CN107214519A - Six-freedom parallel micro/nano-scale turnning and milling is combined microminiature desktop precision finishing machine - Google Patents
Six-freedom parallel micro/nano-scale turnning and milling is combined microminiature desktop precision finishing machine Download PDFInfo
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- CN107214519A CN107214519A CN201710310134.7A CN201710310134A CN107214519A CN 107214519 A CN107214519 A CN 107214519A CN 201710310134 A CN201710310134 A CN 201710310134A CN 107214519 A CN107214519 A CN 107214519A
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- milling
- turnning
- microminiature
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P23/00—Machines or arrangements of machines for performing specified combinations of different metal-working operations not covered by a single other subclass
- B23P23/02—Machine tools for performing different machining operations
Abstract
Microminiature desktop precision finishing machine is combined the invention discloses a kind of six-freedom parallel micro/nano-scale turnning and milling, including shell, support frame is provided with shell, workbench is provided with support frame, the milling fixture and/or turnning and milling composite fixture for clamping workpiece to be processed are provided with workbench, cutter is provided with above workbench, the driving shunting means for the feed motion that six-freedom degree is realized with cutter is additionally provided with support frame, driving shunting means is arranged on the top of workbench, shunting means is driven to include moving platform, silent flatform and dynamic for connecting, the branch chain bar of silent flatform.Machining tool compact conformation in the present invention, small volume consumes energy low, and performance is stable, processes micro parts using the machining tool in the present invention, can greatly improve production efficiency and machined surface quality.
Description
Technical field
Yardstick Machining Technology for Cutting field, more particularly to a kind of six-freedom parallel micro/nano-scale are seen the invention belongs to micro-nano
Turnning and milling is combined microminiature desktop precision finishing machine.
Background technology
With the development of science and technology, it is more and more to micro parts demand, at the same be used for function, material property,
Requirement in terms of planform, reliability also more and more higher.At present, typically using the precision and ultraprecise machine of stock size
Bed processes the precision three-dimensional micro parts being made up of metal material, but its cost is very high, less efficient, flexibility is poor.By
This is visible, and prior art awaits further improving.
The content of the invention
There is provided a kind of six-freedom parallel micro/nano-scale turnning and milling to avoid the weak point that prior art is present by the present invention
Compound microminiature desktop precision finishing machine, to improve processing efficiency and machined surface quality.
The technical solution adopted in the present invention is:
Six-freedom parallel micro/nano-scale turnning and milling is combined in microminiature desktop precision finishing machine, including shell, shell and set
Be equipped with support frame, support frame and be provided with workbench, be provided with workbench for clamping workpiece to be processed milling fixture and/
Or turnning and milling composite fixture, it is provided with cutter, support frame above workbench and is additionally provided with band cutter and realizes six-freedom degree
Feed motion driving shunting means, driving shunting means is arranged on the top of workbench, and driving shunting means includes dynamic flat
Platform, silent flatform and the branch chain bar for connecting dynamic and static platform, cutter are arranged on the bottom of moving platform, and the bottom of moving platform is also set
The cutter drive motor rotated with cutter is equipped with, moving platform is arranged on the lower section of silent flatform, and the silent flatform there are six, relatively
Answer, branch chain bar has the six roots of sensation, each silent flatform is connected with support frame, and each branch chain bar includes Hooke's hinge, prismatic pair and ball pivot, tiger
Gram hinge is connected with silent flatform, and ball pivot is arranged on moving platform, and each prismatic pair is hydraulic cylinder, cylinder body end and the tiger of hydraulic cylinder
Gram hinge be connected, the tailpiece of the piston rod of hydraulic cylinder is connected with ball pivot.
The workbench includes being provided with load platform above upper table and lower table, upper table, described
Milling fixture, turnning and milling composite fixture are arranged on load platform, and the milling fixture, turnning and milling composite fixture and upper load are flat
It is that lower load platform is provided with above detachable connection, lower table between platform, the bottom of upper table and lower load
The top of platform is connected.
Be additionally provided with the upper table X that drives the upper load platform to do reciprocating linear motion along X-direction to
The Y-direction for driving the lower load platform to be done reciprocating linear motion along Y direction is additionally provided with drive mechanism, the lower table
Drive mechanism.
The X includes X to linear electric motors to drive mechanism, and X is connected to linear electric motors with the upper load platform.
The Y-direction drive mechanism includes Y-direction linear electric motors, and Y-direction linear electric motors are connected with the lower load platform.
The milling fixture includes the first clamp base and the clamp body being arranged in the first clamp base, the first clamping
Feeler block and clearance gauge are provided with block, the second grip block, the clamp body, the first grip block is connected with the clamp body, described
Milling fixture also includes being additionally provided with screw rod positioning in screw rod and the control crank being connected with one end of screw rod, the first clamp base
Block, the other end of screw rod is connected after passing through screw rod locating piece with the second grip block, and the second grip block is under the drive of screw rod the
Move back and forth in one clamp base, the first grip block and the second grip block cooperatively form the clamping gap to workpiece to be processed.
The turnning and milling composite fixture includes the second clamp base and the servomotor being arranged in the second clamp base, connection
Axle device, scroll chuck, mandrel and baffle plate, the motor output shaft of servomotor are connected by shaft coupling with scroll chuck, and mandrel is set
Put on scroll chuck, workpiece to be processed is nested with mandrel, baffle plate setting is used to prevent the axle of workpiece to be processed on mandrel
To play.
Support frame as described above includes positioning disk and positioning supporting plate, and positioning disk is arranged on the top of positioning supporting plate, positioning disk with it is outer
The top of shell is connected, and positioning supporting plate is connected with the inwall of shell and bottom, support frame as described above also include being used for connecting positioning disk with
Position some support bars of supporting plate.
The top of the shell is provided with observation window, and the center of the positioning disk offers peep hole, support frame is installed
When in shell, peep hole is relative with the position of observation window.
The six-freedom parallel micro/nano-scale turnning and milling, which is combined microminiature desktop precision finishing machine, also includes damping device,
Damping device includes be separately positioned on the central position of positioning supporting plate border four side and positioning supporting plate bottom four
Giant magnetostrictive rod at drift angle, the damping device also includes the air bullet for being arranged on positioning supporting plate bottom central position
Spring, positioning supporting plate border four side is connected by giant magnetostrictive rod with the inwall of the shell respectively, positions the bottom of supporting plate
End is connected by giant magnetostrictive rod and air spring with the bottom of shell.
By adopting the above-described technical solution, having the beneficial effect that acquired by the present invention:
Machining tool compact conformation in the present invention, small volume consumes energy low, and performance is stable, and intelligence degree is high, thermal deformation
Error is small, and response speed is high.Micro parts are processed using the machining tool in the present invention, production efficiency and processing is substantially increased
Surface quality.
Brief description of the drawings
Fig. 1 is overall structure diagram of the invention.
Fig. 2 is the assembling schematic diagram of support frame, driving shunting means and workbench in the present invention.
The structural representation that Fig. 3 looks over for the moving platform in the present invention from side.
The structural representation that Fig. 4 looks over for the moving platform in the present invention from opposite side.
Fig. 5 is the part-structure schematic diagram of branch chain bar in the present invention.
Fig. 6 is the partial enlarged drawing at A in Fig. 5.
Fig. 7 is the structural representation of workbench in the present invention.
Fig. 8 is the assembling schematic diagram of lower table and lower load platform in the present invention.
Fig. 9 is the structural representation of upper load platform in the present invention.
Figure 10 is the structural representation of milling fixture in the present invention.
Figure 11 is the structural representation of turnning and milling composite fixture in the present invention.
Wherein,
1st, shell 101, observation window 2, giant magnetostrictive rod 3, support frame 301, positioning disk 302, support bar 303,
Position supporting plate 304, peep hole 4, workbench 401, upper load platform 402, upper table 403, X to linear electric motors 404,
Lower table 405, Y-direction linear electric motors 406, lower load platform 5, driving shunting means 501, moving platform 502, Hooke's hinge
503rd, prismatic pair 504, silent flatform 6, cutter 7, milling fixture 701, the first clamp base 702, feeler block 703, first
Grip block 704, screw rod 705, clamp body 706, the second grip block 707, control crank 8, turnning and milling composite fixture 801, watch
Take motor 802, shaft coupling 803, scroll chuck 804, mandrel 805, baffle plate 806, the second clamp base 9, cutter drives
Motor 10, workpiece to be processed
Embodiment
The present invention is described in further detail with specific embodiment below in conjunction with the accompanying drawings, but the present invention is not limited to
These embodiments.
As shown in Figure 1 to 11, six-freedom parallel micro/nano-scale turnning and milling is combined microminiature desktop precision finishing machine, bag
Include in shell 1, shell 1 and be provided with support frame 3.For convenience of describing, the length direction of shell 1 is defined as X-direction, by shell
1 width is defined as Y direction.
Support frame as described above 3 includes positioning disk 301 and positioning supporting plate 303, and positioning disk 301 is arranged on the upper of positioning supporting plate 303
Side, the top of positioning disk 301 and shell 1 is connected, and positioning supporting plate 303 is connected with the inwall of shell 1 and bottom, support frame as described above 3
Also include some support bars 302 for being used to connect positioning disk 301 and positioning supporting plate 303.The top of the shell 1 is provided with sight
Window 101 is examined, the center of the positioning disk 301 offers peep hole 304, when support frame 3 is installed in shell 1, peep hole 304
It is relative with the position of observation window 101.
The six-freedom parallel micro/nano-scale turnning and milling, which is combined microminiature desktop precision finishing machine, also includes damping device,
Damping device includes being separately positioned on the central position of positioning supporting plate 303 border four side and positioning supporting plate 303 bottom
Four drift angles at giant magnetostrictive rod 2, the damping device also include be arranged on positioning the bottom central position of supporting plate 303
Air spring, positioning supporting plate 303 border four side be connected respectively by giant magnetostrictive rod 2 with the inwall of the shell 1,
The bottom of positioning supporting plate 303 is connected by giant magnetostrictive rod 2 and air spring with the bottom of shell 1.
Workbench 4 is provided with the positioning supporting plate 303.It is provided with workbench 4 for clamping workpiece to be processed 10
Milling fixture 7 and/or turnning and milling composite fixture 8.The top of workbench 4, which is provided with cutter 6, support frame 3, is additionally provided with band moving knife
Tool 6 realizes the driving shunting means 5 of the feed motion of six-freedom degree.The driving shunting means 5 is arranged on the upper of workbench 4
Side, driving shunting means 5 includes moving platform 501, silent flatform 504 and the branch chain bar for connecting dynamic and static platform, and cutter 6 is set
In the bottom of moving platform 501, the bottom of moving platform 501 is additionally provided with the cutter drive motor 9 rotated with cutter 6, moving platform
501 are arranged on the lower section of silent flatform 504.The silent flatform 504 has six, and corresponding, branch chain bar has the six roots of sensation.Each silent flatform
504 bottom with positioning disk 301 is connected, and each branch chain bar includes Hooke's hinge 502, prismatic pair 503 and ball pivot 505, Hooke's hinge
502 are connected with silent flatform 504, and ball pivot 505 is arranged on moving platform 501, and each prismatic pair 503 is hydraulic cylinder, hydraulic cylinder
Cylinder body end be connected with Hooke's hinge 502, the tailpiece of the piston rod of hydraulic cylinder is connected with ball pivot 505.
Specifically, each silent flatform 504 uses U-shaped ring flange, and Hooke's hinge 502 is rotated with ring flange to be connected
Connect, and the cylinder body end of Hooke's hinge 502 and hydraulic cylinder is hinged.The moving platform 501 includes discoid matrix, the periphery of matrix
Border is evenly equipped with three pieces of ball pivot location-plates, each ball pivot location-plate and is respectively arranged with two ball pivots 505.The Hooke's hinge 502 has
There are two rotational freedoms, ball pivot 505 has three rotational freedoms, and hydraulic cylinder piston rod has an one-movement-freedom-degree, with
This constitutes six degree of freedom.The driving shunting means 5, by the flexible of hydraulic cylinder, to dispatch and manipulate six roots of sensation branch chain bar
Length, makes moving platform 501 that different attitude angles are presented, so as to realize the feed motion of six-freedom degree with cutter 6.
The workbench 4 includes upper table 402 and lower table 404, and the top of upper table 402 is provided with load
Platform 401.The milling fixture 7, turnning and milling composite fixture 8 are arranged on load platform 401, and the milling fixture 7, turnning and milling
It is detachable connection between composite fixture 8 and upper load platform 401.It is flat that the top of lower table 404 is provided with lower load
Platform 406, the bottom of upper table 402 and the top of lower load platform 406 are connected.State and drive is additionally provided with upper table 402
The X that the upper load platform 401 does reciprocating linear motion along X-direction is also set up to drive mechanism on the lower table 404
There is the Y-direction drive mechanism for driving the lower load platform 406 to be done reciprocating linear motion along Y direction.The X is to drive mechanism bag
X is included to linear electric motors 403, X is connected to linear electric motors 403 with the upper load platform 401.The Y-direction drive mechanism includes Y-direction
Linear electric motors 405, Y-direction linear electric motors 405 are connected with the lower load platform 406.
It should be noted that upper load platform 401 is made respectively along X to for linear motion and lower load platform 406 along Y-direction
The type of drive of linear motion be not limited only to it is above-mentioned X to by way of linear electric motors 403, Y-direction linear electric motors 405
To realize, it can also be realized by other linear drives modes, such as structure type of motor+ball screw assembly,.Specifically
Say, can using Y-direction guide rail, Y-direction ball screw assembly, Y-direction motor, X direction guiding rails, X to ball screw assembly, combination from X to motor
Structure type.Specifically, Y-direction guide rail is arranged on the top end face of lower table 404, and the bottom of lower load platform 406 is set
The Y-direction sliding block being adapted with Y-direction guide rail, and Y-direction sliding block is arranged on Y-direction ball screw assembly, and in the drive lower edge of Y-direction motor
Y-direction guide rail is for linear motion.X direction guiding rails are arranged on the top end face of upper table 402, and the bottom of upper load platform 401 is set
There is the X that is adapted with X direction guiding rails to sliding block, and X is arranged on X on ball screw assembly, to sliding block, and in X under the drive of motor
Done reciprocating linear motion along X direction guiding rails.
Certainly, upper load platform 401 distinguishes for linear motion along X to for linear motion and lower load platform 406 along Y-direction
Type of drive can also be realized by other linear drives modes, such as structure type of hydraulic cylinder+motion platform, specifically
Ground says, can using Y-direction hydraulic cylinder, combining structure form from X to hydraulic cylinder, from X to hydraulic cylinder drive upper load platform make X to
Linear motion, drives lower load platform to make Y-direction linear motion by Y-direction hydraulic cylinder.
In addition, upper load platform 401 distinguishes for linear motion along X to for linear motion and lower load platform 406 along Y-direction
Type of drive can also realize that for example upper load platform 401 does linear motion along X-axis and adopted using a variety of linear drives modes
Driven with X to linear electric motors 403, the Y-direction motion with load platform 406 at present uses the structure type of motor+ball screw assembly,;
Driven in another example upper load platform 401 does linear motion along X-axis using motor+ball screw assembly, with load platform 406 at present
Y-direction motion uses the structure type of the structure type of Driven by Hydraulic Cylinder.
Therefore, upper load platform 401 distinguishes for linear motion along X to for linear motion and lower load platform 406 along Y-direction
Type of drive be not limited to it is above-mentioned enumerate form, drive the X of upper load platform 401 to linear motion as long as can realize
Moved along a straight line with the Y-direction of lower load platform 406.
The milling fixture 7 includes the first clamp base 701 and the clamp body being arranged in the first clamp base 701
705th, the first grip block 703, the second grip block 706.The section of the grip block 706 of first grip block 703 and second is substantially
It is V-shaped.Feeler block 702 and clearance gauge are provided with the clamp body 705, the first grip block 703 is connected with the clamp body 705,
The milling fixture 7 also includes screw rod 704 and the control crank 707 being connected with one end of screw rod 704, the first clamp base 701
On be additionally provided with screw rod locating piece, the other end of screw rod 704 is connected after passing through screw rod locating piece with the second grip block 706, second
Grip block 706 moves back and forth under the drive of screw rod 704 in the first clamp base 701, the first grip block 703 and the second clamping
706 pieces of clamping gaps for cooperatively forming to workpiece to be processed.
The turnning and milling composite fixture 8 includes the second clamp base 806 and the servo being arranged in the second clamp base 806
Motor 801, shaft coupling 802, scroll chuck 803, mandrel 804 and baffle plate 805, the motor output shaft of servomotor 801 pass through connection
Axle device 802 is connected with scroll chuck 803, and mandrel 804 is arranged on scroll chuck 803, and workpiece to be processed 10 is nested with mandrel 804
On, baffle plate 805, which is arranged on mandrel 804, to be used to prevent the axial float of workpiece to be processed 10.
When needing to carry out turnning and milling Precision Machining to micro parts, by the clamping of workpiece to be processed 10 in turnning and milling composite fixture 8
On, mandrel 804 is caught by scroll chuck 803, workpiece to be processed 10 is then fixed by mandrel 804, while passing through baffle plate
805 prevent sliding axially for workpiece to be processed 10, after clamping is finished, start to add the blank of workpiece to be processed 10
Work.In process, driving shunting means 5 controls the length of side chain bar by hydraulic cylinder, and dynamic flat by the driving of branch chain bar
Platform 501 is moved to change position and posture of the cutter 6 in space, so as to realize that feeding of the cutter 6 with respect to workpiece to be processed 10 is transported
It is dynamic, the relative position of adjustment workpiece to be processed 10 and cutter 6, to realize the cutting that different angles are carried out for workpiece to be processed 10
Processing.Meanwhile, under drivings of the X to linear electric motors 403, upper load platform 401 realizes that the straight line on upper table 402 is slided
Move, upper table 402 is bolted with lower load platform 406, so upper table 402 can pass through lower load platform
406 realize the linear motion on lower table 404 under the driving of Y-direction linear electric motors 405, and cutter is further adjusted with this
6 with the relative position of workpiece to be processed 10.
Whole process slows down transverse vibration and longitudinal direction in process by giant magnetostrictive rod 2 and air spring
Vibrations.During turning-milling complex processing, cutting speed is rotational speed by workpiece to be processed 10 and the rotational speed of cutter 6
Common synthesis, therefore workpiece to be processed 10 can also realize high-speed cutting without rotation at a high speed so that the cutting of workpiece to be processed 10
Process is very steady, is conducive to reducing the form error of workpiece to be processed 10.
When need to micro parts carry out conventional machining processes when, can by the clamping of workpiece to be processed 10 on milling fixture 7,
The second V-block 706 and the first V-block 703 is clamped workpiece to be processed 10 by tightening screw rod 704, pass through feeler block 702 and plug
Chi determines the relative position of cutter 6 and milling fixture 7.In process, driving shunting means 5 controls branch by hydraulic cylinder
The length of chain bar, and drive moving platform 501 to move to change position and posture of the cutter 6 in space by branch chain bar, so that real
Feed motion of the existing cutter 6 with respect to workpiece to be processed 10.The relative position of workpiece to be processed 10 and cutter 6 is adjusted, with realization pair
Workpiece to be processed 10 carries out the machining of different angles.Meanwhile, under drivings of the X to linear electric motors 403, upper load platform
401 realize the left and right sliding on upper table 402, so as to drive the side-to-side movement of workpiece to be processed 10, upper table 402 with
Lower load platform 406 is bolted, so upper table 402 can be by lower load platform 406 in Y-direction linear electric motors
Sliding before and after being realized under 405 driving on lower table 404, moving forward and backward for workpiece to be processed 10 is driven with this, from
And the relative position of cutter 6 and workpiece to be processed 10 is further adjusted, different angles are carried out to workpiece to be processed 10 to realize
Machining.Likewise, the transverse direction in whole process slows down process by giant magnetostrictive rod 2 and air spring
Vibrations and longitudinal direction vibrations.
The part do not addressed in the present invention uses or used for reference prior art and can be achieved.
In addition, term " first ", " second " are only used for describing purpose, and it is not intended that indicating or implying relatively important
Property.
Specific embodiment described herein is only the spiritual example explanation to the present invention.Belonging to of the invention
Those skilled in the art can make various modifications or supplement or using similar to described specific embodiment
Mode is substituted, but without departing from the spiritual of the present invention or surmounts scope defined in appended claims.
Claims (10)
1. six-freedom parallel micro/nano-scale turnning and milling is combined microminiature desktop precision finishing machine, it is characterised in that including shell,
It is provided with shell on support frame, support frame and is provided with workbench, the milling for clamping workpiece to be processed is provided with workbench
Cut to be provided with cutter, support frame to be additionally provided with above fixture and/or turnning and milling composite fixture, workbench and realize six with cutter
The driving shunting means of the feed motion of the individual free degree, driving shunting means is arranged on the top of workbench, drives shunting means
Branch chain bar including moving platform, silent flatform and for connecting dynamic and static platform, cutter is arranged on the bottom of moving platform, moving platform
Bottom is additionally provided with the cutter drive motor rotated with cutter, and moving platform is arranged on the lower section of silent flatform, and the silent flatform has
Six, corresponding, branch chain bar has the six roots of sensation, and each silent flatform is connected with support frame, and each branch chain bar includes Hooke's hinge, prismatic pair
And ball pivot, Hooke's hinge is connected with silent flatform, and ball pivot is arranged on moving platform, and each prismatic pair is hydraulic cylinder, hydraulic cylinder
Cylinder body end is connected with Hooke's hinge, and the tailpiece of the piston rod of hydraulic cylinder is connected with ball pivot.
2. six-freedom parallel micro/nano-scale turnning and milling according to claim 1 is combined microminiature desktop precision finishing machine,
Characterized in that, the workbench includes being provided with load platform above upper table and lower table, upper table, institute
Milling fixture, turnning and milling composite fixture is stated to be arranged on load platform, and the milling fixture, turnning and milling composite fixture and upper load
It is that lower load platform is provided with above detachable connection, lower table between platform, the bottom of upper table is born with lower
The top of carrying platform is connected.
3. six-freedom parallel micro/nano-scale turnning and milling according to claim 2 is combined microminiature desktop precision finishing machine,
Characterized in that, being additionally provided with the X for driving the upper load platform to be done reciprocating linear motion along X-direction on the upper table
To drive mechanism, the Y for driving the lower load platform to be done reciprocating linear motion along Y direction is additionally provided with the lower table
To drive mechanism.
4. six-freedom parallel micro/nano-scale turnning and milling according to claim 3 is combined microminiature desktop precision finishing machine,
Characterized in that, the X includes X to linear electric motors to drive mechanism, X is connected to linear electric motors with the upper load platform.
5. six-freedom parallel micro/nano-scale turnning and milling according to claim 3 is combined microminiature desktop precision finishing machine,
Characterized in that, the Y-direction drive mechanism includes Y-direction linear electric motors, Y-direction linear electric motors are connected with the lower load platform.
6. six-freedom parallel micro/nano-scale turnning and milling according to claim 1 is combined microminiature desktop precision finishing machine,
Characterized in that, the milling fixture includes the first clamp base and the clamp body being arranged in the first clamp base, first
Feeler block and clearance gauge are provided with grip block, the second grip block, the clamp body, the first grip block is connected with the clamp body,
The milling fixture also includes being additionally provided with screw rod in screw rod and the control crank being connected with one end of screw rod, the first clamp base
Locating piece, the other end of screw rod is connected after passing through screw rod locating piece with the second grip block, and the second grip block is under the drive of screw rod
Move back and forth in the first clamp base, the first grip block and the second grip block are cooperatively formed between the clamping to workpiece to be processed
Gap.
7. six-freedom parallel micro/nano-scale turnning and milling according to claim 1 is combined microminiature desktop precision finishing machine,
Characterized in that, the turnning and milling composite fixture includes the second clamp base and the servo being arranged in the second clamp base electricity
Machine, shaft coupling, scroll chuck, mandrel and baffle plate, the motor output shaft of servomotor are connected by shaft coupling with scroll chuck, core
Axle is arranged on scroll chuck, and workpiece to be processed is nested with mandrel, and baffle plate setting is used to prevent workpiece to be processed on mandrel
Axial float.
8. six-freedom parallel micro/nano-scale turnning and milling according to claim 1 is combined microminiature desktop precision finishing machine,
Characterized in that, support frame as described above include positioning disk and positioning supporting plate, positioning disk be arranged on positioning supporting plate top, positioning disk with
The top of shell is connected, and positioning supporting plate is connected with the inwall of shell and bottom, and support frame as described above also includes being used to connect positioning disk
With some support bars of positioning supporting plate.
9. six-freedom parallel micro/nano-scale turnning and milling according to claim 8 is combined microminiature desktop precision finishing machine,
Characterized in that, the top of the shell is provided with observation window, the center of the positioning disk offers peep hole, support frame is pacified
When being attached in shell, peep hole is relative with the position of observation window.
10. six-freedom parallel micro/nano-scale turnning and milling according to claim 8 is combined microminiature desktop precision finishing machine,
Characterized in that, the six-freedom parallel micro/nano-scale turnning and milling, which is combined microminiature desktop precision finishing machine, also includes damping dress
Put, damping device includes being separately positioned on the four of the central position of positioning supporting plate border four side and positioning supporting plate bottom
Giant magnetostrictive rod at individual drift angle, the damping device also includes the air bullet for being arranged on positioning supporting plate bottom central position
Spring, positioning supporting plate border four side is connected by giant magnetostrictive rod with the inwall of the shell respectively, positions the bottom of supporting plate
End is connected by giant magnetostrictive rod and air spring with the bottom of shell.
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