CN107345314A - A kind of polycrystalline silicon ingot or purifying furnace - Google Patents
A kind of polycrystalline silicon ingot or purifying furnace Download PDFInfo
- Publication number
- CN107345314A CN107345314A CN201710824868.7A CN201710824868A CN107345314A CN 107345314 A CN107345314 A CN 107345314A CN 201710824868 A CN201710824868 A CN 201710824868A CN 107345314 A CN107345314 A CN 107345314A
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- China
- Prior art keywords
- inwall
- fixedly connected
- cylinder
- silicon ingot
- polycrystalline silicon
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B28/00—Production of homogeneous polycrystalline material with defined structure
- C30B28/04—Production of homogeneous polycrystalline material with defined structure from liquids
- C30B28/06—Production of homogeneous polycrystalline material with defined structure from liquids by normal freezing or freezing under temperature gradient
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Silicon Compounds (AREA)
Abstract
The invention discloses a kind of polycrystalline silicon ingot or purifying furnace, including body of heater, the top of the inboard wall of furnace body is fixed and is inlaid with connecting tube, the inboard wall of furnace body bottom opens up circular hole, rotation connection rotating shaft in circular hole, the upper end of the rotating shaft is fixedly connected with heat-conducting block, the upper surface of the heat-conducting block is fixedly connected with crucible guard boards, the inwall of the crucible guard boards is fixedly connected with the surface of crucible, the surface of the crucible guard boards is fixedly connected with the inwall of big bearing, the external stability of the big bearing is socketed with cylinder, the inwall rotation connection flabellum of the cylinder, the surface of the cylinder offers teeth groove, the teeth groove is engaged with gear, the one side of the inboard wall of furnace body is fixedly connected with contiguous block.The present invention solves current polycrystalline silicon ingot or purifying furnace and mostly uses argon gas circulating current protection silicon ingot by setting cylinder, threephase asynchronous machine, through hole, piston, air inlet pipe, spring and roller, and argon gas dosage is larger, the problem of causing the wasting of resources.
Description
Technical field
The present invention relates to production of polysilicon equipment technical field, specially a kind of polycrystalline silicon ingot or purifying furnace.
Background technology
Polysilicon, it is a kind of form of elemental silicon, polysilicon is the direct material for producing monocrystalline silicon, is the present age artificial intelligence
Can, automatically control, information processing, the electronics and information infrastructure material of the semiconductor devices such as opto-electronic conversion, be referred to as " Microelectronics Building
Foundation stone ", ingot furnace be aim at solar industry design special equipment, be polycrystalline silicon ingot casting required equipment.
Polycrystalline silicon ingot or purifying furnace mostly uses argon gas circulating current protection silicon ingot at present, and argon gas dosage is larger, causes the wasting of resources.
The content of the invention
(1) technical problem solved
In view of the shortcomings of the prior art, the invention provides a kind of polycrystalline silicon ingot or purifying furnace, solves current polycrystalline silicon ingot casting
Stove mostly uses argon gas circulating current protection silicon ingot, and argon gas dosage is larger, the problem of causing the wasting of resources.
(2) technical scheme
To achieve the above object, the present invention provides following technical scheme：A kind of polycrystalline silicon ingot or purifying furnace, including body of heater, it is described
The top of inboard wall of furnace body, which is fixed, is inlaid with connecting tube, and the inboard wall of furnace body bottom opens up circular hole, and rotating shaft, institute are rotatablely connected in circular hole
The upper end for stating rotating shaft is fixedly connected with heat-conducting block, and the upper surface of the heat-conducting block is fixedly connected with crucible guard boards, the crucible shield
The inwall of plate is fixedly connected with the surface of crucible, and the surface of the crucible guard boards is fixedly connected with the inwall of big bearing, described big
The external stability of bearing is socketed with cylinder, the inwall rotation connection flabellum of the cylinder, and the surface of the cylinder offers teeth groove,
The teeth groove is engaged with gear, and the one side of the inboard wall of furnace body is fixedly connected with contiguous block, and the opposite side of the contiguous block is consolidated
Surely be connected with threephase asynchronous machine, the gear is fixedly sleeved on the surface of threephase asynchronous machine output shaft, the cylinder it is interior
Wall offers through hole, and the inwall of the cylinder is connected with piston, and the top land opens up the inwall and waterproof axle of perforation
The outer wall held is fixedly connected, and the inwall of the water-sealed bearing is fixedly connected with the surface of air inlet pipe, the surface of the air inlet pipe with
The inwall of connecting tube is flexibly connected.
The surface activity of inwall and round bar that aperture is opened up at the top of the body of heater is connected, and the lower end of the round bar is fixedly connected
There is a support base, the surface activity of the round bar is socketed with spring, the both ends of the spring top with inboard wall of furnace body and branch respectively
The upper surface overlap joint of seat is supportted, the inwall of the support base is connected with roller, the top of the roller and piston by bearing pin
Overlap joint.
Preferably, the side of the piston is fixedly connected with sliding block, and the inboard wall of furnace body is corresponded to and offered at slide position
Chute, and the surface of sliding block and the inwall of chute are slidably connected.
Preferably, the through hole is connected with chute, and the sliding block is located at the bottom of chute inwall.
Preferably, the surface activity of the air inlet pipe is socketed with rubber blanket, and rubber blanket is located at air inlet pipe boss
Lower section.
Preferably, the gear is located at the middle part of teeth groove, and the width of teeth groove be equal to crucible vertical direction move away from
From.
Preferably, the flabellum is in isosceles trapezoid, and the length at upper bottom is five times of bottom length.
(3) beneficial effect
The invention provides a kind of polycrystalline silicon ingot or purifying furnace, possesses following beneficial effect：
(1), the present invention is by setting cylinder, threephase asynchronous machine, through hole, piston, air inlet pipe, spring and roller, air inlet
Pipe is passed through argon gas, and cylinder and piston separate crucible and body of heater, reduce useful space, and threephase asynchronous machine passes through gear and teeth groove
Rotary drum is driven, flabellum drives argon gas circulation, and air pressure increases to certain value pusher piston and moved upwards in cylinder, and spring is received
Contracting, through hole are connected with the cavity below piston, and the purity of argon being passed through after cylinder is interior is high and temperature is relatively low, positioned at cylinder bore
Bottom, the argon gas being first passed through in cylinder RT grow, purity is low and temperature is higher, positioned at the top of cylinder bore, institute
Be easier to discharge from through hole with the argon gas that is first passed through, then air pressure declines in cylinder, spring promote piston move downward block it is logical
Hole, reaching prevents argon gas from not making full use of the effect being discharged, and reduces argon gas dosage, solves current polycrystalline silicon ingot or purifying furnace
Argon gas circulating current protection silicon ingot is mostly used, argon gas dosage is larger, the problem of causing the wasting of resources.
(2), the present invention is by setting connecting tube, big bearing, teeth groove, threephase asynchronous machine, air inlet pipe and spring, polysilicon
In order to be heated evenly during ingot casting, crucible rotation and vertically movable, the surface of air inlet pipe and the inwall activity of connecting tube can be made
Connection, crucible big bearing in rotation process cause cylinder to be moved alone with crucible, and teeth groove has one fixed width, will not be with gear
Depart from, spring supports downwards piston all the time so that do not interfered with during crucible drive cylinder vertical motion and be filled with filling for argon gas
Enter and exclude, reach the effect of the production procedure of silicon ingot without any confusion.
Brief description of the drawings
Fig. 1 is front elevational view of the present invention；
Fig. 2 is schematic enlarged-scale view at A in Fig. 1 of the present invention；
Fig. 3 is schematic enlarged-scale view at B in Fig. 1 of the present invention；
Fig. 4 is flabellum left view of the present invention.
In figure：1 body of heater, 2 connecting tubes, 3 rotating shafts, 4 heat-conducting blocks, 5 crucible guard boards, 6 crucibles, 7 big bearings, 8 cylinders, 9 flabellums,
10 teeth groove, 11 gears, 12 contiguous blocks, 13 threephase asynchronous machines, 14 through holes, 15 pistons, 16 water-sealed bearings, 17 air inlet pipe, 18 circles
Bar, 19 support bases, 20 springs, 21 rollers, 22 sliding blocks, 23 chutes, 24 rubber blankets.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other under the premise of creative work is not made
Embodiment, belong to the scope of protection of the invention.
As Figure 1-4, the present invention provides a kind of technical scheme：A kind of polycrystalline silicon ingot or purifying furnace, including body of heater 1, in body of heater 1
The top of wall, which is fixed, is inlaid with connecting tube 2, and the inwall bottom of body of heater 1 opens up circular hole, is rotatablely connected rotating shaft 3 in circular hole, rotating shaft 3 is used for
Crucible 6 is driven to move, the upper end of rotating shaft 3 is fixedly connected with heat-conducting block 4, and the upper surface of heat-conducting block 4 is fixedly connected with crucible guard boards
5, crucible guard boards 5 are used to protect crucible 6, and the inwall of crucible guard boards 5 is fixedly connected with the surface of crucible 6, the surface of crucible guard boards 5
It is fixedly connected with the inwall of big bearing 7, big bearing 7 enables crucible guard boards 5 independently to be rotated with cylinder 8, the outside of big bearing 7
Fixed cover is connected to cylinder 8, and cylinder 8 is used to crucible 6 and body of heater 1 separate, the inwall rotation connection flabellum 9 of cylinder 8, flabellum 9
In isosceles trapezoid, and the length at upper bottom is five times of bottom length, no matter cylinder 8 rotates forward or upset, drives flabellum 9 to rotate all
The gas in cylinder 8 can be caused to move downward, it is fully utilized, the surface of cylinder 8 offers teeth groove 10, and teeth groove 10 engages
There is gear 11, gear 11 drives cylinder 8 to rotate by teeth groove 10, and gear 11 is located at the middle part of teeth groove 10, and the width of teeth groove 10
The distance moved equal to crucible 6 in vertical direction, during ingot furnace produces silicon ingot, in order that silicon ingot is heated evenly, it can make
Crucible 6 rotates and vertical motion, the shape of teeth groove 10 ensure that cylinder 8 will not depart from gear 11 all the time, and the one of the inwall of body of heater 1
Side is fixedly connected with contiguous block 12, and contiguous block 12 is used to fix threephase asynchronous machine 13, and the opposite side of contiguous block 12, which is fixed, to be connected
Threephase asynchronous machine 13 is connected to, the power supply mode of threephase asynchronous machine 13 is external power source, can be determined according to the flow velocity of argon gas
The rotating speed of threephase asynchronous machine 13, gear 11 is fixedly sleeved to be opened in the surface of the output shaft of threephase asynchronous machine 13, the inwall of cylinder 8
Provided with through hole 14, through hole 14 is used to discharge the gas in cylinder 8, and the inwall of cylinder 8 is connected with piston 15, and piston 15 is upward
Mobile, spring 20 shrinks, and through hole 14 is connected with the cavity of the lower section of piston 15, discharges gas, and spring 20 extends, and piston 15 is extensive
Position is restored, blocks through hole 14, stops gas exchanges, the side of piston 15 is fixedly connected with sliding block 22, and the inwall of body of heater 1 is corresponding to be slided
The opening position of block 22 offers chute 23, and the surface of sliding block 22 and the inwall of chute 23 are slidably connected, sliding block 22 and chute 23
Motion to piston 15 has guide effect, and through hole 14 is connected with chute 23, and sliding block 22 is located at the bottom of the inwall of chute 23, living
The inwall that the top of plug 15 opens up perforation is fixedly connected with the outer wall of water-sealed bearing 16, and water-sealed bearing 16 can make air inlet pipe 17 not
Piston 15 and cylinder 8 can be followed to rotate, the inwall of water-sealed bearing 16 is fixedly connected with the surface of air inlet pipe 17, the table of air inlet pipe 17
Face is flexibly connected with the inwall of connecting tube 2, and the surface activity of air inlet pipe 17 is socketed with rubber blanket 24, and rubber blanket 24 be located at into
The lower section of the boss of tracheae 17, during inflation, air pressure pushes down on air inlet pipe 17, and air inlet pipe 17 extrudes rubber blanket 24, strengthen into
Sealing between tracheae 17 and connecting tube 2.
The inwall that the top of body of heater 1 opens up aperture is connected with the surface activity of round bar 18, and round bar 18 is used for limited spring 20
Position, the lower end of round bar 18 are fixedly connected with support base 19, and support base 19 provides stress point, the surface of round bar 18 to spring 20
Movable sleeve is connected to spring 20, and spring 20 is used to support piston 15, the both ends top with the inwall of body of heater 1 and the support respectively of spring 20
The upper surface overlap joint of seat 19, the inwall of support base 19 are connected with roller 21 by bearing pin, and roller 21 is used to eliminate piston 15
With the frictional force between support base 19, the top of roller 21 and piston 15 overlaps.
When in use, threephase asynchronous machine 13 drives cylinder 8 to rotate by gear 11, due to big bearing 7 and water-sealed bearing
16 effect so that crucible guard boards 5 and air inlet pipe 17 will not follow cylinder 8 to rotate, and connecting tube 2 is passed through argon gas, because air pressure makes
Obtain air inlet pipe 17 and extrude rubber blanket 24, prevent gap of the argon gas between connecting tube 2 and air inlet pipe 17 from entering the inside of body of heater 1 and making
Into waste, after being passed through gas in cylinder 8, after the gas heated time that is passed through it is short and purity is high, the gas purity being first passed through reduces,
It is heated to rise, after air pressure increase, promote piston 15 to move upwards, exposure through hole 14, discharge gas, spring 20 shrinks, air pressure
Spring 20 supports piston 15 to move downward and blocks through hole 14 after decline, reaches sealing effectiveness, argon gas of avoiding waste.
It can to sum up obtain, the present invention is by setting cylinder 8, threephase asynchronous machine 13, through hole 14, piston 15, air inlet pipe 17, bullet
Spring 20 and roller 21, solve current polycrystalline silicon ingot or purifying furnace and mostly use argon gas circulating current protection silicon ingot, argon gas dosage is larger, causes
The problem of wasting of resources.
It should be noted that herein, such as first and second or the like relational terms are used merely to a reality
Body or operation make a distinction with another entity or operation, and not necessarily require or imply and deposited between these entities or operation
In any this actual relation or order.Moreover, term " comprising ", "comprising" or its any other variant are intended to
Nonexcludability includes, so that process, method, article or equipment including a series of elements not only will including those
Element, but also the other element including being not expressly set out, or it is this process, method, article or equipment also to include
Intrinsic key element.
Although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of changes, modification can be carried out to these embodiments, replace without departing from the principles and spirit of the present invention by understanding
And modification, the scope of the present invention is defined by the appended.
Claims (6)
1. a kind of polycrystalline silicon ingot or purifying furnace, including body of heater (1), the top of body of heater (1) inwall, which is fixed, is inlaid with connecting tube (2),
Body of heater (1) the inwall bottom opens up circular hole, is rotatablely connected rotating shaft (3) in circular hole, the upper end of the rotating shaft (3) is fixedly connected with
Heat-conducting block (4), the upper surface of the heat-conducting block (4) are fixedly connected with crucible guard boards (5), the inwall of the crucible guard boards (5) with
The surface of crucible (6) is fixedly connected, it is characterised in that：The surface of the crucible guard boards (5) is fixed with the inwall of big bearing (7) to be connected
Connect, the external stability of the big bearing (7) is socketed with cylinder (8), and the inwall rotation connection flabellum (9) of the cylinder (8) is described
The surface of cylinder (8) offers teeth groove (10), and the teeth groove (10) is engaged with gear (11), the side of body of heater (1) inwall
Face is fixedly connected with contiguous block (12), and the opposite side of the contiguous block (12) is fixedly connected with threephase asynchronous machine (13), described
Gear (11) is fixedly sleeved to offer through hole in the surface of threephase asynchronous machine (13) output shaft, the inwall of the cylinder (8)
(14), the inwall of the cylinder (8) is connected with piston (15), and the inwall and waterproof of perforation are opened up at the top of the piston (15)
The outer wall of bearing (16) is fixedly connected, and the inwall of the water-sealed bearing (16) is fixedly connected with the surface of air inlet pipe (17), described
The surface of air inlet pipe (17) is flexibly connected with the inwall of connecting tube (2)；
The inwall that aperture is opened up at the top of the body of heater (1) is connected with the surface activity of round bar (18), the lower end of the round bar (18)
Support base (19) is fixedly connected with, the surface activity of the round bar (18) is socketed with spring (20), the both ends of the spring (20)
Overlapped respectively with the top of body of heater (1) inwall and the upper surface of support base (19), the inwall of the support base (19) passes through bearing pin
Roller (21) is connected with, the roller (21) and the top of piston (15) overlap.
A kind of 2. polycrystalline silicon ingot or purifying furnace according to claim 1, it is characterised in that：The side of the piston (15), which is fixed, to be connected
Sliding block (22) is connected to, body of heater (1) inwall corresponds to sliding block (22) opening position and offers chute (23), and the surface of sliding block (22)
It is slidably connected with the inwall of chute (23).
A kind of 3. polycrystalline silicon ingot or purifying furnace according to claim 1 or 2, it is characterised in that：The through hole (14) and chute
(23) it is connected, the sliding block (22) is located at the bottom of chute (23) inwall.
A kind of 4. polycrystalline silicon ingot or purifying furnace according to claim 1, it is characterised in that：The surface activity of the air inlet pipe (17)
Rubber blanket (24) is socketed with, and rubber blanket (24) is located at the lower section of air inlet pipe (17) boss.
A kind of 5. polycrystalline silicon ingot or purifying furnace according to claim 1, it is characterised in that：The gear (11) is located at teeth groove (10)
Middle part, and the width of teeth groove (10) is equal to the distance moved in vertical direction of crucible (6).
A kind of 6. polycrystalline silicon ingot or purifying furnace according to claim 1, it is characterised in that：The flabellum (9) is in isosceles trapezoid, and
The length at upper bottom is five times of bottom length.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710824868.7A CN107345314A (en) | 2017-09-14 | 2017-09-14 | A kind of polycrystalline silicon ingot or purifying furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710824868.7A CN107345314A (en) | 2017-09-14 | 2017-09-14 | A kind of polycrystalline silicon ingot or purifying furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107345314A true CN107345314A (en) | 2017-11-14 |
Family
ID=60257691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710824868.7A Pending CN107345314A (en) | 2017-09-14 | 2017-09-14 | A kind of polycrystalline silicon ingot or purifying furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107345314A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109097830A (en) * | 2018-10-30 | 2018-12-28 | 浙江羿阳太阳能科技有限公司 | Polycrystalline silicon ingot casting energy saving furnace |
| CN109137066A (en) * | 2018-10-30 | 2019-01-04 | 浙江羿阳太阳能科技有限公司 | Reduce the polycrystalline silicon ingot or purifying furnace of high-purity argon gas usage amount |
| CN110016717A (en) * | 2019-05-30 | 2019-07-16 | 江苏拓正茂源新能源有限公司 | A kind of polycrystalline silicon ingot or purifying furnace secondary charging device and polycrystalline cast ingot system |
| CN110565162A (en) * | 2019-09-23 | 2019-12-13 | 大同新成新材料股份有限公司 | Thermal field crucible with heat preservation structure for multi-product silicon and use method thereof |
| CN112039549A (en) * | 2020-09-15 | 2020-12-04 | 南京从振凯电子商务有限公司 | Be used for novel information technology multifrequency equipment protection device |
-
2017
- 2017-09-14 CN CN201710824868.7A patent/CN107345314A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109097830A (en) * | 2018-10-30 | 2018-12-28 | 浙江羿阳太阳能科技有限公司 | Polycrystalline silicon ingot casting energy saving furnace |
| CN109137066A (en) * | 2018-10-30 | 2019-01-04 | 浙江羿阳太阳能科技有限公司 | Reduce the polycrystalline silicon ingot or purifying furnace of high-purity argon gas usage amount |
| CN110016717A (en) * | 2019-05-30 | 2019-07-16 | 江苏拓正茂源新能源有限公司 | A kind of polycrystalline silicon ingot or purifying furnace secondary charging device and polycrystalline cast ingot system |
| CN110565162A (en) * | 2019-09-23 | 2019-12-13 | 大同新成新材料股份有限公司 | Thermal field crucible with heat preservation structure for multi-product silicon and use method thereof |
| CN110565162B (en) * | 2019-09-23 | 2024-02-27 | 大同新成新材料股份有限公司 | Production equipment with heat preservation structure for polysilicon and application method of production equipment |
| CN112039549A (en) * | 2020-09-15 | 2020-12-04 | 南京从振凯电子商务有限公司 | Be used for novel information technology multifrequency equipment protection device |
| CN112039549B (en) * | 2020-09-15 | 2021-05-04 | 广西电网有限责任公司电力科学研究院 | Be used for novel information technology multifrequency equipment protection device |
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Application publication date: 20171114 |