CN107329189B - The invalid pixel screening technique of spectrometer detectors and radiation correction method - Google Patents
The invalid pixel screening technique of spectrometer detectors and radiation correction method Download PDFInfo
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- CN107329189B CN107329189B CN201710601279.2A CN201710601279A CN107329189B CN 107329189 B CN107329189 B CN 107329189B CN 201710601279 A CN201710601279 A CN 201710601279A CN 107329189 B CN107329189 B CN 107329189B
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Abstract
The invention discloses a kind of invalid pixel screening techniques of spectrometer detectors, comprising: test obtain spectrometer to be measured dark field data and respectively in different brightness input lights detector responsiveness data；According to the statistical result of dark field data, the pixel that dark field response deviates normal range (NR) is marked off, constitutes the first pixel set；Responsiveness data are carried out with the relative error parameter of each pixel of Linear Quasi joint account, the pixel that responsiveness is less than first threshold is marked off according to fitting result, the second pixel set is constituted, and marks off the pixel of relative error parameter drift-out normal range (NR), constitutes third pixel set；According to the first pixel set and the second pixel intersection of sets collection, and third pixel set is combined, obtains invalid pixel set.The invalid pixel screening technique of spectrometer detectors of the present invention improves the accuracy to the screening of detector invalid pixel.Invention additionally discloses a kind of spectrometer radiation correction methods.
Description
Technical field
The present invention relates to spectral instrument technical fields, more particularly to a kind of invalid pixel screening side of spectrometer detectors
Method.The invention further relates to a kind of spectrometer radiation correction methods.
Background technique
For some imaging spectrometers, based on the reason of its detector manufacture craft, invalid picture is inevitably resulted from
Member, and with the use of detector also will appear the phenomenon that normal pixel is gradually degenerated for invalid pixel.For example, for visiting
Survey short-wave infrared HgGdTe detector used by the telluric line near such as 1610nm, 2060nm wavelength, this kind of spy
Surveying device has the advantages that response sensitivity is high, but invalid pixel is exactly its major defect more.It is deposited in the detector of imaging spectrometer
Spectroscopic data can be made to be distorted in invalid pixel, spectral line is made to be affected.
It is that dead pixel is determined as invalid pixel with hot pixel is crossed, dead pixel refers in existing invalid pixel screening technique
The pixel of low-response degree crosses hot pixel and refers to that dark background noise is greater than the especially more pixel of average noise.This invalid pixel sieve
Choosing method is relatively coarse, and accuracy is lower, such as the invalid pixel for being saturated in advance in dynamic range, it may appear that accidentally
It is judged to effective pixel.
Summary of the invention
The object of the present invention is to provide a kind of invalid pixel screening techniques of spectrometer detectors, and it is invalid to detector to improve
The accuracy of pixel screening.The present invention also provides a kind of spectrometer radiation correction methods.
To achieve the above object, the invention provides the following technical scheme:
A kind of invalid pixel screening technique of spectrometer detectors, comprising:
Test obtain spectrometer to be measured dark field data and respectively in different brightness input lights detector responsiveness
Data, the dark field data refer to the response Value Data of the detector in spectrometer to be measured unglazed input, and the responsiveness data are
The response of detector pixel is with the distribution for inputting brightness values；
According to the statistical result of the dark field data, the pixel that dark field response deviates normal range (NR) is marked off, constitutes the
One pixel set；
The relative error parameter that the responsiveness data are carried out with each pixel of Linear Quasi joint account, according to fitting result
The pixel that response rate is less than first threshold is marked off, constitutes the second pixel set, and it is normal to mark off relative error parameter drift-out
The pixel of range constitutes third pixel set；
According to the first pixel set and the second pixel intersection of sets collection, and in conjunction with the third pixel set,
Obtain invalid pixel set.
Optionally, the statistical result according to the dark field data marks off dark field response and deviates mean value range
Pixel, constituting the first pixel set includes:
Dark field response is greater than μ1+5σ1Pixel be determined as bright pixel, by dark field response be less than μ1-5σ1Pixel
It is determined as dark pixel, wherein μ1Indicate the average value of each pixel dark field response, σ1Indicate each pixel dark field response
Standard deviation；
Dark field response is greater than μ2+3σ2Pixel be determined as unstable pixel, by dark field response be less than μ2-3σ2's
Pixel was determined as stable pixel, wherein μ2Indicate the average value of each pixel dark field response standard deviation within a preset time,
σ2Indicate the standard deviation of each pixel dark field response standard deviation within a preset time；
The first pixel set accordingly includes bright pixel set, dark pixel set, unstable pixel set and excessively stable
Pixel set.
Optionally, the relative error parameter for calculating each pixel include calculate each pixel average relative error and
Maximum relative error；
The third pixel set includes the set being made of the pixel that average relative error is greater than second threshold, Yi Jiyou
Maximum relative error is greater than the set that the pixel of third threshold value is constituted；
It is described according to the first pixel set and the second pixel intersection of sets collection, and in conjunction with the third pixel collection
It closes, obtaining invalid pixel set includes:
By the dark pixel set and the second pixel intersection of sets collection, the excessively stable pixel set and described second
Pixel intersection of sets collection, the bright pixel set and the second pixel intersection of sets collection, the unstable pixel set with by
Maximum relative error is greater than the intersection of sets collection that the pixel of third threshold value is constituted, and is greater than second threshold by average relative error
Pixel constitute set as invalid pixel set.
Optionally, further includes:
The set and dark field response that the pixel that dark field response is greater than the 4th threshold value is constituted are less than the 5th threshold value
The set that pixel is constituted is greater than 8 σ as invalid pixel set, and/or by dark field noise1The set that constitutes of pixel as invalid
Pixel set.
Optionally, line is carried out to the responsiveness data using the smallest least square method of quadratic sum based on relative deviation
Property fitting.
Optionally, after obtaining invalid pixel set further include:
The invalid pixel filtered out is traversed, the invalid pixel determined according to dark field data and the inspection of responsiveness data
Validity.
Optionally, system spectrometer to be measured tested include optical integrating-sphere, scaling light source, current controller and
Radiation survey meter；
The scaling light source be used for into the optical integrating-sphere injection light, the light-emitting window of the optical integrating-sphere with it is to be measured
Spectrometer input is corresponding；
The current controller is used to be passed through electric current to the optical integrating-sphere, to control the optical integrating-sphere output light
Brightness；
The radiation survey meter is arranged between the light-emitting window of the optical integrating-sphere and spectrometer input to be measured, for surveying
Measure the input brightness of the spectrometer to be measured.
Optionally, inert gas is filled in the optical integrating-sphere, inert gas includes nitrogen.
Optionally, spectrometer to be measured is placed in low-temperature vacuum environment when testing spectrometer to be measured.
A kind of spectrometer radiation correction method, comprising:
Invalid pixel list is loaded into spectrometer detectors reading program, make spectrometer detectors read response when without
Effect pixel output is set to zero, wherein uses the invalid pixel screening technique of the described in any item spectrometer detectors of claim 1-9
Determination obtains the invalid pixel of spectrometer detectors；
Calibration data acquisition is carried out using full frame mode with spectrometer detectors, is calculated according to the calibration data of acquisition each
The responsiveness coefficient of pixel, to carry out spectrum correction using obtained responsiveness coefficient, the full frame mode is by each small pixel
The cumulative response for merging pixel as a whole of response, wherein invalid pixel is set to zero.
As shown from the above technical solution, the invalid pixel screening technique of spectrometer detectors provided by the present invention, is surveyed first
Examination obtain spectrometer to be measured dark field data and respectively in different brightness input lights detector responsiveness data；Then root
According to the statistical result of dark field data, the pixel that dark field response deviates normal range (NR) is marked off, the first pixel set is constituted, to sound
Response data carry out the relative error parameter of each pixel of Linear Quasi joint account, mark off response rate according to fitting result and are less than
The pixel of first threshold constitutes the second pixel set, and marks off the pixel of relative error parameter drift-out normal range (NR), constitutes the
Three pixel set；Finally according to the first pixel set and the second pixel intersection of sets collection, and third pixel set is combined, obtains nothing
Imitate pixel set.
The invalid pixel screening technique of spectrometer detectors of the present invention deviates normal range (NR) for the dark field response filtered out
Pixel, recycle the responsiveness relative error parameter of pixel to the pixel set screen, for satisfying in advance in dynamic range
The invalid pixel of sum spends relative error according to response can detecte out, therefore compared to existing method, improve to detector without
Imitate the accuracy of pixel screening.
Spectrometer radiation correction method provided by the invention merges the characteristic of output using spectrometer, using full frame mode
Radiation calibration is carried out, after filtering out invalid pixel, the output of invalid pixel is set to zero response for avoiding using side pixel
It replaces, improves the accuracy of spectrometer test.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
It obtains other drawings based on these drawings.
Fig. 1 is a kind of flow chart of the invalid pixel screening technique of spectrometer detectors provided in an embodiment of the present invention；
Fig. 2 is the statistical Butut of the dark field response of detector pixel in the embodiment of the present invention；
Fig. 3 is the statistics of the standard deviation of each pixel dark field response of detector within a preset time in the embodiment of the present invention
Distribution map；
Fig. 4 is the statistical Butut of each pixel response rate of detector in the embodiment of the present invention；
Fig. 5 is to test the system schematic used to spectrometer in the embodiment of the present invention.
Specific embodiment
Technical solution in order to enable those skilled in the art to better understand the present invention, below in conjunction with of the invention real
The attached drawing in example is applied, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described implementation
Example is only a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, this field is common
Technical staff's every other embodiment obtained without making creative work, all should belong to protection of the present invention
Range.
Referring to FIG. 1, the invalid pixel screening technique of a kind of spectrometer detectors provided in an embodiment of the present invention, including step
It is rapid:
S10: test obtain spectrometer to be measured dark field data and respectively in different brightness input lights detector sound
Response data, the dark field data refer to the response Value Data of the detector in spectrometer to be measured unglazed input, the responsiveness
Data are the response of detector pixel with the distribution of input brightness values.
In specific test, after spectrometer to be measured enters normal operating conditions, shelter from spectrometer input make it is unglazed defeated
Enter, read the response of each pixel of spectrometer detectors, test obtains dark field data.
The input brightness for successively changing spectrometer to be measured, reads that obtain detector each respectively under different input brightness
The response of pixel, test obtain the response of each pixel with the distribution of input brightness values.
S11: according to the statistical result of the dark field data, the pixel that dark field response deviates normal range (NR), structure are marked off
At the first pixel set.
In a specific embodiment, for statistical analysis to the obtained dark field data of test, calculating detector pixel
The average value mu of dark field response1And standard deviation sigma1.Refering to what is shown in Fig. 2, Fig. 2 is the dark field response of detector pixel in an embodiment
The statistical Butut of value, wherein abscissa indicates the dark field response of pixel, and ordinate indicates pixel quantity.
Wherein, dark field response is greater than μ1+5σ1Pixel be determined as bright pixel, by dark field response be less than μ1-5σ1's
Pixel is determined as dark pixel, wherein μ1Indicate the average value of each pixel dark field response, σ1Indicate each pixel dark field response
The standard deviation of value.
It is further for statistical analysis to the standard deviation of each pixel dark field response within a preset time, it calculates pre-
If the average value mu of each pixel dark field response standard deviation in the time2And each pixel dark field response within a preset time
The standard deviation sigma of standard deviation2.It can refer to Fig. 3, Fig. 3 is each pixel dark field response of detector within a preset time in an embodiment
The statistical Butut of the standard deviation of value, wherein abscissa indicates the standard deviation of pixel dark field response, and ordinate indicates pixel number
Amount.
Specifically, dark field response is greater than μ2+3σ2Pixel be determined as unstable pixel, dark field response is less than
μ2-3σ2Pixel be determined as stable pixel, wherein μ2Indicate each pixel dark field response standard deviation within a preset time
Average value, σ2Indicate the standard deviation of each pixel dark field response standard deviation within a preset time.
Bright pixel, dark pixel, unstable pixel and excessively stable pixel are marked off according to the above method, correspondingly, first
Pixel set includes bright pixel set, dark pixel set, unstable pixel set and excessively stable pixel set.
It is further to note that it is for statistical analysis to pixel dark field response in actually calculating, it calculates dark field and rings
Average value mu should be worth1With standard deviation sigma1When, first the pel data deviated considerably from is excluded before calculating, helps to improve data in this way
The accuracy of calculating.
S12: the responsiveness data are carried out with the relative error parameter of each pixel of Linear Quasi joint account, according to fitting
As a result the pixel that response rate is less than first threshold is marked off, the second pixel set is constituted, and marks off relative error and deviates normally
The pixel of range constitutes third pixel set.
In the specific implementation, it is preferred to use least square method carries out linear fit to the responsiveness data of each pixel, specifically
The smallest least square method of quadratic sum based on relative deviation can be used, each pixel of detector is inputted in different brightness respectively
Response under light carries out linear fit, obtains fitting result.With reference to Fig. 4, Fig. 4 is that each pixel of detector is rung in an embodiment
Should rate statistical Butut, wherein abscissa indicate pixel response rate, ordinate indicate pixel quantity, wherein response rate be ring
Response linear fit slope of a curve carries out linear fit to the data using least square method.
According to fitting result, pixel of the response rate less than first threshold is filtered out as low-response degree pixel, constitutes second
Pixel set.In the specific implementation, illustrative first threshold can take the 1/10 of average response rate.Response rate is less than flat
The pixel of equal response rate 1/10 is determined as low-response degree pixel.
Calculate the relative error parameter of each pixel simultaneously when carrying out linear fit, in a specific embodiment,
Average relative error and maximum relative error including calculating each pixel.
The pixel of relative error parameter drift-out normal range (NR) is marked off, constituting third pixel set includes: third pixel collection
Conjunction includes the set being made of the pixel that average relative error is greater than second threshold, and is greater than third threshold by maximum relative error
The set that the pixel of value is constituted.In the specific implementation, illustrative second threshold can be set to 2%, and third threshold value can be set
It is set to 2%.
S13: according to the first pixel set and the second pixel intersection of sets collection, and in conjunction with the third pixel collection
It closes, obtains invalid pixel set.
In this specific step, by the dark pixel set and the second pixel intersection of sets collection, the excessively stable pixel
Set and the second pixel intersection of sets collection, the bright pixel set and the second pixel intersection of sets collection, the shakiness
Determine pixel set to miss with by maximum relative error greater than the intersection of sets collection that the pixel of third threshold value is constituted, and by averagely opposite
The set that the pixel that difference is greater than second threshold is constituted is as invalid pixel set.
Further, the present embodiment method further include: the set for constituting the pixel that dark field response is greater than the 4th threshold value
And dark field response is big as invalid pixel set, and/or by dark field noise less than the set that the pixel of the 5th threshold value is constituted
In 8 σ1Pixel constitute set as invalid pixel set.Illustratively, the 4th threshold value is 3800 in a kind of specific example
(12 quantizations), the 5th threshold value is 300.
Finally obtained invalid pixel is the intersection of above each invalid pixel set.
Therefore the invalid pixel screening technique of the present embodiment spectrometer detectors deviates just the dark field response filtered out
The pixel of normal range, recycles the responsiveness relative error parameter of pixel to screen the pixel set, in dynamic range
The invalid pixel being saturated in advance spends relative error according to response can detecte out, therefore compared to existing method, improve to spy
Survey the accuracy of the invalid pixel screening of device.
The invalid pixel screening technique of the present embodiment spectrometer detectors, on the basis of above-described embodiment description content,
Further include step S14 after obtaining invalid pixel set: the invalid pixel that traversal is filtered out, according to dark field data and response
Degree is according to the validity for checking the invalid pixel determined.
After screening to obtain invalid pixel by above steps, the invalid pixel that is filtered out is traversed, according to testing
The dark field response and responsiveness data of each pixel of the detector arrived, check the validity of each pixel filtered out.
In the invalid pixel screening technique of the present embodiment spectrometer detectors, to spectrometer to be measured test when, can be used with
Lower system tests spectrometer to be measured.Referring to FIG. 5, system includes optical integrating-sphere 20, scaling light source 21, current control
Device 22 and radiation survey meter 23；
The scaling light source 21 is used for injection light, the light-emitting window of the optical integrating-sphere 20 into the optical integrating-sphere 20
It is corresponding with spectrometer input to be measured；
The current controller 22 is used to be passed through electric current to the optical integrating-sphere 20, to control the optical integrating-sphere 20
Brightness output；
The radiation survey meter 23 is arranged between the light-emitting window and spectrometer input to be measured of the optical integrating-sphere 20, uses
In the input brightness for measuring the spectrometer to be measured.
Preferably, spectrometer to be measured is placed in low-temperature vacuum environment in actual test, such as can be by spectrometer to be measured
Cryogenic vacuum is placed on to fill in 24.
Perhaps carbon dioxide gas knows from experience absorption special wavelength light when there are oxygen or titanium dioxides in optical integrating-sphere to oxygen
When concentration of carbon is higher, light source can be absorbed and issue special wavelength light in light, optical integrating-sphere output light is had an impact, will affect survey
Try effect.In consideration of it, being filled with inert gas in optical integrating-sphere 20, and use oxygen concentration table in this method in test
25 and gas concentration lwevel table 25 monitor optical integrating-sphere 20 in oxygen concentration and gas concentration lwevel, guarantee in optical integrating-sphere
Interior oxygen concentration and gas concentration lwevel are very low.Wherein, inert gas can be nitrogen, can pass through the gas bottle filled with nitrogen
26 are filled with gas into optical integrating-sphere 20.
When being tested using above system, test process operating procedure is as follows:
S20: spectrometer to be measured is placed in vacuum environment, adjusts environment according to the operating environment requirements of spectrometer to be measured
Temperature and air pressure guarantee that spectrometer to be measured is in low-temperature vacuum environment.
S21: setting optical integrating-sphere adjusts the light-emitting window face spectrometer input to be measured of optical integrating-sphere, radiation is surveyed
Meter is arranged between the light-emitting window of optical integrating-sphere and the entrance of spectrometer to be measured.
S22: being filled with inert gas into optical integrating-sphere, is measured respectively using oxygen concentration table and gas concentration lwevel table
Oxygen concentration and gas concentration lwevel in optical integrating-sphere control the amount that inert gas is filled with into optical integrating-sphere, guarantee
Both gas concentrations are very low.
S23: powering on spectrometer detectors to be measured, opens scaling light source injection light into optical integrating-sphere.Pass through electric current
Controller controls the size of current for being passed through optical integrating-sphere, successively changes the brightness output of optical integrating-sphere, respectively in difference
The response of spectrometer detectors to be measured is read under input brightness, and spectrometer input is obtained by radiation survey meter measurement
Input brightness.
S24: sheltering from spectrometer input to be measured using black metal sheet, reads the dark field response of spectrometer detectors to be measured
Value.
The embodiment of the present invention also provides a kind of spectrometer radiation correction method, comprising:
S30: being loaded into invalid pixel list in spectrometer detectors reading program, and spectrometer detectors is made to read response
The output of Shi Wuxiao pixel is set to zero, wherein is obtained using the invalid pixel screening technique determination of above-described spectrometer detectors
The invalid pixel of spectrometer detectors.
After use the process described above determination obtains the invalid pixel of spectrometer detectors, in spectrometer system,
It is loaded into invalid pixel list in spectrometer detectors reading program, and detector is set and reads invalid pixel output when response
It is set to zero.
S31: calibration data acquisition is carried out using full frame mode with spectrometer detectors, is calculated according to the calibration data of acquisition
The responsiveness coefficient of each pixel, to carry out spectrum correction using obtained responsiveness coefficient, the full frame mode is will be each small
The cumulative response for merging pixel as a whole of the response of pixel, wherein invalid pixel is set to zero.
Spectrometer is calibrated, spectrometer detectors use full frame mode, i.e., by the cumulative work of the response of each small pixel
Merge the response of pixel for entirety, wherein the output of invalid pixel is set to zero.
Radiation calibration calculating is carried out according to the calibration data of acquisition, wherein the response after application is cumulative carries out radiation calibration
It calculates, the responsiveness coefficient of single small pixel can be obtained.After removing several small pixel (invalid pixels), still it can calculate
Lack the responsiveness data for merging pixel after several pixels.The responsiveness coefficient that further can be used carries out spectrum correction.
In the prior art, carrying out invalid pixel correction to spectrometer is replaced using the pixel response beside invalid pixel
Generation, this method will cause harassing for spectral line a small range.In this method, the characteristic of output is merged using spectrometer, using complete
Frame pattern carries out radiation calibration, after filtering out invalid pixel, the output of invalid pixel is set to zero, is avoided using side pixel
Response replaces.Due to that can determine the response of current big pixel using multiple pixel accumulated values using output mode is merged
Value, after invalid pixel is set to zero, needs to recalculate radiant correction responsiveness coefficient.It is calculated with modified radiant correction coefficient
The curve of spectrum can reduce unstable pixel and impact to spectral line precision.
The invalid pixel screening technique of spectrometer detectors provided by the present invention and radiation correction method are carried out above
It is discussed in detail.Used herein a specific example illustrates the principle and implementation of the invention, above embodiments
Illustrate to be merely used to help understand method and its core concept of the invention.It should be pointed out that for the common skill of the art
, without departing from the principle of the present invention, can be with several improvements and modifications are made to the present invention for art personnel, these change
It is also fallen within the protection scope of the claims of the present invention into modification.
Claims (1)
1. a kind of spectrometer radiation correction method characterized by comprising
Invalid pixel list is loaded into spectrometer detectors reading program, invalid picture when spectrometer detectors being made to read response
Member output is set to zero；
Calibration data acquisition is carried out using full frame mode with spectrometer detectors, calculates each pixel according to the calibration data of acquisition
Responsiveness coefficient, to carry out spectrum correction using obtained responsiveness coefficient, the full frame mode is by the sound of each small pixel
The cumulative response for merging pixel as a whole should be worth, wherein invalid pixel is set to zero；
The invalid pixel of spectrometer detectors is obtained using the invalid pixel screening technique determination of spectrometer detectors as described below,
It specifically includes:
Test obtain spectrometer to be measured dark field data and respectively in different brightness input lights detector responsiveness data,
The dark field data refer to the response Value Data of the detector in spectrometer to be measured unglazed input, and the responsiveness data are detector
The response of pixel is with the distribution for inputting brightness values；
According to the statistical result of the dark field data, the pixel that dark field response deviates normal range (NR) is marked off, constitutes the first picture
Member set；
The relative error parameter that the responsiveness data are carried out with each pixel of Linear Quasi joint account, divides according to fitting result
Response rate is less than the pixel of first threshold out, constitutes the second pixel set, and mark off relative error parameter drift-out normal range (NR)
Pixel, constitute third pixel set；
According to the first pixel set and the second pixel intersection of sets collection, and in conjunction with the third pixel set, obtain
Invalid pixel set；
Wherein, the statistical result according to the dark field data marks off the pixel that dark field response deviates mean value range, structure
Include: at the first pixel set
Dark field response is greater than μ1+5σ1Pixel be determined as bright pixel, by dark field response be less than μ1-5σ1Pixel be determined as
Dark pixel, wherein μ1Indicate the average value of each pixel dark field response, σ1Indicate the standard deviation of each pixel dark field response；
Dark field response is greater than μ2+3σ2Pixel be determined as unstable pixel, by dark field response be less than μ2-3σ2Pixel it is true
It was set to stable pixel, wherein μ2Indicate the average value of each pixel dark field response standard deviation within a preset time, σ2It indicates
The standard deviation of each pixel dark field response standard deviation within a preset time；
The first pixel set accordingly includes bright pixel set, dark pixel set, unstable pixel set and excessively stable pixel
Set；
Wherein, the relative error parameter for calculating each pixel includes calculating the average relative error and maximum phase of each pixel
To error；
The third pixel set includes the set being made of the pixel that average relative error is greater than second threshold, and by maximum
Relative error is greater than the set that the pixel of third threshold value is constituted；
It is described according to the first pixel set and the second pixel intersection of sets collection, and in conjunction with the third pixel set,
Obtaining invalid pixel set includes:
By the dark pixel set and the second pixel intersection of sets collection, the excessively stable pixel set and second pixel
Intersection of sets collection, the bright pixel set are with the second pixel intersection of sets collection, the unstable pixel set and by maximum
Relative error is greater than the intersection of sets collection that the pixel of third threshold value is constituted, and is greater than the picture of second threshold by average relative error
The set that member is constituted is as invalid pixel set；
Wherein, further includes:
Pixel of the set and dark field response that the pixel that dark field response is greater than the 4th threshold value is constituted less than the 5th threshold value
The set of composition is greater than 8 σ as invalid pixel set, and/or by dark field noise1Pixel constitute set as invalid pixel
Set；
Wherein, Linear Quasi is carried out to the responsiveness data using the smallest least square method of quadratic sum based on relative deviation
It closes；
Wherein, after obtaining invalid pixel set further include:
The invalid pixel filtered out is traversed, the invalid pixel determined according to dark field data with responsiveness data inspection has
Effect property；
Wherein, the system tested spectrometer to be measured includes that optical integrating-sphere, scaling light source, current controller and radiation are surveyed
Meter；
The scaling light source is used for the injection light into the optical integrating-sphere, the light-emitting window of the optical integrating-sphere and spectrum to be measured
Instrument entrance is corresponding；
The current controller is used to be passed through electric current to the optical integrating-sphere, bright to control the optical integrating-sphere output
Degree；
The radiation survey meter is arranged between the light-emitting window of the optical integrating-sphere and spectrometer input to be measured, for measuring
State the input brightness of spectrometer to be measured；
Wherein, inert gas is filled in the optical integrating-sphere, inert gas includes nitrogen；
Wherein, spectrometer to be measured is placed in low-temperature vacuum environment when testing spectrometer to be measured.
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