CN107299332A - A kind of sintered NdFeB magnet surface high-corrosion-resistance composite coating and preparation method thereof - Google Patents
A kind of sintered NdFeB magnet surface high-corrosion-resistance composite coating and preparation method thereof Download PDFInfo
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- CN107299332A CN107299332A CN201710566103.8A CN201710566103A CN107299332A CN 107299332 A CN107299332 A CN 107299332A CN 201710566103 A CN201710566103 A CN 201710566103A CN 107299332 A CN107299332 A CN 107299332A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0254—Physical treatment to alter the texture of the surface, e.g. scratching or polishing
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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Abstract
The invention discloses a kind of sintered NdFeB magnet surface high-corrosion-resistance composite coating and preparation method thereof, comprise the following steps：Magnet pretreating process, magnet coating pre-treatment and the preparation of high anti-corrosion composite coating.The present invention is prepared for high anti-corrosion composite coating on sintered NdFeB magnet surface after treatment using chemical vapour deposition technique, and the composite coating is assistant depositing packing material SiO while chemical deposition paracyclophane using paracyclophane as main coating material2, make SiO2Uniformly it is mounted in paracyclophane coating, improves the poor mechanical property of single paracyclophane organic coating.At the same time bombardment processing is carried out to the composite coating of preparation using circulation argon ion, can further improve the adhesion and flatness between coating and NdFeB matrixes.SiO is inlayed in prepared paracyclophane coating2The uniformity of composite coating is good, dense non-porous gap phenomenon, and film/base junction is high with joint efforts.More efficient corrosion protection effect can be provided for sintered NdFeB magnet.
Description
Technical field
The invention belongs to magnetic material surfacecti proteon field, and in particular to a kind of sintered NdFeB magnet surface high-corrosion-resistance is answered
Close coating and preparation method thereof.
Background technology
Since sintered NdFeB magnet comes out from nineteen eighty-three, extensively should with its excellent magnetic energy product, coercivity and remanent magnetism
For numerous areas such as motor, electric power, electronics, automobile, wind-power electricity generation, medicine equipment, Aero-Space.But, using powder smelting
There is sintered NdFeB magnet prepared by golden method three-phase structure (mainly to include：Principal phase Nd2Fe14B, rich-Nd phase and richness B phases), and
Potential difference between each phase is larger, especially the electrochemistry highest of rich-Nd phase, the pole in moist, high temperature and electrochemical environment
Easily it is corroded, seriously limits the further expansion of sintered NdFeB magnet application field.Burnt therefore, it is necessary to take measures to improve
Tie the decay resistance of NdFeB magnets.In current industrial production it is main using add alloying and surfacecti proteon facture come
The corrosion resisting property of magnet is improved, but alloying can reduce the magnetic property of magnet, and DeGrain to a certain extent.Cause
This, it is main in industrial production that protective coating is added in magnet surface using surfacecti proteon facture, magnet can be significantly improved
Corrosion resisting property.
Protective coating is to slow down the corrosion of magnet by hindering directly to contact between corrosive medium and matrix.At present, burn
Tie the conventional safeguard procedures of NdFeB magnet surfaces as follows：Plating, chemical plating, organic coating, physical vapour deposition (PVD) and Composite Coatings
Layer.For plating, chemical plating metal coating, organic coating can provide more excellent acid, alkali and salt fog for magnet
Corrosion protection is acted on.Paracyclophane can carry out chemical gaseous phase under vacuum conditions as a kind of protectiveness high-molecular organic material
Deposition, the penetration power of paracyclophane molecule can make it in variously-shaped magnet surface one layer of fine and close, imporous high-quality of formation
Protective layer, with excellent gas and vapor water barriers performance, physical and mechanical properties and Corrosion Protection, and excellent pair
Paracyclophane material does not interfere with the performance of any coated material.But, paracyclophane is chemical inert material, and it is with being protected
Wettability between matrix is poor, adhesion strength is not high, thus diaphragm may local shedding, it is or just basic in some parts
Upper protective film is not coated, poor as mechanical properties such as organic coating its hardness, intensity, limit its application field enters one
Step is expanded.Therefore, develop a kind of sintered NdFeB magnet surface high-corrosion-resistance, environmental protection and the uniform adhesion of coating it is strong to ring
Aralkyl organic coating has important economic benefit, social benefit and environmental benefit.
The content of the invention
There is mechanical property and corrosion resisting property for the single paracyclophane organic coating in sintered NdFeB magnet surface in the present invention
Poor the problem of, there is provided a kind of sintered NdFeB magnet surface high-corrosion-resistance composite coating and preparation method thereof.
To solve the above problems, the technical solution used in the present invention is as follows：
A kind of sintered NdFeB magnet surface high-corrosion-resistance composite coating, described high anti-corrosion composite coating is SiO2/ to cyclophane
Alkane composite coating, described high anti-corrosion composite coating is prepared from using paracyclophane, HMDO.
Preferably, a kind of preparation method of sintered NdFeB magnet surface high-corrosion-resistance composite coating, comprises the following steps：
(1) magnet pretreating process：Pickling, blasting treatment are carried out successively to sintered NdFeB magnet；
(2) magnet coating pre-treatment：Pre-treatment in stove is carried out to pretreated magnet；
(3) preparation of high anti-corrosion composite coating：Using Sintered NdFeB of the chemical vapour deposition technique after step (2) processing
Magnet surface prepares SiO2/ paracyclophane composite coating, while being bombarded using circulation argon ion the composite coating of preparation.
Preferably, the detailed process of the step (1) is as follows：
First, by sintered NdFeB magnet in 5~12wt.% salpeter solution 10~30s of pickling；Then, magnet is existed
It is cleaned by ultrasonic 1~3min in deionized water；Finally, blasting treatment is carried out to magnet, sand-blast material is firm for the palm fibre of 200~500 mesh
Jade, the angle of blasting treatment is 30~60 °, and the time is 1~2min.
Preferably, the detailed process of the step (2) is as follows：
By step (1) processing after sintered NdFeB magnet be put into chemical vapour phase deposition coating coating equipment, using circulation argon from
Son bombardment technique is bombarded sintered NdFeB magnet, and holding vacuum degree in vacuum chamber is 1~5Pa, Ar2Flow be 100~
200sccm, bombards 20~40min.
Preferably, the detailed process of the step (3) is as follows：
HMDO and paracyclophane are handled simultaneously using chemical vapor deposition method, oxygen is generated respectively
Silicon carbide particle and paracyclophane monomer, the paracyclophane monomer that the silicon oxide particle is generated are coated, and are then sunk at normal temperatures
Product forms SiO on sintered NdFeB magnet surface2/ paracyclophane composite coating.
Preferably, the evaporating temperature of paracyclophane and HMDO is set to 140~220 DEG C in the step (3),
Pyrolysis temperature is set to 620~740 DEG C, and the vacuum degree control of coating equipment is in 1~4Pa.
Preferably, SiO is being prepared in the step (3)2Using circulation argon ion pair while/paracyclophane composite coating
The composite coating of preparation carries out bombardment compacting processing, Ar2Flow is 40~100sccm.
Compared with prior art, implementation result of the invention is as follows：
The present invention is prepared for SiO using the sintered NdFeB magnet surface of chemical vapour deposition technique after the pre-treatment2/ to ring
The high anti-corrosion composite coating of aralkyl.Pre-treatment is carried out to magnet using pickling+blasting craft, main purpose is gone using acid cleaning process
Except magnet surface oxide-film, then matrix surface is roughened using blasting craft, can increase between coating and matrix and combine
Power.Using SiO2Particle doping is modified processing to paracyclophane organic coating, not only solves single paracyclophane coating
The problem of mechanical property is poor, improve paracyclophane organic coating surface can, improve its wettability, improve film layer with
Adhesion strength between matrix, and bombardment is carried out to composite coating using circulation argon ion further increase film/base junction and make a concerted effort,
Improve the surface smoothness of composite coating.And paracyclophane coating does not interfere with the performance of any coated material, technique stream
Journey is simple to operation, will not bring environmental problem.SiO prepared by the present invention2The high anti-corrosion composite coating flatness of/paracyclophane
Height, fine and close, imporosity phenomenon, and film/base junction is high with joint efforts, with more excellent mechanical property and decay resistance, energy
More efficient corrosion protection effect is enough provided for sintered NdFeB magnet.
Embodiment
Illustrate present disclosure below in conjunction with specific embodiments.
Embodiment 1：A kind of sintered NdFeB magnet surface high-corrosion-resistance composite coating and preparation method thereof, comprises the following steps：
(1) magnet pretreating process：
From the block Sintered NdFeB magnet that specification is 28 × 12 × 2mm, (by Anhui, the earth bear new material share is limited
Company provides；The trade mark：48H；State：Do not magnetize) tested.
First, by sintered NdFeB magnet in 5wt.% salpeter solution pickling 10s；Then, by magnet in deionized water
Middle ultrasonic cleaning 1min；Finally, blasting treatment is carried out to magnet, sand-blast material is the Brown Alundum of 200 mesh, the angle of blasting treatment
For 30 °, the time is 1min.
(2) magnet coating pre-treatment：
Magnet after pre-treatment is put into chemical vapour phase deposition coating coating equipment, using circulation argon ion bombardment technique to burning
Knot NdFeB magnets are bombarded, and it is 1Pa, Ar to keep vacuum degree in vacuum chamber2Flow is 100sccm, bombards 20min.
(3) preparation of high anti-corrosion composite coating：
In chemical vapour phase deposition coating coating equipment, processing is evaporated to paracyclophane and HMDO material,
The evaporating temperature of paracyclophane and HMDO is set to 140 DEG C, and pyrolysis temperature is set to 620 DEG C, coating equipment
Vacuum degree control is in 1Pa.HMDO and paracyclophane are handled simultaneously using chemical vapor deposition method, point
Not Sheng Cheng silicon oxide particle and paracyclophane monomer, the paracyclophane monomer that the silicon oxide particle is generated coated, then existed
Sintered NdFeB magnet surface is deposited under normal temperature, SiO is formed2/ paracyclophane composite coating.
While composite coating is prepared, bombardment compacting processing is carried out to the composite coating of preparation using circulation argon ion,
Ar2Flow is 40sccm.The sample of preparation is named as sample 1A.
Comparative examples 1
In order to be contrasted with embodiment 1, the implementation steps phase of (1) and step (2) and embodiment 1 the step of reference examples 1
Together, step (3) is changed to：In chemical vapour phase deposition coating coating equipment, processing is evaporated to paracyclophane material, evaporating temperature is set
For 140 DEG C, the pyrolysis temperature of paracyclophane material is set to 620 DEG C, and the vacuum degree control of coating equipment is in 1Pa.Preparing
While composite coating, bombardment compacting processing, Ar are carried out to the composite coating of preparation using circulation argon ion2Flow is
40sccm。
Prepare with sample 1A thickness identical samples, the sample obtained by this reference examples 1 is named as sample 1B.
Sample 1B progress salt spray test prepared by the sample 1A and comparative examples 1 prepared to embodiment 1 be (salt spray test
Condition is：Chamber temperature is 38 DEG C, and brine strength is 5% (volume ratio), using the test method continuously sprayed), its is specific
As a result it see the table below 1.
Table 1 sample 1A and 1B salt spray test and high temperature resistant test result
| Sample | Sample 1A | Sample 1B |
| Salt spray test (h) | 576 | 480 |
As it can be seen from table 1 sample 1A salt-fog resistant test abilities are substantially better than sample 1B salt-fog resistant test ability, explanation
The SiO prepared in NdFeB magnet surfaces2The decay resistance of the high anti-corrosion composite coating of/paracyclophane is significantly improved.
Embodiment 2：A kind of sintered NdFeB magnet surface high-corrosion-resistance composite coating and preparation method thereof, comprises the following steps：
(1) magnet pretreating process：
From the block Sintered NdFeB magnet that specification is 28 × 12 × 2mm, (by Anhui, the earth bear new material share is limited
Company provides；The trade mark：48H；State：Do not magnetize) tested.
First, by sintered NdFeB magnet in 8.5wt.% salpeter solution pickling 20s；Then, by magnet in deionization
It is cleaned by ultrasonic 2min in water；Finally, blasting treatment is carried out to magnet, sand-blast material is the Brown Alundum of 350 mesh, the angle of blasting treatment
Spend for 45 °, the time is 1.5min.
(2) magnet coating pre-treatment：
Magnet after pre-treatment is put into chemical vapour phase deposition coating coating equipment, using circulation argon ion bombardment technique to burning
Knot NdFeB magnets are bombarded, and it is 3Pa, Ar to keep vacuum degree in vacuum chamber2Flow is 150sccm, bombards 30min.
(3) preparation of high anti-corrosion composite coating：
In chemical vapour phase deposition coating coating equipment, processing is evaporated to paracyclophane and HMDO material,
The evaporating temperature of paracyclophane and HMDO is set to 180 DEG C, and pyrolysis temperature is set to 680 DEG C, coating equipment
Vacuum degree control is in 2.5Pa.HMDO and paracyclophane are handled simultaneously using chemical vapor deposition method,
Silicon oxide particle and paracyclophane monomer are generated respectively, and the paracyclophane monomer that the silicon oxide particle is generated is coated, then
Sintered NdFeB magnet surface is deposited at normal temperatures, forms SiO2/ paracyclophane composite coating.
While composite coating is prepared, bombardment compacting processing is carried out to the composite coating of preparation using circulation argon ion,
Ar2Flow is 70sccm.The sample of preparation is named as sample 2A.
Comparative examples 2
In order to be contrasted with embodiment 2, the implementation steps phase of (1) and step (2) and embodiment 1 the step of reference examples 2
Together, step (3) is changed to：In chemical vapour phase deposition coating coating equipment, processing is evaporated to paracyclophane material, evaporating temperature is set
For 180 DEG C, the pyrolysis temperature of paracyclophane material is set to 680 DEG C, and the vacuum degree control of coating equipment is in 2.5Pa.In system
While standby composite coating, bombardment compacting processing, Ar are carried out to the composite coating of preparation using circulation argon ion2Flow is
70sccm。
Prepare with sample 2A thickness identical samples, the sample obtained by this reference examples 2 is named as sample 2B.
Sample 2B progress salt spray test prepared by the sample 2A and comparative examples 2 prepared to embodiment 2 be (salt spray test
Condition is：Chamber temperature is 38 DEG C, and brine strength is 5% (volume ratio), using the test method continuously sprayed), its is specific
As a result 2 be see the table below.
Table 2 sample 2A and 2B salt spray test and high temperature resistant test result
| Sample | Sample 2A | Sample 2B |
| Salt spray test (h) | 624 | 504 |
From table 2 it can be seen that sample 2A salt-fog resistant test abilities are substantially better than sample 2B salt-fog resistant test ability, explanation
The SiO prepared in NdFeB magnet surfaces2The decay resistance of the high anti-corrosion composite coating of/paracyclophane is significantly improved.
Embodiment 3：A kind of sintered NdFeB magnet surface high-corrosion-resistance composite coating and preparation method thereof, comprises the following steps：
(1) magnet pretreating process：
From the block Sintered NdFeB magnet that specification is 28 × 12 × 2mm, (by Anhui, the earth bear new material share is limited
Company provides；The trade mark：48H；State：Do not magnetize) tested.
First, by sintered NdFeB magnet in 12wt.% salpeter solution pickling 30s；Then, by magnet in deionization
It is cleaned by ultrasonic 3min in water；Finally, blasting treatment is carried out to magnet, sand-blast material is the Brown Alundum of 500 mesh, the angle of blasting treatment
Spend for 60 °, the time is 2min.
(2) magnet coating pre-treatment：
Magnet after pre-treatment is put into chemical vapour phase deposition coating coating equipment, using circulation argon ion bombardment technique to burning
Knot NdFeB magnets are bombarded, and it is 5Pa, Ar to keep vacuum degree in vacuum chamber2Flow is 200sccm, bombards 40min.
(3) preparation of high anti-corrosion composite coating：
In chemical vapour phase deposition coating coating equipment, processing is evaporated to paracyclophane and HMDO material,
The evaporating temperature of paracyclophane and HMDO is set to 220 DEG C, and pyrolysis temperature is set to 740 DEG C, coating equipment
Vacuum degree control is in 4Pa.HMDO and paracyclophane are handled simultaneously using chemical vapor deposition method, point
Not Sheng Cheng silicon oxide particle and paracyclophane monomer, the paracyclophane monomer that the silicon oxide particle is generated coated, then existed
Sintered NdFeB magnet surface is deposited under normal temperature, SiO is formed2/ paracyclophane composite coating.
While composite coating is prepared, bombardment compacting processing is carried out to the composite coating of preparation using circulation argon ion,
Ar2Flow is 100sccm.The sample of preparation is named as sample 3A.
Comparative examples 3
In order to be contrasted with embodiment 3, the implementation steps phase of (1) and step (2) and embodiment 3 the step of reference examples 3
Together, step (3) is changed to：In chemical vapour phase deposition coating coating equipment, processing is evaporated to paracyclophane material, evaporating temperature is set
For 220 DEG C, the pyrolysis temperature of paracyclophane material is set to 740 DEG C, and the vacuum degree control of coating equipment is in 4Pa.Preparing
While composite coating, bombardment compacting processing, Ar are carried out to the composite coating of preparation using circulation argon ion2Flow is
100sccm。
Prepare with sample 3A thickness identical samples, the sample obtained by this reference examples 3 is named as sample 3B.
Sample 3B progress salt spray test prepared by the sample 3A and comparative examples 3 prepared to embodiment 3 be (salt spray test
Condition is：Chamber temperature is 38 DEG C, and brine strength is 5% (volume ratio), using the test method continuously sprayed), its is specific
As a result 3 be see the table below.
Table 3 sample 3A and 3B salt spray test and high temperature resistant test result
| Sample | Sample 3A | Sample 3B |
| Salt spray test (h) | 696 | 552 |
From table 3 it can be seen that sample 3A salt-fog resistant test abilities are substantially better than sample 3B salt-fog resistant test ability, explanation
The SiO prepared in NdFeB magnet surfaces2The decay resistance of the high anti-corrosion composite coating of/paracyclophane is significantly improved.
Merely illustrating the principles of the invention described in the embodiment above and specification, do not depart from spirit of the invention and
Various changes and modifications of the present invention are possible on the premise of scope, and these changes and improvements both fall within claimed invention model
In enclosing.
Claims (7)
1. a kind of sintered NdFeB magnet surface high-corrosion-resistance composite coating, it is characterised in that：Described high anti-corrosion composite coating is
SiO2/ paracyclophane composite coating, described high anti-corrosion composite coating is using paracyclophane, HMDO preparation
Into.
2. a kind of preparation method of sintered NdFeB magnet surface high-corrosion-resistance composite coating, it is characterised in that：Comprise the following steps：
(1) magnet pretreating process：Pickling, blasting treatment are carried out successively to sintered NdFeB magnet；
(2) magnet coating pre-treatment：Pre-treatment in stove is carried out to pretreated magnet；
(3) preparation of high anti-corrosion composite coating：Using sintered NdFeB magnet of the chemical vapour deposition technique after step (2) processing
Surface prepares SiO2/ paracyclophane composite coating, while being bombarded using circulation argon ion the composite coating of preparation.
3. the preparation method of sintered NdFeB magnet surface high-corrosion-resistance composite coating according to claim 2, its feature exists
In：The detailed process of the step (1) is as follows：
First, by sintered NdFeB magnet in 5~12wt.% salpeter solution 10~30s of pickling；Then, by magnet go from
It is cleaned by ultrasonic 1~3min in sub- water；Finally, blasting treatment is carried out to magnet, sand-blast material is the Brown Alundum of 200~500 mesh, spray
The angle of sand processing is 30~60 °, and the time is 1~2min.
4. the preparation method of sintered NdFeB magnet surface high-corrosion-resistance composite coating according to claim 2, its feature exists
In：The detailed process of the step (2) is as follows：
Sintered NdFeB magnet after step (1) processing is put into chemical vapour phase deposition coating coating equipment, banged using circulation argon ion
Hit technique to bombard sintered NdFeB magnet, holding vacuum degree in vacuum chamber is 1~5Pa, Ar2Flow is 100~200sccm,
Bombard 20~40min.
5. the preparation method of sintered NdFeB magnet surface high-corrosion-resistance composite coating according to claim 2, its feature exists
In：The detailed process of the step (3) is as follows：
HMDO and paracyclophane are handled simultaneously using chemical vapor deposition method, silica is generated respectively
Particle and paracyclophane monomer, the paracyclophane monomer that the silicon oxide particle is generated are coated, and are then deposited at normal temperatures
Sintered NdFeB magnet surface, forms SiO2/ paracyclophane composite coating.
6. the preparation method of sintered NdFeB magnet surface high-corrosion-resistance composite coating according to claim 5, its feature exists
In：The evaporating temperature of paracyclophane and HMDO is set to 140~220 DEG C, pyrolysis temperature in the step (3)
620~740 DEG C are set to, the vacuum degree control of coating equipment is in 1~4Pa.
7. the preparation method of sintered NdFeB magnet surface high-corrosion-resistance composite coating according to claim 2, its feature exists
In：SiO is being prepared in the step (3)2Compound painting while/paracyclophane composite coating using circulation argon ion to preparation
Layer carries out bombardment compacting processing, Ar2Flow is 40~100sccm.
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| CN108179419A (en) * | 2018-01-25 | 2018-06-19 | 合肥工业大学 | A kind of preparation method of Sintered NdFeB magnet surface enamel coating |
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