CN107144596A - A kind of thermal conductivity of thin film measuring system based on micro-nano fluorescent grain - Google Patents
A kind of thermal conductivity of thin film measuring system based on micro-nano fluorescent grain Download PDFInfo
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- CN107144596A CN107144596A CN201710370078.6A CN201710370078A CN107144596A CN 107144596 A CN107144596 A CN 107144596A CN 201710370078 A CN201710370078 A CN 201710370078A CN 107144596 A CN107144596 A CN 107144596A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
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Abstract
The present invention provides a kind of thermal conductivity of thin film measuring system based on micro-nano fluorescent grain, and the measuring system at least includes：Sample structure module, imaging optical path module and exciting is penetrated and spectral measurement module；The sample structure module at least includes substrate, film to be measured, absorbs thermal source and micro-nano fluorescent grain；The film to be measured is placed on the substrate, and the absorption thermal source and micro-nano fluorescent grain are placed on the film surface to be measured；Or the micro-nano fluorescent grain is directly placed on the substrate；The Laser emission and spectral measurement module are arranged on the top of the sample structure module, for irradiating film to be measured so that the absorption thermal source absorbs laser energy and produces heat, micro-nano fluorescent grain is produced fluorescence by laser excitation simultaneously, and spectrum is measured.It can be realized to the lossless, convenient of micro/nano film thermal conductivity, reliable measurements using the measuring system of the present invention.
Description
Technical field
It is more particularly to a kind of based on the thin of micro-nano fluorescent grain the invention belongs to the hot coefficient fields of measurement of micro-nano-scale
Film thermal conductivity measurement system.
Background technology
With semiconductor devices, MEMS (MEMS), super large-scale integration fast development, micro/nano film
The thermal conductivity of material is more and more important for the radiating of device.For example, when running highdensity integrated circuit, it is necessary to production
Raw heat is dissipated as early as possible, to reduce thermal noise so as to have influence on the raising of CPU speed.Obviously, film material used in computer
The thermal conductivity of material is directly connected to its chips and cooling integrated ability.In addition, thermal conductivity also contributes to film
Prepare, micro heattransfer research can make calculating to film nucleating growth and using the Heat transmission of process, and thermophysical parameter is
Ensure that this simulation is reliable crucial.Because thin-film material has quantum effect, surface and interfacial effect so that micro- under minute yardstick
Yardstick heat transfer has more obvious dimensional effect.
Although the method for testing for having some thin-film material thermal conductivities at present has been reported, error etc. is not no in its measuring method
Determine that factor is more, and measure relatively complicated.Temperature survey is particularly important in the thermal conductivity measurement of thin-film material is.It is more ripe
Measuring method be Cahill 3 ω methods (Cahill D G.Thermal conductivity measurement from
30to 750K:the 3ω method[J].Review of scientific instruments,1990,61(2):802-
808.), mainly using traditional temperature survey i.e. in film surface metal cladding to be measured, film is characterized by the change of resistance
The change of surface temperature.This method can measure the minimum film sample of size and can effectively reduce measurement caused by black body radiation
Error.This method shortcoming also more substantially, 3 ω methods do not consider the interface resistance of metal level and film to be measured, film anisotropy with
And bonding jumper shape thicknesses have large effect to measurement result, while may cause to damage to film in photolithographic layer process
Wound, produces defect, and the scattering influence on phonon is larger, reduces the thermal conductivity of material.Perichon et al. is proposed based on micro-
Thermal conductivity of thin film measuring method (Perichon S, Lysenko V, the Remaki B, et of Raman (Raman) spectrum
al.Measurement of porous silicon thermal conductivity by micro-Raman
scattering[J].Journal of Applied Physics,1999,86(8):4700-4702.), the main base of its principle
It is in Raman spectrum effect：Irradiate tested sample using laser beam, can cause the local temperature rise of sample at irradiation, the temperature rise with
The thermal conductivity of sample is directly related, while the Raman spectrum peak positions of tested sample and the temperature of sample have corresponding relation.This method
The measurement of thermal conductivity of thin film is carried out using optical means, the temperature of film surface to be measured is characterized by the displacement at Raman peaks,
Damage is not produced to film to be measured.The film for measuring thermal conductivity of thin film measurement different materials based on Raman methods, which must all be re-scaled, to be treated
The relation of film Raman spectral peak shifts amount and temperature is surveyed, and this method has certain limitation, is only used for measurement Raman peaks
Displacement has the material of preferable linear relationship with temperature.
Micro-nano fluorescent grain is irradiated light-emitting atom the making in external radiation field of its excitation state by the laser of certain wavelength
Under, during to lower state or ground state transition, radiated photons produce fluorescence phenomenon.Due to by quantum size effect and dielectric confinement effect
The influence answered, semiconductor micro-nano fluorescent grain shows the characteristics of luminescence of uniqueness.It is mainly shown as：(1) semiconductor micro-nano fluorescence
The luminosity of particle can be regulated and controled by changing the size of micro-nano fluorescent grain；(2) semiconductor micro-nano fluorescent grain
With larger Stokes shift and narrower and symmetrical fluorescence spectra (full width at half maximum only has 40nm)；(3) semiconductor microactuator
Fluorescent grain of receiving has higher luminous efficiency.In other influences factor, the change of temperature launches light to micro-nano fluorescent grain
The property of son has very big influence.
The content of the invention
The shortcoming of prior art in view of the above, it is an object of the invention to provide a kind of based on micro-nano fluorescent grain
Thermal conductivity of thin film measuring system, for solve in the prior art 3 ω methods measurement thermal conductivity of thin film when interface resistance, film it is each to different
Property and bonding jumper shape thicknesses and thin film damage etc. micro- Raman methods measurement limitation is impacted and utilized to thermal conductivity
Big etc. the problem of.
In order to achieve the above objects and other related objects, the present invention provides a kind of measuring system and at least included：Sample
Construction module, imaging optical path module and Laser emission and spectral measurement module；
The sample structure module at least includes substrate, film to be measured, absorbs thermal source and micro-nano fluorescent grain；Wherein, institute
State film to be measured to be placed on the substrate, the absorption thermal source and micro-nano fluorescent grain are placed on the film surface to be measured；Or
Micro-nano fluorescent grain is directly placed on the substrate described in person；
The imaging optical path module is arranged on the top of the sample structure module, the shape for extracting the film to be measured
Shape characteristic parameter；
The Laser emission and spectral measurement module are used to irradiate film to be measured so that the absorption thermal source absorbs laser energy
Volume production heat amount, while making micro-nano fluorescent grain be produced fluorescence by laser excitation, and is measured to spectrum.
Preferably, the imaging optical path module at least include light source, the first semi-permeable and semi-reflecting mirror, selection window, object lens with
And imaging sensor；
The selection window includes speculum side and no-mirror side；
The light sent from the light source enters the selection window by the reflex of first semi-permeable and semi-reflecting mirror
No-mirror side, then focus on the film surface to be measured by object lens, the light backtracking of reflection passes through described the first half
The transmission effect of saturating half-reflecting mirror enters described image sensor, computer generated image is finally transmitted to, so as to extract described to be measured
The parameters for shape characteristic of film.
Preferably, the Laser emission and spectral measurement module at least include：It is power-adjustable laser, second semi-transparent semi-reflecting
Penetrate mirror, filter and spectrometer；
The laser sent from the power-adjustable laser is acted on by the transmission of second semi-permeable and semi-reflecting mirror to be entered
The selection window has speculum side, and the light of reflection focuses on the film surface to be measured by the object lens again, made to be measured
The micro-nano fluorescent grain of film surface, which is stimulated to produce fluorescence and make the absorption thermal source absorb laser energy, produces heat, institute
The fluorescence that micro-nano fluorescent grain excites is stated along reflex of the original optical path back through second semi-permeable and semi-reflecting mirror to enter
Filter, is filtered the light containing laser wavelength of incidence in fluorescence by the filter, the fluorescence after filter is incident to the spectrometer
In, spectroscopic data is finally transmitted to computer.
Preferably, the sample structure module is placed in cavity；
The transmission window just to sample, the imaging optical path module and the Laser emission are provided with the top of the cavity
The light sent with spectral measurement module is irradiated to the film surface to be measured by the transmission window；
The cavity bottom is provided with fine setting platform, the levelness for adjusting sample in vacuum cavity.
Preferably, if the cavity vacuum cavity, then the vacuum cavity connected respectively by vacuum tube a molecular pump,
Mechanical pump and vacuum meter, to ensure the vacuum effectiveness in the vacuum cavity.
Preferably, the transmission window is silica glass window, and the fine setting platform is manual fine-tuning platform.
Preferably, the substrate is planar substrate structure or has reeded substrat structure.
Preferably, it is described to be measured in the micro-nano fluorescent grain of the film surface placement 2 or more than 2 to be measured
The distance between the hanging width w of the parameters for shape characteristic of film including film to be measured, thickness h and two micro-nano fluorescent grains
l。
Preferably, 1 micro-nano fluorescent grain is placed in the film surface to be measured, the shape of the film to be measured is special
Levying parameter includes hanging width w, pendulous tank l and the thickness h of film to be measured.
Preferably, the substrate is placed on a sample stage.
Preferably, the sample stage is warm table, and temperature controller is connected with the warm table.
Preferably, the absorption thermal source is carbon particle, microlayer model, quantum dot or quantum cluster.
Preferably, the micro-nano fluorescent grain include PbSe, CdSe, CdTe, CdSe/Zns, ZnSe, PbS/CdS,
Ag2One or more combinations in Te, InP/ZnS, ZnCuInS/ZnSe/ZnS, graphene quantum dot or quantum cluster.
As described above, the thermal conductivity of thin film measuring system based on micro-nano fluorescent grain of the present invention, with following beneficial effect
Really：
1st, micro-nano fluorescent grain is firstly introduced in thermal conductivity of thin film measurement, TEMP is used as using micro-nano fluorescent grain
Device, because its particle diameter is small while can be very good to be fitted in can neglect on testee to the interface temperature difference that measurement result is produced
Slightly disregard and to testee without thermal agitation to measurement result not, without thermal agitation, it is reproducible.
2nd, mainly optically realized in measuring, raw damage will not be made to sample, and in measurement without to sample
The processing that product are carried out in structure avoids cumbersome in sample preparation.
3rd, the pass of micro-nano fluorescent grain PL spectral peak shifts amount and temperature need to once only be demarcated in thermal conductivity of thin film measurement process
System, and micro-nano fluorescent grain temperature linearity relation is good, makes the determination of the temperature in thermal conductivity measurement process more convenient, more
Accurately.
4th, the thermal conductivity of thin film measuring system based on micro-nano fluorescent grain is not limited measured film species.
5th, the thermal conductivity of thin film measuring system based on micro-nano fluorescent grain reduces influence of the thermal convection current to measurement result.
Brief description of the drawings
Fig. 1 is the structural representation of sample structure module in one embodiment of the invention.
Fig. 2 is the structural representation of sample structure module in another embodiment of the present invention.
Fig. 3 is the overall structure diagram and imaging optical path of the thermal conductivity of thin film measuring system of micro-nano fluorescent grain of the present invention
The index path of module.
Fig. 4 for the overall structure diagram and exciting of the thermal conductivity of thin film measuring system of micro-nano fluorescent grain of the present invention penetrate with
The index path of spectral measurement module.
Component label instructions
1 object lens
2 selection windows
3001 first semi-permeable and semi-reflecting mirrors
3002 second semi-permeable and semi-reflecting mirrors
4 testing samples
5 speculums
6 filters
7 light sources
8 power-adjustable lasers
9 spectrometers
10 computers
11 CCD
12 molecular pumps
13 mechanical pumps
14 vacuum meters
15 fine setting platforms
16 transmission windows
17 warm tables
18 cavitys
19 temperature controllers
2001st, 2002 usb communication line
2101st, 2012,2103 vacuum tube
22 Serial Port Lines
23 substrates
24 absorb thermal source
25th, 251,252 micro-nano fluorescent grain
26 films to be measured
Embodiment
Illustrate embodiments of the present invention below by way of specific instantiation, those skilled in the art can be by this specification
Disclosed content understands other advantages and effect of the present invention easily.The present invention can also pass through specific realities different in addition
The mode of applying is embodied or practiced, the various details in this specification can also based on different viewpoints with application, without departing from
Various modifications or alterations are carried out under the spirit of the present invention.
Refer to accompanying drawing.It should be noted that the diagram provided in the present embodiment only illustrates the present invention in a schematic way
Basic conception, then in schema only display with relevant component in the present invention rather than according to component count during actual implement, shape
Shape and size are drawn, and it is actual when implementing kenel, quantity and the ratio of each component can be a kind of random change, and its component cloth
Office's kenel may also be increasingly complex.
According to the formula of thermal conductivity of thin film, k=α χ/ω * (wh/l)-1, wherein α is that the luminous power for absorbing thermal source absorbs system
Number, χ is the temperature coefficient (i.e. the coefficient that the displacement at PL spectral signatures peak is varied with temperature) of micro-nano fluorescent grain, and ω is that micro-nano is glimmering
The displacement at the PL spectral signatures peak of light particle is with the relation slope of laser power variation, and w, h, l join for the shape of film to be measured
Number.
In order to measure above-mentioned parameter, the present invention provides a kind of thermal conductivity of thin film measuring system based on micro-nano fluorescent grain,
So as to obtain the thermal conductivity of film.
As shown in Figures 3 and 4, the present embodiment provides a kind of thermal conductivity of thin film measuring system based on micro-nano fluorescent grain, by
The measurement of above-mentioned thermal conductivity can be completed by the system, the measuring system at least includes：Sample structure module, imaging optical path mould
Block and exciting is penetrated and spectral measurement module.
Wherein, as shown in figure 1, sample structure module at least includes substrate 23, film to be measured 26, absorbs thermal source 24 and micro-nano
Fluorescent grain 251,252；The film to be measured 26 is placed on the substrate 23, the absorption thermal source 24 and micro-nano fluorescent grain
251st, 252 the surface of film to be measured 26 is placed on, or the micro-nano fluorescent grain 251,252 is directly placed at the substrate
On 23.
Certainly, in other embodiments, the micro-nano fluorescent grain in the sample structure module can also be 1, such as Fig. 2
Shown micro-nano fluorescent grain 25.In addition, the micro-nano fluorescent grain in the sample structure module can also be two or more.
The film to be measured 26 can be placed on the substrate 23 in hanging or non-hanging mode.As illustrated in fig. 1 and 2
Substrate 23 is grooved substrate, and now described film 26 to be measured is hanging on the groove of the substrate 23, so can be to be measured thin
Film 26 itself carries out thermal conductivity measurement.In fact, the film to be measured 26 can also be directly placed in a planar substrate, enter
The measurement of the comprehensive effective thermal characteristics of row.
In order to measure the temperature coefficient of the micro-nano fluorescent grain, the micro-nano fluorescent grain can be placed on film to be measured
Heated on 26, can also be directly placed on substrate 23 and heat.
The substrate 23 is preferably positioned on a sample stage.It is highly preferred that as shown in Figure 3 and Figure 4, the sample stage can be with
For warm table 17, temperature controller 19 is connected with the warm table 17.So, substrate 23 can be both placed on the warm table 17,
And warm table 17 itself can also be heated to micro-nano fluorescent grain, so as to realize to micro-nano fluorescent grain temperature coefficient
Measurement.Most preferably, the warm table 17 is connected to temperature controller 19 by Serial Port Line 22.
It should be noted that the substrate 23 can also be placed on a common sample platform, the at this moment micro-nano fluorescence
Grain is then heated by other suitable heating modules.
As an example, the absorption thermal source 24 can be carbon particle, microlayer model, quantum dot or quantum cluster etc., herein
Do not limit, thermally contacted well and with all right of known luminous power absorption coefficient as long as having with film 26 to be measured.
The micro-nano fluorescent grain used can be PbSe, CdSe, CdTe, CdSe/Zns, ZnSe, PbS/CdS, Ag2Te、
One or more combinations in InP/ZnS, ZnCuInS/ZnSe/ZnS or graphene quantum dot or quantum cluster, certainly, this
The micro-nano fluorescent grain of invention can also be non-quantum dot, not be limited herein.
The particle diameter of the micro-nano fluorescent grain is small, and the small micro-nano fluorescent grain of particle diameter can be very good to be fitted in testee
On to measurement result produce interface temperature difference can be ignored and to testee without thermal agitation to measurement result not, without heat
Disturbance, it is reproducible.
In the system, the imaging optical path module is arranged on the top of the sample structure module, for extracting described treat
Survey the parameters for shape characteristic of film 26.By the imaging optical path module, the pattern and shape for obtaining film 26 to be measured can be observed
Micro-nano fluorescent grain 251, the distance between 252 at shape characteristic parameter, such as hanging width w of film 26 to be measured, thickness h and two
L (or pendulous tank of film to be measured 26).
Specifically, as shown in Figure 3 and Figure 4, the imaging optical path module at least includes light source 7, the first semi-permeable and semi-reflecting mirror
3002nd, selection window 2, object lens 1 and imaging sensor (CCD) 11 etc..
The selection window 2 includes the side of speculum 5 and no-mirror side.It is illustrated in figure 3 the imaging optical path
The index path of module.The light sent from the light source 7 enters institute by the reflex of first semi-permeable and semi-reflecting mirror 3002
State the no-mirror side of selection window 2, then the surface of film to be measured 26 is focused on by object lens 1, the light backtracking of reflection,
Described image sensor 11 is entered by the transmission effect of first semi-permeable and semi-reflecting mirror 3002, finally by usb communication line
2002, which are transmitted to computer 10, is imaged, so as to extract parameters for shape characteristic w, h and l of the film to be measured 26.
As an example, the light source is preferably white light source, certainly, in other embodiments, the light source can also
It is other suitable light source modes.
In addition, in the system, the Laser emission and spectral measurement module are used to irradiate film 26 to be measured so that described inhale
Receive thermal source 24 and absorb laser energy generation heat, while micro-nano fluorescent grain is produced fluorescence by laser excitation, and to spectrum
Measure.
Specifically, as shown in figure 4, the Laser emission and spectral measurement module at least include：Power-adjustable laser 8,
Second semi-permeable and semi-reflecting mirror 3001, filter are with 6 and spectrometer 9 etc..
Index path as shown in Figure 4, the laser sent from the power-adjustable laser 8 passes through second semi-transflective reflective
The transmission effect of mirror 3001 has the side of speculum 5 into the selection window 2, and the light of reflection is focused on by the object lens 1 again
The surface of film to be measured 26, the micro-nano fluorescent grain on the surface of film 26 to be measured is stimulated generation fluorescence and makes the absorption
Thermal source 24 absorbs laser energy and produces heat, and the fluorescence that the micro-nano fluorescent grain is excited is along original optical path back through described
The reflex of second semi-permeable and semi-reflecting mirror 3001 enters filter 6, will contain laser wavelength of incidence in fluorescence by the filter 6
Light filter, the fluorescence after filter is incident in the spectrometer 9, and spectroscopic data is transmitted into meter finally by the line of usb communication 2001
Calculation machine 10.
By the Laser emission and spectral measurement module, on the one hand micro-nano fluorescent grain can be realized with combined heat module
Temperature coefficient χ measurement, on the other hand, coefficient ω measurement can be realized by Laser emission and spectral measurement.
Further, the sample structure module is placed in a cavity.
The top of cavity 18 is provided with the transmission window 16 just to sample, the imaging optical path module and the laser
The light that transmitting and spectral measurement module are sent is irradiated to the surface of film to be measured 26 by the transmission window 16.It is described
Transmission window 16 can be silica glass window, it is, of course, also possible to replaced with other transparent windows of transmissivity more than 95%,
This is not restricted.
The bottom of cavity 18 is provided with fine setting platform 15, the levelness for adjusting sample in vacuum cavity 18.It is described micro-
It can be manual fine-tuning platform to adjust platform 15, naturally it is also possible to replaced, do not limited herein with other fine setting platforms.
In addition, the cavity 18 can be vacuum or non-real cavity body.Preferably, the selection of cavity 18 is vacuum chamber
Body, now, the vacuum cavity can respectively be connected by vacuum tube 2101,2102,2103 molecular pump 12, mechanical pump 13 with
And vacuum meter 14, to ensure the vacuum effectiveness in the vacuum cavity.
It should be noted that in the system, the functional module of imaging optical path module and the functional module of spectral measurement may be used also
To be all integrated in spectrometer, a variety of functions are realized using a spectrometer.
The above-described embodiments merely illustrate the principles and effects of the present invention, not for the limitation present invention.It is any ripe
Know the personage of this technology all can carry out modifications and changes under the spirit and scope without prejudice to the present invention to above-described embodiment.Cause
This, those of ordinary skill in the art is complete without departing from disclosed spirit and institute under technological thought such as
Into all equivalent modifications or change, should by the present invention claim be covered.
Claims (13)
1. a kind of thermal conductivity of thin film measuring system based on micro-nano fluorescent grain, it is characterised in that the measuring system is at least wrapped
Include：Sample structure module, imaging optical path module and Laser emission and spectral measurement module；
The sample structure module at least includes substrate, film to be measured, absorbs thermal source and micro-nano fluorescent grain；Wherein, it is described to treat
Survey film to be placed on the substrate, the absorption thermal source and micro-nano fluorescent grain are placed on the film surface to be measured；Or institute
Micro-nano fluorescent grain is stated to be directly placed on the substrate；
The imaging optical path module is arranged on the top of the sample structure module, and the shape for extracting the film to be measured is special
Levy parameter；
The Laser emission and spectral measurement module are used to irradiate film to be measured so that the absorption thermal source absorbs laser energy production
Heat amount, while making micro-nano fluorescent grain be produced fluorescence by laser excitation, and is measured to spectrum.
2. the thermal conductivity of thin film measuring system according to claim 1 based on micro-nano fluorescent grain, it is characterised in that described
Imaging optical path module at least includes light source, the first semi-permeable and semi-reflecting mirror, selection window, object lens and imaging sensor；
The selection window includes speculum side and no-mirror side；
The light sent from the light source enters the selection window without anti-by the reflex of first semi-permeable and semi-reflecting mirror
Mirror side is penetrated, then the film surface to be measured is focused on by object lens, the light backtracking of reflection passes through described first semi-transparent half
The transmission effect of speculum enters described image sensor, computer generated image is finally transmitted to, so as to extract the film to be measured
Parameters for shape characteristic.
3. the thermal conductivity of thin film measuring system according to claim 2 based on micro-nano fluorescent grain, it is characterised in that：It is described
Laser emission and spectral measurement module at least include：Power-adjustable laser, the second semi-permeable and semi-reflecting mirror, filter and spectrum
Instrument；
The laser sent from the power-adjustable laser is acted on by the transmission of second semi-permeable and semi-reflecting mirror enters described
Selection window has speculum side, and the light of reflection focuses on the film surface to be measured by the object lens again, makes film to be measured
The micro-nano fluorescent grain on surface, which is stimulated to produce fluorescence and make the absorption thermal source absorb laser energy, produces heat, described micro-
The fluorescence that fluorescent grain of receiving is excited enters filter along reflex of the original optical path back through second semi-permeable and semi-reflecting mirror,
The light containing laser wavelength of incidence in fluorescence is filtered by the filter, the fluorescence after filter is incident in the spectrometer, most
Spectroscopic data is transmitted to computer afterwards.
4. the thermal conductivity of thin film measuring system according to claim 1 based on micro-nano fluorescent grain, it is characterised in that：It is described
Sample structure module is placed in cavity；
The transmission window just to sample, the imaging optical path module and the Laser emission and light are provided with the top of the cavity
The light that spectrometry module is sent is irradiated to the film surface to be measured by the transmission window；
The cavity bottom is provided with fine setting platform, the levelness for adjusting sample in vacuum cavity.
5. the thermal conductivity of thin film measuring system according to claim 4 based on micro-nano fluorescent grain, it is characterised in that：It is described
If cavity vacuum cavity, then the vacuum cavity connects a molecular pump, mechanical pump and vacuum meter by vacuum tube respectively, with
Ensure the vacuum effectiveness in the vacuum cavity.
6. the thermal conductivity of thin film measuring system according to claim 4 based on micro-nano fluorescent grain, it is characterised in that：It is described
Transmission window is silica glass window, and the fine setting platform is manual fine-tuning platform.
7. the thermal conductivity of thin film measuring system according to claim 1 based on micro-nano fluorescent grain, it is characterised in that：It is described
Substrate is planar substrate structure or has reeded substrat structure.
8. the thermal conductivity of thin film measuring system according to claim 7 based on micro-nano fluorescent grain, it is characterised in that：Institute
State the micro-nano fluorescent grain that film surface to be measured places 2 or more than 2, the parameters for shape characteristic bag of the film to be measured
Include the distance between the hanging width w of film to be measured, thickness h and two micro-nano fluorescent grains l.
9. the thermal conductivity of thin film measuring system according to claim 7 based on micro-nano fluorescent grain, it is characterised in that：Institute
State film surface to be measured and place 1 micro-nano fluorescent grain, the parameters for shape characteristic of the film to be measured includes film to be measured
Hanging width w, pendulous tank l and thickness h.
10. the thermal conductivity of thin film measuring system according to claim 1 based on micro-nano fluorescent grain, it is characterised in that：Institute
Substrate is stated to be placed on a sample stage.
11. the thermal conductivity of thin film measuring system according to claim 10 based on micro-nano fluorescent grain, it is characterised in that：Institute
Sample stage is stated for warm table, temperature controller is connected with the warm table.
12. the thermal conductivity of thin film measuring system according to claim 1 based on micro-nano fluorescent grain, it is characterised in that：Institute
It is carbon particle, microlayer model, quantum dot or quantum cluster to state absorption thermal source.
13. the thermal conductivity of thin film measuring system according to claim 1 based on micro-nano fluorescent grain, it is characterised in that：Institute
Stating micro-nano fluorescent grain includes PbSe, CdSe, CdTe, CdSe/Zns, ZnSe, PbS/CdS, Ag2Te、InP/ZnS、ZnCuInS/
One or more combinations in ZnSe/ZnS, graphene quantum dot or quantum cluster.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018214466A1 (en) * | 2017-05-23 | 2018-11-29 | 中国科学院上海高等研究院 | Method for measuring thermal conductivity of thin film based on fluorescent micro-nano-particles |
| CN112033564A (en) * | 2020-09-04 | 2020-12-04 | 暨南大学 | Based on WS2、VO2Temperature measuring platform and construction method and use method thereof |
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| WO2018214466A1 (en) * | 2017-05-23 | 2018-11-29 | 中国科学院上海高等研究院 | Method for measuring thermal conductivity of thin film based on fluorescent micro-nano-particles |
| CN112033564A (en) * | 2020-09-04 | 2020-12-04 | 暨南大学 | Based on WS2、VO2Temperature measuring platform and construction method and use method thereof |
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