CN107272013A - Laser radar apparatus and laser radar detecting system - Google Patents
Laser radar apparatus and laser radar detecting system Download PDFInfo
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- CN107272013A CN107272013A CN201710652897.XA CN201710652897A CN107272013A CN 107272013 A CN107272013 A CN 107272013A CN 201710652897 A CN201710652897 A CN 201710652897A CN 107272013 A CN107272013 A CN 107272013A
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- 230000010287 polarization Effects 0.000 claims abstract description 72
- 239000013078 crystal Substances 0.000 claims description 14
- 230000003287 optical effect Effects 0.000 claims description 13
- 238000004891 communication Methods 0.000 claims description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 229910052779 Neodymium Inorganic materials 0.000 claims description 3
- 230000008859 change Effects 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 3
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 239000010979 ruby Substances 0.000 claims description 3
- 229910001750 ruby Inorganic materials 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000000926 separation method Methods 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 2
- 239000002223 garnet Substances 0.000 claims 1
- 230000011514 reflex Effects 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000009738 saturating Methods 0.000 description 2
- 238000003915 air pollution Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/42—Simultaneous measurement of distance and other co-ordinates
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Computer Networks & Wireless Communication (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Electromagnetism (AREA)
- Optical Radar Systems And Details Thereof (AREA)
Abstract
The invention provides a kind of laser radar apparatus and laser radar detecting system, it is related to laser radar field.The laser radar apparatus includes micropulse laser device, light polarization processing unit, telescope, narrow band pass filter and photodetector, by the way that laser generator is set into micropulse laser device, micropulse laser device possesses small volume, the characteristics of cost is low, furthermore pass through the micropulse laser device to laser radar apparatus, light polarization processing unit, telescope, the topology layout of narrow band pass filter and photodetector, simplify the internal structure of laser radar apparatus, so as to further reduce the volume and weight of laser radar apparatus, and save cost, it is light and handy convenient, it is easy to carry about with one.
Description
Technical field
The present invention relates to laser radar field, system is detected in particular to a kind of laser radar apparatus and laser radar
System.
Background technology
Laser radar is to launch the radar system of the characteristic quantities such as the position of detecting laser beam target, speed.Laser radar
To objective emission detectable signal (laser beam), then by the signal (target echo) reflected from target received and transmitting
Signal is compared, and is made after proper treatment, so that it may obtain target for information about, such as target range, orientation, height, speed, appearance
The parameters such as state, even shape, so as to be detected, tracked and be recognized to distant object.
Laser radar of the prior art, due to using high-energy laser, heavy caliber astronomical telescope and its related time
Ripple signal collecting device etc., and internal structure is complicated, cause that volume is big, weight is larger, it is inconvenient mobile the problem of, so as to make
Fixed observer can only be pinpointed into laser radar, it is impossible to carry out multiple spot, a wide range of air pollution monitoring.Further, since cost is high, instrument
The problems such as device complex operation, it is impossible to meet practical application request of the laser radar in air monitoring field.
The content of the invention
It is an object of the invention to provide a kind of laser radar apparatus and laser radar detecting system, it is intended to improve above-mentioned
The problem of.
The present invention provides a kind of technical scheme:
In a first aspect, the embodiments of the invention provide a kind of laser radar apparatus, the laser radar apparatus includes scarcely perceptible pulse
Laser, light polarization processing unit, telescope, narrow band pass filter and photodetector are rushed,
The micropulse laser device is used to producing and sending the incident entering light polarization manipulation device of pulse laser, the light polarization
Processing unit is used for the polarization state for changing pulse laser and pulse laser is changed into circular polarization state from linear polarization state, inputs institute
State telescope;
The telescope is used to send pulse laser and expands the diameter of pulse laser and reduce the diverging of pulse laser
Angle, and input the light polarization processing unit for receiving the back scattered echo-signal of detected target;
The light polarization processing unit is additionally operable to echo-signal being changed into linear polarization state by circular polarization state and inputs institute
Narrow band pass filter is stated, the narrow band pass filter is used for wave band where extracting echo-signal or intends wavelength and the elimination of detection parameter
Background signal simultaneously inputs photodetector, and the photodetector is concurrent for echo-signal to be converted into electric signal from optical signal
Go out.
Further, the YAG laser or ruby laser or neodymium glass laser or Nitrogen Lasers
Device or excimer laser.
Further, the telescope is autocollimator.
Further, the light polarization processing unit include the first birefringence monocrystalline thin slice, polarization spectro crystal, second pair
Monocrystalline thin slice is reflected,
The first birefringence monocrystalline thin slice is used to receive the incident pulse laser of the micropulse laser device and changes hair
The polarization state of laser is penetrated, so that the polarization direction of light pulse is consistent with the polarization direction of the polarization spectro crystal,
The polarization spectro crystal is used to carry out polarization separation to pulse laser and is incident to the second birefringence monocrystalline thin slice;
The second birefringence monocrystalline thin slice is used to pulse laser being changed into circular polarization state by linear polarization state, is incorporated to
It is incident upon the telescope.
Further, the first birefringence monocrystalline thin slice is half-wave plate, and the second birefringence monocrystalline thin slice is four points
One of wave plate.
Further, the laser radar apparatus also includes optoisolator, and the optoisolator is used for separating echo signal
It is reflected back the micropulse laser device.
Further, the laser radar apparatus also includes diaphragm, and the diaphragm enters for receiving the narrow band pass filter
Echo-signal is penetrated, to determine the field of view of receiver angle of laser radar apparatus, and echo-signal the photodetector is incident to.
Further, the photodetector is photomultiplier or semiconductor photo diode or the pole of avalanche optoelectronic two
Pipe.
Second aspect, the embodiment of the present invention additionally provides a kind of laser radar detecting system, including intelligent terminal, radar letter
Number capture card and above-mentioned laser radar apparatus, the laser radar apparatus, the radar signal capture card and the intelligence
Communication connection can be set up between terminal, the radar signal capture card is for receiving the electric signal of the photodetector transmission simultaneously
Electric signal is sent to the intelligent terminal, and the intelligent terminal is used to the electric signal carrying out data processing and shown.
Further, the laser radar detecting system also includes support frame, control board and two motors, institute
State laser radar apparatus, described two motors and be mounted on support frame as described above, the control board be disposed with controller,
Wireless communication module, the controller is electrically connected with the wireless communication module, two motors respectively, the control
Device is used to receive the intelligent terminal transmission angular turn instruction by the wireless communication module, and according to the angular turn
The instruction control motor drives the laser radar apparatus to rotate.
A kind of laser radar apparatus and the beneficial effect of laser radar detecting system that the present invention is provided be:By by laser
Generator is set to micropulse laser device, and micropulse laser device possesses small volume, the characteristics of cost is low, furthermore by laser thunder
Up to the structure cloth of the micropulse laser device of device, light polarization processing unit, telescope, narrow band pass filter and photodetector
Office, simplifies the internal structure of laser radar apparatus, so as to further reduce the volume and weight of laser radar apparatus, and saves
Cost has been saved, it is light and handy convenient, it is easy to carry.
Brief description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be attached to what is used required in embodiment
Figure is briefly described, it will be appreciated that the following drawings illustrate only certain embodiments of the present invention, therefore is not construed as pair
The restriction of scope, for those of ordinary skill in the art, on the premise of not paying creative work, can also be according to this
A little accompanying drawings obtain other related accompanying drawings.
Fig. 1 is the structural representation of laser radar apparatus provided in an embodiment of the present invention;
Fig. 2 is the structural representation of laser radar detecting system provided in an embodiment of the present invention;
Fig. 3 is the position relationship schematic diagram of support frame provided in an embodiment of the present invention and motor;
Fig. 4 connects block diagram for the circuit of laser radar detecting system provided in an embodiment of the present invention.
Icon:101- micropulse laser devices;102- optoisolators;103- light polarization processing units;The birefringences of 104- first
Monocrystalline thin slice;105- polarization spectro crystal;106- the second birefringence monocrystalline thin slices;107- telescopes;108- narrow band pass filters;
109- diaphragms;110- photodetectors;111- radar signal capture cards;112- intelligent terminals;113- support frames;114- is controlled
Device;115- wireless communication modules;116- motors.
Embodiment
To make the purpose, technical scheme and advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention
In accompanying drawing, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is
A part of embodiment of the present invention, rather than whole embodiments.The present invention implementation being generally described and illustrated herein in the accompanying drawings
The component of example can be arranged and designed with a variety of configurations.
Therefore, the detailed description of embodiments of the invention below to providing in the accompanying drawings is not intended to limit claimed
The scope of the present invention, but be merely representative of the present invention selected embodiment.Based on the embodiment in the present invention, this area is common
The every other embodiment that technical staff is obtained under the premise of creative work is not made, belongs to the model that the present invention is protected
Enclose.
It should be noted that:Similar label and letter represents similar terms in following accompanying drawing, therefore, once a certain Xiang Yi
It is defined in individual accompanying drawing, then it further need not be defined and explained in subsequent accompanying drawing.
In the description of the invention, it is to be understood that term " " center ", " on ", " under ", "left", "right", " vertical ",
The orientation or position relationship of the instruction such as " level ", " interior ", " outer " be based on orientation shown in the drawings or position relationship, or should
Orientation or position relationship that invention product is usually put when using, or the orientation or position that those skilled in the art usually understand
Relation is put, the description present invention is for only for ease of and simplifies description, rather than indicate or imply that the equipment or element of meaning are necessary
With specific orientation, with specific azimuth configuration and operation, therefore it is not considered as limiting the invention.
In addition, term " first ", " second ", " the 3rd " etc. are only used for distinguishing description, and it is not intended that indicating or implying
Relative importance.
In the description of the invention, in addition it is also necessary to explanation, unless otherwise clearly defined and limited, term " setting ",
" installation ", " connected ", " connection " should be interpreted broadly, for example, it may be fixedly connected or be detachably connected, or one
Connect body;Can be mechanical connection or electrical connection;Can be joined directly together, can also be indirect by intermediary
It is connected, can is the connection of two element internals.For the ordinary skill in the art, on being understood with concrete condition
State the concrete meaning of term in the present invention.
Embodiment one
Referring to Fig. 1, present embodiments providing a kind of laser radar apparatus, laser radar apparatus includes micropulse laser device
101st, optoisolator 102, light polarization processing unit 103, telescope 107, narrow band pass filter 108, diaphragm 109 and photodetection
Device 110.
Micropulse laser device 101 is used to produce and send pulse laser incidence and enter optoisolator 102 to input at light polarization again
Manage device 103.
In the present embodiment, micropulse laser device 101 can use YAG laser or ruby laser or neodymium
Amorphous laser or nitrogen molecular laser or excimer laser, are not limited thereto.Optoisolator 102 is believed for separating echo
Number micropulse laser device 101 is reflected back, so that avoiding echo-signal causes damage to micropulse laser device 101.Wherein, light every
It is a kind of Passive Optical Components for allowing Unidirectional light to pass through from device 102, its operation principle is based on the nonreciprocal of Faraday rotation
Property, can well it be isolated by optoisolator 102 by the light of optical fiber echo reflection.
Light polarization processing unit 103 is used to change the polarization state of pulse laser and is changed into pulse laser from linear polarization state
Circular polarization state, inputs telescope 107.
In the present embodiment, light polarization processing unit 103 includes but is not limited to the first birefringence monocrystalline thin slice 104, polarization point
Luminescent crystal 105, the second birefringence monocrystalline thin slice 106.
First birefringence monocrystalline thin slice 104 is used to receive the incident pulse laser of micropulse laser device 101 and changes transmitting
The polarization state of laser, so that the polarization direction of light pulse is consistent with the polarization direction of polarization spectro crystal 105.
By controlling the polarization direction of light pulse consistent with the polarization direction of polarization spectro crystal 105, so as to ensure pulse
Laser enters telescope 107 by polarization spectro crystal 105 completely.In the present embodiment, the first birefringence monocrystalline thin slice 104 is used
Half-wave plate, certain thickness birefringece crystal, when the light of normal incidence is passed through, between ordinary light (o light) and non-ordinary light (e light)
Phase difference be equal to π or its odd-multiple, such chip is referred to as 1/2nd wave plates, i.e. half-wave plate.
Polarization spectro crystal 105 is used to carry out polarization separation to pulse laser and is incident to the second birefringence monocrystalline thin slice
106。
In the present embodiment, polarization spectro crystal 105 is the then glue by being coated with multi-layer film structure on the inclined-plane of right-angle prism
Synthesize a cube structure, using light using P polarization light transmission during Brewster angle incidence as 1 and S-polarization light transmission
Property less than 1, after light is with Brewster angle multipass multi-layer film structure, reaches that the P-polarization component made is completely saturating
Cross, and a kind of optical element of most S-polarization component reflections (at least more than 90%).
Second birefringence monocrystalline thin slice 106 is used to pulse laser being changed into circular polarization state by linear polarization state, is incorporated to
It is incident upon telescope 107.
In the present embodiment, the second birefringence monocrystalline thin slice 106 uses quarter-wave plate.When light normal incidence is passed through,
Position difference between ordinary light (o light) and non-ordinary light (e light) is equal to pi/2 or its odd-multiple, and such chip is referred to as a quarter
Wave plate.
Telescope 107 is used to send pulse laser and expands the diameter of pulse laser and reduce the diverging of pulse laser
Angle, and for receiving the back scattered echo-signal input light polarization manipulation device 103 of detected target.
It should be noted that in the present embodiment, telescope 107 uses autocollimator, for example, Cassegrain looks in the distance
Mirror.Autocollimator has small volume, the characteristics of cost is low, so that the laser radar apparatus assembled is easy to carry
Mirror has small volume, the characteristics of cost is low, so that the laser radar apparatus assembled is easy to carry.
Light polarization processing unit 103 is additionally operable to echo-signal being changed into linear polarization state by circular polarization state and inputs arrowband
Optical filter 108, narrow band pass filter 108 is used for wave band where extracting echo-signal or intends the wavelength of detection parameter and eliminate background
Signal simultaneously inputs diaphragm 109, and diaphragm 109 is used to receive the incident echo-signal of narrow band pass filter 108, to determine laser radar apparatus
Field of view of receiver angle, so that the influence of background signal and other hash to echo-signal is reduced, so as to improve signal to noise ratio, most
Echo-signal is incident to photodetector 110 afterwards.
Wherein, narrow band pass filter 108 refers to allow optical signal to pass through in specific wave band, and deviates beyond this wave band
The optical element that two optical signals are prevented from, the passband of narrow band pass filter 108 is comparatively narrow, generally centre wavelength value
Less than 5%;Diaphragm 109 is the edge, framework or the barrier with holes especially set of optical element in optical system part, and size is by saturating
Picture frame and the decision of other metal frames, as diaphragm 109.
Photodetector 110, photodetector 110 is used to echo-signal is converted into electric signal from optical signal and sent.
In the present embodiment, photodetector 110 can use photomultiplier or semiconductor photo diode or snowslide light
Electric diode, is not limited herein.
Second embodiment
Referring to Fig. 2, the embodiment of the present invention additionally provides a kind of laser radar detecting system, including intelligent terminal 112, thunder
Up to data acquisition card 111 and the laser radar apparatus of embodiment one.Laser radar apparatus, radar signal capture card 111 and
Communication connection is set up between intelligent terminal 112, radar signal capture card 111 is used for the telecommunications for receiving the transmission of photodetector 110
Number and electric signal send to intelligent terminal 112, intelligent terminal 112 is used to electric signal carrying out data processing and shown.
Further, laser radar detecting system also includes support frame 113, control board and two motors 116,
As shown in figure 3, laser radar apparatus, two motors 116 are mounted in support frame 113, the present embodiment, support frame 113
Using tripod, tripod is used for fixed laser radar installations, can view of freedom by adjusting that the height of tripod causes with angle
Survey.As shown in figure 4, control board is disposed with controller 114, wireless communication module 115, controller 114 respectively with channel radio
Letter module 115, two motors 116 are electrically connected, and controller 114 is used to receive intelligent terminal by wireless communication module 115
112 send angular turn instruction, and drive the laser radar apparatus according to angular turn instruction control motor 116
Rotate.
Specifically, two motors 116 can control horizontal rotation and the vertical rotary of laser radar apparatus respectively, pass through
Intelligent terminal 112 sends operational order to controller 114, so as to control two control laser radars of motor 116 can be any
Angular turn, so as to realize automatic continuous observation.
In summary, the present invention is provided a kind of laser radar apparatus and laser radar detecting system, by the way that laser is sent out
Raw device is set to micropulse laser device, and micropulse laser device possesses small volume, the characteristics of cost is low, while by telescope using anti-
Formula telescope is penetrated, autocollimator also has small volume, the characteristics of cost is low, so that the laser radar dress assembled
Put and be easy to carry, furthermore by being filtered to the micropulse laser device of laser radar apparatus, light polarization processing unit, telescope, arrowband
The topology layout of mating plate and photodetector, simplifies the internal structure of laser radar apparatus, so as to further reduce sharp
The volume and weight of optical radar device, and cost is saved, it is light and handy convenient, it is easy to carry.
The preferred embodiments of the present invention are the foregoing is only, are not intended to limit the invention, for the skill of this area
For art personnel, the present invention can have various modifications and variations.Within the spirit and principles of the invention, that is made any repaiies
Change, equivalent substitution, improvement etc., should be included in the scope of the protection.
Claims (10)
1. a kind of laser radar apparatus, it is characterised in that the laser radar apparatus includes micropulse laser device, light polarization processing
Device, telescope, narrow band pass filter and photodetector,
The micropulse laser device is used to producing and sending the incident entering light polarization manipulation device of pulse laser, the light polarization processing
Device is used for the polarization state for changing pulse laser and pulse laser is changed into circular polarization state from linear polarization state, inputs described hope
Remote mirror;
The telescope is used to send pulse laser and expands the diameter of pulsed laser spot and reduce the diverging of pulse laser
Angle, and input the light polarization processing unit for receiving the back scattered echo-signal of detected target;
The light polarization processing unit is additionally operable to echo-signal being changed into linear polarization state by circular polarization state and inputted described narrow
Band optical filter, the narrow band pass filter is used for wave band where extracting echo-signal or intends the wavelength of detection parameter and eliminate background
Signal simultaneously inputs photodetector, and the photodetector is used to echo-signal is converted into electric signal from optical signal and sent.
2. laser radar apparatus according to claim 1, it is characterised in that the micropulse laser device is yttrium-aluminium-garnet
Laser or ruby laser or neodymium glass laser or nitrogen molecular laser or excimer laser.
3. laser radar apparatus according to claim 1, it is characterised in that the telescope is autocollimator.
4. laser radar apparatus according to claim 1, it is characterised in that the light polarization processing unit includes first pair
Monocrystalline thin slice, polarization spectro crystal, the second birefringence monocrystalline thin slice are reflected,
The first birefringence monocrystalline thin slice is used to receive the incident pulse laser of the micropulse laser device and change transmitting to swash
The polarization state of light, so that the polarization direction of light pulse is consistent with the polarization direction of the polarization spectro crystal,
The polarization spectro crystal is used to carry out polarization separation to pulse laser and is incident to the second birefringence monocrystalline thin slice;
The second birefringence monocrystalline thin slice is used to pulse laser being changed into circular polarization state by linear polarization state, and is incident to
The telescope.
5. laser radar apparatus according to claim 4, it is characterised in that the first birefringence monocrystalline thin slice is half-wave
Piece, the second birefringence monocrystalline thin slice is quarter-wave plate.
6. laser radar apparatus according to claim 1, it is characterised in that the laser radar apparatus also includes optically isolated
Device, the optoisolator is used for separating echo signal reflex and returns the micropulse laser device.
7. laser radar apparatus according to claim 1, it is characterised in that the laser radar apparatus also includes diaphragm,
The diaphragm is used to receive the incident echo-signal of the narrow band pass filter, to determine the field of view of receiver angle of laser radar apparatus, and
Echo-signal is incident to the photodetector.
8. laser radar apparatus according to claim 1, it is characterised in that the photodetector be photomultiplier or
Semiconductor photo diode or avalanche photodide.
9. a kind of laser radar detecting system, it is characterised in that including intelligent terminal, radar signal capture card and claim
1~8 any described laser radar apparatus, the laser radar apparatus, the radar signal capture card and the intelligence are eventually
Communication connection is set up between end, the radar signal capture card is used to receive electric signal and the telecommunications that the photodetector is sent
Number send to the intelligent terminal, the intelligent terminal is used to the electric signal carrying out data processing and shown.
10. laser radar detecting system according to claim 9, it is characterised in that the laser radar detecting system is also
Including support frame, control board and two motors, the laser radar apparatus, described two motors are mounted on
Support frame as described above, the control board is disposed with controller, wireless communication module, the controller respectively with the channel radio
Believe module, two motor electrical connections, the controller is used to receive the intelligence by the wireless communication module
Terminal sends angular turn instruction, and drives the laser radar dress according to the angular turn instruction control motor
Put rotation.
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CN201710652897.XA CN107272013A (en) | 2017-08-02 | 2017-08-02 | Laser radar apparatus and laser radar detecting system |
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Cited By (7)
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CN108627812A (en) * | 2018-05-28 | 2018-10-09 | 成都信息工程大学 | A kind of laser radar atmospheric visibility measurement method and device |
CN108761424A (en) * | 2018-07-13 | 2018-11-06 | 深圳市速腾聚创科技有限公司 | Laser radar and laser radar control method |
CN109188679A (en) * | 2018-10-30 | 2019-01-11 | 宁波光舟通信技术有限公司 | Method of adjustment, device and the lens apparatus of lens apparatus |
CN110109136A (en) * | 2019-06-12 | 2019-08-09 | 卡门哈斯激光科技(苏州)有限公司 | A kind of compact laser radar range finding optical system |
CN110118960A (en) * | 2019-05-29 | 2019-08-13 | 深圳市镭神智能系统有限公司 | Laser radar |
CN110646776A (en) * | 2017-07-12 | 2020-01-03 | 通用汽车环球科技运作有限责任公司 | Chip-scale LIDAR with single MEMS scanner in compact optical package |
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