CN107262172B - Design and manufacturing method of lubricating oil particle separation device - Google Patents
Design and manufacturing method of lubricating oil particle separation device Download PDFInfo
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- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
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- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502761—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip specially adapted for handling suspended solids or molecules independently from the bulk fluid flow, e.g. for trapping or sorting beads, for physically stretching molecules
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0433—Moving fluids with specific forces or mechanical means specific forces vibrational forces
- B01L2400/0439—Moving fluids with specific forces or mechanical means specific forces vibrational forces ultrasonic vibrations, vibrating piezo elements
Abstract
The invention discloses a design and manufacturing method of a lubricating oil particle separation device. Because the interference of Surface Acoustic Wave (SAW) will produce the standing wave of surface acoustic wave (SSAW) field, so when the lubricating oil containing microgranule is soaked in the microflow channel, the microgranule will receive the acoustic radiation force effect, make the microgranule move to the sound pressure node, thus achieve the goal of separating the microgranule, and adjust different Surface Acoustic Wave (SAW) emission frequency and can separate the microgranule of different particle diameters. The invention can be applied to the particle separation in the power system lubrication, can separate suspended particles with the particle size of 10-60 mu m, monitors the abrasion condition of the lubricating oil particles in the power system to the mechanical kinematic pair, and simultaneously, the separated engine oil can be repeatedly reused.
Description
Technical Field
The invention belongs to the field of mechanical fault diagnosis, and particularly relates to a lubricating oil particle separation technology.
Background
The engine, transmission system and hydraulic system of the engineering machinery all use lubricating oil, and the lubricating oil is the 'blood' of the machine equipment and plays important roles of sealing, lubricating, antifriction, cooling, cleaning, shock absorption, corrosion prevention and the like. Uk joster tribology reports indicate that 70% of mechanical equipment surface failures are due to wear and corrosion, primarily due to oil contamination and inadequate lubrication; consultative research projects of the Chinese institute in 2006 show that the estimated year of the cost consumed in the aspects of friction, abrasion and lubrication is 9500 million yuan, if tribology and lubrication knowledge can be correctly applied, 3270 million yuan can be saved, equipment failure can be greatly reduced, and loss caused by downtime can be reduced
[1]. The particle size and components of the particles in the lubricating oil are detected and researched, so that the abrasion degree and the abrasion type (such as adhesion, fatigue, corrosion and the like) of mechanical parts can be deduced, the abrasion speed is controlled, the service life of equipment is prolonged, and catastrophic accidents are avoided.
The quality detection and dynamic analysis of lubricating oil have become one of the important means for the diagnosis and health assessment of mechanical equipment. During normal operation of the machine, the size of the abrasive dust particles is usually between 1 and 10 μm, most of the abrasive dust particles are below 2 μm, and only a few particles are larger than 15 μm and have low concentration. When abnormal wear occurs due to overload or over-speedThe size of the particles is obviously increased and can reach 10-50 mu m, and a few particles are more than 150 mu m
[2]. The research shows that
[3]Whether the particles generated by the abrasion of the running parts of the equipment or the particles generated by other pollution have the largest influence on the equipment by the particles with the size of 20-30 mu m, the longer the running time is, the larger the abrasion particles are, the particles with the size of less than 1 mu m have no influence on the abrasion, and the particles with the size of more than 100 mu m can be checked by a magnetic plug
[4]And collecting and removing the waste liquid by the methods. Therefore, the solid particles with the particle size of 1-60 μm suspended in the lubricating oil become the focus of monitoring, the equipment wear particles suspended in the lubricating oil carry a great deal of information with research value, and the acquisition and processing of the information can be used for judging the wear condition of parts, evaluating the machine operating condition and predicting the health life of equipment, deducing the possible part and reason of the fault, and effectively preventing the occurrence of catastrophic faults
[2]. Continuous on-line monitoring of lubricating oils is therefore becoming critical, and the traditional methods of lubricating oil detection have been analysis in the laboratory by methods such as spectroscopic analysis
[5]And iron spectrum analysis method
[6]And the like. Although the traditional analysis method can provide comprehensive information of the abrasion of the parts of the equipment, and the detection result has certain accuracy, the detection result is still relatively discrete even for experienced engineering analysts due to strong technical performance, strict requirement on the detection environment, high equipment cost, long test time and susceptibility to uncertain factors. The off-line laboratory detection cannot provide real-time information of the health condition of the machine equipment, and the accident risk of equipment in service is increased due to the lag of the laboratory detection information.
In recent decades, some online lubricating oil monitoring devices have been developed abroad to enable real-time diagnosis of mechanical equipment. Hager et al (1986)
[7]Pleper et al (1988)
[8]Martin et al (1989)
[9]Glavas et al (1993)
[10]The oil quality of the lubricating oil is judged by reflecting the amplitude change of the acoustic wave by applying an acoustic emission detection technology, but the method is easily interfered by mechanical background sound and the temperature change of the lubricating oil. Keller et al (1989)
[11]Flanagan et al (1990)
[12]Flynn et al (1995)
[13]The capacitance sensor is used for detecting the dielectric constant change of the lubricating oil, the detection result is often complicated by the oil performance and the oil environment temperature change, and the size and the concentration of particles can not be determined by the measurement of the dielectric constant. In 1995, Reintles et al
[14]It has been experimentally confirmed that the scatterometry optical method is capable of detecting particles in lubricating oils, but the accuracy of the measurement is affected by the optical properties of the particles (e.g., refractive index, particle shape, oil clarity and the presence of voids). Liu et al (2000)
[15]The capacitance sensing detection method is further improved, not only iron particles but also other non-ferrous metal particles can be detected, but only particles with the particle diameter larger than 100 mu m can be detected, and particles smaller than 100 mu m cannot be detected. Peng et al (2005)
[16]The relationship between the lubricating oil and the vibration of the particulate is studied, and the wear condition of the equipment is judged by comparison with the vibration spectrum, the judgment result depending on the vibration spectrum studied earlier. Iwai et al (2010)
[17]The wear quantitative evaluation is carried out by utilizing the real-time measurement of the wear debris of the lubricating oil, the quantitative evaluation technology of the wear amount of the equipment is developed by utilizing an online particle counter, the total amount of the debris is regarded as the quality loss of a test sample in the evaluation process, pollutants and combustion products in the lubricating oil are ignored, and the wear degree is exaggerated. Ashish et al (2011)
[18]By utilizing a magnetic field frequency division multiplexing technology, a multi-channel impedance pulse sensor is adopted for shunting, but each frequency needs to correspond to a single channel; yilmaz et al (2011)
[19]The particles of 9.9 μm can be separated out by a series of expansion and contraction methods, but only the convection velocity<The oil at 200mL/min is subjected to particle concentration. Du et al (2012)
[20]The oil fragment magnetic field sensor with seven channels arranged in parallel is adopted to monitor metal fragments in the lubricating oil, particles with particle sizes of 75-105 μm and 125-150 μm in different flow rates are successfully separated, the output detection is 7 times larger than that of a single channel, and the monitored particle size is larger. Liang et al (2014)
[21]A new asymmetric corner sharpening method is provided for monitoring the particle concentration of high flow, the method has low sensitivity to the oil flow speed, 9.94 mu m of particles can be separated, but the method needs to arrange a series of corner sharpening and has a complex monitoring structure. In recent years, abroadParticle separation technique in which ultrasonic standing waves occur
[22]The ultrasonic separation or aggregation technology is adopted, so that the analysis result with higher selectivity, accuracy and reliability can be obtained, the theme group of Jiangsu university considers the ancestor and the like (2014), and the ultrasonic standing wave field is utilized to move micron-sized suspended particles in continuous fluid by utilizing the transverse acoustic radiation force generated by the suspended particles in the fluid to carry out pretreatment preliminary verification experiment
[23]However, the lubricating oil separation device is built by adopting the sticking SAW method, the separation effect is not obvious, the accuracy of the sticking position has great influence on the generation of the standing wave field, and the particle size of the separated particles is single because the frequency of the interdigital electrode is fixed.
The invention discloses a control method for centralizing and separating suspended particles of lubricating oil from a force-electricity coupling theory and particle centralizing and separating technical experiments.
Reference to the literature
[1] "Xiyoubai" research on the status of tribology science and engineering application and development strategy 2009, higher education publishers.
[2]Tucker,J.,T.Galie,A.Schultz,C.Lu,et al.,LASERNET fines opticalwear debris monitor:a Navy shipboard evaluation of CBM enablingtechnology.54th Mach Fail Prev Technol Proc,2000:191-199.
[3] Xiaohan beam, ferrographic technique and its application in mechanical monitoring and diagnosis, 1993, Beijing, people's traffic press.
[4]Showalter,S.,S.Pingalkar,and S.Pasha.Oil debris monitoring inaerospace engines and helicopter transmissions.in Physics and Technology ofSensors (ISPTS),20121st International Symposium on.2012.IEEE.
[5]Tan,C.K.,P.Irving,and D.Mba,Diagnostics and prognostics withacoustic emission,vibration and spectrometric oil analysis for spur gears–acomparative study.Insight-Non-Destructive Testing and Condition Monitoring,2005.47(8):478-480.
[6]Leugner,L.,Use of sediment tests and wear metals analyses tomonitor hydraulic system condition.Lubr.Eng,1987.43(5):365-369.
[7]Hager,H.E.,Fluid property evaluation by piezoelectric crystalsoperating in the thickness shear mode.Chemical Engineering Communications,1986.43(1-3):25-38.
[8]Pieper,K.A.and I.J.Taylor,In-Line Wear Monitor,1989,DTIC Document.
[9]Martin,S.,A.Ricco,T.Niemczyk,and G.Frye,Characterization of SHacoustic plate mode liquid sensors.Sensors and Actuators,1989.20(3):253-268.
[10]Khandaker,I.,E.Glavas,and G.Jones,A fibre-optic oil conditionmonitor based on chromatic modulation.Measurement Science and Technology,1993.4(5):608.
[11]Keller,M.and C.Saba,Monitoring of ester base lubricants bydielectric constant.Lubrication engineering,1989.45(6):347-351.
[12]Flanagan,I.,J.Jordan,and H.Whittington,An inductive method forestimating the composition and size of metal particles.Measurement Scienceand Technology,1990.1(5):381.
[13]Flynn,B.and H.Whittington,Improved transducer design for machinewear debris monitoring.Electronics Letters,1995.31(3):177-179.
[14]Mahon,J.R.R.,M.Duncan,L.Jankersleyl,A.Schultz,et al.,OpticalDebris Monitoring.Vibration Institute,1995:263.
[15]Liu,Y.,Z.Liu,Y.Xie,and Z.Yao,Research on an on-line wearcondition monitoring system for marine diesel engine.Tribology International,2000.33(12):829-835.
[16]Peng,Z.,N.Kessissoglou,and M.Cox,A study of the effect ofcontaminant particles in lubricants using wear debris and vibration conditionmonitoring techniques.Wear,2005.258(11):1651-1662.
[17]Iwai,Y.,T.Honda,T.Miyajima,S.Yoshinaga,et al.,Quantitativeestimation of wear amounts by real time measurement of wear debris inlubricating oil.Tribology International,2010.43(1):388-394.
[18]Jagtiani,A.V.,J.Carletta,and J.Zhe,A microfluidic multichannelresistive pulse sensor using frequency division multiplexing for highthroughput counting ofmicro particles.Journal ofMicromechanics andMicroengineering,2011.21(6):065004.
[19]Yilmaz,N.and B.Morton,Effects of preheating vegetable oils onperformance and emission characteristics oftwo diesel engines.Biomass andBioenergy,2011.35(5):2028-2033.
[20]Du,L.and J.Zhe,Parallel sensing ofmetallic wear debris inlubricants using undersampling dataprocessing.Tribology International,2012.53:28-34.
[21]Fan,L.-L.,Y.Han,X.-K.He,L.Zhao,et al.,High-throughput,single-stream microparticle focusing using a microchannel with asymmetric sharpcorners.Microfluidics andNanofluidics,2014:1-8.
[22]Shi,J.,X.Mao,D.Ahmed,A.Colletti,et al.,Focusing microparticles ina microfluidic channel with standing surface acoustic waves(SSAW).Lab Chip,2008,8(2):221-223.
[23] Consider ancestry, Wangkun, Luoxin, et al, preliminary studies of particle separation in viscous fluids based on ultrasound guided waves [ J ]. piezoelectric and acousto-optic, 2014,36(2): 178-.
Disclosure of Invention
The invention aims to provide a design and manufacturing method of a lubricating oil particle separation device, which aims to solve the problem of separating particles with different particle sizes in lubricating oil and construct a platform for online analysis of the oil quality of the lubricating oil and real-time diagnosis of the health condition of equipment.
In order to solve the above problems, the technical scheme adopted by the invention is as follows:
a design and manufacturing method of a lubricating oil particle separation device is characterized in that: directly printing symmetrical trapezoidal interdigital electrodes on a piezoelectric substrate to form a trapezoidal interdigital broadband surface acoustic wave transducer; laser etching processing between two symmetrical trapezoidal interdigital electrodes
Go outA microfluidic channel forming a microfluidic chip; the lubricating oil particle separation device formed by connecting the microfluidic chip and the lubricating oil loop is used for carrying out centralized and separated monitoring on particles.
The preparation method of the trapezoidal interdigital broadband surface acoustic wave transducer comprises the following steps: on a polarized piezoelectric substrate, trapezoidal interdigital electrodes are manufactured by adopting a low-temperature silver paste screen printing method to replace the original developing etching method, and the process is updated.
The manufacturing process of the micro-fluidic chip comprises the following steps: the laser etching technology is adopted, the technology of micro-flow channel processing is improved by combining the novel micro-nano processing technology, the laser etching method enables all channels to have overall consistency, and the coupling layer of SAW is reduced, so that energy loss is reduced, and stable laminar flow is formed.
The specific process of the concentrated and separated monitoring of the suspended particles comprises the following steps: and adjusting the wavelength of the SAW, adjusting and controlling a standing wave pressure node to separate particles with different particle sizes, and judging the particle separation condition by combining the observation of an ultra-well depth three-dimensional microscope.
The connection of the microfluidic chip and the lubricating oil loop is specifically as follows: by adopting a signal multipath technology, the working efficiency of particle detection is greatly improved, the risk of channel blockage is reduced, oil and fault diagnosis and analysis are carried out after the particles are scanned, and finally, the device is comprehensively evaluated and improved according to the experimental analysis result, and the lubricating oil after the particles are separated can be repeatedly reused.
A lubricating oil particle separating device is characterized in that: the lubricating oil is prepared by the method, and specifically comprises a microfluidic chip and a lubricating oil circuit connection part; the micro-fluidic chip takes a piezoelectric substrate as a carrier, and symmetrical trapezoidal interdigital electrodes are directly printed on the surface of the micro-fluidic chip by adopting a low-temperature silver paste screen printing method to form a trapezoidal interdigital broadband acoustic surface wave transducer; the microfluidic channel is directly etched in the middle of the two symmetrical trapezoidal interdigital electrodes by adopting a laser etching technology, and the channel direction is parallel to the interdigital direction, so that a microfluidic chip is formed; the micro-fluidic chip can be directly connected to a lubricating oil loop to form a lubricating oil particle separation device.
The invention has the beneficial effect. The invention is based on a trapezoid interdigital broadband surface acoustic wave transducer, and is excited on a piezoelectric substrate to generate a surface acoustic standing wave, and utilizes the acoustic radiation force of the surface acoustic standing wave on suspended particles in fluid to obtain the relation between the wavelength of the standing wave and the size of the particles. The technology for controlling concentration and separation of particles in lubricating oil with high integration, low energy consumption and low cost builds a platform for an efficient, rapid, accurate and cheap online parameter monitoring system of particles in lubricating oil, and has important significance for judging the pollution condition of lubricating oil, evaluating the performance of oil products, monitoring the state and fault diagnosis of equipment in time, guiding the establishment of a correct lubricating oil change period, equipment running-in specifications and the like.
Drawings
FIG. 1 is a schematic diagram of acoustic radiation force generation;
in the figure: 1. leaky wave 2, microfluidic channel 3, Surface Acoustic Wave (SAW) 4, interdigital electrode (IDT)5, surface acoustic wave (SSAW) 6, piezoelectric substrate.
FIG. 2 is a graph of rectangular interdigital surface acoustic wave transducers and frequency response.
FIG. 3 is a graph of a trapezoidal interdigital surface acoustic wave transducer and frequency response.
FIG. 4 is a diagram of a device for focusing and separating fluid particles in a standing wave field of an acoustic surface according to the present invention;
in the figure: 7. the device comprises a trapezoidal interdigital electrode 8, an antinode 9, a pressure node 10, a particle concentration stage 11 and a particle separation stage.
FIG. 5 is a schematic diagram of the operation of the test platform of the present invention.
FIG. 6 is a connection diagram of the microfluidic chip and the lubricating oil circuit according to the present invention.
Detailed Description
For better understanding of the technical solutions of the present invention, the present invention is further described in detail below with reference to the accompanying drawings and examples, and the technical parameters adopted by the examples are not limited to the present invention.
A trapezoid interdigital broadband surface acoustic wave transducer capable of forming a surface acoustic standing wave field has very clear physical significance for SSAW formation, and the technical realization needs to accurately set the sound source spacing, namely the relative spacing of interdigital on a substrate material.
An IDT is a two-terminal device with one electrode staggered as shown in fig. 1. When an alternating voltage is applied to the two terminals of the device, an alternating electric field is established in the substrate. Because the substrate is a piezoelectric body, the alternating electric field induces corresponding elastic vibrations in the substrate via the piezoelectric effect. Two traveling SAWs are generated that propagate each other, and the interference of the SAWs will generate a one-dimensional SSAW field, and when the particles are immersed in a fluid medium and an acoustic field is established in the fluid medium, the particles will be subjected to acoustic radiation forces, thereby moving the particles towards the acoustic pressure node. Due to the action of the acoustic radiation force, the particles move to the sound pressure node and finally converge into a straight line.
FIG. 2 shows an equally spaced interdigital SAW transducer structure having a frequency response function of
If it is considered that only the electric field perpendicular to the surface excites the SAW, the electric field distribution can be simplified, the electric field is considered to exist only under the interdigital electrodes, no electric field component is generated between the electrodes, the electric field of each electrode is positive and negative, the place where the electric field gradient is maximum can be considered as a series of pulses at the electrode edges, and when the sound source spacing is lambda/2, the overlapping length of each interdigital is equal, and the frequency is fixed. FIG. 3 is a ladder interdigital broadband surface acoustic wave transducer structure with a frequency response function of
When the distance between the sound sources is changed, the frequency is adjustable, so that a broadband SAW transducer can be formed, SAW with different frequencies can be generated, and suspended particles with different particle sizes can be separated.
As shown in fig. 4, when two SAW transducers apply the same excitation signal, two rows of SAWs with the same amplitude and frequency but opposite propagation directions are generated, and when the two rows of waves are superposed in the microchannel region, an SSAW field with only one node is generated, and particles in the standing wave field are acted by ultrasonic radiation force. The size of the acoustic radiation force changes in a sine rule mode, when the particles are far away from the nodes, the particles can do variable acceleration movement towards the nodes, the acceleration of the particle movement is smaller and smaller along with the shortening of the distance between the particles and the nodes, and further the critical balance point is reached, after the particles cross the balance point, the particles start to do deceleration movement, and finally stay near the nodes. And adjusting the wavelength of the SAW, and adjusting and controlling a pressure node of the standing wave to separate particles with different particle sizes.
In order to ensure the position and performance consistency of the surface acoustic wave transducer, rectangular and trapezoidal interdigital electrodes are directly subjected to screen printing on a piezoelectric substrate, the electrode shape and a micro-flow channel are designed on a screen mesh during design, then the rectangular and trapezoidal interdigital electrodes are directly printed on the same substrate material, the whole piezoelectric substrate is a micro-fluidic chip, the original developing etching method is replaced by a low-temperature silver paste screen printing method, the process is updated, the energy conversion of a pasting mode is reduced, and the acoustic radiation force generated by SAW in lubricating oil is greatly improved.
The microfluidic channels with the width of 500 micrometers and the depth of 150 micrometers are prepared at the positions of the printed microfluidic channels by adopting a laser etching preparation process, the energy loss of the microfluid is directly related to the geometric dimension of the microfluidic channels, the photoetching method can ensure that the overall consistency of all the channels is better, and the coupling layer of the SAW is reduced, so that the energy loss is reduced, and the stable laminar flow is formed.
As shown in fig. 5, the experimental process includes the combination process and technique of the fine components in the experimental apparatus, the injection and output of the lubricating oil, the injection of the iron ball particles, the formation of the micro-flow field, i.e. the setting of the flow rate and the flow rate; and (4) observing the motion of the micron-sized particles by using an ultra-well depth microscope, and quantitatively judging the size of the particles after the concentration effect is formed.
FIG. 6 illustrates the connection of the particle manipulation device to the lubrication circuit. When the particles are immersed in a fluid medium and an acoustic field is established in the fluid medium, the particles are subjected to acoustic radiation forces, which move the particles towards the acoustic pressure node. Due to the action of the acoustic radiation force, the particles move to the sound pressure node and finally converge into a straight line. The inhomogeneous field produces a main acoustic radiation force (in the z-direction, relative to the device plane) of the particles, which first focus along the channel width and then migrate along the channel height to the focal point, since the acoustic radiation force acting in the z-direction is weaker than the acoustic radiation force acting in the device plane. When the SSAW field acts on the multiphase fluid, particles and micro-cavitation bubbles in the fluid are influenced by the acoustic radiation force, and the research on the relationship between the acoustic radiation force of suspended particles in the fluid and the flow state, wavelength, particle volume, particle transverse position and the like of the fluid has important theoretical and engineering significance. The trapezoidal interdigital surface acoustic wave transducer has broadband characteristics, and can adjust the SAW wavelength, so that particles with different particle diameters can be separated by regulating and controlling standing wave pressure nodes, and the particle separation condition can be judged by combining the observation of an ultra-well depth three-dimensional microscope. Although the particle size that the present invention can be used to monitor and separate is 10 μm-60 μm, smaller or larger aerosols can be detected by adjusting the microfluidic channel and interdigital broadband surface acoustic wave transducer size.
Claims (3)
1. A design and manufacturing method of a lubricating oil particle separation device is characterized in that: directly printing symmetrical trapezoidal interdigital electrodes on a polarized piezoelectric substrate by adopting a low-temperature silver paste screen printing method to form a trapezoidal interdigital broadband surface acoustic wave transducer; processing a microfluidic channel between the two symmetrical trapezoidal interdigital electrodes by laser etching to form a microfluidic chip; the lubricating oil particle separation device is formed by connecting a micro-fluidic chip and a lubricating oil loop and is used for carrying out centralized and separated monitoring on particles;
the specific process of the concentration and separation monitoring of the particles is as follows: adjusting the wavelength of the SAW, adjusting and controlling a standing wave pressure node to separate particles with different particle sizes, judging the particle separation condition by combining the observation of an ultra-well depth three-dimensional microscope, and detecting smaller or larger suspended particles by adjusting the sizes of a micro-flow channel and an interdigital broadband surface acoustic wave transducer;
the connection of the microfluidic chip and the lubricating oil loop is specifically as follows: and (3) adopting a signal multipath technology to carry out oil product and fault diagnosis and analysis after particle scanning, and finally carrying out comprehensive evaluation and improvement on the device according to an experimental analysis result, wherein the lubricating oil after particle separation can be repeatedly reused.
2. The method of claim 1, wherein the microfluidic chip is fabricated by the steps of: the micro-flow channel processing technology is improved by adopting a laser etching technology and combining a micro-nano processing technology, and the laser etching method enables all channels to have overall consistency and reduces the coupling layer of SAW, thereby reducing energy loss and forming stable laminar flow.
3. A lubricating oil particle separating device is characterized in that: the micro-fluidic chip is prepared by the method of any one of claims 1-2, and specifically comprises a micro-fluidic chip and a lubricating oil circuit which are connected; the microfluidic chip takes a piezoelectric substrate as a carrier, and symmetric trapezoidal interdigital electrodes are directly printed on the surface of the microfluidic chip by adopting a low-temperature silver paste screen printing method to form a trapezoidal interdigital broadband acoustic surface wave transducer; the microfluidic channel is directly etched in the middle of the two symmetrical trapezoidal interdigital electrodes by adopting a precise laser etching technology, and the channel direction is parallel to the interdigital direction, so that a microfluidic chip is formed; the micro-fluidic chip is directly connected to a lubricating oil loop to form a lubricating oil particle separation device.
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| CN112870854B (en) * | 2021-01-18 | 2022-04-08 | 南京航空航天大学 | Standing wave switching type acoustic flow micro-control screening device and working method thereof |
| CN113029874B (en) * | 2021-02-24 | 2022-07-29 | 南京大学 | Device and method for measuring acoustic radiation force borne by free spherical particles in viscous fluid |
| CN113117766B (en) * | 2021-04-06 | 2022-08-02 | 杭州电子科技大学 | Acoustic tweezers for micro-fluidic |
| CN114367319B (en) * | 2021-12-30 | 2023-10-10 | 江苏大学 | Particle control device and method based on low-frequency vibration probe |
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