CN107247298A - A kind of medium film filter and YAG laser - Google Patents
A kind of medium film filter and YAG laser Download PDFInfo
- Publication number
- CN107247298A CN107247298A CN201710546982.8A CN201710546982A CN107247298A CN 107247298 A CN107247298 A CN 107247298A CN 201710546982 A CN201710546982 A CN 201710546982A CN 107247298 A CN107247298 A CN 107247298A
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- China
- Prior art keywords
- film filter
- medium film
- laser
- silicon substrate
- yag laser
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0057—Temporal shaping, e.g. pulse compression, frequency chirping
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Surface Treatment Of Optical Elements (AREA)
Abstract
The invention provides a kind of medium film filter and YAG laser, including：Silicon substrate, media coating and antireflection film layer；The media coating is arranged at the top of silicon substrate, and the antireflection film layer is arranged on silicon substrate bottom.The present invention realizes the shaping to light beam, and output intensity is distributed more uniform light beam；And the small volume of medium film filter, compact conformation is advantageously in integrated with active or passive optical device.
Description
Technical field
The present invention relates to laser beam shaping technical field, and in particular to a kind of medium film filter and YAG laser.
Background technology
It can realize that output beam is homogenized using beam shaping system in fiber optic communication systems.Medium film filter conduct
The core component of beam shaping system, directly affects the performance of beam shaping system.
Current medium film filter is used inserts deielectric-coating filter plate, the medium membrane filtration of this structure between two lens
Ripple body product it is larger, with other devices it is integrated on there is certain difficulty.It is existing to be situated between as laser technique is developed rapidly
Plasma membrane wave filter can not meet the requirement to beam shaping.Therefore it provides a kind of output beam is uniform, power stability and property
The problem of excellent medium film filter of energy is urgent need to resolve.
The content of the invention
For defect of the prior art, the present invention provides a kind of medium film filter and YAG (Yttrium
Aluminium Garnet) laser, the shaping to light beam is realized, and export the steep side of flat-top, the light beam of uniform and power stability.
To achieve the above object, the present invention provides following technical scheme：
On the one hand, the present invention provides a kind of medium film filter, including：Silicon substrate, media coating and antireflection film layer；
The media coating is arranged at the top of silicon substrate, and the antireflection film layer is arranged on silicon substrate bottom.Alternatively
Alternatively, multiple media coatings, which are stacked, is arranged at the top of silicon substrate, and the two neighboring media coating it
Between be provided with cavity.
Alternatively, the quantity of the media coating is 5 layers, and number of cavities is 4.
Alternatively, the structure of the media coating is：
Sub/(HL)6H(5L)H(LH)3L(HL)3H(5L)H(LH)2L(HL)2H(7L)H(LH)4L(HL)4H(7L)(HL)5H/
Air
Wherein, Sub is expressed as silicon substrate, and Air is expressed as sky, and H is tantalum pentoxide Ta2O5, L is silica SiO2。
Alternatively, the structure of the antireflection film layer is：
Air/0.404Ta2O51.2SiO2/Sub
Wherein, Sub is expressed as silicon substrate, and Air is expressed as sky.
Alternatively, the area of the medium film filter is：1mm×1mm.
On the other hand, the invention provides a kind of YAG laser, including：Laser generator and medium film filter；
The medium film filter is arranged on the laser exit of the laser generator, and the laser generator is sent
Laser beam carries out shaping, obtains the light beam on the steep side of narrow linewidth flat-top；
Wherein, the medium film filter is medium film filter described above.
Alternatively, the YAG laser also includes：Soft aperture slot；
The soft aperture slot is arranged between the laser generator and the medium film filter, occurs the laser
The laser beam that device is sent is exported after the soft aperture slot to the medium film filter.
Alternatively, the laser that the medium film filter is bonded in the laser generator is gone out using phenylpropyl alcohol cyclobutane
Mouthful.
Alternatively, the soft aperture slot is：Super-Gaussian type serrated apertures.
As shown from the above technical solution, a kind of medium film filter of the present invention and YAG laser, by being served as a contrast in silicon
Somatomedin film layer and antireflection film layer on bottom, realize the shaping to light beam, and output intensity is distributed more uniform light beam；
And the small volume of medium film filter, compact conformation is advantageously in integrated with active/passive optical device.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the accompanying drawing used required in technology description to be briefly described, it should be apparent that, drawings in the following description are the present invention
Some embodiments, for those of ordinary skill in the art, on the premise of not paying creative work, can also basis
These accompanying drawings obtain other accompanying drawings.
Fig. 1 is a kind of structural representation of medium film filter of the present invention；
Fig. 2 is a kind of structural representation of YAG laser of the present invention；
Fig. 3 is the structural representation of another YAG laser of the present invention；
Wherein, 1- laser exits, 2- medium film filters, 3- soft aperture slots.
Embodiment
To make the purpose, technical scheme and advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention
In accompanying drawing, clear, complete description is carried out to the technical scheme in the embodiment of the present invention, it is clear that described embodiment is
A part of embodiment of the present invention, rather than whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art
The every other embodiment obtained under the premise of creative work is not made, belongs to the scope of protection of the invention.
The embodiment of the present invention provides a kind of medium film filter, and referring to Fig. 1, the medium film filter includes：Silicon substrate, Jie
Plasma membrane layer and antireflection film layer；
The media coating is arranged at the top of silicon substrate, and the antireflection film layer is arranged on silicon substrate bottom.
In specific application, media coating is grown on silicon substrate front, and antireflective coating is grown on the back side of silicon substrate
Layer, wherein, media coating can be single layer structure, can also be sandwich construction, and multilayer dielectricity film layer stacks and is arranged on silicon substrate
Top, i.e., it is positive.It is parallel to each other between each adjacent media coating, and sky is constituted between adjacent media coating
Chamber, the cavity is Fabry-Bo Luo (Fabry-P é rot) chamber, and abbreviation F-P cavity uses SiO2As the filler of cavity, it will be situated between
Plasma membrane wave filter is cleaved into area：1mm × 1mm wave filter.
It was found from foregoing description, a kind of medium film filter provided in an embodiment of the present invention, by growing on a silicon substrate
Media coating and antireflection film layer, realize the shaping to light beam, and output intensity is distributed more uniform light beam；And medium
The small volume of film filter, compact conformation.
Further, the quantity of the media coating in above-described embodiment is 5 layers, and number of cavities is 4.
In specific application, five media coatings are chosen, the optical thickness of each cavity in four cavitys is reasonably designed,
The reflectivity of each media coating is set to reach more than 99%.The optical thickness of wherein each cavity is (1/2) λ0Integral multiple
(λ0=1550nm).
Further, the structure of the media coating in above-described embodiment is：
Sub/(HL)6H(5L)H(LH)3L(HL)3H(5L)H(LH)2L(HL)2H(7L)H(LH)4L(HL)4H(7L)(HL)5H/
Air
Wherein, Sub is expressed as silicon substrate, and Air is expressed as sky, and H is tantalum pentoxide Ta2O5, L is silica SiO2。
Further, the structure of the antireflection film layer in above-described embodiment is：
Air/0.404Ta2O51.2SiO2/Sub
Wherein, Sub is expressed as silicon substrate, and Air is expressed as sky.
It was found from foregoing description, a kind of medium film filter provided in an embodiment of the present invention realizes the shaping to light beam,
And output intensity is distributed more uniform light beam；And the small volume of medium film filter, compact conformation is advantageously in having
Source/Passive Optical Components it is integrated.
The embodiment of the present invention provides a kind of YAG laser, and referring to Fig. 2, the YAG laser includes：Laser generator and Jie
Plasma membrane wave filter；
The medium film filter is arranged on the laser exit of the laser generator, and the laser generator is sent
Laser beam carries out shaping, obtains the light beam on the steep side of narrow linewidth flat-top；
Wherein, the medium film filter is the medium film filter in above-described embodiment.
In specific application, using phenylpropyl alcohol cyclobutane (BCB) by medium film filter and the light-emitting window key of laser generator
It is combined, so that the light beam on the steep side of laser generator output flat-top narrow linewidth flat-top.
It was found from foregoing description, YAG laser provided in an embodiment of the present invention is filtered deielectric-coating by benzocyclobutene
The light-emitting window of device and laser generator be bonded together constitute output beam be the steep side of narrow linewidth flat-top YAG laser, realize
Output beam is uniform and YAG laser for flat-top steep side, reduces cost.
The embodiment of the present invention provides a kind of YAG laser, referring to Fig. 3, on the basis of above-mentioned YAG laser embodiment,
Also include：Soft aperture slot；
The soft aperture slot is arranged between the laser generator and the medium film filter, occurs the laser
The laser beam that device is sent is exported after the soft aperture slot to the medium film filter.
In specific application, soft aperture slot is to use super-Gaussian type serrated apertures, based on soft aperture slot diffraction theory, to soft
Marginal ray door screen numerical value is calculated, and determines that the dimensional parameters of corresponding serrated apertures, the number of teeth, form parameter are best suitable for this
Serrated apertures.
Δ (r)=(2 π r/2N) exp {-[(r-a)/w]n}
Wherein, N is the number of teeth；A, n, w are to influence the parameter of tooth form, and n determines that light beam is obtained after passing through soft aperture slot
The series of flat-top super-Gaussian distribution, n takes more than two grades of super-Gaussian distribution；R is soft aperture slot radial direction coordinate；W is soft-sided
The angle in diaphragm footpath；Δ is soft aperture slot between cog width.
It was found from foregoing description, the present embodiment causes laser transmittance high using soft aperture slot, and energy loss is few, damage threshold
Value is high, while reducing cost, is conducive to improving the power output of laser power, power output is more stablized.
Above example is merely to illustrate technical scheme, rather than its limitations；Although with reference to the foregoing embodiments
The present invention is described in detail, it will be understood by those within the art that：It still can be to foregoing each implementation
Technical scheme described in example is modified, or carries out equivalent substitution to which part technical characteristic；And these are changed or replaced
Change, the essence of appropriate technical solution is departed from the spirit and scope of various embodiments of the present invention technical scheme.
Claims (10)
1. a kind of medium film filter, it is characterised in that the medium film filter includes：Silicon substrate, media coating and anti-reflection
Penetrate film layer；
The media coating is arranged at the top of silicon substrate, and the antireflection film layer is arranged on silicon substrate bottom.
2. medium film filter according to claim 1, it is characterised in that multiple media coatings, which are stacked, is arranged on silicon
Cavity is provided between substrate top, and the two neighboring media coating.
3. medium film filter according to claim 2, it is characterised in that the quantity of the media coating is 5 layers, cavity
Quantity is 4.
4. medium film filter according to claim 1 or 2, it is characterised in that the structure of the media coating is：
Sub/(HL)6H(5L)H(LH)3L(HL)3H(5L)H(LH)2L(HL)2H(7L)H(LH)4L(HL)4H(7L)(HL)5H/Air
Wherein, Sub is expressed as silicon substrate, and Air is expressed as sky, and H is tantalum pentoxide Ta2O5, L is silica SiO2。
5. medium film filter according to claim 1 or 2, it is characterised in that the structure of the antireflection film layer is：
Air/0.404Ta2O51.2SiO2/Sub
Wherein, Sub is expressed as silicon substrate, and Air is expressed as sky.
6. medium film filter according to claim 1 or 2, it is characterised in that the area of the medium film filter is：
1mm×1mm。
7. a kind of YAG laser, it is characterised in that the YAG laser includes：Laser generator and medium film filter；
The medium film filter is arranged on the laser exit of the laser generator, the laser sent to the laser generator
Light beam carries out shaping, obtains the light beam on the steep side of narrow linewidth flat-top；
Wherein, the medium film filter is any one medium film filter in claim 1-6.
8. YAG laser according to claim 7, it is characterised in that the YAG laser also includes：Soft aperture slot；
The soft aperture slot is arranged between the laser generator and the medium film filter, sends out the laser generator
The laser beam gone out is exported after the soft aperture slot to the medium film filter.
9. YAG laser according to claim 8, it is characterised in that filtered the deielectric-coating using phenylpropyl alcohol cyclobutane
Device is bonded in the laser exit of the laser generator.
10. YAG laser according to claim 8, it is characterised in that the soft aperture slot is：Super-Gaussian type sawtooth light
Door screen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710546982.8A CN107247298A (en) | 2017-07-06 | 2017-07-06 | A kind of medium film filter and YAG laser |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710546982.8A CN107247298A (en) | 2017-07-06 | 2017-07-06 | A kind of medium film filter and YAG laser |
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| Publication Number | Publication Date |
|---|---|
| CN107247298A true CN107247298A (en) | 2017-10-13 |
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ID=60014989
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710546982.8A Pending CN107247298A (en) | 2017-07-06 | 2017-07-06 | A kind of medium film filter and YAG laser |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109445024A (en) * | 2018-12-22 | 2019-03-08 | 复旦大学 | A kind of optical band pass filter of flat-top banding pattern |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102540461A (en) * | 2012-01-04 | 2012-07-04 | 北京工业大学 | Determination method of average radius of ripple serrated aperture for realizing Gaussian beam shaping |
| CN103378209A (en) * | 2012-04-23 | 2013-10-30 | 北京邮电大学 | Hybrid integrated optical detector and preparation method thereof |
| CN103779777A (en) * | 2012-10-28 | 2014-05-07 | 天津奇谱光电技术有限公司 | Tunable laser using tunable fabry-perot filter |
| CN105182545A (en) * | 2015-08-26 | 2015-12-23 | 北京国科世纪激光技术有限公司 | Laser device |
-
2017
- 2017-07-06 CN CN201710546982.8A patent/CN107247298A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102540461A (en) * | 2012-01-04 | 2012-07-04 | 北京工业大学 | Determination method of average radius of ripple serrated aperture for realizing Gaussian beam shaping |
| CN103378209A (en) * | 2012-04-23 | 2013-10-30 | 北京邮电大学 | Hybrid integrated optical detector and preparation method thereof |
| CN103779777A (en) * | 2012-10-28 | 2014-05-07 | 天津奇谱光电技术有限公司 | Tunable laser using tunable fabry-perot filter |
| CN105182545A (en) * | 2015-08-26 | 2015-12-23 | 北京国科世纪激光技术有限公司 | Laser device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109445024A (en) * | 2018-12-22 | 2019-03-08 | 复旦大学 | A kind of optical band pass filter of flat-top banding pattern |
| CN109445024B (en) * | 2018-12-22 | 2021-10-26 | 复旦大学 | Flat-top-band type optical band-pass filter |
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Application publication date: 20171013 |