CN107229762B - A Microwave Circuit Characteristic Analysis Method Containing Semiconductor Physical Model - Google Patents
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Abstract
本发明公开了一种含半导体物理模型的微波电路特性分析方法。该方法主要利用时域体面积分方法的场路耦合算法分析含半导体物理模型的微波电路结构。场路耦合算法要求在电磁结构和电路结构连接位置处具有相同电流和电位。而其中的半导体的物理特性是通过时域谱元方法进行数值求解。因为半导体的内部物理变化过程是通过漂移扩散方程描述的,所以半导体的物理特性是非线性的,微波电路的电特性计算过程需要采用离散的牛顿迭代方法,同时采用改进的严格同步的耦合求解过程,提高了算法的稳定性和高效性。
The invention discloses a method for analyzing the characteristics of a microwave circuit including a semiconductor physical model. This method mainly uses the field-circuit coupling algorithm of the time-domain volume integration method to analyze the structure of the microwave circuit with the semiconductor physical model. The field-circuit coupling algorithm requires the same current and potential at the junction of the electromagnetic structure and the circuit structure. The physical properties of the semiconductors are solved numerically by the time-domain spectral element method. Because the internal physical change process of the semiconductor is described by the drift-diffusion equation, the physical characteristics of the semiconductor are nonlinear. The calculation process of the electrical characteristics of the microwave circuit needs to use a discrete Newton iteration method, and an improved strictly synchronous coupling solution process. Improve the stability and efficiency of the algorithm.
Description
技术领域technical field
本发明涉及电磁仿真技术领域,特别是针对微波半导体电路的真实物理特性分析,提出的一种可以分析实际微波电路结构的时域体面积分方法。The invention relates to the technical field of electromagnetic simulation, in particular to the analysis of the real physical characteristics of a microwave semiconductor circuit, and proposes a time-domain volume area integration method that can analyze the structure of an actual microwave circuit.
背景技术Background technique
对于含有集成电路模块和基片系统这类场一路混合问题的仿真,时域方法是非常有用的,因为采用时域方法可以精确模拟电路中的非线性元件,而且还可以获得宽带信息。关于时域仿真这类场一路藕合问题的研究,以前主要依赖于差分方程法,如有限差分法,过去人们都青睐于差分法,其原因是差分法的稳定性和它容易实现集总电路元件的加入。然而近来随着时域积分方程求解技术的发展,尤其是其晚时稳定性的提高,计算复杂度的减弱和计算性能随着快速算法的采用而增强,以及针对场一路耦合问题的新的仿真方案的持续研究。这些都使得TDIE求解方案得到了广泛的关注。Time-domain methods are very useful for the simulation of field-one-way mixing problems involving integrated circuit modules and substrate systems, because nonlinear components in circuits can be accurately modeled and broadband information can be obtained. The research on the coupling problem of the field in the time domain simulation mainly relied on the difference equation method, such as the finite difference method. addition of components. However, with the recent development of time-domain integral equation solving techniques, especially the improvement of its late-time stability, the reduction of computational complexity and the enhancement of computational performance with the adoption of fast algorithms, as well as new simulations for field-path coupling problems Continuing study of the program. All of these make the TDIE solution get extensive attention.
起初,TDIE方法在解决场一路混合问题仿真方面的努力是基于部分单元等效电路(PEEC)法上,PEEC的关键思想是将导线间的电磁耦合转化为一个等效电路,并把它同其他任意的集总电路模型连接起来形成一个电路仿真器,就像SPICE软件一样。近期TDIE在稳定性和计算速度上的提高引领了一个想法,那就是将积分方程法同电路分析方法相结合,首先应用在金属结构上,然后扩展应用到金属介质混合结构上。一般针对金属/介质混合的电路问题是将TDIE方法与电路仿真方法)改进的节点分析法(modifiednodalanalysis,MNA)相结合。这种求解电路电磁藕合方案的基础是耦合电流的思想,区域中的电路部分和电磁结构部分就是通过这种耦合电流联系起来的。由于此方法可同时加电路激励和场激励,所以它可以用于信号完整性和EMI/EMC的仿真。Initially, the TDIE method's efforts to solve the field-to-one hybrid problem simulation were based on the Partial Element Equivalent Circuit (PEEC) method. The key idea of PEEC is to convert the electromagnetic coupling between wires into an equivalent circuit and combine it with other Arbitrary lumped circuit models are linked together to form a circuit simulator, just like SPICE software. The recent improvements in stability and computational speed of TDIE have led to the idea of combining the integral equation method with the circuit analysis method, first in metallic structures, and then extended to metallic-dielectric hybrid structures. Generally, for the mixed metal/dielectric circuit problem, the TDIE method is combined with the modified nodal analysis (MNA) method of the circuit simulation method. The basis of the electromagnetic coupling scheme of solving circuit is the idea of coupling current, and the circuit part and the electromagnetic structure part in the area are connected by this coupling current. Since this method can add circuit excitation and field excitation at the same time, it can be used for signal integrity and EMI/EMC simulation.
发明内容SUMMARY OF THE INVENTION
本发明的目的在于提供一种含半导体物理模型的微波电路特性分析方法,同时考虑微波半导体电路中的真实物理过程的方程描述以及采用场路耦合算法耦合场路矩阵方程,最终通过改进的牛顿迭代方法的严格同步求解电路的物理参量。The purpose of the present invention is to provide a method for analyzing the characteristics of a microwave circuit including a semiconductor physical model, while considering the equation description of the real physical process in the microwave semiconductor circuit and coupling the field-circuit matrix equation using a field-circuit coupling algorithm, and finally through the improved Newton iteration The method is strictly synchronous to solve the physical parameters of the circuit.
实现本发明目的的技术解决方案为:一种含半导体物理模型的微波电路特性分析方法,步骤表述如下:The technical solution for realizing the purpose of the present invention is: a method for analyzing the characteristics of a microwave circuit containing a semiconductor physical model, and the steps are described as follows:
第一步,建立微波电路结构的求解模型,电磁结构中的金属部分采用三角形对模型进行剖分,介质部分采用四面体的剖分方式,得到模型的结构信息,即每个三角形和四面体的单元信息;The first step is to establish the solution model of the microwave circuit structure. The metal part of the electromagnetic structure is divided into triangles, and the medium part is divided into tetrahedrons to obtain the structural information of the model, that is, the size of each triangle and tetrahedron. unit information;
第二步,从麦克斯韦方程方程组出发,确定电磁目标的时域电场积分方程;The second step is to determine the time-domain electric field integral equation of the electromagnetic target from Maxwell's equations;
第三步,需要对金属的面电流和介质体的电通量密度在空间和时间域上分别进行离散。此处,针对金属表面的面电流的离散方式为在空间上使用RWG基函数进行离散,对金属表面的剖分方式使用的是三角形面片的剖分形式。而对介质体的处理有别于金属的地方是对电通量密度的空间离散方式,在空间域上利用SWG基函数进行离散,对介质体的剖分选用的是四面体的体剖分方式。此外,在时间域上,时域体面积分方程对金属和介质部分均使用4阶Lagrange插值时间基函数进行离散。In the third step, it is necessary to discretize the surface current of the metal and the electric flux density of the dielectric body in the spatial and temporal domains, respectively. Here, the discretization method of the surface current on the metal surface is to use the RWG basis function to discretize in space, and the division method of the metal surface uses the triangular patch division method. The difference between the processing of the dielectric body and the metal is the spatial discretization of the electric flux density. In the spatial domain, the SWG basis function is used for discretization, and the tetrahedron is used for the division of the dielectric body. . In addition, in the time domain, the time domain volume integral equation is used to discretize the metal and dielectric parts using the 4th-order Lagrange interpolation time basis function.
第四步,将第三步的金属表面电流和介质体的电通量密度展开表达式代入第二步的时域电场积分方程中,然后对离散形式的时域电场积分方程分别在时间上采用点测试、在空间上采用Galerkin测试,得到系统阻抗矩阵方程;The fourth step is to substitute the expanded expressions of the metal surface current and the electric flux density of the dielectric body in the third step into the time-domain electric field integral equation in the second step, and then use the time-domain electric field integral equation in the discrete form respectively. Point test, use Galerkin test in space, get the system impedance matrix equation;
第五步,从半导体漂移-扩散方程组出发,将所要求解的载流子浓度以及电势在各节点上展开,对半导体漂移-扩散方程采用伽辽金法测试,利用牛顿迭代法求解得到各节点的载流子以及电势分布,最终半导体内部的物理参数;The fifth step is to start from the semiconductor drift-diffusion equations, expand the required carrier concentration and potential at each node, use the Galerkin method to test the semiconductor drift-diffusion equations, and use the Newton iteration method to solve them. The carrier and potential distribution of the node, and finally the physical parameters inside the semiconductor;
第六步,根据第四步得到的系统阻抗矩阵方程以及第五步得到的半导体物理参数,通过场路耦合的思想建立严格同步的场路耦合矩阵方程,然后通过改进的牛顿迭代求解,得到微波电路结构中的时域电流分布,根据时域电流分布得到物理参数,完成仿真过程。In the sixth step, according to the system impedance matrix equation obtained in the fourth step and the semiconductor physical parameters obtained in the fifth step, a strictly synchronized field-circuit coupling matrix equation is established through the idea of field-circuit coupling, and then the microwave is obtained by the improved Newton iterative solution. The time-domain current distribution in the circuit structure, the physical parameters are obtained according to the time-domain current distribution, and the simulation process is completed.
本发明与现有技术相比,其显著优点:(1)采用的时域体面积分方程相对于时域表面积分方程方法可以处理更为复杂的三维电磁结构,比如金属-介质混合的微带传输线结构等。(2)微波半导体电路的物理特性方程是从半导体漂移-扩散方程组出发,将所要求解的载流子浓度以及电势在各节点上展开,对方程采用伽辽金法测试,利用牛顿迭代法求解得到各节点的载流子以及电势分布,相比于等效电路模型更能准确的分析PIN管的物理过程,同时可以进一步进行微波电路的电热一体化分析。(3)将半导体的物理模型方程合并到基于MOT的时域体面积分方程中组成一个严格同步的场路耦合求解方法,求解过程采用改进的牛顿迭代方法,这样可以保证场路耦合求解的计算准确性的同时提高一定的计算效率。Compared with the prior art, the present invention has significant advantages: (1) Compared with the time-domain surface integral equation method, the adopted time-domain volume integral equation method can handle more complex three-dimensional electromagnetic structures, such as metal-dielectric mixed microstrip transmission lines structure, etc. (2) The physical characteristic equations of microwave semiconductor circuits are based on the semiconductor drift-diffusion equations. The carrier concentration and potential to be solved are expanded at each node, and the equations are tested by the Galerkin method and the Newton iteration method. The carrier and potential distribution of each node are obtained by solving, which can more accurately analyze the physical process of the PIN tube compared with the equivalent circuit model, and can further analyze the electro-thermal integration of the microwave circuit. (3) Combine the physical model equation of the semiconductor into the MOT-based time domain volume integral equation to form a strictly synchronous field-circuit coupling solution method. The solution process adopts an improved Newton iteration method, which can ensure the calculation accuracy of the field-circuit coupling solution. while improving the computational efficiency to a certain extent.
附图说明Description of drawings
图1是RWG基函数。Figure 1 is the RWG basis function.
图2是SWG基函数。Figure 2 is the SWG basis function.
图3是MOSFET的剖面图。FIG. 3 is a cross-sectional view of a MOSFET.
图4是MOSFET管放大器电路的三维电磁结构模型。Figure 4 is a three-dimensional electromagnetic structure model of a MOSFET amplifier circuit.
图5是正弦连续信号作用下的MOSFET管放大器电路的仿真结果。Fig. 5 is the simulation result of the MOSFET tube amplifier circuit under the action of sinusoidal continuous signal.
具体实施方式Detailed ways
本发明将基于时间步进(MOT)的时域体面积分方法的电磁结构分析过程和时域谱元法的半导体电路结构分析过程相结合,即非线性的半导体物理方程合并到基于MOT的时域体面积分方程中组成一个混合的场路求解,这样使电磁结构与电路结构之间的互耦分析计算更加一致有效。物理模型相对于等效的解析模型的在分析实际结构的特性时更符合真实物理过程,计算分析更加准确。但是物理模型的分析也会消耗更多的时间,耗费计算资源,针对这种问题,提出一种改进的牛顿迭代求解方案,可以节省一部分计算时间。由于真实物理过程的模拟比较复杂,目前还很少有相关报道介绍微波电路问题的场路耦合分析半导体物理过程,在时域体面积分方法中更未见报道。这也是本发明的创新之处。The present invention combines the electromagnetic structure analysis process based on the time-step (MOT) time-domain volume integration method and the semiconductor circuit structure analysis process based on the time-domain spectral element method, that is, the nonlinear semiconductor physics equation is merged into the MOT-based time domain. A hybrid field-circuit solution is formed in the volume integral equation, which makes the analysis and calculation of the mutual coupling between the electromagnetic structure and the circuit structure more consistent and effective. Compared with the equivalent analytical model, the physical model is more in line with the real physical process when analyzing the characteristics of the actual structure, and the calculation analysis is more accurate. However, the analysis of the physical model also consumes more time and computing resources. For this problem, an improved Newton iterative solution is proposed, which can save some computing time. Due to the complexity of the simulation of the real physical process, there are few related reports on the field-circuit coupling analysis of the semiconductor physical process for microwave circuit problems, and no report has been reported in the time-domain volumetric integration method. This is also the innovation of the present invention.
下面结合附图对本发明作进一步详细描述。The present invention will be described in further detail below with reference to the accompanying drawings.
一、时域体面积分方法的基本原理1. The basic principle of the time-domain volumetric integration method
假定自由空间中存在金属—介质的混合目标,其中金属的表面用S表示,介质体的体积用V表示,且该介质是各向同性的、无磁性的、非分散的、无耗的,其介电常数为ε(r)。自由空间的介电常数为ε0,磁导率为μ0。当有时域入射波Einc(r,t)对该混合目标进行照射时,则会在金属表面S上和介质体V内分别产生感应面电流Js(r,t)和极化体电流Jv(r,t)。那么,空间中的散射场就包括感应面电流和极化体电流两部分共同产生的散射场之和,即:Assume that there is a metal-medium mixed target in free space, where the surface of the metal is denoted by S, the volume of the medium is denoted by V, and the medium is isotropic, non-magnetic, non-dispersive, and lossless, and its The dielectric constant is ε(r). The permittivity of free space is ε 0 and the permeability is μ 0 . When the time-domain incident wave E inc (r, t) irradiates the hybrid target, the induced surface current J s (r, t) and the polar body current J will be generated on the metal surface S and in the dielectric body V, respectively. v (r,t). Then, the scattered field in space includes the sum of the scattered fields jointly generated by the induced surface current and the polarizer current, namely:
并且有:and there is:
此外,在介质体内,电通量密度D(r,t)、极化体电流Jv(r,t)以及总电场E(r,t)三者之间的关系满足如下表达式:In addition, in the dielectric body, the relationship between the electric flux density D(r,t), the polar body current J v (r,t) and the total electric field E(r,t) satisfies the following expression:
D(r,t)=ε(r)E(r,t) (1.4)D(r,t)=ε(r)E(r,t) (1.4)
由于空间中同时存在金属、介质两类目标,得各自构造相应的时域积分方程,在金属表面S上满足切向的总电场的时间导数为零,而在介质体V内总电场的时间导数等于入射电场的时间导数与散射电场的时间导数之和,即:Since there are two types of targets in space, metal and dielectric, the corresponding time domain integral equations must be constructed respectively. The time derivative of the total electric field satisfying the tangential direction on the metal surface S is zero, while the time derivative of the total electric field in the dielectric body V is zero. It is equal to the sum of the time derivative of the incident electric field and the time derivative of the scattering electric field, namely:
上述的式(1.6)和式(1.7)共同组成了适合分析金属—介质混合目标的时域体面积分方程。此处,值得注意的是,上式中的时域体面积分方程对方程等式两边的时间求导操作。The above equations (1.6) and (1.7) together form a time-domain volumetric integral equation suitable for analyzing metal-dielectric mixed targets. Here, it is worth noting that the time domain volume integral equation in the above equation operates on the time derivation of both sides of the equation.
为了通过数值方法来求解上述的时域体面积分方程,需要对金属的面电流Js(r,t)和介质体的电通量密度D(r,t)在空间和时间域上分别进行离散。此处,针对金属表面的面电流Js(r,t)的离散方式,在空间上使用RWG基函数进行离散,对金属表面的剖分方式使用的是三角形面片的剖分形式。而对介质体的处理有别于金属的地方是对电通量密度D(r,t)的空间离散方式,本文在空间域上利用SWG基函数进行离散,对介质体的剖分选用的是四面体的体剖分方式。此外,在时间域上,时域体面积分方程对金属和介质部分均使用4阶Lagrange插值时间基函数进行离散。其中,RWG基函数的定义如下图1所示,SWG基函数的定义如图1所示。In order to solve the above-mentioned time-domain volume integral equation numerically, it is necessary to discretize the surface current J s (r,t) of the metal and the electric flux density D(r,t) of the dielectric body in the space and time domains, respectively. . Here, for the discretization method of the surface current J s (r, t) of the metal surface, the RWG basis function is used for spatial discretization, and the division method of the metal surface is a triangular patch. The difference between the processing of the dielectric body and the metal is the spatial discretization of the electric flux density D(r, t). In this paper, the SWG basis function is used to discretize in the spatial domain. The volume division of the tetrahedron. In addition, in the time domain, the time domain volume integral equation is used to discretize the metal and dielectric parts using the 4th-order Lagrange interpolation time basis function. Among them, the definition of the RWG basis function is shown in Figure 1 below, and the definition of the SWG basis function is shown in Figure 1.
每个完整的RWG基函数由两个不同的三角形构成,称为该基函数的上、下三角形,图中的和共同组成了第n个基函数。ln表示第n个基函数未知量边的边长,分别表示上、下三角形的面积,为空间矢量。第n个基函数为:Each complete RWG basis function consists of two different triangles, called the upper and lower triangles of the basis function. and Together they form the nth basis function. l n represents the side length of the unknown side of the nth basis function, are the areas of the upper and lower triangles, respectively. is a space vector. The nth basis function is:
使用图1中给出的RWG基函数对理想导体的表面电流J(r)进行展开近似,可以表示为Using the RWG basis function given in Fig. 1 to expand the approximation to the surface current J(r) of an ideal conductor, it can be expressed as
这里,N表示整个理想导体目标表面进行三角形离散后得到的基函数总个数,In表示第n个RWG基函数对应的电流系数,J(r)为电流密度(单位为安培/米或A/m)。Here, N represents the total number of basis functions obtained after triangular discretization of the entire target surface of the ideal conductor, In represents the current coefficient corresponding to the nth RWG basis function, and J(r) is the current density (in ampere/meter or A /m).
图2中相邻四面体是和公共面是第n个介质三角形,面积是an。此外,矢量是上四面体的自由顶点指向源点r的矢量,反之可知这样就可以写出与第n个三角形面片相关的SWG基函数的表达式为:The adjacent tetrahedra in Figure 2 are and The common face is the n-th dielectric triangle and the area is a n . Also, the vector is the vector of the free vertices of the upper tetrahedron pointing to the source point r, and vice versa In this way, the expression of the SWG basis function related to the nth triangular patch can be written as:
这里的分别对应于上、下四面体的体积。除了上述介绍的空间基函数外,本文在针对金属—介质混合问题时使用的4阶Lagrange插值时间基函数为:here correspond to the volumes of the upper and lower tetrahedrons, respectively. In addition to the space basis functions introduced above, the fourth-order Lagrange interpolation time basis function used in this paper for the metal-dielectric mixing problem is:
这样就可以将Js(r,t)和D(r,t)通过空间上和时间上的基函数进行离散展开为如下的形式,即:In this way, J s (r, t) and D (r, t) can be discretely expanded into the following forms through the basis functions in space and time, namely:
其中,各自是RWG基函数和SWG基函数,Ns、Nv各自是金属和介质体离散后的空间基函数的未知量数,Nt表示混合目标离散后的时间基函数的未知量数,分别表示与金属和介质部分的基函数相关的未知系数,Tj(t)=T(t-jΔt),Δt为时间步的大小。in, are the RWG basis function and the SWG basis function respectively, N s and N v are the unknown quantities of the space basis functions after the discretization of the metal and the dielectric body respectively, N t represents the unknown quantities of the time base functions after the discretization of the mixed target, represent the unknown coefficients related to the basis functions of the metal and dielectric parts, respectively, T j (t)=T(t-jΔt), where Δt is the size of the time step.
将式(1.12)、式(1.13)代入到式(1.6)、式(1.7)中后,使用所有的空间基函数和分别对离散后的时域体面积分方程式(1.6)和式(1.7)进行空间上的伽辽金测试,并且在每个时刻tj=jΔt对离散后的时域体面积分方程进行时间上的点匹配,这样就可以得到一系列的方程组,可以写成矩阵方程的形式,即:After substituting equations (1.12) and (1.13) into equations (1.6) and (1.7), all the space basis functions are used and The Galerkin test in space is performed on the discrete time-domain volumetric integral equations (1.6) and (1.7), respectively, and the discrete time-domain volumetric integral equations are subjected to time points at each time t j =jΔt Matching, so that a series of equations can be obtained, which can be written in the form of matrix equations, namely:
其中,in,
其中,j=1,...,Nt,〈·,·〉表示内积。通过在每个时刻t=jΔt对式(1.14)进行矩阵方程的求解,可以得到每个时间步下的所有NEM=Ns+Nv个基函数未知量对应的未知系数,这样可以针对金属—介质混合目标的分析实现时间步进方式下的求解方案,并且式(1.14)也称为基于时间步进的时域体面积分方程。Among them, j=1, . . . , N t , and 〈·,·〉represents the inner product. By solving the matrix equation of equation (1.14) at each time t=jΔt, the unknown coefficients corresponding to all N EM =N s +N v basis function unknowns at each time step can be obtained. —Analysis of the medium mixing target realizes the solution scheme in the time-stepping mode, and Equation (1.14) is also called the time-domain volumetric integral equation based on time-stepping.
二、半导体的物理模型求解2. Solving the physical model of semiconductor
用耦合方法求解MOSFET的瞬态漂移-扩散方程,即将泊松方程和电流连续性方程同时求解,以载流子浓度n,p和电势为变量。Solve the transient drift-diffusion equation of the MOSFET with the coupled method, that is, solve the Poisson equation and the current continuity equation simultaneously, with the carrier concentration n, p and potential for the variable.
MOSFET的瞬态模型方程包括:The transient model equations for the MOSFET include:
归一化的泊松方程: Normalized Poisson equation:
上式(2.1)泊松方程中Γ为净掺杂浓度,ε1,ε2为介电常数,表示为:In the Poisson equation of the above formula (2.1), Γ is the net doping concentration, ε 1 , ε 2 are the dielectric constants, which are expressed as:
归一化的电子电流密度方程: Normalized electron current density equation:
归一化的空穴电流密度方程: Normalized hole current density equation:
归一化的电子电流连续性方程: Normalized electron current continuity equation:
归一化的空穴电流连续性方程: Normalized hole current continuity equation:
归一化的复合率模型: Normalized compound rate model:
如图3所示,MOSFET的边界条件:As shown in Figure 3, the boundary conditions of the MOSFET are:
对于泊松方程,求解区域为整个MOSFET,边界条件为:For the Poisson equation, the solution region is the entire MOSFET and the boundary conditions are:
栅极,漏极,源极和基极极板为固定边界条件(金属边界条件): The gate, drain, source and base plates are fixed boundary conditions (metal boundary conditions):
平行于x坐标轴的为浮置边界条件 Floating boundary conditions parallel to the x-axis
Si-SiO2界面 Si-SiO2 interface
对于电流连续性方程,求解区域为半导体,不包括氧化物,边界条件为:For the current continuity equation, the solution region is semiconductor, excluding oxides, and the boundary conditions are:
漏极,源极和基极极板为固定边界条件(金属边界条件):Drain, source and base plates are fixed boundary conditions (metal boundary conditions):
N区:n=Г,p=1/ΓP区:n=-1/Γ,p=-Γ(2.10)N area: n=Г, p=1/ΓP area: n=-1/Γ, p=-Γ(2.10)
CD+EG+FH为浮置边界条件 CD+EG+FH are floating boundary conditions
注意,三维模型中前后面设置为浮置边界条件。Note that the front and rear in the 3D model are set to floating boundary conditions.
由于电流连续性方程和泊松方程都是非线性的,要用泰勒展开将方程线性化。Since both the current continuity equation and the Poisson equation are nonlinear, the Taylor expansion is used to linearize the equations.
采用全耦合的方法求解漂移-扩散方程,将泰勒展开处理后的方程写成式(2.12)的形式:The fully coupled method is used to solve the drift-diffusion equation, and the equation after Taylor expansion is written in the form of equation (2.12):
通过适当推导得到最终的矩阵形式:The final matrix form is obtained by appropriate derivation:
式(2.13)中,各矩阵块如下:In formula (2.13), each matrix block is as follows:
对于漂移-扩散模型,需要特别指出的是雪崩产生项的处理方法。它的表达式如(2.14)所示:For the drift-diffusion model, it is necessary to point out the treatment method of the avalanche generation term. Its expression is shown in (2.14):
上式(2.14)中,电子和空穴的离化系数为:In the above formula (2.14), the ionization coefficients of electrons and holes are:
其中,T是器件内部当前时刻的温度,Tref是初始环境温度,An,Bn,Cn,Dn和Ap,Bp,Cp,Dp是常数。Among them, T is the temperature at the current moment inside the device, T ref is the initial ambient temperature, An , B n , C n , D n and Ap , B p , C p , D p are constants.
求出电子准费米势φn,空穴准费米势φp和电势后,便可以通过下面的公式求得相应极板的每一个节点的电流。Find the electron quasi-Fermi potential φ n , the hole quasi-Fermi potential φ p and the potential After that, the current of each node of the corresponding plate can be obtained by the following formula.
极板上每一个节点的电子电流:Electron current at each node on the plate:
极板上每一个点的空穴电流:Hole current at each point on the plate:
位移电流:Displacement current:
将每一个节点的电流相加,便是该极板相应的载流子产生的电流。瞬态模拟中,位移电流不可忽略。整个半导体求解过程可以看做是已知输入电压值求解半导体晶体管输出的电流过程。The sum of the currents at each node is the current generated by the corresponding carriers of the plate. In transient simulations, the displacement current cannot be ignored. The whole semiconductor solution process can be regarded as the current process of solving the semiconductor transistor output with known input voltage value.
三、场路耦合算法3. Field-Road Coupling Algorithm
图4中将与加载半导体相连接的电磁结构的G和D位置处的RWG三角形边界边当作等效的电压源边,并且将源上的电压和当作是等效的电压源的馈电电压,此外,流过半导体的电流等于垂直流过该加载边的电流,由于G位置处边界边的电流系数表示的是垂直流过该边的电流密度,因此流过该In Figure 4, the RWG triangular boundary edges at positions G and D of the electromagnetic structure connected to the loaded semiconductor are regarded as equivalent voltage source edges, and the voltage on the source is and Treat the feed voltage as an equivalent voltage source, furthermore, the current flowing through the semiconductor is equal to the current flowing vertically through the loaded edge, due to the current coefficient of the boundary edge at the G position represents the current density flowing vertically through the edge, so
边的电流等于电流系数乘以边长a,即得到混合场—路方程:The current of the side is equal to the current coefficient multiplied by the side length a, that is Get the mixed field-road equation:
由于MOSFET管的栅极电流很小,所以此次当做零值处理。Since the gate current of the MOSFET is very small, it is treated as a zero value this time.
可以得到:You can get:
将时域非线性的场—路耦合系统方程式(3.3)简化为:The nonlinear field-circuit coupling system equation (3.3) in the time domain is simplified to:
该方程的非线性项只与电路未知量有关,且电路未知量的个数NCKT远小于场未知量的个数NEM,那么就可以认为该系统方程组中非线性方程的维数远小于线性方程的维数。因此,传统的求解方案利用标准的牛顿迭代法对整个式(3.4)这样的如此大的矩阵系统进行求解,这并不是一个很有效的、优化的方案。此外,由于每个时间步的每个牛顿迭代步下,式(3.4)中矩阵维数为NEM+NCKT的雅可比矩阵都是变化的,这样不管使用直接解法还是使用迭代解法,对如此大维数的矩阵方程进行求解都是很耗时且繁琐的。因此,为了更有效地求解非线性的耦合系统方程式(3.4),the nonlinear term of the equation Only with circuit unknowns and the number of circuit unknowns N CKT is much smaller than the number of field unknowns N EM , then it can be considered that the dimension of the nonlinear equation in the system of equations is much smaller than the dimension of the linear equation. Therefore, the traditional solution scheme uses the standard Newton iteration method to solve such a large matrix system as the whole formula (3.4), which is not a very efficient and optimal scheme. In addition, due to each Newton iteration step of each time step, the Jacobian matrix of the matrix dimension N EM + N CKT in Eq. (3.4) changes, so no matter whether the direct solution method or the iterative solution method is used, for this Solving matrix equations with large dimensions is time-consuming and tedious. Therefore, in order to solve the nonlinear coupled system equation (3.4) more efficiently,
拆分成两个方程,即:Split into two equations, namely:
将式(3.5)中的场未知量用电路未知量来进行表示,可表示为:Convert the field unknown in Eq. (3.5) to Using circuit unknowns to express, it can be expressed as:
接着,将式(3.7)代入到式(3.6)中去,整理后可以得到:Next, substitute formula (3.7) into formula (3.6), and after sorting, we can get:
将非线性方程式(3.8)表示为:Express the nonlinear equation (3.8) as:
则方程式(3.8)可简写为:Then equation (3.8) can be abbreviated as:
对上述非线性方程式(3.11)同样按照离散的牛顿迭代法进行求解:The above nonlinear equation (3.11) is also solved according to the discrete Newton iteration method:
令 make
最终求解xn+1=xn-[F'(x)]-1·F(x)(3.14)The final solution is x n+1 = x n -[F'(x)] -1 ·F(x)(3.14)
就可以求得该方程的解向量,也就是每个时间步下的电路未知量之后,再将当前时刻求解出来的电路未知量代入到式(3.7)中去,就可以得到当前时刻的场未知量其中,是表示MOSFET求解的过程。 Uj,Ij为上一迭代步的电场,电流值。U*=Uj-ΔU,ΔU预先设为0.01V,幷由求得电流I*。然后,由(3.14)求得试探性的电压Uj+1和电流Ij+1。如此迭代,直至满足迭代精度停止。更新Uj=Uj+1,Ij=Ij+1。之后,再将当前时刻求解出来的电路未知量代入到式(3.7)中去,就可以得到当前时刻的场未知量 The solution vector of the equation can be obtained, that is, the circuit unknowns at each time step After that, the circuit unknowns solved at the current moment are substituted into equation (3.7), and the field unknowns at the current moment can be obtained. in, is the process of representing the MOSFET solution. U j , I j are the electric field and current value of the previous iteration step. U * =U j -ΔU, ΔU is set to 0.01V in advance, and is set by Find the current I * . Then, the tentative voltage U j+1 and current I j+1 are obtained from (3.14). Iterate in this way until the iteration accuracy is met. Update U j =U j+1 , I j =I j+1 . After that, the circuit unknowns solved at the current moment are substituted into equation (3.7), and the field unknowns at the current moment can be obtained.
可以注意到,上述的非线性方程式(3.11)的维数恰好就是电路未知量的个数NCKT,因此上述非线性方程的维数NCKT是远小于方程式(3.4)的维数NEM+NCKT的。由于上述改进的时域非线性耦合系统方程的求解方案只针对非线性方程式(3.11)进行牛顿迭代法求解,因此改进的求解方案比传统的求解方案节省了求解时间,计算效率大大提高。当牛顿迭代满足精度之后,就可以得到每个时间步微波电路结构中电磁部分的电流和电压分布以及半导体电路内部的电压电流变化。It can be noticed that the dimension of the above nonlinear equation (3.11) is exactly the number of circuit unknowns N CKT , so the dimension N CKT of the above nonlinear equation is much smaller than the dimension N EM +N of equation (3.4) CKT 's. Since the above-mentioned improved solution of time-domain nonlinear coupled system equations only solves the nonlinear equation (3.11) by the Newton iteration method, the improved solution saves the solution time and greatly improves the computational efficiency compared with the traditional solution. When the Newton iteration meets the accuracy, the current and voltage distribution of the electromagnetic part of the microwave circuit structure and the voltage and current changes inside the semiconductor circuit can be obtained at each time step.
图4模型中介质基板的长度为17.526mm,宽度为16.256mm,介质基板的高度为0.7874mm,介质的相对介电常数为2.33,两段金属微带线的长度均为7.763mm,宽度为2.286mm,中间跨度为2mm。该模型的金属微带线分为两段,并且定义了4个端口,共对应金属表面的4个RWG基函数。其中,输入端加载频率1.34GHz,电压幅值0.25V的正弦小信号,栅极偏置电压0.5V,漏极偏置电压5V,偏置和负载电阻均为50ohm。,另外的两个端口各自表示场效应管的栅—源极端口和漏—源极端口。正是通过这两个端口G和D,图中两段金属微带线才被有效地连接起来。使用三角形对该模型的金属表面进行剖分,并且使用四面体对模型的介质体进行剖分,离散后得到160个三角形面片,460个四面体,215条金属内边未知量,1102个介质三角形未知量,时间步长大小选取Δt=0.002286lm。通过基于时域积分方程的场—路耦合算法分析,求得场效应管的输入、输出端口的电压信号的时域波形图。In the model shown in Figure 4, the length of the dielectric substrate is 17.526mm, the width is 16.256mm, the height of the dielectric substrate is 0.7874mm, the relative permittivity of the dielectric is 2.33, the length of the two metal microstrip lines is 7.763mm, and the width is 2.286 mm, the middle span is 2mm. The metal microstrip line of this model is divided into two sections, and 4 ports are defined, which correspond to 4 RWG basis functions of the metal surface. Among them, the input terminal is loaded with a small sinusoidal signal with a frequency of 1.34GHz, a voltage amplitude of 0.25V, a gate bias voltage of 0.5V, a drain bias voltage of 5V, and the bias and load resistances are both 50ohm. , and the other two ports respectively represent the gate-source port and the drain-source port of the FET. It is through these two ports G and D that the two metal microstrip lines in the figure are effectively connected. Use triangles to divide the metal surface of the model, and use tetrahedron to divide the model's dielectric body. After discretization, 160 triangular patches, 460 tetrahedra, 215 unknown metal inner edges, and 1102 dielectrics are obtained. The triangle is unknown, and the time step size is selected as Δt=0.002286lm. Through the analysis of the field-circuit coupling algorithm based on the time-domain integral equation, the time-domain waveforms of the voltage signals at the input and output ports of the FET are obtained.
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