CN107204315B - Power device - Google Patents
Power device Download PDFInfo
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- CN107204315B CN107204315B CN201610152631.4A CN201610152631A CN107204315B CN 107204315 B CN107204315 B CN 107204315B CN 201610152631 A CN201610152631 A CN 201610152631A CN 107204315 B CN107204315 B CN 107204315B
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- control electrode
- interdigital
- feed end
- output stage
- compensating element
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- Condensed Matter Physics & Semiconductors (AREA)
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Abstract
The present invention provides a kind of high-frequency power devices comprising: the control electrode pad and output stage pad being oppositely arranged；The control electrode feed end being connect with the control electrode pad and the output stage feed end being connect with the output stage pad；Wherein, the control electrode feed end is oppositely arranged with the output stage feed end；The control electrode connecting with the control electrode feed end is interdigital and the output stage that connect with the output stage feed end is interdigital；Wherein, the control electrode is interdigital interdigital arranged in a crossed manner and insulated from each other with the output stage；Be set to the control electrode feed end and/or control electrode it is interdigital on compensating element,.The present invention makes up high-frequency signal in each interdigital phase differential, to avoid each interdigital work uneven, can greatly improve the stability and amplification characteristic of device by adjusting each compensating element,.
Description
Technical field
The invention belongs to technical field of semiconductors, in particular, being related to a kind of power device.
Background technique
High-frequency power device has the function of amplifying high-frequency signal (such as radio frequency, microwave signal), is widely applied
In fields such as mobile communication, radio and television, detection and radars.Typical power device Bu Tong mainly has according to material and structure
The devices such as the HEMT of the MOSFET and LDMOS of silicon substrate, MESFET, HBT and HEMT of GaAs base and gallium nitride base.Due to wanting
Export high-power, therefore all kinds of devices are all made of multi-fork in layout and refer to framework in parallel.But for high-frequency signal, work as signal
Signal wavelength reduces when frequency improves, and the high power device more for interdigital number, device physical dimension will be increased to and signal
The analogous degree of wavelength, so that there are phase difference and the non-uniform situations of work in each interdigital propagation for signal, thus right
The stability of device work and the effect of synthesis power output impact.Therefore, how to reduce interdigital phase imbalance, make
Each interdigital uniform operational is the key that improve device power Performance And Reliability.
Summary of the invention
In order to solve above-mentioned problems of the prior art, the purpose of the present invention is to provide a kind of power device, energy
Each interdigital phase imbalance of device is enough made up, the reliability and output performance of power device are improved.
A kind of power device provided by the invention comprising: the control electrode pad and output stage pad being oppositely arranged；With institute
The output stage feed end stating the control electrode feed end of control electrode pad connection and being connect with the output stage pad；Wherein, institute
Control electrode feed end is stated to be oppositely arranged with the output stage feed end；The control electrode being connect with the control electrode feed end it is interdigital with
And the output stage connecting with the output stage feed end is interdigital；Wherein, the control electrode it is interdigital with the output stage is interdigital intersects
It is arranged and insulated from each other；Be set to the control electrode feed end and/or control electrode it is interdigital on compensating element,.
Further, the quantity of the control electrode feed end is multiple.
Further, the quantity of the output stage feed end is multiple；Wherein, each control electrode feed end connects two institutes
It is interdigital to state control electrode, one output stage of each output stage feed end connection is interdigital, and each interdigital correspondence of output stage is inserted in
During two control electrodes are interdigital.
Further, a compensating element, is set on each control electrode feed end, wherein sets on control electrode feed end
All compensating element,s set be identical compensating element, or include at least two different compensating element,s.
Further, the power device further include: the compensation being arranged between every two adjacent control electrode feed ends
Element；Wherein, all compensating element,s being set between per two adjacent control electrode feed ends are identical compensating element,
Or include at least two different compensating element,s.
Further, the compensating element, between per two adjacent control electrode feed ends is set to present with control electrode is set to
Compensating element, on electric end is identical or not identical.
Further, in each control electrode one compensating element, of interdigital upper setting；Wherein, in the interdigital upper setting of control electrode
All compensating element,s be identical compensating element, or include at least two different compensating element,s.
Further, the compensating element, is the series connection or simultaneously of one of resistance, inductance and capacitor or at least two
Connection.
Further, the control electrode feed end is in inverted T-type structure, and the control electrode feed end includes the extended vertically
One end and horizontal-extending the second end；Wherein, the first end is connect with the control electrode pad, the second end
With two interdigital connections of control electrode.
Further, the control electrode feed end and the control electrode pad are integrally formed, the output stage feed end with
The output stage pad is integrally formed.
Beneficial effects of the present invention: the present invention by the interdigital upper series compensation element of control electrode pad and/or control electrode,
The working condition of each parallel connection interdigital (control electrode is interdigital and output stage is interdigital) can be balanced, reduction is interdigital, and (control electrode is interdigital and defeated
It is extremely interdigital out) between phase imbalance, reduce the phase difference between different interdigital (control electrode is interdigital and output stage is interdigital), to reach
To the purpose for making each interdigital (control electrode is interdigital and output stage is interdigital) uniform operational, to improve the stability of device, reliability
And output performance.
Detailed description of the invention
What is carried out in conjunction with the accompanying drawings is described below, above and other aspect, features and advantages of the embodiment of the present invention
It will become clearer, in attached drawing:
Fig. 1 is the schematic diagram of the section structure of the power device of the first embodiment of the present invention.
Fig. 2 is the schematic diagram of the section structure of the power device of the second embodiment of the present invention.
Fig. 3 is the schematic diagram of the section structure of the power device of the third embodiment of the present invention.
Fig. 4 is the schematic diagram of the section structure of the power device of the fourth embodiment of the present invention.
Specific embodiment
Hereinafter, with reference to the accompanying drawings to detailed description of the present invention embodiment.However, it is possible to come in many different forms real
The present invention is applied, and the present invention should not be construed as limited to the specific embodiment illustrated here.On the contrary, providing these implementations
Example is in order to explain the principle of the present invention and its practical application, so that others skilled in the art are it will be appreciated that of the invention
Various embodiments and the various modifications for being suitable for specific intended application.Identical label can be used in the whole instruction and attached drawing
Indicate identical element.
Fig. 1 is the schematic diagram of the section structure of the power device of first embodiment according to the present invention.
Referring to Fig.1, the power device of first embodiment according to the present invention includes: control electrode pad 11, output stage pad
21, source electrode 30, control electrode be interdigital 13, output stage is interdigital 23, control electrode feed end 12, output stage feed end 22.
Wherein, the control electrode pad 11 and output stage pad 21 are oppositely arranged；Wherein, the control electrode pad 11 is used for
Input control signal, the output stage pad 21 executes corresponding operation according to the control signal of the control electrode pad 11, defeated
Response signal out.
Specifically, the control electrode feed end 12, output stage feed end 22 quantity be it is multiple, herein, indicated with N
The quantity of control electrode feed end 12, output stage feed end 22.So, N number of control electrode feed end 12 is welded with the control electrode
Disk 11 connects, and N number of output stage feed end 22 is connect with the output stage pad 21.Specifically, N number of control electrode feed
End 12, which is alternatively arranged, is set to 11 side of control electrode pad, and N number of output stage feed end 22, which is alternatively arranged, is set to institute
State output stage pad 21 and the side relative to the control electrode pad 11, that is to say, that the N number of control electrode feed end 12 with
N number of output stage feed end 22 is oppositely arranged one by one.In the present embodiment, the embodiment of the present invention is carried out by taking N=4 as an example
Detailed description, that is to say, that the power device in the present embodiment includes 4 control electrode feed ends, 12,4 output stage feed ends
22.But the present invention is not restricted to this.
Correspondingly, the power device includes that 2N control electrode be interdigital 13, N number of output stage interdigital 23, that is to say, that institute
Stating power device includes interdigital 13,4 output stages interdigital 23 of 8 control electrodes.But the present invention is not restricted to this.Specifically, often
Two spaced control electrodes interdigital 13 are connect with a control electrode feed end 12, each output stage interdigital 23 and one it is defeated
Pole feed end 22 is correspondingly connected with out.The control electrode is interdigital 13, output stage interdigital 23 is the structure of strip and is oppositely arranged,
More specifically, each output stage interdigital 23 is inserted between two control electrodes interdigital 13.
By taking any one control electrode feed end 12 as an example, the control electrode feed end 12 is in inverted T-type structure, the control electrode feedback
Electric end 12 includes the first end 121 and horizontal-extending the second end 122 extended vertically, for connecting the control electrode pad
11 and the control electrode interdigital 13.Wherein, the first end 121 extended vertically is connect with the control electrode pad 11, with
Make to keep certain vertical distance between the control electrode pad 11 and the control electrode interdigital 13, avoids the control electrode pad
High-frequency signal on 11 impacts the different control electrode interdigital 13.The horizontal-extending the second end 122 and institute
Two spaced interdigital 13 connections of control electrode are stated, so that two control electrodes being arranged on the same control electrode feed end 12
Interdigital 13 keep certain horizontal distance, more specifically, all control electrodes interdigital 13 connecting with the control electrode feed end 12
It is parallel to each other.Specifically, the control electrode feed end 12 is integrally formed with the control electrode pad 11, the output stage feed end
22 are integrally formed with the output stage pad 21, and the material of the output stage feed end 22 and the output stage pad 21 is silicon
Polycrystal.But the present invention is not restricted to this.
Correspondingly, since each control electrode pad 11 and each control electrode pad 11 are oppositely arranged one by one,
The output stage feed end 22 be a strip connection structure, the output stage interdigital 23 by the output stage feed end 22 with
The output stage pad 21 connects, and two control electrodes for being folded in the control electrode pad 11 opposite with the output stage pad 21 are interdigital
Between 13.Specifically, the output stage feed end 22 is integrally formed with the output stage pad 21, the output stage feed end 22
Material with the output stage pad 21 is policrystalline silicon body.But the present invention is not restricted to this.
The source electrode 30 is set between the control electrode pad 11 and the output stage pad 21 and is located at the control
Extremely interdigital 13 and interdigital 23 side of output stage, the source electrode 30 also respectively with the control electrode is interdigital 13, output stage interdigital 23 connects
It connects, realizes the transmitting of input, output signal.Specifically, when power device works normally, control signal passes sequentially through control electrode
Pad 11, control electrode feed end 12, control electrode interdigital 13 are conveyed to source electrode 30, after source electrode 30 receives the control signal, control
Make the operation that the output stage pad 21, output stage feed end 22, output stage interdigital 23 completes response.
A compensation member can be arranged in the power device of embodiment according to the present invention on each control electrode feed end 12
Part, wherein all compensating element,s being arranged on control electrode feed end 12 are identical compensating element,.In the present embodiment,
Identical first compensating element, 41 is correspondingly arranged on each control electrode feed end 12.Preferably, in the control
The first compensating element, 41 is inserted on the first end 121 extended vertically on pole feed end 12.When interdigital structure work is uneven,
Voltage (or electric current) in the control electrode interdigital 13 at position among power device is larger, and is located at the control of power device two sides
Voltage (or electric current) in system extremely interdigital 13 is small.Generally, when the current value in the control electrode of the power device interdigital 13 compared with
When big, after being inserted into identical compensating element, at various locations, so that the entirety of the power device compensates, significantly
Ground reduces between control electrode interdigital 13, the phase imbalance between output stage interdigital 23, reduces between different control electrodes interdigital 13, is defeated
Phase difference between extremely interdigital 23 out, and then achieve the purpose that balance that control electrode is interdigital 13, output stage interdigital 23.
But the present invention is not restricted to this, this is only one embodiment of the present of invention, for example, first compensating element, 41
Also it can be set between every two adjacent control electrode feed ends 12.
Preferably, first compensating element, 41 can be to have consumption element, combination, resistance such as resistance, resistance and inductance
With the combination of capacitor etc., it is also possible to lossless element, such as the combination of inductance and capacitor.
Fig. 2 is the schematic diagram of the section structure of the power device of second embodiment according to the present invention.
Referring to Fig. 2, different from the first embodiment, in the present embodiment, one on each control electrode feed end 12
One is correspondingly arranged on the second different compensating element,s 42.Specifically, the parameter value of the second centrally located compensating element, 42
It is larger, and the parameter value for being located at the second compensating element, 42 of two side positions is smaller.Similarly, when interdigital work is uneven,
Among the power device control electrode (input pole) at position it is interdigital on voltage (or electric current) it is larger, and be located at power device two
Voltage (or electric current) on the control electrode (input pole) of side is interdigital is smaller.Generally, when the control electrode of the power device is interdigital
When current value on 13 is lesser, middle position be inserted into second compensating element, 42 of the larger value and the insertion of two side positions compared with
Second compensating element, 42 of small value, the compensation magnitude at intermediate position is big, and the degree of compensation of two sides is small, to efficiently reduce
Phase imbalance between control electrode interdigital 13, between output stage interdigital 23 reduces between different control electrodes interdigital 13, output stage fork
Refer to the phase difference between 23, and then achievees the purpose that more preferably balance control electrode is interdigital 13, output stage interdigital 23.
But the present invention is not restricted to this, this is only one embodiment of the present of invention, for example, second compensating element, 42
Also it can be set between every two adjacent control electrode feed ends 12.
Fig. 3 is the schematic diagram of the section structure of the power device of third embodiment according to the present invention.
Referring to Fig. 3, different from the first embodiment, in the present embodiment, including being set to per two adjacent controls
Compensating element, between pole feed end 12 and the compensating element, for being set on control electrode feed end 12, specifically include third compensation member
Part 43, the 4th compensating element, 44；Wherein, the third compensating element, 43 is arranged in a one-to-one correspondence in each control electrode feed end
On 12, the 4th compensating element, 44 is series at third compensating element, 43 described in every two, and (every two control electrode is fed in other words
Hold it is upper 12) between.The parameter value for the third compensating element, 43 added on the control electrode feed end 12 can be identical, can also be with
It is not identical, it is specifically referred to first embodiment, second embodiment, herein to avoid repeating, is not repeated.The third compensation
Element 43, the 4th compensating element, 44 constitute compensation network.Similarly, when interdigital work is uneven, it is located in power device
Between position control electrode interdigital 13 on voltage (or electric current) greatly, and be located at power device two sides control electrode interdigital 13 on electricity
Press (or electric current) small, therefore third compensating element, 43, the 4th compensating element, 44 that insertion is serially connected can also play balance control
Make the purpose of extremely interdigital 13, interdigital 23 working condition of output stage.
Fig. 4 is the schematic diagram of the section structure of the power device of fourth embodiment according to the present invention.
Referring to Fig. 4, different from the first embodiment, in the present embodiment, in each control electrode interdigital 13 preferably
One identical 5th compensating element, 45 of series connection includes at least two different 5th compensating element,s 45.But the described 5th
The number of compensating element, 45 is not restricted to this, and the compensating element, may be 2,3 etc., can be according to specific debugging feelings
Condition setting.Similarly, the voltage when interdigital work is uneven, in the control electrode interdigital 13 at position among power device
(or electric current) greatly, and be located at power device two sides control electrode interdigital 13 on voltage (or electric current) it is small, therefore be inserted into mutually string
5th compensating element, 45 of connection can also play that balance control electrode is interdigital 13, purpose of interdigital 23 working condition of output stage.
In conclusion according to an embodiment of the invention, by the interdigital upper series compensation of control electrode pad and/or control electrode
Element can balance the working condition of each parallel connection interdigital (control electrode is interdigital and output stage is interdigital), and reduction is interdigital, and (control electrode is interdigital
And output stage is interdigital) between phase imbalance, reduce the phase difference between different interdigital (control electrode is interdigital and output stage is interdigital),
To achieve the purpose that make each interdigital (control electrode interdigital and output stage interdigital) uniform operational, thus improve the stability of device, can
By property and output performance.
Although the present invention has shown and described referring to specific embodiment, it should be appreciated by those skilled in the art that:
The present invention is not limited to the above embodiments, is not departing from the spirit and model of the invention being defined by the claims and their equivalents
In the case where enclosing, various change in form and details can be carried out herein.
Claims (13)
1. a kind of power device characterized by comprising
The control electrode pad and output stage pad being oppositely arranged；
The control electrode feed end being connect with the control electrode pad and the output stage feed end being connect with the output stage pad；
Wherein, the control electrode feed end is oppositely arranged with the output stage feed end；
The control electrode connecting with the control electrode feed end is interdigital and the output stage that connect with the output stage feed end is interdigital；
Wherein, the control electrode is interdigital interdigital arranged in a crossed manner and insulated from each other with the output stage；
Be set to the control electrode feed end and/or control electrode it is interdigital on compensating element,.
2. power device according to claim 1, which is characterized in that the quantity of the control electrode feed end is multiple.
3. power device according to claim 2, which is characterized in that the quantity of the output stage feed end is multiple；Its
In, two control electrodes of each control electrode feed end connection are interdigital, and each output stage feed end connects an output stage
It is interdigital, each interdigital correspondence of output stage be inserted in two control electrodes it is interdigital in.
4. power device according to claim 2 or 3, which is characterized in that one is arranged on each control electrode feed end
Compensating element, wherein all compensating element,s being arranged on control electrode feed end are identical compensating element, or at least wrap
Include two different compensating element,s.
5. power device according to claim 2 or 3, which is characterized in that the power device further include: every adjacent
The compensating element, being arranged between two control electrode feed ends；
Wherein, be set to per all compensating element,s between two adjacent control electrode feed ends be identical compensating element, or
Person includes at least two different compensating element,s.
6. power device according to claim 5, which is characterized in that be set to per two adjacent control electrode feed ends it
Between compensating element, it is identical as the compensating element, being set on control electrode feed end or not identical.
7. power device according to claim 3, which is characterized in that in each control electrode one compensation member of interdigital upper setting
Part；Wherein, all compensating element,s of the interdigital upper setting of control electrode be identical compensating element, or include at least two not
Identical compensating element,.
8. power device described according to claim 1 or 2 or 3 or 7, which is characterized in that the compensating element, is resistance, inductance
With one of capacitor or at least two serial or parallel connection.
9. power device according to claim 3, which is characterized in that the control electrode feed end is in inverted T-type structure, described
Control electrode feed end includes the first end extended vertically and horizontal-extending the second end；Wherein, the first end and institute
State the connection of control electrode pad, the second end and two interdigital connections of control electrode.
10. according to claim 1 or power device described in 9, which is characterized in that the control electrode feed end and the control electrode
Pad is integrally formed, and the output stage feed end and the output stage pad are integrally formed.
11. power device according to claim 4, which is characterized in that the compensating element, is in resistance, inductance and capacitor
One kind or at least two serial or parallel connection.
12. power device according to claim 5, which is characterized in that the compensating element, is in resistance, inductance and capacitor
One kind or at least two serial or parallel connection.
13. power device according to claim 6, which is characterized in that the compensating element, is in resistance, inductance and capacitor
One kind or at least two serial or parallel connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610152631.4A CN107204315B (en) | 2016-03-17 | 2016-03-17 | Power device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610152631.4A CN107204315B (en) | 2016-03-17 | 2016-03-17 | Power device |
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| Publication Number | Publication Date |
|---|---|
| CN107204315A CN107204315A (en) | 2017-09-26 |
| CN107204315B true CN107204315B (en) | 2019-08-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610152631.4A Active CN107204315B (en) | 2016-03-17 | 2016-03-17 | Power device |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120012908A1 (en) * | 2009-03-30 | 2012-01-19 | Koji Matsunaga | Semiconductor device |
| US8872190B1 (en) * | 2012-09-14 | 2014-10-28 | M/A-Com Technology Solutions Holdings, Inc. | Multi-finger HEMT layout providing improved third order intercept point and saturated output power performance |
| US20150084697A1 (en) * | 2013-02-26 | 2015-03-26 | Panasonic Corporation | Amplifier |
| WO2015040756A1 (en) * | 2013-09-22 | 2015-03-26 | 光俊 菅原 | Capacitor with switch and circuit containing capacitor with switch |
| JP2015162625A (en) * | 2014-02-28 | 2015-09-07 | パナソニック株式会社 | nitride semiconductor device |
-
2016
- 2016-03-17 CN CN201610152631.4A patent/CN107204315B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120012908A1 (en) * | 2009-03-30 | 2012-01-19 | Koji Matsunaga | Semiconductor device |
| US8872190B1 (en) * | 2012-09-14 | 2014-10-28 | M/A-Com Technology Solutions Holdings, Inc. | Multi-finger HEMT layout providing improved third order intercept point and saturated output power performance |
| US20150084697A1 (en) * | 2013-02-26 | 2015-03-26 | Panasonic Corporation | Amplifier |
| WO2015040756A1 (en) * | 2013-09-22 | 2015-03-26 | 光俊 菅原 | Capacitor with switch and circuit containing capacitor with switch |
| JP2015162625A (en) * | 2014-02-28 | 2015-09-07 | パナソニック株式会社 | nitride semiconductor device |
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| CN107204315A (en) | 2017-09-26 |
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