CN107293462A - A kind of method that microchannel plate is prepared with polymer carrier - Google Patents
A kind of method that microchannel plate is prepared with polymer carrier Download PDFInfo
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- CN107293462A CN107293462A CN201710564299.7A CN201710564299A CN107293462A CN 107293462 A CN107293462 A CN 107293462A CN 201710564299 A CN201710564299 A CN 201710564299A CN 107293462 A CN107293462 A CN 107293462A
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- microchannel plate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/12—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes
- H01J9/125—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes of secondary emission electrodes
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Abstract
The invention provides a kind of method that microchannel plate is prepared with polymer carrier, it is related to micro optical element manufacturing technology field, polymer carrier is melt into liquid and is filled in the primary microchannel plate hole of hollow method preparation by the present invention, postprocessing working procedures are carried out after solidification, finally removed using organic solvent, obtain microchannel plate finished product.The present invention is the filling effect by polymer carrier, effectively prevents the problem of microchannel plate prepared using hollow method is chipping in postprocessing working procedures and deforms.
Description
Technical field
The invention belongs to micro optical element manufacturing technology field, more particularly to one kind prepares microchannel plate with polymer carrier
Method.
Background technology
Microchannel plate（Microchannel Plate, abbreviation MCP）It is a kind of microwell array with electron multiplication
Element, the features such as there is high-gain, low noise, high-resolution, broadband, low-power consumption, long-life and self-saturation effect due to it,
And it is widely used in low-light image tube, photomultiplier, pick-up tube and particle detector.
At present, MCP preparation method is mainly solid acid extracting, and the key that the method prepares MCP is glass fibre used
It is that two kinds of glass fibres are regularly arranged into by can in the lump be drawn and be formed by the core material glass rod of acid etch and overcoat cladding glass pipe
Beam is cut into thin glass sheet after high-temperature fusion, then removes core glass through acid etching and form loose structure.The method has two protrusions
The problem of, one is that acid extremely strong solvent must be used in preparation process（Such as concentrated sulfuric acid, concentrated nitric acid）As corrosive agent, this
Great injury not only is brought to producers' body, the mechanical strength of skin glass and bound edge skeleton glass is also reduced, so that
Microchannel plate is caused to deform, in addition, with the lifting of microchannel plate application device imaging definition and resolution requirement, microchannel
The microchannel diameter of plate is reducing always, at present, and the micro-pore diameter of main flow microchannel plate is 6 ~ 8um, and existing 4um, 2um are micro-
The report of channel plate, solid aciding is due to the defect of itself, and the residue that acid etching core glass is produced is in the microchannel of smaller aperture due
It is difficult to discharge in plate, limits the research and development process for the microchannel plate that aperture is smaller, resolution ratio is higher.Another outstanding problem is glass
Glass fiber is after acid etching removes core glass, and microchannel surface out-of-flatness has substantial amounts of concaveconvex structure, it reduce microchannel
The multiplication amplitude of plate.
The key that hollow method prepares microchannel plate is that glass fibre used is to be drawn to form hollow fibre by cladding glass pipe
Dimension, regularly arranged bunchy after high-temperature fusion add edge-cladding glass, it is sliced, grinding, polishing etc. process, formed loose structure.
So as to fundamentally avoid the problem of solid acid extracting causes, the microchannel surface of formation is smooth, no concave-convex structure, electronics
Gain is stronger.But the primary microchannel plate that the defect of this method, which is doughnut bunchy, to be formed is in section, grinding, polishing etc.
Significantly fragmentation and deformation easily occurs in postprocessing working procedures, it is impossible to preserve original microchannel plate loose structure.
The content of the invention
It is a primary object of the present invention to there is provided a kind of method that microchannel plate is prepared with polymer carrier, to be solved
Technical problem be when preparing microchannel plate with hollow method, prevent primary microchannel plate in postprocessing working procedures it is chipping and
Deformation.
The purpose of the present invention and technical problem to be solved are achieved through the following technical solutions.
A kind of method that microchannel plate is prepared with polymer carrier, comprises the following steps：
（1）The preparation of primary microchannel plate：
Regularly arranged some doughnuts are hollow fiber bundle, in appearance after described 620 ~ 630 DEG C of high temperature fusions of hollow fiber bundle
Face adds edge-cladding glass；
（2）Filling primary microchannel plate is post-processed：
Polymer carrier is heated and melted, the polymer carrier after melting is filled in primary microchannel plate；Height is treated in filling completion
The primary microchannel plate is cut into slices after molecular stuffing solidification, the postprocessing working procedures such as burr removing, polishing are ground；
（3）The primary microchannel plate of cleaning：
Treated primary microchannel plate is cleaned using organic solvent microchannel plate finished product is made.
Preferably, the hollow fiber bundle is regular hexagon structure.
Preferably, the mixture that the polymer carrier is made up of wax, resin, any component of asphalt.
As further preferred, the mixture is one kind in Fischer-Tropsch wax, synthetic wax, Tissuemat E, lignite wax, paraffin
Or several mixtures.
Preferably, the primary microchannel plate aperture is 0.1 ~ 100um.
Preferably, the polymer carrier heating-up temperature is 90 ~ 300 DEG C, the polymer carrier after the heating melting
Viscosity coefficient is that 60 ~ 300mPa.s, thermal cubic expansion coefficient are 0.66 ~ 1.00 × 10-3/ DEG C, the high score after the heating melting
Sub- filler is easy to be filled into the aperture of primary microchannel plate.
As further preferred, the polymer carrier viscosity coefficient after the heating melting is by rotary viscosity design determining, institute
Rotation viscometer is stated to work under 90 DEG C of constant temperatures.
Preferably, the organic solvent is propane, butane, pentane, 2- methybutanes, hexane, 2- methylpentanes, 2,2-
Dimethylbutane, 2,3- dimethylbutanes, heptane, heptane isomers, octane, 2,2,4- trimethylpentanes, 2,2,3- trimethyls
Pentane, nonane, 2,2,5- trimethyl cyclohexanes, decane, dodecane, petroleum ether, gasoline, kerosene, solvent naphtha, unsaturated fat
Hydrocarbon, mixing amylene, pentamethylene, methyl cyclopentane, hexamethylene, hexahydrotoluene, ethyl cyclohexane, 1,1- join hexamethylene, to Meng
Alkane（Terpane）, it is cyclohexene, firpene, 1,8- limonenes, benzene, styrene, cyclohexyl benzene, toluene, ortho-xylene, meta-xylene, right
Dimethylbenzene, dimethylbenzene, ethylbenzene, diethylbenzene, cumene, butyl benzene, amylbenzene, diamyl benzene, three amylbenzenes, four pentyl
Benzene, detergent alkylate, double detergent alkylates, amyl group toluene, 1,3,5- trimethylbenzenes, cymene, biphenyl, naphthalene, tetrahydrochysene
Change naphthalene, decahydronaphthalenes, turpentine oil, pine tar, camphorated oil, chloromethanes, dichloromethane, chloroform, carbon tetrachloride, chloroethanes, 1,2- bis-
Chloroethanes, 1,1- dichloroethanes, 1,1,1- trichloroethanes, 1,1,2- trichloroethanes, 1,1,1,2- tetrachloroethanes, 1,1,2,2- tetra-
Chloroethanes, pentachloroethane, carbon trichloride, 1,1- dichloroethanes, 1,2- dichloroethylene, trichloro ethylene, tetrachloro-ethylene, chloropropane,
2 cbloropropane isopropyl chloride, 1,2- dichloropropanes, 1,2,3- trichloropropanes, chlorallylene, chlorobutane, Sec-Butyl Chloride, 1- chloro-2-methyls third
Alkane, 2- chloro-2-methyls propane, chloropentane, mixing chloro-pentane, dichloropentane, chlorohexane.The chloro- 2- ethyl hexanes of 1-, bromine first
Alkane, bromofom, bromoethane, glycol dibromide, 1,1,2,2- tetrabromoethanes, N-Propyl Bromide, 2- N-Propyl Bromides, chlorobromomethane, the bromo- 2- of 1-
Chloroethanes, chlorobenzene, o-dichlorohenzene, m-dichlorobenzene, paracide, 1,2,4- trichloro-benzenes, ortho-chlorotolu'ene, parachlorotoluene, bromobenzene, neighbour
Dibromobenzene, α-chloronaphthalene, chlorinated naphthalene, α-bromonaphthalene, fluorine（Generation）Benzene, benzotrifluoride, phenyl-hexafluoride, fluoro trichloromethane, a fluorine dichloro
The chloro- 1,2,2- trichloroethanes of methane, BTM, difluoromono-chloroethane, 1,1,2- tri-, the fluoro- 1,1,2,2- tetra- of 1,2- bis-
Chloroethanes, methanol, ethanol, propyl alcohol, isopropanol, butanol, isobutanol, butyl alcohol-sec, butyl alcohol-tert, amylalcohol, 2- methyl butanols, isoamyl
Alcohol, sec-amyl alcohol, 3- amylalcohols, tertriary amylo alcohol, fusel oil, hexanol, 4- methyl -2- amylalcohols, 2- ethyl butanols, 2- methyl anyl alcohols, enanthol,
2- enanthol, 3- enanthol, octanol, sec-n-octyl alcohol, 2-Ethylhexyl Alcohol, 3,5,5- trimethyl hexanols, nonyl alcohol, 2,6- 2,6-dimethyl-4-heptanols,
Decyl alcohol, undecyl alcohol, 5- ethyl -2- nonyl alcohols, lauryl alcohol, Exxal 12, tetradecyl alchohol, heptadecanol, cyclohexanol, 2- methyl cyclohexanes
Alcohol, 3 methyl cyclohexanol, 4 methyl cyclohexanol, phenmethylol, α-terpineol, abienol, ethylene glycol, 1,2- propane diols, 1,3- third
Glycol, 1,2- butanediols, 1,3 butylene glycol, 1,4- butanediols, 2,3- butanediols, 1,5- pentanediols, 2- butylene-1,4-diols,
2- methyl -2,4-PD, 2- ethyl -1,3- ethylene glycol, glycerine, 2- ethyls -2-（Methylol）- 1,3- propane diols, 1,2,6-
Hexanetriol, phenol, cresols, orthoresol, metacresol, paracresol, xylenol, ether, propyl ether, isopropyl ether, butyl ether, isoamyl ether, oneself
Ether, ethyl vinyl ether, butyl vinyl ether, methyl phenyl ethers anisole, phenetole, butyl phenylate, amyl group phenyl ether, methoxy toluene,
Ethyl benzyl ether, diphenyl ether, benzyl ether, o-dimethoxybenzene, 1,2 epoxy prapane, 1,2- epoxy butane, dioxane, trioxas
Alkane, furans, 2- methylfurans, tetrahydrofuran, oxinane, cineole, glycol dimethyl ether, ethylene glycol diethyl ether, ethylene glycol
Butyl oxide, diethylene glycol dimethyl ether, diethyl carbitol, diethylene glycol (DEG) ethyl methyl ether, diethylene glycol dibutyl ether, glycerin ether, crown ether, first contracting
Aldehyde, acetal, acetone, methyl acetone, butanone, 2 pentanone, propione, methyl-n-butyl ketone, 4-methyl-2 pentanone, 2-HEPTANONE, 3- heptan
Ketone, 4- heptanone, valerone, 2,5- acetyl butyryls, 2,6,8- trimethyl -4- nonanones, acetone oil, isopropylidene third
Ketone, phorone, isophorone, cyclohexanone, methyl cyclohexanone, acetophenone, formic acid, acetic acid, propionic acid, butyric acid, isobutyric acid, valeric acid,
In isovaleric acid, pivalic acid, caproic acid, 2 Ethylbutanoic acid, octanoic acid, 2 ethyl hexanoic acid, oleic acid, acetic anhydride, propionic andydride, butyric anhydride it is a kind of or
Several mixed solvents.
Be the beneficial effects of the invention are as follows the preparation method without using strong acid, it is ensured that the mechanical strength of microchannel plate and
The integrality of loose structure, it is to avoid microchannel plate deforms, improves resolution ratio, adds the amplitude of electron multiplication.Using
The filling microchannel plate of polymer carrier prevents primary microchannel plate chipping in postprocessing working procedures and deformed, and saves original
Microchannel plate loose structure.
Brief description of the drawings
Fig. 1 is the schematic flow sheet that hollow method prepares microchannel plate using polymer carrier of the present invention.
Fig. 2 is key component schematic diagram of the polymer carrier of the present invention in hollow method prepares microchannel plate.
Embodiment
With reference to specific embodiment, the present invention is further elaborated, and following examples will be helpful to the skill of this area
Art personnel further understand the present invention, but it is only the better embodiment of the present invention, and the invention is not limited in any way.Therefore
The equivalence changes that all features and principle according to described in present patent application scope are done, are included in present patent application model
In enclosing.
Embodiment 1
（1）The preparation of primary microchannel plate：
Regularly arranged some doughnuts are positive six side hollow fiber bundle, and the positive six side hollow fiber bundle is at a temperature of 620 DEG C
Fusion, the outer surface after fusion adds edge-cladding glass, and the aperture of gained primary microchannel plate is 50um；
（2）Filling primary microchannel plate is post-processed：
Polymer carrier is melted at a temperature of 120 DEG C, under 90 DEG C of constant temperatures, rotation viscometer measures the heating melting
The viscosity coefficient of polymer carrier afterwards is 78mPa.s, the thermal cubic expansion coefficient of the polymer carrier after the heating melting
For 0.75 × 10-3/ DEG C, filling polymer carrier will be easy to after melting and be filled in primary microchannel plate；Cooling a period of time
Treat that the polymer carrier solidifies, the polymer carrier after solidification has larger hardness and fragility, it is easy to cuts into slices, grind, polish
Etc. cold work；The polymer carrier is the mixture of Fischer-Tropsch wax and lignite wax, and the part by weight of Fischer-Tropsch wax and lignite wax is
1：4；
（3）The primary microchannel plate of cleaning：
Use weight ratio to clean treated primary microchannel plate for both 40% ethanol and 60% hexamethylene mixture to be made
Microchannel plate finished product.
Embodiment 2
（1）The preparation of primary microchannel plate：
Regularly arranged some doughnuts are positive six side hollow fiber bundle, and the positive six side hollow fiber bundle is at a temperature of 630 DEG C
Fusion, the outer surface after fusion adds edge-cladding glass, and the aperture of gained primary microchannel plate is 20um；
（2）Filling primary microchannel plate is post-processed：
Polymer carrier is melted at a temperature of 120 DEG C, under 90 DEG C of constant temperatures, rotation viscometer measures the heating melting
The viscosity coefficient of polymer carrier afterwards is 100mPa.s, the thermal cubic expansion coefficient of the polymer carrier after the heating melting
For 0.66 × 10-3/ DEG C, filling polymer carrier will be easy to after melting and be filled in primary microchannel plate；Cooling a period of time
Treat that the polymer carrier solidifies, the polymer carrier after solidification has larger hardness and fragility, it is easy to cuts into slices, grind, polish
Etc. cold work；The polymer carrier is Fischer-Tropsch wax, lignite wax, the mixture of paraffin three, Fischer-Tropsch wax, lignite wax, paraffin
The part by weight of three is 1：3：4；
（3）The primary microchannel plate of cleaning：
Weight is used to clean treated primary than the acetone for 20%, 30% toluene and 50% petroleum ether three mixture micro-
Microchannel plate finished product is made in channel plate.
Claims (9)
1. a kind of method that microchannel plate is prepared with polymer carrier, it is characterised in that comprise the following steps：
The preparation of primary microchannel plate：
It is hollow fiber bundle that some doughnuts are regularly arranged, the hollow fiber bundle merged through 620 ~ 630 DEG C of high temperature after outside
Surface adds edge-cladding glass；
Filling primary microchannel plate is post-processed：
Polymer carrier is heated and melted, the polymer carrier after melting is filled in primary microchannel plate；Treat polymer carrier
The primary microchannel plate is cut into slices after solidification, the postprocessing working procedures such as burr removing, polishing are ground；
The primary microchannel plate of cleaning：
Treated primary microchannel plate is cleaned using organic solvent microchannel plate finished product is made.
2. a kind of method that microchannel plate is prepared with polymer carrier according to claim 1, it is characterised in that：In described
Hollow fiber beam is regular hexagon structure.
3. a kind of method that microchannel plate is prepared with polymer carrier according to claim 1, it is characterised in that：The height
The mixture that molecular stuffing is made up of wax, resin, any component of asphalt.
4. a kind of method that microchannel plate is prepared with polymer carrier according to claim 3, it is characterised in that：It is described mixed
Compound is one or more of mixtures in Fischer-Tropsch wax, synthetic wax, Tissuemat E, lignite wax, paraffin.
5. a kind of method that microchannel plate is prepared with polymer carrier according to claim 1, it is characterised in that：It is described first
Level microchannel plate aperture is 0.1 ~ 100um.
6. a kind of method that microchannel plate is prepared with polymer carrier according to claim 1, it is characterised in that：The height
Molecular stuffing heating-up temperature is 90 ~ 300 DEG C, and the polymer carrier viscosity coefficient after the heating melting is 60 ~ 300mPa.s, body
Thermal expansion coefficient is 0.66 ~ 1.00 × 10-3/ DEG C, the polymer carrier after the heating melting is easy to be filled into primary micro- logical
In the aperture of guidance tape.
7. a kind of method that microchannel plate is prepared with polymer carrier according to claim 6, it is characterised in that：It is described to add
Polymer carrier viscosity coefficient after heat fusing is by rotary viscosity design determining, rotation viscometer work under 90 DEG C of constant temperatures
Make.
8. a kind of method that microchannel plate is prepared with polymer carrier according to claim 1, it is characterised in that：It is described to have
Machine solvent is propane, butane, pentane, 2- methybutanes, hexane, 2- methylpentanes, 2,2- dimethylbutanes, 2,3- dimethyl butyrates
Alkane, heptane, heptane isomers, octane, 2,2,4- trimethylpentanes, 2,2,3- trimethylpentanes, nonane, 2,2,5- trimethyls oneself
Alkane, decane, dodecane, petroleum ether, gasoline, kerosene, solvent naphtha, unsaturated aliphatic hydrocarbon, mixing amylene, pentamethylene, methyl
Pentamethylene, hexamethylene, hexahydrotoluene, ethyl cyclohexane, 1,1- join hexamethylene, to Meng's alkane（Terpane）, cyclohexene, firpene, 1,
8- limonenes, benzene, styrene, cyclohexyl benzene, toluene, ortho-xylene, meta-xylene, paraxylene, dimethylbenzene, ethylbenzene, diethyl
Base benzene, cumene, butyl benzene, amylbenzene, diamyl benzene, three amylbenzenes, tetraamylbenzene, detergent alkylate, double dodecyls
Benzene, amyl group toluene, 1,3,5- trimethylbenzenes, cymene, biphenyl, naphthalene, tetrahydronaphthalene, decahydronaphthalenes, turpentine oil, pine
Oil, camphorated oil, chloromethanes, dichloromethane, chloroform, carbon tetrachloride, chloroethanes, 1,2- dichloroethanes, 1,1- dichloroethanes, 1,1,
1- trichloroethanes, 1,1,2- trichloroethanes, 1,1,1,2- tetrachloroethanes, 1,1,2,2- tetrachloroethanes, pentachloroethane, hexachloroethanc
Alkane, 1,1- dichloroethanes, 1,2- dichloroethylene, trichloro ethylene, tetrachloro-ethylene, chloropropane, 2 cbloropropane isopropyl chloride, 1,2- dichloropropanes,
1,2,3- trichloropropanes, chlorallylene, chlorobutane, Sec-Butyl Chloride, 1- chloro-2-methyls propane, 2- chloro-2-methyls propane, chlorine penta
Alkane, mixing chloro-pentane, dichloropentane, chlorohexane.
The chloro- 2- ethyl hexanes of 9.1-, bromomethane, bromofom, bromoethane, glycol dibromide, 1,1,2,2- tetrabromoethanes, bromine third
The bromo- 2- chloroethanes of alkane, 2- N-Propyl Bromides, chlorobromomethane, 1-, chlorobenzene, o-dichlorohenzene, m-dichlorobenzene, paracide, 1,2,4- trichlorines
Benzene, ortho-chlorotolu'ene, parachlorotoluene, bromobenzene, o-dibromobenzene, α-chloronaphthalene, chlorinated naphthalene, α-bromonaphthalene, fluorine（Generation）Benzene, benzotrifluoride, six
Fluorobenzene, fluoro trichloromethane, monofluorodichloromethane, BTM, difluoromono-chloroethane, the chloro- 1,2,2- of 1,1,2- tri-
The fluoro- 1,1,2,2- tetrachloroethanes of trichloroethanes, 1,2- bis-, methanol, ethanol, propyl alcohol, isopropanol, butanol, isobutanol, butyl alcohol-sec,
Butyl alcohol-tert, amylalcohol, 2- methyl butanols, isoamyl alcohol, sec-amyl alcohol, 3- amylalcohols, tertriary amylo alcohol, fusel oil, hexanol, 4- methyl -2- amylalcohols,
2- ethyl butanols, 2- methyl anyl alcohols, enanthol, 2- enanthol, 3- enanthol, octanol, sec-n-octyl alcohol, 2-Ethylhexyl Alcohol, 3,5,5- trimethyls
Hexanol, nonyl alcohol, 2,6- 2,6-dimethyl-4-heptanols, decyl alcohol, undecyl alcohol, 5- ethyl -2- nonyl alcohols, lauryl alcohol, Exxal 12,14
Alcohol, heptadecanol, cyclohexanol, 2 methyl cyclohexanol, 3 methyl cyclohexanol, 4 methyl cyclohexanol, phenmethylol, α-terpineol, rosin
Alcohol, ethylene glycol, 1,2- propane diols, 1,3- propane diols, 1,2- butanediols, 1,3 butylene glycol, 1,4- butanediols, 2,3- butanediols,
1,5- pentanediols, 2- butylene-1,4-diols, 2- methyl -2,4-PD, 2- ethyl -1,3- ethylene glycol, glycerine, 2- ethyls -2-
（Methylol）- 1,3- propane diols, 1,2,6- hexanetriols, phenol, cresols, orthoresol, metacresol, paracresol, xylenol, ether,
Propyl ether, isopropyl ether, butyl ether, isoamyl ether, hexyl ether, ethyl vinyl ether, butyl vinyl ether, methyl phenyl ethers anisole, phenetole, butyl phenyl
Ether, amyl group phenyl ether, methoxy toluene, ethyl benzyl ether, diphenyl ether, benzyl ether, o-dimethoxybenzene, 1,2 epoxy prapane,
1,2- epoxy butane, dioxane, trioxanes, furans, 2- methylfurans, tetrahydrofuran, oxinane, cineole, ethylene glycol two
Methyl ether, ethylene glycol diethyl ether, butyl cellosolve, diethylene glycol dimethyl ether, diethyl carbitol, diethylene glycol (DEG) ethyl methyl ether, diethylene glycol (DEG)
Butyl oxide, glycerin ether, crown ether, dimethoxym ethane, acetal, acetone, methyl acetone, butanone, 2 pentanone, propione, methyl-n-butyl ketone, 4- first
Base -2 pentanone, 2-HEPTANONE, 3- heptanone, 4- heptanone, valerone, 2,5- acetyl butyryls, 2,6,8- trimethyl -4- nonyls
Ketone, acetone oil, Mesityl oxide, phorone, isophorone, cyclohexanone, methyl cyclohexanone, acetophenone, formic acid, acetic acid, third
Acid, butyric acid, isobutyric acid, valeric acid, isovaleric acid, pivalic acid, caproic acid, 2 Ethylbutanoic acid, octanoic acid, 2 ethyl hexanoic acid, oleic acid, acetic anhydride,
One or more of mixed solvent in propionic andydride, butyric anhydride.
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| CN201710564299.7A CN107293462A (en) | 2017-07-12 | 2017-07-12 | A kind of method that microchannel plate is prepared with polymer carrier |
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| CN201710564299.7A CN107293462A (en) | 2017-07-12 | 2017-07-12 | A kind of method that microchannel plate is prepared with polymer carrier |
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| CN109557195A (en) * | 2018-09-27 | 2019-04-02 | 谱尼测试集团股份有限公司 | A kind of method of 82 kinds of volatile organic matters in accurate detection gas |
| CN110967729A (en) * | 2019-12-13 | 2020-04-07 | 山西长城微光器材股份有限公司 | Method for manufacturing micro-channel plate hollow array substrate by adopting hollow filament hot melting method |
| CN111320133A (en) * | 2020-02-27 | 2020-06-23 | 西人马联合测控（泉州）科技有限公司 | Chip separation method and wafer |
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| CN103165362A (en) * | 2013-03-21 | 2013-06-19 | 长春理工大学 | Method for releasing vacuum paraffin filling structure of silicon microchannel plate |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109557195A (en) * | 2018-09-27 | 2019-04-02 | 谱尼测试集团股份有限公司 | A kind of method of 82 kinds of volatile organic matters in accurate detection gas |
| CN110967729A (en) * | 2019-12-13 | 2020-04-07 | 山西长城微光器材股份有限公司 | Method for manufacturing micro-channel plate hollow array substrate by adopting hollow filament hot melting method |
| CN111320133A (en) * | 2020-02-27 | 2020-06-23 | 西人马联合测控（泉州）科技有限公司 | Chip separation method and wafer |
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Application publication date: 20171024 |