrate images are only after all image mosaics afterwards；
Step (3) carries out color space conversion to the flexible IC substrates high-definition picture spliced and manifold connects Property is judged to determine ink foreign matter region.
Further, the step (1) specifically includes：
Step (1.1) sets the parameter of current location and video camera；
Step (1.2) plans the collection path of article carrying platform, to ensure that IMAQ is complete；
Camera acquisition flexibility IC substrate images after step (1.3) is mobile and stable after objective table；
Step (1.4) objective table continues to move to and judges whether objective table is moved to set destination locations；
Step (1.5) completes the collection of image if reaching, and otherwise return to step (1.3) continues IMAQ operation.
Further, the step (2) specifically includes：
The image for occurring blur motion, distortion or folded situation in gatherer process is first carried out correction process by step (2.1)；
Step (2.2) is spliced the image after processing, obtains complete flexible IC substrate images.
Further, the step (3) specifically includes：
Step (3.1) is smoothly pre-processed to the flexible IC substrates high-definition picture spliced；
Step (3.2) carries out RGB-Lab color spaces to smooth pretreated flexible IC substrates high-definition picture and turned Change, choose brightness L * component and operated, reach the purpose for removing color space redundancy, the time is saved for subsequent operation；
Step (3.3) carries out manifold connection sex determination to the image obtained after conversion；
Step (3.4) ink foreign matter region determines.
Further, the image smoothing preprocessing process of described step (3.1) includes image preprocessing, is put down using Gauss Sliding low pass filter removes picture noise, makes image smoother.
Further, in described step (3.2), the L * component of Lab color spaces represents the brightness of pixel, span It is [0,100], represents from black to pure white；The aberration of a and b representation in components pixels, a represent the scope from red to green, taken Value scope is [127, -128]；B represents the scope from yellow to blueness, and span is [127, -128].
Further, described step (3.3) specifically includes：
Step (3.3.1) coordinate convention is, it is specified that be X-axis positive direction to the right, downward is Y-axis positive direction；
Step (3.3.2) point set value is corresponding with pixel value, because digital picture is made up of some discrete points, so can Image is discrete digitized, point set is can be used as corresponding to the position of coordinate, the value at coordinate midpoint is point set value, in the picture Referred to as pixel value；
The point of manifold is asked second order to lead by step (3.3.3), i.e., carries out second order derivation to all pixels value of image；
Step (3.3.4) connection topology is put and marked, and second dervative is connected for negative point, and will be next by search method Tie point is not labeled as T in the point in 0 ° of directioni(x,y)；
Step (3.3.5) judges connectedness, to avoid the interference of noise or isolated point, is defined centered on a certain pixel Point and the distance L put, are connection in the range of L, otherwise are referred to as separating not connect.
Further, the step (3.4) specifically includes：
Step (3.4.1) determines regional center, if the manifold of image has connectedness, the centre bit of zoning Put To(xo,yo)；
Step (3.4.2) linkage flag point and center, by the mark point Ti(x, y) and central point To(xo,yo) connection；
Step (3.4.3) calculates distance Si, to simplify the complexity calculated, T is calculated using manhatton distancei(x, y) and To (xo,yo) distance：
Si=| xi-xo|+|yi-yo|；
Step (3.4.4) judges region shape, by each mark point Ti(x, y) and central point To(xo,yo) distance SiDescending Arrangement, if maximum SmaxWith minimum value SminDiffer by more than threshold value t and be then judged to ink foreign matter region, be otherwise the one of normal picture Part, wherein, t can be trained to be determined in advance to avoid noise jamming from quoting by multiple images.
Compared with prior art, the invention has the advantages that and effect：
(1) present invention eliminates the redundancy of high-resolution colour picture using RGB-Lab color space conversions, accelerates The speed of ink foreign bodies detection.
(2) present invention promptly determines ink foreign matter region using manifold connectedness.
(3) present invention has an important breakthrough to flexible IC substrates in quality control, improves flexible IC substrate productions The reliability of process.
Brief description of the drawings
Fig. 1 is the micro-imaging acquisition system flow chart in detection method.
Fig. 2 is the image fusion system flow chart in detection method.
Fig. 3 is the ink foreign matter rapid detection system flow chart in detection method.
Fig. 4 is the manifold connectedness decision flowchart in detection method.
Fig. 5 is that the ink foreign matter region in detection method determines flow chart.
Embodiment
The goal of the invention of the present invention is described in further detail with specific embodiment below in conjunction with the accompanying drawings, embodiment is not It can repeat one by one herein, but therefore embodiments of the present invention are not defined in following examples.
Embodiment one
A kind of ultrathin flexible IC substrates ink foreign matter detection system, including：
Micro-imaging acquisition system, including video camera and the high-resolution by camera acquisition flexibility IC substrate each several parts Digital picture；
Image fusion system, for by all image mosaics after the completion of shooting into complete flexible IC substrate images；
Ink foreign matter rapid detection system, for carrying out color space to the flexible IC substrates high-definition picture spliced Conversion and the connective judgement of manifold determine ink foreign matter region.
Described video camera is high-definition camera.
Embodiment two
A kind of ultrathin flexible IC substrate ink foreign matter detecting methods based on the system, including step：
The digital picture that step (1) passes through camera acquisition flexibility IC substrate each several parts；
Step (2) by all image mosaics after the completion of shooting into complete flexible IC substrate images, due to using high-precision Degree video camera is taken pictures, and the fraction image of flexible IC substrates is once only photographed by moving stage, only completes shooting Complete flexible IC substrate images are only after all image mosaics afterwards；
Step (3) carries out color space conversion to the flexible IC substrates high-definition picture spliced and manifold connects Property judge to determine ink foreign matter region.
Specifically, as shown in figure 1, the step (1) specifically includes：
Step (1.1) sets the parameter of current location and video camera；
Step (1.2) plans the collection path of article carrying platform, to ensure that IMAQ is complete；
Camera acquisition flexibility IC substrate images after step (1.3) is mobile and stable after objective table；
Step (1.4) objective table continues to move to and judges whether objective table is moved to set destination locations；
Step (1.5) completes the collection of image if reaching, and otherwise return to step (1.3) continues IMAQ operation.
Specifically, as shown in Fig. 2 the step (2) specifically includes：
The image for occurring blur motion, distortion or folded situation in gatherer process is first carried out correction process by step (2.1)；
Step (2.2) is spliced the image after processing, obtains complete flexible IC substrate images.
Because image is gathered by high-resolution metallography microscope imaging system, so whole image of flexible IC substrates is adopted Collection is formed by fusion after shooting multiple images.Therefore the purpose is to have which kind of defect to spread to detect the flexible IC substrates Pad.
Specifically, as shown in figure 3, the step (3) specifically includes：
Step (3.1) is smoothly pre-processed to the flexible IC substrates high-definition picture spliced, has decrease of noise functions；
Step (3.2) carries out RGB-Lab color spaces to smooth pretreated flexible IC substrates high-definition picture and turned Change, choose brightness L * component and operated, reach the purpose for removing color space redundancy, the time is saved for subsequent operation；
Step (3.3) carries out manifold connection sex determination to the image obtained after conversion, if with connectedness, may Ink foreign matter be present, be otherwise probably the line map or noise of flexible IC substrate images；
Step (3.4) ink foreign matter region determines, i.e., by judging that the shape in region is determined whether for ink foreign matter.
Specifically, the image smoothing preprocessing process of described step (3.1) includes image preprocessing, is put down using Gauss Sliding low pass filter removes picture noise, makes image smoother, and more accurate in manifold connectedness determination step, So as to precisely determine ink foreign matter region；
Specifically, in the step (3.2), the L * component of Lab color spaces represents the brightness of pixel, and span is [0,100], represent from black to pure white；The aberration of a and b representation in components pixels, a represent the scope from red to green, value Scope is [127, -128]；B represents the scope from yellow to blueness, and span is [127, -128].In flexible IC substrates If speckle with ink foreign matter, it will following three kinds of situations occur：First, ink is entirely in yellow circuit copper；Second, an ink part In yellow circuit copper, a part is in black background；3rd, ink is entirely in black background.For three cases above, A kind of situation ink and the contrast of yellow circuit are obvious, are easier to detect.The ink of the third situation entirely in black background, by It is black background again, it is achieved that detection is relatively difficult in ink sheet as black.Although ink and background are all black, If speckling with ink in the background, the depth of black can change, i.e. the purity of black is otherwise varied.And L * component is represented from pure It is black to pure white, so the L * component that can choose Lab color spaces herein is used to detect ink foreign matter.
Specifically, as shown in figure 4, described step (3.3) specifically includes：
Step (3.3.1) coordinate convention is, it is specified that be X-axis positive direction to the right, downward is Y-axis positive direction；
Step (3.3.2) point set value is corresponding with pixel value, because digital picture is made up of some discrete points, so can Image is discrete digitized, point set is can be used as corresponding to the position of coordinate, the value at coordinate midpoint is point set value, in the picture Referred to as pixel value；
The point of manifold is asked second order to lead by step (3.3.3), i.e., carries out second order derivation to all pixels value of image, really Surely there is the edge that the black depth changes；The symbol of second dervative can be used for determining that an edge pixel is located at the dark side in the edge Or bright side, second dervative have two additional properties：To each of the edges in image, second dervative generates two values；Two The zero cross point of order derivative can be used for the center of positioning thick edge.And after RGB-Lab color space conversions, L * component represent from Black is to pure white, so flexible IC substrates will occur that the depth of black changes i.e. using second dervative after speckling with ink foreign matter To determine if to have change；
Step (3.3.4) connection topology is put and marked, and when the gray-value variation of image is larger, the point at edge asks second order to lead It is negative after number, so eight directions can be searched and connected by search method, provides to recall in search procedure, So it need to only search for seven directions in addition to original route；Second dervative is connected for negative point, and will be next by search method Tie point is not labeled as T in the point in 0 ° of direction (point of corner)i(x,y)；
Step (3.3.5) judges connectedness, to avoid the interference of noise or isolated point, is defined centered on a certain pixel The distance L of point and point, it is connection in the range of L, otherwise is referred to as separating not connect, whether the region deposits in this, as determination In the condition of ink foreign matter.
Specifically, as shown in figure 5, the step (3.4) specifically includes：
Step (3.4.1) determines regional center, if the manifold of image has connectedness, the centre bit of zoning Put To(xo,yo)；
Step (3.4.2) linkage flag point and center, by the mark point Ti(x, y) and central point To(xo,yo) connection；
Step (3.4.3) calculates distance Si, more commonly used range formula is Euler's distance, but to simplify the complexity calculated Degree, T is now calculated using manhatton distancei(x, y) and To(xo,yo) distance (will two coordinates make to take its absolute after difference respectively It is worth sum)：
Si=| xi-xo|+|yi-yo|；
Step (3.4.4) judges region shape, by each mark point Ti(x, y) and central point To(xo,yo) distance SiDescending Arrangement, if maximum SmaxWith minimum SminDiffer by more than threshold value t and be then judged to ink foreign matter region, be otherwise one of normal picture Point, wherein, t can be trained to be determined in advance to avoid noise jamming from quoting by multiple images.
The above embodiment of the present invention is only intended to clearly illustrate example of the present invention, and is not to the present invention Embodiment restriction.For those of ordinary skill in the field, can also make on the basis of the above description Other various forms of changes or variation.There is no necessity and possibility to exhaust all the enbodiments.It is all the present invention All any modification, equivalent and improvement made within spirit and principle etc., should be included in the protection of the claims in the present invention Within the scope of.

Claims (10)

  1. A kind of 1. ultrathin flexible IC substrates ink foreign matter detection system, it is characterised in that including：
    Micro-imaging acquisition system, including video camera and the high-resolution digital by camera acquisition flexibility IC substrate each several parts Image；
    Image fusion system, for by all image mosaics after the completion of shooting into complete flexible IC substrate images；
    Ink foreign matter rapid detection system, for carrying out color space conversion to the flexible IC substrates high-definition picture spliced And the connective judgement of manifold determines ink foreign matter region.
  2. 2. ultrathin flexible IC substrates ink foreign matter detection system according to claim 1, it is characterised in that：Described shooting Machine is high-definition camera.
  3. 3. a kind of ultrathin flexible IC substrate ink foreign matter detecting methods based on the system of claim 1 or 2, its feature exist In, including step：
    The digital picture that step (1) passes through camera acquisition flexibility IC substrate each several parts；
    Step (2) is by all image mosaics after the completion of shooting into complete flexible IC substrate images；
    Step (3) carries out color space conversion to the flexible IC substrates high-definition picture spliced and manifold connectedness is sentenced It is disconnected to determine ink foreign matter region.
  4. A kind of 4. ultrathin flexible IC substrates ink foreign matter detecting method according to claim 3, it is characterised in that the step Suddenly (1) specifically includes：
    Step (1.1) sets the parameter of current location and video camera；
    Step (1.2) plans the collection path of article carrying platform, to ensure that IMAQ is complete；
    Camera acquisition flexibility IC substrate pictures after step (1.3) is mobile and stable after objective table；
    Step (1.4) objective table continues to move to and judges whether objective table is moved to set destination locations；
    Step (1.5) completes the collection of image if reaching, and otherwise return to step (1.3) continues IMAQ operation.
  5. A kind of 5. ultrathin flexible IC substrates ink foreign matter detecting method according to claim 3, it is characterised in that the step Suddenly (2) specifically include：
    The image for occurring blur motion, distortion or folded situation in gatherer process is first carried out correction process by step (2.1)；
    Step (2.2) is spliced the image after processing, obtains complete flexible IC substrate images.
  6. A kind of 6. ultrathin flexible IC substrates ink foreign matter detecting method according to claim 3, it is characterised in that the step Suddenly (3) specifically include：
    Step (3.1) is smoothly pre-processed to the flexible IC substrates high-definition picture spliced；
    Step (3.2) carries out RGB-Lab color space conversions to smooth pretreated IC substrates high-definition picture；
    Step (3.3) carries out manifold connection sex determination to the image arrived after conversion；
    Step (3.4) ink foreign matter region determines.
  7. A kind of 7. ultrathin flexible IC substrates ink foreign matter detecting method according to claim 6, it is characterised in that the step Suddenly the image smoothing preprocessing process of (3.1) includes image denoising processing, using Gaussian smoothing low pass filter by picture noise Remove, make image smoother.
  8. 8. a kind of ultrathin flexible IC substrates ink foreign matter detecting method according to claim 6, it is characterised in that described In step (3.2), the L * components of Lab color spaces represents the brightness of pixel, and span is [0,100], represents from black to pure In vain；The aberration of a and b representation in components pixels, a represent the scope from red to green, and span is [127, -128]；B is represented From yellow to the scope of blueness, span is [127, -128].
  9. 9. a kind of ultrathin flexible IC substrates ink foreign matter detecting method according to claim 6, it is characterised in that described Step (3.3) specifically includes：
    Step (3.3.1) coordinate convention is, it is specified that be X-axis positive direction to the right, downward is Y-axis positive direction；
    Step (3.3.2) point set value is corresponding with pixel value, because digital picture is made up of some discrete points, so will can scheme As discrete digitized, point set is can be used as corresponding to the position of coordinate, the value i.e. point set value at coordinate midpoint, is referred to as in the picture Pixel value；
    The point of manifold is asked second order to lead by step (3.3.3), i.e., carries out second order derivation to all pixels value of image；
    Step (3.3.4) connection topology, which is put, simultaneously to be marked, and second dervative is connected for negative point, and by search method by next connection Point of the point not in 0 ° of direction is labeled as Ti(x,y)；
    Step (3.3.5) judge it is connective, to avoid the interference of noise or isolated point, centered on a certain pixel defining point with The distance L of point, it is connection in the range of L, otherwise is referred to as separating not connect.
  10. 10. a kind of ultrathin flexible IC substrates ink foreign matter detecting method according to claim 9, it is characterised in that described Step (3.4) specifically includes：
    Step (3.4.1) determines regional center, if the manifold of image has connectedness, the center T of zoningo (xo,yo)；
    Step (3.4.2) linkage flag point and center, by the mark point Ti(x, y) and central point To(xo,yo) connection；
    Step (3.4.3) calculates distance Si, to simplify the complexity calculated, T is calculated using manhatton distancei(x, y) and To(xo, yo) distance：
    Si=| xi-xo|+|yi-yo|；
    Step (3.4.4) judges region shape, by each mark point Ti(x, y) and central point To(xo,yo) distance SiDescending arranges, If maximum SmaxWith minimum value SminDiffer by more than threshold value t and be then judged to ink foreign matter region, be otherwise a part for normal picture, Wherein, t is avoids noise jamming from quoting, and can be trained by multiple images to be determined in advance.
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