CN107121771A - Adaptive optics focuses on interference compensation method and system - Google Patents

Adaptive optics focuses on interference compensation method and system Download PDF

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Publication number
CN107121771A
CN107121771A CN201710322144.2A CN201710322144A CN107121771A CN 107121771 A CN107121771 A CN 107121771A CN 201710322144 A CN201710322144 A CN 201710322144A CN 107121771 A CN107121771 A CN 107121771A
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lens
light
module
light intensity
dmd
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CN107121771B (en
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龚薇
斯科
胡乐佳
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Zhejiang University ZJU
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Zhejiang University ZJU
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light

Abstract

Interference compensation method and system are focused on the invention discloses a kind of adaptive optics.The present invention first passes through the fluorescence inspired in sample and received by photomultiplier, and now focusing center's light intensity is threshold value to note;DMD is placed in after object lens in the conjugate planes in pupil face, and to its subregion, area's incident beam is reflexed to side light path by each subregion successively, makes to return to positive side light path after its phase compensation, while keeping other subregion light beams constant;Focusing center's light intensity after the change of photomultiplier record partitioning beam phase;Mark light intensity to be more than or equal to the subregion of threshold value, obtain compensation subregion;Light beam is focused on again after DMD loading compensation subregion, and the stronger hot spot of central light strength is formed in sample.The present invention can quickly improve the quality of scattering medium internal focus hot spot from principle of optical interference, be that light science of heredity and live body deep layer high-resolution optical micro-imaging technique provide new approaches.

Description

Adaptive optics focuses on interference compensation method and system
Technical field
The invention belongs to light science of heredity and optical microphotograph imaging field, a kind of more particularly to adaptive optics focuses on interference Compensation method and system, and be imaged applied to Noninvasive light science of heredity light stimulus of new generation and live body deep penetration optical microphotograph.
Background technology
In biomedical optical community, optical scattering is the principal element for restricting quality of optical imaging.Most deep tissues The optical technology (for example, laser confocal imaging, Two Photon Fluorescence and optical coherence tomography scanning) of imaging is mainly using non- Scattered photon (i.e. trajectory photon) is imaged.With depth increase, exponentially formula decays the quantity of trajectory photon, therefore by optical focus Scope has been limited in 1mm depth.
Light genetics technology needs to carry out light stimulus to specific neuron, to study its neural circuitry mechanism.But pass Damage of the embedded fibers formula light science of heredity of system to living body biological is serious, is unfavorable for studying for a long period of time.Previously apply in astronomy Adaptive optical technique, for realize the light stimulus of deep layer biological tissue with imaging provide new technical support.
Existing non-intrusion type adaptive optical genetics technology is the fine phase correction based on adaptive optics, by inciting somebody to action Spatial light modulator is divided into some subregions, changes the light beam additive phase in subregion at equal intervals successively, detects its optimal optics and gather Burnt phase.Each subregion loop iteration successively, so as to obtain correction of a final proof phase, phase compensation is carried out to incident beam, so that Its distorted phase is corrected, good optical is formed and focuses on.
But above fine phase correction needs to consume the substantial amounts of time, in order to obtain preferably optical correction, it is necessary to Divide more subregions and thinner phase intervals.Because the image refresh rate of spatial light modulator is relatively low, cause optical correction The plenty of time is consumed, is unfavorable for carrying out the stimulation of Real-Time Optical science of heredity and Real-time High Resolution rate optical imagery, restriction in living body biological The popularization of adaptive optical genetic technique and microtechnic.
The content of the invention
In order to solve problem present in background technology, present invention aims at utilize higher digital micro- of image refresh rate Mirror device solves the problem of traditional adaptive optical science of heredity spatial light modulator is time-consuming longer.From principle of optical interference, Light beam is divided into some regions, and detects interference effect of each subregion inner light beam to focusing center.By retaining to focusing center The light beam in region that interference is mutually grown, while interfering focusing center the light beam additional phase error π in the region of cancellation, expires it Foot interference phase elongate member is simultaneously introduced back into light path.By the interference that script is played to negative effect to focal beam spot center The light beam of cancellation switchs to interfere mutually long light beam so that light beam is fully used, so as to improve the matter of optical focus Amount, shortens the correction time of adaptive optical stimulation.
To achieve these goals, technical scheme comprises the following steps:
First, a kind of adaptive optics focuses on interference compensation method:
1) focal plane of object lens does not place laboratory sample, and carrying out light beam with the DMD without loading subregion gathers Jiao, ideal focusing hot spot is obtained in the focal plane of object lens, records the focusing center position O of ideal focusing hot spotf
2) laboratory sample is placed in the focal plane of object lens, light intensity spy is carried out with the DMD without loading subregion Survey, record obtains focusing center position OfLight intensity value, be used as Intensity threshold Ith
3) reflecting surface of DMD is divided into polylith region, using each region successively as target area, to mesh The reflected beams for marking region carry out phase compensation, and traversal regional carries out light intensity spy with the DMD of loading subregion Survey, obtain the focusing center position O that regional corresponding record is arrivedfA series of light intensity values at place;
4) by each light intensity value and Intensity threshold IthIt is compared, and processing obtains judged result in the following ways:
If light intensity value is less than Intensity threshold Ith, then the corresponding region of the light intensity value is to be not required to phase compensation region;
If light intensity value is more than or equal to Intensity threshold Ith, then the corresponding region of the light intensity value is to need phase compensation region;
5) subregion will be adjusted according to judged result and will be loaded on DMD and carries out light intensity detection, in laboratory sample The interior final optics focus-compensating hot spot formed after interference compensation, is O in focusing center positionfPlace inspires stronger fluorescence.
The step 1) in light beam focus on be specifically:Laser launches light beam, after collimator and extender, micro- in numeral Reflect, then focused on by object lens on mirror device.
The step 3) in signified phase compensation specifically refer to, it is π's that a numerical value is added in the former phase of light beam Phase difference.
The step 2), 3) and 5) in light intensity detection be specifically:Laser launches light beam, after collimator and extender, Reflect, then focused on by object lens on sample on DMD, sample carries fluorescent material, is produced in sample abnormal Become scattering hot spot and inspire fluorescence, the fluorescence inspired is swept after lens focus with photomultiplier and galvanometer again Retouch detection and obtain the fluoroscopic image that scattering hot spot is inspired, record focusing center position OfLight intensity value.
The step 3) when being carried out light intensity detection with the DMD of loading subregion and is specifically referred to light intensity detection, it is digital Itself is received the reflected beams produced after incident beam and adjusts reflection angle by the target area on micro mirror element, makes the reflected beams To side light path return after phase compensation and do not adjust in the reflected light path before reflection angle, while in addition to target area Other regions keep the reflected beams reflection angle and the step 2) light intensity detection when the reflected beams reflection angle it is identical.
The step 5) specifically referred to according to judged result compensation subregion:During by DMD, phase is needed after judgement Itself is received the reflected beams produced after incident beam and adjusts reflection angle by position compensatory zone, makes the reflected beams to side light path Returned after phase compensation and do not adjust in the reflected light path before reflection angle, while being not required to phase compensation region guarantor after judging Hold the reflection angle and the step 2 of the reflected beams) light intensity detection when the reflected beams reflection angle it is identical.
Described fluorescent material includes fluorescin, fluorescence beads or fluorescent dye.
The laboratory sample is but is not limited to vivo biological tissue, tissues in vitro, agar block containing bead etc..
The step 3) in the reflecting surface of DMD be divided into polylith region specifically referred to DMD Micromirror pixels member with n × n mode uniform segmentations, so that the incident beam after collimator and extender is divided into corresponding n × n light beam Unit.
2nd, a kind of adaptive optics focuses on interference compensation system:
System includes laser, beam collimation and expands module, DMD, phase compensation block, beam splitter, shrink beam Module, scan module, dichroscope, microcobjective, laboratory sample and light intensity detection module.Beam collimation expands module arrangement and existed After laser, laser launches collimated expand after module parallel expands union space filtering of light beam and incides digital micromirror device Phase compensation block is equipped with front of part, DMD side exit end, DMD positive side exit end is equipped with beam splitting Device and shrink beam module, phase compensation block are located at the side of beam splitter, and the side the reflected beams of DMD are through phase It is re-reflected into after compensating module in beam splitter, the positive side the reflected beams of DMD are directly reflexed in beam splitter;Shrink beam Dichroscope is provided with front of module;Light beam is focused on after being reflected through dichroscope through over-scanning module into microcobjective, tests sample Grade is on microcobjective focal plane;The fluorescence inspired in laboratory sample after microcobjective and scan module through two to Look mirror is received by light intensity detection module and carries out light intensity detection.
Described beam collimation expands module and expands module lens, light beam spatial filter and rear light including preceding beam collimation Beam collimator and extender module lens;Preceding beam collimation expands module lens, light beam spatial filter and rear beam collimation and expands module Lens are arranged in parallel in the front at laser emitting end successively, and premenstrual beam collimation expands module lens, light to incident beam successively Beam spatial filter and rear beam collimation incide DMD after expanding that module lens are parallel and expanding.
Described phase compensation block includes but is not limited to optical delay line, spatial light modulator, phase delay chip etc..
Described shrink beam module includes preceding shrink beam module lens and rear shrink beam module lens;Preceding shrink beam module lens and retraction Beam module lens are arranged in parallel in the front side of beam splitter successively, and premenstrual shrink beam module is saturating successively for the light beam of DMD reflection The side of dichroscope is incided after mirror shrink beam parallel with rear shrink beam module lens.
Described scan module shakes including preceding scanning galvanometer, preceding light beam collimation lens, rear light beam collimation lens, rear scanning Mirror, preceding scan module lens and rear scan module lens;Preceding scanning galvanometer, preceding light beam collimation lens, rear light beam collimation lens, after Scanning galvanometer, preceding scan module lens and rear scan module lens are sequentially arranged in the front side of dichroscope, dichroscope reflection Light beam premenstrual scanning galvanometer, preceding light beam collimation lens, rear light beam collimation lens, rear scanning galvanometer, preceding scan module are saturating successively Microcobjective is incided after mirror and rear scan module lens.
Described light intensity detection module includes optical filter, condenser lens, spatial filter and photomultiplier;Optics Wave filter, condenser lens, spatial filter and photomultiplier are sequentially arranged in the rear side of dichroscope, what laboratory sample was sent Fluorescence successively through microcobjective, after scan module lens, preceding scan module lens, after scanning galvanometer, after light beam collimation lens, preceding Enter photoelectricity times after light beam collimation lens, preceding scanning galvanometer, dichroscope, optical filter, condenser lens and spatial filter Increase pipe and carry out light intensity detection.
The beneficial effects of the invention are as follows:
The present invention realizes easy adaptive optics focus-compensating using DMD, utilizes DMD Quick image refresh rate, overcomes conventional utilization space optical modulator and carries out the problem of speed is slow during serial phasing, Improve the speed of optical focus and optical stimulation.
The present invention is based on optical interference image-forming principle, judges there is interference cancellation to focal beam spot by DMD The subregion light beam of effect, and by the phase difference that added value is π in its phase, it is met the condition that interference is mutually grown, so that The light intensity for obtaining focusing center is obviously improved, and improves the quality of strong scattering medium internal opticses focusing.
The present invention carries out adaptive optics correction using DMD, and has a variety of easy modes to realize that phase is mended Repay, reduce experimental cost, more conducively application of the method and system in research experiment.
And the present invention easily can be combined with existing various micro-imaging techniques, contribute to non-embedded fibers formula light Science of heredity light stimulus technology develops, and realizes the synchronous light stimulus in brain depths and micro-imaging, promotes brain science progress.
Brief description of the drawings
Fig. 1 is the structural representation of present system;
Fig. 2 is the scattering focal beam spot image of nil micro mirror element timing in embodiment;
Gained light intensity value and the comparison figure of threshold value after Fig. 3 is compensated successively for DMD subregion in embodiment;
Fig. 4 needs the segmented phase distribution map of compensation after judging for DMD in embodiment;
Fig. 5 is carries out the focal beam spot image after phase compensation in embodiment to the subregion of compensation in need.
Embodiment
Following adaptive optics focus-compensating embodiment can be with the more detailed description present invention, but does not limit in any form The present invention.
Embodiments of the invention and its detailed process are as follows:
As shown in figure 1, present system, which includes laser 1, preceding beam collimation, expands module lens 2, light beam space filtering It is saturating that device 3 and rear beam collimation expand module lens 4, DMD 5, phase compensation block 6, beam splitter 7, preceding shrink beam module Mirror 8 and rear shrink beam module lens 9, dichroscope 10, preceding scanning galvanometer 11, preceding light beam collimation lens 12, rear light beam collimation lens 13rd, rear scanning galvanometer 14, preceding scan module lens 15 and rear scan module lens 16, microcobjective 17, laboratory sample 18, optics Wave filter 19, condenser lens 20, spatial filter 21 and photomultiplier 22.
(1) beam collimation expands module lens 2, the and of light beam spatial filter 3 before the light beam that laser 1 is sent is sequentially passed through Beam collimation is expanded after module lens 4 are expanded afterwards, is irradiated on DMD 5.In DMD 5 without loading Image and when being not loaded with laboratory sample 18, it is saturating that light beam is reflected through beam splitter 7, preceding shrink beam module lens 8 and rear shrink beam module Mirror 9, the side for being irradiated to dichroscope 10 is reflected, the reflected beams by preceding scanning galvanometer 11, preceding light beam collimation lens 12, after Enter microcobjective after light beam collimation lens 13, rear scanning galvanometer 14, preceding scan module lens 15 and rear scan module lens 16 17, and preferable focal beam spot is formed in focal plane, note focal beam spot center is O in the position of focal planef
(2) loading experiment sample 18, when DMD 5 is without load image, the light beam that laser 1 is sent is sequentially passed through Preceding beam collimation expands module lens 2, light beam spatial filter 3 and rear beam collimation and expanded after module lens 4 are expanded, and shines It is mapped on DMD 5, light beam is reflected through beam splitter 7, preceding shrink beam module lens 8 and rear shrink beam module lens 9, shines The side for being mapped to dichroscope 10 is reflected, the reflected beams by preceding scanning galvanometer 11, preceding light beam collimation lens 12, after light beam it is accurate Into microcobjective 17 after straight lens 13, rear scanning galvanometer 14, preceding scan module lens 15 and rear scan module lens 16, and The scattering focal beam spot of focal plane formation distortion in laboratory sample 18, and inspire fluorescence.
(3) fluorescence is emitted into microcobjective 17 out of laboratory sample 18, then in turn through rear scan module lens 16, Preceding scan module lens 15, rear scanning galvanometer 14, rear light beam collimation lens 13, preceding light beam collimation lens 12, preceding scanning galvanometer 11, Enter photomultiplier 22 after dichroscope 10, optical filter 19, condenser lens 20 and spatial filter 21 and carry out light intensity spy Survey, the scattering focal beam spot image of nil micro mirror element timing is obtained by scanning, as shown in Figure 2.Remember now OfCorrespondence The light intensity value I of positionthFor Intensity threshold.Because light intensity point of maximum intensity is offset in this specific implementation case, OfThe light of correspondence position Intensity values IthFor 15.76.
(4) the micromirror pixels member of DMD is uniformly divided into 32 × 32 modes in this specific implementation case 1024 regions, so that the incident beam after collimator and extender is divided into corresponding 1024 beam units.It is micro- in one subregion Mirror is deflected to same direction simultaneously, and area's light beam is reflexed to the phase compensation block 6 of side light path, make its phase change π it After return to former reflected light path, at the same time, micro mirror in other subregions keeps constant so that its light beam formation optical focus, i.e., The light beam in a subregion is only removed, and keeps the light beam of remaining 1023 subregion constant, by photomultiplier record in OfPlace Fluorescent intensity value.All subregions are repeated in above-mentioned steps until recording the corresponding light intensity value of all subregions.
(5) by 1024 light intensity values obtained by step (4) and Intensity threshold I obtained by step (3)thCompare, obtain such as Fig. 3 institutes Show beam intensity ratio relatively figure.Keep light intensity value constant less than the subregion of threshold value and be more than or equal to the Labelling Regions of threshold value to mend by light intensity value Subregion is repaid, sectional image is compensated.Gained light intensity after DMD subregion is compensated successively in this specific implementation case The comparison figure of value and threshold value is as shown in Figure 3;The segmented phase distribution map of required compensation is as shown in Figure 4.
(6) compensation sectional image is loaded on DMD 5, the premenstrual beam collimation of incident beam expands module Lens 2, light beam spatial filter 3 and rear beam collimation are expanded after module lens 4 are expanded, and are irradiated to DMD 5 Above, it is necessary to which the corresponding light beam of subregion of compensation is reflected onto in the phase compensation block 6 of side light path, so as to occur π phase Difference changes, and return in beam splitter 7 together with light beam corresponding with retained subregion by preceding shrink beam module lens 8 and after shrink beam Module lens 9, the side for being irradiated to dichroscope 10 is reflected, and the reflected beams are saturating by preceding scanning galvanometer 11, preceding beam collimation Enter after mirror 12, rear light beam collimation lens 13, rear scanning galvanometer 14, preceding scan module lens 15 and rear scan module lens 16 aobvious Speck mirror 17, and focal plane forms final optical focus compensation hot spot in laboratory sample 18, and excite stronger fluorescence. Phase compensation block used is optical delay line in this specific implementation case.
(7) fluorescence excited after optical focus is compensated is emitted into microcobjective 17 out of laboratory sample 18, then Sequentially pass through rear scan module lens 16, preceding scan module lens 15, rear scanning galvanometer 14, rear light beam collimation lens 13, preceding light After beam collimation lens 12, preceding scanning galvanometer 11, dichroscope 10, optical filter 19, condenser lens 20 and spatial filter 21 Into photomultiplier 22 carry out light intensity detection, by scanning obtain DMD 5 loading compensation subregion compensate after Focal beam spot image, as shown in figure 5, the image O in this specific implementation casefThe corresponding light intensity value in position is 202.2.
Traditional optimization adaptive optics focusing technology enters the successive correction of line phase using spatial light modulator.Assuming that Spatial light modulator is divided into 32 × 32 subregions, each subregion changes the phase of correspondence light beam from 0 to 2 π successively with the interval of π/5 Position, so as to obtain the phase value with best calibration result.Assuming that image loading speed upper limit during spatial light modulator work For 60Hz, then the time required for completing an optical focus phase detection is:
And the image refresh rate upper limit of DMD used in the present invention is 22727Hz, 32 are equally classified as × 32 subregions, its complete a sub-beams focus on enhancing subregion judgement time be:
Need successive ignition computing due to optimizing adaptive optics focusing technology, complete time of light beam convergence correction compared with It is long.And the present invention utilize the quick image refresh rate of DMD, considerably reduce light beam focus on enhancing required for Processing time, the processing speed of optical focus compensation has been obviously improved it.
As seen from the above-described embodiment, adaptive optics of the present invention focus on interference compensation method and simple system, it is convenient, can After simple, quick serial light beam judges, the light intensity of target focus point is lifted about 1183%.Compared to utilization space light Modulator carries out gradually phasing, and the present invention can shorten correction time while focal beam spot central light strength is lifted, be Non- embedded fibers formula light science of heredity light stimulus provides more inexpensive more easily experimental technique, lifting with deep penetration real time imagery Conventional efficient.

Claims (10)

1. a kind of adaptive optics focuses on interference compensation method, it is characterised in that comprise the following steps:
1) focal plane of object lens does not place laboratory sample, and light beam focusing is carried out with the DMD (5) without loading subregion, Ideal focusing hot spot is obtained in the focal plane of object lens, the focusing center position O of ideal focusing hot spot is recordedf
2) laboratory sample is placed in the focal plane of object lens, light intensity detection is carried out with the DMD (5) without loading subregion, Record obtains focusing center position OfLight intensity value, be used as Intensity threshold Ith
3) reflecting surface of DMD (5) is divided into polylith region, using each region successively as target area, to target The reflected beams in region carry out phase compensation, and traversal regional carries out light intensity spy with the DMD (5) of loading subregion Survey, obtain the focusing center position O that regional corresponding record is arrivedfA series of light intensity values at place;
4) by each light intensity value and Intensity threshold IthIt is compared, and processing obtains judged result in the following ways:
If light intensity value is less than Intensity threshold Ith, then the corresponding region of the light intensity value is to be not required to phase compensation region;
If light intensity value is more than or equal to Intensity threshold Ith, then the corresponding region of the light intensity value is to need phase compensation region;
5) subregion will be compensated according to judged result and will be loaded on DMD and carries out light intensity detection, the shape in laboratory sample Final optics focus-compensating hot spot into after interference compensation, is O in focusing center positionfPlace inspires stronger fluorescence.
2. a kind of adaptive optics according to claim 1 focuses on interference compensation method, it is characterised in that:
The step 1) in light beam focus on be specifically:Laser launches light beam, after collimator and extender, in digital micromirror device Reflect, then focused on by object lens on part (5).
3. a kind of adaptive optics according to claim 1 focuses on interference compensation method, it is characterised in that:The step 3) Middle signified phase compensation is specifically referred to, and the phase difference that a numerical value is π is added in the former phase of light beam.
4. a kind of adaptive optics according to claim 1 focuses on interference compensation method, it is characterised in that:
The step 2), 3) and 5) in light intensity detection be specifically:Laser launches light beam, after collimator and extender, in number Reflect, then focused on by object lens on sample on word micro mirror element, sample carries fluorescent material, distortion is produced in sample and is dissipated Penetrate hot spot and inspire fluorescence, the fluorescence inspired is swept after lens focus with photomultiplier (22) and galvanometer again Retouch detection and obtain the fluoroscopic image that scattering hot spot is inspired, record focusing center position OfLight intensity value.
5. a kind of adaptive optics according to claim 1 focuses on interference compensation method, it is characterised in that:
The step 3) when being carried out light intensity detection with the DMD (5) of loading subregion and is specifically referred to light intensity detection, it is digital Itself is received the reflected beams produced after incident beam and adjusts reflection angle by the target area on micro mirror element, makes the reflected beams To side light path return after phase compensation and do not adjust in the reflected light path before reflection angle, while in addition to target area Other regions keep the reflected beams reflection angle and the step 2) light intensity detection when the reflected beams reflection angle it is identical.
6. a kind of adaptive optics according to claim 1 focuses on interference compensation method, it is characterised in that:
The step 5) specifically referred to according to judged result adjustment subregion:During by DMD, phase is needed to mend after judgement Repay region and itself is received to the reflected beams adjustment reflection angle produced after incident beam, the reflected beams is carried out to side light path Return and do not adjusted in the reflected light path before reflection angle after phase compensation, while phase compensation region is not required to after judging keeps anti- The reflection angle of irradiating light beam and the step 2) light intensity detection when the reflected beams reflection angle it is identical.
7. a kind of adaptive optics according to claim 1 focuses on interference compensation method, it is characterised in that:
The laboratory sample is but is not limited to vivo biological tissue, tissues in vitro, agar block containing bead etc..
8. focus on interference compensation system for implementing a kind of adaptive optics of claim 1 methods described, it is characterised in that:Bag Include laser (1), beam collimation and expand module, DMD (5), phase compensation block (6), beam splitter (7), shrink beam mould Block, scan module, dichroscope (10), microcobjective (17), laboratory sample (18) and light intensity detection module;Beam collimation is expanded Module arrangement is after laser (1), and laser launches the collimated module parallel that expands of light beam and expands after union space is filtered DMD (5) is mapped to, DMD (5) side exit end is equipped with phase compensation block (6), DMD (5) positive side exit end is equipped with beam splitter (7) and shrink beam module, and phase compensation block (6) is located at the side of beam splitter (7), number The side the reflected beams of word micro mirror element (5) are re-reflected into after phase compensation block (6) in beam splitter (7), digital micromirror device The positive side the reflected beams of part (5) are directly reflexed in beam splitter (7);Dichroscope (10) is provided with front of shrink beam module;Light beam is passed through Focused on after dichroscope (10) reflection through over-scanning module into microcobjective (17), laboratory sample (18) is located at microcobjective (17) on focal plane;The fluorescence inspired in laboratory sample (18) passes through dichroic after microcobjective (17) and scan module Mirror (10) is received by light intensity detection module and carries out light intensity detection.
9. a kind of adaptive optics according to claim 8 focuses on interference compensation system, it is characterised in that:Described light beam Collimator and extender module expands module lens (2), light beam spatial filter (3) and rear beam collimation including preceding beam collimation and expands mould Block lens (4);Preceding beam collimation expands module lens (2), light beam spatial filter (3) and rear beam collimation and expands module lens (4) front of laser (1) exit end is arranged in parallel in successively, and premenstrual beam collimation expands module lens to incident beam successively (2), light beam spatial filter (3) and rear beam collimation incide DMD after expanding that module lens (4) are parallel and expanding (5);
Described shrink beam module includes preceding shrink beam module lens (8) and rear shrink beam module lens (9);Preceding shrink beam module lens (8) Be arranged in parallel in the front side of beam splitter (7) successively with rear shrink beam module lens (9), the light beam of DMD (5) reflection according to Dichroscope is incided after secondary shrink beam parallel through beam splitter (7), preceding shrink beam module lens (8) shrink beam module lens (9) with after (10) side;
Described scan module include preceding scanning galvanometer (11), preceding light beam collimation lens (12), rear light beam collimation lens (13), after Scanning galvanometer (14), preceding scan module lens (15) and rear scan module lens (16);Preceding scanning galvanometer (11), preceding beam collimation Lens (12), rear light beam collimation lens (13), rear scanning galvanometer (14), preceding scan module lens (15) and rear scan module lens (16) be sequentially arranged in the front side of dichroscope (10), the light beam of dichroscope (10) reflection successively premenstrual scanning galvanometer (11), Preceding light beam collimation lens (12), rear light beam collimation lens (13), rear scanning galvanometer (14), preceding scan module lens (15) and after sweep Retouch and microcobjective (17) is incided after module lens (16);
Described light intensity detection module includes optical filter (19), condenser lens (20), spatial filter (21) and photoelectricity times Increase pipe (22);Optical filter (19), condenser lens (20), spatial filter (21) and photomultiplier (22) are sequentially arranged in The rear side of dichroscope (10), the fluorescence that laboratory sample (18) is sent successively through microcobjective (17), after scan module lens (16), preceding scan module lens (15), rear scanning galvanometer (14), rear light beam collimation lens (13), preceding light beam collimation lens (12), Preceding scanning galvanometer (11), dichroscope (10), optical filter (19), condenser lens (20) and spatial filter (21) enter afterwards Photomultiplier (22) carries out light intensity detection.
10. a kind of adaptive optics according to claim 8 focuses on interference compensation system, it is characterised in that:Described phase Position compensating module (6) includes but is not limited to optical delay line, spatial light modulator, phase delay chip.
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