CN107170002B - Automatic image focusing method and device - Google Patents
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Abstract
The invention relates to the technical field of image acquisition, in particular to an automatic image focusing method and automatic image focusing equipment. The method comprises the following steps: obtaining a first image, and obtaining a first target image according to the first image; obtaining a first salient region image according to the first target image; obtaining a minimum circumscribed rectangular area of the first salient area image; determining the minimum circumscribed rectangular area as a focusing window area, wherein the focusing window area comprises a second image; obtaining a second target image according to the second image, and obtaining a focusing evaluation function value of the second target image according to the pixel gray value and the pixel gray average value; and obtaining a third target image according to the extreme value of the focusing evaluation function. By the technical scheme, the technical problems of long scanning and collecting time and low focusing sensitivity of the conventional image focusing technology are solved, and the SEM focusing method has the technical effect of enabling the SEM to be focused quickly and precisely.
Description
Technical Field
The invention relates to the technical field of image acquisition, in particular to an automatic image focusing method and automatic image focusing equipment.
Background
As the feature size of the lsi becomes smaller, a Scanning Electron Microscope (SEM) plays an increasingly important role in the lsi inspection apparatus. There are many factors that cause the focus state of the system to change when the SEM is in operation, thereby degrading SEM image quality. In order to improve the working efficiency of SEM and obtain clear SEM images quickly, the SEM must have a quick and precise auto-focusing function. The SEM equipment is used for scanning imaging, the longer the scanning time is, the more electrons are received by each pixel element, the higher the signal-to-noise ratio of the image is, and the longer the acquisition time of the corresponding image is.
The person skilled in the art finds the following problems in the prior art during routine work:
the existing focusing technology has certain requirements on the quality of images, correspondingly needs more scanning and collecting time of an SEM, reduces the focusing sensitivity, and is not suitable for real-time focusing occasions.
Disclosure of Invention
The embodiment of the application provides an automatic image focusing method and equipment, solves the technical problems of long scanning and collecting time and low focusing sensitivity of the existing image focusing technology, and has the technical effect of enabling an SEM to be focused quickly and precisely.
The embodiment of the application provides an automatic image focusing method, which comprises the following steps: obtaining a first image, wherein the first image comprises a background image and a noise image; obtaining a first target image according to the first image, wherein the first target image is an image obtained by filtering the background image and the noise image from the first image; obtaining a first salient region image according to the first target image; wherein the first salient region image is a salient region image of the first target image; obtaining a minimum circumscribed rectangular area of the first salient area image; determining the minimum circumscribed rectangular area as a focusing window area, wherein the focusing window area comprises a second image; obtaining a second target image according to the second image, wherein the second target image is an image of the second image after smoothing processing; obtaining the pixel gray value h of the second target image in the focusing window arealv(m, n); obtaining the average value of the pixel gray scale of the second target image in the focusing window area
Obtaining a value of a focus evaluation function of the second target image according to the pixel gray value and the pixel gray average value, wherein the focus evaluation function
Obtaining an extreme value of the focusing evaluation function; and obtaining a third target image according to the extreme value, wherein the third target image is a final focusing image.
Further, the obtaining a first target image from the first image comprises obtaining an average pixel value of the first image; obtaining the first image processed by the band-pass filter; obtaining a pixel value of each point of the processed first image; obtaining a significant value of the processed first image, wherein the significant value refers to a Euclidean distance between a pixel value of each point of the processed first image and an average pixel value of the first image; and obtaining the first target image according to the significant value of the processed first image, wherein the significant value of the processed first image can be converted into a gray image, and the first target image is a part of the gray image.
Further, the obtaining of the minimum circumscribed rectangular region of the first significant region image specifically includes: and obtaining the minimum circumscribed rectangular area of the first salient area image according to a convex hull method.
Further, the obtaining the second target image from the second image comprises obtaining the second target image from L og operator and the second image, wherein the formula of L og operator is
Wherein f (m, n) represents the second image, h (m, n) represents the second target image, g (m, n) represents a Gaussian filter,
representing the laplacian operator.
An embodiment of the present application provides an image auto-focusing apparatus, including: a processor adapted to implement instructions; a storage device adapted to store a plurality of instructions, the instructions adapted to be loaded and executed by a processor; obtaining a first image, wherein the first image comprises a background image and a noise image; obtaining a first target image according to the first image, wherein the first target image is an image obtained by filtering the background image and the noise image from the first image; obtaining a first salient region image according to the first target image; wherein, the firstA salient region image is a salient region image of the first target image; obtaining a minimum circumscribed rectangular area of the first salient area image; determining the minimum circumscribed rectangular area as a focusing window area, wherein the focusing window area comprises a second image; obtaining a second target image according to the second image, wherein the second target image is an image of the second image after smoothing processing; obtaining the pixel gray value h of the second target image in the focusing window arealv(m, n); obtaining the average value of the pixel gray scale of the second target image in the focusing window area
Obtaining a value of a focus evaluation function of the second target image according to the pixel gray value and the pixel gray average value, wherein the focus evaluation function
Obtaining an extreme value of the focusing evaluation function; and obtaining a third target image according to the extreme value, wherein the third target image is a final focusing image.
Further, the apparatus further comprises: obtaining an average pixel value of the first image; obtaining the first image processed by the band-pass filter; obtaining a pixel value of each point of the processed first image; obtaining a significant value of the processed first image, wherein the significant value refers to a Euclidean distance between a pixel value of each point of the processed first image and an average pixel value of the first image; and obtaining the first target image according to the significant value of the processed first image, wherein the significant value of the processed first image can be converted into a gray image, and the first target image is a part of the gray image.
Further, the apparatus further comprises: and obtaining the minimum circumscribed rectangular area of the first salient area image according to a convex hull method.
Further, the apparatus comprises a function according to L og operator andthe second image obtains the second target image, wherein the L og operator has the formula of
Wherein f (m, n) represents the second image, h (m, n) represents the second target image, g (m, n) represents a Gaussian filter,
representing the laplacian operator.
One or more technical solutions in the embodiments of the present application have at least one or more of the following technical effects:
1. the embodiment of the application provides an automatic image focusing method and automatic image focusing equipment. The method comprises the following steps: obtaining a first image, wherein the first image comprises a background image and a noise image; obtaining a first target image according to the first image, wherein the first target image is an image obtained by filtering the background image and the noise image from the first image; obtaining a first salient region image according to the first target image; wherein the first salient region image is a salient region image of the first target image; obtaining a minimum circumscribed rectangular area of the first salient area image; determining the minimum circumscribed rectangular area as a focusing window area, wherein the focusing window area comprises a second image; obtaining a second target image according to the second image, wherein the second target image is an image of the second image after smoothing processing; obtaining the pixel gray value h of the second target image in the focusing window arealv(m, n); obtaining the average value of the pixel gray scale of the second target image in the focusing window area
Obtaining a value of a focus evaluation function of the second target image according to the pixel gray value and the pixel gray average value, wherein the focus evaluation function
Obtaining an extreme value of the focusing evaluation function; and obtaining a third target image according to the extreme value, wherein the third target image is a final focusing image. By the technical scheme, the technical problems of long scanning and collecting time and low focusing sensitivity of the conventional image focusing technology are solved, the background image and noise are effectively filtered, the calculated amount is reduced, the application range and the working efficiency of the SEM automatic focusing technology are increased, and the technical effect of rapid and precise focusing of the SEM is realized.
Drawings
Fig. 1 is a flowchart of an image auto-focusing method according to an embodiment of the present disclosure;
fig. 2 is a flowchart of a method for obtaining a salient image according to an embodiment of the present disclosure.
Detailed Description
The embodiment of the application provides an image automatic focusing method and equipment, solves the technical problems of long scanning and collecting time and low focusing sensitivity of the existing image focusing technology, and has the advantages of effectively filtering background images and noises and reducing calculated amount, thereby increasing the application range and working efficiency of the SEM automatic focusing technology and realizing the technical effect of SEM rapid and precise focusing.
In order to solve the technical problems, the general idea of the embodiment of the application is as follows:
the embodiment of the application provides an automatic image focusing method and device. The method comprises the following steps: obtaining a first image, wherein the first image comprises a background image and a noise image; obtaining a first target image according to the first image, wherein the first target image is an image obtained by filtering the background image and the noise image from the first image; obtaining a first salient region image according to the first target image; wherein the first salient region image is a salient region image of the first target image; obtaining a minimum circumscribed rectangular area of the first salient area image; determining the minimum circumscribed rectangular area as a focusing window area, wherein the focusing window area comprises a second image; according toObtaining a second target image by the second image, wherein the second target image is an image of the second image after smoothing processing; obtaining the pixel gray value h of the second target image in the focusing window arealv(m, n); obtaining the average value of the pixel gray scale of the second target image in the focusing window area
Obtaining a value of a focus evaluation function of the second target image according to the pixel gray value and the pixel gray average value, wherein the focus evaluation function
Obtaining an extreme value of the focusing evaluation function; and obtaining a third target image according to the extreme value, wherein the third target image is a final focusing image. By the technical scheme, the technical problems of long scanning and collecting time and low focusing sensitivity of the conventional image focusing technology are solved, the background image and noise are effectively filtered, the calculated amount is reduced, the application range and the working efficiency of the SEM automatic focusing technology are increased, and the technical effect of rapid and precise focusing of the SEM is realized.
The technical solutions of the present invention are described in detail below with reference to the drawings and specific embodiments, and it should be understood that the specific features in the embodiments and examples of the present invention are described in detail in the technical solutions of the present application, and are not limited to the technical solutions of the present application, and the technical features in the embodiments and examples of the present application may be combined with each other without conflict.
The term "and/or" herein is merely an association describing an associated object, meaning that three relationships may exist, e.g., a and/or B, may mean: a exists alone, A and B exist simultaneously, and B exists alone. In addition, the character "/" herein generally indicates that the former and latter related objects are in an "or" relationship.
Example 1:
fig. 1 is a flowchart of an image auto-focusing method according to an embodiment of the present disclosure.
The method comprises the following steps:
step 101: obtaining a first image, wherein the first image comprises a background image and a noise image;
specifically, the first image refers to an initial image scanned by a scanning electron microscope SEM when acquiring an image, and the initial image of the SEM includes image information to be acquired, a background pattern, and noise. The background image is a background pattern, and the noise image is noise in the first image. The background pattern and the noise image may cause a long focusing time when the image is collected, and reduce the focusing sensitivity.
Step 102: obtaining a first target image according to the first image, wherein the first target image is an image obtained by filtering the background image and the noise image from the first image;
specifically, since the background image and the noise image included in the first image cause a focusing time when an image is captured to become long, the focusing sensitivity is reduced. Therefore, in this step, the background pattern and the noise in the first image are filtered out, and the first target image is obtained, where the first target image is an SEM significant image. The background graph and the noise are filtered, so that the influence of the background graph and the noise on the focusing technology can be reduced, the image quality requirement of the focusing technology is reduced, and the image acquisition time is reduced.
Step 103: obtaining a first salient region image according to the first target image; wherein the first salient region image is a salient region image of the first target image;
specifically, the first target image is a salient image, a threshold of a gray level is set, a salient region is extracted from a region in the threshold range, that is, the salient region image, that is, the first salient region image is obtained, wherein the threshold can be set by a user according to requirements.
Step 104: obtaining a minimum circumscribed rectangular area of the first salient area image;
and obtaining a minimum circumscribed rectangle of the first salient region image according to a convex hull method, wherein the maximum region included by the minimum circumscribed rectangle is the minimum circumscribed rectangle region.
Step 105: determining the minimum circumscribed rectangular area as a focusing window area, wherein the focusing window area comprises a second image;
and determining the minimum circumscribed rectangular area as the focusing window area, wherein the scanning electron microscope can automatically extract an image in the focusing window area, and the image with the area of M × N is intercepted from the image extracted in the focusing window area, namely the second image.
Step 106: and obtaining a second target image according to the second image, wherein the second target image is the smoothed image of the second image.
And removing the background image and the noise image to obtain a significant image and extracting a significant area. And the second image extracted in the focusing window region still has some isolated noise points, and the second target image is obtained after the second image is subjected to smoothing processing.
Further, smoothing the second image by using L og operator to obtain the second target image, wherein the formula of L og operator is
Wherein f (m, n) represents the second image, h (m, n) represents the second target image, g (m, n) represents a Gaussian filter,
the second image is processed by using L og operator, so that the noise image can be effectively filtered.
Step 107: obtaining the pixel gray value h of the second target image in the focusing window arealv(m,n)；
Specifically, this step calculates and obtains the pixel gray-scale value h of the second target image in the focusing window regionlv(m,n)。
Step 108: obtaining the average value of the pixel gray scale of the second target image in the focusing window area
Specifically, this step calculates and obtains an average value of image pixel gradations of the second target image within the focusing window region according to an average value calculation method
Taking the size of the focusing window area as X × Y as an example, the average value of the pixel grayscales of the second target image is:
step 109: obtaining a value of a focus evaluation function of the second target image according to the pixel gray value and the pixel gray average value, wherein the focus evaluation function
And calculating to obtain the value of the focusing evaluation function according to the formula of the focusing evaluation function, wherein the larger the value of the focusing evaluation function is, the clearer the finally obtained SEM image is, and the better the focusing state of the current SEM is.
Step 110: obtaining an extreme value of the focusing evaluation function;
in particular, the magnitude of the value of the focus evaluation function reflects the sharpness of the in-focus image, and therefore, steps 101 to 109 are repeated to obtain a series of out-of-focus images, and from the images in the focus window area, the value of the corresponding focus evaluation function is calculated and obtained for each image, the values of the focus evaluation functions for the different images describing the sharpness of the image. And obtaining an extreme point of the focusing evaluation function value according to the value of the focusing evaluation function of each image, wherein the image corresponding to the extreme point is the clearest image, and the focusing process is completed.
Step 111: and obtaining a third target image according to the extreme value, wherein the third target image is a final focusing image.
As stated in step 110, the image corresponding to the extreme point is the clearest image, i.e., the third target image, i.e., the final focused image obtained after the focusing process is completed.
As shown in fig. 2, an embodiment of the present application further provides a flowchart of a method for obtaining a salient image, where the method includes:
step 201: obtaining an average pixel value of the first image;
specifically, the first image refers to an initial image scanned by a scanning electron microscope SEM when acquiring an image, and an average pixel value of the initial image is calculated and obtained.
Step 202: obtaining the first image processed by the band-pass filter;
specifically, after the first image is processed by using a plurality of bandpass filters with gaussian differential combination, the processed first image is obtained.
Step 203: obtaining a pixel value of each point of the processed first image;
specifically, after the processed first image is obtained, the pixel value of each point of the processed first image is calculated and obtained.
Step 204: obtaining a significant value of the processed first image, wherein the significant value refers to a Euclidean distance between a pixel value of each point of the processed first image and an average pixel value of the first image;
specifically, this step obtains the saliency value of the processed first image. And calculating and obtaining the Euclidean distance between the pixel value of each point of the processed first image and the average pixel value of the first image, wherein the Euclidean distance is the significant value of the processed first image.
Step 205: and obtaining the first target image according to the significant value of the processed first image, wherein the significant value of the processed first image can be converted into a gray image, and the first target image is a part of the gray image.
Specifically, the salient value of the processed first image is converted into a gray image, and a salient value part in a set range is extracted from the gray image to serve as a salient image, namely the first target image, wherein the set range of the salient value can be set in a self-defined manner according to requirements.
An embodiment of the present application provides an image auto-focusing apparatus, including: a processor adapted to implement instructions; a storage device adapted to store a plurality of instructions, the instructions adapted to be loaded and executed by a processor; obtaining a first image, wherein the first image comprises a background image and a noise image; obtaining a first target image according to the first image, wherein the first target image is an image obtained by filtering the background image and the noise image from the first image; obtaining a first salient region image according to the first target image; wherein the first salient region image is a salient region image of the first target image; obtaining a minimum circumscribed rectangular area of the first salient area image; determining the minimum circumscribed rectangular area as a focusing window area, wherein the focusing window area comprises a second image; obtaining a second target image according to the second image, wherein the second target image is an image of the second image after smoothing processing; obtaining the pixel gray value h of the second target image in the focusing window arealv(m, n); obtaining the average value of the pixel gray scale of the second target image in the focusing window area
Obtaining a value of a focus evaluation function of the second target image according to the pixel gray value and the pixel gray average value, wherein the focus evaluation function
Obtaining an extreme value of the focusing evaluation function; and obtaining a third target image according to the extreme value, wherein the third target image is a final focusing image.
Further, the apparatus further comprises: obtaining an average pixel value of the first image; obtaining the first image processed by the band-pass filter; obtaining a pixel value of each point of the processed first image; obtaining a significant value of the processed first image, wherein the significant value refers to a Euclidean distance between a pixel value of each point of the processed first image and an average pixel value of the first image; and obtaining the first target image according to the significant value of the processed first image, wherein the significant value of the processed first image can be converted into a gray image, and the first target image is a part of the gray image.
Further, the apparatus further comprises: and obtaining the minimum circumscribed rectangular area of the first salient area image according to a convex hull method.
Further, the device comprises a step of obtaining the second target image according to L og operator and the second image, wherein the formula of L og operator is
Wherein f (m, n) represents the second image, h (m, n) represents the second target image, g (m, n) represents a Gaussian filter,
representing the laplacian operator.
The image automatic focusing method and the image automatic focusing equipment in the embodiment of the application have at least the following technical effects:
1. the embodiment of the application provides an automatic image focusing method and automatic image focusing equipment. The method comprises the following steps: obtaining a first image, wherein the first image comprises a background image and a noise image; obtaining a first target image according to the first image, wherein the first target image is obtained by filtering the background image and the noise from the first imageAn image obtained after the acoustic image; obtaining a first salient region image according to the first target image; wherein the first salient region image is a salient region image of the first target image; obtaining a minimum circumscribed rectangular area of the first salient area image; determining the minimum circumscribed rectangular area as a focusing window area, wherein the focusing window area comprises a second image; obtaining a second target image according to the second image, wherein the second target image is an image of the second image after smoothing processing; obtaining the pixel gray value h of the second target image in the focusing window arealv(m, n); obtaining the average value of the pixel gray scale of the second target image in the focusing window area
Obtaining a value of a focus evaluation function of the second target image according to the pixel gray value and the pixel gray average value, wherein the focus evaluation function
Obtaining an extreme value of the focusing evaluation function; and obtaining a third target image according to the extreme value, wherein the third target image is a final focusing image. By the technical scheme, the technical problems of long scanning and collecting time and low focusing sensitivity of the conventional image focusing technology are solved, the background image and noise are effectively filtered, the calculated amount is reduced, the application range and the working efficiency of the SEM automatic focusing technology are increased, and the technical effect of rapid and precise focusing of the SEM is realized.
While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including preferred embodiments and all such alterations and modifications as fall within the scope of the invention.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (8)
1. A method of image auto-focus, the method comprising:
obtaining a first image, wherein the first image comprises a background image and a noise image;
obtaining a first target image according to the first image, wherein the first target image is an image obtained by filtering the background image and the noise image from the first image;
obtaining a first salient region image according to the first target image; wherein the first salient region image is a salient region image of the first target image;
obtaining a minimum circumscribed rectangular area of the first salient area image;
determining the minimum circumscribed rectangular area as a focusing window area, wherein the focusing window area comprises a second image;
obtaining a second target image according to the second image, wherein the second target image is an image of the second image after smoothing processing;
obtaining the pixel gray value of the second target image in the focusing window area
；
Obtaining the average value of the pixel gray scale of the second target image in the focusing window area
；
Obtaining a value of a focus evaluation function of the second target image according to the pixel gray value and the pixel gray average value, wherein the focus evaluation function
；
The second image is an image with an intercepted image area of M × N extracted from the focusing window region, M is the maximum value of the abscissa of the second image, N is the maximum value of the ordinate of the second image, M is the abscissa of any point position in the second image, and N is the ordinate of any point position in the second image;
obtaining an extreme value of the focusing evaluation function;
and obtaining a third target image according to the extreme value, wherein the third target image is a final focusing image.
2. The method of claim 1, wherein said obtaining a first target image from said first image comprises:
obtaining an average pixel value of the first image;
obtaining the first image processed by the band-pass filter;
obtaining a pixel value of each point of the processed first image;
obtaining a significant value of the processed first image, wherein the significant value refers to a Euclidean distance between a pixel value of each point of the processed first image and an average pixel value of the first image;
and obtaining the first target image according to the significant value of the processed first image, wherein the significant value of the processed first image can be converted into a gray image, and the first target image is a part of the gray image.
3. The method according to claim 1, wherein the obtaining of the minimum bounding rectangle region of the first salient region image is specifically:
and obtaining the minimum circumscribed rectangular area of the first salient area image according to a convex hull method.
4. The method of claim 1, wherein said obtaining the second target image from the second image comprises:
obtaining the second target image according to L og operator and the second image;
wherein the L og operator has the formula of
(ii) a Wherein, the
Representing the second image or images of the second image,
representing the second target image in question,
which is representative of a gaussian filter, is,
，
representing the laplacian operator.
5. An image auto-focusing apparatus, characterized in that the apparatus comprises:
a processor adapted to implement instructions;
a storage device adapted to store a plurality of instructions, the instructions adapted to be loaded and executed by a processor;
obtaining a first image, wherein the first image comprises a background image and a noise image;
obtaining a first target image according to the first image, wherein the first target image is an image obtained by filtering the background image and the noise image from the first image;
obtaining a first salient region image according to the first target image; wherein the first salient region image is a salient region image of the first target image;
obtaining a minimum circumscribed rectangular area of the first salient area image;
determining the minimum circumscribed rectangular area as a focusing window area, wherein the focusing window area comprises a second image;
obtaining a second target image according to the second image, wherein the second target image is an image of the second image after smoothing processing;
obtaining the pixel gray value of the second target image in the focusing window area
；
Obtaining the average value of the pixel gray scale of the second target image in the focusing window area
；
Obtaining a value of a focus evaluation function of the second target image according to the pixel gray value and the pixel gray average value, wherein the focus evaluation function
；
The second image is an image with an intercepted image area of M × N extracted from the focusing window region, M is the maximum value of the abscissa of the second image, N is the maximum value of the ordinate of the second image, M is the abscissa of any point position in the second image, and N is the ordinate of any point position in the second image;
obtaining an extreme value of the focusing evaluation function;
and obtaining a third target image according to the extreme value, wherein the third target image is a final focusing image.
6. The apparatus of claim 5, wherein the apparatus further comprises:
obtaining an average pixel value of the first image;
obtaining the first image processed by the band-pass filter;
obtaining a pixel value of each point of the processed first image;
obtaining a significant value of the processed first image, wherein the significant value refers to a Euclidean distance between a pixel value of each point of the processed first image and an average pixel value of the first image;
and obtaining the first target image according to the significant value of the processed first image, wherein the significant value of the processed first image can be converted into a gray image, and the first target image is a part of the gray image.
7. The apparatus of claim 5, wherein the apparatus further comprises:
and obtaining the minimum circumscribed rectangular area of the first salient area image according to a convex hull method.
8. The apparatus of claim 5, wherein the apparatus further comprises:
obtaining the second target image according to L og operator and the second image;
wherein the L og operator has the formula of
Wherein, the
Representing the second image or images of the second image,
representing the second target image in question,
which is representative of a gaussian filter, is,
，
representing the laplacian operator.
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| CN110531484B (en) * | 2019-07-24 | 2021-04-20 | 中国地质大学（武汉） | Microscope automatic focusing method with settable focusing process model |
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