CN107246852B - Measurement scaling method, device and angle-adjusting mechanism based on angle-adjusting mechanism - Google Patents

Measurement scaling method, device and angle-adjusting mechanism based on angle-adjusting mechanism Download PDF

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CN107246852B
CN107246852B CN201710612716.0A CN201710612716A CN107246852B CN 107246852 B CN107246852 B CN 107246852B CN 201710612716 A CN201710612716 A CN 201710612716A CN 107246852 B CN107246852 B CN 107246852B
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angle
angular displacement
servo
servo angular
coordinate system
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CN107246852A (en
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柴宗明
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Goertek Techology Co Ltd
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Goertek Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

Abstract

The invention discloses measurement scaling method, device and angle-adjusting mechanisms based on angle-adjusting mechanism, this method comprises: establishing, the first servo angular displacement platform corresponding first connects firmly coordinate system and the second servo angular displacement platform corresponding second connects firmly coordinate system, and when described two servo angular displacement platforms are in angle origin, the axis of oscillation based on described two servo angular displacement platforms establishes the frame of reference；It controls described two servo angular displacement platforms and exports first angle and second angle respectively, and measure the tilt angle for obtaining standard reflecting plate relative to the frame of reference according to the autocollimator；Based on the transformational relation, establishes the first angle and the second angle maps to the computation model of the frame of reference；The computation model is utilized based on the tilt angle, calculates the practical angle for obtaining described two servo angular displacement platforms.The embodiment of the present invention realizes the calibration of the measurement to the angle of intersection of two servo angular displacement platforms.

Description

Measurement scaling method, device and angle-adjusting mechanism based on angle-adjusting mechanism
Technical field
The present embodiments relate to technical field of industrial control, specifically, being related to a kind of based on angle-adjusting mechanism Measure scaling method, device and angle-adjusting mechanism.
Background technique
Angle-adjusting mechanism be CNC (Computer numerical control, computer digital control machine tool) into When row processing operation, the device of angle adjustment control is carried out to workpieces processing.Currently, two servo angular displacement platform connection are widely used The dynamic angle-adjusting mechanism constituted passes through angle needed for two servo angular displacement platform outputs of control, the angle of Lai Shixian workpiece Adjustment.
In the prior art, two servo angular displacement platforms are usually assembled according to the orthogonal assembling mode of axis of oscillation, with So that two servo angular displacement platforms form 90 degree of orthogonal forms.
But in mechanism assembling process, it is difficult to which the orthogonal level for controlling the axis of oscillation of two servo angular displacement platforms causes It will appear angular deviation, therefore, it is necessary to the angle of intersection to two servo angular displacement platforms to measure calibration, to determine angle of intersection It whether is orthogonal angles.
Summary of the invention
In view of this, the measurement scaling method that the embodiment of the invention provides a kind of based on angle-adjusting mechanism, device and Angle-adjusting mechanism, the measurement calibration of the angle of intersection to solve effectively realize two servo angular displacement platforms in the prior art The technical issues of.
In order to solve the above-mentioned technical problem, the first aspect of the present invention provides a kind of measurement mark based on angle-adjusting mechanism Determine method, the angle-adjusting mechanism includes: two servos according to the orthogonal assembling mode installation of axis of oscillation on the base Angular displacement platform；Standard reflecting plate is installed on the execution face of the angle-adjusting mechanism；The standard reflecting plate follows described two The linkage of servo angular displacement platform and move；Autocollimator is installed above the standard reflecting plate；Described two servo angular displacement platforms When being in angle origin, standard reflecting plate datum water level corresponding with the pedestal is parallel and the autocollimator Measurement angle be demarcated as measure zero point；
The described method includes:
It establishes the first servo angular displacement platform corresponding first in described two servo angular displacement platforms and connects firmly coordinate system and Two servo angular displacement platforms corresponding second connect firmly coordinate system, and are in angle origin in described two servo angular displacement platforms When, the axis of oscillation based on described two servo angular displacement platforms establishes the frame of reference；Wherein, described two servo angular displacement platforms When in angle origin, the frame of reference connects firmly coordinate system with described first, described second connects firmly the coordinate system of coordinate system Direction is overlapped；
When two servo angular displacement platforms export any angle, determine first connect firmly coordinate system, second connect firmly coordinate system with And the transformational relation of the frame of reference；Wherein, the transformational relation is related to the angle of described two servo angular displacement platforms；
It controls described two servo angular displacement platforms and exports first angle and second angle respectively, and according to the autocollimatic Straight instrument measurement obtains tilt angle of the standard reflecting plate relative to the frame of reference；
Based on the transformational relation, the first angle is established, the second angle maps to the frame of reference Computation model；
The computation model is utilized based on the tilt angle, calculates the practical folder for obtaining described two servo angular displacement platforms Angle.
Preferably, when described two servo angular displacement platforms output any angle, determine that first connects firmly coordinate system, second connects firmly Coordinate system and the transformational relation of the frame of reference include:
When the first servo angular displacement platform exports any angle, determine that first connects firmly coordinate system relative to the benchmark First transformational relation of coordinate system；
When the second servo angular displacement platform exports any angle, determine that second connects firmly coordinate system relative to described first Connect firmly the second transformational relation of coordinate system；
Based on first transformational relation and second transformational relation, establish described second connect firmly coordinate system relative to The third transformational relation of the frame of reference；
It is described to be based on the transformational relation, establish the first angle, the second angle maps to the reference coordinate The computation model of system includes:
Based on the third transformational relation, the first angle is established, the second angle maps to the reference coordinate The computation model of system.
Preferably, include in the third transformational relation using the angle of described two servo angular displacement platforms as it is unknown Parameter；
It is described that the computation model is utilized based on the tilt angle, calculate the reality for obtaining described two servo angular displacement platforms Border angle includes:
The tilt angle is utilized to the result data of the computation model, calculates the reality for obtaining the third transformational relation Border data；
According to the real data of the third transformational relation, the unknown parameter of acquisition is calculated as described two servos The practical angle of angular displacement platform.
Preferably, described that the computation model is utilized based on the tilt angle, it calculates and obtains described two servo angle positions The practical angle of moving stage includes:
According to the theoretical angle and the computation model of described two servo angular displacement platforms, calculates and obtain the standard To be corrected angle of the reflecting plate relative to the frame of reference；
Compare the angle to be corrected and whether the tilt angle is consistent；
If so, determining that the practical angle of described two servo angular displacement platforms is the theoretical angle；
If not, utilizing the computation model based on the tilt angle, calculates and obtain described two servo angular displacement platforms Practical angle.
Preferably, described that the computation model is utilized based on the tilt angle, it calculates and obtains described two servo angle positions After the practical angle of moving stage, the method also includes:
Calculate the practical angle of described two servo angular displacement platforms and the amount of deflection of theoretical angle；
The amount of deflection is inputted to the digital control system of the angle-adjusting mechanism, so that the digital control system executes angle When adjustment, the output angle of described two servo angular displacement platforms is controlled based on the amount of deflection.
The second aspect of the present invention provides a kind of measurement caliberating device based on angle-adjusting mechanism, and the angle adjusts machine Structure includes: two servo angular displacement platforms according to the orthogonal assembling mode installation of axis of oscillation on the base；The angle adjustment Standard reflecting plate is installed on the execution face of mechanism；The standard reflecting plate follows the linkage of described two servo angular displacement platforms and transports It is dynamic；Autocollimator is installed above the standard reflecting plate；When described two servo angular displacement platforms are in angle origin, the mark Quasi-reflection plate datum water level corresponding with the pedestal is parallel and the measurement angle of the autocollimator is demarcated as measurement zero Point；
Described device includes:
First establishes module, for establishing the first servo angular displacement platform corresponding first in described two servo angular displacement platforms It connects firmly coordinate system and the second servo angular displacement platform corresponding second connects firmly coordinate system, and in described two servo angular displacement platforms When being in angle origin, the axis of oscillation based on described two servo angular displacement platforms establishes the frame of reference；Wherein, described two When a servo angular displacement platform is in angle origin, the frame of reference connects firmly coordinate system with described first, described second connects firmly The coordinate system direction of coordinate system is overlapped；
First determining module, for when two servo angular displacement platforms export any angle, determine first connect firmly coordinate system, Second connects firmly the transformational relation of coordinate system and the frame of reference；Wherein, the transformational relation and described two servo angles The angle of displacement platform is related；
First measurement module exports first angle and second jiao for controlling described two servo angular displacement platforms respectively Degree, and the tilt angle for obtaining standard reflecting plate relative to the frame of reference is measured according to the autocollimator；
Second establishes module, for being based on the transformational relation, establishes the first angle, the second angle maps to The computation model of the frame of reference；
First computing module calculates for utilizing the computation model based on the tilt angle and obtains described two watch Take the practical angle of angular displacement platform.
Preferably, first determining module includes:
First determination unit, for determining that first connects firmly seat when the first servo angular displacement platform exports any angle First transformational relation of the mark system relative to the frame of reference；
Second determination unit, for determining that second connects firmly seat when the second servo angular displacement platform exports any angle The second transformational relation that mark system connects firmly coordinate system relative to described first；
Third determination unit establishes described for being based on first transformational relation and second transformational relation Two connect firmly third transformational relation of the coordinate system relative to the frame of reference；
Described second, which establishes module, includes:
First establishing unit establishes the first angle, the second angle is reflected for being based on the third transformational relation It is incident upon the computation model of the frame of reference.
Preferably, include in the third transformational relation using the angle of described two servo angular displacement platforms as it is unknown Parameter；
First computing module includes:
First computing unit calculates for the tilt angle to be utilized to the result data of the computation model and obtains institute State the real data of third transformational relation；
Second computing unit calculates the unknown ginseng of acquisition for the real data according to the third transformational relation Measure the practical angle as described two servo angular displacement platforms.
Preferably, first computing module includes:
Third computing unit, for the theoretical angle and the calculating mould according to described two servo angular displacement platforms Type calculates the angle to be corrected for obtaining the standard reflecting plate relative to the frame of reference；
First comparing unit, it is whether consistent for the angle to be corrected and the tilt angle；If so, really The practical angle of fixed described two servo angular displacement platforms is the theoretical angle；If not, utilizing institute based on the tilt angle Computation model is stated, the practical angle for obtaining described two servo angular displacement platforms is calculated.
Preferably, described device further include:
Second computing module, for calculating the practical angle of described two servo angular displacement platforms and the variation of theoretical angle Value；
First output module, for the amount of deflection to be inputted to the digital control system of the angle-adjusting mechanism, for institute When stating digital control system execution angle adjustment, the output angle of described two servo angular displacement platforms is controlled based on the amount of deflection.
The second aspect of the present invention provides a kind of angle-adjusting mechanism, and the angle-adjusting mechanism includes:
Pedestal；
Two servo angular displacement platforms being mounted on according to the orthogonal assembling mode of swinging axle on the pedestal；
The standard reflecting plate being mounted on the angle-adjusting mechanism execution face；Wherein, the standard reflecting plate is according to institute It states the linkage of two servo angular displacement platforms and moves；
The autocollimator being mounted on above the standard reflecting plate；Wherein, described two servo angular displacement platforms are in When angle origin, standard reflecting plate datum water level corresponding with the installation pedestal is parallel, the measurement of the autocollimator Angle calibration is measurement zero point.
In the present invention, by the way that angle-adjusting mechanism is arranged, including the two servo angular displacement platforms installed with orthogonal manner, mark Quasi-reflection plate and autocollimator, the first servo angular displacement platform in described two servo angular displacement platforms can establish first and connect firmly Coordinate system, the second servo angular displacement platform can establish second and connect firmly coordinate system, and the swing based on two servo angular displacement platforms Axis establishes the frame of reference.Corresponding servo angle can be carried out according to the coordinates device of servo angular displacement platform after establishment of coordinate system The servo angle of displacement platform rotates, and forms corresponding angular transition relationship, can generate in described two servo angular displacement platforms When angle tilt, the angle relationship of changing between the servo angular displacement platform can be converted, available corresponding two The practical angle of a servo angular displacement platform, the axis of oscillation that can determine two servo angular displacement platforms by the practical angle are No orthogonal, whether angle of intersection is orthogonal angles, the measurement calibration of angle of intersection is effectively realized, to be based on the practical folder Angle can determine the angular deviation of two servo angular displacement platforms, can be to the output angle of angle-adjusting mechanism based on the angular deviation Degree compensates correction.
Detailed description of the invention
The drawings described herein are used to provide a further understanding of the present invention, constitutes a part of the invention, this hair Bright illustrative embodiments and their description are used to explain the present invention, and are not constituted improper limitations of the present invention.In the accompanying drawings:
Fig. 1 is a kind of structural schematic diagram of one embodiment of angle-adjusting mechanism provided by the invention；
Fig. 2 is a kind of process of one embodiment of measurement scaling method based on angle-adjusting mechanism provided by the invention Figure；
Fig. 3 is a kind of stream of another embodiment of measurement scaling method based on angle-adjusting mechanism provided by the invention Cheng Tu；
Fig. 4 is a kind of structure of one embodiment of measurement caliberating device based on angle-adjusting mechanism provided by the invention Schematic diagram.
Specific embodiment
Carry out the embodiment that the present invention will be described in detail below in conjunction with accompanying drawings and embodiments, how the present invention is applied whereby Technological means solves technical problem and reaches the realization process of technical effect to fully understand and implement.
The embodiment of the present invention is mainly used in the space angle adjust automatically scene of data fields, mainly passes through reality The actual angle of two servo angular displacement platforms and the gap of point of theory are determined, by differential seat angle away to two servo angular displacement platforms Linkage when practical linkage angle carry out angle compensation, with ensure control angle accuracy.
In the prior art, CNC system needs to carry out workpieces processing angle adjustment when carrying out processing operation, usually right The angle adjustment of workpieces processing is linked by double servo angular displacement platforms to carry out angle adjustment.Under normal conditions, double servo angular displacements Platform will form 90 degree of orthogonal forms in assembling, still, when actually assembling, the assembling angle of actual double servo angular displacement platforms Degree is generally unable to reach exactly 90 degree of orthogonal forms, it is possible to which there are certain angular deviations.For example, double servo angular displacement platforms The point of theory of assembling is usually 90 degree, but in actual assembled, and assembling angle may be 90.1 degree, this there is 0.1 degree Angular deviation.In the presence of this angular deviation, described two servo angular displacement platforms are likely to result in when output controls angle, There are angular deviations, and reality to be caused deviation occur to the control angle of workpiece for double servo angular displacement playscript with stage directions bodies, and workpieces processing is caused to add There is machining deviation during work, causes workpiece error larger.
Although inventor the study found that double servo angular displacement platforms there are orthogonal angles deviations, in practical applications this A problem is often ignored, and causes the loss of significance of unnecessary workpieces processing.Inventor is by a series of the study found that double It is due to double servo angular displacement platforms why the orthogonal angles deviation for the angle-adjusting mechanism that servo angular displacement platform is constituted, which is ignored, The axis of oscillation of servo angular displacement platform can not be demarcated in an assembling process, and then two servo angles position cannot be measured the time The actual angle of moving stage.Therefore, technical solution of the present invention is inventors herein proposed.
In the embodiment of the present invention, two devices of standard reflecting plate and Laser Autocollimator are increased in CNC system.? When two servo angular displacement platforms are in angle origin, the frame of reference can establish；It is exported in two servo angular displacement platforms When unspecified angle, determine that two servo angular displacement platforms corresponding first connect firmly coordinate system and second connect firmly coordinate system, and It can determine that described first connects firmly coordinate system, second connects firmly transformational relation between coordinate system and the frame of reference.Institute When stating two servo angular displacement platforms and exporting first angle and second angle respectively, i.e., using standard reflecting plate and laser from Quasi- instrument is determined based on described two tilt angles for connecting firmly coordinate system relative to the frame of reference；According to the transformational relation, Can establish first angle, second angle maps to the computation model of the frame of reference, and be based on the computation model, meter Calculate the practical angle for obtaining described two servo angular displacement platforms.And then it can be according to the practical folder of described two servo angular displacement platforms Angle can determine whether the axis of oscillation of two servo angular displacement platforms is orthogonal, and whether angle of intersection is positive by the practical angle Angle of cut degree, the measurement calibration for effectively realizing angle of intersection can determine two servo angular displacement platforms to be based on the practical angle Angular deviation, correction can be compensated to the output angle of angle-adjusting mechanism based on the angular deviation.
The embodiment of the present invention is described in detail below in conjunction with attached drawing.
As shown in Figure 1, being a kind of structural schematic diagram of one embodiment of angle-adjusting mechanism provided by the invention, the angle Spending adjustment mechanism may include:
Pedestal 100；
Two servo angular displacement platforms being mounted on according to the orthogonal assembling mode of axis of oscillation on pedestal 100；This two are watched Taking angular displacement platform includes the first servo displacement platform 101 and the second servo displacement platform 102.
Standard reflecting plate 103 is installed on the execution face of the angle-adjusting mechanism；Wherein, the standard reflecting plate 103 can It is moved with following the linkage of described two servo angular displacement platforms；
It is mounted on the autocollimator 104 of 103 top of standard reflecting plate；Wherein, described two servo angular displacement platforms 101 And 102 when being in angle origin, the standard reflecting plate 103 it is parallel with the corresponding datum water level of the pedestal 100 with And the measurement angle of the autocollimator 104 is demarcated as measuring zero point.
Wherein, the autocollimator 104 can be Laser Autocollimator, and the autocollimator 104 is installed on the standard The top of reflecting plate 103.When the swing angle of described two servo angular displacement platforms 101 and 102 is 0, namely it is in angle When origin, the measurement angle indicating value of the autocollimator is 0；The laser that the Laser Autocollimator issues at this time is by the standard Reflecting plate 103 presses backtracking, and any angle tilt does not occur.
As shown in Fig. 2, being one reality of the measurement scaling method provided by the invention based on angle-adjusting mechanism shown in FIG. 1 The flow chart of example is applied, the method may include following steps:
201: establish the first servo angular displacement platform corresponding first in described two servo angular displacement platforms connect firmly coordinate system with And second servo angular displacement platform corresponding second connect firmly coordinate system, and be in angle original in described two servo angular displacement platforms When point, the axis of oscillation based on described two servo angular displacement platforms establishes the frame of reference.
Wherein, when described two servo angular displacement platforms are in angle origin, the frame of reference is connected firmly with described first Coordinate system, the described second coordinate system direction for connecting firmly coordinate system are overlapped.
Optionally, the servo angular displacement platform is that the workpieces processing that can be used in CNC system carries out tilt angle control Machine control unit.Under normal conditions, the tilt angle of workpieces processing can be carried out by two servo angular displacement platform linkages Control, the swinging axle of two servo angular displacement platforms be designed to 90 degree it is orthogonal.Namely described two servo angular displacement platforms are assembling When need to be assembled into the state of swinging axle orthogonal 90, since in assembling process, the swinging axle of two servo angular displacement platforms can not again Calibration, causing the actual angle between the swinging axle of described two servo angular displacement platforms may not be orthogonal 90 degree just, There are certain angular errors.Once assembly is completed, described two servo angular displacement platforms is to be connected firmly in CNC system, institute Stating angular error can not be adjusted again.Therefore, it is necessary to carry out processing work in the described two servo angular displacement platforms of later use When the tilt angle control of part, it can be modified for the angular error.
Described two servo angular displacement playscript with stage directions bodies are fixedly connected with corresponding coordinate system, can be according to described two displacement platforms itself The coordinate system connected firmly can determine that first connects firmly coordinate system, second connects firmly coordinate system.Described first connects firmly coordinate system and described Second to connect firmly coordinate system be cartesian coordinate system namely rectangular coordinate system.When the swinging axle of described two servo angular displacement platforms When rotation, corresponding first connects firmly coordinate system, second connects firmly coordinate system corresponding angular turn also occurs.
When described two servo angular displacement platforms are in angle origin, at this point, standard reflecting plate is parallel to the base of installation pedestal Quasi- horizontal plane can will be at this time perpendicular to the reference water of installation pedestal at this point, the angle output that autocollimator measurement obtains is 0 The normal vector of plane can be set to Z axis.Two servo angular displacement platforms to be designed as 90 degree orthogonal, therefore can will be in angle The axial direction of any one servo angular displacement platform in two servo angular displacement platforms of origin is set to point to X-axis, another servo angle The axial direction of displacement platform is set to point to Y-axis.And then it can establish corresponding benchmark and be mostly.At this point, the frame of reference with Described first connect firmly coordinate system, second connect firmly coordinate system coordinate system direction is identical or machine.
202: when two servo angular displacement platforms export any angle, determining that first connects firmly coordinate system, second connects firmly coordinate The transformational relation of system and the frame of reference.
Wherein, the transformational relation is related to the angle of described two servo angular displacement platforms.
When the swinging axle of described two servo angular displacement platforms is swung, changing therewith for coordinate system is connected firmly.
When described two servo angular displacement platform swinging axles change, the linkage that can generate the two changes, and the connection of the two Dynamic variation can cause the variation of the standard reflecting plate, and then the laser that autocollimator issues is when being reflected, it can produce The angle change of raw reflection laser, autocollimator can calculate described two servos according to the variation of the reflection laser detected The angle changing of displacement platform, and export the angle changing.
When described two servo angular displacement platforms output unspecified angle, first connect firmly coordinate system, second connect firmly coordinate system can be with The corresponding variable angle of generation.It can determine that described first connects firmly coordinate system, second based on the transformational relation of space coordinates Connect firmly rotation relation of the coordinate system relative to the frame of reference.
When described two servo angular displacement platforms export unspecified angle, described first connects firmly coordinate system and described second solid Connection coordinate system and the frame of reference can contain 3 coordinate systems with as shown in figure 3, in Fig. 3, including, by x0, y0, The frame of reference { 0 } that z0 is constituted；By x1, the first of y1, z1 composition connects firmly coordinate system { 1 }；Second be made of x2, y2, z2 Connect firmly coordinate system { 2 }.In coordinate system shown in Fig. 3, in order to more easily show the angle change between different coordinates, by base The coordinate origin that conventional coordinates connects firmly coordinate system with first is set as identical, and in practical applications, the coordinate origin of the two can be with It is different.
203: controlling described two servo angular displacement platforms and export first angle and second angle respectively, and according to described Autocollimator measurement obtains tilt angle of the standard reflecting plate relative to the frame of reference.
It is flat in described two servo angular displacements since the standard reflecting plate is installed on the execution face of angle-adjusting mechanism When platform interlocks with the rotation, standard reflecting plate follows the linkage of described two servo angular displacement platforms and moves.
Optionally, CNC system controls described two servo angular displacement platforms and exports first angle and second angle respectively When, autocollimator can use standard reflecting plate and determine tilt angle relative to the frame of reference.
204: being based on the transformational relation, establish the first angle, the second angle maps to the reference coordinate The computation model of system.
The first angle and second angle are respectively that two servo displacement platforms connect firmly coordinate system compared to the benchmark The angle change of coordinate system, the first angle and the second angle can be obtained by described from straight quasi- instrument measurement.
The transformational relation is after described two servo angular displacement platforms are rotated according to swinging axle, and the first of formation connects firmly coordinate System, the second transformational relation for connecting firmly coordinate system and the frame of reference can connect firmly seat for described first based on the transformational relation Mark system, second connect firmly in the frame of reference described in coordinate system mapping device.
Coordinate system is connected firmly based on described first, second connects firmly the mapping relations of coordinate system and the frame of reference, i.e., It can determine that described first connects firmly coordinate system, second connects firmly coordinate system and pass through the mapping of the first angle, second angle To determine the computation model of the frame of reference of mapping.
205: the computation model being utilized based on the tilt angle, calculates the reality for obtaining described two servo angular displacement platforms Border angle.
The computation model is a calculation equation, in situation known to other calculation amounts of formula, two can be watched The practical angle of angular displacement platform is taken as unknown parameter, formula is introduced, is calculated by matrix and obtain described two servo angular displacements The practical angle of platform.
In the embodiment of the present invention, by introduce angle-adjusting mechanism, using the standard reflecting plate in angle-adjusting mechanism with And autocollimator determines the tilt angles of two servo angular displacement platforms.And it can determine any in amount servo angular displacement platform output When angle, first connects firmly angle and second connects firmly the transformational relation of angle and the frame of reference, and is turned based on described The relationship of changing determines the computation model of the frame of reference, and according to the computation model, can be counted respectively according to the tilt angle Calculate the practical angle for obtaining described two servo angular displacement platforms.Two servo angular displacement platforms can be determined by the practical angle Whether axis of oscillation is orthogonal, and whether angle of intersection is orthogonal angles, the measurement calibration of angle of intersection is effectively realized, to be based on The practical angle can determine the angular deviation of two servo angular displacement platforms, can be to angle-adjusting mechanism based on the angular deviation Output angle compensate correction.
As shown in figure 3, for the measurement scaling method provided by the invention based on angle-adjusting mechanism shown in FIG. 1 another The flow chart of embodiment, the method may include following steps:
301: establish the first servo angular displacement platform corresponding first in described two servo angular displacement platforms connect firmly coordinate system with And second servo angular displacement platform corresponding second connect firmly coordinate system, and be in angle original in described two servo angular displacement platforms When point, the axis of oscillation based on described two servo angular displacement platforms establishes the frame of reference.
Wherein, when described two servo angular displacement platforms are in angle origin, the frame of reference is connected firmly with described first Coordinate system, the described second coordinate system direction for connecting firmly coordinate system are overlapped.
302: when the first servo angular displacement platform exports any angle, determining that first connects firmly coordinate system relative to described First transformational relation of the frame of reference.
In the embodiment of the present invention, it is assumed that the coordinate system that connects firmly of the first servo angular displacement platform connects firmly coordinate system for first, Assuming that the coordinate system that connects firmly of the second servo angular displacement platform connects firmly coordinate system for second.The first servo angular displacement platform output Any angle be θ1, then first connect firmly coordinate system and can be indicated relative to the first transformational relation of the frame of reference are as follows:
303: when the second servo angular displacement platform exports any angle, determining that second connects firmly coordinate system relative to described Second transformational relation of the frame of reference.
The first servo angular displacement platform is orthogonal with 90 degree of the axis of oscillation of the second servo angular displacement platform, it is assumed that described Mechanical distance between first servo angular displacement platform and the second servo angular displacement platform is d, and therefore, described first connects firmly coordinate System connects firmly the distance between coordinate system transposed matrix relative to described second are as follows:
Described first, which connects firmly coordinate system, connects firmly angular transition matrix between coordinate system relative to described second are as follows:
Then it can know that described first connects firmly coordinate system and connect firmly relative to described second based on above-mentioned formula 2 and formula 3 The second transformational relation between coordinate system are as follows:
4304: being based on first transformational relation and second transformational relation, establish described second and connect firmly coordinate system Third transformational relation relative to the frame of reference.
It can know that described second connects firmly coordinate system relative to the frame of reference based on above-mentioned formula 1 and formula 4 Third transformational relation:
305: controlling described two servo angular displacement platforms and export first angle and second angle respectively, and according to described Autocollimator measurement obtains tilt angle of the standard reflecting plate relative to the frame of reference.
306: being based on the third transformational relation, establish the first angle, the second angle maps to the benchmark The computation model of coordinate system.
Due to being theoretically orthogonality relation between the first servo angular displacement platform and the second servo angular displacement platform, because This, it is believed that the first angle θ1, the second angle θ2Synthetic degree of angle after synthesis can have anti-by standard from straight quasi- instrument It penetrates plate to obtain the reflection of laser, which can be indicated with cartesian coordinate system, be decomposed into corresponding unit vector shape Formula:
Wherein, x, y, z are the current laser from straight quasi- instrument acquisition respectively with standard reflecting plate relative to frame of reference X Axis, Y-axis, Z axis angular dimension.
When synthetic degree of angle being decomposed into formula as shown in formula 6 as a result, after being carried out next coordinate transform, obtain Conversion of measurement unit matrix of the coordinate system relative to the frame of reference is connected firmly to described second:
Wherein, formula 7 is unit transition matrix.
And due to when described two servo angular displacement platforms are set to angle origin namely θ1=0, θ2When=0, at this time Two connect firmly coordinate system relative to the laser from straight quasi- instrument transmitting perpendicular to the standard reflecting plate, at this point it is possible to take described second Connect firmly unit normal vector of the coordinate system in the frame of reference are as follows:
[1,0,0]TFormula 8
Since the transformational relation that formula 5 is is not unit transformational relation, it can be determined by formula 5 and formula 8 The described second Conversion of measurement unit matrix for connecting firmly coordinate system Yu the frame of reference out:
Wherein, the unit normal vector homogeneous transformation has been subjected in the Conversion of measurement unit matrix, with can be with the formula 5 Transformational relation matrix is able to carry out matrix operation.
The transition matrix of the formula 9 and the formula 7 is set up in two servo station angular displacement equatioies as a result:
In 10 above-mentioned formulas 10, described two servo angular displacement platforms are orthogonal in 90 degree, and described first to connect firmly coordinate system opposite Connecting firmly the distance between coordinate system transposed matrix in described second is formula 2.What it is when described two servo angular displacement platforms is not 90 When spending orthogonal, that is, when the practical angle of described two servo angular displacement platforms is not 90 degree, described first to connect firmly coordinate system opposite Connecting firmly the distance between coordinate system transposed matrix in described second is unknown matrix D, unknown matrix D and described two servo angles The practical angle of displacement platform is associated, and its dependent variable in formula 10, such as x, y, z and θ1、θ2It is known that therefore it can be concluded that Location matrix formula:
Available corresponding unknown matrix D is calculated by matrix, the formula 10 is one kind of the computation model.
307: the computation model being utilized based on the tilt angle, calculates the reality for obtaining described two servo angular displacement platforms Border angle.
It include with described two servo angular displacement platforms as a kind of possible implementation, in the third transformational relation The unknown parameter that angle is used as；
Assuming that the unknown parameter is θ ', then above-mentioned formula 4 can simplify expression are as follows:
Matrix Trans (d, 0,0) Rot (x, θ ')=D in the formula 12, can then calculate the unknown parameter θ′。
It is described that the computation model is utilized based on the tilt angle, calculate the reality for obtaining described two servo angular displacement platforms Border angle may include:
Using the tilt angle as the result data of the computation model, the reality for obtaining the third transformational relation is calculated Border data；
According to the real data of the third transformational relation, the unknown parameter of acquisition is calculated as described two servos The practical angle of angular displacement platform.
During actual test, its dependent variable in formula 10, such as x, y, z and θ1、θ2It is known that being inputted corresponding Formula 10, it can corresponding unknown matrix D is obtained, by the formula D and corresponding θ2Etc. data bring the formula into 11, and then the practical angle that unknown parameter arrives described two servo angular displacement platforms for θ ' can be obtained.
In the embodiment of the present invention, by the first transformational relation and the second transformational relation, it can establish second and connect firmly coordinate Be the frame of reference between third transformational relation, and be based on the third transformational relation, can calculate first angle and Second angle maps to the computation model of the frame of reference.And the angle of described two servo angular displacement platforms can be used as not Know that parameter inputs the computation model, and the unknown parameter can be calculated according to the real data in computation model, can obtain Obtain the angle of described two servo angular displacement platforms.Actual two servo displacement platforms can be accurately calculated by angular transition relationship Angle, ensured the practical angle of described two servo angular displacement platforms, thus be based on the practical angle, can determine two servos The angular deviation of angular displacement platform can compensate the output angle of angle-adjusting mechanism serious based on the angular deviation.
It is described that the computation model is utilized based on the tilt angle as another embodiment, it calculates and obtains described two The practical angle of a servo angular displacement platform may include:
According to the theoretical angle and the computation model of described two servo angular displacement platforms, it is anti-to calculate the acquisition standard Penetrate to be corrected angle of the plate relative to the frame of reference；
Compare the angle to be corrected and whether the tilt angle is consistent；
If so, determining that the practical angle of described two servo angular displacement platforms is the theoretical angle；
If not, utilizing the computation model based on the tilt angle, calculates and obtain described two servo angular displacement platforms Practical angle.
In the embodiment of the present invention, when calculating the practical angle of described two servo angular displacement platforms, can first it confirm corresponding To correction angle, it is described whether consistent with the tilt angle to correction angle by judging, when consistent, that is, illustrate described two Simultaneously error is not present in the practical angle of a servo angular displacement platform and theoretical angle, can directly determine described two servo angular displacements The practical angle of platform is the theoretical angle.It is described when correction angle and the tilt angle are inconsistent, then calculate described The practical angle of two servo angular displacement platforms, and then relevant calculating can be saved to avoid computation model is blindly calculated Step improves the determination efficiency of the practical angle of described two servo angular displacement platforms.
It is described that the computation model is utilized based on the tilt angle as another embodiment, it calculates and obtains described two After the practical angle of a servo angular displacement platform, the method can also include:
Calculate the practical angle of described two servo angular displacement platforms and the amount of deflection of theoretical angle；
The amount of deflection is inputted to the digital control system of the angle-adjusting mechanism, so that the digital control system executes angle When adjustment, the output angle of described two servo angular displacement platforms is controlled based on the amount of deflection.
In the embodiment of the present invention, after the practical angle for obtaining described two servo angular displacement platforms, by the practical angle It is compared with theoretical angle, obtains the amount of deflection of two angles, can use the deviation data and two are utilized to digital control system A servo angular displacement number of units carries out the compensation of output angle, the compensation of output angle can achieve control according to when controlling angle The optimization of angle, and then the precision of workpieces processing can be improved.
As shown in figure 4, being a kind of measurement caliberating device based on angle-adjusting mechanism shown in Fig. 1 one provided by the invention The structural schematic diagram of embodiment
The apparatus may include following modules:
First establishes module 401, corresponding for establishing the first servo angular displacement platform in described two servo angular displacement platforms First connects firmly coordinate system and the second servo angular displacement platform corresponding second connects firmly coordinate system, and in described two servo angles positions When moving stage is in angle origin, the axis of oscillation based on described two servo angular displacement platforms establishes the frame of reference.
Wherein, when described two servo angular displacement platforms are in angle origin, the frame of reference is connected firmly with described first Coordinate system, the described second coordinate system direction for connecting firmly coordinate system are overlapped.
Optionally, the servo angular displacement platform is that the workpieces processing that can be used in CNC system carries out tilt angle control Machine control unit.Under normal conditions, the tilt angle of workpieces processing can be carried out by two servo angular displacement platform linkages Control, the swinging axle of two servo angular displacement platforms be designed to 90 degree it is orthogonal.Namely described two servo angular displacement platforms are assembling When need to be assembled into the state of swinging axle orthogonal 90, since in assembling process, the swinging axle of two servo angular displacement platforms can not again Calibration, causing the actual angle between the swinging axle of described two servo angular displacement platforms may not be orthogonal 90 degree just, There are certain angular errors.Once assembly is completed, described two servo angular displacement platforms is to be connected firmly in CNC system, institute Stating angular error can not be adjusted again.Therefore, it is necessary to carry out processing work in the described two servo angular displacement platforms of later use When the tilt angle control of part, it can be modified for the angular error.
Described two servo angular displacement playscript with stage directions bodies are fixedly connected with corresponding coordinate system, can be according to described two displacement platforms itself The coordinate system connected firmly can determine that first connects firmly coordinate system, second connects firmly coordinate system.Described first connects firmly coordinate system and described Second to connect firmly coordinate system be cartesian coordinate system namely rectangular coordinate system.When the swinging axle of described two servo angular displacement platforms When rotation, corresponding first connects firmly coordinate system, second connects firmly coordinate system corresponding angular turn also occurs.
When described two servo angular displacement platforms are in angle origin, at this point, standard reflecting plate is parallel to the base of installation pedestal Quasi- horizontal plane can will be at this time perpendicular to the reference water of installation pedestal at this point, the angle output that autocollimator measurement obtains is 0 The normal vector of plane can be set to Z axis.Two servo angular displacement platforms to be designed as 90 degree orthogonal, therefore can will be in angle The axial direction of any one servo angular displacement platform in two servo angular displacement platforms of origin is set to point to X-axis, another servo angle The axial direction of displacement platform is set to point to Y-axis.And then it can establish corresponding benchmark and be mostly.At this point, the frame of reference with Described first connect firmly coordinate system, second connect firmly coordinate system coordinate system direction is identical or machine.
First determining module 402, for determining that first connects firmly coordinate when two servo angular displacement platforms export any angle The transformational relation that system, second connect firmly coordinate system and the frame of reference.
Wherein, the transformational relation is related to the angle of described two servo angular displacement platforms.
When described two servo angular displacement platform swinging axles change, the linkage that can generate the two changes, and the connection of the two Dynamic variation can cause the variation of the standard reflecting plate, and then the laser that autocollimator issues is when being reflected, it can produce The angle change of raw reflection laser, autocollimator can calculate described two servos according to the variation of the reflection laser detected The angle changing of displacement platform, and export the angle changing.
When described two servo angular displacement platforms output unspecified angle, first connect firmly coordinate system, second connect firmly coordinate system can be with The corresponding variable angle of generation.It can determine that described first connects firmly coordinate system, second based on the transformational relation of space coordinates Connect firmly rotation relation of the coordinate system relative to the frame of reference.
First measurement module 403 exports first angle and for controlling described two servo angular displacement platforms respectively Two angles, and the tilt angle for obtaining standard reflecting plate relative to the frame of reference is measured according to the autocollimator.
It is flat in described two servo angular displacements since the standard reflecting plate is installed on the execution face of angle-adjusting mechanism When platform interlocks with the rotation, standard reflecting plate follows the linkage of described two servo angular displacement platforms and moves.
Optionally, CNC system controls described two servo angular displacement platforms and exports first angle and second angle respectively When, autocollimator can use standard reflecting plate and determine tilt angle relative to the frame of reference.
Second establishes module 404, for being based on the transformational relation, establishes the first angle, the second angle is reflected It is incident upon the computation model of the frame of reference.
The first angle and second angle are respectively that two servo displacement platforms connect firmly coordinate system compared to the benchmark The angle change of coordinate system, the first angle and the second angle can be obtained by described from straight quasi- instrument measurement.
The transformational relation is after described two servo angular displacement platforms are rotated according to swinging axle, and the first of formation connects firmly coordinate System, the second transformational relation for connecting firmly coordinate system and the frame of reference can connect firmly seat for described first based on the transformational relation Mark system, second connect firmly in the frame of reference described in coordinate system mapping device.
Coordinate system is connected firmly based on described first, second connects firmly the mapping relations of coordinate system and the frame of reference, i.e., It can determine that described first connects firmly coordinate system, second connects firmly coordinate system and pass through the mapping of the first angle, second angle To determine the computation model of the frame of reference of mapping.
It is described two to calculate acquisition for utilizing the computation model based on the tilt angle for first computing module 405 The practical angle of servo angular displacement platform.
The computation model is a calculation equation, in situation known to other calculation amounts of formula, two can be watched The practical angle of angular displacement platform is taken as unknown parameter, formula is introduced, is calculated by matrix and obtain described two servo angular displacements The practical angle of platform.
In the embodiment of the present invention, by introduce angle-adjusting mechanism, using the standard reflecting plate in angle-adjusting mechanism with And autocollimator determines the tilt angles of two servo angular displacement platforms.And it can determine any in amount servo angular displacement platform output When angle, first connects firmly angle and second connects firmly the transformational relation of angle and the frame of reference, and is turned based on described The relationship of changing determines the computation model of the frame of reference, and according to the computation model, can be counted respectively according to the tilt angle Calculate the practical angle for obtaining described two servo angular displacement platforms.Two servo angular displacement platforms can be determined by the practical angle Whether axis of oscillation is orthogonal, and whether angle of intersection is orthogonal angles, the measurement calibration of angle of intersection is effectively realized, to be based on The practical angle can determine the angular deviation of two servo angular displacement platforms, can be to angle-adjusting mechanism based on the angular deviation Output angle compensate correction.
As one embodiment, first determining module may include:
First determination unit, for determining that first connects firmly seat when the first servo angular displacement platform exports any angle First transformational relation of the mark system relative to the frame of reference；
Second determination unit, for determining that second connects firmly seat when the second servo angular displacement platform exports any angle The second transformational relation that mark system connects firmly coordinate system relative to described first；
Third determination unit establishes described for being based on first transformational relation and second transformational relation Two connect firmly third transformational relation of the coordinate system relative to the frame of reference；
Described second, which establishes module, may include:
First establishing unit establishes the first angle, the second angle is reflected for being based on the third transformational relation It is incident upon the computation model of the frame of reference.
It include with described two servo angular displacement platforms as a kind of possible implementation, in the third transformational relation The unknown parameter that is used as of angle；
First computing module may include:
First computing unit calculates for the tilt angle to be utilized to the result data of the computation model and obtains institute State the real data of third transformational relation；
Second computing unit calculates the unknown ginseng of acquisition for the real data according to the third transformational relation Measure the practical angle as described two servo angular displacement platforms.
In the embodiment of the present invention, by the first transformational relation and the second transformational relation, it can establish second and connect firmly coordinate Be the frame of reference between third transformational relation, and be based on the third transformational relation, can calculate first angle and Second angle maps to the computation model of the frame of reference.And the angle of described two servo angular displacement platforms can be used as not Know that parameter inputs the computation model, and the unknown parameter can be calculated according to the real data in computation model, can obtain Obtain the angle of described two servo angular displacement platforms.Actual two servo displacement platforms can be accurately calculated by angular transition relationship Angle, ensured the practical angle of described two servo angular displacement platforms, thus be based on the practical angle, can determine two servos The angular deviation of angular displacement platform can compensate the output angle of angle-adjusting mechanism serious based on the angular deviation.
As another embodiment, first computing module may include:
Third computing unit, for the theoretical angle and the calculating mould according to described two servo angular displacement platforms Type calculates the angle to be corrected for obtaining the standard reflecting plate relative to the frame of reference；
First comparing unit, it is whether consistent for the angle to be corrected and the tilt angle；If so, really The practical angle of fixed described two servo angular displacement platforms is the theoretical angle；If not, utilizing institute based on the tilt angle Computation model is stated, the practical angle for obtaining described two servo angular displacement platforms is calculated.
In the embodiment of the present invention, when calculating the practical angle of described two servo angular displacement platforms, can first it confirm corresponding To correction angle, it is described whether consistent with the tilt angle to correction angle by judging, when consistent, that is, illustrate described two Simultaneously error is not present in the practical angle of a servo angular displacement platform and theoretical angle, can directly determine described two servo angular displacements The practical angle of platform is the theoretical angle.It is described when correction angle and the tilt angle are inconsistent, then calculate described The practical angle of two servo angular displacement platforms, and then relevant calculating can be saved to avoid computation model is blindly calculated Step improves the determination efficiency of the practical angle of described two servo angular displacement platforms.
As another embodiment, described device can also include:
Second computing module, for calculating the practical angle of described two servo angular displacement platforms and the variation of theoretical angle Value；
First output module, for the amount of deflection to be inputted to the digital control system of the angle-adjusting mechanism, for institute When stating digital control system execution angle adjustment, the output angle of described two servo angular displacement platforms is controlled based on the amount of deflection.
In the embodiment of the present invention, after the practical angle for obtaining described two servo angular displacement platforms, by the practical angle It is compared with theoretical angle, obtains the amount of deflection of two angles, can use the deviation data and two are utilized to digital control system A servo angular displacement number of units carries out the compensation of output angle, the compensation of output angle can achieve control according to when controlling angle The optimization of angle, and then the precision of workpieces processing can be improved.
In a typical configuration, calculating equipment includes one or more processors (CPU), input/output interface, net Network interface and memory.
Memory may include the non-volatile memory in computer-readable medium, random access memory (RAM) and/or The forms such as Nonvolatile memory, such as read-only memory (ROM) or flash memory (flash RAM).Memory is computer-readable medium Example.
Computer-readable medium includes permanent and non-permanent, removable and non-removable media can be by any method Or technology come realize information store.Information can be computer readable instructions, data structure, the module of program or other data. The example of the storage medium of computer includes, but are not limited to phase change memory (PRAM), static random access memory (SRAM), moves State random access memory (DRAM), other kinds of random access memory (RAM), read-only memory (ROM), electric erasable Programmable read only memory (EEPROM), flash memory or other memory techniques, read-only disc read only memory (CD-ROM) (CD-ROM), Digital versatile disc (DVD) or other optical storage, magnetic cassettes, tape magnetic disk storage or other magnetic storage devices Or any other non-transmission medium, can be used for storage can be accessed by a computing device information.As defined in this article, it calculates Machine readable medium does not include non-temporary computer readable media (transitory media), such as the data-signal and carrier wave of modulation.
As used some vocabulary to censure specific components in the specification and claims.Those skilled in the art answer It is understood that hardware manufacturer may call the same component with different nouns.This specification and claims are not with name The difference of title is as the mode for distinguishing component, but with the difference of component functionally as the criterion of differentiation.Such as logical The "comprising" of piece specification and claim mentioned in is an open language, therefore should be construed to " include but do not limit In "." substantially " refer within the acceptable error range, those skilled in the art can within a certain error range solve described in Technical problem basically reaches the technical effect.In addition, " coupling " word includes any direct and indirect electric property coupling herein Means.Therefore, if it is described herein that a first device is coupled to a second device, then representing the first device can directly electrical coupling It is connected to the second device, or the second device indirectly electrically coupled through other devices or coupling means.Specification Subsequent descriptions are to implement better embodiment of the invention, so the description be for the purpose of illustrating rule of the invention, The range being not intended to limit the invention.Protection scope of the present invention is as defined by the appended claims.
It should also be noted that, the terms "include", "comprise" or its any other variant are intended to nonexcludability Include, so that commodity or system including a series of elements not only include those elements, but also including not clear The other element listed, or further include for this commodity or the intrinsic element of system.In the feelings not limited more Under condition, the element that is limited by sentence "including a ...", it is not excluded that in the commodity or system for including the element also There are other identical elements
Several preferred embodiments of the invention have shown and described in above description, but as previously described, it should be understood that the present invention Be not limited to forms disclosed herein, should not be regarded as an exclusion of other examples, and can be used for various other combinations, Modification and environment, and the above teachings or related fields of technology or knowledge can be passed through in application contemplated scope described herein It is modified.And changes and modifications made by those skilled in the art do not depart from the spirit and scope of the present invention, then it all should be in this hair In the protection scope of bright appended claims.

Claims (10)

1. a kind of measurement scaling method based on angle-adjusting mechanism, which is characterized in that the angle-adjusting mechanism include: according to The two servo angular displacement platforms of the orthogonal assembling mode installation of axis of oscillation on the base；The execution face of the angle-adjusting mechanism Upper installation standard reflecting plate；The standard reflecting plate follows the linkage of described two servo angular displacement platforms and moves；The standard Autocollimator is installed above reflecting plate；When described two servo angular displacement platforms are in angle origin, the standard reflecting plate with The corresponding datum water level of the pedestal is parallel and the measurement angle of the autocollimator is demarcated as measuring zero point；
The described method includes:
The first servo angular displacement platform corresponding first in described two servo angular displacement platforms is established to connect firmly coordinate system and second watch It takes angular displacement platform corresponding second and connects firmly coordinate system, and when described two servo angular displacement platforms are in angle origin, base The frame of reference is established in the axis of oscillation of described two servo angular displacement platforms；Wherein, described two servo angular displacement platforms are in When angle origin, the frame of reference connects firmly coordinate system with described first, described second connects firmly the coordinate system direction of coordinate system It is overlapped；
When two servo angular displacement platforms export any angle, determine that first connects firmly coordinate system, second connects firmly coordinate system and institute State the transformational relation of the frame of reference；Wherein, the transformational relation is related to the angle of described two servo angular displacement platforms；
It controls described two servo angular displacement platforms and exports first angle and second angle respectively, and according to the autocollimator Measurement obtains tilt angle of the standard reflecting plate relative to the frame of reference；
Based on the transformational relation, the first angle is established, the second angle maps to the calculating of the frame of reference Model；
The computation model is utilized based on the tilt angle, calculates the practical angle for obtaining described two servo angular displacement platforms.
2. the method according to claim 1, wherein described two servo angular displacement platforms export any angle when, Determine that first connects firmly coordinate system, second connects firmly coordinate system and the transformational relation of the frame of reference includes:
When the first servo angular displacement platform exports any angle, determine that first connects firmly coordinate system relative to the reference coordinate First transformational relation of system；
When the second servo angular displacement platform exports any angle, determine that second connects firmly coordinate system and connect firmly relative to described first Second transformational relation of coordinate system；
Based on first transformational relation and second transformational relation, establishes described second and connect firmly coordinate system relative to described The third transformational relation of the frame of reference；
It is described to be based on the transformational relation, establish the first angle, the second angle maps to the frame of reference Computation model includes:
Based on the third transformational relation, the first angle is established, the second angle maps to the frame of reference Computation model.
3. according to the method described in claim 2, it is characterized in that, including with described two servos in the third transformational relation The unknown parameter that the angle of angular displacement platform is used as；
It is described that the computation model is utilized based on the tilt angle, calculate the practical folder for obtaining described two servo angular displacement platforms Angle includes:
The tilt angle is utilized to the result data of the computation model, calculates the actual number for obtaining the third transformational relation According to；
According to the real data of the third transformational relation, the unknown parameter of acquisition is calculated as described two servo angle positions The practical angle of moving stage.
4. the method according to claim 1, wherein described utilize the calculating mould based on the tilt angle Type, the practical angle for calculating the described two servo angular displacement platforms of acquisition include:
According to the theoretical angle and the computation model of described two servo angular displacement platforms, calculates and obtain the standard reflection To be corrected angle of the plate relative to the frame of reference；
Compare the angle to be corrected and whether the tilt angle is consistent；
If so, determining that the practical angle of described two servo angular displacement platforms is the theoretical angle；
If not, utilizing the computation model based on the tilt angle, the reality for obtaining described two servo angular displacement platforms is calculated Border angle.
5. the method according to claim 1, wherein described utilize the calculating mould based on the tilt angle Type, after calculating the practical angle for obtaining described two servo angular displacement platforms, the method also includes:
Calculate the practical angle of described two servo angular displacement platforms and the amount of deflection of theoretical angle；
The amount of deflection is inputted to the digital control system of the angle-adjusting mechanism, so that the digital control system executes angle adjustment When, the output angle of described two servo angular displacement platforms is controlled based on the amount of deflection.
6. a kind of measurement caliberating device based on angle-adjusting mechanism, which is characterized in that the angle-adjusting mechanism include: according to The two servo angular displacement platforms of the orthogonal assembling mode installation of axis of oscillation on the base；The execution face of the angle-adjusting mechanism Upper installation standard reflecting plate；The standard reflecting plate follows the linkage of described two servo angular displacement platforms and moves；The standard Autocollimator is installed above reflecting plate；When described two servo angular displacement platforms are in angle origin, the standard reflecting plate with The corresponding datum water level of the pedestal is parallel and the measurement angle of the autocollimator is demarcated as measuring zero point；
Described device includes:
First establishes module, connects firmly for establishing the first servo angular displacement platform corresponding first in described two servo angular displacement platforms Coordinate system and the second servo angular displacement platform corresponding second connect firmly coordinate system, and locate in described two servo angular displacement platforms When angle origin, the axis of oscillation based on described two servo angular displacement platforms establishes the frame of reference；Wherein, described two to watch When taking angular displacement platform and being in angle origin, the frame of reference connects firmly coordinate system with described first, described second connects firmly coordinate The coordinate system direction of system is overlapped；
First determining module, for determining that first connects firmly coordinate system, second when two servo angular displacement platforms export any angle Connect firmly the transformational relation of coordinate system and the frame of reference；Wherein, the transformational relation and described two servo angular displacements The angle of platform is related；
First measurement module exports first angle and second angle for controlling described two servo angular displacement platforms respectively, And the tilt angle for obtaining standard reflecting plate relative to the frame of reference is measured according to the autocollimator；
Second establishes module, for being based on the transformational relation, establish the first angle, the second angle map to it is described The computation model of the frame of reference；
First computing module calculates for utilizing the computation model based on the tilt angle and obtains described two servo angles The practical angle of displacement platform.
7. device according to claim 6, which is characterized in that first determining module includes:
First determination unit, for determining that first connects firmly coordinate system when the first servo angular displacement platform exports any angle The first transformational relation relative to the frame of reference；
Second determination unit, for determining that second connects firmly coordinate system when the second servo angular displacement platform exports any angle The second transformational relation for connecting firmly coordinate system relative to described first；
It is solid to establish described second for being based on first transformational relation and second transformational relation for third determination unit Join third transformational relation of the coordinate system relative to the frame of reference；
Described second, which establishes module, includes:
First establishing unit establishes the first angle, the second angle maps to for being based on the third transformational relation The computation model of the frame of reference.
8. device according to claim 7, which is characterized in that include with described two servos in the third transformational relation The unknown parameter that the angle of angular displacement platform is used as；
First computing module includes:
First computing unit calculates for the tilt angle to be utilized to the result data of the computation model and obtains described the The real data of three transformational relations；
Second computing unit, for the real data according to the third transformational relation, the unknown parameter for calculating acquisition is made For the practical angle of described two servo angular displacement platforms.
9. device according to claim 6, which is characterized in that first computing module includes:
Third computing unit, for the theoretical angle and the computation model according to described two servo angular displacement platforms, meter Calculate the angle to be corrected for obtaining the standard reflecting plate relative to the frame of reference；
First comparing unit, it is whether consistent for the angle to be corrected and the tilt angle；If so, determining institute The practical angle for stating two servo angular displacement platforms is the theoretical angle；If not, by the tilt angle using based on described Model is calculated, the practical angle for obtaining described two servo angular displacement platforms is calculated.
10. device according to claim 6, which is characterized in that described device further include:
Second computing module, for calculating the practical angle of described two servo angular displacement platforms and the amount of deflection of theoretical angle；
First output module, for the amount of deflection to be inputted to the digital control system of the angle-adjusting mechanism, for the number When control system executes angle adjustment, the output angle of described two servo angular displacement platforms is controlled based on the amount of deflection.
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