CN107175175A - multi-nozzle device - Google Patents
multi-nozzle device Download PDFInfo
- Publication number
- CN107175175A CN107175175A CN201610891687.1A CN201610891687A CN107175175A CN 107175175 A CN107175175 A CN 107175175A CN 201610891687 A CN201610891687 A CN 201610891687A CN 107175175 A CN107175175 A CN 107175175A
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- CN
- China
- Prior art keywords
- binding site
- shower nozzle
- center line
- point
- riser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007921 spray Substances 0.000 claims abstract description 25
- 239000007787 solid Substances 0.000 claims description 47
- 238000005507 spraying Methods 0.000 abstract description 3
- 238000004140 cleaning Methods 0.000 description 27
- 239000000758 substrate Substances 0.000 description 10
- 239000012530 fluid Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 239000013043 chemical agent Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
Abstract
A multi-nozzle device comprises a combination assembly and at least two nozzles, wherein the combination assembly comprises a combination vertical plate, the combination vertical plate is parallel to a vertical direction, the combination vertical plate comprises a plurality of combination points which are arranged at intervals, and the combination points are coplanar along the vertical direction; the spray head can be selectively combined on two combination points of the combination points, and the spray head can be detachably combined on the two combination points, so that the spray head can be fixed on the combination vertical plate and positioned at a required spraying angle position.
Description
Technical field
The present invention relates to a kind of many ejecting devices, more particularly to a kind of substrate to clean for example, semiconductor crystal wafer
Many ejecting devices.
Background technology
Semiconductor crystal wafer in the fabrication process can by the different processing procedure of multiple tracks, wafer after the processing of per pass processing procedure,
Crystal column surface can remain the residue of for example, chemical agent, therefore, need to spray wafer by shower nozzle in manufacturing process for cleaning
Cleaning fluid, to remove the residue on wafer.
However, wafer is cleaned typically by single shower nozzle in existing manufacturing process for cleaning, therefore, speed during cleaning
Degree causes inefficient slowly, and cleaning performance is not also good.
The content of the invention
The main object of the present invention, is to provide a kind of many ejecting devices, can be optionally by the design of combined assembly
The shower nozzle of requirement is assembled, and shower nozzle optionally can be fixed on the spray angle needed for one, meanwhile, multiple sprays
The hydro-peening pressure that head also can arrange in pairs or groups identical or different, can lift cleaning speed, efficiency and cleaning performance whereby.
The purpose of the present invention and background technology is solved the problems, such as using following technical scheme to realize, carried according to the present invention
The many ejecting devices gone out include a combined assembly, and at least two shower nozzles, and the combined assembly combines riser including one, and this combines vertical
Plate is parallel to a vertical direction, and this includes multiple spaced binding sites with reference to riser, and the binding site is upright along this
Direction copline, each shower nozzle may be selectively incorporated on the two basic change point in the binding site, and each shower nozzle
Two binding site is detachably combined in, whereby so that each shower nozzle can be fixed on this with reference to riser and needed for being positioned at one
Spray angle position.
This combines riser and also includes a facade, and two shower nozzle is born against in the facade.
Each shower nozzle include multiple spaced locking points, the locking point two of which locking point with this two
Binding site aligned in position, the combined assembly also includes multiple locking parts, and each locking part is by the corresponding binding site to lock
It is fixed in the locking point with the binding site aligned in position.
Each locking point is a screw, and each binding site is a perforation, and each locking part is a screw.
This combine riser in it is elongated and its grow to along one perpendicular to the vertical direction horizontal direction extend, this combines riser
Comprising a upper end, and one in contrast to the upper end lower end, neighbouring upper end of a part in the binding site and another part is adjacent
The nearly lower end.
The binding site has two upper binding sites along the spaced and neighbouring upper end of the horizontal direction, and two
Along the horizontal direction is spaced and lower binding site of the neighbouring lower end, each lower binding site and binding site on adjacent this
Position is in diagonal position, and the locking point there is position to lock the one of diagonal position solid point and once lock a little, this lock solid point with
The lower locking point is aligned in binding site and the lower binding site on adjacent this respectively.
This combine riser define one parallel to the vertical direction center line, the two upper and lower binding site respectively be located at the center line
Opposite side, binding site is away from the center line under the center line and each for binding site on each, and each shower nozzle is positioned at one
First obliquity.
This combine riser define one parallel to the vertical direction center line, the two upper and lower binding site respectively be located at the center line
Opposite side, each lower binding site is adjacent to the center line away from the center line for binding site on each, and each shower nozzle is positioned at one
Second obliquity.
This combine riser define one parallel to the vertical direction center line, the binding site have two first on combines
Point, binding site, two first time binding sites on two second, and two second time binding sites, the binding site on two first, second
Along the horizontal direction is spaced and the neighbouring upper end, this on two first, second binding site be located at the opposite side of the center line respectively,
And this on two second binding site be respectively separated positioned at this on two first on the outside of binding site, two first, second time binding sites along this
Horizontal direction is spaced and adjacent to the lower end, and two first, second time binding sites is located at the opposite side of the center line respectively, and should
Two second time binding sites are respectively separated on the outside of two first time binding sites, and this is defined positioned at the center line the same side with reference to riser
Have the first oblique line of the connection binding site and second time binding site on first, and a connection this on second binding site and this
Once the second oblique line of binding site, first, second oblique line is intersecting and presss from both sides an obtuse angle between the two, and the locking point has two
Along the solid point of locking that the horizontal direction is spaced, and two spaced and be located at this respectively on two along the horizontal direction
Locking point below lower locking point, each shower nozzle define one be connected to one pair of which Angle Position this lock solid point with this under
Lock the first diagonal of point, and lock solid point and the lower locking for being connected to another diagonal position put it is second diagonal
Line, first, second diagonal is oblique respectively and presss from both sides a right angle between the two, first catercorner length be equal to this first
Oblique line length, second catercorner length is equal to the second oblique line length.
A vertical range between each first time binding site and the center line be less than each on first binding site with should
A vertical range between center line, a vertical range between each second time binding site and the center line be more than each second
A vertical range between upper binding site and the center line.
Each shower nozzle is optionally by lock solid point and the lower locking point difference of position a pair of Angle Positions wherein
Alignment positioned at the center line the same side binding site and second time binding site on first, to be positioned at one first obliquity,
Or alignment bit respectively is optionally put in position by each shower nozzle in the solid point of locking of another diagonal position with the lower locking
Binding site and first time binding site on second in the center line the same side, to be positioned at one second obliquity.
The binding site also has two binding sites along along the 3rd of the spaced and neighbouring upper end of the horizontal direction,
And two along the horizontal direction is spaced and the three time binding sites of the neighbouring lower end, this is between binding site is distinguished on two the 3rd
Every positioned at this on two second on the outside of binding site, and each on the 3rd binding site be less than each along the height on the vertical direction
Binding site is along the height on the vertical direction on second, and two the three times binding sites are respectively separated positioned at two second time binding sites
Outside, this combine riser define positioned at the center line the same side have a connection this on second binding site and the three times binding sites the
Three oblique lines, and the connection binding site on binding site and the 3rd on second the 4th oblique line, the 3rd oblique line parallel to this
One oblique line, first catercorner length is equal to the 3rd oblique line length, and each shower nozzle, which has defined one and is connected to this two, locks
The connecting line of solid point, the connection line length is equal to the 4th oblique line length.
Each shower nozzle is optionally by lock solid point and the lower locking point difference of position a pair of Angle Positions wherein
Alignment positioned at the center line the same side binding site and the three times binding sites on second, to be positioned at one first obliquity,
Or two solid point of locking optionally is alignd and combined positioned at this of the center line the same side on second by each shower nozzle respectively
Binding site on point and the 3rd, to be positioned at one second obliquity.
Many ejecting devices include three shower nozzles, and the shower nozzle is respectively a middle shower nozzle and two outside shower nozzles, in this
Between two solid point of locking of shower nozzle be aligned in the binding site on two first respectively, each outside shower nozzle position pair of horns position wherein
Lock solid point and the lower locking point put align respectively positioned at the center line the same side this on second under binding site and the 3rd
Binding site, each outside shower nozzle is positioned at one first obliquity.
Many ejecting devices include three shower nozzles, and the shower nozzle is respectively a middle shower nozzle and two outside shower nozzles, in this
Between two solid point of locking of shower nozzle be aligned in the binding site on two first respectively, this of each outside shower nozzle two is locked solid point point
The binding site on binding site and the 3rd on second of the center line the same side Dui Qi be located at, shower nozzle is positioned at one on the outside of each
Second obliquity.
The beneficial effects of the present invention are：By the design of combined assembly, requirement can be optionally assembled
Shower nozzle, and shower nozzle optionally can be fixed on the spray angle position needed for one, meanwhile, multiple shower nozzles can also arrange in pairs or groups identical
Or different hydro-peening pressure, cleaning speed, efficiency and cleaning performance can be lifted whereby.
Brief description of the drawings
Fig. 1 is a front view of the first embodiment of many ejecting devices of the invention, illustrates two shower nozzles and its with reference to riser
A kind of middle assembling mode；
Fig. 2 is a front view of the combination riser of the first embodiment；
Fig. 3 is the side view diagram of the combination riser of the first embodiment；
Fig. 4 is a front view of two shower nozzles of the first embodiment；
Fig. 5 is the sectional view intercepted along the 5-5 lines in Fig. 1；
Fig. 6 is a Fig. 1 partial enlarged drawing；
Fig. 7 is a front view of the first embodiment, illustrates two shower nozzles with combining another assembling mode of riser；
Fig. 8 is a Fig. 7 partial enlarged drawing；
Fig. 9 is a front view of the combination riser of the second embodiment of many ejecting devices of the invention；
Figure 10 is a front view of the second embodiment, is illustrated with reference to riser for two shower nozzle assemblings；
Figure 11 is a front view of the second embodiment, is illustrated with reference to riser for two shower nozzle assemblings；
Figure 12 is a front view of three shower nozzles of the second embodiment；
Figure 13 is a front view of the second embodiment, is illustrated with reference to riser for three shower nozzle assemblings；
Figure 14 is a Figure 13 partial enlarged drawing；
Figure 15 is a front view of the second embodiment, is illustrated with reference to riser for three shower nozzle assemblings；
Figure 16 is a Figure 15 partial enlarged drawing；
Figure 17 is a front view of the second embodiment, is illustrated with reference to riser for two shower nozzle assemblings；And
Figure 18 is a front view of the second embodiment, is illustrated with reference to riser for two shower nozzle assemblings.
Embodiment
Below in conjunction with the accompanying drawings and embodiment the present invention is described in detail.
It is the first embodiment of many ejecting devices of the invention refering to Fig. 1, many ejecting devices 200 are mainly applied and partly led
In the processing procedure of body wafer, to clean a substrate 1 for being, for example, wafer.Many ejecting devices 200 include a combined assembly 2, and extremely
Few two shower nozzles 3,3 '.
Refering to Fig. 1 and Fig. 2, combined assembly 2 includes one and combines riser 21, and this combines riser 21 parallel to a vertical direction Z,
This includes multiple spaced binding sites with reference to riser 21, and the binding site is along vertical direction Z coplines.Each
Shower nozzle 3,3 ' be may be selectively incorporated on the two basic change point in the binding site, and each shower nozzle 3,3 ' is removably tied
Together in two binding site.Specifically, each shower nozzle 3,3 ' includes multiple spaced locking points, the locking point
Two of which locking point and the two binding sites aligned in position.The combined assembly 2 also includes multiple locking parts 22, each locking part
22 by the corresponding binding site to be locked in the locking point with the binding site aligned in position.Whereby so that each shower nozzle
3rd, 3 ' it can be fixed on reference to the spray angle position on riser 21 and needed for being positioned at one.
It is different according to the size of substrate 1 in semiconductor crystal wafer processing procedure, needed for the combined assembly 2 can be optionally assembled
The shower nozzle 3,3 ' of quantity, and shower nozzle 3,3 ' optionally can be fixed on to the spray angle position needed for one.Also, shower nozzle 3,3 '
Also the hydro-peening pressure that can arrange in pairs or groups identical or different.Whereby, cleaning speed, efficiency and the cleaning of many ejecting devices 200 can be lifted
Effect.
Specific configuration and occupation mode below for many ejecting devices 200 are described in detail:
Refering to Fig. 1, Fig. 2 and Fig. 3, this combine riser 21 in it is elongated and its grow to along one perpendicular to vertical direction Z water
Square extend to X, this combines riser 21 and includes two upper ends 211 of facade 210,210 ', one being parallel to each other, and one in contrast to upper
The lower end 212 at end 211, the neighbouring upper end 211 of a part in the binding site and another part are adjacent to lower end 212.
Each binding site of the present embodiment is a perforation for running through the facade 210,210 ' for combining riser 21.This combines vertical
Plate 21 define one parallel to vertical direction Z center line L, the binding site have binding site 213 on two first, two second
Upper binding site 214, two first time binding sites 215, and two second time binding sites 216.The binding site on two first, second
213rd, 214 along horizontal direction X is spaced and the neighbouring upper end 211, the binding site 213 on two first, second, 214 points
Not Wei Yu the opposite sides of center line L, and this on two second binding site 214 be respectively separated positioned at the outside of binding site 213 on two first.
Two first, second time binding sites 215,216 along horizontal direction X is spaced and the neighbouring lower end 212, this two first,
Second time binding site 215,216 is located at the opposite sides of center line L respectively, and two second time binding sites 216 is respectively separated to be located at and be somebody's turn to do
Two first time outsides of binding site 215.
Further, this with reference to riser 21 define positioned at center line L the same sides have a connection this on first binding site 213 with
First oblique line L1 of second time binding site 216, and connection binding site 214 and first time binding site 215 on second
Second oblique line L2, first, second oblique line L1, L2 are intersecting and press from both sides an obtuse angle a1 between the two.Wherein, first straight line L1 has
One first length D1, and second oblique line L2 has one second length D2.
More specifically, the vertical range d1 between each first time binding site 215 and center line L is less than each
A vertical range s1 on first between binding site 213 and center line L, between each second time binding site 216 and center line L
A vertical range d2 be more than each vertical range s2 on second between binding site 214 and center line L.
Refering to Fig. 1, Fig. 2 and Fig. 4, the structure of two shower nozzles 3,3 ' is identical, and each shower nozzle 3,3 ' to substrate 1 to spray cleaning fluid
4, to clean or remove, the surface of substrate 1 remained such as the residue of chemical agent.Each shower nozzle 3,3 ' includes one to be resisted against
The surface 31 of facade 210 (as shown in Figure 3), each locking point of the present embodiment is a screw for being formed at surface 31.It is described
Locking point has two along solid point 32,32 ' of locking spaced horizontal direction X, and two alternate along horizontal direction X
It is located at every arrangement and respectively the 2 lower locking point 33,33 ' locked below solid point 32,32 '.In the present embodiment, two shower nozzles
3rd, the two of 3 ' lock solid point 32 and twice locking points 33 in adjoining side, and two lock solid point 32 ' and the points that lock for twice
33 ' positions are in mutually remote side.
Each shower nozzle 3,3 ' defines lock solid point 32 and the lower locking point 33 ' for being connected to one pair of which Angle Position
There is one first length E1, first length E1 to be equal to first length D1 by first diagonal C1, first diagonal C1.Also,
Each shower nozzle 3,3 ' defines lock solid point 32 ' and second diagonal of the lower locking point 33 for being connected to another diagonal position
C2, first, second diagonal C1, C2 are oblique respectively and press from both sides a right angle a2 between the two.Second diagonal C2 has
One second length E2, second length E2 are equal to second length D2.
Each shower nozzle 3,3 ' is optionally by lock solid point 32 and the lower locking of position a pair of Angle Positions wherein
Point 33 ' respectively alignment positioned at center line L the same sides binding site 213 and second time binding site 216 on first, it is or each
Alignment bit is optionally distinguished in position by individual shower nozzle 3,3 ' in the solid point 32 ' of locking of another diagonal position with the lower locking point 33
Binding site 214 and first time binding site 215 on second in center line L the same sides.Whereby, each shower nozzle 3,3 ' can be according to
The one of which of foregoing two kinds of assembling modes is selected to be assembled in reference to riser 21 according to demand.
Refering to Fig. 1, Fig. 2, Fig. 4 and Fig. 5, each shower nozzle 3,3 ' and the one of which combined between riser 21 are assembled
Mode is as follows：First, the surface 31 of the shower nozzle 3 is resisted against the facade 210 with reference to riser 21, due to first, second oblique line
Obtuse angle a1 angles folded by both L1, L2 are more than the right angle a2 angles folded by both first, second diagonal C1, C2 so that
First diagonal C1 slope is more than first oblique line L1 slope before the shower nozzle 3 is not yet assembled, therefore, and the shower nozzle 3 needs rotation
Turn after an appropriate angle lock solid point 32 and the lower locking put 33 ' could align respectively positioned at center line L the same sides this
Binding site 213 and second time binding site 216 on one.Then, the locking part 22 that one is, for example, screw is arranged in this on first
Binding site 213 is simultaneously locked in the solid point 32 of locking with the aligned in position of binding site 213 on first, and by another locking part 22
The lower locking for being arranged in second time binding site 216 and being locked in the aligned in position of second time binding site 216 puts 33 ', i.e.,
The shower nozzle 3 can be locked in this with reference to riser 21.The shower nozzle 3 ' assembling can be fixed on center line L according to foregoing assembling mode
Binding site 213 and the second time binding site 216 on first of opposite side.
Refering to Fig. 1 and Fig. 6, after the assembling of two shower nozzles 3,3 ' is fixed on reference to riser 21, each shower nozzle 3,3 ' is positioned at
One first obliquity as shown in Figure 1.Now, the plates of axis A, A ' respectively with substrate 1 defined in each shower nozzle 3,3 '
Body 11 is tilted, and two shower nozzles 3,3 ' are in being flared out shape and bottom is located remotely from each other.Due to axis A, A of each shower nozzle 3,3 ' '
Angle of inclination can influence the spray angle of cleaning fluid 4, therefore, the spray angle of the cleaning fluid 4 sprayed by two shower nozzles 3,3 '
Difference, can effectively increase cleaning area and spraying swath.Plate of the cleaning fluid 4 sprayed when two shower nozzles 3,3 ' in cleaning base plate 1
When the one of the surface of body 11 is in bumps undulated and uneven line pattern 12, the cleaning fluid 4 sprayed by two shower nozzles 3,3 '
The different design method of spray angle, can form the hydro-peening effect without dead angle, whereby, can effectively remove example on line pattern 12
Such as it is the residue 13 of chemical agent.Also, the hydro-peening pressure that two shower nozzles 3,3 ' also can arrange in pairs or groups identical or different.By two shower nozzles 3,
3 ' design method, can lift the speed, efficiency and cleaning performance of cleaning base plate 1.It should be noted that, the circuit that Fig. 6 is painted
Pattern 12 and residue 13 are schematic diagrames, in order to see its relevant position.
Refering to Fig. 2, Fig. 4, Fig. 7 and Fig. 8, another side of being assembled between each shower nozzle 3,3 ' and combination riser 21
Formula is as follows：First, the surface 31 of the shower nozzle 3 is resisted against the facade 210 (as shown in Figure 5) with reference to riser 21, due to this first,
Obtuse angle a1 angles folded by both second oblique line L1, L2 are more than the right angle a2 angles folded by both first, second diagonal C1, C2
Degree so that second diagonal C2 slope is more than second oblique line L2 slope, therefore, the spray before the shower nozzle 3 is not yet assembled
First 3 need to rotate the solid point 32 ' of locking after an appropriate angle could align positioned at center line L the same sides respectively with the lower locking point 33
Binding site 214 and first time binding site 215 on second.Then, a locking part 22 is arranged in the binding site on second
214 and the solid point 32 ' of locking with the aligned in position of binding site 214 on second is locked in, and another locking part 22 is worn
In first time binding site 215 and be locked in the aligned in position of first time binding site 215 this it is lower locking point 33, you can by this
Shower nozzle 3 is locked in this with reference to riser 21.The shower nozzle 3 ' assembling can be fixed on center line L opposite sides according to foregoing assembling mode
Binding site 214 and first time binding site 215 on second.
After the assembling of two shower nozzles 3,3 ' is fixed on reference to riser 21, it is as shown in Figure 7 that each shower nozzle 3,3 ' is positioned at one
Second obliquity.Now, plate bodys 11 of axis A, the A ' respectively with substrate 1 is tilted defined in each shower nozzle 3,3 ', two shower nozzles
3rd, 3 ' in inwardly shape is folded and bottom is close to each other, whereby so that two shower nozzles 3,3 ' can be with different spray angle cleaning base plates 1
The line pattern 12 on surface.
It should be noted that, the combination of two shower nozzles 3,3 ' is assembled in together by combined assembly 2 by combining riser 21 and locking part 22
The mode of one facade 210 so that two shower nozzles 3,3 ' can compactly it is adjacent together, whereby, many ejecting devices 200 can be reduced along water
Square to the length on X, with the volume for reducing many ejecting devices 200 and its occupied space.Furthermore, by combining riser 21
First, second on the arrangement of binding site 213,214 and first, second time binding site 215,216 lay mode, shower nozzle 3,3 '
Lock solid point 32,32 ' and it is lower locking point 33,33 ' arrangement lay mode, and collocation both cooperate assembling mode,
So that shower nozzle 3,3 ' can be optionally secured to the first obliquity or the second obliquity, whereby, many cartridge nozzles can be increased
200 are put using the applicable occasion of upper elasticity and its institute.
The second embodiment of many ejecting devices of the invention refering to Fig. 9, the overall structures of many ejecting devices 200 substantially with
First embodiment is identical, and difference is in reference to riser 21 '.
Refering to Figure 10 and Figure 11, the combination riser 21 ' of the present embodiment is applicable to for two assemblings of shower nozzle 3,3 ' either
For the assembling of three shower nozzles, wherein, two shower nozzles 3,3 ' shown in Figure 10 are assembled in mode and first embodiment with reference to riser 21 '
Assembling mode disclosed in Fig. 1 is identical, and two shower nozzles 3,3 ' shown in Figure 11 are assembled in reference to the mode of riser 21 ' and first in fact
The assembling mode applied disclosed in Fig. 7 of example is identical, therefore, does not repeat to repeat herein.
Refering to Fig. 9, in the present embodiment, also there are two along horizontal direction X phases with reference to the binding site of riser 21 '
It is spaced and binding site 217 on the 3rd of the neighbouring upper end 211 the, and two spaced and neighbouring along horizontal direction X
The three times binding sites 218 of the lower end 212.This on two the 3rd binding site 217 be respectively separated positioned at the binding site 214 on two second
Outside, and each on the 3rd binding site 217 along the height on vertical direction Z less than each edge of binding site 214 on second
Height on vertical direction Z.Two the three times binding sites 218 are respectively separated positioned at two second time outsides of binding site 216.
Further, with reference to riser 21 ' define positioned at center line L the same sides have a connection this on second binding site 214 with
3rd oblique line L3 of the three times binding sites 218, and the connection binding site 217 on binding site 214 and the 3rd on second
4th oblique line L4.3rd oblique line L3 has one the 3rd length D3, the 3rd oblique line L3 parallel to first oblique line L1, and this
Four oblique line L4 have one the 4th length D4.
Refering to Fig. 9, Figure 12 and Figure 13, many ejecting devices 200 include three shower nozzles, and the structure of three shower nozzles is identical.In order to
It is easy to explanation, the shower nozzle is divided into a middle shower nozzle 3 ", and two outside shower nozzles 3,3 ' respectively.Two of middle shower nozzle 3 "
Solid point 32,32 ' lock respectively to be aligned in binding site 213 on two first that combine riser 21 ', whereby, middle shower nozzle 3 "
Defined axis A " can be perpendicular to substrate 1.First diagonal C1 of each outside shower nozzle 3,3 ' first length
E1 is equal to the 3rd length D3.Also, each outside shower nozzle 3,3 ' has defined one and has been connected to two solid points 32 of locking, 32 ' centers
Connecting line C3, connecting line C3 have one the 3rd length E3, the 3rd length E3 be equal to the 4th length D4.
Each outside shower nozzle 3,3 ' optionally by position a pair of Angle Positions wherein this lock solid point 32 with this
Locking point 33 ' respectively alignment positioned at center line L the same sides binding site 214 and the three times binding sites 218 on second, or
Two solid point 32,32 ' of locking is alignd positioned at the knot on binding site 214 and the 3rd on second of center line L the same sides respectively
Chalaza 217.Whereby, each outside shower nozzle 3,3 ' can select the one of which of foregoing two kinds of assembling modes to be assembled according to demand
With reference to riser 21 '.
Refering to Fig. 9, Figure 12 and Figure 13, each outside shower nozzle 3,3 ' and the one of which combined between riser 21 ' are assembled
Combination is as follows：First, the surface 31 of the outside shower nozzle 3 is resisted against the facade 210 (as shown in Figure 5) with reference to riser 21,
Because the 3rd oblique line L3 is parallel to first oblique line L1 so that first diagonal C1 before the outside shower nozzle 3 is not yet assembled
Slope is more than the 3rd oblique line L3 slope, therefore, and the outside shower nozzle 3 need to rotate lock solid point 32 and this after an appropriate angle
Lower locking point 33 ' could align positioned at binding site 214 and the three times binding sites on second of center line L the same sides respectively
218.Then, after the locking for carrying out locking part 22, you can the outside shower nozzle 3 assembling is fixed on into this with reference to riser 21 '.According to preceding
State assembling mode the outside shower nozzle 3 ' can be assembled be fixed on center line L opposite sides this on second binding site 214 with this
Three times binding sites 218.
Refering to Figure 13 and Figure 14, after three shower nozzles are completed, the middle position of shower nozzle 3 " is in a stand up position, and two outsides
Position is in the first obliquity respectively for shower nozzle 3,3 ', whereby so that middle shower nozzle 3 " and two outside shower nozzles 3,3 ' can be with different sprays
Spill the line pattern 12 on the surface of angle cleaning base plate 1.
Refering to Fig. 9, Figure 12 and Figure 15, another assembling knot between each outside shower nozzle 3,3 ' and combination riser 21 '
Conjunction mode is as follows：First, the surface 31 of the outside shower nozzle 3 is resisted against the facade 210 (as shown in Figure 5) with reference to riser 21, by
On the 3rd binding site 217 along the height on vertical direction Z less than this on second binding site 214 along along vertical direction Z
Height, therefore, the outside shower nozzle 3 need to rotate after an appropriate angle two solid point 32,32 ' of locking and could align respectively positioned at should
The binding site 217 on binding site 214 and the 3rd on second of center line L the same sides.Then, after the locking for carrying out locking part 22,
The outside shower nozzle 3 assembling can be fixed on to this with reference to riser 21 '.Can be by the group of outside shower nozzle 3 ' according to foregoing assembling mode
Dress is fixed on the binding site 217 on binding site 214 and the 3rd on second of center line L opposite sides.
Refering to Figure 15 and Figure 16, after three shower nozzles are completed, the middle position of shower nozzle 3 " is in stand up position, and two outer side sprays
First 3,3 ' positions are in the second obliquity respectively, whereby so that middle shower nozzle 3 " and two outside shower nozzles 3,3 ' can be with different sprinklings
The line pattern 12 on the surface of angle cleaning base plate 1.
Refering to Figure 17, Figure 17 is another implementation aspect of the present embodiment, is applicable to reference to riser 21 ' for an outer side spray
First 3 and middle shower nozzle 3 " assemble.
Refering to Figure 18, Figure 18 is another implementation aspect of the present embodiment, is applicable to reference to riser 21 ' for an outer side spray
First 3 ' and middle shower nozzle 3 " assemble.
Designed by the combination riser 21 ' of the present embodiment, can optionally be assembled the shower nozzle of requirement, whereby,
The elasticity made can further be increased.
Conclude above-mentioned, designed by the combination riser 21,21 ' of the combined assembly 2 of two embodiments so that user can be according to
The number of shower nozzle quantity selects the appropriate combination riser 21,21 ' to use.For example be when the usage quantity of shower nozzle only needs two, can
The combination riser 21 of selection collocation first embodiment is used, so as to reducing the volumes of many ejecting devices 200 and its occupied
Space.For example when the usage quantity of shower nozzle is three, then the combination riser 21 ' of collocation second embodiment may be selected to use.Again
Person, in order to clean various various forms of line patterns 12 on various substrates 1, by the design of combined assembly 2 so that
User can be according to the line pattern 12 for the substrate 1 to be cleaned form, be optionally assembled the shower nozzle of requirement,
And shower nozzle is optionally fixed on the spray angle position needed for one, the spray of the cleaning fluid 4 sprayed by multiple shower nozzles
Spill angle different, can effectively increase cleaning area and spraying swath, and the hydro-peening effect without dead angle can be formed.Also, multiple shower nozzles
The hydro-peening pressure that can arrange in pairs or groups identical or different.Whereby, can effectively remove on line pattern 12 be, for example, chemical agent residual
Thing 13, and cleaning speed, efficiency and cleaning performance can be effectively lifted, the purpose of institute's demand of the present invention can be reached really.
Claims (15)
1. a kind of many ejecting devices；It is characterized in that：
Many ejecting devices include a combined assembly, and at least two shower nozzles, and the combined assembly combines riser including one, the combination
Riser is parallel to a vertical direction, and this includes multiple spaced binding sites with reference to riser, and the binding site is straight along this
Cube to copline, each shower nozzle may be selectively incorporated on the two basic change point in the binding site, and each sprays
Head is detachably combined in two binding site, whereby so that each shower nozzle can be fixed on this with reference to riser and be positioned at an institute
The spray angle position needed.
2. many ejecting devices according to claim 1, it is characterised in that：This combines riser and also includes a facade, the spray
Head is born against in the facade.
3. many ejecting devices according to claim 2, it is characterised in that：Each shower nozzle includes multiple spaced
Lock point, and two of which locking point and the two binding sites aligned in position of the locking point, the combined assembly also include multiple locks
Firmware, each locking part is by the corresponding binding site to be locked in the locking point with the binding site aligned in position.
4. many ejecting devices according to claim 3, it is characterised in that：Each locking point is a screw, each knot
Chalaza is a perforation, and each locking part is a screw.
5. many ejecting devices according to claim 3, it is characterised in that：This is in elongated with reference to riser and it is grown to along one and hung down
The straight horizontal direction in the vertical direction extends, and this combines riser and includes a upper end, and one in contrast to the upper end lower end, it is described
Neighbouring upper end of a part in binding site and another part are adjacent to the lower end.
6. many ejecting devices according to claim 5, it is characterised in that：The binding site has two along the horizontal direction
The upper binding site of the spaced and neighbouring upper end, and two along under the spaced and neighbouring lower end of the horizontal direction
Binding site, each lower binding site is with binding sites on adjacent this in diagonal position, and the locking point has position in diagonal bits
One put, which locks, solid point and once to lock a little, lock solid point and the lower locking point be aligned in respectively on adjacent this binding site with
The lower binding site.
7. many ejecting devices according to claim 6, it is characterised in that：This defines one parallel to the upright side with reference to riser
To center line, the two upper and lower binding site respectively be located at the opposite side of the center line, on each binding site adjacent to the center line and each
Lower binding site is away from the center line, and each shower nozzle is positioned at one first obliquity.
8. many ejecting devices according to claim 6, it is characterised in that：This defines one parallel to the upright side with reference to riser
To center line, the two upper and lower binding site respectively be located at the opposite side of the center line, on each binding site away from the center line each
Lower binding site is adjacent to the center line, and each shower nozzle is positioned at one second obliquity.
9. many ejecting devices according to claim 5, it is characterised in that：This defines one parallel to the upright side with reference to riser
To center line, the binding site has binding site on two first, binding site, two first time binding sites on two second, and
Two second time binding sites, binding site is along the horizontal direction is spaced and the neighbouring upper end on two first, second for this, and this two
Binding site is located at the opposite side of the center line respectively on first, second, and this on two second binding site be respectively separated positioned at this two first
On the outside of upper binding site, two first, second time binding sites is spaced and adjacent to the lower end along the horizontal direction, and this two the
First, second time binding site is located at the opposite side of the center line respectively, and two second time binding sites is respectively separated positioned at this under two first
On the outside of binding site, this combine riser define positioned at the center line the same side have a connection this on first binding site combined with this second time
First oblique line of point, and the connection binding site and first time binding site on second the second oblique line, first, second oblique line
Intersect and press from both sides an obtuse angle between the two, the locking point has two along the spaced solid point of locking of the horizontal direction, and
Two spaced and be located at the 2 lower locking point locked below solid point respectively along the horizontal direction, and each shower nozzle is defined
There is lock solid point and first diagonal of the lower locking point for being connected to one pair of which Angle Position, and one is connected to another pair
Lock solid point and second diagonal of the lower locking point of Angle Position, first, second diagonal are oblique respectively and two
A right angle is pressed from both sides between person, first catercorner length be equal to the first oblique line length, second catercorner length be equal to this second
Oblique line length.
10. many ejecting devices according to claim 9, it is characterised in that：Each first time binding site and the center line it
Between a vertical range be less than each vertical range on first between binding site and the center line, combine for each second time
A vertical range between point and the center line is more than each vertical range on second between binding site and the center line.
11. many ejecting devices according to claim 9 or 10, it is characterised in that：Each shower nozzle is optionally by position
Lock solid point and the lower locking point of a pair of Angle Positions wherein align respectively to be tied on first positioned at this of the center line the same side
Chalaza and second time binding site, to be positioned at one first obliquity, or each shower nozzle optionally by position another
Lock solid point and the lower locking point of a pair of Angle Positions align respectively positioned at the center line the same side this on second binding site with
First time binding site, to be positioned at one second obliquity.
12. many ejecting devices according to claim 10, it is characterised in that：The binding site also has two along the level
Direction it is spaced and the neighbouring upper end the 3rd on binding site, and two along the horizontal direction it is spaced and it is neighbouring should
The three times binding sites of lower end, this on two the 3rd binding site be respectively separated positioned at this on two second on the outside of binding site, and each
Less than each, binding site, should along the height on the vertical direction on second along the height on the vertical direction for binding site on 3rd
Two the three times binding sites are respectively separated on the outside of two second time binding sites, and this is defined positioned at the center line the same side with reference to riser
Have the 3rd oblique line of the connection binding site and the three time binding sites on second, and a connection this on second binding site and this
4th oblique line of binding site on three, the 3rd oblique line is parallel to first oblique line, and it is oblique that first catercorner length is equal to the 3rd
Line length, each shower nozzle defines a connecting line for being connected to two solid points of locking, and the connection line length is equal to the 4th
Oblique line length.
13. many ejecting devices according to claim 12, it is characterised in that：Each shower nozzle is optionally by position at it
In lock solid point and the lower locking point of a pair of Angle Positions align respectively positioned at the binding site on second of the center line the same side
With the three times binding sites, to be positioned at one first obliquity, or each shower nozzle optionally locks this on two
Alignment, positioned at the binding site on binding site and the 3rd on second of the center line the same side, is tilted point with being positioned at one second respectively
Position.
14. many ejecting devices according to claim 12, it is characterised in that：Many ejecting devices include three shower nozzles, institute
It is respectively a middle shower nozzle and two outside shower nozzles to state shower nozzle, the middle shower nozzle this two lock solid point be aligned in respectively this two the
Binding site on one, solid point and the lower locking point alignment bit respectively of locking of each outside shower nozzle position a pair of Angle Position wherein
Binding site and the three time binding sites on second in the center line the same side, each outside shower nozzle are positioned at one first and tilted
Position.
15. many ejecting devices according to claim 12, it is characterised in that：Many ejecting devices include three shower nozzles, institute
It is respectively a middle shower nozzle and two outside shower nozzles to state shower nozzle, the middle shower nozzle this two lock solid point be aligned in respectively this two the
Align and combined positioned at this of the center line the same side on second respectively in binding site on one, two solid point of locking of each outside shower nozzle
Binding site on point and the 3rd, each outside shower nozzle is positioned at one second obliquity.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW105107491 | 2016-03-11 | ||
| TW105107491A TWI584882B (en) | 2016-03-11 | 2016-03-11 | Multi-nozzle device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107175175A true CN107175175A (en) | 2017-09-19 |
| CN107175175B CN107175175B (en) | 2019-11-26 |
Family
ID=59687884
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610891687.1A Active CN107175175B (en) | 2016-03-11 | 2016-10-13 | multi-nozzle device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN107175175B (en) |
| TW (1) | TWI584882B (en) |
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| JP2000232058A (en) * | 1999-02-10 | 2000-08-22 | Tokyo Electron Ltd | Developing method and nozzle device |
| CN101726187A (en) * | 2010-01-21 | 2010-06-09 | 孙小平 | Single preheating, sintering, igniting and heat insulating furnace |
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| TWM482444U (en) * | 2014-01-15 | 2014-07-21 | Els System Technology Co Ltd | Fluid nozzle and fluid nozzle apparatus |
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| TW201524611A (en) * | 2013-12-26 | 2015-07-01 | Els System Technology Co Ltd | Multiple nozzle device |
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|---|---|---|---|---|
| JP4986566B2 (en) * | 2005-10-14 | 2012-07-25 | 大日本スクリーン製造株式会社 | Substrate processing method and substrate processing apparatus |
| TWI421135B (en) * | 2011-04-28 | 2014-01-01 | China Steel Corp | Precise positioning method and auxiliary device of welding nozzle |
| TWI462148B (en) * | 2013-07-10 | 2014-11-21 | Fluid nozzle and fluid nozzle device | |
| CN204466711U (en) * | 2015-03-13 | 2015-07-15 | 张文 | The boom structure that a kind of spraying range is adjustable |
| TWM524993U (en) * | 2016-03-11 | 2016-07-01 | Els System Technology Co Ltd | Apparatus with multiple blow-heads |
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- 2016-03-11 TW TW105107491A patent/TWI584882B/en active
- 2016-10-13 CN CN201610891687.1A patent/CN107175175B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000232058A (en) * | 1999-02-10 | 2000-08-22 | Tokyo Electron Ltd | Developing method and nozzle device |
| CN101726187A (en) * | 2010-01-21 | 2010-06-09 | 孙小平 | Single preheating, sintering, igniting and heat insulating furnace |
| CN104080543A (en) * | 2011-09-12 | 2014-10-01 | 依工玳纳特有限公司 | Rotary module |
| CN103628150A (en) * | 2013-12-05 | 2014-03-12 | 厦门大学 | Multi-spray-head electrostatic spinning device |
| TW201524611A (en) * | 2013-12-26 | 2015-07-01 | Els System Technology Co Ltd | Multiple nozzle device |
| TWM482444U (en) * | 2014-01-15 | 2014-07-21 | Els System Technology Co Ltd | Fluid nozzle and fluid nozzle apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107175175B (en) | 2019-11-26 |
| TWI584882B (en) | 2017-06-01 |
| TW201731593A (en) | 2017-09-16 |
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