CN107219182B - The particle beams excites vacuum ultraviolet-visible light wave range magneto-optic spectrum test method and system - Google Patents

The particle beams excites vacuum ultraviolet-visible light wave range magneto-optic spectrum test method and system Download PDF

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CN107219182B
CN107219182B CN201710572965.1A CN201710572965A CN107219182B CN 107219182 B CN107219182 B CN 107219182B CN 201710572965 A CN201710572965 A CN 201710572965A CN 107219182 B CN107219182 B CN 107219182B
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sample
particle beams
visible light
light wave
wave range
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CN107219182A (en
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瓦西里·帕尼洛维奇
李娜
左文彬
付德君
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Wuhan Newfeige Nano Technology Co ltd
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YICHANG HOUHUANG VACUUM TECHNOLOGY Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/33Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21Polarisation-affecting properties
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/33Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
    • G01N2021/335Vacuum UV

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Abstract

The present invention provides a kind of particle beams excitation vacuum ultraviolet-visible light wave range magneto-optic spectrum test method and systems, the ion beam of electrification is allowed to form eutral particle beam (atomic beam) and neutralizing with electron beam, this particle beams can be unaffected by the magnetic field and excite to sample, utilize the hyperfine structure inside the reflection substance of electromagnetic radiation caused by atomic energy transition energy, and subsequent processing and control are carried out to optical signal by devices such as monochromators, particle detection bombards the electromagnetic radiation for the different frequency range that process generates, including Infrared-Visible-UV and VUV, to disclose the structure of matter of different levels, for the research and development of new material, production and application provide electronic structure foundation.

Description

The particle beams excites vacuum ultraviolet-visible light wave range magneto-optic spectrum test method and system
Technical field
The present invention relates to a kind of particle beams excitation vacuum ultraviolet-visible light wave range magneto-optic spectrum test method and systems, belong to Magneto-optic composes precise detection technology field.
Background technique
Deep ultraviolet, that is, vacuum ultraviolet (Vacuum Ultraviolet, abbreviation VUV).Vacuum ultraviolet wavelengths 200~ 100nm, lower can be the important optical frequency for detecting some deeper atomic energy level transition or Solid Band Structure transition to 100~10nm Section, but effective development and utilization are not yet received.Reason is to be difficult to generate vacuum ultraviolet spectrometry.Ordinary light source such as xenon lamp, mercury lamp Although there is deep ultraviolet spectral line, intensity is extremely weak.Better method is using deep ultraviolet lasers, but the wavelength mesh of deep ultraviolet laser It is preceding all in 200~100nm, hardly result in the wavelength of 100~10nm.Or it is generated with laser freuqency doubling mode, but power damages when frequency multiplication Mistake is very big, and frequency range is often not enough to meet test request.
It is followed by excited using synchrotron radiation, shortcoming is needed using large-scale accelerator, and equipment is expensive, machine Shi Ziyuan It is extremely limited.
Another mode of excitation is particle beams excitation, mainly uses electron beam and ion beam at present.Electron-beam excitation is known as Cathode-luminescence, however, it would be possible to generate a wide range of deep ultraviolet transition.But electron-beam excitation cannot be used for measurement magneto-optic spectrum, because It is that electronics has charge, can deflects in magnetic field, be difficult to get to and be placed on the sample in magnetic field.
Due to identical, ion excitation can not be used to measure magneto-optic spectrum.In order to disclose the structure of matter, it is badly in need of one kind Stablize device and test method that excitation forms vacuum ultraviolet.
Summary of the invention
In order to solve the deficiencies in the prior art, the present invention provides a kind of particles beams to excite vacuum ultraviolet-visible light wave range Magneto-optic composes test method and system, and the ion beam of electrification is allowed to form eutral particle beam (atomic beam) and neutralizing with electron beam, This particle beams can be unaffected by the magnetic field and excite to sample, anti-using electromagnetic radiation caused by atomic energy transition energy Reflect the hyperfine structure inside substance, using magneto-optic spectrum information be the research and development of new material, production and application provide electronic structure according to According to.
The present invention is that technical solution used by solving its technical problem is: it is purple to provide a kind of particle beams excitation vacuum Outside-visible light wave range magneto-optic composes test method, comprising the following steps:
(1) under vacuum conditions, it generates proton beam using excitaton source to spray, proton beam is by the generation of ion beam neutralizer With, form neutral load energy atomic beam, carry can atomic beam be transmitted to the surface of the sample placed in sample stage, excite the table of sample The electron transition of atom in surface layer, the atom of excitation state generates ultraviolet spectra;
(2) controlling the electromagnet in sample stage keeps the magnetic field of its generation parallel or the direction of propagation of vertical UV spectrum;? Ultraviolet spectra under magnetic fields successively passes through electrostatic focusing lens, photoelasticity modulator and linear polarizer and enters monochromator;
(3) ultraviolet spectra converts optical signals to electric signal by photomultiplier tube after monochromator is handled, then via steady Stream device feeds back to lock-in amplifier;Enter locking phase amplification as reference signal by the oscillator signal of photoelasticity modulator simultaneously Device;
(4) the signal is input to computers to be controlled for lock-in amplifier.
Step (1) proton beam reaches ion beam neutralizer by ion beam diaphragm and neutralizes, and forms neutral load Reach the surface of sample after energy atomic beam by particle beam diaphragm.
Step (2) magnetic field is steady magnetic field.
The sample of step (2) is in the low temperature environment of 10-300K.
Invention also provides a kind of, and the particle beams based on the above method excites vacuum ultraviolet-visible light wave range magneto-optic Spectrum testing system is put between excitaton source and sample stage including the excitaton source in vacuum environment and the sample stage for placing sample It is equipped with ion beam neutralizer;The sample stage is configured with by the electromagnet of commutator transformer control magnetic field strength, the electromagnet The magnetic field of the ultraviolet light generated when being excited for generating parallel or perpendicular to sample surfaces;The side of the sample stage is equipped with quiet Voltolisation focus lens, after the electrostatic focusing lens is for passing sequentially through photoelasticity modulator and linear polarizer after focusing ultraviolet light Into monochromator, the exit normal of the monochromator is equipped with photomultiplier tube, and the outlet of photomultiplier tube is connect by flow straightener Enter lock-in amplifier;One end of the photoelasticity modulator is connected with the pipeline of monochromator, and one end is vertical with piezoelectric ceramics to be fixed Connection, and connect by piezoelectric ceramics with photoelasticity modulator power oscillators, photoelasticity modulator power oscillators access lock Phase amplifier, lock-in amplifier are connect by cable with computer.
The excitaton source outlet is equipped with the ion of the proton beam alignment ion beam neutralizer entrance for allowing excitaton source to generate Beam diaphragm, the sample stage front are equipped with the particle beams light for allowing the atomic beam generated from ion beam neutralizer to be directed at sample Door screen.
The electromagnet is movably installed in sample stage, rotates in sample stage, rotation to the magnetic field of state a period of time electromagnet Direction is perpendicular to sample surfaces, and the magnetic direction of electromagnet is parallel to sample surfaces when rotating to state two;Electromagnet, which is equipped with, to be used In the expansible gap of installation cryostat.
The photoelasticity modulator power oscillators are equipped with photoelectrical coupler.
The excitaton source uses ion source, and internal electrostatic probe voltage is continuously adjustable for 0~35kV.
The relative angle of the transmission plane of the optical axis and linear polarizer of the photoelasticity modulator is 45 °.
The present invention is based on beneficial effects possessed by its technical solution to be:
(1) particle beams excitation vacuum ultraviolet-visible light wave range magneto-optic spectrum test method and system of the present invention utilize excitation Source generates the proton beam of electrification, forms eutral particle beam (atomic beam) and neutralizing with electron beam, this particle beams can not It is affected by magnetic fields and sample is excited, when the effect of the particle beam bombardment surface of solids, it may occur that collision generates ionization, light swashs A variety of physical processes such as hair, excitation of X-rays, control ion energy can be such that this excitation occurs mainly in true in 10~20keV Empty ultraviolet-visible optical frequencies, to realize the novel test analysis of detection vacuum ultraviolet spectrometry, vacuum ultraviolet magneto-optic spectrum can be from The fine electronic structure of inner electron level announcement substance;Vacuum ultraviolet belongs to a kind of magneto-optic spectrum, is that particle detection-solid is mutual A kind of electromagnetic radiation for the different frequency range that mechanism generates, can disclose the structure of matter of different levels, especially different materials Expect the light absorption in low temperature, magnetic field, luminescence generated by light (fluorescence), polarize the fine structures such as dichroism, polarized fluorescence, and atom Electromagnetic radiation caused by nuclear energy order transition can then reflect the hyperfine structure inside substance, these magneto-optic spectrum informations can be new material Research and development, production and application provide electronic structure foundation, can be magnetic semiconductor, rare earth material, iron-based superconduction, new energy material The enterprise of the various fields such as material, geology, environment, biology, pharmacy and research institution provide magneto-optic and compose precision measurement service;
(2) behavior of the present invention by measurement vacuum-ultraviolet light spectral line in cryogenic magnetic field, especially magnetocircular dichroism, Magnetic circular polarization fluorescence Spectra discloses the polarization characteristic of VUV spectra, is transition metal, rare earth ion vacuum ultraviolet polarised light It generates and technical application provides scientific basis;Atomic energy level caused by magnetocircular dichroism, that is, magnetic field divides and the circular polarization of generation Light is selected newly to absorb, therefore magnetocircular dichroism appears in absorption spectra, atomic energy level in magnetic circular polarization fluorescence, that is, magnetic field The circularly polarized light of division and generation occurs in the form of fluorescent emission, therefore forms magnetic circular polarization fluorescence Spectra.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of particle beams excitation vacuum ultraviolet-visible light wave range magneto-optic spectrum testing system of the present invention.
Fig. 2 is the master that the particle beams shown in Fig. 1 excites electromagnet in vacuum ultraviolet-visible light wave range magneto-optic spectrum test device Depending on structural schematic diagram.
Fig. 3 is the side that the particle beams shown in Fig. 1 excites electromagnet in vacuum ultraviolet-visible light wave range magneto-optic spectrum test device Depending on structural schematic diagram.
The typical vacuum that Fig. 4 apparatus of the present invention measurement obtains ultraviolet magneto-optic spectrum, abscissa are wavelength, wave-length coverage 120~ 450nm, ordinate are photon counting, are arbitrary unit.Upper several peak values of spectrum reflect rare earth element 4f-4f, 4f-5d The transition of electron energy level.
In figure: 1- excitaton source, 2- ion beam diaphragm, 3- ion beam neutralizer, 4- particle beam diaphragm, 5- sample stage, 5.1- Electromagnet, 5.2- particle beams transmission hole, 6- electrostatic focusing lens, 7- photoelasticity modulator, 8- linear polarizer, 9- monochromator enter Mouthful, 10- monochromator, the outlet of 11- monochromator, 12- photomultiplier tube, 13- flow straightener, 14- piezoelectric ceramics, 15- photoelastic modulation Device power oscillators, 16- photoelectrical coupler, 17- lock-in amplifier, 18- computer.
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and examples.
The present invention provides a kind of particle beams excitation vacuum ultraviolet-visible light wave range magneto-optics to compose test method, referring to figure 1, comprising the following steps:
(1) under vacuum conditions, it generates proton beam using excitaton source 1 to spray, proton beam occurs by ion beam neutralizer 3 It neutralizes, forms neutral load energy atomic beam, carry the surface that energy atomic beam is transmitted to the sample placed in sample stage 5, excite sample Superficial layer in atom, the electron transition of the atom of excitation state generates ultraviolet spectra;
(2) controlling the electromagnet 19 in sample stage 5 keeps the magnetic field of its generation parallel or the direction of propagation of vertical UV spectrum; Ultraviolet spectra under magnetic fields successively passes through electrostatic focusing lens 6, photoelasticity modulator 7 and linear polarizer 8 and enters monochrome Instrument 10;
(3) ultraviolet spectra converts optical signals to electric signal by photomultiplier tube 12, then pass through after the processing of monochromator 10 Lock-in amplifier 17 is fed back to by flow straightener 13;Enter simultaneously by the oscillator signal of photoelasticity modulator 7 as reference signal Lock-in amplifier 17;
(4) the signal is input to computers 18 to be controlled for lock-in amplifier 17, to be further analyzed.
Step (1) proton beam reaches ion beam neutralizer 3 by ion beam diaphragm 2 and neutralizes, and forms neutrality Reach the surface of sample after load energy atomic beam by particle beam diaphragm 4.
Step (2) magnetic field is steady magnetic field.
The sample of step (2) is in the low temperature environment of 10-300K.
Invention also provides a kind of, and the particle beams based on the above method excites vacuum ultraviolet-visible light wave range magneto-optic Spectrum testing system, referring to Fig.1, including the excitaton source 1 in vacuum environment and the sample stage 5 for placing sample, excitaton source 1 and sample Ion beam neutralizer 3 is placed between sample platform 5;The sample stage 5 is configured with by the electromagnetism of commutator transformer control magnetic field strength Iron 19, the electromagnet 19 are used to generate the magnetic field of the ultraviolet light generated when being excited parallel or perpendicular to sample surfaces;It is described The side of sample stage 5 is equipped with electrostatic focusing lens 6, and the electrostatic focusing lens 6 is for passing sequentially through light after focusing ultraviolet light Enter the entrance 9 of monochromator after elastic modulator 7 and linear polarizer 8, the outlet 11 of the monochromator is vertically installed with photoelectricity times Increase pipe 12, the outlet of photomultiplier tube 12 accesses lock-in amplifier 17 by flow straightener 13;One end of the photoelasticity modulator 7 It is connected with the pipeline of monochromator 10, one end is vertical with piezoelectric ceramics 14 to be fixedly connected, and is modulated by piezoelectric ceramics and photoelasticity Device power oscillators 15 connect, and photoelasticity modulator power oscillators 15 access lock-in amplifier 17, and lock-in amplifier 17 passes through Cable is connect with computer 18.
The excitaton source outlet is equipped with the ion of the proton beam alignment ion beam neutralizer entrance for allowing excitaton source to generate Beam diaphragm 2, the sample stage front are equipped with the particle beams light for allowing the atomic beam generated from ion beam neutralizer to be directed at sample Door screen 4.
Referring to Fig. 2 and Fig. 3, electromagnet 5.1 is equipped with the particle beams transmission hole 5.2 passed through for eutral particle beam.The electricity Magnet is movably installed in sample stage, rotates in sample stage, rotates the magnetic direction to state a period of time electromagnet perpendicular to sample Surface, the magnetic direction of electromagnet is parallel to sample surfaces when rotating to state two;Electromagnet is equipped with for installing cryogenic thermostat The expansible gap of device.
The photoelasticity modulator power oscillators are equipped with photoelectrical coupler 16.
The excitaton source uses ion source, and internal electrostatic probe voltage is continuously adjustable for 0~35kV.
The relative angle of the transmission plane of the optical axis and linear polarizer of the photoelasticity modulator is 45 °.
When with the particle beams of the present invention excitation vacuum ultraviolet-visible light wave range magneto-optic spectrum testing system carry out vacuum-ultraviolet light When spectrum test, the ion beam of excitaton source 1 is projected from diaphragm 2, and the electronics emitted by ion beam neutralizer 3 neutralizes, and forms neutral grain Beamlet (carries energy atomic beam).It carries energy atomic beam and controls beam spot size through particle beam diaphragm 4, sample is radiated at fine particle beam On, make the atomic excitation in sample, the electron transition of final sample atom, which generates, to shine.In magnetic field, the fluorescence of sample sending For partial poolarized light.After particle beam diaphragm 4, partial poolarized light passes through photoelasticity modulator 7 (analyzer) and linear polarizer 8, the optical axis of photoelasticity modulator 7 and the transmission plane relative angle of linear polarizer 8 are 45 °, and light can focus on monochromator Entrance 9.The photomultiplier tube 12 for being connected to monochromator outlet 11 is worked with constant-current mode, and is carried out instead by flow straightener 13 Feedback.Signal from light ball modulator 7, flow straightener 13 and photoelasticity modulator power oscillators 15 enters lock-in amplifier 17, Finally controlled by computer 18.The signal of photoelasticity modulator power oscillators 15 is used as the reference signal of lock-in amplifier 17.
The active component of light ball modulator 7 is quartz crystal, is connect with rectangular piezoelectric ceramic 14.Two of light ball modulator Part is worked with same resonance frequency.Voltage supply for light ball modulator 7, with the power oscillators of photoelasticity modulator 15.The output end of the power supply is connect with piezoelectric ceramics 14.As the basis for realizing positive feedback, using being mounted on light ball modulator 7 On photoelectrical coupler 16.In order to control oscillation phase, the sinusoidal signal from photoelectrical coupler is fed to light ball modulator The input of power oscillators 15.The application of the optics positive feedback of this electric isolution, improves starting and running for light ball modulator 7 Reliability.
Referring to Fig. 4, for the ultraviolet magneto-optic spectrum of typical vacuum obtained using methods and apparatus of the present invention measurement, abscissa is Wavelength, 120~450nm of wave-length coverage, ordinate are photon counting, are arbitrary unit.Upper several peak values of spectrum reflect The transition of rare earth element 4f-4f, 4f-5d electron energy level.
Since electromagnet is equipped with the expansible gap for installing cryostat, the present invention can also be permanent in installation low temperature Cryogenic magnetic field environmental experiment is carried out after warm device, based on particle under cryogenic magnetic field-solid interaction physics law, detection The electromagnetic radiation for the different frequency range that particle bombardment process generates, including Infrared-Visible-UV and VUV, to disclose not The structure of matter of same level.

Claims (10)

1. a kind of particle beams excitation vacuum ultraviolet-visible light wave range magneto-optic composes test method, it is characterised in that including following step It is rapid:
(1) under vacuum conditions, proton beam being generated using excitaton source to spray, proton beam is neutralized by ion beam neutralizer, Neutral load energy atomic beam is formed, the surface that energy atomic beam is transmitted to the sample placed in sample stage is carried, excites the surface of sample The electron transition of atom in layer, the atom of excitation state generates ultraviolet spectra;
(2) controlling the electromagnet in sample stage keeps the magnetic field of its generation parallel or the direction of propagation of vertical UV spectrum;In magnetic field Ultraviolet spectra under effect successively passes through electrostatic focusing lens, photoelasticity modulator and linear polarizer and enters monochromator;
(3) ultraviolet spectra converts optical signals to electric signal by photomultiplier tube after monochromator is handled, then via flow straightener Feed back to lock-in amplifier;Enter lock-in amplifier as reference signal by the oscillator signal of photoelasticity modulator simultaneously;
(4) the signal is input to computers to be controlled for lock-in amplifier.
2. particle beams excitation vacuum ultraviolet-visible light wave range magneto-optic according to claim 1 composes test method, feature Be: step (1) proton beam reaches ion beam neutralizer by ion beam diaphragm and neutralizes, and forming neutral load can be former Reach the surface of sample after beamlet by particle beam diaphragm.
3. particle beams excitation vacuum ultraviolet-visible light wave range magneto-optic according to claim 1 composes test method, feature Be: step (2) magnetic field is steady magnetic field.
4. particle beams excitation vacuum ultraviolet-visible light wave range magneto-optic according to claim 1 composes test method, feature Be: the sample of step (2) is in the low temperature environment of 10-300K.
5. a kind of particle beams based on claim 1 the method excites vacuum ultraviolet-visible light wave range magnetic spectrum test system System, it is characterised in that: including the excitaton source in vacuum environment and the sample stage for placing sample, between excitaton source and sample stage It is placed with ion beam neutralizer;The sample stage is configured with by the electromagnet of commutator transformer control magnetic field strength, the electromagnetism Iron is used to generate the magnetic field of the ultraviolet light generated when being excited parallel or perpendicular to sample surfaces;The side of the sample stage is equipped with Electrostatic focusing lens, the electrostatic focusing lens is for passing sequentially through photoelasticity modulator and linear polarizer after focusing ultraviolet light Enter monochromator afterwards, the exit normal of the monochromator is equipped with photomultiplier tube, and the outlet of photomultiplier tube passes through flow straightener Access lock-in amplifier;One end of the photoelasticity modulator is connected with the pipeline of monochromator, and one end is vertical with piezoelectric ceramics solid Fixed connection, and connect by piezoelectric ceramics with photoelasticity modulator power oscillators, the access of photoelasticity modulator power oscillators Lock-in amplifier, lock-in amplifier are connect by cable with computer.
6. the particle beams according to claim 5 excites vacuum ultraviolet-visible light wave range magneto-optic spectrum testing system, feature Be: the excitaton source outlet is equipped with the ion beam light of the proton beam alignment ion beam neutralizer entrance for allowing excitaton source to generate Door screen, the sample stage front are equipped with the particle beam diaphragm for allowing the atomic beam generated from ion beam neutralizer to be directed at sample.
7. the particle beams according to claim 5 excites vacuum ultraviolet-visible light wave range magneto-optic spectrum testing system, feature Be: the electromagnet is movably installed in sample stage, rotates in sample stage, rotates to the magnetic direction of state a period of time electromagnet Perpendicular to sample surfaces, the magnetic direction of electromagnet is parallel to sample surfaces when rotating to state two;Electromagnet is equipped with for pacifying Fill the expansible gap of cryostat.
8. the particle beams according to claim 5 excites vacuum ultraviolet-visible light wave range magneto-optic spectrum testing system, feature Be: the photoelasticity modulator power oscillators are equipped with photoelectrical coupler.
9. the particle beams according to claim 5 excites vacuum ultraviolet-visible light wave range magneto-optic spectrum testing system, feature Be: the excitaton source uses ion source, and internal electrostatic probe voltage is continuously adjustable for 0~35kV.
10. the particle beams according to claim 5 excites vacuum ultraviolet-visible light wave range magneto-optic spectrum testing system, special Sign is: the relative angle of the transmission plane of the optical axis and linear polarizer of the photoelasticity modulator is 45 °.
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