CN107039143B - Patterned ground protection layer - Google Patents
Patterned ground protection layer Download PDFInfo
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- CN107039143B CN107039143B CN201610075821.0A CN201610075821A CN107039143B CN 107039143 B CN107039143 B CN 107039143B CN 201610075821 A CN201610075821 A CN 201610075821A CN 107039143 B CN107039143 B CN 107039143B
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- connector
- coupled
- protection layer
- ground protection
- patterned ground
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- 230000008878 coupling Effects 0.000 claims description 11
- 238000010168 coupling process Methods 0.000 claims description 11
- 238000005859 coupling reaction Methods 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 6
- 239000010410 layer Substances 0.000 description 65
- 238000010586 diagram Methods 0.000 description 19
- 238000005516 engineering process Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- 230000006698 induction Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/34—Special means for preventing or reducing unwanted electric or magnetic effects, e.g. no-load losses, reactive currents, harmonics, oscillations, leakage fields
- H01F27/36—Electric or magnetic shields or screens
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Structure Of Printed Boards (AREA)
Abstract
A kind of patterned ground protection layer includes a plurality of parts and the first connector to third connector.The each of above-mentioned first connector and the second connector is coupled to wantonly two those non-conterminous parts.Above-mentioned third connector is coupled to the two adjacent in those parts.
Description
Technical field
This case relates to a kind of basic electric component, and in particular to a kind of patterned ground protection layer.
Background technique
With the development of science and technology the processing procedure of product body inductance (integrated inductor) towards 28 nanometers (nm) and
The development of 20 nanometers.Under this miniature sizes, there are many negative effects because caused by miniature sizes, for example, because in product body inductance
Oxidated layer thickness it is relatively thin, and cause capacitance higher, because what is used in product body inductance reconfigures layer (redistribution
Layer, RDL) it is thicker, and higher capacitance ... etc. is generated between RDL layer shape structure, these situations all can be to the quality of inductance
Factor has an impact.
Summary of the invention
One technology aspect of this case content is about a kind of patterned ground protection layer, and it includes a plurality of parts and
A connection piece is to third connector.The each of above-mentioned first connector and the second connector be coupled to wantonly two it is non-conterminous those
Part.Above-mentioned third connector is coupled to the two adjacent in those parts.
One technology aspect of this case content is about a kind of patterned ground protection layer, and it includes first parts to the 8th
Divide, the first connector to the 4th connector.First connector is coupled to first part, Part IV and the 7th part.Second connects
Fitting is coupled to second part, Part V and the 7th part.Third connector is coupled to Part III, Part V and the 8th
Partly.4th connector is coupled to first part, Part III and the 6th part.First part sequentially surround to Part VIII matches
It is placed in around the first connector to the 4th connector.
Therefore, according to the technology contents of this case, embodiment of this case is used and is changed by a kind of patterned ground protection layer is provided
The problem of qualitative factor decline of kind inductance.
Detailed description of the invention
For the above and other purpose, feature, advantage and embodiment of this case can be clearer and more comprehensible, the explanation of institute's accompanying drawings
It is as follows:
Fig. 1 is the schematic diagram that a kind of patterned ground protection layer is painted according to one embodiment of this case.
Fig. 2 is the schematic diagram that a kind of patterned ground protection layer is painted according to one embodiment of this case.
Fig. 3 is the schematic diagram that a kind of patterned ground protection layer is painted according to one embodiment of this case.
Fig. 4 is the schematic diagram that a kind of patterned ground protection layer is painted according to one embodiment of this case.
Fig. 5 is the schematic diagram that a kind of patterned ground protection layer is painted according to one embodiment of this case.
Fig. 6 is the schematic diagram that a kind of patterned ground protection layer is painted according to one embodiment of this case.
Fig. 7 is the schematic diagram that a kind of patterned ground protection layer is painted according to one embodiment of this case.
Fig. 8 is the schematic diagram that a kind of patterned ground protection layer is painted according to one embodiment of this case.
Fig. 9 is the schematic diagram that a kind of patterned ground protection layer is painted according to one embodiment of this case.
Figure 10 is the experimental data figure that a kind of long-pending body induction structure is painted according to one embodiment of this case.
[symbol description]
100: patterned ground protection layer
100A~100G: patterned ground protection layer
110: first part
112: outline border
114: metal portion
120: second part
130: Part III
140: Part IV
150: Part V
160: Part VI
170: Part VII
180: Part VIII
191: the first connectors
192: the second connectors
193: the four connectors
194: the five connectors
195: the six connectors
196: the seven connectors
199: third connector
610: first part
620: second part
630: Part III
640: Part IV
650: Part V
660: Part VI
670: the seven parts
680: Part VIII
691: the first connectors
692: the second connectors
699: third connector
791: the first connectors
792: the second connectors
793: third connector
794: the four connectors
891: the first connectors
892: the second connectors
893: third connector
894: the four connectors
895: the five connectors
896: the six connectors
897: the seven connectors
C1, C2: curve
Specific embodiment
Fig. 1 is the schematic diagram that a kind of patterned ground protection layer is painted according to one embodiment of this case.As shown, patterned
Ground protection layer (patterned ground shield) 100 includes a plurality of parts (such as first part 110, second part
120, Part III 130 and Part IV 140), the first connector 191, the second connector 192 and third connector 199.Yu Lian
It connects in relationship, each of above-mentioned first connector 191 and the second connector 192 is coupled to wantonly two those non-conterminous parts.
For example, the first connector 191 is coupled to mutually non-conterminous first part 110 and Part IV 140.In addition, the second connection
Part 192 is coupled to mutually non-conterminous second part 120 and Part III 130.Furthermore third connector 199 is coupled to those portions
Adjacent the two in point.For example, third connector 199 is coupled to first part 110 and second adjacent in those parts
Part 120.Not to be limited shown in Fig. 1, third connector 199 can also be coupled to adjacent second part 120 and for right this case
Four parts 140 or third connector 199 can be coupled to adjacent Part III 130 and Part IV 140 or third and connect
Fitting 199 can be coupled to adjacent first part 110 and Part III 130, hold depending on actual demand.
It will appoint due in a plurality of parts 110~140 of patterned ground protection layer 100, only transmitting connector 191,192
Two non-conterminous parts are coupled, then couple the two adjacent in those parts through third connector 199, because
This is such as configured between inductance and substrate if the patterned ground protection layer 100 of this case is configured in long-pending body inductance, figure
Case formula ground protection layer 100 can not only prevent inductance from influencing the qualitative factor of inductance in generating electric current on substrate, patterned
The particular arrangement mode of ground protection layer 100 also can make the electric current generated thereon relatively be difficult to flow, and prevent patterned ground connection
The phenomenon that intercouples on protective layer 100, further to promote the qualitative factor of inductance.
Fig. 2 is the schematic diagram that a kind of patterned ground protection layer is painted according to another embodiment of this case.It is shown in FIG. 1 to make
The structure configuration of patterned ground protection layer 100 with connection relationship it can be readily appreciated that in Fig. 2, by each section 110~140 of Fig. 1
It is indicated with block diagram.Patterned ground protection layer 100A includes first part 110, second part 120, Part III 130 and the
Four parts 140.In in structure configuration, second part 120 is adjacent to first part 110, and Part III 130 is adjacent to first part
110, and Part IV 140 is adjacent to second part 120 and Part III 130.In in connection relationship, 191 coupling of the first connector
It is connected to first part 110 and Part IV 140.In addition, the second connector 192 is coupled to second part 120 and Part III
130.In the present embodiment, patterned ground protection layer 100A also includes third connector 199, the coupling of this third connector 199
Adjacent the two in those parts, such as third connector 199 are coupled to first part 110 and second part 120, are coupled to
First part 110 and Part III 130, be coupled to Part III 130 and Part IV 140 or be coupled to second part 120 with
Part IV 140 is held depending on actual demand.
Fig. 3 is the schematic diagram that a kind of patterned ground protection layer is painted according to this case another embodiment.Compared to shown in Fig. 2
Patterned ground protection layer 100A, patterned ground protection layer 100B shown in Fig. 3 further include Part V 150, the 6th
Divide the 160, the 4th connector 193 and the 5th connector 194.In in structure configuration, Part V 150 adjacent to Part III 130,
Part VI 160 is adjacent to Part IV 140 and Part V 150.In in connection relationship, the 4th connector 193 couples third
Part 130 and Part VI 160, the 5th connector 194 couple Part IV 140 and Part V 150.In another embodiment
In, the first connector 191 is configured on the second connector 192, and the 5th connector 194 be configured at the 4th connector 193 it
On.In another embodiment, patterned ground protection layer 100B also includes third connector 199, the coupling of this third connector 199
It is coupled to first part 110 and second part 120 in those adjacent parts, such as third connector 199, is coupled to third
Part 130 and Part IV 140 are coupled to Part V 150 and Part VI 160, hold depending on actual demand.
Fig. 4 is the schematic diagram that a kind of patterned ground protection layer is painted according to the another embodiment of this case.Compared to shown in Fig. 2
Patterned ground protection layer 100A, patterned ground protection layer 100C shown in Fig. 4 further include Part V 150, the 6th
Divide 160, Part VII 170, Part VIII 180, the 4th connector 193 and the 5th connector 194.On structure configures, the 5th
Part 150 is coupled to Part III 130, and Part VI 160 is coupled to Part IV 140, and Part VII 170 is adjacent to the 5th
Divide 150, Part VIII 180 is adjacent to Part VI 160 and Part VII 170.In in connection relationship, 193 coupling of the 4th connector
Part V 150 and Part VIII 180 are connect, the 5th connector 194 couples Part VI 160 and Part VII 170.In another reality
It applies in example, the first connector 191 is configured on the second connector 192, and the 5th connector 194 is configured at the 4th connector
On 193.
Fig. 5 is the schematic diagram that a kind of patterned ground protection layer is painted according to another embodiment of this case.Compared to shown in Fig. 2
Patterned ground protection layer 100A, patterned ground protection layer 100D shown in fig. 5 further include Part V 150, the 6th
Divide 160, Part VII 170, Part VIII 180, the 4th connector 193, the 5th connector 194, the 6th connector 195 and the 7th
Connector 196.In in structure configuration, Part V 150 is adjacent to Part III 130, and Part VI 160 is adjacent to Part IV
140 with Part V 150, Part VII 170 adjacent to Part V 150, Part VIII 180 adjacent to Part VI 160 with
Part VII 170.In in connection relationship, the 4th connector 193 couples Part III 130 and Part VI 160, the 5th connector
194 coupling Part IV 140 and Part V 150, the 6th connector 195 couple Part V 150 and Part VIII 180, the
Seven connectors 196 couple Part VI 160 and Part VII 170.In another embodiment, the first connector 191 is configured at
On two connectors 192, the 5th connector 194 is configured on the 4th connector 193, and the 6th connector 195 is configured at
On seven connectors 196.
Together refering to Fig. 4 and Fig. 5, in another embodiment, patterned ground protection layer 100C, 100D also include that third connects
Fitting 199, this third connector 199, which is coupled to, appoints those adjacent parts, such as third connector 199 to be coupled to first part
110 with second part 120, be coupled to first part 110 and Part III 130, be coupled to Part III 130 and Part IV
140, Part V 150 and Part VI 160 are coupled to or is coupled to Part VII 170 and Part VIII 180, end view is practical to be needed
Depending on asking.
In above-described embodiment, connector 191~196 is not coupled mutually.In addition, patterned ground protection layer 100,
The each of those parts 110~180 of 100A~100D all includes outline border and plural metal portion, plural number metal portion coupling
In outline border.To make this technical characteristic it can be readily appreciated that together refering to fig. 1, patterned 100 first part 110 of ground protection layer includes
Outline border 112 and plural metal portion 114, and plural metal portion 114 is coupled to outline border 112.Patterned ground protection layer 100
The structure of rest part 120~140 is similar to first part 110, does not repeat in this.In another embodiment, wantonly two coupling
Those parts using those connectors as center balanced configuration, for example, the first part 110 being mutually coupled and Part IV
140 balanced configurations centered on connector 191,192.Furthermore the second part 120 being mutually coupled and Part III 130 are also
The balanced configuration centered on connector 191,192.In another embodiment, those partial symmetries of Ren Xianglin are configured, citing
For, adjacent first part 110 and 120 balanced configuration of second part, adjacent first part 110 and Part III 130 are right
Claim configuration, and so on.It should be noted that though only being explained above with the patterned ground protection layer 100 of Fig. 1, however, figure
2 to Fig. 5 patterned ground protection layer 100A~100D also has those parts of wantonly two coupling centered on those connectors
Balanced configuration, and have the technical characteristic for appointing adjacent those partial symmetries configuration, it is not repeated in this.
Fig. 6 is the schematic diagram that a kind of patterned ground protection layer is painted according to this case another embodiment.As shown, pattern
Formula ground protection layer 100E includes first part 610 to Part VIII 680.In in structure configuration, first part 610 is to the 8th
680 are divided sequentially to be arranged around around connector 691,692.In in connection relationship, the first connector 691 is coupled to those odd numbers
Part, and the second connector 692 is coupled to those even segments, for example, the first connector 691 coupling first part 610,
Part III 630, Part V 650 and the 7th part 670, and the second connector 692 couples second part 620, Part IV
640, Part VI 660 and the 8th part 680.In another embodiment, patterned ground protection layer 100E further includes third company
Fitting 699, this third connector 699 are coupled to one of one of those odd number parts and those even segments, citing
For, third connector 699 is coupled to first part 610 and Part VIII 680.
Fig. 7 is the schematic diagram that a kind of patterned ground protection layer is painted according to the another embodiment of this case.Compared to shown in Fig. 6
Patterned ground protection layer 100E, the connection type of the connector of patterned ground protection layer 100F shown in Fig. 7 is different, says
It is bright as after.Refering to Fig. 7, the first connector 791 is coupled to first part 610, Part IV 640 and the 7th part 670, and second connects
Fitting 792 is coupled to the 7th part 670, second part 620 and Part V 650, third connector 793 and is coupled to Part V
650, the 8th part 680 and Part III 630, and the 4th connector 794 is coupled to Part III 630, the 6th part 660 and the
A part 610.In another embodiment, the first connector 791 is configured on the second connector 792, and the second connector 792 is matched
It is placed on third connector 793, and third connector 793 is configured on the 4th connector 794.
Fig. 8 is the schematic diagram that a kind of patterned ground protection layer is painted according to another embodiment of this case.Compared to shown in Fig. 6
Patterned ground protection layer 100E, the connection type of the connector of patterned ground protection layer 100G shown in Fig. 8 is different, says
It is bright as after.Refering to Fig. 8, the first connector 891 is coupled to Part III 630 and the 7th part 670, the coupling of the second connector 892
In Part IV 640 and the 8th part 680, third connector 893 is coupled to second part 620 and third part 630, and the 4th connects
Fitting 894 is coupled to first part 610 and Part V 650, and the 5th connector 895 is coupled to second part 620 and the 6th
Divide 660.In another embodiment, patterned ground protection layer 100G further includes the 6th connector 896 and the 7th connector 897,
6th connector 896 is coupled to Part IV 640 and the 5th part 650, and the 7th connector 897 is coupled to Part VII 670
And the 8th part 680.In another embodiment, the first connector 891 is configured on the second connector 892, the second connector
892 are configured on the 4th connector 894, and the 4th connector 894 is configured on the 5th connector 895, in addition, third connects
Fitting 893, the 6th connector 896 and the 7th connector 897 are configured at same layer.In another embodiment, third connector
893, the 6th connector 896 and the 7th connector 897 can be configured at same layer with the 4th connector 894.
Fig. 9 is the schematic diagram that a kind of patterned ground protection layer is painted according to one embodiment of this case.Please referring initially to Fig. 1,
Patterned ground protection layer 100 all is compared comprising stripes in a plurality of parts 110~140 of patterned ground protection layer 100
It is arranged askew for peripheral box.Compared to Fig. 1, the patterned ground protection layer 100H of Fig. 9 is in first part 110 and
The stripes of the junction of two parts 120 are directly to arrangement, in the strip of Part III 130 and the junction of Part IV 140
Portion is also directly to arrangement.In some embodiments, directly to the stripes of arrangement can for one or more.
Figure 10 is the experimental data figure that a kind of long-pending body induction structure is painted according to this case another embodiment.This experimental data figure
It indicates that under different frequency, the corrresponding quality factor Q of the inductance of product body inductance.As shown, curve C1 is product body inductance
Not using the experimental data of the patterned ground protection layer of this case.Curve C2 is that product body inductance is anti-using the patterned ground connection of this case
The patterned ground protection layer of the experimental data of sheath, this case is arranged between inductance and substrate.It can by the experimental data of Fig. 9
Know, the qualitative factor of curve C2 is preferred compared with the qualitative factor of curve C1, therefore, is able to prove that long-pending body inductance uses the pattern of this case
Formula ground protection layer can improve the qualitative factor of its interior inductance really, and according to experimental result, the qualitative factor of inductance is about promoted
20%, and then promote the efficiency of whole volume inductance.
By above-mentioned this case embodiment it is found that there are following advantages using this case.Embodiment of this case is by providing a kind of figure
Case formula ground protection layer uses the qualitative factor for improving inductance in product body inductance, and then promotes the efficiency of whole volume inductance.
Although disclosing the specific embodiment of this case in embodiment above, so it is not limited to this case, this case institute
Belong in technical field and has usually intellectual, it is various when that can be carried out to it in the case of not departing from the principle and spirit of this case
It changes and modification, therefore the protection scope of this case is when being subject to subsidiary claim institute defender.
Claims (10)
1. a kind of patterned ground protection layer, includes:
2N part, wherein N is the integer more than or equal to 2；
The each of one first connector and one second connector, first connector and second connector is only coupled to neither
Those adjacent parts；And
One third connector, is coupled to the two adjacent in those parts；
Wherein, which is mutually not directly connected with second connector.
2. patterned ground protection layer according to claim 1, wherein those parts include:
One first part；
One second part, adjacent to the first part；
One Part III, adjacent to the first part；And
One Part IV, adjacent to the second part and the Part III；
Wherein first connector is coupled to the first part and the Part IV, and second connector couples the second part
With the Part III.
3. patterned ground protection layer according to claim 2, wherein those parts are further included:
One Part V, adjacent to the Part III；And
One Part VI, adjacent to the Part IV and the Part V；
Wherein the patterned ground protection layer further includes:
One the 4th connector, couples the Part III and the Part VI；And
One the 5th connector, couples the Part IV and the Part V, and wherein first connector is configured at second connection
On part, and the 5th connector is configured on the 4th connector.
4. patterned ground protection layer according to claim 2, wherein those parts are further included:
One Part V is coupled to the Part III；
One Part VI is coupled to the Part IV；
One Part VII, adjacent to the Part V；And
One Part VIII, adjacent to the Part VI and the Part VII；
Wherein the patterned ground protection layer further includes:
One the 4th connector, couples the Part V and the Part VIII；And
One the 5th connector, couples the Part VI and the Part VII, and wherein first connector is configured at second connection
On part, and the 5th connector is configured on the 4th connector.
5. patterned ground protection layer according to claim 2, wherein those parts are further included:
One Part V, adjacent to the Part III；
One Part VI, adjacent to the Part IV and the Part V；
One Part VII, adjacent to the Part V；And
One Part VIII, adjacent to the Part VI and the Part VII；
Wherein the patterned ground protection layer further includes:
One the 4th connector, couples the Part III and the Part VI；
One the 5th connector, couples the Part IV and the Part V
One the 6th connector, couples the Part V and the Part VIII；And
One the 7th connector, couples the Part VI and the Part VII, and wherein first connector is configured at second connection
On part, the 5th connector is configured on the 4th connector, and the 6th connector be configured at the 7th connector it
On.
6. patterned ground protection layer according to claim 1, wherein each of those parts includes:
One outline border；And
Plural metal portion, is coupled to the outline border, wherein those parts of wantonly two coupling are symmetrically matched centered on those connectors
It sets, wherein those adjacent partial symmetries is appointed to configure.
7. patterned ground protection layer according to claim 1, wherein those parts include:
One first part a to Part VIII is sequentially arranged around around first connector and second connector；
Wherein first connector is coupled to the odd number part of those parts, and second connector is coupled to the idol of those parts
Number part, wherein the third connector is coupled to one of one of those odd number parts and those even segments.
8. patterned ground protection layer according to claim 1, wherein those parts include:
One first part a to Part VIII is sequentially arranged around around first connector and second connector；
Wherein first connector is coupled to the Part III and the Part VII, which is coupled to the 4th
Divide and the Part VIII, the third connector be coupled to the second part and the Part III,
Wherein the patterned ground protection layer further includes:
One the 4th connector, is coupled to the first part and the Part V；
One the 5th connector, is coupled to the second part and the Part VI；
One the 6th connector is coupled to the Part IV and the Part V；And
One the 7th connector is coupled to the Part VII and the Part VIII.
9. patterned ground protection layer according to claim 8, wherein first connector is configured at second connector
On, which is configured on the 4th connector, and the 4th connector is configured on the 5th connector,
Wherein the third connector, the 6th connector and the 7th connector are configured at same layer.
10. a kind of patterned ground protection layer, includes:
One first part a to Part VIII；
One first connector is coupled to the first part, the Part IV and the Part VII；
One second connector is coupled to the second part, the Part V and the Part VII；
One third connector is coupled to the Part III, the Part V and the Part VIII；And
One the 4th connector is coupled to the first part, the Part III and the Part VI, and wherein the first part extremely should
Part VIII is sequentially arranged around around first connector to the 4th connector, and wherein first connector is configured at this
On second connector, which is configured on the third connector, and the third connector is configured at the 4th
On connector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610075821.0A CN107039143B (en) | 2016-02-03 | 2016-02-03 | Patterned ground protection layer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610075821.0A CN107039143B (en) | 2016-02-03 | 2016-02-03 | Patterned ground protection layer |
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| Publication Number | Publication Date |
|---|---|
| CN107039143A CN107039143A (en) | 2017-08-11 |
| CN107039143B true CN107039143B (en) | 2019-10-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610075821.0A Active CN107039143B (en) | 2016-02-03 | 2016-02-03 | Patterned ground protection layer |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US11004589B2 (en) * | 2018-04-27 | 2021-05-11 | Realtek Semiconductor Corp. | High-Q integrated inductor and method thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6452249B1 (en) * | 2000-04-19 | 2002-09-17 | Mitsubishi Denki Kabushiki Kaisha | Inductor with patterned ground shield |
| CN1536590A (en) * | 2003-04-04 | 2004-10-13 | 矽统科技股份有限公司 | High-quality factor inducltor-device with wheltering pattern embedded in substrate |
| CN1666342A (en) * | 2003-05-29 | 2005-09-07 | 三菱电机株式会社 | Semiconductor device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106558401B (en) * | 2015-09-25 | 2018-08-10 | 瑞昱半导体股份有限公司 | The shielding construction of product body inductor/transformer |
-
2016
- 2016-02-03 CN CN201610075821.0A patent/CN107039143B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6452249B1 (en) * | 2000-04-19 | 2002-09-17 | Mitsubishi Denki Kabushiki Kaisha | Inductor with patterned ground shield |
| CN1536590A (en) * | 2003-04-04 | 2004-10-13 | 矽统科技股份有限公司 | High-quality factor inducltor-device with wheltering pattern embedded in substrate |
| CN1666342A (en) * | 2003-05-29 | 2005-09-07 | 三菱电机株式会社 | Semiconductor device |
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