CN107247821B - Method for stably floating and descending position-sensorless of moving-coil permanent magnet planar motor - Google Patents

Method for stably floating and descending position-sensorless of moving-coil permanent magnet planar motor Download PDF

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CN107247821B
CN107247821B CN201710314265.2A CN201710314265A CN107247821B CN 107247821 B CN107247821 B CN 107247821B CN 201710314265 A CN201710314265 A CN 201710314265A CN 107247821 B CN107247821 B CN 107247821B
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rotor
coil
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gap point
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陆华才
阮光正
陆昊
程聃
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Anhui Polytechnic University
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Abstract

The invention discloses a method for stably floating and descending a moving coil type permanent magnet planar motor without a position sensor, which belongs to the technical field of motor control, wherein when a rotor is controlled to float, an expected floating air gap height is given, namely an expected air gap point, the height of the false air gap point is calculated according to the expected floating air gap height, then coil array current is distributed to ensure that the rotor is balanced at the false air gap point, after the time of a delay threshold value, the speed of the rotor running to the expected air gap point is zero, the coil array current is distributed to ensure that the rotor is balanced at the expected air gap point, and the rotor stably floats at the expected air gap point; when the rotor is controlled to descend, the same false air gap point current as that of the rotor during floating control is distributed, the same threshold time is delayed, and the speed is zero when the rotor runs to the surface of the stator. The method saves an air gap sensor, saves cost, does not need to write complex positioning programs, saves equipment development and debugging time, does not need to frequently change distribution current, and has accurate positioning height and short positioning time.

Description

Method for stably floating and descending position-sensorless of moving-coil permanent magnet planar motor
Technical Field
The invention belongs to the technical field of motor control, and particularly relates to a stable floating and descending method of a position-free sensor of a moving-coil permanent magnet planar motor, which is suitable for the field of manufacturing equipment needing planar positioning, such as integrated circuit photoetching and packaging, MEMS (micro-electromechanical systems) device assembling and packaging, high-precision plotters and the like.
Background
The planar motor has the characteristics of ultrahigh motion precision and two-dimensional operation, and is widely applied to high-precision processing technologies, such as photoetching and packaging of integrated circuit chips, assembling and packaging of MEMS devices and the like. The moving-coil magnetic suspension permanent magnet planar motor is a large variety of planar motors, is valued by the academic and engineering circles at home and abroad due to the characteristic that a new generation of photoetching machine needs to operate in a vacuum environment, and becomes a research and development hotspot in the field of special motors.
In the starting stage of the moving-coil permanent magnet planar motor, the rotor must be controlled to suspend at a certain air gap height, and then the rotor can be controlled to perform two-dimensional motion on a horizontal plane at the height. In practical application, most of planar motors developed in enterprises and universities adopt modes such as compressed air blowing and floating, mechanical support and the like to perform height positioning of the rotor. The compressed air blowing and floating mode is simple to operate and controllable in height, only the air inlet is required to be adjusted to a certain air pressure through the pressure adjusting valve, but the compressed air blowing and floating mode has the defects of large error, large kinetic energy loss, large noise, low stability and the like, and in addition, when the machine is stopped, the rotor descends and possibly impacts the surface of the permanent magnet array stator. The mechanical support mode is better in the aspects of error, noise, stability and the like, but must be precisely calibrated before use, the operation time is long, the height is fixed, and in addition, the mechanical support mode increases the size and the installation difficulty of the motor and generates certain running resistance. Except the two modes, most of the planar motors using magnetic suspension height positioning adopt a mode that a plurality of air gap sensors are installed at the bottoms of the rotors to acquire real-time air gap height to control the suspension of the rotors, and the mode can carry out accurate positioning, but mounting holes are additionally designed on the rotors to place the air gap sensors, so that the cost is increased, and the calculation resources of a controller are occupied. Therefore, if a position-sensor-free suspension strategy can have the advantages of the above modes and overcome the defects, the development and popularization of the moving-coil magnetic suspension permanent magnet planar motor are certainly promoted.
Disclosure of Invention
According to the defects of the prior art, the technical problem to be solved by the invention is to provide a method for stably floating and descending a moving-coil permanent magnet planar motor without a position sensor, the height control of the existing moving-coil permanent magnet planar motor generally adopts position feedback PID control, and the method has the defects of complex programming, long positioning time, position jitter and the like because a rotor is generally required to be suspended at the height of 1-4 mm.
In order to solve the technical problems, the invention adopts the technical scheme that: a movable coil type permanent magnet planar motor non-position sensor stable floating and descending method is characterized in that a movable coil type permanent magnet planar motor is composed of a Halbach permanent magnet array serving as a stator and a coil array serving as a rotor, the coil array generates Z-axis direction suspension force after being electrified and X-axis and Y-axis horizontal thrust, when the rotor is controlled to float, the expected floating air gap height, namely an expected air gap point, is given, the height of a false air gap point is calculated according to the expected floating air gap height, then false air gap point current is distributed to enable the rotor to be balanced at the false air gap point, after time delay threshold time, the speed of the rotor running to the expected air gap point is zero, at the moment, the coil array current is distributed to enable the rotor to be balanced at the expected air gap point, and the rotor stably floats at the expected; when the rotor is controlled to descend, the same false air gap point current as that of the rotor during floating control is distributed, the same threshold time is delayed, and the speed is zero when the rotor runs to the surface of the stator.
In the method, the calculation formula for calculating the height of the false air gap point in the height of the false air gap point according to the height of the air gap expected to float is as follows:
Figure GDA0002643100930000021
in the formula zcfIs the false air gap point height, zceTo expect air gap point height, τnThe pole pitch of the stator permanent magnet array is shown. The formula for calculating the threshold time is:
Figure GDA0002643100930000022
in the formula TwIs the threshold time, g is the acceleration of gravity, zceTo expect air gap point height, τnIs the pole pitch, z, of the stator permanent magnet arraycThe actual position. When the rotor is controlled to float or descend, the specific method after calculating the false air gap point comprises the following steps: setting a power apparent zero threshold PzminDetection time window Δ T, threshold time Tw(ii) a Distributing coil array current I (z)ce) Starting delay waiting; time delay TwTime Δ T, start of mechanical power output of the detection coil arrayValue PzIf P isz≤PzminControl is done and if the purpose is to float, the coil array current I (z) is distributedce) And if the current is decreased, the current of the coil array is distributed to be zero, and the operation is finished. Setting PzminAnd Δ T satisfy the following condition: (1) detecting a time window Δ T<<Threshold time Tw(ii) a (2) The stable motion method is provided with the measured time tc，tcCalculating P for the terminal voltage and current sampling time of coilzSum of program run times, time of measurement
Figure GDA0002643100930000031
(3) Real-time measurement of mechanical power output value PzOutput power measurement accuracy P for accuracyztIndicating, output power measurement accuracy Pzt＜Pzmin(ii) a (4) The maximum power in the running process of the rotor is Pzmax，
Figure GDA0002643100930000032
Mechanical power output value PzThe terminal voltage and the terminal current of the rotor coil are detected and then calculated. In the method for stably floating and descending the position-less sensor of the moving-coil permanent magnet planar motor, after a pseudo air gap point is calculated, current enabling a rotor to move at the pseudo air gap point is distributed, mechanical output power detection is carried out after time delay, and the current is switched after the current is smaller than a set apparent zero threshold or exceeds time delay.
The invention has the beneficial effects that:
(1) an air gap sensor is omitted, and cost is saved;
(2) a complex positioning program is not required to be written, so that the time for developing and debugging the equipment is saved;
(3) the distributed current does not need to be changed frequently, and the system execution error is reduced;
(4) the positioning height is accurate;
(5) the positioning time is short;
drawings
The contents of the drawings and the reference numerals in the drawings are briefly described as follows:
fig. 1 is a structural plan view of a moving-coil permanent magnet planar motor according to an embodiment of the present invention.
Fig. 2 is a structural front view of a moving-coil permanent magnet planar motor according to an embodiment of the present invention.
Fig. 3 shows a specific size relationship between a permanent magnet array and a mover coil array according to an embodiment of the present invention.
Fig. 4 is a schematic structural diagram of a position sensorless control system of a moving-coil permanent magnet planar motor according to an embodiment of the present invention.
FIG. 5 is a flow chart of a method for stably floating and descending a position sensorless moving coil permanent magnet planar motor according to an embodiment of the present invention;
FIG. 6 is an exemplary graph of the speed of a mover controlled to move by the present method versus actual operation according to an embodiment of the present invention.
A1, a2, and A3 in fig. 1 or fig. 2 are coreless coils in the a coil unit of the mover; b1, B2, and B3 are coreless coils in the B coil unit of the mover; c1, C2, and C3 are coreless coils in the C coil unit of the mover; d1, D2, and D3 are coreless coils in the D coil units of the mover.
Detailed Description
The following description of the embodiments with reference to the drawings is provided to describe the embodiments of the present invention, and the embodiments of the present invention, such as the shapes and configurations of the components, the mutual positions and connection relationships of the components, the functions and working principles of the components, the manufacturing processes and the operation and use methods, etc., will be further described in detail to help those skilled in the art to more completely, accurately and deeply understand the inventive concept and technical solutions of the present invention.
Fig. 1 is a schematic diagram of a moving-coil permanent magnet planar motor, and a coordinate system, a stator permanent magnet array and a rotor coil array are arranged as shown in the figure. The moving-coil permanent magnet planar motor mainly comprises a stator and a rotor. The stator is formed by two-dimensional Halbach permanent magnet array, contains two kinds of different permanent magnet of volume, and big permanent magnet volume is twice of little permanent magnet volume, and two thickness equals. The mover contains A, B, C, D4 coil units, each unit in turn containing 3 coreless coils. In practical control, horizontal thrust in the x-axis direction of the mover is output by the unit A, C, horizontal thrust in the y-axis direction of the mover is output by the unit B, D, and levitation force in the z-axis direction of the mover is output by the unit A, C.
Fig. 3 shows a specific size relationship between the permanent magnet array and the mover coil array. Pole pitch of permanent magnet array is taunThe distance between the centers of two adjacent N poles is 2 taunRadial thickness of coil of 7 tau n12, coil spacing of 4Tn/3, effective coil length of 4 taunIn this dimensional relationship, a particular coil current is distributed to enable the rotor to obtain a force and torque that is convenient to calculate. Global coordinate system omxyz takes the center of the upper surface of a certain N-pole magnetic steel in the permanent magnet array as the origin and a local coordinate system OCXYZ takes the geometric center of the lower surface of the rotor coil array as an origin. Setting the origin O of a local coordinate systemCThe coordinate in the global coordinate system is PC＝(xc,yc,zc)。
A movable coil type permanent magnet planar motor non-position sensor stable floating and descending method is characterized in that a movable coil type permanent magnet planar motor is composed of a Halbach permanent magnet array serving as a stator and a coil array serving as a rotor, the coil array generates Z-axis direction suspension force after being electrified and X-axis and Y-axis horizontal thrust, when the rotor is controlled to float, the expected floating air gap height, namely an expected air gap point, is given, the height of a false air gap point is calculated according to the expected floating air gap height, then false air gap point current is distributed to enable the rotor to be balanced at the false air gap point, after time delay threshold time, the speed of the rotor running to the expected air gap point is zero, at the moment, the coil array current is distributed to enable the rotor to be balanced at the expected air gap point, and the rotor stably floats at the expected; when the rotor is controlled to descend, the same false air gap point current as that of the rotor during floating control is distributed, the same threshold time is delayed, and the speed is zero when the rotor runs to the surface of the stator.
Defining the anticlockwise direction as the positive direction of current, if the current is distributed to each coil of the rotor as follows:
Figure GDA0002643100930000051
Figure GDA0002643100930000052
neglect the fillet of coil, the winding is uneven, cross-section current distribution is uneven etc. influences, in equation (1), equation (2): i.e. iA1、iA2And iA3The distribution currents, i, of coils A1, A2 and A3 are shown, respectivelyC1、iC2And iC3The distribution currents, i, of the coils C1, C2 and C3 are shown, respectivelyB1、iB2And iB3The distribution currents, i, of coils B1, B2 and B3 are shown, respectivelyD1、iD2And iD3The distribution currents of the coils D1, D2 and D3 are respectively represented, IdzDenotes the distribution current amplitude, I, of A1, A2, A3, C1, C2, C3qzIndicating that B1, B2, B3, D1, D2, D3 distribute current amplitude,
Figure GDA0002643100930000053
Figure GDA0002643100930000054
and respectively representing the position angles of the local coordinate system measured in real time in the directions of the x axis and the y axis in the global coordinate system.
Figure GDA0002643100930000055
Figure GDA0002643100930000061
In formula (4):
Figure GDA0002643100930000062
the position of the local coordinate system measured in real time in the directions of x, y and z axes in the global coordinate system; x is the number ofc、yc、zcThe actual position of the local coordinate system in the directions of x, y and z axes in the global coordinate system; n is the number of turns of the coil; h is the thickness of the coil; b is0The fundamental wave magnetic induction intensity amplitude of the permanent magnet array at the position where the height of the air gap is 0 is adopted; fZThe rotor is subjected to suspension force; kfTo push awayA force coefficient; kt、K1、K2、K3Is the torque coefficient, KtAnd K1、K2、K3The ratio of (a) to (b) is related to the size of the coil matrix and the winding of the coils.
Coordinates measured while taking into account only the fundamental component of the magnetic field
Figure GDA0002643100930000063
With actual coordinates (x)c,yc,zc) The error is very small, and the combination of the thrust/torque borne by the mover under a local coordinate system can be obtained by using a Lorentz force formula as follows:
WM＝(FX,FY,FZ,TX,TY,TZ)T＝(0,0,FZ,0,0,0)T(5)
noting the height z of the movercThe combination of thrust and torque is WM＝(0,0,mg,0,0,0)T(wherein m is the rotor mass), that is, the current combination distributed to the rotor coil when the suspension force and the rotor gravity are balanced is as follows: i (z)c). In the formula (5) FX,FY,FZForce T applied to the mover in the directions of x, y and z axesX,TY,TZThe torque of the rotor in the directions of x, y and z axes is T is a vector transposition symbol.
The method for stably floating and descending the position-less sensor comprises the following specific steps:
setting a desired air gap point height to zceHeight z of the false air gap pointcfTrue position zcIf the current I (z) is distributedcf) Calculating to obtain the suspension force F borne by the rotorzComprises the following steps:
Figure GDA0002643100930000071
thus acceleration a of the moverzComprises the following steps:
Figure GDA0002643100930000072
during the floating process: order to
Figure GDA0002643100930000073
Mover speed v can be obtained by solving differential equation by substituting formula (7)z：
Figure GDA0002643100930000074
C in formula (8)0Setting v as initial state of floating process for undetermined constant of differential equation solutionz＝0，zcWhen 0, formula (8) can be substituted with:
Figure GDA0002643100930000075
in the floating stage vzMore than or equal to 0, substituting the formula (9) into the formula (8), and simplifying the formula:
Figure GDA0002643100930000076
at the highest point v z0 and wishes to stay at the desired air gap point height, then will zc＝zceCan be substituted by the formula (10):
Figure GDA0002643100930000077
the mathematical relation expression of the false air gap point and the air gap point can be obtained after the formula (11) is converted:
Figure GDA0002643100930000078
order to
Figure GDA0002643100930000079
And equation (12) together with equation (10), and integration yields:
Figure GDA0002643100930000081
t in formula (13)upThe time required for floating to the expected air gap point is as follows: initial state vz＝0，zc＝zceAlternatively, formula (8) may be:
Figure GDA0002643100930000082
in the descending phase vzSubstituting the formula (14) into the formula (8) to obtain the compound with the formula less than or equal to 0:
Figure GDA0002643100930000083
at zero height point vzWhen the ratio is 0, mixingcFormula (15) can be substituted with 0:
Figure GDA0002643100930000084
the mathematical relation expression of the false air gap point and the air gap point can be obtained after the formula (16) is converted:
Figure GDA0002643100930000085
the false air gap point in the descending process and the air gap point in the floating process are the same.
In the same way, the fall time T can be proveddownEqual to the floating time TupBoth are denoted as Tw. With the aid of mathematical tools, the rise and fall times can be calculated by equation (13).
(II) calculating the height z of the false air gap point according to the formula (12) in the step (I)cfAnd equation (13) to determine the rise and fall delay time Tw，
Figure GDA0002643100930000086
(III) setting a power apparent zero threshold value PzminDetecting a time window delta T;
power apparent zero threshold value PzminTo detect the mechanical power output value PzA threshold value regarded as zero, the detection time window DeltaT being at Tw- Δ T to TwSystem detection mechanical power output value P in + delta T delay timezIf P iszWhen the mover is equal to 0, the Z-axis speed is 0, and P is setzminAnd the delta T is required to meet the following conditions so as to facilitate correct type selection and meet the requirement of engineering application precision:
(1)ΔT＜＜Tw；
(2) measuring and calculating time
Figure GDA0002643100930000091
(3) Output power measurement accuracy Pzt＜Pzmin；
(4)
Figure GDA0002643100930000092
In the conditions: measuring and calculating time tcCalculating P for the terminal voltage and current sampling time of coilzSum of program run times; output power measurement accuracy PztFor measuring P in real timezThe accuracy of (2); pzmaxCalculating the maximum power of the mover in the operation process according to the following formula:
Figure GDA0002643100930000093
mechanical power output value PzThe voltage detection circuit is obtained by calculating after detecting the terminal voltage and the terminal current of the rotor coil, and the calculation formula is as follows: pz＝ΔPA+ΔPC。
(IV) distributing coil array current I (z)ce) (the mover balances levitation force and gravity at the pseudo air gap point to the current combination distributed to the mover coil), and starts delay waiting;
and (V) considering that the mover moves only in the direction of the z axis during the floating and descending processes, and keeps static in the directions of the x axis and the y axis. The coil of the rotor A, C unit provides all suspension force in the z direction, and the circuit meets the energy conservation law:
W＝WR+WM(19)
wherein W is the total energy consumed by the circuit; wREnergy dissipated for circuit resistance; wMMechanical energy output by the circuit.
Taking a short time Δ t, it is clear that equation (19) is satisfied during this time, according to the power energy equation:
Figure GDA0002643100930000094
wherein:
Figure GDA0002643100930000101
in the formula PA、PCTotal power is consumed for A, C cell current; pAR、PCRThermal power dissipated for the A, C cell resistor; u shapeA1、UA2、UA3And UC1、UC2、UC3A, C cell coil terminal voltages, respectively; i isA1、IA2、IA3And IC1、IC2、IC3A, C cell coil currents respectively; rA1、RA2、RA3And RC1、RC2、RC3A, C unit coil resistances respectively, wherein the coil resistances in the motor are all equal to R; delta SzThe displacement in the z direction is within the time of the rotor delta t; fzThe rotor is subjected to suspension force.
The formula (21) can be substituted for the formula (20):
FzΔSz＝(ΔPA+ΔPC)Δt (22)
wherein:
Figure GDA0002643100930000102
in the formula,. DELTA.PA、ΔPCMechanical output power measured for A, C cells.
Dividing both sides of equation (22) by Δ t yields:
Pz＝FzVz＝ΔPA+ΔPC(24)
mechanical output power P in the floating and descending process of rotorz> 0, and P is zero at the point where the air gap is floated and drops to zero height because of the velocity z0. Therefore, the mechanical output power can be calculated by measuring the terminal current and the terminal voltage of the coil to judge whether the speed is close to 0.
Delay TwTime Δ T, starting to detect mechanical power output value P of the coil arrayzIf P isz≤PzminControl is done and if the purpose is to float, the coil array current I (z) is distributedce) Current combinations distributed to the rotor coils are needed for balancing the suspension force and the gravity of the rotor at the expected air gap point, if the current combinations are descending, the coil array current is distributed to be zero, and the operation is finished;
(VI) if T is delayedwAnd (4) after the time of + delta T, if the step (V) is not completed, the operation is forced to be executed according to the operation after the step (V) is completed.
Distributing false air gap point height current I (z) during floating and descending in the moving process of the rotorcf) Then setting the system delay interruption and delay time Tw- Δ T after triggering a mechanical output power detection cycle.
Mechanical output power detection As shown in FIG. 4, since the coil of the mover A, C unit provides all the levitation force in the z-direction, the mechanical output power P is calculated by using the x-axis power calculation module in the position sensorless control system of the moving-coil permanent magnet planar motorz. When P is detectedz＜PzminWhen the speed of the mover is close to 0, the current can be switched to floating and descending according to the positioning target. And if the 2 delta T time elapses, P is still not detectedz＜PzminAnd forcibly considering that the positioning is finished, and switching the floating and descending currents according to the positioning purpose.
FIG. 6 is a graph showing the relationship between the speed of the mover and the time in an example using the method, and the first hump of the curve is the floating process of the mover, which can be seenThe speed has a process of increasing to decreasing in the forward direction, and after the desired air gap point the current is switched and the mover stays at zero speed. After suspending for 0.7s, the descending process is started, the second hump of the curve shows that the speed is increased to be reduced in the negative direction, the current is switched after the speed reaches zero, and the rotor stays on the surface of the stator. There is a process of repeated speed change as indicated by the ellipse in the figure, since the mover performs the descent control method from the desired air gap point position, due to the system performance error mover operation trunAfter the time delta T is reduced to zero height, the floating is continued to be started by the action of the floating force of the pseudo air gap point, and the mechanical output power is greater than PzminCannot satisfy the switching current condition Pz≤PzminThen the time reaches TwAfter + Δ T, i.e. the current is switched forcibly over the time window, the mover falls to the stator surface with a gravitational acceleration, which is seen from the last process that the velocity becomes negative and suddenly becomes zero, but since the free fall height of the mover is very small, it can be ignored.
According to the specific embodiment, the false air gap point current is simply distributed, then the mechanical output power detection is carried out after the time delay, and the current is switched when the current is smaller than the set apparent zero threshold or exceeds the time delay, so that the rotor can be quickly and accurately stopped at the target positioning position at zero speed.
The invention has been described above with reference to the accompanying drawings, it is obvious that the invention is not limited to the specific implementation in the above-described manner, and it is within the scope of the invention to apply the inventive concept and solution to other applications without substantial modification. The protection scope of the present invention shall be subject to the protection scope defined by the claims.

Claims (6)

1. A method for stably floating and descending a position-sensorless moving-coil permanent magnet planar motor is characterized by comprising the following steps: the moving-coil permanent-magnet planar motor is composed of a Halbach permanent-magnet array as a stator and a coil array as a rotor, and the coil array is produced after being electrifiedGenerating Z-axis direction suspension force and X-axis and Y-axis horizontal thrust, giving an air gap height expected to float, namely an expected air gap point, when the rotor floats, calculating the height of a false air gap point according to the air gap height expected to float, and then distributing a current I (Z) to the false air gap pointcf) After a delay threshold time, the mover is operated to zero speed at the desired air gap point, where it is assigned to the coil array current I (z)ce) Balancing the rotor at the expected air gap point, and stably suspending the rotor at the expected air gap point; when the mover is controlled to descend, the pseudo air gap point current I (z) of the mover is distributed as same as that of the mover when the mover is controlled to ascendcf) After the same threshold time is delayed, the speed is zero when the rotor runs to the surface of the stator, and the current distributed to the coil array is zero at the moment, so that the rotor stably stays on the surface of the stator; in the calculation of the height of the false air gap point according to the height of the air gap expected to float, the calculation formula of the height of the false air gap point is as follows:
Figure FDA0002629765830000011
in the formula ZcfIs the false air gap point height, zceTo expect air gap point height, τnThe pole pitch of the stator permanent magnet array is shown.
2. The method for stably floating and descending the position-less sensor of the moving-coil permanent-magnet planar motor according to claim 1, wherein the calculation formula of the threshold time is as follows:
Figure FDA0002629765830000012
in the formula TwIs the threshold time, g is the acceleration of gravity, zceTo expect air gap point height, τnFor the pole pitch, Z, of the stator permanent-magnet arraycThe actual position.
3. The method for stably floating and descending a position-less sensor of a moving-coil permanent-magnet planar motor according to claim 1, wherein when the rotor is controlled to float or descend, the specific operation after calculating the false air gap point is as follows: setting a power apparent zero threshold P of a coil arrayzminDetection time window Δ T, threshold time Tw(ii) a Is divided intoCurrent I (z) of the power distribution coil arrayce) Starting delay waiting; time delay TwTime Δ T, starting to detect mechanical power output value P of the coil arrayzIf P isz≤PzminControl is done and if the purpose is to float, the coil array current I (z) is distributedce) And if the current is decreased, the current of the coil array is distributed to be zero, and the operation is finished.
4. The method of claim 3, wherein P is set for stable floating and descending of a position sensorless position sensor of a moving coil permanent magnet planar motorzminAnd Δ T satisfy the following condition: (1) detecting a time window Δ T<<Threshold time Tw(ii) a (2) The stable floating and descending method is provided with the time t for measurement and calculationc，tcCalculating P for the terminal voltage and current sampling time of coilzSum of program run times, time of measurement
Figure FDA0002629765830000021
(3) Real-time measurement of mechanical power output value PzOutput power measurement accuracy P for accuracyztIndicating, output power measurement accuracy Pzt＜Pzmin(ii) a (4) The maximum power in the running process of the rotor is Pzmax，
Figure FDA0002629765830000022
5. The method for smoothly floating and descending a position sensorless of a moving coil permanent magnet planar motor according to claim 3, wherein the mechanical power output value PzThe terminal voltage and the terminal current of the rotor coil are detected and then calculated.
6. The method of claim 1, wherein in the method of floating and descending the planar motor without position sensor, after calculating the pseudo air gap point, distributing a current for balancing the levitation force and the gravity of the mover at the pseudo air gap point, and detecting the mechanical output power after a delay, wherein the current is switched after the detection is less than a set apparent zero threshold or the delay time is exceeded.
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