CN107290277A - The integrated structure of optical biologic sensor and microfluidic device - Google Patents

The integrated structure of optical biologic sensor and microfluidic device Download PDF

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Publication number
CN107290277A
CN107290277A CN201610194613.2A CN201610194613A CN107290277A CN 107290277 A CN107290277 A CN 107290277A CN 201610194613 A CN201610194613 A CN 201610194613A CN 107290277 A CN107290277 A CN 107290277A
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China
Prior art keywords
biologic sensor
fluid
optical
channel layer
microfluidic device
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CN201610194613.2A
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Chinese (zh)
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余昭庆
钟林达
袁禧霙
廖克盘
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Aleve International Co ltd
Light Polytron Technologies Inc Chorus
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Aleve International Co ltd
Light Polytron Technologies Inc Chorus
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Priority to CN201610194613.2A priority Critical patent/CN107290277A/en
Publication of CN107290277A publication Critical patent/CN107290277A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optical Measuring Cells (AREA)

Abstract

The present invention provides the integrated structure of a kind of optical biologic sensor and microfluidic device, including:One bearing part, to carry and house an optical biologic sensor;One flow channel layer, for an at least flow of fluid;And a covering, for the stream into and out of an at least fluid, an at least fluid is flowed into from an at least fluid intake, and the optical biologic sensor is flowed through by an at least runner, to be sensed, then from the outflow of an at least fluid issuing.The optical biologic sensor of the present invention and the integrated structure of microfluidic device can detect optical signalling produced by optical biologic sensor, transmit fluid, avoid seepage, it is adaptable to integrate the optical biologic sensor and microfluidic device of diversified forms.

Description

The integrated structure of optical biologic sensor and microfluidic device
Technical field
The present invention is the integrated structure about a kind of optical biologic sensor and microfluidic device.
Background technology
With the sustainable development of electronics technology, its feeler applied also constantly deploys cross-cutting exploration and combination. Wherein, in fast-developing biology or medical science and technology field, the appearance of biology sensor is not less than being modern age life One quantum jump of thing relevant technical.Biology sensor is commonly defined as:Through the biomolecule of immobilization (immobilized biomolecules) combines transducer or biochip, to detect in organism or in vitro Chemical substance or biomolecule or play a kind of device that response is produced after specific reciprocation therewith.
Biology sensor meets the demand of many important measurements, especially in medicine, metabolism and other biological point Between son in interactive measure.Although traditional analysis instrument can also reach similar purpose, biology is passed Sensor most unique place be exactly from biological sensing component and biomolecule possesses thereon high sensitivity, High specific or high selectivity, the characteristic with its detection (real-time detection) in real time.Its reason is to give birth to Object inherently has miscellaneous chemocepter, in other words, and organism is actually a change in itself The aggregate of acceptor (chemoreceptors) is learned, these chemoreceptors are respectively provided with the specific or selective of height With sensitivity.With gradually ripe, the bio-sensing of more and more and assorted form of biosensor technology Device is also listed one after another.Wherein, with reference to optics mechanism biology sensor be even more to protein or nucleic acid or other There is very big application potential in biochemical molecule detection.
On the other hand, through the artificial or mechanically actuated needed for conventional biochemical is analyzed, with micro- side Pu, micro- The microfluid components such as valve, micro-filter, micro-mixer, microchannel, microsensor and microreactor are concentrated It is made on microfluidic device, to carry out the programs such as sample pre-treatments, mixing, transmission, separation and detecting, Even more it is actively used on biology sensor.Its application field can cover such as new drug development, biological and doctor The research such as learn, or it is strong examine, the detection of disease detection, pathogenic infection, the clinical examination such as blood screening, even It is such as national defense and military detecting, legal medical expert's identification identification, environment and Food Inspection non-medical applications field.
However, the integrated structure of existing biology sensor and microfluidic device is often because application is integrated with existing The limitation of processing procedure, it is impossible to which quality conformance, structural intergrity and the processing procedure height production of detection module are provided. Therefore, how the whole of optical biologic sensor and microfluidic device of a kind of effective and tool using elasticity is provided Close the important issue that structure is current industry.
The content of the invention
Embodiments of the invention disclose the integrated structure of a kind of optical biologic sensor and microfluidic device, bag Include:A kind of integrated structure of optical biologic sensor and microfluidic device, including:One bearing part, is set There is an at least groove, to carry and house an at least optical biologic sensor, wherein, the optical profile type Biology sensor possesses biological sensing layer;One flow channel layer, is arranged above the bearing part, and comprising at least One runner, for an at least flow of fluid;And a covering, it is arranged above the flow channel layer, and have Have an at least fluid intake and an at least fluid issuing, for the stream into and out of an at least fluid, it is described extremely A few fluid intake and an at least fluid issuing are connected with an at least runner for the flow channel layer; Wherein, an at least fluid is flowed into from an at least fluid intake, is flowed through by an at least runner The optical biologic sensor and biological sensing layer thereon, to be sensed, then from described at least first-class Body outlet outflow.
Further, the optical biologic sensor is fixed on the bearing part using a bonding fixed structure The groove in, the groove is one of a concave surface, a recess and an emptying aperture.
Further, the upper surface of the optical biologic sensor and the upper surface of the bearing part are located at same One horizontal level.
Further, the bearing part is made up of an opaque material, and sets an optical transmission window, in carrying When the optical transmission window is directed at the optical biologic sensor;And the optical transmission window is by a transparent material Material is made or is a hollow out opening.
Further, the surfaction of the flow channel layer is into hydrophily or hydrophobic surface.
Further, the flow channel layer also includes at least a gang of Pu component, at least a valve member, at least one At least one of mixed liquid component, other microfluid components, to carry out at least flowing of a fluid and pre- Processing.
Further, the flow channel layer be a multilayered structure, with multiple numbers of plies, and its surfaction into Hydrophily or hydrophobic surface.
Further, the covering is made up of an opaque material, and sets an optical transmission window, in covering Afterwards, the optical transmission window is directed at the optical biologic sensor;And the optical transmission window is by a transparent material Material is made or is a hollow out opening.
Further, the flow channel layer is integrated or the flow channel layer and the carrying with the covering Part is integrated.
Another embodiment of the present invention discloses the integrated structure of a kind of optical biologic sensor and microfluidic device, Including:One bearing part, is provided with an at least groove, to carry and house at least optical biologic sensing Device, wherein, possess one first biological sensing layer and one second biological response on the optical biologic sensor Layer;One upper channel layer, is arranged above the bearing part, and comprising an at least first flow, at least One first fluid flows;Once flow channel layer, is arranged at below the bearing part, and include an at least second Road, so that an at least second fluid flows;Covering on one, is arranged above the upper channel layer, and have Have an at least first fluid entrance and the outlet of an at least first fluid, at least inflow of a first fluid and Outflow, an at least first fluid entrance and an at least first fluid outlet and the upper channel layer An at least first flow is connected;And once covering, it is arranged at below the dirty channel layer, and Exported with an at least second fluid entrance and an at least second fluid, for the inflow of an at least second fluid And outflow, an at least second fluid entrance and an at least second fluid outlet and the dirty channel layer An at least second flow channel be connected;Wherein, an at least first fluid and described at least one second Fluid respectively as an at least first fluid entrance described in the upper covering and the lower covering and it is described extremely A few second fluid entrance is flowed into, and the optical biologic sensor is flowed through by an at least first flow And thereon the first biological sensing layer and an at least second flow channel flow through the optical biologic sensor and The second biological sensing layer thereon, to be sensed, then respectively from least first fluid outlet and institute State at least second fluid outlet outflow.
Further, the optical biologic sensor is fixed on the bearing part using a bonding fixed structure The groove in, the groove is one of a concave surface, a recess and an emptying aperture.
Further, the upper surface of the optical biologic sensor and the upper surface of the bearing part are located at same One horizontal level.
Further, the bearing part is made up of an opaque material, and sets an optical transmission window, in carrying When the optical transmission window is directed at the optical biologic sensor;And the optical transmission window is by a transparent material Material is made or is a hollow out opening.
Further, the surfaction of the upper channel layer and the dirty channel layer is into hydrophily or hydrophobic Surface.
Further, the upper channel layer and the dirty channel layer also include at least a gang of Pu component, at least one At least one of valve member, at least one mixed liquid component, other microfluid components, with carry out it is described at least The flowing and pretreatment of one first fluid and an at least second fluid.
Further, the upper channel layer and dirty channel layer are a multilayered structure, with multiple numbers of plies, and Its surfaction is into hydrophily or hydrophobic surface.
Further, the upper covering is made up with lower covering of an opaque material, and sets one respectively First optical transmission window and one second optical transmission window, after covering, first optical transmission window and described second saturating Light window is respectively aligned to the optical biologic sensor;And first optical transmission window and described second saturating Light window is made up of a transparent material or is a hollow out opening.
Further, the upper channel layer is integrated with the upper covering, and the dirty channel layer Integrated with the lower covering or the upper channel layer and the dirty channel layer and bearing part integration It is integrated.
Brief description of the drawings
Fig. 1 for the present invention a kind of optical biologic sensor and microfluidic device integrated structure it is first real Apply the schematic diagram of example;
Fig. 2 for the present invention a kind of optical biologic sensor and microfluidic device integrated structure it is first real Apply the profile of example;
Fig. 3 for the present invention a kind of optical biologic sensor and microfluidic device integrated structure it is second real Apply the profile of example.
Description of reference numerals:
110- bearing parts;111- grooves;112- optical biologic sensors;113- biological sensings layer;120- flows Channel layer;130- coverings;131- fluid intakes;132- fluid issuings;310- bearing parts;313- first is biological Sensed layer;The biological sensings of 314- second layer;320- upstream channel layer;330- flows down channel layer;The upper coverings of 340-; Covering under 350-;A- binds fixed structure.
Embodiment
Illustrate embodiments of the present invention, those skilled in the art the following is by particular specific embodiment Other advantages and effect of the present invention can be understood easily by content disclosed in the present specification.The present invention also may be used Implemented or applied by other different instantiations, every details in description of the invention also can base In different viewpoints with applying in the lower various modifications of progress without departing from the spirit and change.
It should be clear that structure, ratio, size that this specification institute accompanying drawings are illustrated etc., only to coordinate explanation Content disclosed in book, so that those skilled in the art is understood with reading, being not limited to the present invention can Qualifications of implementation, therefore do not have technical essential meaning, the modification of any structure, proportionate relationship change Change or the adjustment of size, all should in the case where not influenceing effect of the invention that can be generated and the purpose that can reach Fall in the range of disclosed technology contents can be covered.
Fig. 1 and Fig. 2 is respectively a kind of optical biologic sensor of the present invention and the integration knot of microfluidic device The schematic diagram and profile of the first embodiment of structure.The integration of optical biologic sensor and microfluidic device Structure is applied to integrate an optical biologic sensor and a micro runner device and encapsulated.Such as Fig. 1 and Fig. 2 institutes Show, the integrated structure of optical biologic sensor and microfluidic device sequentially includes from lower to upper:One bearing part 110th, a flow channel layer 120 and a covering 130.
Bearing part 110 is provided with an at least groove 111, to carry and house at least optical biologic sensing Device 112, at least an optical biologic sensor 112 have a biological sensed layer 113.Flow channel layer 120 is set In the top of bearing part 110, and including an at least runner, for an at least flow of fluid.Covering 130, if The top of flow channel layer 120 is placed in, and there is an at least fluid intake 131 and an at least fluid issuing 132, for The stream into and out of an at least fluid, at least an at least fluid intake 131 and a fluid issuing 132 and runner An at least runner for layer is connected, wherein, an at least fluid is flowed into from an at least fluid intake 131, is passed through An at least runner flows through optical biologic sensor 112, and biological sensing layer 113 thereon, to be sensed, Flowed out again from an at least fluid issuing 132.
It is worth noting that, in preferred embodiment, optical biologic sensor 112 is solid using a bonding Determine structure A to be fixed in the groove 111 of bearing part 110;Also, optical biologic sensor 112 is inserted When its upper surface can be located at same level position with the upper surface of bearing part 110.Groove 111 can for a concave surface, One recess or an emptying aperture.Bearing part 110 can be made up of a transparent material or opaque material, for example, high score Sub- material, plastics, ceramics, metal, Silicon Wafer, glass or other composites.When bearing part 110 When being made up of an opaque material, bearing part 110 need to set an optical transmission window (not shown), will in carrying Optical transmission window is directed at optical biologic sensor 112;And optical transmission window is made up of a transparent material or engraved for one Air switch mouthful.
Similarly, flow channel layer 120 can be made up of a transparent material or opaque material, for example, macromolecule material Material, plastics, ceramics, metal, Silicon Wafer, glass or other composites.The surface of flow channel layer 120 Hydrophily or hydrophobic surface can be modified to.Flow channel layer 120 can further include at least a gang of Pu component, at least One valve member, at least one mixed liquid component, other microfluid components or its any combination, to carry out at least one The flowing and pretreatment of fluid.Furthermore, flow channel layer 120 can be also a multilayered structure, with multiple numbers of plies, Its surface can be modified to hydrophily or hydrophobic surface.
Covering 130 can be made up of a transparent material or opaque material, for example, high polymer material, plastics, Ceramics, metal, Silicon Wafer, glass or other composites.When covering 130 is by an opaque material When being made, covering 130 need to set an optical transmission window (not shown), and after covering, optical transmission window is to quasi-optical Formula biology sensor 112;And optical transmission window is made up of a transparent material or is a hollow out opening.Furthermore, Flow channel layer 120 can integrate the structure of shaping, or flow channel layer 120 and bearing part 110 with covering 130 The structure that shaping can be integrated reduces the program subsequently encapsulated.
Significantly, since being applicable the optical biologic sensor 112 of the present invention needs the side with irradiation Formula receives the optical signalling of its sensing to excite the optical signalling of biological sensing layer, and the mode of printing opacity, Therefore, when bearing part 110 or covering 130 are made up of opaque material, it is necessary to which a printing opacity is set in addition Window is directed at optical biologic sensor 112, is obtained with the entrance of sharp irradiation with optical signalling produced after sensing To show, wherein, it is made of clear material shown in Fig. 1 and Fig. 2 first embodiment.Also, this The overall structure of invention, in addition to runner, the junction of other components, for example, bearing part 110, biological sense The junction surveyed between layer 113, the covering 130 of flow channel layer 120 and one can all completely cut off fluid, it is to avoid stream Body seepage.
Fig. 3 show the of a kind of optical biologic sensor of the present invention and the integrated structure of microfluidic device The profile of two embodiments.The integrated structure of optical biologic sensor and microfluidic device includes:One carrying Covering 340 and once covering on the upper channel layer 320 of part 310, one, once flow channel layer 330, one 350。
Bearing part 310, is provided with an at least groove, to carry and house an at least optical biologic sensor, Wherein, an at least optical biologic sensor has one first biological sensing layer 313 and one second biological sensing Layer 314.Upper channel layer 320, is arranged at the top of bearing part 310, and including an at least first flow, for An at least first fluid flows.Flow down channel layer 330, is arranged at the lower section of bearing part 310, and including at least 1 the Two runners, so that an at least second fluid flows.Upper covering 340, is arranged at the upper top of channel layer 320, And exported with an at least first fluid entrance and an at least first fluid, for the stream of an at least first fluid Into and out, at least a first fluid entrance and an at least first fluid are exported with upper channel layer 320 at least One first flow is connected.Lower covering 350, is arranged at the lower section of dirty channel layer 330, and with least 1 the Two fluid intakes and the outlet of an at least second fluid, for the stream into and out of an at least second fluid, at least One second fluid entrance and the outlet of an at least second fluid are connected with an at least second flow channel for the channel layer 330 that flows down Connect, wherein, an at least first fluid and at least a second fluid are respectively by upper covering 340 and lower covering A 350 at least first fluid entrance and an at least second fluid entrance are flowed into, and pass through an at least first flow stream The first biological sensing layer 313 through an at least optical biologic sensor and thereon, and an at least second flow channel stream The second biological sensing layer 314 through an at least optical biologic sensor and thereon, to be sensed, then distinguishes From the outlet of an at least first fluid and at least second fluid outlet outflow.
It is worth noting that, second embodiment is similar with first embodiment, its Main Differences is, first is real Apply example and use three layers structure, and second embodiment uses five layered structures;Through on the upper strata of bearing part 310 Upper channel layer 320, the channel layer 330 that flows down and upper covering 340, lower covering 350 are set respectively with lower floor, Different fluid can be injected separately into by upper strata and lower floor, therefore be applicable to more complicated or multiple tracks reaction process Sensing application.Each component in a second embodiment is similar with first embodiment, and its implementation detail is not repeated.
Sum it up, embodiments of the invention disclose the whole of a kind of optical biologic sensor and microfluidic device Structure is closed, through combination optical biologic sensor and microfluidic device, optical biologic sensor can be detected Produced optical signalling, and its overall structure, in addition to runner, the junctions of other components all can be every Exhausted fluid, avoid seepage, it is adaptable to integrate the optical biologic sensor and microfluidic device of diversified forms.
However, effect of above-described embodiment only illustrative present invention, not for the limitation present invention, appoints What one skilled in the art can enter under the spirit and scope without prejudice to the present invention to above-described embodiment Row modification is with changing.In addition, the quantity of the component in these above-mentioned embodiments is only illustrative, and It is non-to be used to limit the present invention.

Claims (18)

1. the integrated structure of a kind of optical biologic sensor and microfluidic device, it is characterised in that including:
One bearing part, is provided with a groove, to carry and house an optical biologic sensor, wherein, Possesses a biological sensed layer on the optical biologic sensor;
One flow channel layer, is arranged above the bearing part, and comprising an at least runner, for an at least fluid Flowing;And
One covering, is arranged above the flow channel layer, and with an at least fluid intake and an at least fluid Outlet, for the stream into and out of an at least fluid, an at least fluid intake and an at least fluid Outlet is connected with an at least runner for the flow channel layer;
Wherein, an at least fluid is flowed into from an at least fluid intake, passes through an at least runner Flow through the optical biologic sensor and thereon biological sensing layer, to be sensed, then from it is described at least One fluid issuing flows out.
2. the integrated structure of optical biologic sensor as claimed in claim 1 and microfluidic device, it is special Levy and be, the optical biologic sensor is fixed on described in the bearing part using a bonding fixed structure In groove, the groove is one of a concave surface, a recess and an emptying aperture.
3. the integrated structure of optical biologic sensor as claimed in claim 1 and microfluidic device, it is special Levy and be, the upper surface of the optical biologic sensor and the upper surface of the bearing part are located at same level Position.
4. the integrated structure of optical biologic sensor as claimed in claim 1 and microfluidic device, it is special Levy and be, the bearing part is made up of an opaque material, and an optical transmission window is set, in carrying by institute State optical transmission window and be directed at the optical biologic sensor;And the optical transmission window is made up of a transparent material Or be a hollow out opening.
5. the integrated structure of optical biologic sensor as claimed in claim 1 and microfluidic device, it is special Levy and be, the surfaction of the flow channel layer is into hydrophily or hydrophobic surface.
6. the integrated structure of optical biologic sensor as claimed in claim 1 and microfluidic device, it is special Levy and be, the flow channel layer also includes at least a gang of Pu component, at least a valve member, at least one mixed liquid group At least one of part, other microfluid components, to carry out the flowing and pretreatment of an at least fluid.
7. the integrated structure of optical biologic sensor as claimed in claim 1 and microfluidic device, it is special Levy and be, the flow channel layer is a multilayered structure, with multiple numbers of plies, and its surfaction is into hydrophily Or hydrophobic surface.
8. the integrated structure of optical biologic sensor as claimed in claim 1 and microfluidic device, it is special Levy and be, the covering is made up of an opaque material, and an optical transmission window, after covering, institute are set State optical transmission window and be directed at the optical biologic sensor;And the optical transmission window is made up of a transparent material Or be a hollow out opening.
9. the integrated structure of optical biologic sensor as claimed in claim 1 and microfluidic device, it is special Levy and be, the flow channel layer is integrated with the covering or the flow channel layer is integrated with the bearing part It is integrated.
10. the integrated structure of a kind of optical biologic sensor and microfluidic device, it is characterised in that including:
One bearing part, is provided with a groove, to carry and house an optical biologic sensor, wherein, The optical biologic sensor possesses the first biological sensing layer and one second biological sensing layer;
One upper channel layer, is arranged above the bearing part, and comprising an at least first flow, at least One first fluid flows;
Once flow channel layer, is arranged at below the bearing part, and comprising an at least second flow channel, at least One second fluid flows;
Covering on one, is arranged above the upper channel layer, and with an at least first fluid entrance and extremely Few first fluid outlet, for the stream into and out of an at least first fluid, an at least first fluid Entrance and at least first fluid outlet are connected with an at least first flow for the upper channel layer; And
Once covering, is arranged at below the dirty channel layer, and with an at least second fluid entrance and extremely Few second fluid outlet, for the stream into and out of an at least second fluid, an at least second fluid Entrance and at least second fluid outlet are connected with an at least second flow channel for the dirty channel layer;
Wherein, an at least first fluid and an at least second fluid respectively by the upper covering with An at least first fluid entrance for the lower covering and an at least second fluid entrance are flowed into, and are led to Cross an at least first flow flow through the optical biologic sensor and thereon the first biological sensing layer, And an at least second flow channel flow through the optical biologic sensor and thereon the second biological sensing layer, To be sensed, then respectively from least first fluid outlet and at least second fluid outlet stream Go out.
11. the integrated structure of optical biologic sensor as claimed in claim 10 and microfluidic device, its It is characterised by, the optical biologic sensor is fixed on the institute of the bearing part using a bonding fixed structure State in groove, the groove is one of a concave surface, a recess and an emptying aperture.
12. the integrated structure of optical biologic sensor as claimed in claim 10 and microfluidic device, its It is characterised by, the upper surface of the optical biologic sensor and the upper surface of the bearing part are located at same water Prosposition is put.
13. the integrated structure of optical biologic sensor as claimed in claim 10 and microfluidic device, its It is characterised by, the bearing part is made up of an opaque material, and an optical transmission window is set, will in carrying The optical transmission window is directed at the optical biologic sensor;And the optical transmission window is by a transparent material system Into or for a hollow out opening.
14. the integrated structure of optical biologic sensor as claimed in claim 10 and microfluidic device, its It is characterised by, the surfaction of the upper channel layer and the dirty channel layer is into hydrophily or hydrophobic surface.
15. the integrated structure of optical biologic sensor as claimed in claim 10 and microfluidic device, its It is characterised by, the upper channel layer and the dirty channel layer also include at least a gang of Pu component, at least a valve At least one of component, at least one mixed liquid component, other microfluid components, to carry out described at least 1 the The flowing and pretreatment of one fluid and an at least second fluid.
16. the integrated structure of optical biologic sensor as claimed in claim 10 and microfluidic device, its It is characterised by, the upper channel layer and dirty channel layer are a multilayered structure, with multiple numbers of plies, and its table Face is modified to hydrophily or hydrophobic surface.
17. the integrated structure of optical biologic sensor as claimed in claim 10 and microfluidic device, its It is characterised by, the upper covering is made up with lower covering of an opaque material, and sets one first respectively Optical transmission window and one second optical transmission window, after covering, first optical transmission window and second light inlet window Mouth is respectively aligned to the optical biologic sensor;And first optical transmission window and second light inlet window Mouth is made up of a transparent material or is a hollow out opening.
18. the integrated structure of optical biologic sensor as claimed in claim 10 and microfluidic device, its It is characterised by, the upper channel layer is integrated with the upper covering, and the dirty channel layer and institute State that lower covering is integrated or the upper channel layer and the dirty channel layer are integrated into one with the bearing part Body.
CN201610194613.2A 2016-03-31 2016-03-31 The integrated structure of optical biologic sensor and microfluidic device Pending CN107290277A (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1678398A (en) * 2002-09-12 2005-10-05 英特尔公司 Microfluidic apparatus with integrated porous-substrates/sensor for real-time biochemical molecule detection
US20100296972A1 (en) * 2008-02-01 2010-11-25 Toru Miura Flow cell
CN205643133U (en) * 2016-03-31 2016-10-12 光合声科技股份有限公司 Optical profile type biosensor and little fluid means's structure of integrating

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1678398A (en) * 2002-09-12 2005-10-05 英特尔公司 Microfluidic apparatus with integrated porous-substrates/sensor for real-time biochemical molecule detection
US20100296972A1 (en) * 2008-02-01 2010-11-25 Toru Miura Flow cell
CN205643133U (en) * 2016-03-31 2016-10-12 光合声科技股份有限公司 Optical profile type biosensor and little fluid means's structure of integrating

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Application publication date: 20171024