CN107044430B - Vacuum pump and rotor and stator used therein - Google Patents
Vacuum pump and rotor and stator used therein Download PDFInfo
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- CN107044430B CN107044430B CN201611217564.6A CN201611217564A CN107044430B CN 107044430 B CN107044430 B CN 107044430B CN 201611217564 A CN201611217564 A CN 201611217564A CN 107044430 B CN107044430 B CN 107044430B
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- stator
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- vacuum pump
- axial direction
- blades
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
Abstract
Provided are a vacuum pump which ensures the strength of a rotor blade and inhibits the damage of a rotor and a stator, and the rotor and the stator used in the vacuum pump. A vacuum pump (1) is provided with a rotor (20) and a stator (70), wherein the rotor (20) is provided with rotor blades (23), the rotor blades (23) are connected to a rotor shaft (21) through a circular ring part (22), and the stator (70) is provided with stator blades (72) arranged between the rotor blades (23). The annular portion (22) is formed to have a substantially uniform thickness in the rotor radial direction (R). The stator (70) is in contact with the annular portion (22) when it is in contact with the rotor (20) due to flexural deformation in the rotor axial direction (A).
Description
Technical Field
The present invention relates to a vacuum pump and a rotor and a stator used for the same, and more particularly, to a vacuum pump that can be used in a pressure range from a low vacuum to an ultrahigh vacuum, and a rotor and a stator used for the same.
Background
In order to avoid the influence of dust in air and the like in the manufacture of semiconductors such as memories and integrated circuits, it is necessary to dope (ドーピング) or etch a high-purity semiconductor substrate (wafer) in a chamber in a high vacuum state, and a vacuum pump such as a composite pump in which a turbo molecular pump and a spiral groove pump are combined is used for exhaust in the chamber.
As such a vacuum pump, for example, a vacuum pump is known which includes a rotor having rotor blades provided in a plurality of stages in a direction of a rotation axis of the rotor, and a stator having a plurality of stator blades provided between the rotor blades in the plurality of stages. In such a vacuum pump, the rotor blade is rotated at a high speed relative to the stator blade, and the gas sucked through the suction port is evacuated.
However, if the stator sinks to the downstream side of the vacuum exhaust by its own weight and is deflected, the stator may contact the rotor and be broken.
In order to avoid contact between the stator and the rotor, patent document 1 discloses a vacuum pump including rotor blades each including an annular portion provided continuously with the rotor and having an annular groove formed on an upper surface thereof, and a wing portion extending radially outward from the annular portion. In such a vacuum pump, only the portion in which the circular ring portion is recessed becomes difficult to contact the inner circumferential edge of the stator and the rotor blade.
Patent document 1: japanese patent laid-open publication No. 2015-135074.
However, in the vacuum pump obtained as described above, stress concentration occurs in the annular groove of the rotor blade during the operation of the pump, and the blade portion may be broken at the annular groove and scattered into the pump, thereby causing a failure of the vacuum pump. Further, when the stator vane is largely deflected toward the downstream side of the vacuum exhaust by its own weight or is largely deflected toward the upstream side of the vacuum exhaust by opening the vacuum pump to the air, the stator vane and the rotor vane are intermittently (discontinuously) contacted with each other, and an excessive impact may be transmitted to the stator vane and the rotor vane and easily broken.
Disclosure of Invention
Therefore, the present invention is to solve the problem that the damage of the rotor and the stator is suppressed to cause the problem to be solved.
The present invention has been made to achieve the above object, and an aspect of the invention 1 provides a vacuum pump including a rotor and a stator, wherein the rotor includes a rotor shaft and rotor blades, the rotor blades are connected to the rotor shaft via at least a circular ring portion, and are formed in multiple stages in a rotor axial direction, the stator includes stator blades arranged between the rotor blades, and gas is discharged by rotating the rotor blades relative to the stator blades, and the stator is in contact with the circular ring portion when the stator is in contact with the rotor due to flexural deformation in the rotor axial direction.
According to this configuration, the stator contacts the annular portion when being deflected in the rotor axial direction, and thus damage to the rotor and the stator due to contact between the rotor blades and the stator blades can be suppressed.
The invention described in claim 2 provides a vacuum pump in which, in the structure of the vacuum pump described in claim 1, the stator includes a receiving portion that is provided on an inner peripheral side of the stator vane and that comes into contact with the annular portion when coming into contact with the rotor due to flexural deformation in the rotor axial direction.
According to this configuration, since the stator contacts the annular portion via the receiving portion, contact between the rotor blade and the stator blade is suppressed, and therefore, damage to the rotor and the stator can be further suppressed.
The invention described in claim 3 provides a vacuum pump in which, in the structure of the vacuum pump described in claim 2, the receiving portion is an inner peripheral side edge portion of the stator.
According to this configuration, since the inner peripheral side edge portion of the stator contacts the annular portion, the contact between the stator vanes and the rotor vanes is suppressed, and therefore, the breakage of the stator can be further suppressed.
The invention described in claim 4 provides a vacuum pump in which, in addition to the structure of the vacuum pump described in claim 3, the inner peripheral edge portion is formed to be inclined toward the upper stage side in the rotor axial direction.
According to this structure, the contact between the stator vane and the rotor vane is suppressed, and the rigidity of the stator is increased, so that the bending of the stator can be suppressed.
The invention described in claim 5 provides a vacuum pump in which, in the structure of the vacuum pump described in claim 2, the receiving portion is a protruding portion that protrudes from an inner peripheral edge of the stator toward an upper stage side in the rotor axial direction.
According to this configuration, since the protruding portion is provided so as to protrude toward the upper stage side in the rotor axial direction, contact between the stator vane and the rotor vane on the upper stage side in the rotor axial direction is suppressed, and therefore, breakage of the stator can be further suppressed.
The invention described in claim 6 provides a vacuum pump in which, in the structure of the vacuum pump described in claim 2, the receiving portion is a protruding portion that protrudes from an inner peripheral edge of the stator toward a lower stage side in the rotor axial direction.
According to this configuration, since the protruding portion is provided so as to protrude toward the lower side in the rotor shaft direction, contact between the stator vane and the rotor vane on the lower side in the rotor shaft direction is suppressed, and therefore, breakage of the stator can be further suppressed.
An invention described in claim 7 provides a vacuum pump in which, in the structure of the vacuum pump according to claim 1, the stator vane is in contact with the annular portion when the stator vane is in contact with the rotor due to flexural deformation in the rotor axial direction.
According to this configuration, since the stator vanes are prevented from contacting the rotor vanes, damage to the rotor and the stator due to contact between the rotor vanes and the stator vanes can be suppressed.
An invention described in claim 8 provides a vacuum pump in which the stator is manufactured by press molding in addition to the structure of the vacuum pump described in any one of claims 1 to 7.
With this configuration, the stator can be easily manufactured in a short period of time.
An invention described in claim 9 provides a vacuum pump in which, in addition to the structure of the vacuum pump described in any one of claims 1 to 8, the annular portion and the stator are provided at least at the lowermost stages.
With this configuration, it is possible to suppress damage to the stator, which is likely to be reduced in strength by press molding.
The invention described in claim 10 provides a rotor used for the vacuum pump described in any one of claims 1 to 9.
According to this configuration, the stator contacts the annular portion, and thus damage to the rotor and the stator due to contact between the rotor blades and the stator blades can be suppressed.
The invention described in claim 11 provides a stator used for the vacuum pump described in any one of claims 1 to 10.
According to this configuration, the stator contacts the annular portion, and thus damage to the rotor and the stator due to contact between the rotor blades and the stator blades can be suppressed.
The vacuum pump according to the present invention is configured such that the stator contacts the annular portion when the stator is deflected in the rotor axial direction, thereby suppressing damage to the rotor and the stator due to contact between the rotor blades and the stator blades.
Drawings
Fig. 1 is a sectional view showing a vacuum pump according to embodiment 1 of the present invention.
Fig. 2 is a plan view showing the stator.
Fig. 3 is a perspective view showing the stator of fig. 2.
Fig. 4 is an enlarged view of a main portion showing the stator and the rotor of fig. 1.
Fig. 5 is a schematic view showing a state in which the stator of fig. 4 is deflected toward the vacuum exhaust downstream side.
Fig. 6 is a schematic view showing a state in which the stator of fig. 4 is deflected toward the upstream side of vacuum exhaust.
Fig. 7 is a perspective view showing a stator used in a vacuum pump according to embodiment 2 of the present invention.
Fig. 8 is a schematic view showing a state in which the stator of fig. 7 is deflected toward the vacuum exhaust downstream side.
Fig. 9 is a schematic view showing a state in which the stator of fig. 7 is deflected toward the upstream side of vacuum exhaust.
Fig. 10 is a schematic view showing a modification of the stator of fig. 7.
Fig. 11 is a perspective view showing a stator used in a vacuum pump according to embodiment 3 of the present invention.
Fig. 12 is an enlarged view of a main portion of the stator and the rotor shown in fig. 11.
Fig. 13 is a plan view and a side view showing a modification of the stator vane.
Detailed Description
The present invention has been made to achieve the object of securing the strength of rotor blades and suppressing the damage of the rotor and the stator, and is achieved by a vacuum pump including a rotor and a stator, the rotor including a rotor shaft and rotor blades, the rotor blades being connected to the rotor shaft via at least a circular ring portion and being formed in a plurality of stages in the rotor axial direction, the stator including stator blades arranged between the rotor blades and being configured to discharge gas by rotating the rotor blades relative to the stator blades, wherein the stator is configured to contact the circular ring portion when contacting the rotor due to flexural deformation in the rotor axial direction.
[ examples ] A method for producing a compound
A vacuum pump 1 according to embodiment 1 of the present invention will be described below with reference to the drawings. In the following embodiments, when the number, numerical value, amount, range, and the like of the constituent elements are mentioned, the number is not limited to a specific number unless it is specifically stated or it is clearly limited to a specific number in principle, and may be equal to or greater than or equal to the specific number.
In addition, when referring to the shape and positional relationship of the constituent elements and the like, unless otherwise explicitly stated or clearly understood from the principle, the case of substantially approximating or similar to the shape and the like is included.
In the drawings, the features may be exaggerated for easy understanding of the features, and the dimensional ratios of the components are not limited to the actual ones. In the following terms "upper" and "lower", the suction port side and the discharge port side in the axial direction of the rotor correspond to the upper side and the lower side, respectively.
Fig. 1 is a longitudinal sectional view showing a vacuum pump 1. The vacuum pump 1 is a compound pump including a turbo-molecular pump mechanism PA disposed in a substantially upper half portion and a spiral groove pump mechanism PB disposed in a substantially lower half portion.
The vacuum pump 1 includes a casing 10, a rotor 20, a drive motor 30, and a stator pole 40, wherein the rotor 20 has a rotor shaft 21 rotatably supported in the casing 10, the drive motor 30 rotates the rotor shaft 21, and the stator pole 40 houses a part of the rotor shaft 21 and the drive motor 30.
The case 10 is formed in a cylindrical shape. At the upper end of the casing 10, a gas suction port 11 is formed. The case 10 is mounted on a vacuum vessel such as a chamber of a semiconductor manufacturing apparatus not shown in the figure via an upper flange 12. The case 10 is fixed to the base 50 in a state of being placed on the base 50.
The rotor 20 includes a rotor shaft 21 and rotor blades 23 provided in a state of being connected to the rotor shaft 21 via a rotor flange 27 and an annular portion 22, which will be described later. The rotor blades 23 are arranged concentrically with respect to the axial center of the rotor shaft 21. In the present embodiment, 5 stages of rotor blades 23 are provided. Hereinafter, the axial direction of the rotor shaft 21 is referred to as "rotor axial direction a", and the radial direction of the rotor shaft 21 is referred to as "rotor radial direction R".
The rotor blade 23 is formed of a piece inclined at a predetermined angle, and is integrally formed on the upper outer circumferential surface of the rotor shaft 21 via a rotor flange 27 and an annular portion 22. Further, the rotor blades 23 are provided in plurality radially about the axis of the rotor shaft 21. The rotor blade 23 is set to have a length gradually shorter from the upper stage side to the lower stage side in the rotor axial direction a, that is, from the upper side to the lower side in the rotor axial direction a.
The upper and lower portions of the rotor shaft 21 are inserted into the bottom-contact bearing 24. When the rotor shaft 21 cannot be controlled, the rotor shaft 21 rotating at a high speed contacts the bottom-contact bearing 24 to prevent damage to the vacuum pump 1.
The rotor 20 is integrally attached to the rotor shaft 21 by inserting a bolt 26 into the rotor flange 27 and screwing it into the shaft flange 28 in a state where the upper portion of the rotor shaft 21 is inserted into the boss hole 25. The rotor 20 includes a rotor cylindrical portion 29 extending in the rotor axial direction a.
The drive motor 30 includes a motor rotor 31 and a motor stator 32, the motor rotor 31 is attached to the outer periphery of the rotor shaft 21, and the motor stator 32 is disposed so as to surround the motor rotor 31. The motor stator 32 is connected to a control unit, not shown in the figures, by which the rotation of the rotor 20 is controlled.
The stator post 40 is fixed to the base 50 via a bolt 41 in a state of being placed on the base 50.
A gas discharge port 51 is formed at a lower side of the base 50. The gas discharge port 51 is connected to communicate with an auxiliary pump not shown in the figure. An O-ring 52 is sandwiched between the housing 10 and the base 50. A spiral stator 54 having a spiral groove portion 53 engraved on an inner peripheral surface is mounted on the base portion 50.
The rotor shaft 21 is contactlessly supported by a magnetic bearing 60. The magnetic bearing 60 includes radial electromagnets 61 and axial electromagnets 62. The radial electromagnet 61 and the axial electromagnet 62 are connected to a control unit not shown in the figure.
The control unit controls the excitation currents of the radial electromagnet 61 and the axial electromagnet 62 based on the detection values of a radial displacement sensor and an axial displacement sensor 62a, which are not shown, and thereby supports the rotor shaft 21 in a floating state at a predetermined position.
A 5-stage stator 70 is provided on the inner periphery of the casing 10 in the rotor axial direction a. The stators 70 are alternately stacked with the supports 71. The stator 70 includes a stator vane 72 disposed between the rotor vanes 23 and 23. The length of the stator vane 72 is set to be gradually shorter from above to below in the rotor axial direction a.
The turbo-molecular pump mechanism PA transfers the gas sucked into the casing 10 through the gas suction port 11 from above to below in the rotor axis direction a by the rotation of the rotor blades 23, and transfers the gas to the screw groove pump mechanism PB.
The screw groove pump mechanism PB compresses the gas transferred from the gas suction port 11 to the lower side in the rotor axial direction a by a drag effect generated by the high-speed rotation of the rotor cylindrical portion 29, and transfers the compressed gas to the gas discharge port 51. Specifically, the gas is transferred to the gap between the rotor cylindrical portion 29 and the helical stator 54, compressed in the helical groove portion 53, and transferred to the gas discharge port 51.
Next, the structure of the stator 70 will be described with reference to fig. 2 to 4. Fig. 2 is a plan view showing the stator 70. Fig. 3 is a perspective view showing the stator 70. Fig. 4 is an enlarged view of a main portion of the rotor 20 and the stator 70.
The stator 70 is formed in a fan shape, and two stators 70 are arranged in a ring shape and arranged in the housing 10. The stator vanes 72 are arranged at equal intervals in the circumferential direction C of the stator 70. The stator 70 includes an inner peripheral edge 73 and an outer peripheral edge 74 disposed at both ends of the stator vane 72. In the stator 70 according to the present embodiment, the inner peripheral edge portion 73 functions as a receiving portion. The outer peripheral edge portion 74 is sandwiched between the supports 71 in the rotor axial direction a, whereby the stator 70 is positioned at a predetermined position.
The stator vanes 72 are provided in plurality radially around the center of the stator 70. The stator vane 72 is formed of a sheet inclined in the direction opposite to the rotor vane 23. The elevation angle of the stator vane 72 is adjusted corresponding to the arrangement position of the stator 70. Generally, the angle of elevation of the stator vane 72 decreases from the upper side to the lower side in the rotor axial direction a.
Generally, the stator 70 is manufactured by cutting or press molding. Since the stator 70 disposed above the rotor axis a is required to have a thickness larger than that of the stator 70 disposed below the rotor axis a, the stator is manufactured by cutting from a base material. On the other hand, the stator 70 disposed below the rotor axis a is not necessarily thicker than the stator 70, and is therefore manufactured by press molding in many cases from the viewpoint of cost.
The annular portion 22 is formed to have a substantially uniform thickness in the rotor radial direction R. The annular portion 22 does not have to be broken due to stress concentration, and may be formed to have the same thickness, for example, tapered from the inside toward the outside in the rotor radial direction R. The inner circumference of the stator vane 72 is preferably arranged further inward in the rotor radial direction R than the outer circumference of the annular portion 22. That is, the outer circumferential end 22a of the annular portion 22 and the inner circumferential end 72a of the stator vane 72 are preferably arranged so as to overlap at least partially when viewed in the rotor axial direction a. This can suppress the backflow of gas.
Next, the stator 70 will be described with reference to fig. 5 and 6. Fig. 5 is a schematic view showing a state in which the stator 70 is deflected toward the vacuum exhaust downstream side. Fig. 6 is a schematic view showing a state in which the stator 70 is deflected toward the upstream side of the vacuum exhaust.
As shown in fig. 5, when the stator 70 is deflected downward in the rotor axial direction a, i.e., toward the vacuum exhaust downstream side, due to its own weight or the like, the inner peripheral side edge portion 73 comes into contact with the annular portion 22 on the vacuum exhaust downstream side before the stator vanes 72 come into contact with the rotor vanes 23. The annular portion 22 is continuous in the circumferential direction of the rotor 20, and the inner circumferential side edge portion 73 and the annular portion 22 are continuously in contact. Thus, even when the stator 70 is deflected to the vacuum exhaust downstream side, the contact between the rotor blades 23 and the stator blades 72 is avoided, and the annular portion 22 and the inner peripheral edge portion 73 are gently contacted.
Further, as shown in fig. 6, when the stator 70 is bent upward in the rotor axial direction a, that is, on the upstream side of the vacuum exhaust gas, for example, by opening the vacuum pump 1 to the air, the stator vane 72 contacts the annular portion 22 on the upstream side of the vacuum exhaust gas before the stator vane 72 contacts the rotor vane 23. The stator vanes 72 are intermittently in contact with respect to the circular ring portion 22. Thus, when the stator 70 is deflected toward the upstream side of the vacuum exhaust, the stator blades 72 are intermittently in contact with the annular portion 22, as compared with the case where the rotor blades 23 and the stator blades 72 are intermittently in contact with each other as in the conventional art, and therefore, the impact between the rotor 20 and the stator 70 can be slightly reduced.
Further, the above-described structure is preferably applied to at least each of the annular portion 22 and the stator 70 of the lowest stage disposed below the rotor axial direction a, including the annular portion 22 and the stator 70 of the lowest stage. This is because the stator 70 disposed below the rotor axis a tends to be lower in strength than the stator 70 disposed above the rotor axis a, and therefore, it is valuable to prevent the rotor blades 23 and the stator blades 72 from intermittently contacting each other as in the conventional case.
Next, a stator 70 used for a vacuum pump according to embodiment 2 of the present invention will be described with reference to fig. 7 to 10. Note that the same reference numerals are given to the same structure of the stator 70 of the present embodiment as the stator 70 of embodiment 1, and redundant description is omitted. Fig. 7 is a perspective view showing a stator 70 used in a vacuum pump according to embodiment 2 of the present invention. Fig. 8 is a schematic view showing a state in which the stator 70 of fig. 7 is deflected toward the vacuum exhaust downstream side. Fig. 9 is a schematic view showing a state in which the stator 70 of fig. 7 is deflected toward the upstream side of vacuum exhaust. Fig. 10 is a schematic view showing a modification of the stator 70 of fig. 7.
The stator 70 includes a receiving portion 77, the receiving portion 77 is composed of a downward projecting portion 75 and an upward projecting portion 76, the downward projecting portion 75 is provided to project downward in the rotor axial direction a from the inner peripheral side edge portion 73 (provided in a projecting state), and the upward projecting portion 76 is provided to project upward in the rotor axial direction a from the inner peripheral side edge portion 73. The downward protrusions 75 and the upward protrusions 76 are alternately arranged in the circumferential direction C of the stator 70.
As shown in fig. 8, when the stator 70 is deflected toward the vacuum exhaust downstream side, the downward projecting portion 75 contacts the annular portion 22 on the vacuum exhaust downstream side before the stator vane 72 contacts the rotor vane 23. Thereby, even when the stator 70 is deflected to the vacuum exhaust downstream side, contact between the rotor blades 23 and the stator blades 72 is avoided.
As shown in fig. 9, when the stator 70 is deflected toward the upstream side of the vacuum exhaust, the upward protruding portion 76 contacts the annular portion 22 on the upstream side of the vacuum exhaust before the stator vane 72 contacts the rotor vane 23. Thus, even when the stator 70 is deflected toward the upstream side of the vacuum exhaust, contact between the rotor blades 23 and the stator blades 72 is avoided.
Further, the downward projecting portion 75 and the upward projecting portion 76 are formed by chamfering or rounding (R processing) the corner portion contacting the annular portion 22, or by grinding the surface contacting the annular portion 22, and therefore, even when the rotor 20 and the stator 70 are in contact with each other, resistance at the time of contact is reduced, and the impact at the time of contact can be further alleviated. In addition, the downward projecting portion 75 and the upward projecting portion 76 are not limited to being provided independently, and may be provided integrally as shown in fig. 10.
Next, a stator 70 of a vacuum pump used in embodiment 3 of the present invention will be described with reference to fig. 11 and 12. Note that the same reference numerals are given to the same structure of the stator 70 of the present embodiment as the stator 70 of embodiment 1, and redundant description is omitted. Fig. 11 is a perspective view showing a stator 70 used in a vacuum pump according to embodiment 3 of the present invention. Fig. 12 is an enlarged view of a main portion of the stator 70 and the rotor 20 shown in fig. 11.
The stator 70 includes a receiving portion 78 formed by bending the inner peripheral edge portion 73 upward in the rotor axial direction a. The receiving portion 78 is provided continuously in the circumferential direction C of the stator 70.
When the stator 70 is deflected to the vacuum exhaust downstream side, the lower end 78a of the receiving portion 78 contacts the annular portion 22 on the vacuum exhaust downstream side before the stator vane 72 contacts the rotor vane 23 on the vacuum exhaust downstream side. When the stator 70 is deflected toward the upstream side of the vacuum exhaust, the upper end 78b of the receiving portion 78 contacts the annular portion 22 on the upstream side of the vacuum exhaust before the stator vane 72 contacts the rotor vane 23 on the upstream side of the vacuum exhaust. In addition, in the socket 78, as compared with the stator 70 used in embodiment 2 described above, the socket 78 and the annular portion 22 are in contact with each other continuously in the circumferential direction C, and thus the socket 78 and the annular portion 22 are in gentle contact with each other.
The stator 70 is not limited to the stator vane 72 that is vertically provided above the rotor axial direction a as described above, and may be configured such that two stator vanes 72 are perforated with a gap therebetween as shown in fig. 13 (a), and are vertically provided above and below the rotor axial direction a by being twisted from the center of the vane as shown in fig. 13 (b). As shown in fig. 13 (a) and 13 (b), the stator blades 72 may be formed to have the same height when standing, and have the same width from the inside to the outside in the rotor radial direction R.
As described above, in the vacuum pump 1 according to the present embodiment, the annular portion 22 is formed to have a substantially uniform thickness in the rotor axial direction a, whereby the strength of the annular portion 22 can be ensured, and the stator 70 is in contact with the annular portion 22, whereby the rotor 20 and the stator 70 can be prevented from being damaged due to the contact between the rotor blades 23 and the stator blades 72.
The present invention can be applied to any equipment provided with a turbomolecular pump mechanism, and is not limited to the above-described compound pump, and may be applied to a pump that is a turbomolecular pump mechanism only.
In addition, the present invention can be variously modified as long as it does not depart from the spirit of the present invention, and the present invention is naturally also amenable to such modification.
Description of the reference numerals
Seed, seed and seed vacuum pump
Seeds, both seedings and seeds
Suction inlet for seeds, seeds and seeds
20 seed, seed and rotor
Seeds, trees, or seeds, or rotor shafts
22 seed, seed and ring
22a, seeds and rings (ring) peripheral ends
Seeds, seeds and seeds of rotor
30, seed and driving motor
Seeds, plants and seeds motor rotor
Seeds, plants and seeds and motor stator
Seeds, seeds and columns
Seed, seed and root
Discharge of seed, seed and gas
52 seed, seed and O-shaped ring
Seeds, seeds and spiral groove parts
54 seed, seed and spiral stator
60 seeds, seeds and seeds bearing
61 seed, seed and radial electromagnet
Axial electromagnet for seeds and trees 62
Axial displacement sensor for seeds and seeds 62a
70 seed, seed and stator
Seeds, trees, or bearing seeds
72 seed, seed and stator wing
72a, seeds and the inner peripheral end of the seeds and the wings
Seed and seed 73, seed and seed, and inner peripheral edge part
74, seed, and peripheral side edge portions
Seeds, both seed and seeds and downward protrusions
Seeds, seedings and superlations
77 seeds, seeds and bearing parts
78 seed, seed and bearing
Axial direction of seed, seed and rotor
Radial of R, seed and rotor
Circumferential direction of C, seed, stator
Molecular pump mechanism for PA, seeds and seeds
Seed, seed and spiral groove pump mechanism.
Claims (11)
1. A vacuum pump is provided, which comprises a vacuum pump body,
the vacuum pump comprises: a rotor including a rotor shaft and rotor blades connected to the rotor shaft via at least a circular ring portion, the rotor blades being formed in multiple stages in a rotor axial direction; a stator having stator blades arranged between the rotor blades; a stator post into which the rotor shaft is inserted; a base portion for supporting the stator pole,
a turbo-molecular pump exhaust unit for discharging gas by rotating the rotor blades relative to the stator blades, and an exhaust unit having a spiral stator with a spiral groove for discharging gas in a viscous flow region is formed on the downstream side of the turbo-molecular pump exhaust unit in the vacuum exhaust direction,
the radial length of the gap between the rotor and the stator pole is shorter than the axial length of the gap between the rotor and the base,
the stator contacts the annular portion when contacting the rotor due to the deflection deformation in the rotor axial direction.
2. Vacuum pump according to claim 1,
the stator includes a receiving portion provided on an inner peripheral side of the stator vane and contacting the annular portion when the receiving portion contacts the rotor due to flexural deformation in the rotor axial direction.
3. Vacuum pump according to claim 2,
the receiving portion is an inner peripheral edge portion of the stator.
4. A vacuum pump according to claim 3,
the inner peripheral edge portion is formed to be inclined toward the upper stage side in the rotor axial direction.
5. Vacuum pump according to claim 2,
the receiving portion is a protruding portion protruding from an inner peripheral edge of the stator toward an upper stage side in the rotor axial direction.
6. Vacuum pump according to claim 2,
the receiving portion is a protruding portion protruding from an inner peripheral edge of the stator toward a lower side in the rotor axial direction.
7. Vacuum pump according to claim 1,
the stator vane contacts the annular portion when contacting the rotor due to the deflection deformation in the rotor axial direction.
8. Vacuum pump according to any of claims 1 to 7,
the stator is manufactured by press molding.
9. Vacuum pump according to any of claims 1 to 7,
the annular portion and the stator are provided at least at each lowermost stage.
10. A rotor, characterized in that,
is used in a vacuum pump as claimed in any one of claims 1 to 9.
11. A stator, characterized in that,
is used in a vacuum pump as claimed in any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611217564.6A CN107044430B (en) | 2016-02-05 | 2016-12-26 | Vacuum pump and rotor and stator used therein |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016020633A JP2017137840A (en) | 2016-02-05 | 2016-02-05 | Vacuum pump, and rotor and stators used for the same |
| JP2016-020633 | 2016-02-05 | ||
| CN201611217564.6A CN107044430B (en) | 2016-02-05 | 2016-12-26 | Vacuum pump and rotor and stator used therein |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| CN107044430A CN107044430A (en) | 2017-08-15 |
| CN107044430A8 CN107044430A8 (en) | 2018-02-23 |
| CN107044430B true CN107044430B (en) | 2021-10-15 |
Family
ID=59542925
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611217564.6A Active CN107044430B (en) | 2016-02-05 | 2016-12-26 | Vacuum pump and rotor and stator used therein |
Country Status (1)
| Country | Link |
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| CN (1) | CN107044430B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7382150B2 (en) * | 2019-03-25 | 2023-11-16 | エドワーズ株式会社 | Vacuum pumps and seal members used in vacuum pumps |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05157090A (en) * | 1991-12-03 | 1993-06-22 | Shimadzu Corp | Turbo-molecular pump |
| JP2000009088A (en) * | 1998-06-23 | 2000-01-11 | Seiko Seiki Co Ltd | Turbo-molecular pump |
| CN103939367A (en) * | 2013-01-22 | 2014-07-23 | 安捷伦科技有限公司 | Rotary vacuum pump |
| JP2015135074A (en) * | 2014-01-17 | 2015-07-27 | 株式会社島津製作所 | Turbo molecular pump |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT1399567B1 (en) * | 2010-04-16 | 2013-04-19 | Varian Spa | VIBRATION DAMPER FOR VACUUM PUMPS |
-
2016
- 2016-12-26 CN CN201611217564.6A patent/CN107044430B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05157090A (en) * | 1991-12-03 | 1993-06-22 | Shimadzu Corp | Turbo-molecular pump |
| JP2000009088A (en) * | 1998-06-23 | 2000-01-11 | Seiko Seiki Co Ltd | Turbo-molecular pump |
| CN103939367A (en) * | 2013-01-22 | 2014-07-23 | 安捷伦科技有限公司 | Rotary vacuum pump |
| JP2015135074A (en) * | 2014-01-17 | 2015-07-27 | 株式会社島津製作所 | Turbo molecular pump |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107044430A (en) | 2017-08-15 |
| CN107044430A8 (en) | 2018-02-23 |
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