CN107326442A - Laser anneal device and laser annealing apparatus - Google Patents
Laser anneal device and laser annealing apparatus Download PDFInfo
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- CN107326442A CN107326442A CN201710543368.6A CN201710543368A CN107326442A CN 107326442 A CN107326442 A CN 107326442A CN 201710543368 A CN201710543368 A CN 201710543368A CN 107326442 A CN107326442 A CN 107326442A
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/02—Heat treatment
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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Abstract
The invention discloses a kind of laser anneal device and laser annealing apparatus, including housing, there is gas circulation chamber in the housing；There is resonance chamber, side wall and the gas circulation chamber insertion of the resonance chamber in laser tube, the laser tube；Cross flow fan, including rotating shaft, the two ends of the rotating shaft pass through the gas circulation chamber；And drive mechanism, two ends of the drive mechanism respectively with the rotating shaft are connected, the two ends synchronous axial system for driving the rotating shaft.The present invention synchronously drives the two ends of cross flow fan using drive mechanism, therefore when cross flow fan rotates in high speed, the generation of circular shaft twisted phenomena can be reduced well, so as to avoid producing spiral air flow in resonator so that longitudinal laser gas in resonator is more homogeneous.
Description
Technical field
The present invention relates to laser annealing techniques field, a kind of laser anneal device and laser annealing apparatus are particularly related to.
Background technology
At present, in low temperature polycrystalline silicon (LTPS) actual production, form many using quasi-molecule laser annealing technology more
Crystal silicon, the crystallization effect of polysilicon is largely dependent upon the quality of laser, wants crystallization effect preferably, generally requires stabilization
Property and the preferable laser of homogeneity.In order to ensure that laser tube can all produce stabilization under each pulse and homogeneity is preferable
Gas-circulating system in laser, laser tube is most important.In each electrode discharge, the laterally longitudinal direction only in resonance chamber
Gas homogeneity is good, just can guarantee that the laser for producing that Laser Energy Change is small, homogeneity is relatively good.
At present, it is many inside laser tube that cross flow fan is driven using unilateral drive system, to meet in electric discharge moment resonator
Indoor transverse direction laser gas is homogeneous with longitudinal laser gas.But it is due to that cross flow fan is cylindric, its own has one
Determine quality, and can be by certain resistance in rotary course.When cross flow fan is high with thousands of turns (such as 3250d/s or so)
During speed rotation, obvious circular shaft twisted phenomena just occurs.And circular shaft twisted phenomena can cause to produce in laser tube along driving
The spiral air flow in place direction, causes the homogeneity of longitudinal air flow in laser tube to be deteriorated.
In addition, in the whole life span of laser gas, laser lens clean level is also very before and after keeping resonator
Important, only laser lens keep clean, and the laser that just projection can be made to go out is homogeneous.At present, it is in industrial production to use more
The laser tube of coherent companies production, it uses CONSTANT POWER MODE in production.In use, with laser gas
Aging, can ensure energy constant by improving voltage.Because when laser tube is in electrion, the tube wall of laser tube can be produced
Raw particulate pollutant, these particulate pollutants also can be with air-flow high-speed motion.When producing spiral air flow in laser tube, this
A little particulate pollutants will be with where spiral air flow high speed rotating percussion to driving on the eyeglass in direction, and sticks to above,
Cause to pollute eyeglass, cause eyeglass transmitance to decline.If eyeglass transmitance step-down, will be such that voltage further improves, but
After voltage is improved, the stability of laser tube will be deteriorated, and cause energy hunting to become big.Also, particulate pollutant absorbs laser
Energy production amount of heat, makes eyeglass hot-spot, and the destruction of unrepairable is caused to the anti-reflection film on eyeglass, is seriously reduced
The repeat usage of eyeglass, shortens the service life of eyeglass, adds the operating cost of equipment.And particulate pollutant adheres to
Spot is produced on eyeglass, causes laser lens transmitance to decline, this can also reduce the homogeneity of laser.
The content of the invention
In view of this, it is an object of the invention to propose a kind of laser anneal device and laser annealing apparatus, to solve to swash
Longitudinal air flow homogeneity in light pipe is deteriorated and the contaminated problem of eyeglass.
Based on above-mentioned purpose, in the first aspect of the present invention, include the invention provides a kind of laser anneal device：
There is gas circulation chamber in housing, the housing；
There is resonance chamber, side wall and the gas circulation chamber insertion of the resonance chamber in laser tube, the laser tube；
Cross flow fan, including rotating shaft, the two ends of the rotating shaft pass through the gas circulation chamber；With,
Drive mechanism, two ends of the drive mechanism respectively with the rotating shaft are connected, the two ends for driving the rotating shaft
Synchronous axial system.
In some embodiments of the invention, the drive mechanism includes bilateral output motor, the bilateral output motor
Two ends of two output shafts respectively with the rotating shaft be connected, the two ends synchronous axial system for driving the rotating shaft.
In some embodiments of the invention, the drive mechanism also includes two transmission mechanisms, the bilateral output electricity
Two output shafts of machine are connected by transmission mechanism with the two ends of the rotating shaft respectively, and described two transmission mechanisms are with perpendicular to institute
The perpendicular bisector for stating rotating shaft is symmetrical axial symmetry.
In some embodiments of the invention, the transmission mechanism include the first power transmission shaft, first gear, second gear,
Second driving shaft, the 3rd gear and the 4th gear, one end of first power transmission shaft are connected with the output shaft of bilateral output motor,
The other end connects the first gear, and the first gear is engaged with second gear, and the two ends of the second driving shaft connect respectively
Second gear and the 3rd gear are connect, the 3rd gear is engaged with the 4th gear.
In some embodiments of the invention, the drive mechanism also includes axle phase-detection mechanism, described for detecting
The axle phase at rotating shaft two ends；And/or,
The drive mechanism also includes axle speed testing agency, the axle speed for detecting the rotating shaft two ends.
In some embodiments of the invention, the cross flow fan also includes cylinder and multi-disc flabellum, and the rotating shaft is passed through
The axle center of cylinder, the multi-disc flabellum is axially disposed within the side wall of the cylinder along the cylinder, is formed in parallel with institute
Multiple rows of flabellum of rotating shaft is stated, often arranging flabellum includes multi-disc flabellum.
In some embodiments of the invention, the cross flow fan also includes shim, and the shim is along the circle
Cylinder is radially arranged on the side wall of the cylinder, and perpendicular to the rotating shaft, so that by fan adjacent in same row's flabellum
Leaf is separated.
In some embodiments of the invention, the cross flow fan is using the perpendicular bisector perpendicular to the rotating shaft as symmetry axis pair
Claim, meanwhile, with a diameter of symmetrical axial symmetry of the cross flow fan.
In some embodiments of the invention, the laser anneal device also includes the heat through the gas circulation chamber
Exchange system, for cooling down the gas in the gas circulation chamber.
In the second aspect of the present invention, present invention also offers a kind of laser annealing apparatus, including any one above-mentioned reality
Apply the laser anneal device in example.
Laser anneal device and laser annealing apparatus provided in an embodiment of the present invention synchronously drive horizontal stroke using drive mechanism
The two ends of flow fan, therefore when cross flow fan rotates in high speed, the generation of circular shaft twisted phenomena can be reduced well, so that
Avoid producing spiral air flow in resonator so that longitudinal laser gas in resonator is more homogeneous.And due in resonator
Longitudinal laser gas it is more homogeneous, then the pollution to laser lens can also be reduced, so as to make laser more homogeneous.
Further, since reducing the pollution to laser lens, then can significantly extend the service life of laser lens, that is, improve radium-shine
The quality of laser, additionally it is possible to reduce the operating cost of laser annealing apparatus.
Brief description of the drawings
Fig. 1 is the structural representation of the laser anneal device of one embodiment of the invention；
Fig. 2 is the sectional view in Fig. 1 along A-A directions；
Fig. 3 is schematic diagram when circular shaft twisted phenomena does not occur for cross flow fan；
Fig. 4 is schematic diagram when circular shaft twisted phenomena occurs for cross flow fan；
Fig. 5 is the structural representation of the laser anneal device of another embodiment of the present invention；
Fig. 6 is the structural representation of the laser anneal device of another embodiment of the invention；
Fig. 7 is the structural representation of the laser anneal device of another embodiment of the invention；
Fig. 8 is the structural representation of the laser anneal device of further embodiment of the present invention；
Fig. 9 is the sectional view in Fig. 8 along B-B directions；
Figure 10 is the sectional view of the cross flow fan of one embodiment of the invention；
Figure 11 is the structural representation of row's flabellum of the embodiment of the present invention；
Figure 12 is the sectional view of the cross flow fan of another embodiment of the present invention；
Figure 13 is the structural representation of the shim of the embodiment of the present invention；
Figure 14 is the cylinder of the embodiment of the present invention and the structural representation of shim.
Embodiment
For the object, technical solutions and advantages of the present invention are more clearly understood, below in conjunction with specific embodiment, and reference
Accompanying drawing, the present invention is described in more detail.
Unless otherwise defined, the technical term or scientific terminology that the present invention is used should be tool in art of the present invention
The ordinary meaning that the personage for having general technical ability is understood." first ", " second " that is used in the present invention and similar word are simultaneously
Any order, quantity or importance are not indicated that, and is used only to distinguish different parts.Equally, " one ", " one " or
The similar word such as person's "the" does not indicate that quantity is limited yet, but represents there is at least one." comprising " or "comprising" etc. are similar
The word element or object that mean to occur before the word cover the element or object that appear in the word presented hereinafter and its
It is equivalent, and it is not excluded for other elements or object.The similar word such as " connection " or " connected " be not limited to physics or
The connection of person's machinery, but electrical connection can be included, it is either directly or indirect.
As depicted in figs. 1 and 2, the respectively structural representation and section view of the laser anneal device of one embodiment of the invention
Figure.As one embodiment of the present of invention, the laser anneal device includes housing 1, laser tube 2, cross flow fan 3 and driving machine
Structure (not shown), wherein, having in the housing 1 has resonance chamber in gas circulation chamber 11, the laser tube 2
21, side wall and the insertion of gas circulation chamber 11 of the resonance chamber 21.Further, the cross flow fan 3 includes rotating shaft 31,
The two ends of the rotating shaft 31 pass through the gas circulation chamber 11, and the drive mechanism connects with the two ends of the rotating shaft 31 respectively
Connect, the two ends synchronous axial system for driving the rotating shaft 31.
It can be seen that, the laser anneal device that the present invention is provided synchronously drives the two ends of cross flow fan using drive mechanism, because
This can reduce the generation of circular shaft twisted phenomena well when cross flow fan rotates in high speed, so as to avoid production in resonator
Raw spiral air flow so that longitudinal laser gas in resonator is more homogeneous.And due to longitudinal laser gas in resonator
It is more homogeneous, then the pollution to laser lens can also be reduced, so as to make laser more homogeneous.Further, since reducing
Pollution to laser lens, then can significantly extend the service life of laser lens, that is, improve the quality of radium-shine laser, also
The operating cost of laser annealing apparatus can be reduced.
As shown in figure 3, schematic diagram when circular shaft twisted phenomena do not occur for its cross flow fan.Now fan blade vertical line ab
For straight line, if circular shaft distortion do not occur when rotated for cross flow fan, air-flow can with perpendicular to the direction of axle (for ac side in Fig. 3
To) rotation, axially (being ab directions in Fig. 3) no air current flow, i.e., do not occur spiral air flow.As shown in figure 4, it is horizontal stroke
Schematic diagram during circular shaft twisted phenomena occurs for flow fan.If circular shaft distortion occurs when rotated for cross flow fan, fan blade is indulged
Become helix a ' b ' to line ab, airflow direction is just no longer vertical (generation angle) with axle, but generates spiral air flow, so
Just generate air flow component axially.
As another embodiment of the present invention, as illustrated in fig. 1 and 2, the laser tube 2 includes laser tube wall 22, set
Sparking electrode 23 on the laser tube wall 22 and the laser lens 24 for being arranged on the two ends of laser tube wall 22, it is described to swash
Resonance chamber 21 is formed with light pipe wall 22, the laser tube 2 produces laser, the resonance chamber 21 by way of electric excitation
Interior laser can pass through the laser lens 24 through two ends.In another embodiment of the present invention, as shown in Fig. 2 described
Laser tube wall 22 can include first laser tube wall 221 and second laser tube wall 222, the first laser tube wall 221 and second
Laser tube wall 222 is parallel to each other, and the first laser tube wall 221 is located at the top of second laser tube wall 222, therefore described the
Resonance chamber 21 is formd between one laser tube wall 221 and second laser tube wall 222.The first laser tube wall 221 and second
Sparking electrode 23 is provided with laser tube wall 222.Moreover, the side wall of the resonance chamber 21 is opening, the resonance chamber
21 with the insertion of gas circulation chamber 11 so that longitudinal laser gas in resonator is homogeneous.Further, the laser tube 2 is gone back
Completely reflecting mirror 25 and diaphotoscope 26 can be included, the completely reflecting mirror 25 is located at the outside of a laser lens 24, for that will swash
Light is reflexed in resonance chamber 21, and the diaphotoscope 26 is located at the outside of another laser lens 24, for projecting laser.
Conventionally, as there is spiral air flow in resonator, particulate pollutant can at a high speed revolve with spiral air flow
Turn to strike on laser lens 24, and stick to above, cause to pollute eyeglass, cause eyeglass transmitance to decline.For example close to complete
The mean transmissivity of the laser lens 24 (rear laser lens) of speculum 25 is 97%, be may be reused 8 times, close to diaphotoscope
The mean transmissivity of 26 laser lens 24 (preceding laser lens) is only 54-86%, and the number of times of reuse is only 3 times.Due to
Spiral air flow be against rear laser lens, so seldom particulate pollutant is attached to above rear laser lens, so after laser
The anti-reflection film of eyeglass would not be destroyed by high temperature, and cleaning is easy for after use totally, be may be reused many times.But
It is that preceding laser lens then adhering to many particulate pollutants, is difficult that cleaning is clean after use, and attaching particles pollutant
Local transmitance drastically declines, and so causes the repeat usage of laser lens to be greatly reduced, and improves the operating cost of equipment.
Therefore, the laser anneal device that the present invention is provided synchronously drives the two ends of cross flow fan using drive mechanism, keeps away
Exempt to produce spiral air flow in resonator so that longitudinal laser gas in resonator is more homogeneous, then can reduce to swashing
The pollution of two laser lens at light pipe two ends, so as to make laser more homogeneous.Further, since reducing to laser lens
Pollution, then the transmitance of laser lens can be improved, and laser lens can be repeatedly used, and significantly extend laser
The service life of eyeglass, reduces the operating cost of laser annealing apparatus.
As an alternative embodiment of the invention, as shown in figure 5, the drive mechanism includes bilateral output motor 41, institute
State two ends of two output shafts of bilateral output motor 41 respectively with the cross flow fan rotating shaft 31 to be connected, for driving described turn
The two ends synchronous axial system of axle 31.Therefore, two output shafts of the bilateral output motor can be synchronous with the two ends of drive shaft 31
Rotate, so that the two ends of synchronous driving cross flow fan so that the two ends synchronous axial system of cross flow fan, to reduce cross flow fan in height
The generation of circular shaft twisted phenomena during speed rotation, then reaches and avoids producing spiral air flow in resonator.
In some embodiments of the invention, as shown in figure 5, the drive mechanism can further include two transmissions
Mechanism 42, two output shafts of the bilateral output motor 41 are connected by the two ends of transmission mechanism 42 and the rotating shaft 31 respectively
Connect, described two transmission mechanisms 42 are using the perpendicular bisector perpendicular to the rotating shaft as symmetrical axial symmetry.So cross flow fan is at a high speed
During circulation, because the resistance that fan both sides are subject to is identical, the resistance that drive mechanism is subject to is also identical, and fan two ends occur same
Miniature deformation, the circular shaft twisted phenomena of such cross flow fan will be improved well, therefore be avoided that laser resonance intracavitary
Produce spiral air flow so that longitudinal laser gas of laser resonance intracavitary is more homogeneous, it also avoid the horizontal stroke produced in laser tube
Laser lens are polluted to air-flow, make the laser homogeneity shone out more preferably, and reduce anti-reflection to laser lens
The infringement of film, had not only improved the quality of laser but also had reduced the operating cost of equipment.
As yet another embodiment of the present invention, the transmission mechanism 42 include the first power transmission shaft 421, first gear 422,
Second gear 423, second driving shaft 424, the 3rd gear 425 and the 4th gear 426, one end of first power transmission shaft 421 with
The output shaft of bilateral output motor 41 is connected, and the other end connects the first gear 422, the tooth of first gear 422 and second
Wheel 423 is engaged, and the two ends of the second driving shaft 424 connect the gear 525 of second gear 423 and the 3rd, the 3rd tooth respectively
Wheel 425 is engaged with the 4th gear 426.
Under the driving of bilateral output motor 41, the first power transmission shaft 421 is rotated, so that drive first gear 422 to rotate, the
The rotation of one gear 422 drives the second gear 423 engaged to rotate, and the rotation of second gear 423 drives second driving shaft
424 are rotated, and the rotation that the second transmission turns 424 drives the 3rd gear 425 to rotate, and the rotation of the 3rd gear 425, which drives, to be engaged
The 4th gear 426 rotate.Further, the end of the rotating shaft 31 of the cross flow fan 3 passes through the central shaft of the 4th gear 426
Place, then, when the 4th gear 426 is rotated, it is possible to drive the rotating shaft 31 to rotate.It should be noted that in the reality
Apply in example, the transmission mechanism 42 being connected with the two ends of the rotating shaft 31 has identical structure, and the two transmission mechanisms 42
Using using the perpendicular bisector perpendicular to the rotating shaft as symmetrical axial symmetry, so that cross flow fan is in high-speed circulating, what its both sides was subject to
Resistance is identical, and the resistance that drive mechanism is subject to is also identical.
As another embodiment of the present invention, as shown in fig. 6, the drive mechanism can also include axle phase-detection machine
Structure 5, the axle phase for detecting the two ends of rotating shaft 31.Torque sensor in the phase-detection mechanism 5 can be built in
The two ends of rotating shaft 31, it is whether symmetrical with the resistance situation for monitoring fan both sides in real time, so as to gas circulating fan degreeof tortuosity
Monitored in real time.As another embodiment of the present invention, detected as shown in fig. 7, the drive mechanism also includes axle speed
Mechanism 6, the axle speed for detecting the two ends of rotating shaft 31.Axle speed testing agency can monitor turning for rotating shaft two ends in real time
Speed, it is to avoid because mechanical breakdown causes the destruction of unrepairable to cross flow fan.It therefore, it can according to the phase-detection mechanism
5 and/or the testing result of axle speed testing agency 6 adjust the phase and/or speed at the rotating shaft two ends so that rotating shaft two ends by
The resistance arrived is identical.It is pointed out that the drive mechanism can include axle phase-detection mechanism 5 and axle speed testing agency
Any one in 6 or two.
As yet another embodiment of the present invention, as shown in FIG. 8 and 9, the laser anneal device includes housing 1, laser
Pipe 2, cross flow fan 3 and drive mechanism (not shown), wherein, there is gas circulation chamber 11 in the housing 1, it is described to swash
There is resonance chamber 21, side wall and the insertion of gas circulation chamber 11 of the resonance chamber 21 are further, described in light pipe 2
Laser anneal device can also include the heat-exchange system 7 through the gas circulation chamber, for cooling down the gas circulation
Gas in chamber 11.The heat-exchange system 7 can include the hot device of water cooling fan and/or gas cooler.Alternatively, the heat
Exchange system 7 is preferably located at the middle part of gas circulation chamber 11, and through the gas circulation chamber 11, it is cold to improve
But effect.
As one embodiment of the present of invention, as shown in FIG. 10 and 11, the cross flow fan also includes cylinder 32 and multi-disc
Flabellum 33, the rotating shaft 31 passes through the axle center of cylinder 32, and the multi-disc flabellum 33 is axially disposed within institute along the cylinder 32
State on the side wall of cylinder 32, be formed in parallel with multiple rows of flabellum 33 of the rotating shaft 31, often arranging flabellum includes multi-disc flabellum 33, then
Adjacent flabellum is separated in same row's flabellum, it is possible to reduce the generation of cross flow fan circular shaft twisted phenomena when high speed rotates, and is kept away
Exempt from laser resonance intracavitary and produce spiral air flow.Alternatively, the flabellum 33 can be arc-shaped, to reduce circular shaft twisted phenomena
Occur.
As an alternative embodiment of the invention, as shown in figure 12, the cross flow fan also includes cylinder 32 and multi-disc is fanned
Leaf 33, the rotating shaft 31 passes through the axle center of cylinder 32, and the multi-disc flabellum 33 is described along being axially disposed within for the cylinder 32
On the side wall of cylinder 32, multiple rows of flabellum 33 of the rotating shaft 31 is formed in parallel with, often arranging flabellum includes multi-disc flabellum 33, further
Ground, the cross flow fan also includes shim 34, and the shim 34 is radially arranged in the cylinder along the cylinder 32
On 32 side wall, and perpendicular to the rotating shaft 31, so that flabellum 33 adjacent in same row's flabellum be separated.It can be seen that, this hair
It is bright that flabellum is carried out by interval separation by shim, air-flow edge is rotated perpendicular to the direction of axle, it is to avoid gas circulating fan exists
Circular shaft twisted phenomena occurs when rotating at a high speed, so as to avoid laser resonance intracavitary from producing spiral air flow, to improve longitudinal laser gas
The homogeneity of body.The pollution to laser lens can be reduced simultaneously, so as to make laser more homogeneous.Due to reducing to swashing
The pollution of light microscopic piece, then can significantly extend the service life of laser lens, that is, the quality of the radium-shine laser improved, additionally it is possible to
Reduce the operating cost of laser annealing apparatus.Alternatively, as shown in figure 13, the shim 34 is annular shape, to reduce circular shaft
The generation of twisted phenomena.Alternatively, as shown in figure 14, the quantity of the shim 34 is multiple, and shim 34 is mutual
It is parallel, to reduce the generation of circular shaft twisted phenomena.
In some embodiments of the invention, the cross flow fan 3 using the perpendicular bisector perpendicular to the rotating shaft 31 be symmetrical
Axial symmetry, meanwhile, with a diameter of symmetrical axial symmetry of the cross flow fan 3.Therefore, the cross flow fan is symmetrical structure, i.e.,
Cross flow fan is homogeneous texture, and such cross flow fan is in high-speed circulating, because the resistance that fan both sides are subject to is identical, driving machine
The resistance that structure is subject to is also identical, and same miniature deformation occurs for fan two ends, and the circular shaft twisted phenomena of such cross flow fan will
Improved well, it is to avoid laser resonance intracavitary produces spiral air flow so that longitudinal laser gas of laser resonance intracavitary is more
Plus it is homogeneous, the crossflow that it also avoid producing in laser tube is polluted to preceding laser lens, makes the laser shone out equal
One property more preferably, and reduces the infringement to laser lens anti-reflection film, had so not only improved the quality of laser but also had reduced equipment
Operating cost.
Present invention also offers a kind of dress of the laser annealing in laser annealing apparatus, including any one above-mentioned embodiment
Put.The laser annealing apparatus synchronously drives the two ends of cross flow fan using drive mechanism, therefore in cross flow fan at a high speed
During rotation, the generation of circular shaft twisted phenomena can be reduced well, so as to avoid producing spiral air flow in resonator so that resonance
Longitudinal laser gas of intracavitary is more homogeneous.
As can be seen here, laser anneal device and laser annealing apparatus provided in an embodiment of the present invention using drive mechanism come same
The two ends of step driving cross flow fan, therefore when cross flow fan rotates in high speed, circular shaft twisted phenomena can be reduced well
Occur, so as to avoid producing spiral air flow in resonator so that longitudinal laser gas in resonator is more homogeneous.And due to
Longitudinal laser gas in resonator is more homogeneous, then can also reduce the pollution to laser lens, so as to make laser
It is more homogeneous.Further, since reducing the pollution to laser lens, then can significantly extend the service life of laser lens,
Improve the quality of radium-shine laser, additionally it is possible to reduce the operating cost of laser annealing apparatus.
Those of ordinary skills in the art should understand that：The discussion of any of the above embodiment is exemplary only, not
It is intended to imply that the scope of the present disclosure (including claim) is limited to these examples；Under the thinking of the present invention, above example
Or can also not be combined between the technical characteristic in be the same as Example, and there is the different aspect of the present invention as described above
Many other changes, in order to it is concise they provided not in details.Therefore, within the spirit and principles of the invention,
Any omission, modification, equivalent substitution, improvement for being made etc., should be included in the scope of the protection.
Claims (10)
1. a kind of laser anneal device, it is characterised in that including：
There is gas circulation chamber in housing, the housing；
There is resonance chamber, side wall and the gas circulation chamber insertion of the resonance chamber in laser tube, the laser tube；
Cross flow fan, including rotating shaft, the two ends of the rotating shaft pass through the gas circulation chamber；With,
Drive mechanism, two ends of the drive mechanism respectively with the rotating shaft are connected, for driving the two ends of the rotating shaft synchronous
Rotate.
2. laser anneal device according to claim 1, it is characterised in that the drive mechanism includes bilateral output electricity
Machine, the two ends of two output shafts of the bilateral output motor respectively with the rotating shaft are connected, and two for driving the rotating shaft
Hold synchronous axial system.
3. laser anneal device according to claim 2, it is characterised in that the drive mechanism also includes two drivers
Structure, two output shafts of the bilateral output motor are connected by transmission mechanism with the two ends of the rotating shaft respectively, described two
Transmission mechanism is using the perpendicular bisector perpendicular to the rotating shaft as symmetrical axial symmetry.
4. laser anneal device according to claim 3, it is characterised in that the transmission mechanism include the first power transmission shaft,
First gear, second gear, second driving shaft, the 3rd gear and the 4th gear, one end of first power transmission shaft with it is bilateral defeated
The output shaft for going out motor is connected, and the other end connects the first gear, and the first gear is engaged with second gear, and described second
The two ends of power transmission shaft connect second gear and the 3rd gear respectively, and the 3rd gear is engaged with the 4th gear.
5. the laser anneal device according to any one in claim 1-4, it is characterised in that the drive mechanism is also wrapped
Kuo Zhou phase-detections mechanism, the axle phase for detecting the rotating shaft two ends；And/or,
The drive mechanism also includes axle speed testing agency, the axle speed for detecting the rotating shaft two ends.
6. laser anneal device according to claim 1, it is characterised in that the cross flow fan also includes cylinder and multi-disc
Flabellum, the rotating shaft passes through the axle center of cylinder, the side that is axially disposed within the cylinder of the multi-disc flabellum along the cylinder
On wall, multiple rows of flabellum of the rotating shaft is formed in parallel with, often arranging flabellum includes multi-disc flabellum.
7. laser anneal device according to claim 6, it is characterised in that the cross flow fan also includes shim, institute
Shim being radially arranged on the side wall of the cylinder along the cylinder is stated, and perpendicular to the rotating shaft, so that will be same
Adjacent flabellum is separated in one row's flabellum.
8. laser anneal device according to claim 7, it is characterised in that the cross flow fan is with perpendicular to the rotating shaft
Perpendicular bisector be symmetrical axial symmetry, meanwhile, with a diameter of symmetrical axial symmetry of the cross flow fan.
9. laser anneal device according to claim 1, it is characterised in that also including through the gas circulation chamber
Heat-exchange system, for cooling down the gas in the gas circulation chamber.
10. a kind of laser annealing apparatus, it is characterised in that including the laser annealing dress described in any one in claim 1-9
Put.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201710543368.6A CN107326442A (en) | 2017-07-05 | 2017-07-05 | Laser anneal device and laser annealing apparatus |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710543368.6A CN107326442A (en) | 2017-07-05 | 2017-07-05 | Laser anneal device and laser annealing apparatus |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05190953A (en) * | 1992-01-16 | 1993-07-30 | Mitsubishi Heavy Ind Ltd | Gas laser oscillator |
| JPH10253109A (en) * | 1997-03-12 | 1998-09-25 | Nisshinbo Ind Inc | Cross flow fan assembly |
| US20010033593A1 (en) * | 2000-01-18 | 2001-10-25 | Takeshi Minobe | Cross-flow fan for discharge excited gas laser |
| US20160349701A1 (en) * | 2015-05-25 | 2016-12-01 | Kyocera Document Solutions Inc. | Image forming apparatus having cooling mechanism, cooling device, and cross-flow fan |
-
2017
- 2017-07-05 CN CN201710543368.6A patent/CN107326442A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05190953A (en) * | 1992-01-16 | 1993-07-30 | Mitsubishi Heavy Ind Ltd | Gas laser oscillator |
| JPH10253109A (en) * | 1997-03-12 | 1998-09-25 | Nisshinbo Ind Inc | Cross flow fan assembly |
| US20010033593A1 (en) * | 2000-01-18 | 2001-10-25 | Takeshi Minobe | Cross-flow fan for discharge excited gas laser |
| US20160349701A1 (en) * | 2015-05-25 | 2016-12-01 | Kyocera Document Solutions Inc. | Image forming apparatus having cooling mechanism, cooling device, and cross-flow fan |
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