CN107202630A - Ultrasonic wave multilayer sensor for management through quantification - Google Patents

Ultrasonic wave multilayer sensor for management through quantification Download PDF

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Publication number
CN107202630A
CN107202630A CN201710505272.0A CN201710505272A CN107202630A CN 107202630 A CN107202630 A CN 107202630A CN 201710505272 A CN201710505272 A CN 201710505272A CN 107202630 A CN107202630 A CN 107202630A
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CN
China
Prior art keywords
piezoelectric patches
quantification
management
sound wave
ultrasonic wave
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Pending
Application number
CN201710505272.0A
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Chinese (zh)
Inventor
艾琳·库兹涅佐娃
孙绍荣
鲍里斯·扎伊采夫
孙蕾
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University of Shanghai for Science and Technology
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University of Shanghai for Science and Technology
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Publication date
Application filed by University of Shanghai for Science and Technology filed Critical University of Shanghai for Science and Technology
Priority to CN201710505272.0A priority Critical patent/CN107202630A/en
Publication of CN107202630A publication Critical patent/CN107202630A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G01H11/08Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices

Abstract

The invention provides a kind of ultrasonic wave multilayer sensor for management through quantification, it is characterised in that including:Piezoelectric patches, for producing sound wave;Damper, is arranged on the one side of piezoelectric patches, for eliminating the sound wave propagated to the direction close to damper;Matching layer, is arranged on the another side of piezoelectric patches, for increasing the intensity of sound wave and preventing sound wave from reflecting back at piezoelectric patches, and matching layer includes composite layer, metal material layer and the composite layer set gradually;And two electrodes, it is arranged on the excircle of piezoelectric patches, for electric signal to be provided and removed to piezoelectric patches, wherein, composite layer uses metal and its oxide nano-particles composite based on high-molecular polythene for material.

Description

Ultrasonic wave multilayer sensor for management through quantification
Technical field
The present invention relates to a kind of ultrasonic sensor, and in particular to a kind of ultrasonic wave multilayer for management through quantification is sensed Device.
Background technology
Ultrasonic sensor is the sensor that ultrasonic signal is converted into other energy signals, with frequency height, wavelength The advantages of short, good directionality, energy direction propagation.Ultrasonic wave can penetrate liquid and solid so that it can set in different measurements It is used as main element (such as flowmeter, horizontal gauge, feeler gauge etc.) in standby.
But, existing ultrasonic sensor in use there are still acoustic matching between sensor and gas it is poor, Emission sensor has the shortcomings that " echoing ", measurement accuracy reduce for a long time.
At present, typically in ultrasonic sensor using the acoustical impedance value that acoustic impedance values are standard piezoelectric ceramics with The problem of matching layer of the median of the acoustical impedance value of gas is to solve mentioned above.For example, in modern gas flowmeter In ultrasonic transmitter and receiver, someone used epoxide-resin glue and various fillings as matching layer.But, matching layer resistance Anti- value is generally by the thickness of matching layer, and density, and the factor such as modulus of elasticity are together decided on, and it is above-mentioned use in the prior art for Single epoxy resin or other homogenous materials excessively are used as matching layer so that the impedance value of the matching layer does not reduce still, from And corresponding ultrasonic transmitter and receiver is met measurement request yet.Therefore, because the sound wave of existing adaptation Impedance value fails to reach certain condition so that the acoustic matching problem between existing ultrasonic sensor and gas can not be solved well Certainly, so as to limit the application of ultrasonic sensor.
The content of the invention
The present invention is carried out to solve the above problems, it is therefore intended that provide a kind of ultrasonic wave for management through quantification Multilayer sensor.
A kind of ultrasonic wave multilayer sensor for management through quantification provided in the present invention, it is characterised in that including:Piezoelectricity Piece, for producing sound wave;Damper, is arranged on the one side of piezoelectric patches, is propagated for eliminating to the direction close to damper Sound wave;Matching layer, is arranged on the another side of piezoelectric patches, for increasing the intensity of sound wave and preventing sound wave from reflecting back into pressure At electric piece, matching layer includes composite layer, metal material layer and the composite layer set gradually;And two electrodes, if Put on the excircle of piezoelectric patches, for electric signal to be provided and removed to piezoelectric patches, wherein, composite layer, which is used, is based on high score The metal and its oxide nano-particles composite of sub- polyethylene are material.
In the ultrasonic wave multilayer sensor provided by the present invention for management through quantification, it can also have the feature that: Wherein, based on high-molecular polythene metal and its oxide nano-particles composite includes high-molecular polythene material, tree The high-molecular polythene and cadmium sulphide particle composite of fat glass material and HIGH PRESSURE TREATMENT.
In the ultrasonic wave multilayer sensor provided by the present invention for management through quantification, it can also have the feature that: Wherein, mass content of the cadmium sulfide in the high-molecular polythene and cadmium sulphide particle composite of HIGH PRESSURE TREATMENT be 5% or 10%.
In the ultrasonic wave multilayer sensor provided by the present invention for management through quantification, it can also have the feature that: Wherein, metal material is aluminium or vanadium.
In the ultrasonic wave multilayer sensor provided by the present invention for management through quantification, it can also have the feature that: Wherein, the material of electrode is rose's alloy.
The effect of invention and effect
According to the ultrasonic wave multilayer sensor for management through quantification involved in the present invention, because employing " weight " material (such as metal, crystal or other kinds of glass and plastics) are based on polyethylene from high pressure process as the second layer of adaptation while using Nano composite material be used as first layer and third layer so that the impedance value of the multi-layer Matched device be standard piezoelectric ceramics sound wave The median of the acoustical impedance value of impedance value and gas, so that the intensity increase of the sound wave through the matching layer, and then solve The acoustic matching problem determined between sensor and gas.So, the ultrasonic wave multilayer for management through quantification that the present invention is mentioned is passed Sensor is not only internal the problem of be not in " echoing " in a long time, and the measurement accuracy of the sensor is improved, and can For management through quantification field.
Brief description of the drawings
Fig. 1 is the structural representation for the ultrasonic sensor being located in embodiments of the invention in gas flowmeter.
Embodiment
In order that the technological means realized of the present invention is easy to understand, with reference to embodiments and accompanying drawing is made to the present invention It is specifically described.
<Embodiment one>
Fig. 1 is the structural representation for the ultrasonic wave multilayer sensor being located in embodiments of the invention in gas flowmeter.
As shown in figure 1, the ultrasonic wave multilayer sensor 100 for management through quantification includes piezoelectric patches 10, damper 20, matching Layer 30, two electrodes 40 and waveguide (not shown)s.
Piezoelectric patches 10 is used to produce sound wave.
Damper 20 is arranged on the one side of piezoelectric patches 10, for eliminating the sound propagated to the direction close to damper 20 Ripple.
Matching layer 30 is used to allow sound wave to pass through and increase the intensity of the sound wave, while preventing sound wave from reflecting back into piezoelectric patches Place, including composite layer 31, metal material layer 32 and the composite layer 31 set gradually.
Table 1
By theoretical calculation and analysis, of the thickness h of the layers of material of matching layer 30, density p and modulus of elasticity C in combination As shown in table 1, when the number of plies of matching layer 30 is equal to 3, basic result occurs by orchestration 30 and corresponding amplitude U.It is 3 in the number of plies On the basis of when being further added by the number of plies, then will not make the displacement of amplitude in gas again increases (not shown in table).As shown by data in table 1 The density of modulus of elasticity and matching layer reaches that maximum provides condition to being chosen to be transmitted into the sonic wave amplitude in gas.
The composite layer 31 uses the composite of metal and its oxide nano-particles based on high-molecular polythene, The material that two composite layers 31 are used can be the same or different.
In the present embodiment, based on high-molecular polythene metal and its oxide nano-particles composite 31 includes tree The high-molecular polythene and cadmium sulphide particle composite 312 of fat glass 311 and HIGH PRESSURE TREATMENT.Thickness h, the density of layers of material ρ and modulus of elasticity C is as shown in table 2 (PEHP is the high-molecular polythene of HIGH PRESSURE TREATMENT).
Table 2
Plexiglas 311 is arranged on the another side of piezoelectric patches 10.
The mass content of cadmium sulphide particle is in the high-molecular polythene and cadmium sulphide particle composite 312 of HIGH PRESSURE TREATMENT 10%, as shown in table 2.
Metal material 32 is metallic aluminium, is arranged on high-molecular polythene and the vulcanization of plexiglas 311 and HIGH PRESSURE TREATMENT The centre of cadmium particle composite material 312, as shown in table 2.
Two electrodes 40 are arranged on the excircle of piezoelectric patches 10, for providing and removing electric signal to piezoelectric patches 10. In the present embodiment, the material of two electrodes 40 is rose's alloy.
The emitting facet of waveguide is arranged on the lateral surface of matching layer 30, for will be transmitted through the sound wave of matching layer 30 Into gaseous mediums.
The course of work for the ultrasonic wave multilayer sensor 100 of management through quantification is as follows:
Ultrasonic wave multilayer sensor 100 for management through quantification is placed in gas flowmeter.
Apply high frequency voltage to two electrodes 40, piezoelectric patches 10 sends longitudinal bodies sound under the exciting of setting working frequency Ripple.
The sound wave being excited will be propagated in two directions.The sound wave propagated to the direction close to damper 20 is hindered Buddhist nun's device 20 is eliminated.Through matching layer 30 and gaseous mediums are transmitted into the sound wave propagated close to matching layer 30 from the end face of waveguide In.
The longitudinal bulk acoustic wave launched is received and detected by corresponding sensor.
As shown in table 2, as a result show, the amplitude for the sound wave being transmitted into gas can reach 0.82um, more than existing The amplitude (being approximately equal to 1nm) of flowmeter.
The effect of embodiment one and effect
The ultrasonic wave multilayer sensor for management through quantification according to involved by the present embodiment, because employing successively by glass (cadmium sulfide is in HIGH PRESSURE TREATMENT for glass resin, the high-molecular polythene of metallic aluminium and HIGH PRESSURE TREATMENT and cadmium sulphide particle composite Mass content in high-molecular polythene and cadmium sulphide particle composite is the matching layer of 10%) composition so that be transmitted into gas Sound wave in body can reach 0.82um, solve the problems, such as the acoustic matching between sensor and gas.
So, the ultrasonic wave multilayer sensor for management through quantification of the invention is not only internal in a long time to be not in The problem of " echoing ", and the measurement accuracy of the sensor improves, available for management through quantification.
<Embodiment two>
In the present embodiment two, for identical structure in embodiment one, give identical symbol, and omit identical Explanation.
In the present embodiment, metal and its oxide nano-particles composite 31 based on high-molecular polythene include poly- second In the high-molecular polythene and cadmium sulphide particle composite 312 of alkene 311 and HIGH PRESSURE TREATMENT, cadmium sulphide particle composite 312 The mass content of cadmium sulphide particle is 5%.(PEHP is height to thickness h, density p and the modulus of elasticity C of layers of material as shown in table 3 Press the high-molecular polythene of processing).
Table 3
Metal material 32 is vanadium metal, as shown in table 3.
Result in the present embodiment shows that the amplitude for the sound wave being transmitted into gas can reach 1.11um, more than implementation Amplitude 0.82um in example one.
The effect of embodiment two and effect
The ultrasonic wave multilayer sensor for management through quantification according to involved by the present embodiment, employs polyethylene and high pressure The polyethylene and cadmium sulphide particle composite (mass content of cadmium sulphide particle is 5%) of processing, and vanadium metal, by table 3 Understand, the sonic wave amplitude that the adaptation of different materials composition is produced is different, and the ultrasonic wave multilayer sensor emission of the present embodiment is arrived The amplitude of sound wave in gas can reach 1.11um, better than the result in embodiment one.From the above results, in matching layer The second layer using " weight " material (such as metal, crystal or other kinds of glass and plastics), i.e., from larger elasticity Modulus and metal material with the density more of a relatively high than other materials at two layers are conducive to the transmission of sound wave so that sent out in gas The amplitude increase of ejected wave.In addition, under given material condition (density and modulus of elasticity that give material), the thickness of material Maximum is influenceed on the amplitude of the sound wave of generation.
Above-mentioned embodiment is the preferred case of the present invention, is not intended to limit protection scope of the present invention.
In the above-described embodiments, the three-layer-material of matching layer is respectively plexiglas, metallic aluminium and high pressure in embodiment one Matching layer in the polyethylene and cadmium sulphide particle composite (mass content of cadmium sulphide particle is 10%) of processing, embodiment two Three-layer-material be respectively polyethylene, vanadium metal and HIGH PRESSURE TREATMENT polyethylene and cadmium sulphide particle composite (cadmium sulfide grain 5%) mass content of son is, but in the present invention, metallic aluminium or vanadium metal can also with plexiglas, polyethylene, high pressure The polyethylene and cadmium sulphide particle composite (mass content of cadmium sulphide particle is 5%) and the polyethylene of HIGH PRESSURE TREATMENT of reason Three layers are constituted with one or both of cadmium sulphide particle composite (mass content of cadmium sulphide particle be 10%) material Orchestration.

Claims (5)

1. a kind of ultrasonic wave multilayer sensor for management through quantification, it is characterised in that including:
Piezoelectric patches, for producing sound wave;
On damper, the one side for being arranged on the piezoelectric patches, for eliminating the institute propagated to the direction close to the damper State sound wave;
On matching layer, the another side for being arranged on the piezoelectric patches, for increasing the intensity of the sound wave and preventing the sound wave Reflect back at the piezoelectric patches, composite layer that the matching layer includes setting gradually, metal material layer and described compound Material layer;And
On two electrodes, the excircle for being arranged on the piezoelectric patches, for electric signal to be provided and removed to the piezoelectric patches,
Wherein, the composite layer use metal and its oxide nano-particles composite based on high-molecular polythene for Material.
2. the ultrasonic wave multilayer sensor according to claim 1 for management through quantification, it is characterised in that:
Wherein, the metal and its oxide nano-particles composite based on high-molecular polythene include high-molecular polythene Material, the high-molecular polythene of Plexiglas material and HIGH PRESSURE TREATMENT and cadmium sulphide particle composite.
3. the ultrasonic wave multilayer sensor according to claim 2 for management through quantification, it is characterised in that:
Wherein, quality of the cadmium sulfide in the high-molecular polythene and cadmium sulphide particle composite of the HIGH PRESSURE TREATMENT contains Measure as 5% or 10%.
4. the ultrasonic wave multilayer sensor according to claim 1 for management through quantification, it is characterised in that:
Wherein, the metal material is aluminium or vanadium.
5. the ultrasonic wave multilayer sensor according to claim 1 for management through quantification, it is characterised in that:
Wherein, the material of the electrode is rose's alloy.
CN201710505272.0A 2017-06-28 2017-06-28 Ultrasonic wave multilayer sensor for management through quantification Pending CN107202630A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710505272.0A CN107202630A (en) 2017-06-28 2017-06-28 Ultrasonic wave multilayer sensor for management through quantification

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710505272.0A CN107202630A (en) 2017-06-28 2017-06-28 Ultrasonic wave multilayer sensor for management through quantification

Publications (1)

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CN107202630A true CN107202630A (en) 2017-09-26

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1522360A (en) * 2002-01-28 2004-08-18 松下电器产业株式会社 Acoustic matching layer, ultrasonic transmitter-receiver and ultrasonic flowmeter
CN101364632A (en) * 2008-07-08 2009-02-11 深圳先进技术研究院 Piezoelectric element and manufacturing method thereof
CN103417247A (en) * 2012-05-22 2013-12-04 通用电气公司 Ultrasound transducer and method for manufacturing an ultrasound transducer

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1522360A (en) * 2002-01-28 2004-08-18 松下电器产业株式会社 Acoustic matching layer, ultrasonic transmitter-receiver and ultrasonic flowmeter
CN101364632A (en) * 2008-07-08 2009-02-11 深圳先进技术研究院 Piezoelectric element and manufacturing method thereof
CN103417247A (en) * 2012-05-22 2013-12-04 通用电气公司 Ultrasound transducer and method for manufacturing an ultrasound transducer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
王少波: "高频换能器匹配层的制备和特性研究", 《中国优秀硕士学位论文全文数据库工程科技I辑》 *

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