CN107192856A - A kind of cross force scaling method based on AFM probe structural parameters - Google Patents
A kind of cross force scaling method based on AFM probe structural parameters Download PDFInfo
- Publication number
- CN107192856A CN107192856A CN201710495829.7A CN201710495829A CN107192856A CN 107192856 A CN107192856 A CN 107192856A CN 201710495829 A CN201710495829 A CN 201710495829A CN 107192856 A CN107192856 A CN 107192856A
- Authority
- CN
- China
- Prior art keywords
- probe
- cross force
- measured
- afm
- cantilever
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q40/00—Calibration, e.g. of probes
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
The invention discloses a kind of cross force scaling method based on AFM probe structural parameters, comprise the steps：Under the conditions of standard laboratory atmosphere, probe normal direction coefficient of elasticity k to be measured is measurednWith normal direction sensitivity Sn；Measure probe cantilever beam length l, cantilever cantilever thickness t and tip height h；By kn、Sn, l, t, h data substitute into cross force calibration coefficient α calculation formula, you can estimation probe cross force calibration coefficient.The advantage of the invention is that：(a) this method need not use auxiliary grating and any substrate, can effectively reduce cost；(b) structural parameters of this method based on probe to be measured, consider emphatically probe attribute itself, it is to avoid influence of the external factor to demarcation；(c) this method calculates easy, each parameter and simple and quick can obtained, and is widely portable to the cross force demarcation of the AFM probe of rectangle micro-cantilever.
Description
Technical field
The invention discloses a kind of cross force scaling method based on AFM probe structural parameters.Belong to AFM
Probe calibration technique field.
Background technology
Scanning probe microscopy has been widely used in various fields, and particularly atomic force microscope technology has become
One important tool of surface mechanical properties detection, is a strong bridge of bridge joint both macro and micro, is nanoscale
Mechanical property of materials research bring great convenience.Such as the C.Lee of Columbia University using AFM have studied it is several not
With frictional behaviour (Science, 2010,328 of nanometer sized materials:76-80), domestic Tsing-Hua University's tribology state key is real
Test Wen Shizhu of room etc. and series of studies (Acta Phys.- have been carried out with polishing machine to the nano friction of graphene using AFM
Chim.Sin, 2013,29 (7), 1582-1587).
AFM has a wide range of applications in Nanotribology and nanometer mechanics research, force curve of atomic force microscope and friction
Power module causes the relation of voltage deflection on photoelectric reactor come the power on reaction material surface using probe deformations back reflection laser
Learn property (Surface science reports, 2005,59 (1):1-152.), such as adhesive force, frictional force, and AFM institutes
The voltage signal measured but directly can not be converted to power by instrument, and each probe is required for entering rower to the physical parameter of itself
(Langmuir, 2006,22 (5) could be changed after fixed:2340-2350.), it is divided into normal force demarcation and cross force demarcation.Therefore
Its normal direction and cross force conversion coefficient are an important measurement contents in mechanical quantity detection, and the measurement of normal direction conversion coefficient is
There are some more ripe methods, and the demarcation of cross force is a key demarcating in AFM and complicated asked
Topic.It is directly connected to the quantification of the interfacial force under micro-nano-scale.
In the last few years, scholars proposed several main micro-cantilever cross force scaling methods, such as University of South Australia
A.Feiler proposes force-displacement curve lever method (Rev.Sci.Instrum, 2000,71：2746-2750) demarcation probe is horizontal
To power conversion coefficient.But the relation curve of normal force-displacement only conventional in general AFM equipment, without cross force-position
Relation curve is moved, and micron ball is attached on lever and is finally adhered on probe is not easy to；Melbourne, AUS
Wedges method (Ultramicroscopy, 2014,136 that the Huabin Wang of university are proposed:193-200.) demarcation probe transverse direction
Power conversion coefficient.But this method needs specially to process specific slope grating sample, and need repeatedly measurement and more
Complicated calculating.The Yu Jiaxin and Qian Linmao of domestic Southwest Jiaotong University propose a kind of improved wedges method, but still need
Grating is aided in, is calculated relative complex.This seminar is it is also proposed that excessively a kind of probe cross force based on Amontons laws is quickly marked
Determine method, but this method needs to use standard substrate material, the horizontal edge signal and adhesive force of measurement standard substrate are, it is necessary to survey
Measure multigroup load and frictional force electrical signal data；In addition, it is necessary to look into by searching document, the friction system of backing material used is obtained
Number and as known parameters, this will inevitably increase the error of measurement result, cause process it is complicated, computationally intensive, into
This height.Therefore, nanometer is met in the urgent need to developing a kind of simple efficient, with low cost AFM probe cross force scaling method
The mechanics and tribology research of yardstick need.
The content of the invention
The purpose of the present invention is to propose to a kind of scaling method of AFM probe/micro-cantilever cross force, the method is based on AFM
Probe structure parameter measures AFM probe cross force calibration coefficient, with it is simple efficiently, maneuverable advantage can fit extensively
Measurement for the cross force calibration coefficient of square-section probe/micro-cantilever.
A kind of cross force scaling method based on AFM probe structural parameters of the present invention, comprises the steps：
The first step：Using thermal constant method, probe normal direction coefficient of elasticity k to be measured is measured by AFMnAnd normal direction
Sensitivity Sn；
Second step：Measure probe cantilever beam length l, cantilever cantilever thickness t and tip height h；
3rd step：The data that the first step, second step are obtained are substituted into formula (6), calculate the cross force mark for obtaining AFM probe
Determine factor alpha；
A kind of cross force scaling method based on AFM probe structural parameters of the present invention, measures probe cantilever beam length l, hangs
Arm cantilever thickness t and tip height h, is that probe is placed under the graduated light microscope of eyepiece mark to measure.
A kind of cross force scaling method based on AFM probe structural parameters of the present invention, the cantilever beam of probe to be measured is shaped as
Square-section.
A kind of cross force scaling method based on AFM probe structural parameters of the present invention, normal direction coefficient of elasticity knWith normal direction spirit
Sensitivity SnMeasured under the conditions of standard laboratory atmosphere.
A kind of cross force scaling method based on AFM probe structural parameters of the present invention, standard laboratory atmosphere condition refers to
Ultra-clean chamber, temperature is 20 DEG C, and humidity is 52%.
The principle of the present invention is briefly described as below：
(1) according to Hooke laws can formula (1)：
Fl=klxl=klSlVl (1)
Wherein, parameter FlFor frictional force；Parameter klFor probe transverse elasticity coefficient；Parameter xlFor probe tip lateral displacement；
Parameter SlFor probe cross sensitivity；Parameter VlThe electric signal measured for frictional experiment.
(2) formula (2) can be obtained according to AFM frictional force dynamometry principles；
Fl=α × Vl (2)
Wherein, parameter FlFor frictional force；Parameter VlThe electric signal measured for frictional experiment；Parameter alpha is that cross force demarcates system
Number.
(3) according to AFM probe internal structure principle, in AFM photoelectric detector be it is rotationally symmetrical, the beam normal direction of equivalent,
Lateral displacement will cause identical photoelectric current, it can thus be concluded that between transverse direction, normal direction sensitivity relation be equation 3.：
Wherein, parameter SlFor probe cross sensitivity；Parameter SnFor probe normal direction sensitivity；Parameter E is probe Young mould
Amount；Parameter G is probe modulus of shearing；Parameter l is the length of micro cantilever probe；Parameter h is tip height；Parameter t is cantilever beam
Thickness.
(4) it can be obtained according to Euler's beam theory：The relation such as formula of probe elastic parameter and probe (square-section) physical dimension
(4)、(5)：
Wherein, parameter knFor normal direction coefficient of elasticity；Parameter klFor transverse elasticity coefficient；Parameter E is probe Young's modulus；Ginseng
Number G is probe modulus of shearing；Parameter l is the length of micro cantilever probe；Parameter h is tip height；Parameter t is cantilever cantilever thickness；
Parameter w is the width of micro cantilever probe.
(5) simultaneous equations (1), (2), (3), (4), (5) can be obtained, formula (6), AFM probe cross force calibration coefficient α：
The present invention has advantages below：(a) this method need not use auxiliary grating and any substrate, can effectively reduce into
This；(b) structural parameters of this method based on probe to be measured, consider emphatically probe attribute itself, it is to avoid external factor is to demarcation
Influence；(c) this method calculation formula is easy, each parameter simple and quick can be obtained, and is widely portable to rectangle micro-cantilever
AFM probe cross force demarcation.It is fast compared to a kind of probe cross force based on Amontons laws that this seminar proposes
Fast scaling method, (a) present invention parameter used can be measured accurately, so as to improve stated accuracy；(b) standard lining is not used
Bottom, so as to avoid the experimental error that standard substrate may be brought；(c) present invention need not measure multigroup load and frictional force
Electrical signal data, it is not necessary to which measurement base bottom adhesive force, calibration process is simple and easy to apply, greatlys save the time.
Brief description of the drawings
Fig. 1 is the flow chart of utilization probe structure parameter calibration AFM probe transverse conversion coefficient of the present invention；
Fig. 2 is the schematic diagram of probe structure parameter used in the embodiment of the present invention 1,2；
Fig. 3 is the thermal noise power density spectrum of probe to be measured in embodiment 1；
Fig. 4 is the appearance structure figure of probe to be measured under an optical microscope in embodiment 1；
Fig. 5 is the thermal noise power density spectrum of probe to be measured in embodiment 2；
Fig. 6 is the appearance structure figure of probe to be measured under an optical microscope in embodiment 2；
It is probe thermal noise power density spectrum to be obtained from Fig. 3, by AFM to area integral in thermal noise power density spectrogram
The time is averaged afterwards, directly calculates and provides Kn, Sn.
It is probe thermal noise power density spectrum to be obtained from Fig. 5, by AFM to area integral in thermal noise power density spectrogram
The time is averaged afterwards, directly calculates and provides Kn, Sn.
Embodiment
A kind of cross force scaling method based on AFM probe structural parameters, it is characterised in that including following steps：
1st, based on AFM probe structural parameters, it is considered to AFM structural principles and frictional force dynamometry principle, using thermal constant method, carry
Go out to measure the principle of AFM probe cross force calibration coefficient；
(1) Hooke laws are understood：
Fl=klxl=klSlVl (1)
Wherein, parameter FlFor frictional force；Parameter klFor probe transverse elasticity coefficient；Parameter xlFor probe tip lateral displacement；
Parameter SlFor probe cross sensitivity；Parameter VlThe electric signal measured for frictional experiment.
(2) AFM frictional force dynamometry principle is：
Fl=α × Vl (2)
Wherein, parameter FlFor frictional force；Parameter VlThe electric signal measured for frictional experiment；Parameter alpha is that cross force demarcates system
Number.
(3) AFM internal structures principle：
Photoelectric detector is rotationally symmetrical in AFM, and the beam normal direction of equivalent, lateral displacement will cause identical photoelectric current,
It can thus be concluded that between transverse direction, normal direction sensitivity relation be equation 3..
Wherein, parameter SlFor cross sensitivity；Parameter SnFor normal direction sensitivity；Parameter E is probe Young's modulus；Parameter G is
Probe modulus of shearing；Parameter l is the length of micro cantilever probe；Parameter h is tip height；Parameter t is cantilever cantilever thickness.
(4) relation of probe elastic parameter and probe (square-section) physical dimension：
Wherein, parameter knFor normal direction coefficient of elasticity；Parameter klFor transverse elasticity coefficient；Parameter E is probe Young's modulus；Ginseng
Number G is probe modulus of shearing；Parameter l is the length of micro cantilever probe；Parameter h is tip height；Parameter t is cantilever cantilever thickness；
Parameter w is the width of micro cantilever probe.
(5) 5. 4. 3. 2. 1. simultaneous equations can must measure the experimental method principle model of AFM probe cross force calibration coefficient：
2nd, probe normal direction elastic constant and normal direction sensitivity are measured under the conditions of standard laboratory atmosphere：
Probe to be measured is installed on AFM, normal direction elastic constant and the normal direction sensitivity of probe are measured using thermal constant method.
3rd, the structural parameters of probe cantilever to be measured and needle point are measured：
Probe to be measured is placed under light microscope, and combines the data that Olympus companies provide, probe can be obtained
Shape and structural parameters.
4th, by experimental data and the structural parameters principle of substitution model of probe, the cross force calibration coefficient of probe is estimated：
By the structural parameters principle of substitution model of the normal direction elastic constant measured by experiment, normal direction sensitivity and probe,
Estimate the cross force calibration coefficient of probe.
Embodiment 1：
Used AFM model in embodiment 1：Cypher ES,Asylum Research,CA；Marked
Fixed probe model：AC240TS-R3,Olympus；Whole calibration process is completed in ultra-clean chamber, and temperature is 20 DEG C, and humidity is
52%.
By step 2, probe to be measured is installed on AFM, the thermal noise power for measuring probe to be measured using thermal constant method is close
Degree spectrum by AFM to being averaged after area integral in thermal noise power density spectrogram to the time, obtains sonde method (see accompanying drawing 3)
It is respectively 1.31nN/nm and 72.41nm/V to elastic constant and normal direction sensitivity, data are shown in Table 1；
By step 3, referring to accompanying drawing 4, probe to be measured is placed under the graduated light microscope of eyepiece mark, measurement is visited
Pin cantilever beam length is 241.3 μm, and cantilever cantilever thickness is 2.3 μm, and tip height is 13.9 μm, and data are shown in Table 1；
By step 4, above-mentioned parameter is substituted into equation by structural parameters and thermal constant method based on probe to be measuredIn, you can the value for obtaining the probe cross force calibration coefficient α to be measured is 1.014nN/mV.
Embodiment 2：
Used AFM model in embodiment 2：Cypher ES,Asylum Research,CA；Marked
Fixed probe model：AC160TS-R3,Olympus；Whole calibration process is completed in ultra-clean chamber, and temperature is 20 DEG C, and humidity is
52%.
By step 2, probe to be measured is installed on AFM, the thermal noise power for measuring probe to be measured using thermal constant method is close
Degree spectrum by AFM to being averaged after area integral in thermal noise power density spectrogram to the time, obtains sonde method (see accompanying drawing 5)
It is respectively 50.31nN/nm and 49.61nm/V to elastic constant and normal direction sensitivity, data are shown in Table 2；
By step 3, referring to accompanying drawing 6, probe to be measured is placed under the graduated light microscope of eyepiece mark, measurement is visited
Pin cantilever beam length is 159.8 μm, and cantilever cantilever thickness is 3.7 μm, and tip height is 14.1 μm, and data are shown in Table 2；
By step 4, above-mentioned parameter is substituted into equation by structural parameters and thermal constant method based on probe to be measuredIn, you can the value for obtaining the probe cross force calibration coefficient α to be measured is 16.670nN/mV.
Error analysis：
Using " a kind of probe cross force scaling method based on A Mengdun laws " proposed before this seminar to implementing
AC240-R3 probes carry out cross force demarcation in example 1, and are compared with the result of calculation of embodiment 1：
The monocrystalline silicon piece that the utilized standard material of demarcation is 1cm × 1cm；It is 0.050 to check in silicon chip coefficient of friction
(Materials Letters,2015,142:207-210.).Clean silicon chip is placed in AFM sample stages, using frictional force module,
Ten groups of load and frictional force electrical signal data have been measured in the range of 200nm × 200nm, 3 have been shown in Table, and the same area is measured
Adhesive force is 108nN.Bring above-mentioned parameter into α Vl=μ (Fn+Fad) in, wherein α is cross force calibration coefficient, VlFor friction telecommunications
Number, μ is sample coefficient of friction, FnFor sample surfaces normal load, FadFor measured zone adhesive force.Iteration calculates cross force demarcation
Coefficient is 1.078, is compared with embodiment 1 1.014, and demarcation relative error is 6.3%, illustrates that this scaling method is effective.
Table 1.AC240TS probe structures parameter and experimental result
Table 2.AC160TS probe structures parameter and experimental result
The silicon chip varying load friction signal of table 3.
Comparing embodiment 1 and comparative example, it is easy to see that the present invention need not use standard substrate, it is not necessary to which measurement standard is served as a contrast
The horizontal edge signal and adhesive force at bottom, and then avoid the measurement error that standard substrate is brought.The equal energy of parameter needed for of the invention
It is simple and effective to measure, it is not necessary to search document and obtain the coefficient of friction of base material used and as known parameters, and then keep away
The error exempted from therefore brought.The present invention need not measure multigroup load and frictional force electrical signal data, it is not necessary to measurement base
Bottom adhesive force, calibration process is simple and easy to apply, greatlys save the time.
Claims (6)
1. a kind of cross force scaling method based on AFM probe structural parameters, comprises the steps：
The first step：Measure probe normal direction coefficient of elasticity k to be measurednWith normal direction sensitivity Sn；
Second step：Measure probe cantilever beam length l, cantilever cantilever thickness t and tip height h；
3rd step：The data that the first step, second step are obtained are substituted into formula (6), calculate the cross force demarcation system for obtaining AFM probe
Number α；
<mrow>
<mi>&alpha;</mi>
<mo>=</mo>
<mfrac>
<mrow>
<mn>2</mn>
<mi>l</mi>
</mrow>
<mrow>
<mn>3</mn>
<mrow>
<mo>(</mo>
<mi>h</mi>
<mo>+</mo>
<mi>t</mi>
<mo>/</mo>
<mn>2</mn>
<mo>)</mo>
</mrow>
</mrow>
</mfrac>
<msub>
<mi>k</mi>
<mi>n</mi>
</msub>
<msub>
<mi>S</mi>
<mi>n</mi>
</msub>
<mo>-</mo>
<mo>-</mo>
<mo>-</mo>
<mrow>
<mo>(</mo>
<mn>6</mn>
<mo>)</mo>
</mrow>
<mo>.</mo>
</mrow>
2. a kind of cross force scaling method based on AFM probe structural parameters according to claim 1, it is characterised in that：
Probe normal direction coefficient of elasticity k to be measurednWith normal direction sensitivity SnBy AFM, measured using thermal constant method.
3. a kind of cross force scaling method based on AFM probe structural parameters according to claim 1, it is characterised in that：
The cantilever beam of probe to be measured is shaped as square-section.
4. a kind of cross force scaling method based on AFM probe structural parameters according to claim 3, it is characterised in that：
Probe cantilever beam length l, cantilever cantilever thickness t and tip height h are measured, is that probe is placed in the graduated optical microphotograph of eyepiece mark
Measured under mirror.
5. a kind of cross force scaling method based on AFM probe structural parameters according to claim 1, it is characterised in that：
Normal direction coefficient of elasticity knWith normal direction sensitivity SnMeasured under the conditions of standard laboratory atmosphere.
6. a kind of cross force scaling method based on AFM probe structural parameters according to claim 5, it is characterised in that：
Standard laboratory atmosphere condition refers to ultra-clean chamber, and temperature is 20 DEG C, and humidity is 52%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710495829.7A CN107192856A (en) | 2017-06-26 | 2017-06-26 | A kind of cross force scaling method based on AFM probe structural parameters |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710495829.7A CN107192856A (en) | 2017-06-26 | 2017-06-26 | A kind of cross force scaling method based on AFM probe structural parameters |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107192856A true CN107192856A (en) | 2017-09-22 |
Family
ID=59880995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710495829.7A Pending CN107192856A (en) | 2017-06-26 | 2017-06-26 | A kind of cross force scaling method based on AFM probe structural parameters |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107192856A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109839518A (en) * | 2019-02-25 | 2019-06-04 | 天津大学 | A kind of atomic force microscope micro-cantilever coefficient of elasticity caliberating device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106526242A (en) * | 2016-12-09 | 2017-03-22 | 湘潭大学 | AFM probe lateral force calibrating coefficient measurement method and lateral force calibrating method |
-
2017
- 2017-06-26 CN CN201710495829.7A patent/CN107192856A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106526242A (en) * | 2016-12-09 | 2017-03-22 | 湘潭大学 | AFM probe lateral force calibrating coefficient measurement method and lateral force calibrating method |
Non-Patent Citations (3)
| Title |
|---|
| ANJA MUELLER等: ""Synthesis, Characterization and Derivatization of Hyperbranched Polyfluorinated Polymers"", 《MACROMOLECULES》 * |
| WENHUA LIU等: ""Easy and direct method for calibrating atomic force microscopy lateral force measurements"", 《REVIEW OF SCIENTIFIC INSTRUMENTS》 * |
| 鲍海飞等: ""原子力显微镜中微悬臂梁/探针横向力的标定"", 《测试技术学报》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109839518A (en) * | 2019-02-25 | 2019-06-04 | 天津大学 | A kind of atomic force microscope micro-cantilever coefficient of elasticity caliberating device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Palacio et al. | Normal and lateral force calibration techniques for AFM cantilevers | |
| Karatay et al. | Fast time-resolved electrostatic force microscopy: Achieving sub-cycle time resolution | |
| Sansoz et al. | A force-matching method for quantitative hardness measurements by atomic force microscopy with diamond-tipped sapphire cantilevers | |
| Serre et al. | Measurement of micromechanical properties of polysilicon microstructures with an atomic force microscope | |
| Chung et al. | Accurate noncontact calibration of colloidal probe sensitivities in atomic force microscopy | |
| CN106526242A (en) | AFM probe lateral force calibrating coefficient measurement method and lateral force calibrating method | |
| CN100356160C (en) | Improved method for testing micro-cantilever beam elasticity coefficient | |
| Jarzabek et al. | Elastic modulus and fracture strength evaluation on the nanoscale by scanning force microscope experiments | |
| Hurley et al. | Mapping mechanical properties on the nanoscale using atomic-force acoustic microscopy | |
| CN107192856A (en) | A kind of cross force scaling method based on AFM probe structural parameters | |
| Li et al. | A novel technique of microforce sensing and loading | |
| Sikora et al. | The determination of the spring constant of T-shaped cantilevers using calibration structures | |
| Sikora et al. | Dynamic speed control in atomic force microscopy to improve imaging time and quality | |
| KR20110004925A (en) | Quantitative temperature and thermal conductivity measuring method using scanning thermal microscope | |
| CN109839518A (en) | A kind of atomic force microscope micro-cantilever coefficient of elasticity caliberating device | |
| CN109884344A (en) | A kind of atomic force microscope micro-cantilever coefficient of elasticity scaling method | |
| Nieradka et al. | Focused ion beam milling and deposition techniques in validation of mass change value and position determination method for micro and nanomechanical sensors | |
| Świadkowski et al. | Near-zero contact force atomic force microscopy investigations using active electromagnetic cantilevers | |
| CN111983260B (en) | Atomic force microscope probe amplitude calibration method | |
| Liu et al. | The Observation of interface effects presented on micrometer-scale sphere tips of fiber Bragg grating-based probes | |
| Hoogesteger et al. | The Sensitivity of Subsurface Contact Resonance Atomic Force Microscopy to Changes in the Depth of Buried Features: a Nonlinear Approach | |
| Ekwińska et al. | Normal Force Calibration Method Used for Calibration οf Atomic Force Microscope | |
| Belikov et al. | Quantitative Viscoelasticity Studies with Atomic Force Microscopy | |
| Braunovic | Characterization techniques for nanostructured contact materials | |
| Ortega et al. | Materials characterization by analysis of force-distance curves: an introduction to nano-mechanical measures and experimentation for undergraduate students |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170922 |