CN107357090A - Ultraviolet light orientation equipment - Google Patents
Ultraviolet light orientation equipment Download PDFInfo
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- CN107357090A CN107357090A CN201710818908.7A CN201710818908A CN107357090A CN 107357090 A CN107357090 A CN 107357090A CN 201710818908 A CN201710818908 A CN 201710818908A CN 107357090 A CN107357090 A CN 107357090A
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- lamp tube
- ultraviolet lamp
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- ultraviolet
- ultraviolet light
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
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- Nonlinear Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
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Abstract
The present invention provides a kind of ultraviolet light orientation equipment, including a plurality of ultraviolet lamp tube for being used to provide ultraviolet light to substrate, the a plurality of ultraviolet lamp tube, which is arranged in same plane, collectively forms ultraviolet light area source, by the way that ultraviolet lamp tube is used into fluorescent ultraviolet fluorescent tube more simpler than metal halogen ultraviolet lamp tube structure, and optimize the arrangement architecture of ultraviolet lamp tube simultaneously, the a plurality of ultraviolet lamp tube is specifically set to be arranged in nonseptate two row side by side, or the part in a plurality of ultraviolet lamp tube is set to be arranged in spaced two row side by side, another part is jumped a queue between two row, relative to prior art, the gap between ultraviolet lamp tube can be reduced, and then the bad problem of illumination homogeneity of the ultraviolet light orientation equipment of existing large scale liquid crystal panel can be improved.
Description
Technical field
The present invention relates to field of liquid crystal display, more particularly to a kind of ultraviolet light orientation equipment.
Background technology
Thin Film Transistor-LCD (Thin Film Transistor-Liquid Crystal Display, TFT-
LCD) due to the advantage such as colorfulness height, small volume, power consumption be low, position of mainstream is accounted in current flat display field.It is just main at present
Flow in the market TFT-LCD display panels for, three types can be divided into, be respectively twisted-nematic (Twisted Nematic,
TN) or super twisted nematic (Super Twisted Nematic, STN) type, plane conversion (In-Plane Switching, IPS)
Type and vertical orientation (Vertical Alignment, VA) type.The wherein relatively other kinds of liquid crystal of VA types liquid crystal display
Show that utensil has high contrast, shown in large scale, as TV etc. has a very wide application, polymer stabilizing is vertical
Orientation (Polymer Stabilized-Vertical Alignment, PSVA) technology is exactly a kind of wherein more popular VA
Technology, PSVA technologies can make liquid crystal panel have the advantages that faster response time, penetrance are high, be characterized in alignment film
Surface forms polymer bumps, so that liquid crystal molecule has pre-tilt angle.
PSVA technologies are identical with other technologies, it is also desirable to pre-tilt angle processing are done to liquid crystal molecule, here it is light alignment technique.
In light alignment technique liquid crystal display, in the liquid crystal layer between two glass substrates, negative liquid crystal molecule is filled, while mixed with reaction
Type monomer (Reactive Monomer), is mixed in negative liquid crystal molecule, wherein, the surface of substrate is coated with polyimides
(polyimide, PI), to be used as orientation base material.Glass substrate of the light orientation equipment to more than applies voltage and carries out ultraviolet light
Irradiation, Monomer is produced (phase separation) phenomenon that is separated with liquid crystal molecule, and gather towards the PI base materials of substrate
Collection, form polymer (Polymer).Because polymer will be along polymerization with the interaction between liquid crystal molecule, liquid crystal molecule
The direction arrangement of molecule, forms pre-tilt angle (pre-tile angle).
Therefore, the key machine in PSVA processing procedures is ultraviolet light orientation equipment, and the illumination of ultraviolet light orientation equipment is homogeneous
Property be the important parameter for influenceing process quality, early stage and the quartz burner that the equipment generally uses at present (produce ultraviolet
Light source) it is metal halid lamp, this kind of fluorescent tube is because of its special construction, and fluorescent tube spacing (Lamp pitch) is in 200mm or so, entirety
The illumination of ultraviolet light orientation equipment is worth in 20%~30% (313nm wavelength) together.
As high-order (such as 8K) liquid crystal panel and the production requirement of advanced lines glass substrate (more than G8.5), ultraviolet light are matched somebody with somebody
Lifting to the illumination homogeneity of equipment is extremely urgent.Original 20%~30% illumination is worth the life that can not have met product together
Production demand, it otherwise may cause the generation for causing orientation Mura because of uneven illumination.
In the manufacture of advanced lines G11 liquid crystal panels, the size of glass substrate is 3370mm x 2940mm (and G8.5 glass
The size of glass substrate is 2200mm x2500mm), relative to G8.5 liquid crystal panels, the size of corresponding ultraviolet light orientation equipment is same
Sample needs to become big.So in the case where that can cover the irradiated area of whole glass substrate, the length of fluorescent tube (Lamp) needs to reach
More than 3000mm size, and existing Lamp technologies can not produce the Lamp of such length, to meet technological requirement then need
2 Lamp are spliced and reached the size that can cover G11 glass substrates.If it is continuing with existing being directed to G8.5
Lamp and its arrangement architecture in the ultraviolet light orientation equipment of liquid crystal panel are arranged, then because of its special construction, between Lamp
Away from big, splicing gap is also big, and value can deteriorate into more than 30% to final ultraviolet light orientation equipment entirety Lamp illumination together, so
The illumination homogeneity of difference can produce serious product orientation Mura, can not meet G11 product volume production demands.
The content of the invention
It is an object of the invention to provide a kind of ultraviolet light orientation equipment, the purple of existing large scale liquid crystal panel can be improved
The bad problem of illumination homogeneity of outer smooth orientation equipment.
To achieve the above object, the present invention provides a kind of ultraviolet light orientation equipment, including a plurality of purple for being provided to substrate
The ultraviolet lamp tube of outer light, a plurality of ultraviolet lamp tube, which is arranged in same plane, collectively forms ultraviolet light area source；
The a plurality of ultraviolet lamp tube is arranged in nonseptate two row side by side；Or
A part in a plurality of ultraviolet lamp tube is arranged in spaced two row side by side, and another portion jumps a queue in two row
Between；
The ultraviolet lamp tube is fluorescent ultraviolet fluorescent tube.
The distance between adjacent two ultraviolet lamp tube is 25-60mm in each column ultraviolet lamp tube.
Alternatively, a plurality of ultraviolet lamp tube is arranged by staggeredly non-docking style connecting method, i.e., described a plurality of ultraviolet
Fluorescent tube is specifically arranged into two row multirows, and all ultraviolet lamp tubes itself in two row arrange in the same direction, and two row are purple
The mutually close one end of outer fluorescent tube is overlapping in every row, and its length being overlapping is 40-80mm.
Alternatively, a plurality of ultraviolet lamp tube is arranged by docking style connecting method, i.e., described a plurality of uviol lamp pipe
Body is arranged into two row multirows, and all ultraviolet lamp tubes itself in two row arrange in the same direction, and the two row ultraviolet lamp tube
Docked side by side in every row mutually close one end.
Still optionally further, a plurality of ultraviolet lamp tube is arranged by positive docking style connecting method, the purple of two row
Straight line docking of the outer fluorescent tube in all row interior edges perpendicular to bearing of trend of the ultraviolet lamp tube itself.
Still optionally further, a plurality of ultraviolet lamp tube is arranged by staggeredly docking style connecting method, two row
Ultraviolet lamp tube progressive interlaced docking in all rows.
Alternatively, a plurality of ultraviolet lamp tube is arranged by docking type connecting method of jumping a queue, i.e., described a plurality of uviol lamp
A part in pipe is arranged into two row multirows and collectively forms array group, and all ultraviolet lamp tubes itself in two row are towards same
Direction arranges, and the mutually close one end of the two row ultraviolet lamp tube in every row it is arranged side by side separately, in a plurality of ultraviolet lamp tube
Another part is jumped a queue between the two row ultraviolet lamp tube and collectively forms group of jumping a queue.
Itself orientation of the ultraviolet lamp tube jumped a queue in group and itself arrangement side of ultraviolet lamp tube in the array group
To perpendicular, and the adjacent both ends of adjacent two ultraviolet lamp tube are overlapping in the group of jumping a queue.
Distance between the two row ultraviolet lamp tube for ultraviolet lamp tube of jumping a queue is 90-180mm.
Described ultraviolet light orientation equipment also includes for bearing substrate and has the carrying platform of temperature controlling function and be used for
Alive power up module is applied to substrate.
Beneficial effects of the present invention：A kind of ultraviolet light orientation equipment provided by the invention, including it is a plurality of for being carried to substrate
For the ultraviolet lamp tube of ultraviolet light, a plurality of ultraviolet lamp tube, which is arranged in same plane, collectively forms ultraviolet light area source, passes through
Ultraviolet lamp tube is used into fluorescent ultraviolet fluorescent tube more simpler than metal halogen ultraviolet lamp tube structure, and optimizes ultraviolet lamp tube simultaneously
Arrangement architecture, a plurality of ultraviolet lamp tube is arranged in nonseptate two row side by side, or make a plurality of uviol lamp
A part in pipe is arranged in spaced two row side by side, and another part is jumped a queue between two row, can relative to prior art
Reduce the gap between ultraviolet lamp tube, and then the illumination that can improve the ultraviolet light orientation equipment of existing large scale liquid crystal panel is equal
The one bad problem of property.
Brief description of the drawings
In order to be further understood that the feature of the present invention and technology contents, refer to below in connection with the detailed of the present invention
Illustrate and accompanying drawing, however accompanying drawing only provide with reference to and explanation use, be not used for being any limitation as the present invention.
In accompanying drawing,
Fig. 1 is the arrangement schematic diagram of metal halogen ultraviolet lamp tube and partial enlargement signal in existing ultraviolet light orientation equipment
Figure；
Fig. 2 is the structure that ultraviolet lamp tube is arranged by positive docking style connecting method in ultraviolet light orientation equipment of the invention
Schematic diagram and close-up schematic view；
Fig. 3 is ultraviolet lamp tube in the ultraviolet light orientation equipment of the present invention by the knot that staggeredly docking style connecting method is arranged
Structure schematic diagram and close-up schematic view；
Fig. 4 is the knot that ultraviolet lamp tube is arranged by type connecting method of jumping a queue is docked in ultraviolet light orientation equipment of the invention
Structure schematic diagram and close-up schematic view；
Fig. 5 is that ultraviolet lamp tube is arranged by staggeredly non-docking style connecting method in ultraviolet light orientation equipment of the invention
Structural representation and close-up schematic view；
Fig. 6 is the structural representation of the ultraviolet light orientation equipment of the present invention.
Embodiment
Further to illustrate the technological means and its effect of the invention taken, below in conjunction with being preferable to carry out for the present invention
Example and its accompanying drawing are described in detail.
Referring to Fig. 6, the present invention provides a kind of ultraviolet light orientation equipment, including it is a plurality of for providing ultraviolet light to substrate 90
Ultraviolet lamp tube 11, for bearing substrate 90 and with temperature controlling function carrying platform 20 and for substrate 90 apply voltage
Power up module 30；Wherein, the ultraviolet lamp tube 11 is fluorescent ultraviolet fluorescent tube, and a plurality of ultraviolet lamp tube 11 is arranged in same flat
Ultraviolet light area source is collectively formed in face.
Specifically, a plurality of ultraviolet lamp tube 11 is arranged in nonseptate two row side by side；Or
A part in a plurality of ultraviolet lamp tube 11 is arranged in spaced two row side by side, and another portion jumps a queue in two row
Between.
The ultraviolet light orientation equipment of the present invention, by ultraviolet lamp tube 11 using more simpler than metal halogen ultraviolet lamp tube structure
Fluorescent ultraviolet fluorescent tube, so as to avoid the limitation on metal halogen ultraviolet lamp tube structure, between reducing between ultraviolet lamp tube 11
Gap, ultraviolet lamp tube 11 is arranged by more close mode, by optimizing the arrangement architecture of ultraviolet lamp tube 11, specifically make described more
Bar ultraviolet lamp tube 11 is arranged in nonseptate two row, or make the part in a plurality of ultraviolet lamp tube 11 be arranged in simultaneously side by side
Spaced two row are arranged, another portion jumps a queue between two row, relative to prior art, between can reducing between ultraviolet lamp tube 11
Gap, and then the bad problem of illumination homogeneity of the ultraviolet light orientation equipment of existing large scale liquid crystal panel can be improved.
Specifically, the distance between adjacent two ultraviolet lamp tube 11 can relative to prior art in each column ultraviolet lamp tube 11
It is contracted to 25-60mm.
Specifically, a plurality of ultraviolet lamp tube 11 can be arranged by docking style connecting method, i.e., described a plurality of ultraviolet
Fluorescent tube 11 is specifically arranged into two row multirows, this two row in all ultraviolet lamp tubes 11 itself arrange in the same direction, and this two
Docked side by side in every row the mutually close one end of row ultraviolet lamp tube 11；Multirow ultraviolet lamp tube 11 itself i.e. in each column is parallel,
Ultraviolet lamp tube 11 itself in often going docks in same straight line, it is often capable in ultraviolet lamp tube 11 prolong in itself along ultraviolet lamp tube 11
The direction arrangement stretched is in a row.
Specifically, the docking style connecting method can further be divided into positive docking style connecting method and staggeredly docking style is spelled
Mode is connect, as shown in Fig. 2 a plurality of ultraviolet lamp tube 11 can be arranged by positive docking style connecting method, two row
Ultraviolet lamp tube 11 docks in all row interior edges perpendicular to the straight line of the bearing of trend of ultraviolet lamp tube 11 itself, the purple of two row
The position that outer fluorescent tube 11 docks in every row is set to interface point, i.e., all interface points of the two row ultraviolet lamp tube 11 are in the multirow
The bearing of trend of interior edge vertical UV fluorescent tube 11 itself it is arranged in a straight line.Or
As shown in figure 3, a plurality of ultraviolet lamp tube 11 can also be arranged by staggeredly docking style connecting method, described two
The progressive interlaced docking in all rows of the ultraviolet lamp tube 11 of row, i.e., all interface points of the two row ultraviolet lamp tube 11 are in the multirow
Interior progressive interlaced arrangement.
Specifically, except above-mentioned docking style connecting method, as shown in figure 4, a plurality of ultraviolet lamp tube 11 can also be by docking
The type connecting method of jumping a queue is arranged, i.e., the part in described a plurality of ultraviolet lamp tube 11 is arranged into two row multirows and collectively formed
Array group, all ultraviolet lamp tubes 11 itself in two row arrange in the same direction, and the two row ultraviolet lamp tube 11 is mutually close
One end in every row side by side separately, another part in a plurality of ultraviolet lamp tube 11 is jumped a queue in the two row ultraviolet lamp tube 11
Between and collectively form group of jumping a queue.
Specifically, the docking is jumped a queue in type connecting method, ultraviolet lamp tube 11 itself orientation jumped a queue in group
It is perpendicular with ultraviolet lamp tube 11 itself orientation in the array group, and adjacent two ultraviolet lamp tube 11 in the group of jumping a queue
Adjacent both ends are overlapping.
Specifically, during type connecting method is jumped a queue in the docking, the distance between described two row ultraviolet lamp tube 11 is unsuitable excessive,
But the width sum of two ultraviolet lamp tubes 11 can be at least accommodated, ultraviolet lamp tube 11 of jumping a queue is used between the two row ultraviolet lamp tube 11
Distance can be 90-180mm.
As shown in figure 5, a plurality of ultraviolet lamp tube 11 can also be arranged by staggeredly non-docking style connecting method, i.e. institute
State a plurality of ultraviolet lamp tube 11 and be specifically arranged into two row multirows, all ultraviolet lamp tubes 11 itself in two row are arranged in the same direction
Row, and the mutually close one end of the two row ultraviolet lamp tube 11 is overlapping in every row；Multirow ultraviolet lamp tube i.e. in each column 11
Body is parallel, and the ultraviolet lamp tube 11 of two row is parallel to each other in every row, and one end that two ultraviolet lamp tube 11 arranged is mutually close
It is overlapping in every row, its length being overlapping is 40~80mm.
Ultraviolet light orientation equipment provided by the present invention is preferably illustrated below in conjunction with specific test data, and is verified
Its technical advantage.
It should be noted that the illumination data of ultraviolet light orientation equipment is ultraviolet lamp tube transmitting 313nm in following experiment
Data under ultraviolet light conditions, value, positive side the illumination calculating that value and minus side illumination are worth together together together of involved illumination
Mode is as follows：
Illumination is worth (%)=(Max-Min)/(Max+Min) * 100% together；
Positive side illumination is worth (%)=(Max-Ave.)/Ave.*100% together；
Minus side illumination is worth (%)=(Min-Ave.)/Ave.*100% together；
Wherein, Max refers to the maximal illumination that ultraviolet light orientation equipment measures under given conditions, and Min refers to ultraviolet
The minimal illumination that light orientation equipment measures under given conditions, Ave. refer to that ultraviolet light orientation equipment measures under given conditions
The average illumination of illumination.
In addition, the illumination data actually measured in following experiments uses capital of a country Yu Qi Co., Ltd. (ORC) UV- processed
MO3 models illumination photometer and UV-SN31 models measurement head are carried out.
Experiment one
As shown in figure 1, use metal halogen uviol lamp in the existing ultraviolet light orientation equipment for G8.5 liquid crystal panels
The arrangement mode of pipe, is applied to G11 liquid crystal panels, specifically makes the metal halogen ultraviolet lamp tube 51 in ultraviolet light orientation equipment
Two row multirows are arranged in, wherein, the distance between adjacent rows metal halogen ultraviolet lamp tube 51 is 200mm, the two row metal halogen
The distance between plain ultraviolet lamp tube 51 is 380mm, form a size be 3400mm*3000mm ultraviolet area source, with suitable for
Light alignment manufacture process in G11 liquid crystal panels.Then illumination test is carried out to above-mentioned ultraviolet light orientation equipment by illumination photometer, flat
Equal illumination is 0.5mW/cm2Under, drawing the illumination of the ultraviolet light orientation equipment, value (Max-Min), positive side illumination are worth together together
(+side) and minus side illumination together be worth (- side), specific test data is as shown in table 1 below.
Table 1. uses the illumination data of the ultraviolet light orientation equipment based on G11 substrates of prior art
From the data of above-mentioned table 1, for large-sized liquid crystal panel, using existing metal halogen ultraviolet lamp tube
Arrangement mode, it will make the illumination homogeneity of ultraviolet light orientation equipment can deteriorate into more than 30%, so poor homogeneity can produce
Raw serious product orientation Mura, therefore the volume production demand of G11 products can not be met.
Experiment two
Based on G8.5 liquid crystal panels, using length about 1300mm fluorescent ultraviolet fluorescent tube, this hair is used to ultraviolet lamp tube
Bright positive docking style, staggeredly docking style, docking are jumped a queue type and the staggeredly ultraviolet light orientation equipment of non-four kinds of connecting methods of docking style
Research modeling respectively；The analog simulation of illumination homogeneity is carried out by the ultraviolet light orientation equipment under the different connecting methods to more than
(assuming that average illumination is 1mW/cm2), analogue data result is as shown in table 2 below.
Illumination homogeneity data of the ultraviolet light orientation equipment that table 2. is modeled based on G8.5 substrates under different connecting methods
| Connecting method | Positive docking style | Staggeredly docking style | Dock type of jumping a queue | Staggeredly non-docking style |
| Illumination is worth together | 9.6% | 14% | 12.1% | 7.7% |
From the data of above-mentioned table 2, positive docking style in the present invention, staggeredly docking style, docking are jumped a queue type and staggeredly non-right
The connecting method of four kinds of ultraviolet lamp tubes of direct type, it can reach the effect for improving ultraviolet orientation equipment illumination homogeneity, wherein, hand over
Unless the ultraviolet orientation equipment illumination homogeneity result under docking style connecting method is optimal, 7.7% can be reached.
Experiment three
According to, based on the analogue data result under G8.5 liquid crystal panel sizes, we know staggeredly non-in above-mentioned experiment two
Ultraviolet orientation equipment illumination homogeneity result under docking style connecting method is optimal, and we will continue to apply staggeredly non-docking below
The connecting method of type, based on G11 liquid crystal panels, analog simulation experiment is carried out from length about 1700mm fluorescent ultraviolet fluorescent tube,
Analogue data result is as shown in table 3 below.
Illumination data of the table 3. based on the ultraviolet light orientation equipment that G11 substrates model under staggeredly non-docking style connecting method
From the data of above-mentioned table 3, the simulation obtained using identical connecting method based on G11 liquid crystal panel sizes
Simulation result (illumination is worth together) is consistent with the result based on G8.5 liquid crystal panel sizes, therefore is directed to G11 liquid crystal panels
It is preferred plan that the ultraviolet lamp tube of ultraviolet light orientation equipment, which selects the connecting method of staggeredly non-docking, may be such that ultraviolet light orientation is set
Standby illumination homogeneity is improved within 10% from the 39% of prior art.
Experiment four
To verify the establishment of model scheme in above-mentioned experiment two and experiment three, it is special existing based on G8.5 liquid crystal panels
The structure of modification of ultraviolet lamp tube is carried out in ultraviolet light orientation equipment, ultraviolet lamp tube is used into optimal scheme：Staggeredly non-docking style
Connecting method.The improved ultraviolet light orientation equipment based on G8.5 liquid crystal panels we by illumination photometer measurement 0.4~
1.1mW/cm2Every 0.1mW/cm in illumination section2The illumination homogeneity data of illumination, test result are as shown in table 4 below.
Illuminations actually measured number of the table 4. based on the ultraviolet light orientation equipment of G8.5 substrates under staggeredly non-docking style connecting method
According to
From above-mentioned table 4 and the data comparison of table 2, the illuminations actually measured that this kind interlocks under non-docking style connecting method is homogeneous
Property data it is consistent with the analog result of modeling scheme, the illumination of ultraviolet light orientation equipment is worth within 10% that (7.7% is left together
It is right).Again it can be seen from the data comparison of experiment two and experiment three, under the simulated environment of identical ultraviolet lamp tube connecting method,
Ultraviolet light orientation equipment is consistent with the illumination homogeneity based on G8.5 liquid crystal panels based on the illumination homogeneity of G11 liquid crystal panels,
The real machine of the ultraviolet light orientation equipment based on G8.5 liquid crystal panels is verified more than, can learn the improvement side for G11 products
Case can equally be reached.
In summary, a kind of ultraviolet light orientation equipment provided by the invention, including it is a plurality of for providing ultraviolet light to substrate
Ultraviolet lamp tube, a plurality of ultraviolet lamp tube, which is arranged in same plane, collectively forms ultraviolet light area source, by by uviol lamp
Pipe uses fluorescent ultraviolet fluorescent tube more simpler than metal halogen ultraviolet lamp tube structure, and optimizes the arrangement knot of ultraviolet lamp tube simultaneously
Structure, specifically make a plurality of ultraviolet lamp tube be arranged in side by side it is nonseptate two row, or make in a plurality of ultraviolet lamp tube one
Component arrangement is jumped a queue between two row into spaced two row side by side, another part, relative to prior art, can reduced ultraviolet
Gap between fluorescent tube, and then the illumination homogeneity that can improve the ultraviolet light orientation equipment of existing large scale liquid crystal panel is bad
Problem.
It is described above, for the person of ordinary skill of the art, can be with technique according to the invention scheme and technology
Other various corresponding changes and deformation are made in design, and all these changes and deformation should all belong to the appended right of the present invention
It is required that protection domain.
Claims (10)
1. a kind of ultraviolet light orientation equipment, it is characterised in that including a plurality of uviol lamp for being used to provide ultraviolet light to substrate (90)
Manage (11), a plurality of ultraviolet lamp tube (11), which is arranged in same plane, collectively forms ultraviolet light area source；
The a plurality of ultraviolet lamp tube (11) is arranged in nonseptate two row side by side；
Or the part in a plurality of ultraviolet lamp tube (11) is arranged in spaced two row side by side, another portion jumps a queue in this
Between two row；
The ultraviolet lamp tube (11) is fluorescent ultraviolet fluorescent tube.
2. ultraviolet light orientation equipment as claimed in claim 1, it is characterised in that adjacent two in each column ultraviolet lamp tube (11)
The distance between ultraviolet lamp tube (11) is 25-60mm.
3. ultraviolet light orientation equipment as claimed in claim 1, it is characterised in that a plurality of ultraviolet lamp tube (11) is by staggeredly non-
Docking style connecting method is arranged, i.e., described a plurality of ultraviolet lamp tube (11) is specifically arranged into two row multirows, the institute in two row
There is ultraviolet lamp tube (11) itself to arrange in the same direction, and the mutually close one end of the two row ultraviolet lamp tube (11) is handed in every row
Wrong overlapping, its length being overlapping is 40~80mm.
4. ultraviolet light orientation equipment as claimed in claim 1, it is characterised in that a plurality of ultraviolet lamp tube (11) presses docking style
Connecting method is arranged, i.e., described a plurality of ultraviolet lamp tube (11) is specifically arranged into two row multirows, all ultraviolet in two row
Fluorescent tube (11) arranges itself in the same direction, and the mutually close one end of the two row ultraviolet lamp tube (11) is right side by side in every row
Connect.
5. ultraviolet light orientation equipment as claimed in claim 4, it is characterised in that a plurality of ultraviolet lamp tube (11) is by positive docking
Type connecting method is arranged, and described two ultraviolet lamp tubes (11) arranged are in all row interior edges perpendicular to the ultraviolet lamp tube (11) sheet
The straight line docking of body bearing of trend.
6. ultraviolet light orientation equipment as claimed in claim 4, it is characterised in that a plurality of ultraviolet lamp tube (11) by staggeredly pair
Direct type connecting method is arranged, ultraviolet lamp tube (11) progressive interlaced docking in all rows of two row.
7. ultraviolet light orientation equipment as claimed in claim 1, it is characterised in that a plurality of ultraviolet lamp tube (11) is added by docking
Plunger type connecting method is arranged, i.e., the part in described a plurality of ultraviolet lamp tube (11) is arranged into two row multirows and collectively formed
Array group, all ultraviolet lamp tubes (11) in two row arrange itself in the same direction, and two row ultraviolet lamp tube (11) phase
Close one end in every row side by side separately, another part in a plurality of ultraviolet lamp tube (11) jump a queue in this two row it is ultraviolet
Group of jumping a queue is collectively formed between fluorescent tube (11).
8. ultraviolet light orientation equipment as claimed in claim 7, it is characterised in that the ultraviolet lamp tube (11) jumped a queue in group is certainly
Body orientation and ultraviolet lamp tube (11) itself orientation in the array group are perpendicular, and adjacent two in the group of jumping a queue
The adjacent both ends of ultraviolet lamp tube (11) are overlapping.
9. ultraviolet light orientation equipment as claimed in claim 7, it is characterised in that be used between the two row ultraviolet lamp tube (11)
The distance of ultraviolet lamp tube (11) of jumping a queue is 90-180mm.
10. ultraviolet light orientation equipment as claimed in claim 1, it is characterised in that also include for bearing substrate (90) and have
There is the carrying platform (20) of temperature controlling function and for applying alive power up module (30) to substrate (90).
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710818908.7A CN107357090A (en) | 2017-09-12 | 2017-09-12 | Ultraviolet light orientation equipment |
| PCT/CN2017/113510 WO2019052018A1 (en) | 2017-09-12 | 2017-11-29 | Utraviolet light alignment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710818908.7A CN107357090A (en) | 2017-09-12 | 2017-09-12 | Ultraviolet light orientation equipment |
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| CN107357090A true CN107357090A (en) | 2017-11-17 |
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|---|---|---|---|
| CN201710818908.7A Pending CN107357090A (en) | 2017-09-12 | 2017-09-12 | Ultraviolet light orientation equipment |
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| WO (1) | WO2019052018A1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2019052018A1 (en) * | 2017-09-12 | 2019-03-21 | 深圳市华星光电半导体显示技术有限公司 | Utraviolet light alignment device |
| CN109557692A (en) * | 2018-12-25 | 2019-04-02 | 深圳市华星光电半导体显示技术有限公司 | The baking method of apparatus for baking, display panel and display panel |
| CN110888267A (en) * | 2019-11-26 | 2020-03-17 | Tcl华星光电技术有限公司 | Liquid crystal alignment device and operation method thereof |
| CN115784610A (en) * | 2022-11-29 | 2023-03-14 | 南京华生皓光电科技有限公司 | Glass tube for UVB ultraviolet fluorescent lamp for liquid crystal alignment process and application |
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| JP5573375B2 (en) * | 2010-06-03 | 2014-08-20 | ウシオ電機株式会社 | Light irradiation device |
| CN103558714B (en) * | 2013-11-01 | 2016-09-07 | 京东方科技集团股份有限公司 | A kind of light orientation equipment and alignment method thereof and display device production system |
| JP2015106015A (en) * | 2013-11-29 | 2015-06-08 | 株式会社ブイ・テクノロジー | Polarized light irradiation device, polarized light irradiation method and polarized light irradiation program |
| CN104656313B (en) * | 2015-03-10 | 2018-04-10 | 京东方科技集团股份有限公司 | Light alignment apparatus and method |
| CN106773329B (en) * | 2015-11-25 | 2020-02-07 | 群创光电股份有限公司 | Exposure system and exposure method |
| CN107357090A (en) * | 2017-09-12 | 2017-11-17 | 深圳市华星光电半导体显示技术有限公司 | Ultraviolet light orientation equipment |
-
2017
- 2017-09-12 CN CN201710818908.7A patent/CN107357090A/en active Pending
- 2017-11-29 WO PCT/CN2017/113510 patent/WO2019052018A1/en active Application Filing
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019052018A1 (en) * | 2017-09-12 | 2019-03-21 | 深圳市华星光电半导体显示技术有限公司 | Utraviolet light alignment device |
| CN109557692A (en) * | 2018-12-25 | 2019-04-02 | 深圳市华星光电半导体显示技术有限公司 | The baking method of apparatus for baking, display panel and display panel |
| CN110888267A (en) * | 2019-11-26 | 2020-03-17 | Tcl华星光电技术有限公司 | Liquid crystal alignment device and operation method thereof |
| CN115784610A (en) * | 2022-11-29 | 2023-03-14 | 南京华生皓光电科技有限公司 | Glass tube for UVB ultraviolet fluorescent lamp for liquid crystal alignment process and application |
| CN115784610B (en) * | 2022-11-29 | 2024-05-28 | 南京华生皓光电科技有限公司 | Glass tube for UVB ultraviolet fluorescent lamp for liquid crystal alignment process and application |
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| Publication number | Publication date |
|---|---|
| WO2019052018A1 (en) | 2019-03-21 |
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