CN107364248B - A kind of method of inkjet printing film and substrate interface observation and regulation - Google Patents
A kind of method of inkjet printing film and substrate interface observation and regulation Download PDFInfo
- Publication number
- CN107364248B CN107364248B CN201710512228.2A CN201710512228A CN107364248B CN 107364248 B CN107364248 B CN 107364248B CN 201710512228 A CN201710512228 A CN 201710512228A CN 107364248 B CN107364248 B CN 107364248B
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- Prior art keywords
- inkjet printing
- printing film
- substrate
- regulation
- electrode
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- Expired - Fee Related
Links
- 238000007641 inkjet printing Methods 0.000 title claims abstract description 49
- 239000000758 substrate Substances 0.000 title claims abstract description 46
- 238000000034 method Methods 0.000 title claims abstract description 39
- 238000007639 printing Methods 0.000 claims abstract description 14
- 238000007710 freezing Methods 0.000 claims abstract description 12
- 230000008014 freezing Effects 0.000 claims abstract description 12
- 230000008569 process Effects 0.000 claims abstract description 9
- 239000007788 liquid Substances 0.000 claims abstract description 6
- 238000007711 solidification Methods 0.000 claims abstract description 6
- 230000008023 solidification Effects 0.000 claims abstract description 6
- 238000003848 UV Light-Curing Methods 0.000 claims abstract description 5
- 239000010408 film Substances 0.000 claims description 49
- 239000010409 thin film Substances 0.000 claims description 9
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 6
- 238000001035 drying Methods 0.000 claims description 6
- 229910052709 silver Inorganic materials 0.000 claims description 6
- 239000004332 silver Substances 0.000 claims description 6
- 239000002904 solvent Substances 0.000 claims description 6
- 238000001723 curing Methods 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 4
- 229910052593 corundum Inorganic materials 0.000 claims description 4
- 239000007921 spray Substances 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 229910001845 yogo sapphire Inorganic materials 0.000 claims description 4
- 238000009835 boiling Methods 0.000 claims description 3
- 239000012459 cleaning agent Substances 0.000 claims description 3
- 238000010276 construction Methods 0.000 claims description 3
- 238000001914 filtration Methods 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 claims description 3
- JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical group COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 2
- 238000001816 cooling Methods 0.000 claims description 2
- 230000001276 controlling effect Effects 0.000 claims 1
- 238000002360 preparation method Methods 0.000 abstract description 9
- 239000013589 supplement Substances 0.000 abstract description 5
- 238000010998 test method Methods 0.000 abstract description 3
- 238000012360 testing method Methods 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000002346 layers by function Substances 0.000 description 2
- 230000005012 migration Effects 0.000 description 2
- 238000013508 migration Methods 0.000 description 2
- 238000009659 non-destructive testing Methods 0.000 description 2
- 238000000399 optical microscopy Methods 0.000 description 2
- 238000000992 sputter etching Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 2
- -1 Korea Spro State) Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000000935 solvent evaporation Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M5/00—Duplicating or marking methods; Sheet materials for use therein
- B41M5/0041—Digital printing on surfaces other than ordinary paper
- B41M5/0047—Digital printing on surfaces other than ordinary paper by ink-jet printing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
- B32B9/04—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
- B32B9/04—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B9/041—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material of metal
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M5/00—Duplicating or marking methods; Sheet materials for use therein
- B41M5/0011—Pre-treatment or treatment during printing of the recording material, e.g. heating, irradiating
- B41M5/0017—Application of ink-fixing material, e.g. mordant, precipitating agent, on the substrate prior to printing, e.g. by ink-jet printing, coating or spraying
Landscapes
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Inks, Pencil-Leads, Or Crayons (AREA)
Abstract
The present invention relates to a kind of methods of inkjet printing film and substrate interface observation and regulation, include the following steps, firstly, printing electrode pattern on the substrate being cleaned and dried with printer；Secondly, electrode inkjet printing film passes through following solidification process: electrode inkjet printing film (1) is first placed in 0 DEG C of following temperature environment freezing a period of time when also in liquid；(2) the electrode inkjet printing film by freezing not being cured is solidified using high power UV curing apparatus, electrode inkjet printing film generates movement during cured, finally, carrying out directly observation and regulation using means such as optics and Electronic Speculum to the pattern at interface, at grading information.(1) this method sample preparation is simple, easy to operate, time-consuming short；(2) equipment cost requires low；It (3) can be with observing interface from microcosmic to each dimensional information of macroscopic view；(4) reflected information is different from existing test method, is the supplement to existing means of testing, and observed result is reliable.
Description
Technical field
The present invention relates to printed electronic device preparation fields, see more particularly to a kind of inkjet printing film and substrate interface
Survey the method with regulation.
Background technique
In electronic device preparation process, film deposition is carried out using inkjet printing technology, perpendicular to interface direction
Nonuniformity, and its interface state between bottom functional layer is more complex relative to vacuum deposition film.
Have but to the heuristic approach at interface between inkjet printing film and bottom functional layer at present not only have it is following several:
(1) depth profiling is carried out by the methods of XPS, SIMS, falls upper layer inkjet printing film using ion etching, obtains Interface composition
With defect information；(2) it inlays sample or directly breaks disconnected sample, observed by SEM, obtain interface Cross Section Morphology and composition information；
(3) it is sliced sample preparation, uses tem observation sample in cross section pattern and composition information；(4) XRR non-destructive testing is used, to interface roughness
It is simulated；(5) boundary defect is observed using ultrasonic microscope.
Above-mentioned technology has some disadvantages: that (1) XPS, SIMS interface information obtained is the system of selected tiny area
Information is counted, time-consuming, at high cost when using ion beam etching topmost thin film；(2) it inlays sample or breaks disconnected sample and need certain behaviour
Make skill, SEM limited resolution, and interface zone often only has several nanometers, is difficult to obtain its pattern and composition information；(3)TEM
The thin area's thickness of sample to be tested is generally tens nanometers, slice, polishing, ion milling process time-consuming, yield rate is low, and make
It is again higher with FIB sample preparation cost；(4) XRR non-destructive testing is used, obtained interface information is analog result, and confidence level is relatively
It is low；(5) the reflected information of ultrasonic microscope is more macroscopical, and Resolving size is micron level.
Summary of the invention
For the technical problems in the prior art, the purpose of the present invention is: for inkjet printing sink film feature, provide
A kind of method of new inkjet printing film and substrate interface observation and regulation, this method is simple to operation, and sample preparation requirement is low, surveys
Try at low cost, observed result is reliable.
In order to achieve the above object, the present invention adopts the following technical scheme:
A kind of method of inkjet printing film and substrate interface observation and regulation, includes the following steps, firstly, using printer
Electrode pattern is printed on the substrate being cleaned and dried；
Secondly, electrode inkjet printing film pass through following solidification process: (1) first by electrode inkjet printing film also in
0 DEG C of following temperature environment freezing a period of time is placed in when liquid；(2) the electrode inkjet printing by freezing that will be cured
Film is solidified using high power UV curing apparatus, and cured electrode inkjet printing film in the process generates movement, exposes electricity
Interface zone between pole inkjet printing film and substrate；
Finally, carrying out directly observation and regulation using means such as optics and Electronic Speculum to the pattern at interface, at grading information.
Wherein, cooling time 30min, using UV lamp curing time be 300s, electrode inkjet printing film and UV lamp away from
From for 24mm.
Wherein, print parameters and figure are set, and 30 DEG C of substrate temperature, nozzle temperature is 30 DEG C, is beaten on institute's prepared substrate
Print silver electrode pattern.
Wherein, the cleaning and drying method of substrate is the substrate to be sequentially placed in different cleaning agents, and use ultrasound
Wave washer shakes 5-10min respectively, and drying is stand-by.
Preferably, substrate used thereof is Al/Al2O3/IGZO laminated construction.
Preferably, printer is non-contact point spray formula piezoelectric inkjet printer.
Preferably, the ink of printer uses commercial particulate type silver ink water.
Preferably, the solid content 45% of ink, solvent are triethylene glycol methyl ether, 256 DEG C of solvent boiling point, ink viscosity 10-
17cp, surface tension 35-38dyne/cm can be filtered by 0.45 μm of filtering head.
Generally speaking, the present invention has the advantage that
A kind of method of inkjet printing film and substrate interface observation and regulation, the present invention pass through regulation inkjet printing film
Liquid-solid Transition film forming procedure migrates printing thin film above interface, interface area to be observed is left behind, so as to direct
It is directly observed by optical microscopy or Electronic Speculum,
(1) this method sample preparation is simple, easy to operate, time-consuming short；
(2) equipment cost requires low；
It (3) can be with observing interface from microcosmic to each dimensional information of macroscopic view；
(4) reflected information is different from existing test method, is the supplement to existing means of testing, and observed result is reliable.
Detailed description of the invention
Fig. 1 be a kind of inkjet printing film of the present invention and substrate interface observation with the inkjet printing film of method that regulates and controls with
Schematic diagram of substrate structure.
Fig. 2 is that a kind of inkjet printing film of the present invention and substrate interface observation and the method inkjet printing film regulated and controled are conventional
Result and results of sample preparation comparison chart of the present invention after solidification.
The interface optics that Fig. 3 is a kind of inkjet printing film of the present invention and substrate interface observation is obtained with the method regulated and controled with
Electromicroscopic photograph.
Wherein include in Fig. 1:
1 --- substrate of glass, 2 --- AL layers, 3 --- Al2O3Layer, electrode inkjet printing is thin for 4 --- IGZO layers, 5 ---
Film.
Specific embodiment
It is next below that the present invention will be further described in detail.
A kind of method of inkjet printing film and substrate interface observation and regulation, includes the following steps, firstly, using printer
Electrode pattern is printed on the substrate being cleaned and dried；
Secondly, electrode inkjet printing film 5 passes through following solidification process: (1) first also locating electrode inkjet printing film 5
0 DEG C of following temperature environment freezing a period of time is placed in when liquid；(2) the electrode ink-jet by freezing not being cured is beaten
Print film 5 is solidified using high power UV curing apparatus, and cured electrode inkjet printing film 5 in the process generates movement, dew
Interface zone between electrode inkjet printing film 5 and substrate out；
Finally, carrying out directly observation and regulation using means such as optics and Electronic Speculum to the pattern at interface, at grading information.
Specific step are as follows:
Printer prepares: non-contact point spray formula piezoelectric ink jet print system；
Substrate prepares: as shown in Figure 1, substrate used thereof is Al/Al2O3/ IGZO laminated construction, the i.e. bottom are substrate of glass
1, it is followed successively by AL layer 2, Al from the bottom to top2O3The substrate is sequentially placed in different cleaning agents, and uses by layer 3, IGZO layer 4
Ultrasonic cleaner shakes 5-10min respectively, and drying is stand-by；Device schematic cross-section is as shown in Figure 1 after printing.
Ink prepares: using commercial particulate type silver ink water (DGP-45LT-15C, Advanced Nano Products, Korea Spro
State), solid content 45%, solvent be triethylene glycol methyl ether TGME, 256 DEG C of solvent boiling point, ink viscosity 10-17cp, surface tension
35-38dyne/cm can be filtered by 0.45 μm of filtering head；
Electrode pattern printing: setting print parameters and figure, 30 DEG C of substrate temperature, nozzle temperature is 30 DEG C, is being prepared
The electrode inkjet printing film 5 of silver electrode pattern as shown in Figure 2 is printed on substrate；
Printing curve solidification: electrode printing thin film is first placed in 0 DEG C of following temperature freezing 30min in liquid；It will freezing
Sample (not being cured) is solidified using high power UV curing apparatus (IntelliRay 600W, Uvitron, the U.S.), Gu
Change schematic diagram as shown in figure 3, curing time is set as 300s, sample and UV lamp distance are d=24mm.
After freezing substrate is taken out, steam constantly condenses supplement printing thin film, since the surface tension of water is big, printing in air
Film no longer has membrance casting condition, and solute tends to concentrate toward a direction；Steam supplements process, is " coffee ring " effect
The reverse procedure of generation, therefore migrate solute toward center；
High power UV irradiation is that a kind of low-temperature fast-curing technology of printing thin film will not be obvious relative to heat curing techniques
Enhance the solvent evaporation near printing thin film triple line, it is short much relative to curing time needed for film convection drying therefore total
Solute is inhibited to migrate to marginal position on body；
Freezing and UV irradiation ensure that most of solute migrations to printing curve center, and in solute toward center
Before migration, liquid printing thin film has an impact interface, and interface solute has generated absorption, therefore as shown in figure 3,
Directly interface can be observed by means such as optics and Electronic Speculum.
Generally speaking, the present invention has the advantage that
A kind of method of inkjet printing film and substrate interface observation and regulation, the present invention pass through regulation inkjet printing film
Liquid-solid Transition film forming procedure migrates printing thin film above interface, interface area to be observed is left behind, so as to direct
It is directly observed by optical microscopy or Electronic Speculum,
(1) this method sample preparation is simple, easy to operate, time-consuming short；
(2) equipment cost requires low；
It (3) can be with observing interface from microcosmic to each dimensional information of macroscopic view；
(4) reflected information is different from existing test method, is the supplement to existing means of testing, and observed result is reliable.
The above embodiment is a preferred embodiment of the present invention, but embodiments of the present invention are not by above-described embodiment
Limitation, other any changes, modifications, substitutions, combinations, simplifications made without departing from the spirit and principles of the present invention,
It should be equivalent substitute mode, be included within the scope of the present invention.
Claims (8)
1. a kind of method of inkjet printing film and substrate interface observation and regulation, it is characterised in that: include the following steps, it is first
First, electrode pattern is printed on the substrate being cleaned and dried with printer；
Secondly, electrode inkjet printing film passes through following solidification process: (1) first by electrode inkjet printing film also in liquid
When be placed in 0 DEG C of following temperature environment freezing a period of time；(2) the electrode inkjet printing film by freezing that will be cured
Solidified using high power UV curing apparatus, cured electrode inkjet printing film in the process generates movement, exposes electrode spray
Interface zone between black printing thin film and substrate；
Finally, carrying out directly observation using optics and Electronic Speculum means to pattern, the composition information at interface and regulating and controlling.
2. the method for a kind of inkjet printing film described in accordance with the claim 1 and substrate interface observation and regulation, feature exist
In: cooling time 30min is 300s using UV lamp curing time, and electrode inkjet printing film and UV lamp distance are 24mm.
3. a kind of method of inkjet printing film and substrate interface observation and regulation, feature exist according to claim 2
In: setting print parameters and figure, substrate temperature are 30 DEG C, and nozzle temperature is 30 DEG C, print silver electrode on institute's prepared substrate
Pattern.
4. the method for a kind of inkjet printing film described in accordance with the claim 3 and substrate interface observation and regulation, feature exist
In: the cleaning and drying method of substrate is that the substrate is sequentially placed in different cleaning agents, and is divided using ultrasonic cleaner
Not Zhen Dang 5-10min, drying is stand-by.
5. the method for a kind of inkjet printing film described in accordance with the claim 1 and substrate interface observation and regulation, feature exist
In: substrate used thereof is Al/Al2O3/IGZO laminated construction.
6. the method for a kind of inkjet printing film described in accordance with the claim 1 and substrate interface observation and regulation, feature exist
In: printer is non-contact point spray formula piezoelectric inkjet printer.
7. the method for a kind of inkjet printing film described in accordance with the claim 1 and substrate interface observation and regulation, feature exist
In: the ink of printer uses commercial particulate type silver ink water.
8. a kind of method of inkjet printing film and substrate interface observation and regulation, feature exist according to claim 7
In: the solid content of ink is 45%, and solvent is triethylene glycol methyl ether, and solvent boiling point is 256 DEG C, ink viscosity 10-17cp, table
Face tension is 35-38dyne/cm, can be filtered by 0.45 μm of filtering head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710512228.2A CN107364248B (en) | 2017-06-29 | 2017-06-29 | A kind of method of inkjet printing film and substrate interface observation and regulation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710512228.2A CN107364248B (en) | 2017-06-29 | 2017-06-29 | A kind of method of inkjet printing film and substrate interface observation and regulation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107364248A CN107364248A (en) | 2017-11-21 |
| CN107364248B true CN107364248B (en) | 2019-04-09 |
Family
ID=60305640
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710512228.2A Expired - Fee Related CN107364248B (en) | 2017-06-29 | 2017-06-29 | A kind of method of inkjet printing film and substrate interface observation and regulation |
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| Country | Link |
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| CN (1) | CN107364248B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1228888A2 (en) * | 2001-02-05 | 2002-08-07 | Hewlett-Packard Company | Security document, print media, printing method, and apparatus |
| CN101320181A (en) * | 2007-06-05 | 2008-12-10 | 株式会社日立显示器 | Display device and method of manufacturing the same |
| CN104319352A (en) * | 2014-11-13 | 2015-01-28 | 京东方科技集团股份有限公司 | Top emission white light OLED device, preparation method of top emission white light OLED device, and display device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100436760B1 (en) * | 2001-12-20 | 2004-06-23 | 삼성전자주식회사 | Head of ink jet printer and method for manufacturing head of ink jet printer |
-
2017
- 2017-06-29 CN CN201710512228.2A patent/CN107364248B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1228888A2 (en) * | 2001-02-05 | 2002-08-07 | Hewlett-Packard Company | Security document, print media, printing method, and apparatus |
| CN101320181A (en) * | 2007-06-05 | 2008-12-10 | 株式会社日立显示器 | Display device and method of manufacturing the same |
| CN104319352A (en) * | 2014-11-13 | 2015-01-28 | 京东方科技集团股份有限公司 | Top emission white light OLED device, preparation method of top emission white light OLED device, and display device |
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| Publication number | Publication date |
|---|---|
| CN107364248A (en) | 2017-11-21 |
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Granted publication date: 20190409 |