CN107192675A - A kind of photo-modulated reflectance spectrum measuring detecting system for simply and effectively suppressing fluorescence interference - Google Patents
A kind of photo-modulated reflectance spectrum measuring detecting system for simply and effectively suppressing fluorescence interference Download PDFInfo
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- CN107192675A CN107192675A CN201710411167.0A CN201710411167A CN107192675A CN 107192675 A CN107192675 A CN 107192675A CN 201710411167 A CN201710411167 A CN 201710411167A CN 107192675 A CN107192675 A CN 107192675A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
Abstract
The invention discloses a kind of photo-modulated reflectance spectrum measuring detecting system for simply and effectively suppressing fluorescence interference.Detecting system reduces the intensity of the reflected beams diameter and enhancing reflected signal using an optics shrink beam device, couple to obtain the Photoreflectance signal of material with iris diaphgram using a long focus lens simultaneously, the interference of fluorescence signal that pumping laser excited to modulated spectrum is restrained effectively, the detection to the true photo-modulated reflectance spectrum measuring of material is realized.The present invention is advantageous in that economical and practical, simple and easy to apply.
Description
Technical field
The present invention relates to a kind of photo-modulated reflectance spectrum measuring detecting system, and in particular to a kind of economical, can effectively suppress glimmering
The photo-modulated reflectance spectrum measuring detecting system of optical signal interference, available for the detection of visible and infrared semiconductor material optical signature.
Background technology
In the past few decades, reflectance spectrum and absorption spectrum are widely used in semiconductor electronic band structure research, its
By measuring semi-conducting material in the reflectivity and transmissivity near band edge at different-energy, corresponding to complex refractivity index real part and void
The change in portion, so as to reflect semi-conducting material internal electronic architecture.But simple reflection and transmitted spectrum is a kind of static
Very generous background is presented in absolute measurement, its spectral signature, and structure interested is typically faint, it is easy to be buried in
It is difficult to distinguish in strong background, thus with significant limitation.Modulated spectrum overcomes reflection and transmitted spectrum
These unfavorable and defects that static absolute measurement has, and widely studied and used by people.Modulated spectrum
Basic thought is by applying the extraneous perturbation with some cycles to test sample, to modulate certain inside semiconductor samples
A little optical properties and parameter.These perturbation parameters can be the polarization of electric field, magnetic field, stress, sample temperature, even incident light
Characteristic or wavelength etc..Modulated spectrum is essentially a kind of Differential Spectrum, thus institute in static absolute reflection spectrometry
The generous background having can be very good to be removed；And sharp spectrum line is presented in the spectrum of semi-conducting material Near The Critical Point
Some features for being difficult to recognize in type, definitely spectrum are recognized easily in modulated spectrum.
In numerous modulated spectrums, Modulated Photo-Reflection Spectrum because with sample noncontact, not damaged, simple operation and other advantages and
It is widely used and semiconductor spectrum detection field.But simple Modulated Photo-Reflection Spectrum applies upper deficiency there is also some, works as fortune
When carrying out periodic modulation to the built in field of sample with laser, while can also excite sample to cause fluorescence to disturb.Especially when
When sample has higher fluorescence efficiency or carries out low-temperature measurement, the performance of fluorescence background problem it is especially prominent.Asked for this
Topic, is proposed double light modulation techniques of so-called suppression fluorescence background, by carrying out different frequency to pumping and detection light
Modulation, with reference to double Phase Lock Techniques with the modulated signal required for extracting.But this method adds experiment to a certain extent
Complexity in measurement, improves technical difficulty, while the financial cost of experiment is also increased, it is unfavorable to a certain extent
In the extensive use of Modulated Photo-Reflection Spectrum.How simply and effectively to suppress fluorescence background interference, improve signal to noise ratio to Photoreflectance
Spectral technology extensive use proposes higher requirement.
The content of the invention
It is an object of the invention to provide a kind of photo-modulated reflectance spectrum measuring detecting system for simply and effectively suppressing fluorescence interference.
To achieve these goals, this patent provides a kind of photo-modulated reflectance spectrum measuring for simply and effectively suppressing fluorescence interference
Detecting system.Realizing the part of the system mainly includes：Broadband white light source 1, achromatism optics shrink beam device 2, detection light is focused on
Lens 3, laser focusing lens 4, sample translation stage 5, iris diaphgram 6, focal length optical signalling collection assembly 7, filter plate 8 is monochromatic
Instrument 9, lock-in amplifier 10, laser 11, optical chopper 12, wherein：
Detected sample is positioned on the sample translation stage 5 of the front focal plane of detection light condenser lens 3.Test system is by width
The white light that wave band white light source 1 is launched is used as detection light, achromatism optics shrink beam device 2 shrink beam of the detection light Jing Guo high-shrinkage beam ratio
After focus on test sample surface.The pumping laser that laser 11 is launched simultaneously is after the modulation of optical chopper 12, through laser
Condenser lens 4 incides sample surfaces and foregoing detection light hot spot can be completely covered.Visit after photometric beams reflect through sample and pass through
Cross by focal length optical signalling collection assembly collection 7 after iris diaphgram 6 is filtered, filtered 8 importing monochromator 9, last signal is defeated
Enter lock-in amplifier 10, and obtain modulated signal.Wherein achromatism optics shrink beam system 2 has shunk detection light beam diameter, together
When improve beam power density.Iris diaphgram couples the effective numerical aperture for reducing collecting lens with focal length collecting lens, greatly
The earth reduces the fluorescence signal collection efficiency that pumping laser is excited, while can ensure anti-by adjusting iris diaphgram size
Irradiating light beam intensity is barely affected, so as to effectively suppress interference of the fluorescence signal to modulated signal.
The present invention is advantageous in that：On the basis of traditional Photoreflectance system, the colour killing of high-shrinkage beam ratio is introduced
Poor shrink beam component realizes the shrink beam of detection light beam, restrained effectively pumping laser with long focus lens with reference to iris diaphgram and is excited
Interference of the fluorescence signal to modulated signal.There is simple to operation, the low superior spy of financial cost compared to double Modulated Photo-Reflection Spectrums
Property.Extensive use for Modulated Photo-Reflection Spectrum in Analysis of Semiconductor Materials field provides a kind of simple and effective solution.
Brief description of the drawings
Fig. 1 is a kind of photo-modulated reflectance spectrum measuring detecting system for simply and effectively suppressing fluorescence interference that the present invention is provided
Schematic diagram；Description of symbols in Fig. 1：
1-broadband white light source；
2-achromatism optics shrink beam device；
3-detection light condenser lens；
4-pumping laser condenser lens；
5-sample translation stage；
6-iris diaphgram；
7-focal length optical collection coupling assembly；
8-filter plate；
9-monochromator；
10-lock-in amplifier；
11-laser；
12-optical chopper.
Fig. 2 is the photo-modulated reflectance spectrum measuring detecting system for simply and effectively suppressing fluorescence interference realized using the present invention
With traditional photo-modulated reflectance spectrum measuring system respectively to In0.55Ga0.45As semiconductive thin film test comparison figures.Wherein：It is tradition to scheme a
Differential reflected signal measured by photo-modulated reflectance spectrum measuring device is contrasted with fluorescence signal intensity, and figure b is traditional Photoreflectance
Modulation Reflectance Spectrum measured by spectral device；Figure c measures for the photo-modulated reflectance spectrum measuring detecting system that the present invention is realized
Differential reflected signal is contrasted with fluorescence signal intensity；Figure d measures for the photo-modulated reflectance spectrum measuring detecting system that the present invention is realized
Modulation Reflectance Spectrum.
Embodiment
Present invention combination drawings and Examples, the embodiment to the present invention is illustrated.
A kind of photo-modulated reflectance spectrum measuring detecting system for simply and effectively suppressing fluorescence interference, mainly includes：One wide ripple
Section white light source 1, a set of achromatism optics shrink beam device 2, detection light condenser lens 3, laser focusing lens 4, a two-dimentional sample is put down
Moving stage 5, an iris diaphgram 6, a set of focal length optical signalling collection assembly 7, a filter plate 8, a monochromator 9, a lock
Phase amplifier 10 a, laser 11 a, optical chopper 12, wherein main devices design parameter is as follows：
Broadband white light source 1 is supercontinuum light source or bromine tungsten filament lamp；
Optics shrink beam device 2 is using 10 times of zoom shrink beam devices for being equipped with achromatic lens；
Condenser lens 3 uses 125mm focal length achromatic lens；
Condenser lens 4 uses 150mm focal length achromatic lens；
Sample translation stage 5 is using the two-dimension translational platform for equipping micrometer；
Iris diaphgram 6 use minimum-value aperture for zero iris ring；
Focal length optical collection component 7 is collected using 125mm focal length, 75mm Lens Coupling monochromators；
Filter plate 8 is using common long pass filter piece (cutoff wavelength can be selected as needed)；
Monochromator 9 is using the Chinese light Omni- λ 300 that stand upright, and focal length is 300mm, grating model 68mmX68mm
Lock-in amplifier 10 uses SR830；
Laser 11 is using general semiconductor laser (wavelength can be selected as needed)；
The output frequency of optical chopper 12 is 127Hz；
Pumping laser wavelength used is 532nm in embodiment (Fig. 2)；Optical filter is that Thorlabs length leads to 1200nm, simultaneously
The pumping laser for filtering out sample scattering detects the second-order diffraction signal of light with short wavelength.Test sample is In0.55Ga0.45As half
Conductor thin film, extension is in InP substrate；Left figure a in Fig. 2, b are common Modulated Photo-Reflection Spectrum, using 40mm, and the lens of 1in diameters are received
Collection, right figure c, d are the photo-modulated reflectance spectrum measuring measured by the device after improving, and are collected using 125mm focal length 1in lens, variable
The aperture of the diaphragm is set to 1mm.Theory, which can calculate the newly-designed relatively common light modulation of photoabsorption modulation light spectral apparatus, can realize about 1/
(5.86×103) fluorescence signal rejection ratio.In common Modulated Photo-Reflection Spectrum (figure a, b), there is stronger fluorescence signal, such as figure a
Shown in dotted line.Due to being disturbed by fluorescence signal, singularity characteristics are presented in modulated spectrum near Fluorescent peal, such as arrow institute
Show.And the fluorescence signal interference that can be obtained by new system in true normal Modulated Photo-Reflection Spectrum, modulation spectrum is obtained effectively
Suppression, such as figure c, shown in d.
Claims (1)
1. a kind of photo-modulated reflectance spectrum measuring detecting system for simply and effectively suppressing fluorescence interference, including broadband white light source (1),
Achromatism optics shrink beam device (2), detection light condenser lens (3), laser focusing lens (4), sample translation stage (5), iris diaphgram
(6), focal length optical collection coupling assembly (7), filter plate (8), monochromator (9), lock-in amplifier (10), laser (11), light
Learn chopper (12), it is characterised in that：
Detected sample is positioned on the sample translation stage (5) of detection light condenser lens (3) front focal plane, described broadband
The white light that white light source (1) is launched is used as detection light, achromatism optics shrink beam device (2) shrink beam of detection light Jing Guo high-shrinkage beam ratio
After focus on test sample surface, while laser (11) transmitting pumping laser by optical chopper (12) modulation after, pass through
Laser focusing lens (4) incide sample surfaces and foregoing detection light hot spot can be completely covered；Photometric beams are visited to reflect through sample
Collected afterwards and after iris diaphgram (6) filtering by focal length optical signalling collection assembly (7), filtered (8) import monochromator
(9), last signal input lock-in amplifier (10), obtains Modulation Reflectance Spectrum signal.
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| CN201710411167.0A CN107192675B (en) | 2017-06-05 | 2017-06-05 | Light modulation reflection spectrum detection system capable of simply and effectively inhibiting fluorescence interference |
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| CN201710411167.0A CN107192675B (en) | 2017-06-05 | 2017-06-05 | Light modulation reflection spectrum detection system capable of simply and effectively inhibiting fluorescence interference |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109632760A (en) * | 2018-12-06 | 2019-04-16 | 深圳网联光仪科技有限公司 | A method of excluding fluorescence interference measurement substance Raman spectrum |
| WO2023197297A1 (en) * | 2022-04-15 | 2023-10-19 | 中国科学院半导体研究所 | Deep ultraviolet light modulation reflectance spectrometer and application thereof |
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|---|---|---|---|---|
| CN109632760A (en) * | 2018-12-06 | 2019-04-16 | 深圳网联光仪科技有限公司 | A method of excluding fluorescence interference measurement substance Raman spectrum |
| WO2023197297A1 (en) * | 2022-04-15 | 2023-10-19 | 中国科学院半导体研究所 | Deep ultraviolet light modulation reflectance spectrometer and application thereof |
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| CN107192675B (en) | 2020-04-07 |
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