CN107356563A - One kind is narrow to excite angle SPR sensorgram chip - Google Patents
One kind is narrow to excite angle SPR sensorgram chip Download PDFInfo
- Publication number
- CN107356563A CN107356563A CN201710801887.8A CN201710801887A CN107356563A CN 107356563 A CN107356563 A CN 107356563A CN 201710801887 A CN201710801887 A CN 201710801887A CN 107356563 A CN107356563 A CN 107356563A
- Authority
- CN
- China
- Prior art keywords
- layer
- silver
- thickness
- glass
- gold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
- G01N21/553—Attenuated total reflection and using surface plasmons
- G01N21/554—Attenuated total reflection and using surface plasmons detecting the surface plasmon resonance of nanostructured metals, e.g. localised surface plasmon resonance
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses it is a kind of it is narrow excite angle SPR sensorgram chip, be related to micro-nano sensory field, more particularly to surface plasma sensory field.Sensing chip includes substrate of glass, adhesion layer and two metal layers.Substrate of glass thickness is at 100 to 200 microns.Adhesion layer, which serves, sticks substrate of glass and metal level, and adhesion layer thickness is at 15 nanometers.It is silver nanoparticle layer on adhesion layer, the thickness of silver layer is between 30 to 50 nanometers.Gold nano layer is covered on silver layer, at 1 10 nanometers, layer gold is covered on silver layer to prevent silver layer from vulcanizing or aoxidizing the thickness of layer gold.There is this SPR sensorgram chip more preferable quality factor and narrower SPR to excite angle.
Description
Technical field
The present invention relates to nanometer detection and optical technical field, more particularly to a kind of surface plasma sensing chip.
Background technology
Surface plasma (Surface Plasmon, SP) is a kind of electricity propagated on metal and dielectric interface
Magnetic wave, when the k vector of incident light matches in the component in the direction on parallel to interface with SP k vector, occur surface etc. from
(Surface Plasmon Resonance, SPR) is resonated in daughter.
Currently used for having gold, silver, copper, aluminium etc. using wide in the metal of excitating surface plasma resonance.Wherein
The inoxidizability of gold is optimal, the frequency that is used in surface plasma chip of gold also highest.Surface that silver surface inspires etc.
Easily occur when the ranges of incidence angles of ion bulk wave is placed for a long time in atmosphere than Jin Geng little, but silver with air and biological sample anti-
Should, silver sulfide or silver oxide are produced, influences the performance of testing sample.
This patent proposes a kind of new SPR sensorgram chip based on this characteristic, plates 30-50nm silver on the glass substrate,
1-10nm gold is plated in silver surface, surface plasma can be made to excite angle more to concentrate while prevent that silver is rotten, to surface etc.
The sensitivity of gas ions sensing technology has further lifting.
The content of the invention
(1) technical problems to be solved
In metal currently used for excitating surface plasma resonance, surface plasma wave that silver surface inspires enters
Elevation range is minimum, but silver is placed perishable or reacted with sample for a long time in atmosphere.
(2) technical scheme
In order to solve the above-mentioned technical problem, narrow angle SPR sensorgram chip is excited the invention provides a kind of, it is characterised in that
Including：
Substrate of glass, adhesion layer and two metal layers；
Wherein, described substrate of glass is made up of high-index material, and the thickness of substrate of glass is sticked in 100-200 microns
Attached layer, which serves, sticks substrate of glass and metal level, and adhesion layer thickness is in 1-5 nanometers, and adhesion layer is above is silver nanoparticle layer, silver layer
Thickness between 30 to 50 nanometers；Nanogold is covered above silver layer, the thickness of layer gold is in 1-10 nanometers.
It is described to stick layer material and select chromium or titanium.
(3) beneficial effect
The above-mentioned technical proposal of the present invention has the following advantages that：Surface plasma phenomenon can be made more to concentrate on one small
In angle, layer gold is covered on silver layer to prevent silver layer from aoxidizing or vulcanizing.
Brief description of the drawings
Fig. 1 is a kind of narrow structural representation for exciting angle SPR sensorgram chip of the present invention.
Fine line is that SPR sensorgram chip that 40nm silver and 5nm gold are formed in wavelength is 633nm incident lights with difference in Fig. 2
Reflectivity under angular illumination, thick dashed line is that the sensing chip that 45nm gold is formed shines in 633nm incident lights different incidence angles in figure
Reflectivity under penetrating.
Embodiment
With reference to the accompanying drawings and examples, the embodiment of the present invention is described in further detail.Following instance
For illustrating the present invention, but it is not limited to the scope of the present invention.
Embodiment one：Illustrate present embodiment with reference to Fig. 1 and Fig. 2, a kind of described in present embodiment narrow excites
Angle SPR sensorgram chip, it is therefore intended that make the surface plasma of SPR sensorgram chip excite angular region smaller.
SPR prints of the present invention are four layers of design, are high refractive index material layer, adhesion layer and double layer of metal respectively
Layer.High-refraction material layer choosing BK7 glass, for the thickness of BK7 glass more than 10 microns, adhesion layer typically uses Cr or Ti, sticks
Attached thickness degree is in 1-5nm.
Metal level can excite SPR, and two metal layers are silver layer and layer gold respectively, silver layer between adhesion layer and layer gold,
The thickness of silver layer is between 30nm-50nm, and the thickness of layer gold is between 1nm-10nm；When the silver thickness of SPR chips is 40nm,
When layer gold thickness is 5nm, chip 633nm P polarization laser with the irradiation of different incidence angles under solid line in its reflectivity such as Fig. 2
It is shown；And when SPR chips are only made up of one layer of 45nm gold, its 633nm P polarization laser with the irradiation of different incidence angles
Reflectivity is as shown in phantom in Figure 2.The SPR sensorgram chip that can obtain being collectively formed by silver layer and layer gold by Fig. 2 contrasts has more
Small excites angular region, and its signal is more concentrated, and is advantageous to improve the sensitivity of sensing chip.
Claims (3)
1. one kind is narrow to excite angle SPR sensorgram chip, it is characterised in that including：Substrate of glass, adhesion layer and two metal layers；
Wherein, described substrate of glass is made up of high-index material, and the thickness of substrate of glass is at 100 to 200 microns, adhesion layer
Serve and stick substrate of glass and metal level, adhesion layer thickness is silver nanoparticle layer in 1-5 nanometers, adhesion layer, the thickness of silver layer
Between 30 to 50 nanometers, gold nano layer is covered on silver layer, the thickness of layer gold is in 1-10 nanometers.
2. one kind according to claim 1 is narrow to excite angle SPR sensorgram chip, it is characterised in that：Described Gold plated Layer can
The oxidation of resistance silver or vulcanization.
3. one kind according to claim 1 is narrow to excite angle SPR sensorgram chip, it is characterised in that：Described sticks layer material
Chromium or titanium can be selected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710801887.8A CN107356563A (en) | 2017-09-07 | 2017-09-07 | One kind is narrow to excite angle SPR sensorgram chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710801887.8A CN107356563A (en) | 2017-09-07 | 2017-09-07 | One kind is narrow to excite angle SPR sensorgram chip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107356563A true CN107356563A (en) | 2017-11-17 |
Family
ID=60291385
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710801887.8A Pending CN107356563A (en) | 2017-09-07 | 2017-09-07 | One kind is narrow to excite angle SPR sensorgram chip |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107356563A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109827932A (en) * | 2019-01-31 | 2019-05-31 | 马佑桥 | One kind being based on Wave-guide coupling surface plasma resonance sensing chip |
| CN113466184A (en) * | 2021-07-05 | 2021-10-01 | 深圳市检验检疫科学研究院 | Stacked SPR (surface plasmon resonance) biosensor chip based on ITO (indium tin oxide) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103344616A (en) * | 2013-06-26 | 2013-10-09 | 南京邮电大学 | Single-particle silver-nanocube surface plasma resonance probe and preparation method thereof |
| CN104634763A (en) * | 2015-02-11 | 2015-05-20 | 浙江大学 | SPR sensor chip and preparation method thereof |
-
2017
- 2017-09-07 CN CN201710801887.8A patent/CN107356563A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103344616A (en) * | 2013-06-26 | 2013-10-09 | 南京邮电大学 | Single-particle silver-nanocube surface plasma resonance probe and preparation method thereof |
| CN104634763A (en) * | 2015-02-11 | 2015-05-20 | 浙江大学 | SPR sensor chip and preparation method thereof |
Non-Patent Citations (1)
| Title |
|---|
| JEROME HOTTIN等: "Comparison of Gold and Silver/Gold Bimetallic Surface for Highly Sensitive Near-infrared SPR Sensor at 1550 nm", 《PLASMONICS》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109827932A (en) * | 2019-01-31 | 2019-05-31 | 马佑桥 | One kind being based on Wave-guide coupling surface plasma resonance sensing chip |
| CN113466184A (en) * | 2021-07-05 | 2021-10-01 | 深圳市检验检疫科学研究院 | Stacked SPR (surface plasmon resonance) biosensor chip based on ITO (indium tin oxide) |
| CN113466184B (en) * | 2021-07-05 | 2023-12-15 | 深圳市检验检疫科学研究院 | ITO-based laminated SPR biosensing chip |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Wu et al. | Long-range surface plasmon with graphene for enhancing the sensitivity and detection accuracy of biosensor | |
| Wang et al. | Theoretical design of a surface plasmon resonance sensor with high sensitivity and high resolution based on graphene–WS 2 hybrid nanostructures and Au–Ag bimetallic film | |
| Tabassum et al. | Influence of oxide overlayer on the performance of a fiber optic SPR sensor with Al/Cu layers | |
| US8298495B2 (en) | High sensitivity localized surface plasmon resonance sensor and sensor system using same | |
| CN105004698B (en) | A kind of Biosensors Based on Surface Plasmon Resonance device | |
| Nayak et al. | Dielectric over-layer assisted graphene, its oxide and MoS2-based fibre optic sensor with high field enhancement | |
| US20050201717A1 (en) | Surface plasmon resonance device | |
| CN104061997B (en) | A kind of sensor based on gold nanorods dimerization volume array Fano resonance characteristics | |
| Pal et al. | Figure of merit enhancement of surface plasmon resonance biosensor using Ga-doped zinc oxide in near infrared range | |
| US20110312103A1 (en) | Sample detection sensor and sample detection method | |
| CN102798615A (en) | Periodic nanostructure-based biosensor and preparation method thereof | |
| CN107356563A (en) | One kind is narrow to excite angle SPR sensorgram chip | |
| Rodrigues et al. | Surface plasmon resonance sensing characteristics of thin copper and gold films in aqueous and gaseous interfaces | |
| Jamil et al. | Graphene-based surface plasmon resonance urea biosensor using Kretschmann configuration | |
| CN105973846B (en) | A kind of mim type nanometer rods dimer that Fano resonance three times can be achieved | |
| CN110926667A (en) | Pressure sensing device based on asymmetric periodic surface plasmon lattice resonance | |
| Zhang et al. | Rayleigh anomaly-enabled mode hybridization in gold nanohole arrays by scalable colloidal lithography for highly-sensitive biosensing | |
| Shivangani et al. | Design and modeling of reconfigurable surface plasmon resonance refractive index sensor using Al2O3, nickel, and heterostructure BlueP/WSe2 nanofilms | |
| Jamil et al. | Graphene-MoS 2 SPR-based biosensor for urea detection | |
| Lee et al. | Parametric study on the bimetallic waveguide coupled surface plasmon resonance sensors in comparison with other configurations | |
| CN113900167A (en) | Light field regulation and control sensor and use method thereof | |
| CN108132232A (en) | A kind of surface plasma resonance sensor | |
| El Barghouti et al. | High-performance bimetallic layer plasmonic sensors: a comparative study among Ti 3 C 2 T x, black phosphorus and WS 2 | |
| Chiu et al. | Constructing a novel asymmetric dielectric structure toward the realization of high-performance surface plasmon resonance biosensors | |
| Wang et al. | Low dimensional nanostructure-assisted long-range surface plasmon resonance sensors with high figure of merit |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20171117 |
|
| WD01 | Invention patent application deemed withdrawn after publication |