CN107248548B - A kind of wearable sound detector based on piezoelectric membrane - Google Patents
A kind of wearable sound detector based on piezoelectric membrane Download PDFInfo
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- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
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- H—ELECTRICITY
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- H10N30/85—Piezoelectric or electrostrictive active materials
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Abstract
A kind of wearable sound detector based on piezoelectric membrane, belongs to extending bioelectronics field.Piezoelectric material film in the wearable the sound detector snakelike reticular structure or snakelike fractal structure inserted using chessboard remain to the voice signal for steadily detecting people with certain tensility, and in the case where significantly stretching and being bent when use.The element manufacturing is at low cost, it is easy to accomplish large-scale industrial production.
Description
Technical field
The invention belongs to extending bioelectronics fields, and in particular to a kind of wearable sound spy based on piezoelectric membrane
Survey device.
Background technique
With the continuous development of electronic technology, people propose new demand, such as daily electricity to next-generation electronic product
The portability of sub- product, wearable property towards biologic medical electronics and implantable etc..Wearable electronic device has can
The advantages that stretching, be bent, reversing, overcomes the hard brittleness of the inorganic integrated device of conventional rigid, has rapidly become future
The important directions of electronic product development.Sound detector, the i.e. instrument of sound detecting have in fields such as voice recognition, sound decodings
Very important status.But traditional sound detector is rigid, and is easily disturbed by noise, so that it is relevant to people all
Mostly there are various limitations in application.Therefore, it studies and makes the wearable sound detector based on piezoelectric membrane, to wearable electronic
Development is of crucial importance with application.
For wearable electronic, wearable device includes wearable sound detector, and ductility is very important.Mesh
Preceding generally existing extending strategy is concentrated mainly on using serpentine configuration (Huang, Xian, et al.Materials and
designs for wireless epidermal sensors of hydration and strain.Advanced
Functional Materials 24,3846-3854 (2014)) etc.；But since this structure is cascaded structure, to pressure
For electric material, once some serpentine sector of material is broken, piezoelectric material will fail, so serious forgiveness is lower.
If can be made using generally existing chessboard embedded structure (Tessellate or Tessellation) in geometry
Piezoelectric material is in parallel connection, so that component failure caused by avoiding some unit from being broken, improves the stabilization of device
Property.But chessboard embedded structure does not have ductility, if there is tensile deformation, piezoelectric material is still easy to occur disconnected
It splits.
Wearable sound detector is varied, current wearable sound detector be according to used in it material and inspection sound mechanism come
Classification.(Park, J.J., Hyun, W.J., Mun, S.C., Park, Y.T.&Park, the O.O.Highly such as Park, J.J.
stretchable and wearable graphene strain sensors with controllable
sensitivity for human motion monitoring.ACS Appl.Mater.Interfaces 7,6317–6324
(2015)) use some nano materials to invent the sound detector based on piezoresistive effect, but this sound detector needs additional electricity
Source driving.(Manthey, W., Kroemer, N.&Magori, V.Ultrasonic the transducers and such as Manthey, W.
Transducerarrays for applications in air.Meas.Sci.Technol.3,249-261 (1992)) it is right
The sound detector of piezoelectric effect is studied, but the sensitivity of its piezoelectric effect sound detector is not high, and is exported and smaller actually answered
It still has difficulties in.Tao,L.Q.(Tao L.Q.,Tian H.,Liu Y.,et al.An intelligent
artificial throat with sound-sensing ability based on laser induced
Graphene.Nat.Commun.8,14579 (2017)) utilize graphene to invent the graphene sound detector based on Laser Driven；
This detector can detecte sound and make a sound, but this detector does not have tensility, and laser is needed to drive
Dynamic, detection and the process made a sound are easy mutual crosstalk.Above-mentioned sound detector needs power drives due to existing, and not having can
The problems such as ductility and weak output signal, can have many limitations in the application of wearable communication field, therefore develop and be based on
The wearable sound detector of piezoelectric membrane is particularly important.
Summary of the invention
In view of the defects in the background art, the present invention proposes a kind of wearable sound detector based on piezoelectric membrane, has
Effect solve traditional sound detector ductility can it is poor, need that additional power supply drives, output signal is weak, cost of manufacture is high, dressed
The unstable problem of performance in journey.Piezoelectric material layer in the wearable sound detector of the present invention is using inserted snakelike netted of chessboard
Structure or snakelike fractal structure with certain tensility when use, and remain to stablize in the case where significantly stretching and being bent
Detect the voice signal of people in ground.The element manufacturing is at low cost, it is easy to accomplish large-scale industrial production.
Technical scheme is as follows:
A kind of wearable sound detector based on piezoelectric membrane, including piezoelectric acoustic sensor, two extending snakelike metals
Interconnection line (3-1,3-2), two metallic conduction contacts (6-1,6-2), two layers of packaging film (1-1,1-2) and data acquisition and place
Reason system, the piezoelectric acoustic sensor is by top-down upper metal layer (4-1), piezoelectric material layer (5) and lower metal layer (4-
2) stacking obtains, wherein upper metal layer (4-1) and lower metal layer (4-2) pass through two extending snakelike metal interconnecting wires respectively
(3-1,3-2) and two metallic conduction contacts (6-1,6-2) are connected with data Collection & Processing System, data acquisition and procession system
After system is translated and is interpreted to the electric signal that piezoelectric acoustic sensor generates, output signal；It is characterized in that, the upper metal
Layer (4-1), piezoelectric material layer (5) and lower metal layer (4-2) are the inserted snakelike reticular structure or snake of the chessboard of hollow out
Shape fractal structure.
Further, the inserted snakelike reticular structure of the chessboard is the inserted planar junction of chessboard with ductility
The inserted snakelike reticular structure or six of the inserted snakelike reticular structure of structure, specially triangle chessboard, quadrangle chessboard
The inserted snakelike reticular structure of side shape chessboard.
Further, the inserted snakelike reticular structure of the chessboard of the hollow out and snakelike fractal structure use mechanical engraving
Method or laser cutting method obtain.The mechanical sculpturing machine that mechanical engraving method uses includes conveyor type or revolving mechanical engraving
Machine；The cutting machine that laser cutting method uses includes Silhouette Cameo, Silhouette Portrait or gloomy peak fiber
Laser cutting machine etc..
Further, the piezoelectric material layer (5) is organic piezoelectric materials, piezo-electric crystal or piezoelectric ceramics, is specially gathered
Vinylidene (PVDF), lead zirconate titanate (PZT) or barium titanate (BTO) etc..
Further, the upper metal layer (4-1) and lower metal layer (4-2) with a thickness of 0.1nm~10 μm, the piezoelectricity
Material layer 5 with a thickness of 10 μm~500 μm.
Further, the material of two layers of packaging film is the polymeric hardener that Young's modulus is 10kPa~100MPa
Object, specially PDMS (dimethyl silicone polymer), ecoflex (aliphatic aromatic atactic polyester), silicone (silicone),
PU (polyurethane) or 3M Tegaderm (transparent dressing) etc.；One layer of packaging film with a thickness of 0.01 μm~1000 μm.
Further, in the extending snakelike metal interconnecting wires and the inserted snakelike reticular structure of the chessboard of hollow out
Line width is 10 μm~2mm.
Further, the wearable sound detector based on piezoelectric membrane when in use, by piezoelectric acoustic Sensor section
It is adjacent to subject's lower jaw, two extending snakelike metal interconnection line sections are close to subject's face two sides, two conductive contact blades point
It is not wrapped in subject's spectacle frame, or through in two holes of cap or the helmet；When subject speaks, chews or laughs, under
Jaw can make corresponding stretching, extension or contractive action, cause piezoelectric acoustic sensor to generate stretching or bending deformation, to generate phase
The electric signal answered.Two metallic conduction contacts are separately connected the both ends of data Collection & Processing System, data acquisition and procession system
After system is translated and interpreted to the electric signal that piezoelectric acoustic sensor generates, the detection to sound is can be realized in output signal.
The invention has the benefit that
1, the snakelike reticular structure that the piezoelectric material film in the wearable sound detector of the present invention uses chessboard inserted, not only
Each region of piezoelectric material film is set to be in parallel connection, piezoelectric membrane has high serious forgiveness, it is not easy to be destroyed；And
And make piezoelectric material film that there is biggish ductility, stability is improved, very big voltage responsive is generated to elongation strain, that is, is had
There is biggish piezoelectric effect (stretching-voltage responsive).
2, the piezoelectric material film in the wearable sound detector of the present invention uses snakelike fractal structure, snakelike compared to common
Structure, snakelike fractal structure all have larger ductility horizontal and vertical, effectively increase the mechanics and electricity of piezoelectric material
Stability.
3, the wearable sound detector provided by the invention based on piezoelectric membrane, light weight, draftability is good, is significantly stretching
It will not be destroyed with lower device is bent, good mechanical property.
4, the wearable sound detector provided by the invention based on piezoelectric membrane is self-powered, and output is high and sensitivity is stablized,
The electric signal of collection can be translated into voice or text by signal processing software
5, the wearable sound detector low manufacture cost provided by the invention based on piezoelectric membrane, it is easy to accomplish large-scale industry
Metaplasia produces.
6, the wearable sound detector provided by the invention based on piezoelectric membrane is suitable for noisy and strong interference environment language
Exchange, such as in building site, tank, aircraft, aircraft carrier etc., may also aid in deaf-mute " lifting up one's voice ".
Detailed description of the invention
Fig. 1 is the schematic diagram of the inserted snakelike reticular structure of the chessboard of hollow out proposed by the present invention, including triangle chess
The inserted snakelike reticular structure of snakelike reticular structure (left side), the quadrangle chessboard of plate inlaid formula (in) and hexagon chessboard inlay
The snakelike reticular structure (right side) of formula.
Fig. 2 is the schematic diagram of the snakelike fractal structure of hollow out proposed by the present invention.
Fig. 3 is the structural schematic diagram of the wearable sound detector provided in an embodiment of the present invention based on piezoelectric membrane；Wherein, 1-
1 is the first silica gel thin film (polyurethane film), and 1-2 is the second silica gel thin film (polyurethane film), and 2-1 is the first kapton
Adhesive tape (polyimide layer), 2-2 are the second kapton adhesive tape (polyimide layer), and 3-1 is the first extending snakelike metal interconnection
Line (copper), 3-2 are the second extending snakelike metal interconnecting wires (copper), and 4-1 is upper metal layer (aluminium), and 4-2 is lower metal layer (aluminium),
5 be piezoelectric material layer (Kynoar), and 6-1 is the first metallic conduction contact (copper), and 6-2 is the second metallic conduction contact
(copper).
Fig. 4 is extending snakelike metal interconnection in the wearable sound detector provided in an embodiment of the present invention based on piezoelectric membrane
The schematic diagram and dimensional drawing of line and the inserted snakelike reticular structure of the chessboard of hollow out.
Fig. 5 is the wearing signal of the wearable sound detector provided in an embodiment of the present invention based on piezoelectric membrane when in use
Figure.
Fig. 6 is the actually detected signal graph of the wearable sound detector provided in an embodiment of the present invention based on piezoelectric membrane.
Specific embodiment
With reference to the accompanying drawings and examples, technical solution of the present invention is described in detail.
Fig. 1 is the schematic diagram of the inserted snakelike reticular structure of the chessboard of hollow out proposed by the present invention, including triangle chess
The inserted snakelike reticular structure of snakelike reticular structure (left side), the quadrangle chessboard of plate inlaid formula (in) and hexagon chessboard inlay
The snakelike reticular structure (right side) of formula.The structure is that each edge is modified as serpentine based on the inserted structure of chessboard
Shape, the inserted snakelike reticular structure of obtained chessboard not only have piezoelectric material very high for piezoelectric material
Ductility, and piezoelectric material is made to maintain good piezoelectricity output, three layers of upper metal layer, piezoelectric material layer and lower metal layer are simultaneously
It is coupled structure and also improves the mechanics and electrical stability of material.Fig. 2 is snakelike fractal structure schematic diagram proposed by the present invention, is compared
In common serpentine configuration, which all has larger ductility on horizontal and vertical, effectively increases the power of piezoelectric material
And electrical stability.Used in the examples is the inserted snakelike reticular structure of quadrangle chessboard in Fig. 1.
As shown in figure 3, being the structural schematic diagram of the wearable sound detector provided by the invention based on piezoelectric membrane；Including pressure
Electroacoustic sound sensor, two extending snakelike metal interconnecting wires (3-1,3-2), two metallic conduction contacts (6-1,6-2), two layers
Silica gel thin film (1-1,1-2) and data Collection & Processing System, wherein the piezoelectric acoustic sensor is completely overlapped by three layers
The film of the inserted snakelike reticular structure of the chessboard of hollow out or snakelike fractal structure is laminated to obtain, and is followed successively by from top to bottom
Metal layer (4-1), piezoelectric material layer 5 and lower metal layer (4-2), the upper metal layer (4-1) pass through the first kapton adhesive tape (2-
1) connect with the first extending snakelike metal interconnecting wires (3-1), lower metal layer (4-2) by the second kapton adhesive tape (2-2) with
Second extending snakelike metal interconnecting wires (3-2) are connected, and the first extending snakelike metal interconnecting wires (3-1), second can prolong
Snakelike metal interconnecting wires (3-2) are opened up respectively by the first metallic conduction contact (6-1), the second metallic conduction contact (6-2) and number
Be connected according to acquisition with processing system, data Collection & Processing System to the electric signal that piezoelectric acoustic sensor generates translate with
After interpretation, the detection to sound is can be realized in output signal；The piezoelectric acoustic sensor, two extending snakelike metals are mutual
Line (3-1,3-2) and two layers of kapton adhesive tape are by the first silica gel thin film (1-1) and the second silica gel thin film (1-2) encapsulation package.
Embodiment
The silica gel thin film (1-1,1-2) of wearable sound detector of the present embodiment based on piezoelectric membrane is that (polyurethane is thin by PU
Film), thickness is about 50 μm；Piezoelectric material layer is PVDF (Kynoar), and thickness is about 100 μm；Metal layer material is above and below
Aluminium deposits to the upper and lower surface of piezoelectric material layer by sputtering or evaporation coating method with a thickness of 6 μm；Extending snakelike metal is mutual
The material of line is copper, and thickness is about 10 μm；Metallic conduction contact material is copper, with a thickness of 20 μm；Kapton adhesive tape material is
PI (polyimides), thickness are about 65 μm；The snakelike reticular structure used the snakelike reticular structure inserted for quadrangle chessboard.
As shown in figure 4, in the wearable sound detector based on piezoelectric membrane: L1=1.56mm, W1=0.78mm, α=10 °, R1=
1.56mm W2=2mm, L3=8.06mm, R2=0.5mm, W3=0.3mm, θ=180 °.
As shown in figure 5, the use of wearable sound detector of the embodiment based on piezoelectric membrane, is described in detail below:
Piezoelectric acoustic Sensor section is adjacent to subject's lower jaw, two extending snakelike metal interconnection line sections be close to by
Examination person's face two sides, two conductive contact blades can be respectively wound around subject's spectacle frame, or through in two holes of cap or the helmet.
When subject speaks, chews or laughs, lower jaw can make corresponding stretching, extension or contractive action, and piezoelectric acoustic sensor is caused to produce
Raw stretching or bending deformation, to generate corresponding electric signal.Two metallic conduction contacts are separately connected data acquisition and procession
The both ends of system, it is defeated after the electric signal that data Collection & Processing System generates piezoelectric acoustic sensor is translated and interpreted
The detection to sound can be realized in signal out.
The wearable sound detector based on piezoelectric membrane of embodiment is worn to subject, its performance is tested.Fig. 6 is
The wearable sound detector of embodiment measures output voltage in subject's sounding and changes with time figure.It will be appreciated from fig. 6 that when tested
When the sound of the every sending " " of person, wearable sound detector can export a voltage change；When subject issues at regular intervals
When identical sound, wearable sound detector can export identical voltage waveform.It can be by the sensor by signal processing software
Electric signal is converted to corresponding sound or text.Therefore, the wearable sound detector provided by the invention based on piezoelectric membrane is being examined
High sensitivity when surveying sound, and it is with good stability, it is suitable for wearable electronic field.
Claims (8)
1. a kind of wearable sound detector based on piezoelectric membrane, including piezoelectric acoustic sensor, two extending snakelike metals are mutual
Line (3-1,3-2), two metallic conduction contacts (6-1,6-2), two layers of packaging film (1-1,1-2) and data acquisition and procession
System, the piezoelectric acoustic sensor is by top-down upper metal layer (4-1), piezoelectric material layer (5) and lower metal layer (4-2)
Stacking obtains, wherein upper metal layer (4-1) and lower metal layer (4-2) pass through two extending snakelike metal interconnecting wires (3- respectively
1,3-2) it is connected with two metallic conduction contacts (6-1,6-2) with data Collection & Processing System, data Collection & Processing System
After the electric signal that piezoelectric acoustic sensor generates is translated and is interpreted, output signal；It is characterized in that, the upper metal layer
(4-1), piezoelectric material layer (5) and lower metal layer (4-2) are the inserted snakelike reticular structure or snakelike of the chessboard of hollow out
Fractal structure.
2. the wearable sound detector according to claim 1 based on piezoelectric membrane, which is characterized in that the chessboard is inserted
Snakelike reticular structure be the inserted planar structure of chessboard with ductility, specially inserted snakelike of triangle chessboard
The inserted snakelike reticular structure of reticular structure, quadrangle chessboard or the inserted snakelike reticular structure of hexagon chessboard.
3. the wearable sound detector according to claim 1 based on piezoelectric membrane, which is characterized in that the chessboard of the hollow out
Inserted snakelike reticular structure and snakelike fractal structure are obtained using mechanical engraving method or laser cutting method.
4. the wearable sound detector according to claim 1 based on piezoelectric membrane, which is characterized in that the piezoelectric material layer
It (5) is organic piezoelectric materials, piezo-electric crystal or piezoelectric ceramics, specially Kynoar, lead zirconate titanate or barium titanate.
5. the wearable sound detector according to claim 1 based on piezoelectric membrane, which is characterized in that the upper metal layer
(4-1) and lower metal layer (4-2) with a thickness of 0.1nm~10 μm, the piezoelectric material layer (5) with a thickness of 10 μm~500 μm.
6. the wearable sound detector according to claim 1 based on piezoelectric membrane, which is characterized in that two layers of thinner package
The material of film is the macromolecular solid compound that Young's modulus is 10kPa~100MPa, specially PDMS, ecoflex, silicone,
PU or 3M Tegaderm.
7. the wearable sound detector according to claim 1 based on piezoelectric membrane, which is characterized in that described extending snakelike
Line width in metal interconnecting wires and the inserted snakelike reticular structure of the chessboard of hollow out is 10 μm~2mm.
8. the wearable sound detector according to claim 1 based on piezoelectric membrane, which is characterized in that described thin based on piezoelectricity
The wearable sound detector of film is adjacent to subject's lower jaw, two extending snakelike gold when in use, by piezoelectric acoustic Sensor section
Belong to interconnection line part and be close to subject's face two sides, two conductive contact blades are respectively wound around subject's spectacle frame, or through cap
In two holes of son or the helmet；When subject speaks, chews or laughs, lower jaw can make corresponding stretching, extension or contractive action, lead
Piezoelectric acoustic sensor is caused to generate stretching or bending deformation, to generate corresponding electric signal；Two metallic conduction contact difference
Connect the both ends of data Collection & Processing System, the electric signal that data Collection & Processing System generates piezoelectric acoustic sensor into
After row translation and interpretation, the detection to sound is can be realized in output signal.
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| CN114608630B (en) * | 2020-12-09 | 2023-03-31 | 腾讯科技（深圳）有限公司 | Touch sensor, parameter testing method and device thereof and storage medium |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105588585A (en) * | 2015-12-15 | 2016-05-18 | 感至源电子科技（上海）有限公司 | Composite shielding type piezoelectric film sensor |
| CN105990513A (en) * | 2015-03-23 | 2016-10-05 | 三星显示有限公司 | Piezoelectric device, piezoelectric sensor using the same, and wearable device having the same |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105990513A (en) * | 2015-03-23 | 2016-10-05 | 三星显示有限公司 | Piezoelectric device, piezoelectric sensor using the same, and wearable device having the same |
| CN105588585A (en) * | 2015-12-15 | 2016-05-18 | 感至源电子科技（上海）有限公司 | Composite shielding type piezoelectric film sensor |
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