CN107236994B - Silicon core cleaning device and cleaning performance determination methods - Google Patents
Silicon core cleaning device and cleaning performance determination methods Download PDFInfo
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- CN107236994B CN107236994B CN201710423882.6A CN201710423882A CN107236994B CN 107236994 B CN107236994 B CN 107236994B CN 201710423882 A CN201710423882 A CN 201710423882A CN 107236994 B CN107236994 B CN 107236994B
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
Abstract
The present invention relates to technical field of polysilicon production, aim to solve the problem that silicon core cleaning operation link is more in the prior art, period easily stains silicon wicking surface, can not detect whether to clean up and there are the problem of very big security risk, there is provided a kind of silicon core cleaning device and cleaning performance determination methods.The silicon core cleaning device provided in the embodiment of the present invention, purge chamber, hurricane drier and sensing chamber are disposed adjacent successively；After silicon core cleans in purge chamber, after hurricane drier air-dries, the indoor detection of detection is placed in, whether detection silicon core cleans up, and the silicon core cleaning device provided in the embodiment of the present invention sets sensing chamber to be detected silicon core, instead of manually range estimation intuitive judgment, error caused by avoiding when artificial sense organ judges, has and judges accurate, reduction operational sequence, human resources are saved, improve the beneficial effect of security performance.
Description
Technical field
The present invention relates to technical field of polysilicon production, in particular to a kind of silicon core cleaning device and cleaning performance
Determination methods.
Background technology
Silicon core could be packed after generally requiring the links such as cleaning, drying before packing, and the method operation link is more,
Period easily stains silicon wicking surface, with the naked eye can not intuitively be recognized whether that pickling is clean；And used during pickling with strong
Corrosive strong acid, dosage is very big, and there are great security risk when staff operates.
The content of the invention
The present invention is intended to provide a kind of silicon core cleaning device, with solve silicon core cleaning operation link of the prior art compared with
It is more, during which easily stain silicon wicking surface, can not detect whether to clean up and there are the problem of very big security risk.
Another object of the present invention is to provide a kind of silicon core cleaning performance judgement side using above-mentioned silicon core cleaning device
Method, instead of manually range estimation intuitive judgment, error caused by avoiding when artificial sense organ judges.
What the embodiment of the present invention was realized in：
A kind of silicon core cleaning device, it, which includes silicon core cleaning device, includes purge chamber, hurricane drier and sensing chamber；Cleaning
Room, hurricane drier and sensing chamber are disposed adjacent successively.Purge chamber possesses the service sink for having upper end opening.Hurricane drier is arranged on cleaning
Between room and sensing chamber.Setting of the sensing chamber close to hurricane drier；Sensing chamber can detect whether silicon core cleans up.
The silicon core cleaning device provided in the embodiment of the present invention, purge chamber, hurricane drier and sensing chamber are adjacent successively to be set
Put；After silicon core cleans in purge chamber, after hurricane drier air-dries, the indoor detection of detection is placed in, it is dry whether detection silicon core cleans
Only, the silicon core cleaning device provided in the embodiment of the present invention sets sensing chamber to be detected silicon core, straight instead of manually range estimation
To see and judge, error caused by avoiding when artificial sense organ judges, has and judges accurately, to reduce operational sequence, save human resources,
Improve the beneficial effect of security performance.
In one embodiment of the invention：
Above-mentioned silicon core cleaning device further includes transmission device；Transmission device includes at least two clamping pieces, each clamping piece
Clamping face be horizontally disposed with；Clamping piece is sequentially connected with first driving means and the second driving device；First driving means are used
In drive clamping piece horizontal movement；Second driving device is used to drive clamping piece vertical and straight movement.
In one embodiment of the invention：
The clamping face of above-mentioned clamping piece offers the slot segmentation for accommodating silicon core.
In one embodiment of the invention：
Above-mentioned detection interior is provided with detection probe；Detection probe includes two test sections being oppositely arranged；Two detections
Portion, which forms one end, has the detection space of opening；One end of opening of the detection probe away from monitoring space is connected with the 3rd driving dress
Put；Second driving device is used to drive detection probe to move along the length direction of sensing chamber.
In one embodiment of the invention：
Above-mentioned sensing chamber further includes processing unit；Processing unit is electrically connected with detection probe.
In one embodiment of the invention：
Above-mentioned processing unit is also associated with manipulator.
A kind of silicon core cleaning performance determination methods, using any one above-mentioned silicon core cleaning device, silicon core cleaning performance is sentenced
The step of disconnected method, is as follows：
Cleaning process：Silicon core is placed in service sink and is cleaned；
Air-dry process：The silicon core that cleaning finishes is placed in hurricane drier to be air-dried；
Detect process：Silicon core after to air-drying is placed in sensing chamber and is detected；Whether detection silicon core cleans up.
In one embodiment of the invention：
In above-mentioned detection process, it is scanned along the length direction of silicon core to be checked using detection probe, will be scanned
The photo of shooting passes to processing unit according to sequence, and the silicon core there are stain is identified in the processing unit.
In one embodiment of the invention：
In above-mentioned detection process, the photo of silicon core is identified in the identification module in processing unit, identifies in the presence of dirty
The photo of point, and this is passed to there are the signal of the photo of stain to the mark module in processing unit, the mark in processing unit
Note module is to passing to the control module in processing unit there are the position of the silicon core of stain and silicon core numbering.
In one embodiment of the invention：
Recovery process is further included after above-mentioned detection process, control module control machinery hand will detect the unqualified silicon core of cleaning and take
Go out, be put into silicon core collecting box.
The beneficial effect of the embodiment of the present invention is：
The silicon core cleaning device provided in the embodiment of the present invention, purge chamber, hurricane drier and sensing chamber are adjacent successively to be set
Put；After silicon core cleans in purge chamber, after hurricane drier air-dries, the indoor detection of detection is placed in, it is dry whether detection silicon core cleans
Only, the silicon core cleaning device provided in the embodiment of the present invention sets sensing chamber to be detected silicon core, straight instead of manually range estimation
To see and judge, error caused by avoiding when artificial sense organ judges, has and judges accurately, to reduce operational sequence, save human resources,
Improve the beneficial effect of security performance.
Silicon core cleaning performance determination methods provided by the invention, using above-mentioned silicon core cleaning device, therefore also have and sentence
It is disconnected accurate, operational sequence is reduced, saves human resources, improves the beneficial effect of security performance.
Brief description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly described, it will be appreciated that the following drawings illustrate only certain embodiments of the present invention, therefore be not construed as pair
The restriction of scope, for those of ordinary skill in the art, without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is overall structure diagram of the silicon core cleaning device provided in the embodiment of the present invention under the first visual angle；
Fig. 2 is overall structure diagram of the silicon core cleaning device provided in the embodiment of the present invention under the second visual angle；
Fig. 3 is the structure diagram of the detection probe of the silicon core cleaning device provided in the embodiment of the present invention；
Fig. 4 is the functional block diagram of the sensing chamber of the silicon core cleaning device provided in the embodiment of the present invention；
Fig. 5 is the structure diagram of the clamping piece of the silicon core cleaning device provided in the embodiment of the present invention.
Icon：10- silicon core cleaning devices；100- purge chambers；200- hurricane driers；210- blowing devices；300- sensing chamber；
310- detection probes；312- test sections；314- detects space；320- processing units；322- identification modules；324- mark modules；
326- control modules；330- display screens；340- manipulators；400- transmission devices；410- clamping pieces；412- slot segmentations；420-
One driving device；The second driving devices of 430-.
Embodiment
To make the purpose, technical scheme and advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, the technical solution in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is
Part of the embodiment of the present invention, instead of all the embodiments.The present invention implementation being usually described and illustrated herein in the accompanying drawings
The component of example can be arranged and designed with a variety of configurations.
Therefore, below the detailed description of the embodiment of the present invention to providing in the accompanying drawings be not intended to limit it is claimed
The scope of the present invention, but be merely representative of the present invention selected embodiment.Based on the embodiments of the present invention, this area is common
Technical staff's all other embodiments obtained without making creative work, belong to the model that the present invention protects
Enclose.
It should be noted that：Similar label and letter represents similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined, then it further need not be defined and explained in subsequent attached drawing in a attached drawing.
, it is necessary to explanation in the description of the embodiment of the present invention, if there is the finger such as term " on ", " under ", " interior ", " outer "
The orientation or position relationship shown is based on orientation shown in the drawings or position relationship, or is usually put during the invention product use
The orientation or position relationship put, are for only for ease of the description present invention and simplify description, rather than instruction or the dress for implying meaning
Put or element there must be specific orientation, with specific azimuth configuration and operation, therefore it is not intended that to limit of the invention
System.If being only used for distinguishing description in addition, occurring term " first ", " second " etc. in description of the invention, and it is not intended that referring to
Show or imply relative importance.
In the description of the embodiment of the present invention, it is also necessary to explanation, unless otherwise clearly defined and limited, if occurring
Term " setting ", " connection " should be interpreted broadly, for example, it may be fixedly connected or be detachably connected, or integratedly
Connection；Can mechanically connect or be electrically connected；It can be directly connected, can also be indirectly connected by intermediary,
It can be the connection inside two elements.For the ordinary skill in the art, above-mentioned art can be understood with concrete condition
The concrete meaning of language in the present invention.
Embodiment 1：
Fig. 1 is silicon core 10 overall structure diagram under the first visual angle of cleaning device provided in the embodiment of the present invention；
Fig. 2 is silicon core 10 overall structure diagram under the second visual angle of cleaning device provided in the embodiment of the present invention.It refer to Fig. 1
And Fig. 2 is combined, the present embodiment provides a kind of silicon core cleaning device 10, it includes purge chamber 100, hurricane drier 200, sensing chamber 300
And transmission device 400；Purge chamber 100, hurricane drier 200 and sensing chamber 300 are disposed adjacent successively, and transmission device 400 is used for
Silicon core is transmitted to corresponding position.Purge chamber 100 possesses the service sink for having upper end opening, and hurricane drier 200 is arranged on purge chamber 100
Between sensing chamber 300, setting of the sensing chamber 300 close to hurricane drier 200；Sensing chamber 300 can detect silicon core whether clean it is dry
Only.As can be seen from the figure hurricane drier 200 elongatedness direction is provided at both ends with blowing device 210.
Fig. 3 is the structure diagram of the detection probe 310 of the silicon core cleaning device 10 provided in the embodiment of the present invention.It please join
According to Fig. 3, in the present embodiment, detection probe 310 is provided with sensing chamber 300；What detection probe 310 was oppositely arranged including two
Test section 312；Two test sections 312, which form one end, has the detection space 314 of opening；Detection probe 310 is away from monitoring space
One end of opening be connected with the 3rd driving device (not shown)；3rd driving device is used to drive 310 edge of detection probe
The length direction movement of sensing chamber 300.Detection probe 310 is provided with sensing chamber 300；Detection probe 310 includes two
The test section 312 being oppositely arranged；Two test sections 312, which form one end, has the detection space 314 of opening, easy to in detection
Silicon core in room 300 is detected in all directions so that detection is more accurate.In the opening away from monitoring space of detection probe 310
One end of mouth is connected with the 3rd driving device；3rd driving device is used to drive length of the detection probe 310 along sensing chamber 300
Direction is moved, and since silicon core is more a length of easy to detect, the detection probe 310 in sensing chamber 300 need to be designed as to removable probe
Easy to carry out more comprehensive detection to silicon core, accuracy of detection is improved.
It should be noted that in the present embodiment, detection probe 310 is provided with sensing chamber 300；Detection probe 310
Including two test sections being oppositely arranged 312；Two test sections 312, which form one end, has the detection space 314 of opening, easy to pair
Silicon core in sensing chamber 300 is detected in all directions so that detection is more accurate.It is it should be understood that specific at other
In embodiment, detection device can also be arranged to by other shapes according to the demand of user.
It should also be noted that, in the present embodiment, in one end connection of opening of the detection probe 310 away from monitoring space
There is the 3rd driving device；3rd driving device is used to drive detection probe 310 to move along the length direction of sensing chamber 300, by
It is more a length of easy to detect in silicon core, the detection probe 310 in sensing chamber 300 need to be designed as removable probe be easy to silicon core into
The more comprehensive detection of row, improves accuracy of detection.It should be understood that in other specific embodiments, can also be according to user's
Demand, drives detection probe 310 to detect silicon core using manual or other modes.
In the present embodiment, detection probe 310 is arranged to scanner, and detection probe 310 is arranged to scanner, scanner
It is relatively conventional in daily, increase the can match of detection probe 310.
It should also be noted that, in the present embodiment, detection probe 310 is arranged to scanner, scanner is in daily
It is relatively conventional, increase the can match of detection probe 310.It should be understood that in other specific embodiments, can also according to
The demand at family, other devices are arranged to by detection probe 310.
In the present embodiment, sensing chamber 300 further includes processing unit 320；Processing unit 320 is electrically connected with detection probe 310
Connect.The processing unit 320 being electrically connected with detection probe 310 is set in sensing chamber 300, and scanning means is in sensing chamber 300
Silicon core carries out comprehensive scanning, and the photo that scanning means is quickly shot is passed to processing unit 320 according to sequence afterwards, handles
Device 320 makes corresponding measure.
Fig. 4 is the functional block diagram of the sensing chamber 300 of the silicon core cleaning device 10 provided in the embodiment of the present invention.It refer to figure
4, in the present embodiment, processing unit 320 includes identification module 322, mark module 324 and control module 326；Scanning means
Comprehensive scanning is carried out to the silicon core in sensing chamber 300, the photo that scanning means is shot is passed into processing according to sequence afterwards
The photo of silicon core is identified in the identification module 322 of device 320, identification module 322 one by one, identifies the photograph there are stain
Piece.And the signal of the existing photo is passed into mark module 324, mark module 324 is to there are the position of the silicon core of stain
And silicon core numbering passes to control module 326, and corresponding processing is made easy to control module 326.It should be noted that at other
In specific embodiment, processing unit 320 can also be set by other forms according to the demand of user.
In the present embodiment, processing unit 320 is also associated with display screen 330.The mark module 324 of processing unit 320 with
Display screen 330 is electrically connected, easy in display screen 330 observe sensing chamber 300 in there are stain silicon core position and numbering,
The numbering for the silicon core not cleaned up there will be spot or and position are presented on display screen 330.Easy to not cleaning
Clean silicon core makes corresponding measure.
It should be noted that in the present embodiment, the mark module 324 of processing unit 320 is electrically connected with display screen 330,
Easy in display screen 330 observe sensing chamber 300 in there are stain silicon core position and numbering, there will be spot or do not have
The numbering and position for having the silicon core cleaned up are presented on display screen 330.Easy to make phase to the silicon core not cleaned up
The measure answered.It should be understood that in other specific embodiments, display screen 330 can also be not provided with according to the demand of user.
In the present embodiment, processing unit 320 is also associated with manipulator 340.Manipulator 340 is set, by processing unit 320
In control module 326 be electrically connected with manipulator 340, mark module 324 to there are the position of the silicon core of stain and silicon core numbering
Control module 326 is passed to, the signal that control module 326 transmits mark module 324 carries out processing analysis, control machinery hand
340 run to the position of the silicon core there are stain, and the silicon core there will be stain clamps out, be convenient for cleaning again or its
His processing mode.
It should be noted that in the present embodiment, the control module 326 in processing unit 320 is electrically connected with manipulator 340
Connect, mark module 324 to pass to control module 326 to there are the position of the silicon core of stain and silicon core numbering, and control module 326 will
The signal that mark module 324 transmits carries out processing analysis, and control machinery hand 340 runs to the position of the silicon core there are stain, will
Silicon core there are stain clamps out, is convenient for cleaning again or other processing modes.It is it should be understood that specific at other
In embodiment, it can also be not provided with manipulator 340 according to user demand or will clean unqualified silicon core using other structures
Take out.
In the present embodiment, silicon core cleaning device 10 further includes silicon core collecting box (invisible in figure)；Silicon core collecting box leans on
Nearly sensing chamber 300 is set, and sets silicon core collecting box to be cleaned after underproof silicon core takes out easy to manipulator 340 and is placed on silicon core
On collecting box, after will clean unqualified silicon core and place and second is carried out in service sink clean.
It should be noted that in the present embodiment, silicon core collecting box is set to clean underproof silicon easy to manipulator 340
Core is placed on silicon core collecting box after taking out, after will clean unqualified silicon core and place and second is carried out in service sink clean.Can be with
Understand, in other specific embodiments, silicon core collecting box can also be not provided with or using other knots according to the demand of user
Structure or the instrument recycling underproof silicon core of first wash.
In the present embodiment, silicon core cleaning device 10 further includes transmission device 400；Transmission device 400 includes at least two
Clamping piece 410, the clamping face of each clamping piece 410 are horizontally disposed with；Clamping piece 410 be sequentially connected with first driving means 420 with
And second driving device 430；First driving means 420 are used to drive 410 horizontal movement of clamping piece；Second driving device 430 is used
In drive 410 vertical and straight movement of clamping piece.Using first driving means 420 easy to clamping piece 410 in purge chamber 100, hurricane drier 200
And flowed between sensing chamber 300.It is easy to the silicon core that clamping piece 410 is accommodated being placed on clearly using the second driving device 430
Cleaning in wash pool.Manual operation is reduced, manpower is saved and avoids manually caused dangerous and avoid manually staining silicon core.
It should be noted that in the present embodiment, using first driving means 420 easy to clamping piece 410 in purge chamber
100th, flowed between hurricane drier 200 and sensing chamber 300.It is easy to accommodated clamping piece 410 using the second driving device 430
Silicon core is placed on cleaning in service sink.Manual operation is reduced, manpower is saved and avoids manually caused dangerous and avoid manually
Stain silicon core.It should be understood that in other specific embodiments, transmission device can also be not provided with according to the demand of user
400。
Fig. 5 is the structure diagram of the clamping piece 410 of the silicon core cleaning device 10 provided in the embodiment of the present invention.It refer to
Fig. 5, in the present embodiment, the clamping face of clamping piece 410 offer the slot segmentation 412 for accommodating silicon core.In the clamping of clamping piece 410
The slot segmentation 412 that face offers receiving silicon core is for the ease of divided silicon core, is separated from each other the silicon core on clamping face, just
In cleaning and easy to detect.
It should be noted that in the present embodiment, the slot segmentation for accommodating silicon core is offered in the clamping face of clamping piece 410
412 be for the ease of divided silicon core, is separated from each other the silicon core on the clamping face, easy to clean and easy to detect.Can be with
Understand, in other specific embodiments, slot segmentation 412 can also be not provided with according to the demand of user.
In the present embodiment, 412 outer surface of slot segmentation is provided with elastic anti-slip layer.It is provided with 412 outer surface of slot segmentation
Elastic anti-slip layer is in order to avoid the silicon core in slot segmentation 412 slides in transmit process, increases the steady of silicon core cleaning device 10
It is qualitative.
It should be noted that in the present embodiment, be provided with 412 outer surface of slot segmentation elastic anti-slip layer be in order to avoid
Silicon core in slot segmentation 412 slides in transmit process, the stability of increase silicon core cleaning device 10.It should be understood that at it
In his specific embodiment, elastic anti-slip layer can also be not provided with according to the demand of user.
The silicon core cleaning device 10 provided in the embodiment of the present invention, purge chamber 100, hurricane drier 200 and sensing chamber 300
It is disposed adjacent successively；Silicon core after cleaning, after hurricane drier 200 air-dries, is placed in detection in sensing chamber 300 in purge chamber 100,
Whether detection silicon core cleans up, and the silicon core cleaning device 10 provided in the embodiment of the present invention sets sensing chamber 300 to silicon core
It is detected, instead of manually range estimation intuitive judgment, error caused by avoiding when artificial sense organ judges, has and judge accurately, to subtract
Few operational sequence, saves human resources, improves the beneficial effect of security performance.
A kind of silicon core cleaning performance determination methods, silicon core cleaning performance determination methods are additionally provided in the embodiment of the present invention
Realized using above-mentioned silicon core cleaning device 10；
The step of silicon core cleaning performance determination methods, is as follows：
Cleaning process：Silicon core is placed in service sink and is cleaned；
Air-dry process：The silicon core that cleaning finishes is placed in hurricane drier 200 to be air-dried；
Detect process：Silicon core after to air-drying is placed in sensing chamber 300 and is detected；Whether detection silicon core cleans up.
In the present embodiment, the cleaning process of silicon core is easy to clamping piece 410 in purge chamber using first driving means 420
100th, flowed between hurricane drier 200 and sensing chamber 300.It is easy to accommodated clamping piece 410 using the second driving device 430
Silicon core is placed on cleaning in service sink.Manual operation is reduced, manpower is saved and avoids manually caused dangerous and avoid manually
Stain silicon core.
It should be noted that in the present embodiment, setting is being cleaned using first driving means 420 easy to clamping piece 410
Flowed between room 100, hurricane drier 200 and sensing chamber 300.It is easy to be accommodated clamping piece 410 using the second driving device 430
Silicon core be placed on cleaning in service sink.Manual operation is reduced, manpower is saved and avoids manually caused dangerous and avoid people
Work stains silicon core.It should be understood that in other specific embodiments, can also be not provided with automatically delivering according to the demand of user
Process.
In the present embodiment, detect in process, it is carried out along the length direction of silicon core to be checked using detection probe 310
Scanning, processing unit 320 is passed to by the photo of scanning shoot according to sequence, processing unit 320 to there are the silicon core of stain into
Row identification.Popped one's head in using mobile monitoring along the length direction of silicon core and silicon core is scanned, it is comprehensive easy to be carried out to silicon core
Scanning, improve accuracy of detection；It is easy to make corresponding treatment measures to the silicon core there are stain using processing unit 320.
It should be noted that in the present embodiment, using mobile monitoring probe along silicon core length direction to silicon core into
Row scanning, easy to carry out comprehensive scanning to silicon core, improves accuracy of detection.It should be understood that in other specific embodiments,
Silicon core can also be scanned using other detection devices according to the demand of user.
In the present embodiment, in process is detected, the identification module 322 in processing unit 320 carries out the photo of silicon core
Identification, identifies the photo there are stain, and this is passed to there are the signal of the photo of stain to the mark in processing unit 320
Module 324, the mark module 324 in processing unit 320 to pass to processing to there are the position of the silicon core of stain and silicon core numbering
Control module 326 in device 320, the control module 326 in processing unit 320 make corresponding processing.Using processing unit
Identification module 322, mark module 324 and control module 326 in 320 can be achieved that the silicon core there are stain is identified
And corresponding processing is made to it.
It should be noted that in the present embodiment, using the identification module 322 in processing unit 320, mark module 324
And control module 326 can be achieved to being identified there are the silicon core of stain and corresponding processing being made to it.It is appreciated that
, in other specific embodiments, it can also be formed according to the demand of user, processing unit 320 using other modules.
In the present embodiment, recovery process is further included after process is detected, 326 control machinery hand 340 of control module will inspection
Survey and clean unqualified silicon core taking-up, be put into silicon core collecting box.The recovery process is set easy to preferably clean silicon core, and to inspection
Survey and clean underproof silicon core progress secondary cleaning.
It should be noted that in the present embodiment, in process is detected, recovery process is added, detection cleaning is unqualified
Silicon core is taken out using manipulator 340, is put into silicon core collecting box, after launch again into being cleaned in service sink.This time is set
Sequence of knocking off cleans underproof silicon core to detection and carries out secondary cleaning easy to preferably clean silicon core.It should be understood that at it
In his specific embodiment, it can also be not provided with recovery process according to user demand or detection cleaned using other modes
Underproof silicon core is handled.
The silicon core cleaning performance determination methods provided in the embodiment of the present invention, are using above-mentioned silicon core cleaning device 10
During work, silicon core to be cleaned is placed in service sink by the clamping piece 410 of transmission device 400 to be cleaned.Cleaning finishes
Afterwards, clamping piece 410 is driven to move up disengaging service sink under the action of the second driving device 430.And in first driving means
Under the action of 420, silicon core is transported to hurricane drier 200.Silicon core is carried out after air-drying processing, in the work of first driving means 420
Silicon core is transported in sensing chamber 300 with lower, silicon core is placed in the detection space 314 of detection probe 310, the 3rd driving device
Detection probe 310 is driven to be moved along the length direction of silicon core, easy to more comprehensively be taken pictures to silicon core, detection probe
310 are sent the photo of silicon core everywhere to the identification module 322 of processing unit 320, processing in sequence using using camera function
The silicon core there are stain is identified in the identification module 322 of device 320, identifies the photo there are stain.And this is existed
The signal of photo pass to mark module 324, mark module 324 to be transmitted to there are the position of the silicon core of stain and silicon core numbering
To control module 326 and display screen 330.Control module 326 receives what this was numbered there are the position of the silicon core of stain and silicon core
After signal, the signal that mark module 324 is transmitted carries out processing analysis, and control machinery hand 340 runs to the silicon there are stain
The position of core, the silicon core there will be stain clamp out, are placed in silicon core collecting box, are placed easy to clean unqualified silicon core
Carry out cleaning for second in service sink.After display screen 330 receives the signal that this is numbered there are the position of the silicon core of stain and silicon core,
The numbering for the silicon core not cleaned up there will be spot or and position are presented on display screen 330, are deposited easy to user's observation
In the position of the silicon core of stain and numbering.The silicon core cleaning performance determination methods provided in the embodiment of the present invention, due to using
Above-mentioned silicon core cleaning device 10, therefore also have and judge accurately, to reduce operational sequence, human resources are saved, improve security
The beneficial effect of energy.
The foregoing is only a preferred embodiment of the present invention, is not intended to limit the invention, for the skill of this area
For art personnel, the invention may be variously modified and varied.Within the spirit and principles of the invention, that is made any repaiies
Change, equivalent substitution, improvement etc., should all be included in the protection scope of the present invention.
Claims (9)
- A kind of 1. silicon core cleaning device, it is characterised in that：The silicon core cleaning device includes purge chamber, hurricane drier and sensing chamber；The purge chamber, the hurricane drier and described Sensing chamber is disposed adjacent successively；The purge chamber possesses the service sink for having upper end opening；The hurricane drier is arranged between the purge chamber and the sensing chamber；Setting of the sensing chamber close to the hurricane drier；The sensing chamber can detect whether silicon core cleans up；The detection interior is provided with detection probe；The detection probe includes two test sections being oppositely arranged；Described in two Test section, which forms one end, has the detection space of opening；One end connection of opening of the detection probe away from the detection space There is the 3rd driving device；3rd driving device is used to drive the detection probe to move along the length direction of the sensing chamber It is dynamic.
- 2. silicon core cleaning device according to claim 1, it is characterised in that：The silicon core cleaning device further includes transmission device；The transmission device includes at least two clamping pieces, each folder The clamping face of gripping member is horizontally disposed with；The clamping piece is sequentially connected with first driving means and the second driving device；Described One driving device is used to drive the clamping piece horizontal movement；Second driving device is used to drive the clamping piece to transport vertically It is dynamic.
- 3. silicon core cleaning device according to claim 2, it is characterised in that：The clamping face of the clamping piece offers the slot segmentation for accommodating silicon core.
- 4. silicon core cleaning device according to claim 1, it is characterised in that：The sensing chamber further includes processing unit；The processing unit is electrically connected with the detection probe.
- 5. silicon core cleaning device according to claim 4, it is characterised in that：The processing unit is also associated with manipulator.
- A kind of 6. silicon core cleaning performance determination methods, it is characterised in that：The silicon core cleaning performance determination methods are using the silicon core cleaning device described in claim 1 to 5 any one；The step of silicon core cleaning performance determination methods, is as follows：Cleaning process：Silicon core is placed in the service sink and is cleaned；Air-dry process：The silicon core that cleaning finishes is placed in the hurricane drier to be air-dried；Detect process：Silicon core after to air-drying is placed in the sensing chamber and is detected；Whether detection silicon core cleans up.
- 7. silicon core cleaning performance determination methods according to claim 6, it is characterised in that：In the detection process, it is scanned along the length direction of silicon core to be checked using detection probe, by scanning shoot Photo pass to processing unit according to sequence, the silicon core there are stain is identified in the processing unit.
- 8. silicon core cleaning performance determination methods according to claim 7, it is characterised in that：In the detection process, the photo of silicon core is identified in the identification module in the processing unit, identifies in the presence of dirty The photo of point, and this is passed to there are the signal of the photo of stain to the mark module in the processing unit, the processing dress The mark module put is to passing to the control module in the processing unit there are the position of the silicon core of stain and silicon core numbering.
- 9. silicon core cleaning performance determination methods according to claim 8, it is characterised in that：Recovery process is further included after the detection process, the control module control machinery hand will detect the unqualified silicon core of cleaning and take Go out, be put into silicon core collecting box.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710423882.6A CN107236994B (en) | 2017-06-07 | 2017-06-07 | Silicon core cleaning device and cleaning performance determination methods |
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| CN108580330A (en) * | 2018-04-25 | 2018-09-28 | 嘉兴能发电子科技有限公司 | A kind of solar energy polycrystalline silicon sheet quality apparatus for automatically sorting and sorting technique |
| CN114985363B (en) * | 2022-06-06 | 2023-08-01 | 江苏鑫华半导体科技股份有限公司 | Silicon core cleaning equipment for electronic grade polysilicon |
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| CN201537607U (en) * | 2009-08-14 | 2010-08-04 | 常州捷佳创精密机械有限公司 | Workpiece cleaning device |
| CN203018413U (en) * | 2012-11-26 | 2013-06-26 | 常州捷佳创精密机械有限公司 | Main and auxiliary groove device for washing silicon core |
| CN203411657U (en) * | 2013-06-28 | 2014-01-29 | 陕西天宏硅材料有限责任公司 | Silicon core cleaning flower basket of reduction furnace |
| CN104867810A (en) * | 2014-02-26 | 2015-08-26 | 盛美半导体设备（上海）有限公司 | Wafer cleaning device |
| CN205762595U (en) * | 2016-06-03 | 2016-12-07 | 苏州可立林自动化设备有限公司 | Full-automatic by formula Spray-cleaning Machine |
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| CN201537607U (en) * | 2009-08-14 | 2010-08-04 | 常州捷佳创精密机械有限公司 | Workpiece cleaning device |
| CN203018413U (en) * | 2012-11-26 | 2013-06-26 | 常州捷佳创精密机械有限公司 | Main and auxiliary groove device for washing silicon core |
| CN203411657U (en) * | 2013-06-28 | 2014-01-29 | 陕西天宏硅材料有限责任公司 | Silicon core cleaning flower basket of reduction furnace |
| CN104867810A (en) * | 2014-02-26 | 2015-08-26 | 盛美半导体设备（上海）有限公司 | Wafer cleaning device |
| CN205762595U (en) * | 2016-06-03 | 2016-12-07 | 苏州可立林自动化设备有限公司 | Full-automatic by formula Spray-cleaning Machine |
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Address after: 810007 No.1, Jinsi Road, Xining Economic and Technological Development Zone, Xining City, Qinghai Province Patentee after: Asia silicon (Qinghai) Co., Ltd Address before: 810007 Qinghai city of Xining Province Economic and Technological Development Zone No. 1 gold Guilu Patentee before: ASIA SILICON (QINGHAI) Co.,Ltd. |
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