CN107322423B - A kind of technique for grinding of metal vacuum cavity sealing surface - Google Patents
A kind of technique for grinding of metal vacuum cavity sealing surface Download PDFInfo
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- CN107322423B CN107322423B CN201710787655.1A CN201710787655A CN107322423B CN 107322423 B CN107322423 B CN 107322423B CN 201710787655 A CN201710787655 A CN 201710787655A CN 107322423 B CN107322423 B CN 107322423B
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- sealing surface
- polishing
- grinding
- sealing
- polished
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
- B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/06—Dust extraction equipment on grinding or polishing machines
- B24B55/08—Dust extraction equipment on grinding or polishing machines specially designed for belt grinding machines
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
The present invention provides a kind of technique for grinding of metal vacuum cavity sealing surface, comprising the following steps: (1) cleans sealing surface: remaining grease stain, spot first after the processing of removal surface;(2) sealing surface is polished: when sealing surface is in plane, first the polishing of 120# endless abrasive belt is loaded into the pneumatic emery cloth annulus polishing machine of Portable small, one circle of polishing or a few circles clockwise or counterclockwise, after polishing trace reaches requirement, using the abrasive band 240# instead, hand polish is to Ra0.8 in the same way, and sealing surface is when cross section is in trapezoidal or rectangle annular groove, by groove wiped clean, using 240# sand paper, it is pressed on buffed surface and carries out manual grinding.(3) cleaning is cleaned: after the sanding and polishing for completing sealing surface, it is ensured that sealing surface is oil-free, anhydrous, dustless, for threaded hole present on sealing surface.The present invention compensates for the deficiency of machine tool processing by the manual polishing to metallic sealing section, easy to operate, can guarantee machining accuracy, production efficiency is higher, economical and practical.
Description
Technical field
The present invention relates to vacuum cavity processing method technical field, specially a kind of polishing of metal vacuum cavity sealing surface
Technique.
Background technique
Vacuum cavity is a kind of plated film equipment for being widely used in glass industry.Cavity is generally made of upper and lower two parts,
It is trapezoidal or rectangle annular groove that the sealing surface of top half cover board, which processes cross section, for inlaying seal trim strip, lower half
The sealing surface of part cavity is processed into plane.Upper and lower two parts are combined when work, the negative pressure by vacuumizing generation makes
It obtains sealing strip stress to be extruded on metal flat, forms a closed inner space, reach technique after inner cavity air is extracted out
It is required that vacuum state, to meet the requirement of vacuum degree and leak rate.
But metallic sealing section cannot be directly used to vacuum sealing after processing by machine tool, because cutter at high speeds rotates
Can be in workpiece surface there are microcosmic cutter trade when cutting, these trace some run through entire sealing surface, form tiny sky
The logical channel of air-flow, when inner cavity vacuumizes, outside air can penetrate into internal cavity, be unable to reach air-tightness requirement.Another party
Face, the metal surface by machine tooling can remain grease stain, these grease stains also will affect the effect vacuumized.
Summary of the invention
Technical problem solved by the invention is to provide a kind of technique for grinding of metal vacuum cavity sealing surface, to solve
The problems in above-mentioned background technique.
Technical problem solved by the invention is realized using following technical scheme: a kind of metal vacuum cavity sealing surface
Technique for grinding, comprising the following steps:
(1) it cleans sealing surface: the sealing surface that needs are polished being cleaned with U.S. line paper and absolute alcohol first, removes table
Remaining grease stain, spot after the processing of face;
(2) sealing surface is polished: when sealing surface is in plane, first being loaded into the pneumatic emery cloth annulus polishing machine of Portable small
The polishing of 120# endless abrasive belt, polish clockwise or counterclockwise a circle or a few circles, tool marks to be processed are eliminated, and polishing trace reaches requirement
Afterwards, use instead the abrasive band 240# in the same way hand polish to Ra0.8, surface roughness Ra 0.8 be minimum requirements, it is necessary to reach;
It is finally wiped with scouring pad, keeps buffed surface lines smoothness, surface shinny;
Sealing surface, by groove wiped clean, then makes of wooden unit when cross section is in trapezoidal or rectangle annular groove
It in the press strip of groove equal wide, using 240# sand paper, is pressed on buffed surface and carries out manual grinding, when having to guarantee polishing
Uniform force, direction is consistent, and speed can suitably slow down when propulsion, but roughness Ra 0.8 is also minimum requirements;It is finally clean with hundred
Cloth wiping;Correlation polishing requires consistent with plane polishing;Because groove in operation it is relatively difficult, can with non-oily emulsion into
Row lubrication improves the efficiency and quality of polishing.
(3) it cleans cleaning: after the sanding and polishing for completing sealing surface, clearing up iron filings with compressed air purging, then use non-dust cloth
It is stained with absolute alcohol wiping, it is ensured that sealing surface is oil-free, anhydrous, dustless, for threaded hole present on sealing surface, uses compressed air
Brush is repeatedly blown, and the iron filings for being wherein difficult to clear up are sucked out with magnet, last surface is protected with PE health tape-stripping, so that it may full
Foot uses.
In the step (1) after the completion of the cleaning of cleaning sealing surface cover, surface roughness needs to reach Ra3.2~Ra1.6,
Although cannot directly use, this accuracy rating must be reached and be just convenient for subsequent operation;First with non-dust cloth or U.S. line
The absolute alcohol that paper dips in 99% cleans sealing surface, and main purpose is removal spot remained on surface, grease stain;It is met when cleaning
Unavailable metal object scrapes when to thicker dirt, and excessively scraping can cause to damage to sealing surface, can use veneer or plastic board
It is scraped along machine direction;If encountering the jagged or acute angle in part, Passivation Treatment of being polished with 400# or 600# oilstone is needed.
When sealing surface is in plane in the step (2), sealing surface straightway direction can cooperate I-shaped folder limit with batten
Polishing makes pneumatic polisher polish along batten straight line;When sealing surface has circular arc, can manually be beaten along sealing surface ridge orientation
Mill, polishing machine operation will at the uniform velocity when polishing, and fltting speed is controlled in 2cm/s~4cm/s, firmly will uniformly, can not be samely
Side stops or increases strength suddenly, in order to avoid polish the recess to be formed and can not be made up in local excessive;The lines of sanding and polishing is necessary
It is consistent with the trend of sealing strip, be all it is clockwise or be all counterclockwise, can not different directions polish repeatedly;Power is uniform,
Only need the tool marks on metal covering polish off can, can not excessively exert oneself, influence the tolerance dimension of sealing surface;Sealing
Phenomena such as face cannot collide with, scratch when polishing, the iron filings polished will be cleared up in time.
Be compared to open technology, there are following advantages by the present invention: the present invention by the manual polishing to metallic sealing section,
The deficiency of machine tool processing is compensated for, it is easy to operate, it can guarantee machining accuracy, production efficiency is higher, economical and practical.
Detailed description of the invention
Fig. 1 is the vacuum cavity surface cutter trade schematic diagram of not up to air-tightness requirement.
Fig. 2 is the vacuum cavity surface cutter trade schematic diagram for reaching air-tightness requirement.
Fig. 3 is sealing surface of the invention structural schematic diagram in the plane.
Fig. 4 is the sealing surface of the invention structural schematic diagram in the annular groove that cross section is rectangle.
Fig. 5 is the sealing surface of the invention structural schematic diagram in the annular groove that cross section is trapezoidal.
Specific embodiment
In order to make, technological means of the invention, creation characteristic, workflow, application method reach purpose and effect is easy to bright
White understanding, below in conjunction with the embodiment of the present invention, technical scheme in the embodiment of the invention is clearly and completely described,
Obviously, described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Based in the present invention
Embodiment, every other embodiment obtained by those of ordinary skill in the art without making creative efforts, all
Belong to the scope of protection of the invention.
As shown in Figs. 1-5, a kind of technique for grinding of metal vacuum cavity sealing surface, comprising the following steps:
(1) it cleans sealing surface: the sealing surface that needs are polished being cleaned with U.S. line paper and absolute alcohol first, removes table
Remaining grease stain, spot after the processing of face;
Clean sealing surface cover after processing is completed, surface roughness needs to reach Ra3.2~Ra1.6, although cannot be direct
It uses, but this accuracy rating must be reached and be just convenient for subsequent operation;99% nothing is first dipped in non-dust cloth or U.S. line paper
Water-alcohol cleans sealing surface, and main purpose is removal spot remained on surface, grease stain;When encountering thicker dirt when cleaning
Unavailable metal object scrapes, and excessively scraping can cause to damage to sealing surface, can with veneer or plastic board along machine direction into
Row scrapes;If encountering the jagged or acute angle in part, Passivation Treatment of being polished with 400# or 600# oilstone is needed.
(2) sealing surface is polished: when sealing surface is in plane, as shown in figure 3, first being thrown with the pneumatic emery cloth annulus of Portable small
Ray machine loads onto the polishing of 120# endless abrasive belt, and polish clockwise or counterclockwise a circle or a few circles, tool marks to be processed are eliminated, trace of polishing
After reaching requirement, use instead the abrasive band 240# in the same way hand polish to Ra0.8, surface roughness Ra 0.8 be minimum requirements, must
It must reach;It is finally wiped with scouring pad, keeps buffed surface lines smoothness, surface shinny;When sealing surface is in plane, sealing surface straight line
Duan Fangxiang can cooperate I-shaped folder limit polishing with batten, and pneumatic polisher is made to polish along batten straight line;When sealing surface has circular arc
When, can manually polish along sealing surface ridge orientation, when polishing polishing machine operation will at the uniform velocity, fltting speed control 2cm/s~
4cm/s firmly uniformly can not will be stopped in same place or be increased strength suddenly, in order to avoid polishing in local excessive, to be formed can not
The recess made up;The lines of sanding and polishing must be consistent with the trend of sealing strip, be all it is clockwise or be all counterclockwise, can not
Different directions are polished repeatedly;Power is uniform, it is only necessary to the tool marks on metal covering polish off can, can not excessively use
Power influences the tolerance dimension of sealing surface;Phenomena such as cannot colliding with, scratching when sealing surface is polished, the iron filings polished want and
Shi Qingli.
As shown in Figure 4, Figure 5, groove is wiped when cross section is in trapezoidal or rectangle annular groove for sealing surface
Only, it is then made into wooden unit in the press strip of groove equal wide, using 240# sand paper, is pressed on buffed surface and carries out manual grinding,
Have to guarantee uniform force when polishing, direction is consistent, and speed can suitably slow down when propulsion, but roughness Ra 0.8 is also most
Low requirement;Finally wiped with scouring pad;Correlation polishing requires consistent with plane polishing;Because operation is relatively difficult in groove, can
To be lubricated the efficiency and quality that improve polishing with non-oily emulsion.
(3) it cleans cleaning: after the sanding and polishing for completing sealing surface, clearing up iron filings with compressed air purging, then use non-dust cloth
It is stained with absolute alcohol wiping, it is ensured that sealing surface is oil-free, anhydrous, dustless, for threaded hole present on sealing surface, uses compressed air
Brush is repeatedly blown, and the iron filings for being wherein difficult to clear up are sucked out with magnet, last surface is protected with PE health tape-stripping, so that it may full
Foot uses.
The above shows and describes the basic principle, main features and advantages of the invention.The technology of the industry
Personnel are it should be appreciated that the present invention is not limited to the above embodiments, and the above embodiments and description only describe this
The principle of invention, without departing from the spirit and scope of the present invention, various changes and improvements may be made to the invention, these changes
Change and improvement all fall within the protetion scope of the claimed invention.Claimed range of the invention by appended claims and
Its equivalent thereof.
Claims (3)
1. a kind of technique for grinding of metal vacuum cavity sealing surface, it is characterised in that: the following steps are included:
(1) it cleans sealing surface: the sealing surface that needs are polished being cleaned with U.S. line paper and absolute alcohol first, removal surface adds
Remaining grease stain, spot after work;
(2) sealing surface is polished: when sealing surface is in plane, first loading onto 120# ring with the pneumatic emery cloth annulus polishing machine of Portable small
Shape belt sanding, polish clockwise or counterclockwise a circle or a few circles, tool marks to be processed are eliminated, after polishing trace reaches requirement, are changed
With the abrasive band 240# in the same way hand polish to Ra0.8, surface roughness Ra 0.8 be minimum requirements, it is necessary to reach;Finally use
Scouring pad wiping keeps buffed surface lines smoothness, surface shinny;
Sealing surface cross section be trapezoidal or rectangle annular groove in when, by groove wiped clean, then with wooden unit be made into
The press strip of groove equal wide is pressed on buffed surface using 240# sand paper and is carried out manual grinding, has to guarantee stress when polishing
Uniformly, direction is consistent, and speed suitably slows down when propulsion, but roughness Ra 0.8 is also minimum requirements;Finally wiped with scouring pad;
Correlation polishing requires consistent with plane polishing;Because operation is relatively difficult in groove, it is lubricated with non-oily emulsion,
Improve the efficiency and quality of polishing;
(3) it cleans cleaning: after the sanding and polishing for completing sealing surface, clearing up iron filings with compressed air purging, then be stained with nothing with non-dust cloth
Water-alcohol wiping, it is ensured that sealing surface is oil-free, anhydrous, dustless, multiple with compressed air for threaded hole present on sealing surface
Brush is blown, and the iron filings for being wherein difficult to clear up are sucked out with magnet, last surface is protected with PE health tape-stripping, so that it may which satisfaction makes
With.
2. a kind of technique for grinding of metal vacuum cavity sealing surface according to claim 1, it is characterised in that: the step
(1) in after the completion of the cleaning of cleaning sealing surface, surface roughness needs to reach Ra3.2~Ra1.6, although cannot directly use,
It is that must reach this accuracy rating to be just convenient for subsequent operation;99% absolute alcohol pair is first dipped in non-dust cloth or U.S. line paper
Sealing surface is cleaned, and spot remained on surface, grease stain are removed;Unavailable metal object when thicker dirt is encountered when cleaning to scrape,
Excessively scraping can cause to damage to sealing surface, should be scraped with veneer or plastic board along machine direction;If encountering office
Portion is jagged or acute angle, needs Passivation Treatment of being polished with 400# or 600# oilstone.
3. a kind of technique for grinding of metal vacuum cavity sealing surface according to claim 1, it is characterised in that: the step
(2) when sealing surface is in plane in, sealing surface straightway direction batten cooperates I-shaped folder limit polishing, makes pneumatic polisher edge
Batten straight line polishing;It when sealing surface has circular arc, manually polishes along sealing surface ridge orientation, polishing machine operation is wanted when polishing
At the uniform velocity, fltting speed control firmly uniformly can not will stop or increase suddenly strength in same place in 2cm/s~4cm/s,
In order to avoid polishing the recess to be formed and can not be made up in local excessive;The lines of sanding and polishing must be consistent with the trend of sealing strip, all
Be it is clockwise or be all counterclockwise, can not different directions polish repeatedly;Power is uniform, it is only necessary to the tool marks on metal covering
Polish off can, can not excessively exert oneself, influence the tolerance dimension of sealing surface;Sealing surface cannot be collided with when polishing, be drawn
Hurt phenomenon, the iron filings polished will be cleared up in time.
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CN201710787655.1A CN107322423B (en) | 2017-09-04 | 2017-09-04 | A kind of technique for grinding of metal vacuum cavity sealing surface |
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CN107322423B true CN107322423B (en) | 2019-02-05 |
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CN108004587B (en) * | 2017-11-30 | 2020-02-04 | 清华大学 | Plasma cleaning and polishing device for ultrahigh vacuum cavity |
CN110739144A (en) * | 2019-10-28 | 2020-01-31 | 江苏龙创电气有限公司 | transformer sealing process |
CN111546251A (en) * | 2020-05-28 | 2020-08-18 | 沈阳富创精密设备有限公司 | Polishing method for irregular sealing surface of deep hole or narrow area of high-vacuum part |
CN113427356A (en) * | 2021-06-30 | 2021-09-24 | 哈尔滨电气动力装备有限公司 | Grinding machining process for sealing surface of mechanical sealing part of nuclear main pump |
CN114473817A (en) * | 2022-02-21 | 2022-05-13 | 深圳市玉沣科技有限公司 | Process and method for automatically polishing workpiece sealing surface along grain |
CN114952436A (en) * | 2022-05-20 | 2022-08-30 | 成都飞机工业(集团)有限责任公司 | Polishing method for metal groove cavity structure |
CN115008355A (en) * | 2022-06-21 | 2022-09-06 | 华能山东石岛湾核电有限公司 | High-temperature gas cooled reactor pressure vessel flange sealing surface repairing kit and method |
CN115476278B (en) * | 2022-09-14 | 2024-02-06 | 江阴慕达斯真空设备有限公司 | Vacuum chamber surface treatment processing technology of vacuum coating machine |
CN116277917B (en) * | 2023-03-14 | 2024-01-26 | 苏州高芯众科半导体有限公司 | Equipment cleaning process |
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JPH0631612A (en) * | 1992-07-13 | 1994-02-08 | Aisin Seiki Co Ltd | Polishing method for three-dimensional curved surface |
JP2001088004A (en) * | 1999-09-20 | 2001-04-03 | Mitsubishi Heavy Ind Ltd | Surface treating method of smooth surface such as seal surface of pressure vessel |
JP2002233945A (en) * | 2001-02-02 | 2002-08-20 | Kunihiro Matsumura | Method (pcs) for cleaning and polishing coating surface using cloth technique |
CN102500526A (en) * | 2011-11-02 | 2012-06-20 | 沈阳飞机工业(集团)有限公司 | Novel pretreatment process for spraying aluminum for composite material molded part |
CN103100947B (en) * | 2012-12-13 | 2016-04-20 | 宁波如强模塑有限公司 | Automobile lampshade mould body surfaces mirror polishing method |
CN105437095B (en) * | 2014-07-30 | 2017-09-15 | 宁波江丰电子材料股份有限公司 | Bottom portion of groove burnishing device and method |
CN105751012A (en) * | 2014-12-15 | 2016-07-13 | 重庆迅升机车配件有限公司 | Sealing surface grinding technology |
CN106944899A (en) * | 2016-12-20 | 2017-07-14 | 柳州通为机械有限公司 | A kind of automobile die abrasive polishing method |
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