CN107147326A - A kind of friction nanometer power generator based on niobic acid lithium material and preparation method thereof - Google Patents
A kind of friction nanometer power generator based on niobic acid lithium material and preparation method thereof Download PDFInfo
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- CN107147326A CN107147326A CN201710583316.1A CN201710583316A CN107147326A CN 107147326 A CN107147326 A CN 107147326A CN 201710583316 A CN201710583316 A CN 201710583316A CN 107147326 A CN107147326 A CN 107147326A
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/04—Friction generators
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Abstract
The invention discloses a kind of friction nanometer power generator based on niobic acid lithium material and preparation method thereof.The friction nanometer power generator includes the positive polarity frictional layer being made up of the first friction material, the negative polarity frictional layer being made up of the second friction material, first electrode, second electrode.Wherein, first friction material is niobic acid lithium material, and is in contact with first electrode；Second friction material is flexible macromolecule polymer, is in contact with second electrode.Contacted or separately positioned between first friction material and the second friction material, when there is alternation external force to act on the friction nanometer power generator, first friction material can come in contact/separate with the second friction material or relative slip, make to produce ac signal between first electrode and second electrode.Simple in construction, output voltage stabilization of the invention, novel anode frottage layer niobic acid lithium material used will widen the application field of friction nanometer power generator.
Description
Technical field
The invention belongs to new energy development and technical field of power generation, and in particular to a kind of friction based on niobic acid lithium material is received
Rice generator and preparation method thereof.
Background technology
With environmental pollution and the continuous aggravation of energy crisis, development green energy resource becomes more and extremely more urgent.Machinery
Can be very universal in our daily lifes, being translated into electric energy turns into an important channel of alleviating energy crisis.
Friction nanometer power generator can collect the mechanical energy of diversified forms, such as vibrational energy, biological energy source etc..Its work is former
Manage the coupling based on triboelectrification and electrostatic induction.When two kinds there is the electropolar material of differentiated friction constantly to contact with each other separation
Or during relative slip, will continue to produce alternating current in external circuit.Friction nanometer power generator is with low cost due to its, makes letter
Single, the advantages of energy conversion efficiency is high is more and more interested to researchers.
But, the friction material of friction nanometer power generator is relatively fixed in the prior art, mostly metal and polyphosphazene polymer
Compound, such as aluminium, copper, dimethyl silicone polymer (PDMS), polytetrafluoroethylene (PTFE) (PTFE), polyethylene terephthalate (PET)
Deng the research emphasis of friction nanometer power generator is also concentrated mainly on pure flexible friction material and new structure.Above-mentioned friction
Material makes the application of friction nanometer power generator be limited in single triboelectricity field, it is difficult to be intersected with other field
With reference to so inherently long term growth of limitation friction nanometer power generator.Niobic acid lithium material has excellent piezo-electric effect, electric light
Effect, acoustooptical effect, nonlinear effect and photorefractive effect, friction nanometer power generator of the development based on niobic acid lithium material is for opening
Hair composite nano generator and novel high-sensitivity sensor have huge application potential.
The content of the invention
It is existing to solve it is an object of the invention to provide a kind of friction nanometer power generator based on niobic acid lithium material
The problem of friction material of friction nanometer power generator is with respect to unification.Designed friction nanometer power generator is simple in construction, output
Voltage stabilization.
According to the first aspect of the present invention there is provided a kind of friction nanometer power generator based on niobic acid lithium material, it include by
First friction material composition positive polarity frictional layer, the negative polarity frictional layer being made up of the second friction material, first electrode, second
Electrode；Wherein, first friction material is in contact with first electrode, and second friction material is in contact with second electrode,
Contact or separately positioned, received when there is alternation external force to act on the friction between first friction material and the second friction material
During rice generator, the first friction material can come in contact/separate with the second friction material or relative slip, make first electrode and the
Ac signal is produced between two electrodes；First friction material is niobic acid lithium material.
Further, described niobic acid lithium material can be congruent lithium niobate or doped lithium columbate, such as mix iron
Lithium niobate, mg-doped lithium niobate etc..Described niobic acid lithium material can be that lithium niobate monocrystal thin slice or polycrystalline lithium niobate are thin
Film.Second friction material is flexible macromolecule polymer.
Further, the first electrode corresponding to the lithium niobate monocrystal thin slice is metal electrode, corresponding to the niobic acid
The first electrode of lithium polycrystal film is highly doped silicon electrode.The second electrode is metal electrode.The flexible macromolecule polymer
For dimethyl silicone polymer (PDMS).
Further, micro-structural is modified with described polymer dimethyl silicone polymer surface, microstructure size is 5-
10 microns, depth is 10-15 microns.
According to the second aspect of the present invention, there is provided a kind of preparation for preparing the friction nanometer power generator based on niobic acid lithium material
Method, it is as follows that it includes step：
Step 1, prepare lithium niobate monocrystal thin slice and bonded with metal electrode or prepare niobic acid in highly doped silicon base
Lithium polycrystal film；
Step 2, prepare dimethyl silicone polymer (PDMS) and modify micro-structural in its friction surface；
Step 3, the one side and sheet metal of the dimethyl silicone polymer (PDMS) unmodified micro-structural are bonded；
Step 4, copper conductor is drawn on metal electrode and highly doped silicon electrode respectively；
Step 5, niobic acid lithium material with electrode will be prepared in step 1 and will be prepared in step 3 with electrode
Dimethyl silicone polymer (PDMS) is separately fixed at and can produced on the device of relative movement, the niobic acid lithium material with electrode
The surface for having micro-structural with the PDMS is in opposite position；
Step 6, when can produce the device work of relative movement, niobic acid lithium material and dimethyl silicone polymer is driven to connect
Touch/separate or relative slip, use oscillograph to gather output voltage.
Further, lithium niobate monocrystal thin slice is the lithium niobate column crystal to being made up of czochralski method using inner circle blanking method
(006) face of progress cutting (c to cutting) gained, its thickness is about 500 nanometers -5 millimeters.Polycrystalline lithium niobate film is using laser point
The method of beamlet extension (LMBE) is prepared from.Film thickness is about 100-500 nanometers, and film surface has irregularity degree.
Further, the method for preparing dimethyl silicone polymer (PDMS) micro-structural is to use black silicon as mother matrix.
Beneficial effects of the present invention are：
The friction nanometer power generator based on niobic acid lithium material that the present invention is provided uses mono-crystalline lithium niobate thin slice or laser point
LiNbO_3 film prepared by beamlet extension (LMBE) method is used as new-type friction material.Niobic acid lithium material has excellent piezoelectricity effect
Should, electrooptic effect, acoustooptical effect, nonlinear effect and photorefractive effect, develop the friction nanometer generating based on niobic acid lithium material
The application of nano generator can be expanded to the fields such as optics, acoustics and sensing by machine, with huge application potential.
Brief description of the drawings
Technical scheme in order to illustrate the embodiments of the present invention more clearly, makes required in being described below to embodiment
Accompanying drawing does brief introduction, it should be apparent that, drawings in the following description are only some embodiments of the present invention, for this
For the those of ordinary skill in field, on the premise of not paying creative work, other can also be obtained according to these accompanying drawings
Accompanying drawing.
Fig. 1 is the structural representation of the friction nanometer power generator based on niobic acid lithium material of the embodiment of the present invention；
Fig. 2 is the output voltage waveforms of the friction nanometer power generator based on polycrystalline lithium niobate film of the embodiment of the present invention；
Fig. 3 is the output voltage waveforms of the friction nanometer power generator based on lithium niobate monocrystal thin slice of the embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described.Obviously, described embodiment is only a part of embodiment of the present invention, rather than whole embodiments.Base
Embodiment in the present invention, those of ordinary skill in the art obtained under the premise of creative work is not made it is all its
His embodiment, belongs to the scope of protection of the invention.Additionally, protection scope of the present invention should not be only limited to following
Specific experiment method or design parameter.
As shown in figure 1, be a kind of friction nanometer power generator based on niobic acid lithium material of the present invention, including by the first friction
The positive polarity frictional layer 1 of material composition, the negative polarity frictional layer 2 being made up of the second friction material, first electrode 3, second electrode
4, wherein, the positive polarity frictional layer 1 is in contact with first electrode 3, and the negative polarity frictional layer 2 is in contact with second electrode 4,
Contacted or separately positioned between the positive polarity frictional layer 1 and negative polarity frictional layer 2, the friction is acted on when there is alternation external force
During nano generator, positive polarity frictional layer 1 can come in contact/separate with negative polarity frictional layer 2 or relative slip, make first electrode
Ac signal is produced between 3 and second electrode 4.
Wherein, the positive polarity frictional layer 1 can take the electric charge of opposed polarity when contacting with negative polarity frictional layer 2.Just
The positively charged due to easy betatopic of polarity frictional layer 1, negative polarity frictional layer 2 is negatively charged due to easy electronics.It is above-mentioned to rub
During wiping layer separation/contact or relative slip, its electrical potential difference formed can drive the movement of output electric charge in external circuit, i.e.,
Form electric current.
A kind of preparation method for friction nanometer power generator based on niobic acid lithium material that the present invention is provided comprises the following steps：
Step 1, the method cut using inner circle carries out cutting (c in (006) face to the lithium niobate column crystal being made up of czochralski method
Cut), lithium niobate monocrystal thin slice is obtained, its thickness is about 500 nanometers -5 millimeters ,+c or-c of the blend compounds in lithium niobate monocrystal thin slice
Face is stained with metal electrode；Or to prepare polycrystalline lithium niobate in highly doped silicon base thin using the method for laser molecular beam epitaxy (LMBE)
Film, film thickness is about 100-500 nanometers, and film surface has certain irregularity degree.
Step 2, dimethyl silicone polymer (PDMS) is prepared and in its surface modification micro-structural.By dimethyl silicone polymer list
Body is mixed with curing agent with mass ratio 10: 1, is coated in after stirring on black silicon mother matrix, the bubble in mixed liquor is removed, even
Dimethyl silicone polymer (PDMS) homogeneous film formation is made with certain rotating speed on glue machine and solidifies stripping in insulating box.
Step 3, surface of the dimethyl silicone polymer (PDMS) without micro-structural and metal electrode are entered by glue
Row bonding.
Step 4, copper conductor is drawn on metal electrode and high doped silicon slice respectively.
Step 5, by the lithium niobate monocrystal thin slice with metal electrode in step 1 or the lithium niobate with highly doped silicon electrode
Polycrystal film is separately fixed at and can produced on the device of alternating force with the dimethyl silicone polymer (PDMS) in step 3, wherein niobium
The surface that sour lithium material and PDMS have micro-structural is in opposite position, can directly contact friction.Gather defeated using oscillograph
Go out voltage.
Below by embodiment, the invention will be further described.
Embodiment one：
As shown in figure 1, a kind of friction nanometer power generator based on polycrystalline lithium niobate film provided for the present invention.Including just
Polarity frictional layer 1, negative polarity frictional layer 2, first electrode 3, second electrode 4, specific preparation process is：
(1) polycrystalline lithium niobate film is prepared
Step 1, the highly doped silicon base of cleaning.First highly doped silicon base is put into hydrofluoric acid 10 seconds to remove removing oxide layer.Take
It is clean using deionized water rinsing after going out.Then ultrasound 15 minutes in ethanol solution, finally dry with deionized water rinsing
Only.
Step 2, installation target and substrate.Highly doped silicon base and lithium niobate target after cleaning is fixed in Sample Room.
Vacuum is extracted, sample is then pushed into growth room from Sample Room.Vacuum is extracted until growth room's vacuum reaches 10-5Pa.Heating
Substrate to temperature is 750 DEG C.
Step 3, regulation growth atmosphere and laser.Oxygen is filled with, molecular pump is closed, growth chamber pressure is maintained 30Pa.
The position of laser and target is adjusted, makes the focal beam spot of laser smaller.Rotary speed and the direction of target and substrate are set.
Step 4, growing film.Laser frequency 1Hz, energy 600mJ, growth time one hour are set.
Step 5, the annealing of film and Temperature fall.Maintain 750 DEG C to anneal one hour, then sample is naturally rung to room temperature
After take out sample.
(2) dimethyl silicone polymer (PDMS) is prepared and in its surface modification micro-structural
Step 1, dimethyl silicone polymer monomer and curing agent be mixed and stirred for mass ratio 10: 1 uniformly, to stand one small
When to remove the bubble in mixed liquor.
Step 2, mixed liquor is cast on black silicon motherboard, it is 300 rpms to set spin coating machine speed, makes poly dimethyl
Siloxanes (PDMS) stands one hour to remove the bubble in mixed liquor again into the film that thickness is 200-400 microns.
Step 3, above-mentioned sample is placed in insulating box, it is 85 DEG C, 40 minutes hardening times to set temperature.
Step 4, polydimethylsiloxane peeled off from black silicon mother matrix.Obtain the poly- diformazan that surface carries micro-structural
Radical siloxane (PDMS).
(3) surface of the dimethyl silicone polymer (PDMS) without micro-structural and aluminium foil are passed through common two-sided gluing
Close.
(4) copper conductor is drawn on foil electrode and highly doped silicon electrode respectively.
(5) by the polycrystalline lithium niobate film with highly doped silicon electrode in step 1 and gathering with foil electrode in step 3
Dimethyl siloxane (PDMS) is separately fixed on vibrator, and the surface that wherein niobic acid lithium material and PDMS have micro-structural is in
Opposite position, output voltage is gathered using oscillograph.
Fig. 2 is the output voltage figure of the above-mentioned friction nanometer power generator based on polycrystalline lithium niobate film.Using above step
The prepared friction nanometer power generator based on niobic acid lithium material, when outside vibration frequency is 9Hz, output voltage peak value is
134V, with stable voltage output ability.
Embodiment two：
As shown in figure 1, a kind of friction nanometer power generator based on lithium niobate monocrystal thin slice provided for the present invention.Including just
Polarity frictional layer 1, negative polarity frictional layer 2, first electrode 3, second electrode 4, specific preparation process is：
(1) lithium niobate monocrystal thin slice is prepared
Step 1, prepare lithium niobate column crystal using czochralski method, and carry out polarization and obtain single domain lithium columbate crystal.
Step 2, the method cut using inner circle are cut to single domain lithium niobate column crystal along c faces, and it is 1 milli to obtain thickness
Rice, length and width are 1 centimetre of lithium niobate monocrystal thin slice.
Step 3, using double throwing machines to lithium niobate monocrystal thin slice carry out twin polishing.
(2) above-mentioned lithium niobate monocrystal thin slice and aluminium foil are passed through into common adhered by double sided plaster.
(3) dimethyl silicone polymer (PDMS) is prepared and in its surface modification micro-structural
Step 1, dimethyl silicone polymer monomer and curing agent be mixed and stirred for mass ratio 10: 1 uniformly, to stand one small
When to remove the bubble in mixed liquor.
Step 2, mixed liquor is cast on black silicon motherboard, it is 300 rpms to set spin coating machine speed, makes poly dimethyl
Siloxanes (PDMS) stands one hour to remove the bubble in mixed liquor again into the film that thickness is 200-400 microns.
Step 3, above-mentioned sample is placed in insulating box, it is 85 DEG C, 40 minutes hardening times to set temperature.
Step 4, polydimethylsiloxane peeled off from black silicon mother matrix.Obtain the poly- diformazan that surface carries micro-structural
Radical siloxane (PDMS).
(4) surface of the dimethyl silicone polymer (PDMS) without micro-structural and aluminium foil are passed through common two-sided gluing
Close.
(5) copper conductor is drawn on above-mentioned two foil electrode respectively.
(5) by the lithium niobate monocrystal thin slice with foil electrode in step 1 with carrying poly- the two of foil electrode in step 3
Methylsiloxane (PDMS) is separately fixed on vibrator, and the surface that wherein niobic acid lithium material and PDMS have micro-structural is in phase
To position, output voltage is gathered using oscillograph.
Fig. 3 is the output voltage figure of the above-mentioned friction nanometer power generator based on lithium niobate monocrystal thin slice.Using above step
The prepared friction nanometer power generator based on niobic acid lithium material, when outside vibration frequency is 9Hz, output voltage peak value is
84V, with stable voltage output ability.
Made as described above step, can adjust process sequence or deletes processing step, for example with such as according to actual needs
Lower step：
Step 1, prepare lithium niobate monocrystal thin slice and bonded with metal electrode or prepare niobic acid in highly doped silicon base
Lithium polycrystal film；
Step 2, prepare dimethyl silicone polymer (PDMS) and modify micro-structural in its friction surface；
Step 3, the one side and sheet metal of the dimethyl silicone polymer (PDMS) unmodified micro-structural are bonded；
Step 4, copper conductor is drawn on metal electrode and highly doped silicon electrode respectively；
Step 5, niobic acid lithium material with electrode will be prepared in step 1 and will be prepared in step 3 with electrode
Dimethyl silicone polymer (PDMS) is separately fixed at and can produced on the device of relative movement, the niobic acid lithium material with electrode
The surface for having micro-structural with the PDMS is in opposite position；
Step 6, when can produce the device work of relative movement, niobic acid lithium material and dimethyl silicone polymer is driven to connect
Touch/separate or relative slip, use oscillograph to gather output voltage.
Wherein in step 1, lithium niobate monocrystal thin slice is the c of (006) crystal face cutting to sheet thickness is about 500 nanometer -5
Millimeter, blend compounds are stained with metal electrode.And in step 1, polycrystalline lithium niobate film is using laser molecular beam epitaxy (LMBE)
Method is prepared from；Film thickness is 100 nanometers -500 nanometers, and film surface has irregularity degree.Further, in step 2,
The method for preparing dimethyl silicone polymer (PDMS) micro-structural is to use black silicon as mother matrix.
Non-elaborated part of the present invention belongs to the known technology of those skilled in the art.It the foregoing is only the present invention's
Preferred embodiment, is not intended to limit the invention, within the spirit and principles of the invention, any modification for being made, equivalent
Replace, improve etc., it should be included in the scope of the protection.
Claims (10)
1. a kind of friction nanometer power generator based on niobic acid lithium material, it is characterised in that it includes being made up of the first friction material
Positive polarity frictional layer, the negative polarity frictional layer being made up of the second friction material, first electrode, second electrode, wherein：
First friction material is in contact with first electrode, and second friction material is in contact with second electrode, sets institute
State and contact or separate between the first friction material and the second friction material, the friction nanometer power generator is acted on when there is external force
When, the first friction material can come in contact/separate or slide with the second friction material, make to produce between first electrode and second electrode
Raw ac signal；First friction material is niobic acid lithium material.
2. the friction nanometer power generator according to claim 1 based on niobic acid lithium material, it is characterised in that described niobic acid
Lithium material is congruent niobic acid lithium material, or doped lithium columbate material.
3. the friction nanometer power generator according to claim 1 based on niobic acid lithium material, it is characterised in that described second rubs
Wiping material is flexible macromolecule polymer.
4. the friction nanometer power generator according to claim 2 based on niobic acid lithium material, it is characterised in that the doping niobium
Sour lithium material is doped iron lithium niobate or mg-doped lithium niobate.
5. the friction nanometer power generator according to claim 1 based on niobic acid lithium material, it is characterised in that described niobic acid
Lithium material is lithium niobate monocrystal thin slice either polycrystalline lithium niobate film.
6. the friction nanometer power generator according to claim 1 based on niobic acid lithium material, it is characterised in that corresponding to described
The first electrode material of lithium niobate monocrystal thin slice is aluminium, copper, gold or silver metal, corresponding to the first of the polycrystalline lithium niobate film
Electrode material is highly doped silicon.The second electrode material is aluminium, copper, gold or silver metal.
7. the friction nanometer power generator according to claim 3 based on niobic acid lithium material, it is characterised in that described flexible high
Molecularly Imprinted Polymer is dimethyl silicone polymer (PDMS).
8. the friction nanometer power generator according to claim 7 based on niobic acid lithium material, it is characterised in that described poly- two
Micro-structural is modified with methylsiloxane (PDMS) surface, microstructure size is 5-10 microns, and depth is 10-15 microns.
9. preparing the method for the friction nanometer power generator based on niobic acid lithium material described in any one in claim 1-8, it is special
Levy and be, this method comprises the following steps：
Step 1, prepare lithium niobate monocrystal thin slice and bonded with metal electrode or to prepare lithium niobate in highly doped silicon base more
Brilliant film；
Step 2, prepare dimethyl silicone polymer (PDMS) and modify micro-structural in its friction surface；
Step 3, the one side and sheet metal of the dimethyl silicone polymer (PDMS) unmodified micro-structural are bonded；
Step 4, copper conductor is drawn on metal electrode and highly doped silicon electrode respectively；
Step 5, niobic acid lithium material with electrode will be prepared in step 1 and by poly- two with electrode that are prepared in step 3
Methylsiloxane (PDMS) is separately fixed at and can produced on the device of relative movement, the niobic acid lithium material and institute with electrode
The surface that stating PDMS has micro-structural is in opposite position；
Step 6, when can produce the device work of relative movement, drive niobic acid lithium material and dimethyl silicone polymer come in contact/
Separation or relative slip, use oscillograph to gather output voltage.
10. preparation method according to claim 9, it is characterised in that in step 1, lithium niobate monocrystal thin slice is that (006) is brilliant
The c of face cutting is to sheet thickness is about 500 nanometers -5 millimeters, and blend compounds are stained with metal electrode.
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| CN201710583316.1A CN107147326A (en) | 2017-07-11 | 2017-07-11 | A kind of friction nanometer power generator based on niobic acid lithium material and preparation method thereof |
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| CN103354429A (en) * | 2013-03-12 | 2013-10-16 | 国家纳米科学中心 | Sliding friction nano generator and power generation method |
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| CN106059379A (en) * | 2011-12-06 | 2016-10-26 | 精工爱普生株式会社 | Piezoelectric motor, drive unit, robot, and printer |
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2017
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|---|---|---|---|---|
| CN106059379A (en) * | 2011-12-06 | 2016-10-26 | 精工爱普生株式会社 | Piezoelectric motor, drive unit, robot, and printer |
| CN103354429A (en) * | 2013-03-12 | 2013-10-16 | 国家纳米科学中心 | Sliding friction nano generator and power generation method |
| CN104868777A (en) * | 2014-02-20 | 2015-08-26 | 北京纳米能源与系统研究所 | Friction nanometer generator, generating set and power generation method |
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