CN107039311A - Modulation feedway, cost of use computational methods and the system of decoction and electrolyte - Google Patents
Modulation feedway, cost of use computational methods and the system of decoction and electrolyte Download PDFInfo
- Publication number
- CN107039311A CN107039311A CN201611051122.9A CN201611051122A CN107039311A CN 107039311 A CN107039311 A CN 107039311A CN 201611051122 A CN201611051122 A CN 201611051122A CN 107039311 A CN107039311 A CN 107039311A
- Authority
- CN
- China
- Prior art keywords
- decoction
- cost
- electrolyte
- flow quantity
- quantity recorder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003792 electrolyte Substances 0.000 title claims abstract description 82
- 238000000205 computational method Methods 0.000 title claims abstract description 37
- 239000002994 raw material Substances 0.000 claims abstract description 51
- 238000004519 manufacturing process Methods 0.000 claims abstract description 30
- 238000004891 communication Methods 0.000 claims abstract description 22
- 239000004973 liquid crystal related substance Substances 0.000 claims abstract description 14
- 239000004065 semiconductor Substances 0.000 claims abstract description 14
- 238000003860 storage Methods 0.000 claims description 39
- 239000007788 liquid Substances 0.000 claims description 29
- 239000003814 drug Substances 0.000 claims description 8
- 239000000470 constituent Substances 0.000 claims description 6
- 230000005611 electricity Effects 0.000 claims description 4
- 238000012545 processing Methods 0.000 claims description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 74
- 239000007864 aqueous solution Substances 0.000 description 34
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 23
- 238000002360 preparation method Methods 0.000 description 21
- 239000000243 solution Substances 0.000 description 16
- 239000000126 substance Substances 0.000 description 12
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 9
- 238000005259 measurement Methods 0.000 description 9
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000003756 stirring Methods 0.000 description 5
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 4
- 239000013589 supplement Substances 0.000 description 4
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000005868 electrolysis reaction Methods 0.000 description 3
- 229910017604 nitric acid Inorganic materials 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 235000006408 oxalic acid Nutrition 0.000 description 2
- 241000894007 species Species 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 1
- 241001269238 Data Species 0.000 description 1
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 1
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- 239000004115 Sodium Silicate Substances 0.000 description 1
- ODWGSXBQKHSOIZ-UHFFFAOYSA-N [NH4+].[Ce+3].[O-]N=O Chemical compound [NH4+].[Ce+3].[O-]N=O ODWGSXBQKHSOIZ-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- JPJLZTUSDJKKLS-UHFFFAOYSA-N azane 2-hydroxyethyl(trimethyl)azanium Chemical compound N.C[N+](C)(C)CCO JPJLZTUSDJKKLS-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- -1 copper-bath Substances 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 1
- 229940028356 diethylene glycol monobutyl ether Drugs 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- JCGNDDUYTRNOFT-UHFFFAOYSA-N oxolane-2,4-dione Chemical compound O=C1COC(=O)C1 JCGNDDUYTRNOFT-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 150000004040 pyrrolidinones Chemical class 0.000 description 1
- 235000019795 sodium metasilicate Nutrition 0.000 description 1
- 239000001488 sodium phosphate Substances 0.000 description 1
- 229910000162 sodium phosphate Inorganic materials 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 229910052911 sodium silicate Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/06—Silver salts
- G03F7/063—Additives or means to improve the lithographic properties; Processing solutions characterised by such additives; Treatment after development or transfer, e.g. finishing, washing; Correction or deletion fluids
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70991—Connection with other apparatus, e.g. multiple exposure stations, particular arrangement of exposure apparatus and pre-exposure and/or post-exposure apparatus; Shared apparatus, e.g. having shared radiation source, shared mask or workpiece stage, shared base-plate; Utilities, e.g. cable, pipe or wireless arrangements for data, power, fluids or vacuum
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
- G06Q20/00—Payment architectures, schemes or protocols
- G06Q20/08—Payment architectures
- G06Q20/14—Payment architectures specially adapted for billing systems
- G06Q20/145—Payments according to the detected use or quantity
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
- G06Q30/00—Commerce
- G06Q30/04—Billing or invoicing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02299—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment
- H01L21/02307—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment treatment by exposure to a liquid
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
- H01L21/44—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/38 - H01L21/428
- H01L21/441—Deposition of conductive or insulating materials for electrodes
- H01L21/445—Deposition of conductive or insulating materials for electrodes from a liquid, e.g. electrolytic deposition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/30—Computing systems specially adapted for manufacturing
Landscapes
- Engineering & Computer Science (AREA)
- Business, Economics & Management (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Accounting & Taxation (AREA)
- Finance (AREA)
- Development Economics (AREA)
- Strategic Management (AREA)
- Theoretical Computer Science (AREA)
- General Business, Economics & Management (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Economics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Public Health (AREA)
- Epidemiology (AREA)
- Environmental & Geological Engineering (AREA)
- Health & Medical Sciences (AREA)
- Computer Networks & Wireless Communication (AREA)
- Marketing (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Management, Administration, Business Operations System, And Electronic Commerce (AREA)
- Measuring Volume Flow (AREA)
- Details Of Flowmeters (AREA)
Abstract
There is provided in the decoction or electrolyte for the manufacture of semiconductor, liquid crystal display or battery, decoction user, which does not buy, to modulate feedway with decoction or do not prepare decoction or its raw material and can receive the decoction cost of use computational methods and required decoction modulation feedway of the supply of the decoction of the required concentration of requirement all the time.Decoction modulates feedway and possesses flow quantity recorder in the pipe arrangement of supply decoction.The decoction modulation feedway that decoction provider is possessed is connected with decoction using equipment, and the decoction raw material prepared using decoction modulation feedway from decoction provider modulates the decoction to be supplied.Decoction after modulation is asked according to supply, and being supplied to decoction while measuring quantity delivered by flow quantity recorder uses equipment.The integrated flow that decoction provider measures according to per specified time limit calculates the cost of use asked for decoction user.If flow quantity recorder has communication function, integrated flow can be monitored via network remote, calculate the cost of use of decoction.
Description
Technical field
The present invention relates to supplied after the various decoctions used in the manufacturing process of semiconductor or liquid crystal display are modulated
The cost of use computational methods and decoction cost of use computing system of various decoctions after the device given, modulation and by various electricity
The usage charges of various electrolyte after the device that is supplied after the various electrolyte modulation used in the manufacture in pond, modulation are used tricks
Calculation method and electrolyte cost of use computing system.
Background technology
In the manufacturing process of semiconductor or liquid crystal display, for example, using developer solution, etching solution, stripper, antistatic
The various decoctions such as agent, cleaning fluid.In addition, using various electrolyte in the manufacture of battery.These decoctions or electrolyte are (below,
Decoction and electrolyte are collectively referred to as " decoction " in the case where need not especially distinguish) it is modulated into and corresponding with needing provides dense
Spend to use, to play its performance to greatest extent.
In the past, the user of these decoctions prepared the decoction to be used to use by following any mode.That is,
One mode is that the various decoctions for the concentration for buying needs from decoction producer are used.Second method is bought from device producer
The device (hereinafter sometimes referred to " decoction modulation feedway ") that various decoctions are modulated into the concentration of needs to be supplied is simultaneously
The equipment using decoction is assembled into, while manufacturing the decoction of the concentration needed while entering from the raw material oneself of decoction by the device
Exercise and use.
For example, patent document 1, patent document 2 discloses that decoction modulate feedway.In patent document 1, disclose from
Decoction modulation feedway of the solid material modulation using oxalic acid as the etching solution of main component.In addition, in patent document 2, it is public
Open and be diluted to the decoction tune that the developer solution of normal concentration is modulated to adding pure water in the stoste of dense developer solution
Feedway processed.
Patent document
Patent document 1：TOHKEMY 2003-209092 publications
Patent document 2：TOHKEMY 2002-324753 publications
The content of the invention
But, in existing mode, to use the side (hereinafter sometimes referred to user side) of decoction must be each
The decoction for preparing the concentration needed is bought when needing, or such decoction modulation described in patent document 1,2 must be bought and is supplied
Used to device.
Therefore, user side has to be continued for subject following burden：The concentration needed is prepared when needing every time
Decoction burden, when needing every time prepare decoction raw material burden or buy decoction modulation feedway after use
And maintain the burden of management.
The present invention in view of above-mentioned each problem and complete.That is, it is an object of the present invention to provide a kind of user side need not
Bearing as described above bear can just use the decoction of decoction to modulate feedway, decoction cost of use computational methods and decoction
Cost of use computing system and electrolyte modulation feedway, electrolyte cost of use computational methods and electrolyte usage charges
Use computing system.
In order to reach the purpose, decoction modulation feedway of the invention is a kind of to using in semiconductor or liquid crystal
The equipment for the decoction used in the manufacturing process for showing device is modulated and supplies the decoction modulation feedway of decoction, and it will be after it will modulate
Decoction be delivered on the pipe arrangement of equipment and possess flow quantity recorder.
In order to reach the purpose, electrolyte modulation feedway of the invention is a kind of modulation and supplied for battery
The electrolyte modulation feedway of the electrolyte of manufacture, it possesses integrated flow on the pipe arrangement of the electrolyte after conveying is modulated
Meter.
According to the decoction of present invention modulation feedway or electrolyte modulation feedway, due to for user side
Equipment supply modulation after decoction or electrolyte pipe arrangement on flow quantity recorder is set, so will appreciate that each specified time limit
(a such as week or one month) is supplied to the decoction of the equipment of user side or the amount of electrolyte.If by the decoction or electrolysis
The amount of liquid is multiplied by the cost of use that per unit expense of decoction or electrolyte etc. is used as decoction or electrolyte, then being capable of rope
It is orientated the decoction of user side supply or the expense of electrolyte.
It is accumulative in the purpose, decoction modulation feedway of the invention or electrolyte modulation feedway in order to reach
Flowmeter possesses communication function.
According to the decoction of present invention modulation feedway or electrolyte modulation feedway, due to can be by each user side
Factory in the flow quantity recorder that uses and network connection, even if so not going to the factory of user side to flow quantity recorder
Instrument carries out consumption inspection, the quantity delivered that can be also determined by the server system with the network connection to flow quantity recorder
The various determination datas such as aggregate-value carry out remotely monitors.
In order to reach the purpose, decoction cost of use computational methods of the invention are calculated in semiconductor or liquid crystal display
Manufacturing process in the cost of use of decoction that uses, the computational methods include following processing：By via possessing integrated flow
The decoction that the provider that the pipe arrangement of meter supplies decoction to the equipment using decoction possesses modulates feedway, is prepared from provider
Decoction raw material, come modulate decoction user need constituent concentration decoction, according to the requirement of the user of decoction, lead to
While crossing flow quantity recorder integrated flow is measured, the decoction after modulation is supplied to equipment, based on by integrated flow
The integrated flow of the specified time limit determined is counted, the cost of use for the decoction asked for the user that calculates to decoction.
In order to reach the purpose, electrolyte cost of use computational methods of the invention calculate the electricity of the manufacture for battery
The cost of use of liquid is solved, the computational methods include following processing：By supplying electrolysis via the pipe arrangement for possessing flow quantity recorder
The electrolyte modulation feedway that the provider of liquid is possessed, the raw material for the electrolyte prepared from the provider, to modulate
The electrolyte for the constituent concentration that the user of electrolyte needs, according to the requirement of the user of electrolyte, passes through flow quantity recorder
While being measured to integrated flow, the electrolyte after supply modulation, based on the specified time limit determined by flow quantity recorder
Integrated flow, the cost of use asked for the user that calculates to electrolyte.
According to the decoction or electrolyte cost of use computational methods of the present invention, due to decoction is modulated into feedway or electrolysis
Liquid modulation feedway is arranged at the factory of user side as all objects of provider side and connected with user's side apparatus
Connect, so user side need not buy decoction modulation feedway or electrolyte modulation feedway.Due to the person of being supplied with side
All objects, so user side is also not subject to maintain management decoction modulation feedway or electrolyte to modulate the negative of feedway
Load.Further, since the raw material of decoction is also prepared by provider side, so user side is also not subject to prepare decoction or electrolyte
The burden of raw material.User side only receives the supply of used decoction or electrolyte, can realize that user only receives receiving
The supply mode of the notice of the decoction of supply or the cost of use of electrolyte.
In order to reach the purpose, decoction cost of use computational methods of the invention using will to using in semiconductor or
The tool possessed on the pipe arrangement of the device of decoction is modulated and supplied to the equipment of the decoction utilized in the manufacturing process of liquid crystal display
The network that the flow quantity recorder and server system for having communication function are connected, should to calculate the cost of use of decoction
Computational methods comprise the following steps：Server system obtains the step of the integrated flow measured by each flow quantity recorder via network
Suddenly；The step of historical record of the integrated flow obtained by server system is stored according to each flow quantity recorder；And clothes
Business device system calculates the usage charges asked for the user of decoction of specified time limit based on historical record according to each equipment
The step of using.
In order to reach the purpose, possess for calculating the decoction cost of use computing system of cost of use of decoction：It is tired
Flowmeter is counted, it is arranged to using the equipment of the decoction utilized in the manufacturing process of semiconductor or liquid crystal display and modulated
And the pipe arrangement of the device of decoction is supplied, and with communication function；And server system, it connects via network and flow quantity recorder
Connect, server system possesses：Acceptance division, it receives the integrated flow measured by flow quantity recorder via network；Storage part, its
The historical record of received integrated flow is stored according to each flow quantity recorder；And calculating part, it is remembered based on history
Record the cost of use of the decoction during carrying out computational rules according to each equipment.
In order to reach the purpose, electrolyte cost of use computational methods of the invention, which are utilized, to be used for battery in modulation
The electrolyte of manufacture is simultaneously supplied to the accumulative stream with communication function possessed on the pipe arrangement of the device of the equipment using electrolyte
The network that gauge and server system are connected, to calculate the cost of use of electrolyte, the computational methods include following
Step：The step of server system obtains the integrated flow measured by each flow quantity recorder via network；According to each accumulative stream
The step of gauge carrys out the historical record of the integrated flow acquired by storage server system；And server system is remembered based on history
The step of record calculates the cost of use asked for the user of electrolyte of specified time limit according to each equipment.
In order to reach the purpose, the electrolyte cost of use computing system tool of the cost of use for calculating electrolyte
It is standby：Flow quantity recorder, its dress for being arranged at the electrolyte for modulating the manufacture for battery and being supplied to the equipment using electrolyte
The pipe arrangement put, and with communication function；And server system, it is connected via network with flow quantity recorder, server system
Possess：Acceptance division, it receives the integrated flow measured by flow quantity recorder via network；Storage part, it is according to each accumulative
Flowmeter stores the historical record of received integrated flow；And calculating part, it is set based on historical record according to each
For the cost of use for carrying out the electrolyte during computational rules.
According to the cost of use computational methods of the decoction of the present invention or electrolyte, due to the clothes with network connection can be passed through
Business device system, remotely monitors the flow quantity recorder used in the factory of each user, so provider in a one-dimensional fashion
It it is unnecessary to go to the instrument progress consumption inspection of flow quantity recorder the factory of user.Provider can be according to using
The decoction of person's side apparatus supply or the amount of electrolyte, the cost of use for the decoction asked for the user that calculates to decoction or to
The cost of use for the electrolyte that the user of electrolyte asks for.
Invention effect
According to the present invention, feedway is modulated by possessing the decoction of flow quantity recorder, do not have so far new can be realized
Decoction cost of use computational methods.According to the present invention, feedway is modulated by possessing the electrolyte of flow quantity recorder,
The computational methods of the cost of use for the new electrolyte not having so far can be realized.
According to the present invention, decoction user is not subject to prepare decoction or its raw material, decoction modulation feedway is purchased
Enter or maintain the burden of management, only by paying the cost of use calculated according to the amount of used decoction, it becomes possible to
To the decoction of normal concentration.
According to the present invention, decoction provider remotely can also adjust to each decoction used in multiple places in a one-dimensional fashion
The flow quantity recorder of feedway processed is monitored.
Brief description of the drawings
Fig. 1 is the schematic diagram that decoction modulates feedway.
Fig. 2 is that the decoction of variation modulates the schematic diagram of feedway.
Fig. 3 is the flow chart for illustrating decoction cost of use computational methods.
Fig. 4 is the schematic diagram for the composition for representing decoction cost of use computing system.
Symbol description
1... computer, 2... chemical storage tanks, 3... decoction preparation vessels, 4... decoction supplying tubings, the accumulative streams of 5...
Gauge, 6... raw material supplying tubings, 7... flow quantity recorders, 10... decoctions modulation feedway, the storage of 11,12... decoction raw materials
Deposit container, 13,14,15,16,17,18,19,20... valves, 21,31... concentration measurement apparatus, 22,32... liquid level meters, 23,
33... circulation stirring pump, 24,34... circulation lines, 25... liquid-feeding pumps, 35... communicating pipes, 41... pure water supplying tubings,
42... decoction raw material supplement pipe arrangement, 43... decoction raw material supplying tubings, 44,45,46,47,48,49,92... signal wires,
51... pure water entrance, 52... decoctions feed(raw material)inlet, 53... decoction supply mouths, 54... stoste supply mouths, 61,62,63,64,
65... factory, 71,72,73,74,75... flow quantity recorders, 80... networks, 81... server systems, 82... acceptance divisions,
83... storage part, 84... calculating parts, 85... displays, 90... equipment, 100... decoction cost of use computing systems
Embodiment
Hereinafter, the mode of the appropriate optimal implementation that present invention will be described in detail with reference to the accompanying.Wherein, these modes implemented
Described in shape, size, size ratio, its relative configuration of device etc. etc. as long as no special record, just not only limit
In the example for illustrating the scope of the present invention.It is merely possible to explanation example and is schematically shown.
In addition, in the following description, being used as the decoction used in the manufacturing process of semiconductor or liquid crystal display
Concrete example, it is appropriate to use 2.38% tetramethylammonium hydroxide aqueous solution used in developing procedure mainly as developer solution
(TMAH is referred to as into TMAH below) illustrates.
But, it is not limited to this using the decoction of the present invention.As the example for other decoctions that can apply the present invention,
In addition to developer solution, additionally it is possible to enumerate etching solution, stripper, antistatic additive or cleaning fluid etc..
Also there is diversified species, the decoction of composition respectively in these decoctions.For example, as developer solution, in addition can also
Enough enumerate the aqueous solution, an ethoxy trimethyl hydrogen-oxygen for the inorganic compounds such as potassium hydroxide, sodium hydroxide, sodium phosphate, sodium metasilicate
Change aqueous solution of organic compound such as ammonium (choline) etc..For example, as etching solution, oxalic acid aqueous solution, sulfuric acid and mistake can be enumerated
Mixed aqueous solution, copper-bath, phosphoric acid and the acetic acid of hydrogen oxide and the mixed aqueous solution of nitric acid, hot phosphoric acid, nitrous acid cerium ammonium
The aqueous solution, ferric chloride solution etc..For example, as stripper, solution, the N- methyl of dimethyl sulfoxide system stoste and pure water can be enumerated
The water system diaphragm such as solution, alkanolamine and the glycol ether of pyrrolidones system stoste and pure water and the solution of pure water stripper, one
Non- water system diaphragm stripper such as the mixed solution of monoethanolamine and diethylene glycol monobutyl ether and additive etc..
In the past, using the people (hereinafter sometimes referred to " decoction user ") of above-mentioned various decoctions when needing every time from decoction
Amount required for producer etc. buys has been modulated into the decoction of normal concentration to use.Therefore, decoction user must hold
Born by decoction is prepared.
In addition, decoction user buys the decoction that normal concentration is modulated and supplied from the raw material of decoction from device producer etc.
Decoction modulation feedway, be arranged at the factory of decoction user, make decoction modulate feedway operating while manufacture
The decoction that needs is used, and such case is also more.In this case, the burden of raw material of the decoction user except preparing decoction
With beyond the burden for buying decoction modulation feedway, it is necessary to bear to make decoction to modulate feedway and operate and maintain what is managed
Burden.
Present inventor is in view of these aspects, have invented supply method (the cost of use calculating side of decoction of new decoction
Method).Cost of use computational methods below for the new decoction are illustrated.
Firstly, there are the people (hereinafter also referred to " decoction provider ") and decoction user of supply decoction, decoction provider
Possess decoction modulation feedway, decoction user possesses the equipment using decoction.The decoction modulation that decoction provider is possessed
Feedway is arranged at the factory of decoction user, is connected with using the equipment of decoction.
Then, decoction provider makes from the raw material of the decoction of the responsibility preparation with itself in the factory of decoction user
Make the decoction (" making in site " that carries out so-called decoction) of the normal concentration of decoction user requirement.Decoction modulates feedway
Operating, maintain management etc. also carried out by decoction provider.
Decoction after modulation is supplied to the equipment using decoction by decoction provider according to the requirement of decoction user.This
When, the amount (hereinafter also referred to " quantity delivered ") of supplied decoction is determined, the quantity delivered based on decoction is asked for decoction user
And the cost of use of the decoction calculated.Decoction user can solve releasing from the foregoing various burdens born in the past
Come, and only can just receive the supply of required decoction automatically by paying cost of use.
In order to realize the cost of use computational methods of decoction of the invention, the quantity delivered, tired of decoction can be determined by possessing
It is essential to count the decoction modulation feedway of flowmeter.Hereinafter, with reference to the accompanying drawings of possessing such flow quantity recorder
Decoction modulate feedway specific embodiment.
(first embodiment)
Fig. 1 is for illustrating that the decoction of present embodiment modulates the schematic diagram of feedway.In description of the present embodiment
In, the decoction modulation supply dress for the TMAH aqueous solution for being allocated to modulate 2.38% with the TMAH aqueous solution and pure water to 20%
Concrete example is set to illustrate.
The decoction modulation feedway 10 of present embodiment is mainly made up of following：The decoction of normal concentration is modulated
Decoction preparation vessel 3, storage modulation after decoction chemical storage tank 2, store decoction raw material decoction raw storage container
11 and 12, decoction after modulation is delivered to the decoction supplying tubing 4 of the equipment 90 of user side and in decoction supplying tubing
Flow quantity recorder 5 possessed on 4 etc..
In the case where being allocated the TMAH aqueous solution to modulate 2.38% to the 20% TMAH aqueous solution and pure water, into
For raw material be 20% the TMAH aqueous solution, by the 20% TMAH aqueous solution from decoction feed(raw material)inlet 52 via decoction raw material supplement
Pipe arrangement 42 is stored into decoction raw storage container 11 or 12.
Valve 13~18 is connected via signal wire 44 with computer 1.Computer 1 is transmitted control signals to via signal wire 44
Valve 13~18, control is opened and closed to valve 13~18.When the TMAH aqueous solution that 20% is filled with into decoction raw storage container 11
When, open valve 13.When being filled with the 20% TMAH aqueous solution into decoction raw storage container 12, valve 15 is opened.
Decoction raw storage container 11 and 12 is pressurized by the nitrogen equipment of nitrogen (supply not shown), via with
The decoction raw material supplying tubing 43 that decoction preparation vessel 3 is connected conveys the 20% stored TMAH aqueous solution.In conveying decoction
During the 20% TMAH aqueous solution in raw storage container 11, valve 14 and valve 17 are opened.In conveying decoction raw storage container 12
During the TMAH aqueous solution of interior 20%, valve 16 and valve 17 are opened.
In order to modulate the 2.38% TMAH aqueous solution from the 20% TMAH aqueous solution, it is mixed into the 20% TMAH aqueous solution
Pure water is diluted.Pure water is supplied to decoction preparation vessel 3 from pure water entrance 51 via pure water supplying tubing 41.In conveying pure water
When, open valve 18.
Decoction preparation vessel 3 possesses concentration measurement apparatus 31 and liquid level meter 32.Concentration measurement apparatus 31 is to decoction preparation vessel 3
Interior decoction is sampled, and determines its concentration.Liquid level meter 32 determines the position of the liquid level of the decoction in decoction preparation vessel 3.In addition,
The circulation stirring pump 33 that decoction in decoction preparation vessel 3 possesses on circulation line 34 carries out circulation stirring.Thus, decoction is modulated
Decoction in groove 3 turns into uniform concentration.
Concentration measurement apparatus 31 and liquid level meter 32 are connected via signal wire 45 and 46 with computer 1.Computer 1 is monitored
The liquid level position of the concentration of the decoction determined by concentration measurement apparatus 31 and the decoction determined by liquid level meter 32, to valve 13~18
Control is opened and closed as follows.Thereby, it is possible to the automatically decoction of the normal concentration of modulation specifications amount, such as this reality all the time
Apply the 2.38% TMAH aqueous solution in mode.
For example, the TMAH concentration in decoction preparation vessel 3 is less than in the case of 2.38%, computer 1 is by valve 14 or 16
One party and valve 17 open, addition 20% the TMAH aqueous solution.Valve 17 is the open and close control valve of flow when regulation is opened, and passes through meter
Calculation machine 1 is controlled such that opens the stipulated time by valve 17, so as to feed the TMAH aqueous solution of the 20% of requirement.
For example, the TMAH concentration in decoction preparation vessel 3 is higher than in the case of 2.38%, computer 1 opens valve 18, adds
Plus pure water.Valve 18 is the open and close control valve of regulation flow when opening, and is controlled such that by computer 1 when valve 18 is opened into regulation
Between, so as to feed the pure water of requirement.
For example, in the case that the liquid level position in decoction preparation vessel 3 is reduced, by the one party in valve 14 or 16 and valve 17
And valve 18 is suitably opened, increase the modulation voltage of decoction.
In addition, when decoction raw storage container 11 becomes space-time, computer 1 closes valve 14, valve 13 is opened, to decoction
Raw storage container 11 supplements decoction raw material.Similarly, when decoction raw storage container 12 becomes space-time, computer 1 is by valve 16
Close, valve 15 is opened, decoction raw material is supplemented to decoction raw storage container 12.So, the holding of computer 1 must be former to decoction
Either one among material storage container 11 or 12 is filled with the state of decoction raw material.
The 2.38% TMAH aqueous solution after being modulated so in decoction preparation vessel 3 is by by decoction preparation vessel 3 and decoction
Accumulator tank 2 connect communicating pipe 35 and be stored in chemical storage tank 2.Communicating pipe 35 is the pipeline of liquid medicine flow.If from decoction storage
Deposit the supply decoction of groove 2 to reduce so as to be stored in its internal amount of liquid medicine, then the decoction after modulating in decoction preparation vessel 3 passes through even
Siphunculus 35 and be moved to chemical storage tank 2.There is appropriate length and with bore communicating pipe 35, with making in decoction preparation vessel
The variation of the liquor strength occurred in 3 is not up to the cushioning effect of the such concentration change in the inside of chemical storage tank 2.
Chemical storage tank 2 is also same with decoction preparation vessel 3, possesses concentration measurement apparatus 21 and liquid level meter 22.These concentration
Determine device 21 and liquid level meter 22 is also connected via signal wire 47 and 48 with computer 1.Computer 1 is according to concentration measurement apparatus
The liquid level for the decoction in chemical storage tank 2 that the concentration and liquid level meter 22 of decoction in 21 chemical storage tanks 2 determined are determined
Position, carrys out suitable control valve 13~18.Control is identical with the situation of decoction preparation vessel 3.Chemical storage tank 2 is due to concentration change pole
It is few, so actually carrying out the monitoring and liquid measure management of the concentration of the decoction of inside.
In addition, the circulation stirring pump 23 that the decoction in chemical storage tank 2 possesses on circulation line 24 carries out circulation stirring.
Thus, the decoction in chemical storage tank 2 maintains uniform concentration.
The decoction being stored in chemical storage tank 2 passes through decoction supplying tubing 4 and flow quantity recorder 5 using liquid-feeding pump 25
And the equipment 90 of the user side using decoction is fed into from decoction supply mouth 53.The equipment 90 of user side is via signal wire
92 are connected with computer 1.Computer 1 receives the decoction supply request letter sent from the equipment 90 of user side via signal wire 92
Number.Valve 19 is connected via signal wire 49 with computer 1.Computer 1 is according to the request of the user from the side of equipment 90, to decoction
Control is opened and closed in the valve 19 possessed in supplying tubing 4.Thus, equipment 90 when needing decoction, can receive the medicine of requirement
The supply of liquid.Now, because flow quantity recorder 5 measures the integrated flow of the decoction for the equipment 90 for being supplied to user side, so
Can the integrated flow based on each specified time limit, calculate cost of use, can realize calculate decoction cost of use method.
In the embodiment of above-mentioned decoction modulation feedway 10, using the TMAH stostes from 20% to being used as developer solution
The 2.38% TMAH aqueous solution device of allotment is diluted for concrete example to be illustrated.Illustrate in this embodiment
Decoction modulation feedway 10 decoction modulating part be typical example, be not to limit the invention to this.As long as energy
The decoction of enough constituent concentrations needed to user is modulated from its raw material, can be adopted in various manners.Certainly, decoction is modulated
The decoction modulating part of feedway 10 can use various modifications example according to the species of the decoction to be modulated.Except with pure water
Stoste is diluted beyond the situation of allotment, additionally it is possible to using realize multiple decoctions are allocated situation, from solid original
The composition of the devices of various modulator approaches such as the situation that material is modulated.For example, the concentration of the TMAH stostes of circulation exists
Japanese and South Korea is usually 20%, but is 25% in a part of area of Japan, and 25% is generally in Taiwan and China.
In the case that the concentration of TMAH stostes is different, dilution rate in appropriate change decoction modulation etc..
In addition, signal wire 44~49,92 means the transmission (path) of the control signal from computer 1, signal wire 44
~49,92 can be signal cable or radio communication.
The feature of the present invention is briefly in the decoction for the decoction after modulation to be supplied to user's side apparatus
Possesses flow quantity recorder 5 in supplying tubing 4.
The present invention is further characterized in that, is arranged at the decoction for the decoction after modulation to be supplied to user's side apparatus and is supplied
Flow quantity recorder 5 to pipe arrangement 4 possesses communication function.Therefore, it is possible to the integrated flow to the decoction determined by flow quantity recorder 5
Carry out remotely monitor, i.e. remotely monitor can be carried out to the quantity delivered of decoction using the communication function.
As the flow quantity recorder for possessing such communication function, for example, there is the Coriolis-type of KEYENCE societies
Digital flow sensor FD-S series etc..By installing communication component, so as to tired to what is determined with personal computer etc.
The various data such as meter data on flows are communicated.Therefore, it is possible to from the setting place with flow quantity recorder leave place or
Via network, integrated flow is monitored.
Fig. 2 shows that the decoction in first embodiment modulates the variation of feedway 10.In the presence of pair with shown in Fig. 1
The composition identical of decoction modulation feedway 10 constitutes mark same symbol and situation about omitting the description.
Decoction modulation feedway 10 shown in Fig. 2 is also equipped with：The original of decoction raw storage container 11 and 12 will be stored in
The flow quantity recorder that material is transported to the raw material supplying tubing 6 of the equipment 90 of user side and possessed in raw material supplying tubing 6
7 and valve 20.Valve 20 is connected via signal wire 49 with computer 1.
Computer 1 receives the raw material sent from the equipment 90 of user side via signal wire 92 and supplies request signal.Calculate
Control is opened and closed to the valve 20 possessed in raw material supplying tubing 6 according to the request of the user from the side of equipment 90 in machine 1.By
This, is stored in the raw material in decoction raw storage container 11 and 12 by raw material supplying tubing 6 and flow quantity recorder 7, from original
Material supply mouth 54 is supplied to the equipment 90 of user side.
Equipment 90 when needing raw material, can receive the supply of the raw material of requirement.Now, due to 7 pairs of flow quantity recorder
The integrated flow for being supplied to the raw material of equipment 90 is measured, so can be calculated based on the integrated flow of each specified time limit
Go out cost of use, the method for calculating decoction cost of use can be realized.
Here, so-called decoction, the liquid modulated the need for referring to according to user from raw material, also including not modulating concentration
Situation.
(second embodiment)
Next, the decoction cost of use computational methods of the explanation present invention.Fig. 3 is the decoction for illustrating present embodiment
Cost of use computational methods flow chart.
Before the supply of decoction, initially, the decoction modulation feedway that decoction provider is possessed is used with decoction
The equipment that person is possessed is attached.Decoction is modulated into the decoction supplying tubing of feedway and the equipment of user is connected
Connect, and carry out the connection of the utility (utility) for being supplied from decoction user's side joint.Here, it is so-called useful
Material, refers to such as electric power, pure water, nitrogen.
After being provided with, start decoction modulation feedway, decoction is modulated decoction while modulating feedway operating,
Decoction is supplied according to the supply of decoction user request.Operating, the maintenance of decoction modulation feedway manage to possess decoction
The responsibility for modulating the decoction provider side of feedway is carried out.
Decoction provider prepares the various raw materials required for the modulation of decoction.For example, with pure water to 20% TMAH water
In the case that solution is diluted the TMAH aqueous solution to modulate 2.38%, the 20% TMAH aqueous solution is prepared as raw material
(i.e. TMAH stostes).Preparation is carried out by the burden of decoction provider side.
Decoction provider modulates feedway using decoction, and decoction user is modulated from the raw material for the decoction prepared
The decoction of desired constituent concentration.Decoction after modulation is stored in case supplying to user's side apparatus.
When causing the raw material of decoction to disappear due to modulation decoction every time, decoction provider prepares the raw material of decoction, to decoction
Modulate feedway supplement raw material.Decoction provider implements the preparation of the raw material of decoction and decoction modulates the maintenance of feedway
Management, will not be delayed with the modulation for causing decoction to modulate the decoction that feedway is carried out.
If there is the supply request of decoction from the equipment using decoction, decoction modulates feedway by the decoction after modulation
Equipment of the supply to decoction is used.The supply of decoction is carried out via the pipe arrangement for possessing flow quantity recorder.Pass through the integrated flow
Meter, so as to measure the quantity delivered of decoction as integrated flow.
Simply by the presence of the supply request of decoction, the modulation and supply of decoction is just repeated in decoction modulation feedway.By
This, can carry out the supply of decoction to user's side apparatus without interruption.
Decoction provider monitors to the quantity delivered of the decoction measured by flow quantity recorder, i.e. integrated flow.Based on rule
The quantity delivered (integrated flow) of the decoction of period as such as a week or one month between periodically, to calculate the use of decoction
Expense.For example, by the quantity delivered (integrated flow of the decoction of one month：Q1 (L/M)) it is multiplied by average per unit expense of decoction
With (unit price：P1 (member/L)), to calculate the decoction cost of use in this month.
In the case where calculating decoction cost of use, quantity delivered (Q1) × unit price of decoction can be passed through as described above
(P1) to calculate, but the quantity delivered (Q1) of decoction is converted into the quantity delivered (Q2 (L/M)) of raw material, by the quantity delivered (Q2) of raw material
It is multiplied by per unit expense (unit price of stoste：P2 (member/L)), the cost of use in this month can be calculated.
For example, illustrating the feelings that the TMAH aqueous solution to modulate 2.38% is allocated to 20% the TMAH aqueous solution and pure water
Condition.If the quantity delivered of the TMAH aqueous solution by the 2.38% of flow quantity recorder is set into Q1, by 20% required for modulation Q1
The TMAH aqueous solution the need for amount be set to Q2, then 2.38 × Q1=20 × Q2 relation set up.
If the unit price of the 20% TMAH aqueous solution is set into P2, and coefficient of conversion K is taken, then of that month cost of use turns into, and makes
With expense=P2 × Q2=P2 × K × Q1=P2 × (2.38/20) × Q1.Coefficient of conversion K can be according to the concentration and medicine of raw material
The concentration of liquid is easily asked for.
In the present embodiment, although be modulated into one one-tenth split of decoction to dilute the 20% TMAH aqueous solution with pure water
It is illustrated exemplified by system, but is not limited to this.For example, known for the etching decoction as electrode materials such as Al
Comprising phosphoric acid, nitric acid, acetic acid these three compositions PAN (Phosphoric acid, Acetic acid, Nitric acid) medicine
Liquid, also can similarly calculate the cost of use in this month.
Decoction provider asks for the cost of use of the decoction so calculated to decoction user.Decoction user is to decoction
Provider pays the cost of use for the decoction asked for.So, the supply of decoction is set up.
The decoction cost of use computational methods of present embodiment are characterised by, by via possessing matching somebody with somebody for flow quantity recorder
The decoction that the provider that pipe supplies decoction to the equipment using decoction is possessed modulates feedway, the medicine prepared from provider
The raw material of liquid modulates the decoction for the constituent concentration that the user of decoction wants, according to the need for decoction by flow quantity recorder come
Determine integrated flow while the decoction after modulation is supplied to the equipment of user side, to the user of decoction ask for based on by
The integrated flow for the specified time limit that flow quantity recorder is determined and the cost of use of decoction calculated.
By this feature, according to the decoction cost of use computational methods of present embodiment, decoction user can be not subject to
Oneself prepares the burden of decoction.Furthermore, it is possible to be not subject to buy decoction modulation feedway, modulate medicine using the device oneself
The burden of liquid, the raw material of preparation decoction.As long as decoction user indicates to measure the need for decoction, the confession of decoction will be received automatically
Give.According to the decoction cost of use computational methods of present embodiment, realize according to the quantity delivered of decoction to impose making for decoction
With decoction cost of use computational methods new as expense.The supply mode of such decoction is in semiconductor or liquid crystal display
Manufacturing process and various batteries manufacturing process in, be the new mode being completely absent in the past, be relative to foregoing
First method, second method, can be referred to as epoch-making mode as " Third Way ".
(the 3rd embodiment)
Next, explanation make use of the network that the flow quantity recorder and computer that will be provided with communication function connected
Decoction cost of use computational methods and decoction cost of use computing system.Fig. 4 is the integrated flow for possessing user side factory
Meter and via network connection provider side server system decoction cost of use computing system schematic diagram.
The decoction cost of use computing system 100 of present embodiment shown in Fig. 4 possesses：Possess 1 of decoction provider
Server system 81；The tool of the factory 61,62,63,64 and 65 for being respectively arranged at decoction user connected via network 80
There is the flow quantity recorder 71,72,73,74 and 75 (5 flow quantity recorders for being respectively arranged at factory at 5) of communication function.
The quantity of the flow quantity recorder and server system that constitute decoction cost of use computing system 100 is not limited to
Quantity described in Fig. 4.The present invention decoction cost of use computing system possess via network connection 1 flow quantity recorder and
1 server system.
Though not illustrated in detail in Fig. 4, in each factory, decoction is modulated feedway and is connected with using the equipment of decoction.
Feedway is modulated by the decoction, live modulation is carried out to decoction, and supply to decoction uses equipment.For supplying decoction
Pipe arrangement, set with communication function flow quantity recorder 71,72,73,74 and 75.Flow quantity recorder 71,72,73,74 with
And 75 measurement supply to decoction use equipment decoction quantity delivered as integrated flow.
As the flow quantity recorder for possessing communication function, the Coriolis-type digital flow of KEYENCE societies can be used to pass
Sensor FD-S series etc..The measurement data such as integrated flow can remotely be obtained via networks such as internets.
Server system 81 possesses acceptance division 82, storage part 83 and calculating part 84.In addition, server system 81 possesses
Display 85.81 pairs of server system be connected to the flow quantity recorder 71~75 of network 80 each send successively service please
Ask so that send the determination data of integrated flow.Flow quantity recorder 71~75 is sent according to service request to server system 81
The determination data of integrated flow.
So, the acceptance division 82 of server system 81 obtains accumulative stream from each flow quantity recorder 71,72,73,74 and 75
The determination data of amount.Now, the individual identification numbering that flow quantity recorder is obtained together with the determination data of integrated flow is (so-called
Device ID) and measure date-time (date and hour being determined).It may not be measure date-time, but example
Such as the communication date time.
Individual identification numbering of the server system 81 based on each flow quantity recorder 71,72,73,74 and 75, according to each
Flow quantity recorder 71,72,73,74,75 writes afterwards the measured value of acquired integrated flow and measure date-time by storing
In the storage part 83 of the compositions such as device, hard disk, thus stored.
By being continuously repeated from accumulative stream with predetermined time interval (such as 1 minute interval is spaced for 1 hour)
The step of gauge obtains determination data, so that the passage (i.e. the historical record of integrated flow) to decoction quantity delivered is stored.
Due to being stored in the storage part 83 of server system 81 according to each flow quantity recorder 71,72,73,74,75
The historical record of its integrated flow, so will appreciate that the confession of the decoction of each specified time limit (such as a week or one month)
To amount.For example in the case of the quantity delivered according to each month to grasp decoction, consumption check data monthly is predetermined
Time, by subtracted from the integrated flow of consumption time check data of this month last month consumption time check data it is accumulative
Flow, can try to achieve the integrated flow untill the consumption check day of this month after the consumption check day of last month.
Server system 81 further according to the rules during the quantity delivered of decoction calculate the decoction of the specified time limit
Cost of use.For example, in the case where calculating cost of use needing by each moon, it is accumulative by what is asked for as described above
Flow is for example multiplied by the expense (unit price) of the per unit liquid measure of decoction to calculate the cost of use of decoction.In advance by cost of use
Calculating formula and unit price be programmed into the storage part 83 of server system 81.
Decoction provider asks for the cost of use of calculated decoction to decoction user according to each specified time limit.
Here, decoction user is referred to as the payment justice of the cost of use with the decoction for receiving supply in the supply contract of decoction
The people of business.If server system 81 and the computer of the decoction user of the payer of the cost of use as decoction pass through network
Connected, then asking for for the cost of use of decoction can also automatically be carried out by server system 81.In this case, service
Device system 81 is programmed as follows：Electronically automatically generate the account for the cost of use for asking for calculated decoction
It is single, the bill autoelectrinic is sent according to per specified time limit and gives decoction user.
The cost of use of decoction is paid by decoction user, so that the supply of decoction finishes according to each specified time limit.
So, using network, supplied while based on the decoction quantity delivered everywhere of remotely monitor in a one-dimensional fashion as supply decoction
Mode, realizes the cost of use computational methods of decoction.
The network 80 of present embodiment is not limited to be made up of the flow quantity recorder for being arranged at different factories.Example
Such as or there are multiple manufacturing lines in larger factory, the flow quantity recorder that will be arranged at each manufacturing line is connected
Smaller scale network.For example, it may be network as follows, i.e. certain flow quantity recorder is arranged at the work of China
Factory, certain flow quantity recorder is arranged at the factory in Taiwan, and certain flow quantity recorder is arranged at the factory of South Korea, in addition certain flow quantity recorder
The factory of Japan is arranged at, the world scale that the flow quantity recorder of the factory of countries in the world is connected will be respectively arranged at
Network.
More than, the content illustrated referring to the drawings to each embodiment, for the manufacture of semiconductor, liquid crystal display
Various electrolyte, electrolyte modulation feedway and the electrolyte used in the various decoctions that are used in journey, the manufacture of battery
Cost of use computing system, can similarly implement.
In accordance with the invention it is possible to which realizing from user side can prepare the burden of decoction or its raw material by user, buy
With or maintain the supply mode of new decoction that is freed in the burden of management decoction modulation feedway.In addition, according to
A kind of present invention, using the teaching of the invention it is possible to provide the indispensable decoction modulation feedway of realization institute of supply mode of the new decoction.Root
According to the present invention, additionally it is possible to by the server system with network connection come in a one-dimensional fashion to used in the factory of each user
Flow quantity recorder carries out remotely monitor.
Claims (10)
1. a kind of decoction modulates feedway, the decoction utilized to use in the manufacturing process of semiconductor or liquid crystal display
Equipment modulate and supply the decoction, wherein,
It is delivered in the decoction after by modulation on the pipe arrangement of the equipment and possesses flow quantity recorder.
2. decoction according to claim 1 modulates feedway, wherein,
The flow quantity recorder possesses communication function.
3. a kind of decoction cost of use computational methods, calculate the decoction used in the manufacturing process of semiconductor or liquid crystal display
Cost of use, the decoction cost of use computational methods include following processing：
Gathered around by the provider for supplying the decoction to the equipment using the decoction via the pipe arrangement for possessing flow quantity recorder
Some decoctions modulate feedway, the raw material for the decoction prepared from the provider, to modulate the use of the decoction
The decoction for the constituent concentration that person needs,
, will while being measured by the flow quantity recorder to integrated flow according to the requirement of the user of the decoction
The decoction after modulation is supplied to the equipment,
Based on the integrated flow of the specified time limit determined by the flow quantity recorder, asked for calculate to the user of the decoction
Cost of use.
4. a kind of decoction cost of use computational methods, using by using in the manufacturing process of semiconductor or liquid crystal display
The accumulative stream with communication function possessed on the pipe arrangement of the device of the decoction is modulated and supplied to the equipment of the decoction utilized
The network that gauge and server system are connected, to calculate the cost of use of the decoction, the decoction cost of use
Computational methods comprise the following steps：
The step of server system obtains the integrated flow measured by each flow quantity recorder via the network；
The historical record of the integrated flow obtained by the server system is stored according to each flow quantity recorder
The step of；And
The server system based on the historical record calculated according to each equipment specified time limit to the medicine
The step of cost of use that the user of liquid asks for.
5. a kind of decoction cost of use computing system, the cost of use for calculating decoction, the decoction cost of use calculates system
System possesses：
Flow quantity recorder, it is arranged to setting using the decoction utilized in the manufacturing process of semiconductor or liquid crystal display
The pipe arrangement of the standby device modulated and supply the decoction, and with communication function；And
Server system, it is connected via network with the flow quantity recorder,
The server system possesses：
Acceptance division, it receives the integrated flow measured by the flow quantity recorder via the network；
Storage part, it stores the historical record of the received integrated flow according to each flow quantity recorder；With
And
Calculating part, its based on the historical record according to each equipment come computational rules during the decoction usage charges
With.
6. a kind of electrolyte modulates feedway, the electrolyte of the manufacture for battery is modulated and supplies, wherein,
Possesses flow quantity recorder on the pipe arrangement of electrolyte after conveying modulation.
7. electrolyte according to claim 6 modulates feedway, wherein,
The flow quantity recorder possesses communication function.
8. a kind of electrolyte cost of use computational methods, the cost of use of the electrolyte of manufacture for battery, the electricity are calculated
Solving liquid cost of use computational methods includes following processing：
The electrolyte possessed by supplying the provider of the electrolyte via the pipe arrangement for possessing flow quantity recorder, which is modulated, to be supplied
To device, the raw material for the electrolyte prepared from the provider, come modulate the electrolyte user need into
Divide the electrolyte of concentration,
According to the requirement of the user of the electrolyte, while being measured by the flow quantity recorder to integrated flow,
The electrolyte after supply modulation,
Based on the integrated flow of the specified time limit determined by the flow quantity recorder, to calculate user's rope to the electrolyte
The cost of use taken.
9. a kind of electrolyte cost of use computational methods, using will make in modulation for the electrolyte of the manufacture of battery and being supplied to
Carried out with possessing flow quantity recorder and server system with communication function on the pipe arrangement of the device of the equipment of electrolyte
The network of connection, to calculate the cost of use of the electrolyte, the electrolyte cost of use computational methods include following step
Suddenly：
The step of server system obtains the integrated flow measured by each flow quantity recorder via the network；
The historical record for the integrated flow that the server system is obtained is stored according to each flow quantity recorder
Step；And
The server system based on the historical record calculated according to each equipment specified time limit to the electricity
The step of cost of use that the user of solution liquid asks for.
10. a kind of electrolyte cost of use computing system, the cost of use for calculating electrolyte, the electrolyte cost of use
Computing system possesses：
Flow quantity recorder, its dress for being arranged at the electrolyte for modulating the manufacture for battery and being supplied to the equipment using electrolyte
The pipe arrangement put, and with communication function；And
Server system, it is connected via network with the flow quantity recorder,
The server system possesses：
Acceptance division, it receives the integrated flow measured by the flow quantity recorder via the network；
Storage part, it stores the historical record of the received integrated flow according to each flow quantity recorder；With
And
Calculating part, its based on the historical record according to each equipment come computational rules during the electrolyte use
Expense.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015-229407 | 2015-11-25 | ||
| JP2015229407A JP2017097634A (en) | 2015-11-25 | 2015-11-25 | Medical liquid preparation supply device, sales method of medical liquid and medical liquid sales system, and electrolytic solution preparation supply device, sales method of electrolytic solution and electrolytic solution sales system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107039311A true CN107039311A (en) | 2017-08-11 |
Family
ID=58803875
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611051122.9A Pending CN107039311A (en) | 2015-11-25 | 2016-11-24 | Modulation feedway, cost of use computational methods and the system of decoction and electrolyte |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2017097634A (en) |
| KR (1) | KR20170061085A (en) |
| CN (1) | CN107039311A (en) |
| TW (2) | TWM545941U (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7398886B2 (en) * | 2018-07-02 | 2023-12-15 | 東京エレクトロン株式会社 | Flow rate controller, gas supply system and flow rate control method |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002120898A (en) * | 2000-10-13 | 2002-04-23 | Tatsuno Corp | Charge collecting system for liquid fuel feeding mechanism |
| JP2004319568A (en) * | 2003-04-11 | 2004-11-11 | Sharp Corp | Liquid chemical device, etching device, and method of managing concentration of etchant |
| JP2005274263A (en) * | 2004-03-24 | 2005-10-06 | Matsushita Electric Ind Co Ltd | Fluid flow measuring instrument and fluid flow measuring method |
| JP2006228815A (en) * | 2005-02-15 | 2006-08-31 | Dainippon Screen Mfg Co Ltd | Substrate treatment system, method of calculating treatment-fluid using price, and substrate treatment apparatus |
| CN102572876A (en) * | 2010-12-20 | 2012-07-11 | 横河电机株式会社 | Monitoring management apparatus, monitoring management method, and device storing monitoring management program |
| JP2013207076A (en) * | 2012-03-28 | 2013-10-07 | Dainippon Screen Mfg Co Ltd | Processing liquid supply device and processing liquid supply method |
| CN206311889U (en) * | 2015-11-25 | 2017-07-07 | 株式会社平间理化研究所 | The modulation feedway and cost of use computing system of liquid and electrolyte |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0834768B2 (en) * | 1985-10-22 | 1996-03-29 | 伊東公業 株式会社 | Method for detecting remaining amount in storage tank for fluid articles |
| JPH0868746A (en) * | 1994-08-29 | 1996-03-12 | Dainippon Screen Mfg Co Ltd | Flow cell for measuring transmitted light |
| JP2015026367A (en) * | 2013-05-15 | 2015-02-05 | パナソニックＩｐマネジメント株式会社 | Flow rate measurement device and radio device used for flow rate measurement device |
-
2015
- 2015-11-25 JP JP2015229407A patent/JP2017097634A/en not_active Ceased
-
2016
- 2016-11-24 KR KR1020160157657A patent/KR20170061085A/en unknown
- 2016-11-24 CN CN201611051122.9A patent/CN107039311A/en active Pending
- 2016-11-25 TW TW105218015U patent/TWM545941U/en not_active IP Right Cessation
- 2016-11-25 TW TW105138772A patent/TW201727734A/en unknown
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002120898A (en) * | 2000-10-13 | 2002-04-23 | Tatsuno Corp | Charge collecting system for liquid fuel feeding mechanism |
| JP2004319568A (en) * | 2003-04-11 | 2004-11-11 | Sharp Corp | Liquid chemical device, etching device, and method of managing concentration of etchant |
| JP2005274263A (en) * | 2004-03-24 | 2005-10-06 | Matsushita Electric Ind Co Ltd | Fluid flow measuring instrument and fluid flow measuring method |
| JP2006228815A (en) * | 2005-02-15 | 2006-08-31 | Dainippon Screen Mfg Co Ltd | Substrate treatment system, method of calculating treatment-fluid using price, and substrate treatment apparatus |
| CN102572876A (en) * | 2010-12-20 | 2012-07-11 | 横河电机株式会社 | Monitoring management apparatus, monitoring management method, and device storing monitoring management program |
| JP2013207076A (en) * | 2012-03-28 | 2013-10-07 | Dainippon Screen Mfg Co Ltd | Processing liquid supply device and processing liquid supply method |
| CN206311889U (en) * | 2015-11-25 | 2017-07-07 | 株式会社平间理化研究所 | The modulation feedway and cost of use computing system of liquid and electrolyte |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20170061085A (en) | 2017-06-02 |
| TWM545941U (en) | 2017-07-21 |
| TW201727734A (en) | 2017-08-01 |
| JP2017097634A (en) | 2017-06-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108507645B (en) | Calibration coefficient determination method, calibration method and device for flow meter on unmanned aerial vehicle | |
| CN103559760B (en) | Electricity-consumption managing system device | |
| CN107533780A (en) | A kind of fee management system and method based on intelligent electric meter | |
| CN103558453A (en) | System for collecting maximum demand of multi-power-source power supply direct power purchase customers | |
| US10612959B2 (en) | Split electronic volume corrector (EVC) | |
| CN206311889U (en) | The modulation feedway and cost of use computing system of liquid and electrolyte | |
| CN107039311A (en) | Modulation feedway, cost of use computational methods and the system of decoction and electrolyte | |
| CN112526185A (en) | Multi-loop or power supply electricity consumption customer maximum demand meter device and metering method thereof | |
| CN207516724U (en) | Liquid management system, the computing system of expense of substrate board treatment | |
| CN208255930U (en) | A kind of measuring terminal operation management system | |
| CN203223744U (en) | Novel high-precision automatic alcohol quantitative conveying and filling device | |
| CN110045212A (en) | A kind of method and system that line loss per unit is evaluated based on electric energy metering device uncertainty | |
| CN101526370B (en) | Remote-control intelligent water meter | |
| CN207529428U (en) | The computing system of the concentration management device of liquid, regenerating unit and expense | |
| CN210620349U (en) | Ammonia water automatic reagent feeding system | |
| CN207800559U (en) | The processing cost computing system of base plate processing system and substrate | |
| CN112362938A (en) | Multi-loop or power supply electricity consumption customer maximum demand meter device | |
| CN109947017A (en) | A kind of urban water supply management apparatus and system | |
| JP4914111B2 (en) | Water operation management apparatus and method | |
| TW202118968A (en) | Cloud monitoring, delivery and transaction system for bottled high-pressure gas having the function of measuring the high-pressure gas residual at the consumer end to perform programmed delivery | |
| CN212779506U (en) | Coriolis mass flowmeter calibrating device | |
| CN104112317A (en) | Meter reading prepayment system applicable to gas clusters | |
| KR20000058916A (en) | Remote inspection of a meter method and device using watt hour meter therefor | |
| CN211612524U (en) | Mixed acid system | |
| CN220794333U (en) | Automatic flow sensing system of portable fire water meter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170811 |