CN107068592A - A kind of Electrostatic Absorption picks up chucking appliance system - Google Patents
A kind of Electrostatic Absorption picks up chucking appliance system Download PDFInfo
- Publication number
- CN107068592A CN107068592A CN201710111198.4A CN201710111198A CN107068592A CN 107068592 A CN107068592 A CN 107068592A CN 201710111198 A CN201710111198 A CN 201710111198A CN 107068592 A CN107068592 A CN 107068592A
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- China
- Prior art keywords
- meagre
- electrostatic absorption
- electrostatic
- plate
- positive
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67271—Sorting devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
- Electrostatic Separation (AREA)
Abstract
The present invention disclose a kind of Electrostatic Absorption pickup chucking appliance system, including can to the meagre Screening Platform screened, can to the meagre progress Electrostatic Absorption and the Electrostatic Absorption fixture of transfer on Screening Platform, can go what is destaticed to remove electrostatic platform meagre be electrostatically adsorbed.Specifically, Screening Platform includes to carry the negative plate objective table of meagre, and below negative plate objective table and the screening positive plate with positive charge；Electrostatic Absorption fixture is provided with the fixture positive plate with positive charge, goes electrostatic platform to include electrostatic objective table and underlying capacitor plate, and capacitor board can be to be passed through positive charge and negative electrical charge successively in 4T in the time cycle.Relative to prior art, the present invention can effectively solve the problem that the technical problem that nanoscale finished product is accurately moved, being capable of Effective selection finished product, effectively absorption finished product and the advantages of slow drop positioning, it is possible to increase production efficiency and guarantee finished product integrality.
Description
Technical field
The present invention relates to Electrostatic Absorption clamp art, more particularly to a kind of Electrostatic Absorption pickup chucking appliance system.
Background technology
In semiconductor fabrication techniques, the length and wide size of the small thin slice finished product such as monocrystalline silicon are generally in 2-10um scopes
It is interior, because the appearance and size of meagre is too small, if the breakage of meagre sheet border is easily caused by way of machinery is clamped, but
Be meagre appearance and size it is very few, easily cause clamping it is insecure and situations such as cause to release, therefore appearance and size compared with
Small meagre has more technical problem when being moved.
The content of the invention
The main object of the present invention is to propose that a kind of production efficiency is high and accurately move the pickup of the Electrostatic Absorption of meagre
Chucking appliance system, it is intended to solve smaller meagre of appearance and size in the prior art and be difficult to the technical problem moved.
To achieve the above object, a kind of Electrostatic Absorption pickup chucking appliance system proposed by the present invention, including：
Can be to the meagre Screening Platform screened；
Electrostatic Absorption and the Electrostatic Absorption fixture shifted can be carried out to meagre on the Screening Platform；
It can go what is destaticed to remove electrostatic platform meagre be electrostatically adsorbed；
The Screening Platform include carrying the negative plate objective table of meagre, below the negative plate objective table simultaneously
Screening positive plate with positive charge and the battery layers below the screening positive plate；The Electrostatic Absorption fixture is provided with
Fixture positive plate with positive charge, it is described to go electrostatic platform to include electrostatic objective table and underlying capacitor plate, institute
It can be alternately to be passed through positive charge and negative electrical charge in 4T in the time cycle to state capacitor board.
Preferably, the screening positive plate is the positive plate that several are separated from each other and electrically connected respectively with battery layers.
Preferably, several described positive plates can be arranged in array-like.
Preferably, it is provided between the positive plate and the battery layers for preventing positive plate from discharging the insulation of positive charge
Layer.
Preferably, the end face edge of the fixture positive plate towards the negative plate objective table, which is provided with, encloses edge, described to enclose edge
Meagre can be accommodated with fixture positive plate formation one and in open cavity.
Preferably, the opening port of the cavity, which is provided with, can close or open the protection door of the cavity.
Preferably, the protection door is pivoted located at the opening port edge and can swung around pivotal axis.
Preferably, the protection door can open or close the opening port along slide.
Preferably, the capacitor board can be passed through positive charge in time cycle 2T and lead in next time cycle 2T
Enter negative electrical charge.
Preferably, the period of time T is 10ms.
Technical solution of the present invention is by screening meagre piece progress sensing production of the positive plate to being positioned on negative plate objective table
Raw negative electrical charge, is then adsorbed by the fixture positive plate with positive charge and is moved, micro- finally by going electrostatic platform to realize
The negative electrical charge of thin slice is eliminated and slow and be accurately placed in specified location, so as to realize less meagre for appearance and size
Piece carries out screening pickup, absorption and moves, accurately places, and solves the meagre technical problem moved in the prior art.
Relative to prior art, the present invention can effectively solve the problem that the technical problem that nanoscale finished product is accurately moved, energy
The advantages of enough Effective selection finished products, effective absorption finished product and slow drop positioning, it is possible to increase production efficiency and guarantee finished product are complete
Whole property.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the accompanying drawing used required in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Structure according to these accompanying drawings obtains other accompanying drawings.
Fig. 1 is the structural representation of Screening Platform of the present invention；
Fig. 2 is the structural representation of Electrostatic Absorption fixture of the present invention；
Fig. 3 removes the structural representation of electrostatic platform for the present invention.
Drawing reference numeral explanation：
The realization, functional characteristics and advantage of the object of the invention will be described further referring to the drawings in conjunction with the embodiments.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the present invention, rather than whole embodiments.Base
Embodiment in the present invention, those of ordinary skill in the art obtained under the premise of creative work is not made it is all its
His embodiment, belongs to the scope of protection of the invention.
If it is to be appreciated that related in the embodiment of the present invention directionality indicate (such as up, down, left, right, before and after ...),
Then directionality indicate to be only used for explain relative position relation under a certain particular pose (as shown in drawings) between each part,
Motion conditions etc., if the particular pose changes, directionality indicates also correspondingly therewith to change.
If in addition, relating to the description of " first ", " second " etc. in the embodiment of the present invention, being somebody's turn to do " first ", " second " etc.
Description be only used for describing purpose, and it is not intended that indicating or implying its relative importance or implicit indicate indicated skill
The quantity of art feature.Thus, " first " is defined, at least one spy can be expressed or be implicitly included to the feature of " second "
Levy.In addition, the technical scheme between each embodiment can be combined with each other, but must be with those of ordinary skill in the art's energy
Based on enough realizations, when the combination appearance of technical scheme is conflicting or can not realize it will be understood that the knot of this technical scheme
Conjunction is not present, also not within the protection domain of application claims.
Referring to Fig. 1 to Fig. 3, the embodiment of the present invention proposes a kind of Electrostatic Absorption pickup chucking appliance system, and the system includes can be right
Meagre screened Screening Platform, can to meagre carry out Electrostatic Absorption and shifted Electrostatic Absorption fixture, can be right
Meagre be electrostatically adsorbed goes what is destaticed to remove electrostatic platform.
Referring to Fig. 1 to Fig. 3, specifically, in the embodiment of the present invention, the negative pole that Screening Platform includes carrying meagre is onboard
Thing platform 11, it is arranged at the lower section of negative plate objective table 11 and screening positive plate 12 with positive charge and positioned at screening positive plate
The battery layers 13 of lower section, screening positive plate 12 can be some positive poles for being separated from each other and independently being electrically connected with battery layers 14 respectively
Plate, and multiple positive plates can be arranged in array-like.The Electrostatic Absorption fixture of the embodiment of the present invention is towards negative plate loading
One end of platform 11 is provided with the fixture positive plate 22 with positive charge, end surface side of the fixture positive plate 22 towards negative plate objective table 11
Edge is provided with enclosing edge, and meagre can be accommodated and be open cavity 23 along being collectively forming one with fixture positive plate 22 by enclosing.In order to
Dropped so that cannot be easily caused meagre after 22 pairs of meagre Electrostatic Absorptions with negative electrical charge of fixture positive plate, the present invention is implemented
In example, can be set in the opening port of cavity 23 can close or open the protection door of cavity 23.In the present embodiment, protection door is pivotable
It can be swung located at opening port edge and around pivotal axis.In other embodiments of the invention, protection door can be carried out along chute
Slide that opening port is opened or closed.
Referring to Fig. 1 to Fig. 3, the operation principle of Electrostatic Absorption of embodiment of the present invention pickup chucking appliance system is：
After operating personnel are processed to meagre and finished in Screening Platform, meagre with negative electrical charge can then disperse
It is placed on the top surface of negative plate objective table 11, the lower section of negative plate objective table 11 is provided with for the meagre screening screened
Positive plate 12, when battery layers 14 are passed through positive charge to screening positive plate 12, meagre with negative electrical charge can then be screened
The attraction of positive plate 12 and gathered or arranged along certain rule.Preferably, in the present embodiment, it will can screen just
Pole plate 12 is set to the positive plate that several are separated from each other and are electrically connected respectively with battery layers 14, so, several phases
The battery lead plate mutually separated can be attracted and be arranged to meagre respectively.Several battery lead plates being separated from each other are set to
During the array-like of regular arrangement, then battery lead plate can attract meagre with negative electrical charge so that the arrangement of meagre
Arranged with positive plate consistent, so as to realize the screening and arrangement to meagre.Operating personnel can be by part positive plate
Pass to positive charge or positive plate is set to certain rule arrangement, such positive plate to the absorption of meagre and can be arranged more
Added with rule, it is easy to follow-up Electrostatic Absorption fixture for the absorption and transfer of meagre.
In addition, the present embodiment can be provided between positive plate and cell panel for preventing positive plate from discharging positive charge
Insulating barrier 13, so that electric charge release is less likely to occur the positive plate electrically connected respectively with battery layers 14, to ensure positive plate
For the Electrostatic Absorption validity of meagre.
When meagre be positioned on negative plate objective table 11 is attracted by positive plate and is arranged according to certain rule
After cloth, Electrostatic Absorption fixture is then moved to the top of negative plate objective table 11, because Electrostatic Absorption fixture is onboard towards negative pole
One end of thing platform 11 is provided with fixture positive plate 22, is passed through by power supply 21 to fixture positive plate 22 after positive charge, fixture positive pole
Plate 22 is with positive charge and meagre with negative electrical charge can be attracted and be adsorbed, so that meagre is adsorbed in folder
Has the bottom surface of positive plate 22.In the present embodiment, the end face edge of fixture positive plate 22 towards negative plate objective table 11, which is provided with, encloses
Edge, meagre and the cavity 23 with opening port can be accommodated with the formation of fixture positive plate 22 one by enclosing edge, so that micro-
After thin slice is adsorbed by fixture positive plate 22, it can fall into inside open cavity 23, after being so easy to meagre can carry out
Phase is neat and specification place.
Meanwhile, in the present embodiment, the protection door of cavity 23, the protection can be closed or open by being provided with the opening port of cavity 23
Door is pivotably arranged at opening port edge and can swung around pivotal axis.Before meagre is adsorbed by fixture positive plate 22,
The opening port of cavity 23 is opened by protection door, and so meagre can pass through opening port and enter inside cavity 23.When micro-
Thin slice enters after cavity 23, and protection door can be overturn around pivotal axis, so as to the opening port of cavity 23 be covered, to avoid
Meagre is dropped in transfer process.In other embodiments of the invention, protection door may be configured as entering line slip along chute,
So as to be opened or be closed opening port.
After 23 inside of cavity is adsorbed to for meagre, Electrostatic Absorption fixture is moved to the top of electrostatic platform, then
Protection door is subjected to the covering for being powered and opening to opening port.Because being arranged at the capacitor board 32 of the lower section of electrostatic objective table 31 in the time
Positive charge and negative electrical charge are alternately passed through in cycle 4T, wherein period of time T is 10ms.Specifically, capacitor board 32 can be in week time
Positive charge is passed through in phase 2T, negative electrical charge is passed through in next time cycle 2T, is then passed through in next one time cycle 2T
Positive charge, the positive charge and negative electrical charge for being so passed through capacitor board 32 is alternately passed through successively.Also, when Electrostatic Absorption fixture is moved to
When going on electrostatic objective table 31, the positive charge of fixture positive plate 22 is subjected to disconnection, so that with the meagre of negative electrical charge
Piece declines under gravity., can be to meagre generation suction, so that meagre when capacitor board 32 is passed into positive charge
Decline, and the conversion of capacitor board 32 is passed through after negative electrical charge, capacitor board 32 can produce repulsion to the decline of meagre so that meagre is most
It is slow eventually to drop on the surface of electrostatic objective table 31, so as to realize the transfer of meagre.
The Electrostatic Absorption pickup chucking appliance system of the embodiment of the present invention is positioned over negative plate loading by screening 12 pairs of positive plate
Meagre on platform 11 carries out sensing and produces negative electrical charge, is then adsorbed and is removed by the fixture positive plate 22 with positive charge
Move, finally by going electrostatic platform to realize, the negative electrical charge of meagre is eliminated and slow and be accurately placed in ad-hoc location, from
And realize and move, accurately place for less meagre progress screening pickup of appearance and size, absorption, solve in the prior art
The meagre technical problem moved.
The preferred embodiments of the present invention are the foregoing is only, are not intended to limit the scope of the invention, it is every at this
Under the design of invention, the equivalent structure transformation made using description of the invention and accompanying drawing content, or directly/it is used in indirectly
He is included in the scope of patent protection of the present invention related technical field.
Claims (10)
1. a kind of Electrostatic Absorption picks up chucking appliance system, it is characterised in that including：
Can be to the meagre Screening Platform screened；
Electrostatic Absorption and the Electrostatic Absorption fixture shifted can be carried out to meagre on the Screening Platform；
It can go what is destaticed to remove electrostatic platform meagre be electrostatically adsorbed；
The Screening Platform is including that can carry the negative plate objective table of meagre, below the negative plate objective table and carries
The screening positive plate of positive charge and the battery layers below the screening positive plate；The Electrostatic Absorption fixture is provided with and carried
The fixture positive plate of positive charge, it is described to go electrostatic platform to include electrostatic objective table and underlying capacitor plate, the electricity
It can be alternately to be passed through positive charge and negative electrical charge in 4T in the time cycle to hold plate.
2. Electrostatic Absorption as claimed in claim 1 picks up chucking appliance system, it is characterised in that the screening positive plate is several
The positive plate for being separated from each other and being electrically connected respectively with battery layers.
3. Electrostatic Absorption as claimed in claim 2 picks up chucking appliance system, it is characterised in that several described positive plates can be in battle array
Column-shaped is arranged.
4. Electrostatic Absorption as claimed in claim 3 picks up chucking appliance system, it is characterised in that the positive plate and the battery layers
Between be provided with for prevent positive plate discharge positive charge insulating barrier.
5. Electrostatic Absorption as claimed in claim 1 picks up chucking appliance system, it is characterised in that the fixture positive plate is described in
The end face edge of negative plate objective table can accommodate meagre with fixture positive plate formation one and be in provided with edge, the edge of enclosing is enclosed
Open cavity.
6. Electrostatic Absorption as claimed in claim 5 picks up chucking appliance system, it is characterised in that the opening port of the cavity is provided with can
Close or open the protection door of the cavity.
7. Electrostatic Absorption as claimed in claim 6 picks up chucking appliance system, it is characterised in that the protection door is pivoted located at described
Opening port edge can simultaneously be swung around pivotal axis.
8. Electrostatic Absorption as claimed in claim 6 picks up chucking appliance system, it is characterised in that the protection door can be along slide
The opening port is opened or closed.
9. Electrostatic Absorption as claimed in claim 1 picks up chucking appliance system, it is characterised in that the capacitor board can be in the time cycle
Positive charge is passed through in 2T and negative electrical charge is passed through in next time cycle 2T.
10. Electrostatic Absorption as claimed in claim 1 picks up chucking appliance system, it is characterised in that the period of time T is 10ms.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710111198.4A CN107068592B (en) | 2017-02-28 | 2017-02-28 | Electrostatic adsorption pickup clamp system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710111198.4A CN107068592B (en) | 2017-02-28 | 2017-02-28 | Electrostatic adsorption pickup clamp system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107068592A true CN107068592A (en) | 2017-08-18 |
| CN107068592B CN107068592B (en) | 2023-07-25 |
Family
ID=59623053
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710111198.4A Active CN107068592B (en) | 2017-02-28 | 2017-02-28 | Electrostatic adsorption pickup clamp system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107068592B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114272839B (en) * | 2021-12-29 | 2024-05-31 | 江苏晶河电子科技有限公司 | Preparation method and preparation system of inorganic conductive glue |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1178392A (en) * | 1996-09-19 | 1998-04-08 | 株式会社日立制作所 | Electrostatic chucks and method and apparatus for treating samples using the chucks |
| US20070007237A1 (en) * | 2005-07-05 | 2007-01-11 | National Taiwan University | Method for self-assembling microstructures |
| US20120027557A1 (en) * | 2009-12-17 | 2012-02-02 | Cooledge Lighting, Inc. | Method and electrostatic transfer stamp for transferring semiconductor dice using electrostatic transfer printing techniques |
| CN102473668A (en) * | 2009-07-02 | 2012-05-23 | 创意科技股份有限公司 | Electrostatic attracting structure and fabricating method therefor |
-
2017
- 2017-02-28 CN CN201710111198.4A patent/CN107068592B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1178392A (en) * | 1996-09-19 | 1998-04-08 | 株式会社日立制作所 | Electrostatic chucks and method and apparatus for treating samples using the chucks |
| US20070007237A1 (en) * | 2005-07-05 | 2007-01-11 | National Taiwan University | Method for self-assembling microstructures |
| CN102473668A (en) * | 2009-07-02 | 2012-05-23 | 创意科技股份有限公司 | Electrostatic attracting structure and fabricating method therefor |
| US20120027557A1 (en) * | 2009-12-17 | 2012-02-02 | Cooledge Lighting, Inc. | Method and electrostatic transfer stamp for transferring semiconductor dice using electrostatic transfer printing techniques |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114272839B (en) * | 2021-12-29 | 2024-05-31 | 江苏晶河电子科技有限公司 | Preparation method and preparation system of inorganic conductive glue |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107068592B (en) | 2023-07-25 |
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