CN107061315A - 一种分子泵 - Google Patents
一种分子泵 Download PDFInfo
- Publication number
- CN107061315A CN107061315A CN201710344633.8A CN201710344633A CN107061315A CN 107061315 A CN107061315 A CN 107061315A CN 201710344633 A CN201710344633 A CN 201710344633A CN 107061315 A CN107061315 A CN 107061315A
- Authority
- CN
- China
- Prior art keywords
- pump
- molecular pump
- movable vane
- main shaft
- rotor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004804 winding Methods 0.000 claims abstract description 21
- 229910001069 Ti alloy Inorganic materials 0.000 claims abstract description 6
- 238000006073 displacement reaction Methods 0.000 claims description 31
- 238000009434 installation Methods 0.000 claims description 21
- 239000000956 alloy Substances 0.000 claims description 4
- 238000005086 pumping Methods 0.000 claims description 4
- 230000005611 electricity Effects 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 230000006835 compression Effects 0.000 abstract description 3
- 238000007906 compression Methods 0.000 abstract description 3
- 230000033001 locomotion Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 229910000831 Steel Inorganic materials 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 229910000838 Al alloy Inorganic materials 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 229910001256 stainless steel alloy Inorganic materials 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
- F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
- F04D25/0613—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump the electric motor being of the inside-out type, i.e. the rotor is arranged radially outside a central stator
- F04D25/064—Details of the rotor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
- F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
- F04D25/0613—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump the electric motor being of the inside-out type, i.e. the rotor is arranged radially outside a central stator
- F04D25/0646—Details of the stator
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/053—Shafts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710344633.8A CN107061315B (zh) | 2017-05-16 | 2017-05-16 | 一种分子泵 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710344633.8A CN107061315B (zh) | 2017-05-16 | 2017-05-16 | 一种分子泵 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN107061315A true CN107061315A (zh) | 2017-08-18 |
CN107061315B CN107061315B (zh) | 2023-06-27 |
Family
ID=59609465
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201710344633.8A Active CN107061315B (zh) | 2017-05-16 | 2017-05-16 | 一种分子泵 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN107061315B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108678975A (zh) * | 2018-07-17 | 2018-10-19 | 中国工程物理研究院机械制造工艺研究所 | 一种抗振动分子泵 |
CN110836774A (zh) * | 2019-12-16 | 2020-02-25 | 四川九天真空科技有限公司 | 一种电磁轴承测试工装 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2411820A1 (en) * | 2002-03-05 | 2003-09-05 | Communications Research Laboratory, Independent Administrative Instituti Institution | Method and apparatus for generation of molecular beam |
CN102242721A (zh) * | 2011-06-21 | 2011-11-16 | 北京中科科仪技术发展有限责任公司 | 一种磁悬浮分子泵及其制造方法 |
CN207004861U (zh) * | 2017-05-16 | 2018-02-13 | 四川九天真空科技股份有限公司 | 一种分子泵 |
-
2017
- 2017-05-16 CN CN201710344633.8A patent/CN107061315B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2411820A1 (en) * | 2002-03-05 | 2003-09-05 | Communications Research Laboratory, Independent Administrative Instituti Institution | Method and apparatus for generation of molecular beam |
CN102242721A (zh) * | 2011-06-21 | 2011-11-16 | 北京中科科仪技术发展有限责任公司 | 一种磁悬浮分子泵及其制造方法 |
CN207004861U (zh) * | 2017-05-16 | 2018-02-13 | 四川九天真空科技股份有限公司 | 一种分子泵 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108678975A (zh) * | 2018-07-17 | 2018-10-19 | 中国工程物理研究院机械制造工艺研究所 | 一种抗振动分子泵 |
CN110836774A (zh) * | 2019-12-16 | 2020-02-25 | 四川九天真空科技有限公司 | 一种电磁轴承测试工装 |
Also Published As
Publication number | Publication date |
---|---|
CN107061315B (zh) | 2023-06-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20230802 Address after: No. 299, section 4, Shehua North Road, Shunqing District, Nanchong City, Sichuan Province Patentee after: Zhongke Jiuwei Technology Co.,Ltd. Address before: To help the industrial park of Sichuan city in Nanchong Province in Xichong County Patentee before: SICHUAN JIUTIAN VACUUM TECHNOLOGY Co.,Ltd. |
|
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: No. 299, section 4, Shehua North Road, Shunqing District, Nanchong City, Sichuan Province Patentee after: Zhongke Jiuwei Technology Co.,Ltd. Country or region after: China Address before: No. 299, section 4, Shehua North Road, Shunqing District, Nanchong City, Sichuan Province Patentee before: Zhongke Jiuwei Technology Co.,Ltd. Country or region before: China |