CN107035692A - A kind of vacuum system performance degradation measuring method based on lobe pump fault mode - Google Patents

A kind of vacuum system performance degradation measuring method based on lobe pump fault mode Download PDF

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Publication number
CN107035692A
CN107035692A CN201610192881.0A CN201610192881A CN107035692A CN 107035692 A CN107035692 A CN 107035692A CN 201610192881 A CN201610192881 A CN 201610192881A CN 107035692 A CN107035692 A CN 107035692A
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rotor
lobe pump
current time
wear height
inner walls
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张权
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/16—Wear
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/86—Detection

Abstract

The embodiments of the invention provide a kind of vacuum system performance degradation measuring method based on lobe pump fault mode, belong to vacuum system field.Methods described includes：The pressure and the relation of the working time of lobe pump established according to the 3rd wear height of the first wear height of the bearing of the first rotor of lobe pump working model and acquired lobe pump, the second wear height of the first rotor and the first rotor in vacuum system in vacuum tank.According to the relation of the working time of pressure and lobe pump in the vacuum in the vacuum tank collected in real time and the vacuum tank established, the performance degradation degree of vacuum system is measured.The present invention can obtain the performance degradation degree of vacuum system online, compared to the method for existing measurement vacuum system performance degradation, with more intuitive, effectively facilitate user and know the performance degradation degree of vacuum system in time and lobe pump is overhauled.

Description

A kind of vacuum system performance degradation measuring method based on lobe pump fault mode
Technical field
The present invention relates to vacuum system field, in particular to a kind of vacuum system based on lobe pump fault mode Performance degradation measuring method.
Background technology
Vacuum system is the important component of space simulator, and its function is in order that space simulator is true Empty container reaches required vacuum, the vacuum environment of simulation space.The safe and reliable degree of vacuum system is to determine space The key factor that can environment simulator effectively work.The course of work of vacuum system is main to be connected structure by following steps Into：It is thick vacuumize subsystem vacuum tank is slightly taken out-molecular pump subsystem progress transition pumping-high vacuum subsystem enters Row pumping-vacuum tank vacuum reaches requirement, stops pumping.By the Failure Mode Effective Analysis for vacuum system, really The critical component for having determined to determine vacuum system performance is the thick lobe pump vacuumized in subsystem.It therefore, it can by Roots The fault mode of pump analyze the performance degradation situation for obtaining vacuum system.
The existing research on lobe pump fault mode more focuses on bearing vibration signal analysis, prime failure of pump Analysis etc., performance degradation relevant information could be obtained by being subject to off-line analysis again by the vibration signal for obtaining related.This mode The relevant information of vacuum system performance degradation can not be obtained online, without intuitive.
The content of the invention
It is an object of the invention to provide a kind of vacuum system performance degradation measuring method based on lobe pump fault mode, By setting up the relation of pressure and Roots's pump operation time in vacuum system in vacuum tank, effectively improve above-mentioned Problem.
To achieve these goals, the technical solution adopted by the present invention is as follows：
The embodiments of the invention provide a kind of vacuum system performance degradation measuring method based on lobe pump fault mode, institute Stating vacuum system includes vacuum tank and lobe pump, and the lobe pump includes the first rotor and the second rotor, the lobe pump Air inlet is connected with the vacuum tank.Methods described includes：Obtain the first mill of the bearing of the first rotor of the lobe pump Damage height.Obtain institute caused by the abrasion at the top of the first rotor as the lobe pump between the inner walls of the lobe pump State the second wear height of the first rotor.Obtain as described in caused by the abrasion between the first rotor and second rotor 3rd wear height of the first rotor.According to first wear height, second wear height, the 3rd wear height And the pressure that lobe pump working model is established in the vacuum tank in vacuum system and the working time of the lobe pump Relation.The vacuum in vacuum tank described in current time is obtained, according to pressure in the vacuum and the vacuum tank With the relation of the working time of the lobe pump, the performance degradation degree of the vacuum system is measured.
As high-speed rotating machine product, lobe pump fault rate is higher.Research shows that rotor abrasion fault mode is all kinds of Accounting 46% in fault mode, is the Main Patterns for causing lobe pump to fail.Lobe pump rotates built with two synchronous backwards It is not in contact with each other between rotor, its rotor, between the inner walls of rotor and lobe pump.But due to processing and the mistake in installation process The reasons such as the bearing wear during difference, use, lobe pump can produce rotating shaft skew in the course of the work, make rotor rotation process Middle generation out-of-balance force, causes the generation of rotor abrasion failure.
When the embodiment of the present invention occurs by obtaining roots pump rotor wear-out failure, the axle of the first rotor of the lobe pump The first wear height for holding, the abrasion at the top of the first rotor of the lobe pump between the inner walls of the lobe pump are drawn The second wear height of the first rotor and the abrasion between the first rotor and second rotor risen causes The first rotor the 3rd wear height, the pressure set up in the vacuum tank in the vacuum system and the lobe pump Working time relation.Further, the embodiment of the present invention can be by gathering the vacuum degrees of data of vacuum tank, i.e., in real time Pressure in current time vacuum tank, the work of pressure in vacuum tank and lobe pump in the vacuum system set up Make the relational model of time, it is online to obtain vacuum system performance degradation degree.Moved back compared to existing measurement vacuum system performance The method of change, the vacuum system performance degradation measuring method provided in an embodiment of the present invention based on lobe pump fault mode has more Intuitive, the performance degradation degree of vacuum system can be known in time and lobe pump is overhauled by effectively facilitating user.
Brief description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be attached to what is used required in embodiment Figure is briefly described, it will be appreciated that the following drawings illustrate only certain embodiments of the present invention, therefore is not construed as pair The restriction of scope, for those of ordinary skill in the art, on the premise of not paying creative work, can also be according to this A little accompanying drawings obtain other related accompanying drawings.
The block diagram for the computer that Fig. 1 provides for present pre-ferred embodiments；
Fig. 2 is the structural representation of the vacuum system of space simulator；
Fig. 3 is the external structure schematic diagram of lobe pump provided in an embodiment of the present invention；
Fig. 4 is the internal structure schematic diagram of lobe pump provided in an embodiment of the present invention；
Fig. 5 is the vacuum system performance degradation measuring method provided in an embodiment of the present invention based on lobe pump fault mode Flow chart；
Fig. 6 is the wear extent and the relation schematic diagram of time of lobe pump provided in an embodiment of the present invention；
Fig. 7 is the first lobe pump performance degradation curve comparison schematic diagram provided in an embodiment of the present invention；
Fig. 8 is second of lobe pump performance degradation curve comparison schematic diagram provided in an embodiment of the present invention；
Fig. 9 is the wear extent of roots pump rotor provided in an embodiment of the present invention with work period increased change curve pair Compare schematic diagram；
Figure 10 is the high-level schematic functional block diagram of soft device provided in an embodiment of the present invention.
Embodiment
Below in conjunction with accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete Ground is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.Generally exist The component of the embodiment of the present invention described and illustrated in accompanying drawing can be arranged and designed with a variety of configurations herein.Cause This, the detailed description of the embodiments of the invention to providing in the accompanying drawings is not intended to limit claimed invention below Scope, but it is merely representative of the selected embodiment of the present invention.Based on embodiments of the invention, those skilled in the art are not doing The every other embodiment obtained on the premise of going out creative work, belongs to the scope of protection of the invention.
It should be noted that：Similar label and letter represents similar terms in following accompanying drawing, therefore, once a certain Xiang Yi It is defined in individual accompanying drawing, then it further need not be defined and explained in subsequent accompanying drawing.Meanwhile, the present invention's In description, term " first ", " second " etc. are only used for distinguishing description, and it is not intended that indicating or implying relative importance.
As shown in figure 1, being the block diagram for the computer 100 that present pre-ferred embodiments are provided.The computer 100 Including the vacuum system performance degradation measurement apparatus 110 based on lobe pump fault mode, memory 120, storage control 130, Processor 140, Peripheral Interface 150, input-output unit 160, display unit 170.
It is the memory 120, storage control 130, processor 140, Peripheral Interface 150, input-output unit 160, aobvious Show that each element of unit 170 is directly or indirectly electrically connected with each other, to realize the transmission or interaction of data.For example, these Element can be realized by one or more communication bus or signal wire be electrically connected with each other.It is described to be based on Roots's failure of pump mould The vacuum system performance degradation measurement apparatus 110 of formula, which includes at least one, to be stored in the form of software or firmware (firmware) Software function module in the memory 120.It is executable that the processor 140 is stored for performing in memory 120 Module, such as the software function mould that the described vacuum system performance degradation measurement apparatus 110 based on lobe pump fault mode includes Block or computer program.
Wherein, memory 120 may be, but not limited to, random access memory (Random Access Memory, RAM), read-only storage (Read Only Memory, ROM), programmable read only memory (Programmable Read-Only Memory, PROM), erasable read-only memory (Erasable Programmable Read-Only Memory, EPROM), Electricallyerasable ROM (EEROM) (Electric Erasable Programmable Read-Only Memory, EEPROM) etc.. Wherein, memory 120 is used for storage program, and the processor 140 performs described program after execute instruction is received, foregoing The method performed by server that the stream process that any embodiment of the embodiment of the present invention is disclosed is defined can apply to processor 140 In, or realized by processor 140.
Processor 140 is probably a kind of IC chip, the disposal ability with signal.Above-mentioned processor 140 can To be general processor, including central processing unit (Central Processing Unit, abbreviation CPU), network processing unit (Network Processor, abbreviation NP) etc.；Can also be digital signal processor (DSP), application specific integrated circuit (ASIC), It is ready-made programmable gate array (FPGA) or other PLDs, discrete gate or transistor logic, discrete hard Part component.It can realize or perform disclosed each method, step and the logic diagram in the embodiment of the present invention.General processor Can be microprocessor or the processor 140 can also be any conventional processor etc..
Various input/output devices are coupled to processor 140 and memory 120 by the Peripheral Interface 150.At some In embodiment, Peripheral Interface 150, processor 140 and storage control 130 can be realized in one single chip.Other one In a little examples, they can be realized by independent chip respectively.
Input-output unit 160 is used to be supplied to user input data to realize user and the server (or local terminal) Interaction.The input-output unit 160 may be, but not limited to, mouse and keyboard etc..
Display unit 170 provides an interactive interface (such as user's operation circle between the computer 100 and user Face) or for display image data give user reference.In the present embodiment, the display unit 170 can be liquid crystal display Or touch control display.If touch control display, it can be support single-point and the capacitance type touch control screen or resistance of multi-point touch operation Formula touch screen etc..Single-point and multi-point touch operation is supported to refer to that touch control display can sense on the touch control display one Or at multiple positions simultaneously produce touch control operation, and by the touch control operation that this is sensed transfer to processor 140 carry out calculate and Processing.
Fig. 2 shows the structural representation of the vacuum system 200 of space simulator.Vacuum system 200 includes vacuum Container 210, it is thick vacuumize subsystem 220, high vacuum subsystem 230, vacuum measurement subsystem 240, molecular pump subsystem 250 with And subsystem 260 is pressed again, all subsystems couple vacuum tank 210.In each course of work of vacuum system 200, slightly Subsystem 220 is vacuumized to start working at first, it is necessary to which the pressure in vacuum tank 210 is extracted into specified numerical value in a short time. For example, vacuum tank 210 is evacuated down into 5.2Pa from atmospheric pressure within 20 minutes.The thick subsystem 220 that vacuumizes includes Roots Pump 221 and fore pump.Wherein, the air inlet 2215 of lobe pump 221 is connected with vacuum tank 210, is slightly to vacuumize subsystem 220 Core pumping section.The main function of lobe pump 221 is the continuous rotation by rotor, by pumped gas from air inlet 2215 Closing space between inspiration rotor and housing, then the purpose for realizing pumping is discharged through exhaust outlet 2216, its performance decides vacuum Can system 200 effectively work.
Lobe pump 221 is a kind of two-spool positive-displacement vacuum pump, including the first rotor 2212, the second rotor 2213 and shell Body 2211, as shown in Figure 3 and Figure 4.The axis of its two rotor is parallel to each other, and rotor is combined by impeller with axle, between impeller, There is minim gap, to avoid contacting with each other, pump chamber leans on clearance seal between impeller and casing and wallboard.Two rotors are by prime mover Driven by a pair of synchromesh gears, make constant speed rotation in opposite direction.The structure of two traditional leaf Roots vaccum pumps, in pump chamber Interior, the rotor for having two figures of eight is arranged on a pair of parallel axle mutual vertically.Due in the pump chamber of lobe pump 221 without friction, Rotor can be with high-speed rotation, and need not use oil lubrication, and the process of oil-free cleaning pumping can be achieved.The lubricant housings of pump is only limitted to At bearing and gear, and dynamic sealing.Pump does not have reciprocating member, therefore can realize good dynamic balancing.
Due to the continuous rotation of rotor, pumped gas in vacuum tank from air inlet 2215 be drawn into rotor and pump case it Between space in, then discharge through exhaust outlet 2216.Because space is full closeding state after air-breathing, so, do not have in pump intracavity gas There is compression and expand.But when rotor top turns over the edge of exhaust outlet 2216, when space is communicated with exhaust side, due to exhaust side gas Pressure is higher, then some gas recoils into space, gas pressure intensity is increased suddenly.When rotor is rotated further, gas Outside body excavationg pump.
Row constraint is entered by needle bearing 2214 between the housing 2211 of the rotor shaft of lobe pump 221 and lobe pump 221, When roots pump rotor rotates at a high speed, needle bearing inevitably produces abrasion.Rotor abrasion failure mechanism is：With bearing 2214 wear extenies increase, the skew of the rotating shaft core of lobe pump 221, and with there is additional eccentric force, aggravation bearing 2214 weares and teares, entered One step causes lobe pump rotating shaft core to offset, and the rotor that the skew of lobe pump rotating shaft core would potentially result in lobe pump weares and teares. It should be noted that in practical application, the bearing of the bearing of the first rotor 2212 of lobe pump and the second rotor 2213 is sent out simultaneously The situation of raw off-axis abrasion seldom occurs.If in addition, the bearing and bitrochanteric bearing of the first rotor of two lobe pumps are same The abrasion of Shi Fasheng off-axis will cause lobe pump directly locked, it is impossible to work on, belong to the catastrophic discontinuityfailure of lobe pump.In view of This, single shaft wear-out failure pattern of the embodiment of the present invention based on lobe pump devises a kind of vacuum system performance degradation measurement side Method.
Referring to Fig. 5, being that the vacuum system performance based on lobe pump fault mode that present pre-ferred embodiments are provided is moved back Change the flow chart of measuring method.The idiographic flow shown in Fig. 5 will be described in detail below.Methods described includes：
Step S501：Obtain the first wear height of the bearing of the first rotor of lobe pump；
Wherein, the first wear height is radial direction of the bearing in bearing of the first rotor 2212 of lobe pump 221 Wear-thickness.
Step S502：Obtain caused by the abrasion at the top of the first rotor as lobe pump between the inner walls of lobe pump Second wear height of the first rotor；
When the first wear height exceedes the intrinsic gap between the top of the first rotor 2212 and the inwall of lobe pump 221, the The rotating shaft of one rotor 2212 shifts, and then the first rotor 2212 weares and teares.
Specifically, second wear height be the top of the first rotor 2212 with the inwall of housing 2211 of lobe pump 221 it Between when wearing and tearing, the top of the first rotor 2212 and the contact point of the inwall of housing 2211 of lobe pump and turning for the first rotor 2212 The wear-thickness of the first rotor on line direction between axle central point.
Step S503：The 3rd abrasion for obtaining the first rotor as caused by the abrasion between the first rotor and the second rotor is high Degree；
Wherein, the 3rd wear height is the contact point of the rotor 2213 of the first rotor 2212 and second to the first rotor On the line of 2212 spindle central point, the first rotor as caused by the abrasion between the rotor 2213 of the first rotor 2212 and second 2212 wear-thickness.
Under the axle center drift condition of the first rotor 2212 of lobe pump 221, it will cause the abrasion of the first rotor.First turn The abrasion of son 2212 includes the abrasion between the top of the first rotor 2212 and the inwall of housing 2211 of lobe pump and first turn Abrasion between the rotor 2213 of son 2212 and second.
Step S504：According to Roots in the first wear height, the second wear height, the 3rd wear height and vacuum system The relation of the working time of pressure and lobe pump in pump work model elaborates vacuum tank；
In normal operating conditions, there are three kinds of intrinsic gaps in lobe pump 221：The top of two rotors respectively with Roots The gap in gap between gap, two rotors and rotor axial surface between the inwall of pump.Due to these three it is intrinsic between The presence of gap, the phenomena impair that backflows that lobe pump is caused in real work by gap so that lobe pump is in the course of the work In the presence of intrinsic amount of leakage.
Specifically, the intrinsic amount of leakage of lobe pump 221 mainly includes：Rotor top and the leakage of lobe pump inner walls The desorption leakage of leakage rate and rotor axial surface between amount, two rotors.It should be noted that what desorption leakage was produced Mechanism is：When roots pump rotor is rotated, there will be substantial amounts of gas molecule to be adsorbed in rotor surface in low vacuum side, and in high vacuum Side, the desorption ability of gas molecule is more than adsorption capacity, so that the leakage effects caused.Wherein, gas is captured by the surface of solids And it is attached to the referred to as adsorption phenomena of the phenomenon on the surface of solids.When being adsorbed with the surface of solids of gas molecule in a vacuum, inhale Attached molecule will be gradually desorbed due to warm-up movement, referred to as thermal desorption.
The leakage rate for making the inner walls of rotor top and lobe pump is Q1, then Q1It can be expressed as：
In formula (1), W is the transmission probability of gas piping, can be obtained by Ke Laoxin equations, and C is gas total conductance, and K is Conductance coefficient, B is rotor thickness, δ1For the gap at the top of the first rotor between the inner walls of lobe pump.Δ p=Pout- Pin, PinFor the admission pressure of the lobe pump, PoutIt is the pressure at expulsion of the lobe pump, and PoutCan be according to formula Pout= (Sp/Sbp)×PinObtain.Wherein, SbpIt is the lobe pump fore pump speed of evacuation, SbpFor constant, SpFor the reality of lobe pump Pumping speed.
It is Q to make the leakage rate between two rotors2, then Q2It can be expressed as：
In formula (2), W is the transmission probability of gas piping, can be obtained by Ke Laoxin equations.δ2For between two rotors Gap.
The desorption leakage rate for making rotor axial surface is Qjx, then QjxIt can be expressed as：
In formula (3), NtFor the molecule molal quantity being desorbed in the unit time to high vacuum side, n is the rotating speed of the first rotor, l For the girth of the cross section of the first rotor；K2For desorption coefficient, θ1For lobe pump low vacuum side gas molecule at first turn The coverage in sublist face, θ2For lobe pump high vacuum side gas molecule the first rotor surface coverage.Wherein, θ1With θ2 Occurrence it is relevant with the balanced gas pressure of gas saturated vapour pressure at identical temperature, binding molecule.
Therefore, the intrinsic amount of leakage of lobe pump can be expressed as：
Qtotal=Q1+Q2+Qjx (4)
In formula (4), QtotalFor the intrinsic leakage total amount of lobe pump.
Further, the actual pumping speed of lobe pump is the difference of theoretical pumping speed and the loss caused by the factor such as backflow, i.e.,
Wherein, SthFor the theoretical pumping speed of lobe pump, Δ S be because of the factor such as backflow caused by pumping speed lose.Then, in lobe pump Normal work is that in the case that rotor does not wear and tear, the actual pumping speed model of lobe pump can be obtained according to formula (1) to formula (5) As shown in formula (6).
When rotor weares and teares, the wear extent of rotor will influence the amount of leakage of lobe pump, mainly including following two shadows The mode of sound：
(1) when being worn and torn between rotor top and the inner walls of lobe pump, rotor top and lobe pump Intrinsic gap between inner walls disappears, and the intrinsic leakage rate of this part halves, meanwhile, the leakage rate between two rotors Increase.
(2) when being worn and torn between two rotors, the intrinsic amount of leakage between two rotors is not present, rotor top Leakage rate increase between portion and the inner walls of lobe pump.
Due to the presence of the first wear height, the second wear height and the 3rd wear height, rotor top and lobe pump Inner walls between gap and two rotors between gap will become big with the aggravation of abrasion, cause leakage rate to increase Plus.
In the embodiment of the present invention, when the rotor of lobe pump weares and teares, the first wear height, the second wear height with And the 3rd under the influence of wear height, the leakage rate increase of lobe pump, the actual pumping speed model of lobe pump can be changed into：
In formula (7), Δ δ (t) is the first wear height of the bearing of the first rotor of lobe pump described in current time, h (t) The second wear height of the first rotor, h described in current time1(t) it is high for the 3rd abrasion of the first rotor described in current time Degree, P (t) is the pressure described in current time in vacuum tank.
Hereafter, Δ δ (t), h (t) and h are being got respectively1(t) after, according to Δ δ (t), h (t), h1(t), conductance COEFFICIENT K, The thickness B of rotor, the transmission probability W of gas piping, the fore pump speed of evacuation S of the lobe pumpbp, lobe pump the first rotor Top and the intrinsic gap delta of the inner walls of the lobe pump1And formula (7), you can to obtain the reality of current time lobe pump Border pumping speed Sp(t) relation between the pressure P (t) described in current time in vacuum tank.
Therefore, pressure when pumping process starts in the vacuum tank, the ultimate pressure and vacuum of lobe pump are obtained Volume of a container, and according to the actual pumping speed S of the current time lobe pump obtained by formula (7)p(t) with vacuum described in current time Lobe pump working model in the relation between pressure P (t) in container and the vacuum system as shown in formula (8)：
The relation of the working time of pressure and lobe pump in vacuum system in vacuum tank can be obtained.In formula (8), P0 Pressure, P in the vacuum tank when starting for pumping processjFor the ultimate pressure of lobe pump, V is the volume of vacuum tank, t1For The most long working time of lobe pump.
Wherein, conductance COEFFICIENT K, the thickness B of rotor, the transmission probability W of gas piping, the fore pump speed of evacuation of lobe pump Sbp, lobe pump the first rotor at the top of intrinsic gap delta with the inner walls of the lobe pump1, the first rotor and the second rotor Between gap delta2, pressure P when pumping process starts in the vacuum tank0, lobe pump ultimate pressure PjAnd vacuum is held The volume V of device can be stored in advance in the memory 120 of computer 100, can also be inputted by input-output unit 160.
Therefore, in the embodiment of the present invention, the vacuum system that the vacuum in vacuum system in vacuum tank is changed over time Performance Degradation Model can be expressed as：
Step S505：The vacuum in current time vacuum tank is obtained, according to the pressure in vacuum and vacuum tank By force with the relation of the working time of lobe pump, the performance degradation degree of vacuum system is measured.
By the vacuum-degree monitoring device carried in vacuum system, the vacuum in vacuum tank can be monitored in real time.Need Illustrate, the vacuum of vacuum tank can be characterized by the pressure in vacuum tank in the embodiment of the present invention.According to vacuum The relation of the working time of pressure and lobe pump in container can obtain the performance degradation basic process of lobe pump, and then can be with It is previously obtained the failpoint of lobe pump.For example, being judged according to the pressure in vacuum tank and the relation of the working time of lobe pump Pressure in Roots's pump work X hours (h), vacuum tank is the failpoint that Y handkerchiefs (Pa) are lobe pump.
The output data of vacuum-degree monitoring device is gathered in real time, when the output data of vacuum monitor reaches what is judged in advance During failpoint, it is possible to judge the lobe pump failure of vacuum system, the performance degradation of vacuum system will be caused, it is necessary to vacuum system Lobe pump in system is overhauled.For example, when lobe pump continuously works X hours, accessed vacuum-degree monitoring device it is defeated Go out pressure more than Y handkerchiefs, then can be determined that the lobe pump failure of vacuum system.Certainly, according to the pressure in vacuum tank and Roots The relation of the working time of pump can obtain the performance degradation basic process of lobe pump, pre-set different degrees of failpoint, So as to can just measure the performance degradation degree of vacuum system according to the output pressure of the vacuum-degree monitoring device got in real time.
Therefore, the embodiment of the present invention can be true according to what is set up by gathering the vacuum degrees of data of vacuum tank in real time The relational model of the working time of pressure in vacuum tank and lobe pump in empty set system, the online vacuum system performance that obtains is moved back Change degree.It is provided in an embodiment of the present invention based on lobe pump event compared to the method for existing measurement vacuum system performance degradation The vacuum system performance degradation measuring method of barrier pattern has more intuitive, and vacuum can be known in time by effectively facilitating user The performance degradation degree of system is simultaneously overhauled to lobe pump.
Specifically, in the embodiment of the present invention, obtaining the mode of the first wear height of the bearing of the first rotor of lobe pump Can be：
Needle bearing abrasion wear extent is primarily generated on roller, and roller and end ring contact area are minimum.The present invention In embodiment, the wearing part of design roller is cuboid, now, the first wear height of the bearing of current time the first rotor It is linear between volume wear, i.e. Vzc(t)=Δ δ (t) Szc.Wherein, Vzc(t) it is current time the first rotor Bearing volume wear, Δ δ (t) for current time the first rotor bearing the first wear height, SzcFor the first rotor Bearing roller and the contact area of end ring.So as to obtain：
In formula (10), PzhThe load that roller is subject to when being worked for the first rotor；K is the abrasion rate coefficient of roller, with bearing Material is relevant with use environment；V is the rotating speed of bearing；T is the working time of lobe pump.
Therefore, abrasion rate coefficient, the bearing of the first rotor of roller is subject to when the first rotor works load, roller are obtained Roller and the contact area of end ring, the rotating speed of bearing and lobe pump working time.Being according to formula (10) can be with Obtain the first wear height of the bearing of the first rotor.Wherein, the load p that roller is subject to when the first rotor workszh, roller mill The roller of the bearing of loss rate coefficient k, the rotating speed v of bearing and the first rotor and the contact area S of end ringzcCan according to The concrete model of Roots's pump bearing used in family is obtained, and is stored in advance in the memory 120 of computer 100, certainly, It can be inputted by input-output unit 160.
Specifically, in the embodiment of the present invention, obtaining at the top of the first rotor of lobe pump and in the housing of the lobe pump The mode of second wear height of the first rotor caused by the abrasion between wall can be：
Obtain the Max.contact stress at the top of the first rotor with the inner walls of the lobe pump described in current time.According to At unit interval point in initial time to the period at current time, with the housing of the lobe pump at the top of the first rotor With the relative slip at the contact point of the inner walls of the lobe pump at the top of the Max.contact stress of inwall, the first rotor The equivalent coefficient of waste of speed and the first rotor, obtains the second abrasion of the first rotor of lobe pump described in current time Highly.
Wherein, the Max.contact stress described in current time at the top of the first rotor with the inner walls of the lobe pump is obtained Method can be preferably：
Obtain the first rotor top and the intrinsic gap of the inner walls of the lobe pump, the thickness of the first rotor, first The modulus of elasticity of rotor.According to the intrinsic gap at the top of the first rotor with the inner walls of the lobe pump, the thickness of the first rotor First wear height at accessed current time, is worked as in the modulus of elasticity and step 501 of degree and the first rotor The first rotor at contact point between the first rotor top of lobe pump described in the preceding moment and the inner walls of the lobe pump The equivalent load that top is subject to.It should be noted that the first rotor top of lobe pump described in the current time obtained and institute It is one and current time to state the equivalent load being subject at contact point at the top of the first rotor between the inner walls of lobe pump The related function of the second wear height.Wherein, at the top of the first rotor with the intrinsic gaps of the inner walls of lobe pump, rotor The modulus of elasticity of thickness and the first rotor can be stored in advance in the memory 120 of computer 100, can also pass through input Output unit 160 is inputted.
Specifically, during the present invention is implemented, according to the intrinsic gap at the top of the first rotor with the inner walls of the lobe pump, First wear height at accessed current time, is obtained in the thickness of rotor, the modulus of elasticity of the first rotor and step 501 Obtain between the first rotor top of lobe pump described in current time and the inner walls of the lobe pump described first at contact point The concrete mode for the equivalent load that rotor top is subject to can be：
By on the direction at the top of the rotating shaft of the first rotor to the first rotor, rotating shaft and the lobe pump inner walls of the first rotor Between the simplified partial for belonging to the first rotor be cylinder, then the cylinder is diametrically pressurized.The thickness of cylinder Degree is equal to the thickness B of rotor, and the radius of cylinder is Rc, then the diametrically opposite average cross-section of the cylinder be：
Show that normal pressure is P according to the deformation along cylinder compression directionz=Δ lE1A/D.Wherein, E1For the first rotor Modulus of elasticity.D cylinder diameters, can be expressed as 2Rc.Δ l=Δs δ (t)-δ1-h(t).Then lobe pump described in current time The equivalent load being subject at the top of the first rotor between the inner walls of the lobe pump at contact point at the top of the first rotor For：
Therefore, the first rotor top of lobe pump described in current time and the lobe pump can be obtained by formula (11) The equivalent load P being subject between inner walls at contact point at the top of the first rotorDL(t).It should be noted that PDL(t) it is The function related to the second wear height h (t) at current time.
According to the equivalent load and current time lobe pump being subject at the top of accessed current time the first rotor The top of the first rotor and the contact area of the inner walls, are obtained at the top of the first rotor of current time lobe pump and Roots The distribution situation of the contact stress of the inner walls of pump.So as to further obtain current time lobe pump the first rotor at the top of with The Max.contact stress of the inner walls of lobe pump.Certainly, the Max.contact stress is also the second of one and current time Function related wear height h (t).
Specifically, the top of the first rotor and the contact area S of lobe pump inwall are：
In formula (12)
Rc *For the normal radius of curvature of the cylinder.PzApplied for what the cylinder was diametrically subject to by inner walls Normal pressure.A is the top of the first rotor and the contact length of lobe pump inwall, E1For the modulus of elasticity of the first rotor, E2For sieve The modulus of elasticity of thatch pump case inwall, v1For the Poisson's ratio and v of the first rotor2For the Poisson's ratio of lobe pump inner walls.
Therefore, can be according to formula in the embodiment of the present invention
Obtain the distribution situation with the contact stress of the inner walls of the lobe pump at the top of current time the first rotor.Enter One step obtains the Maximum Contact at the top of current time the first rotor with the inner walls of the lobe pump further according to the distribution situation Stress.In formula (13), μmFor the coefficient of friction at the top of the first rotor with lobe pump inner walls.
Further, in the embodiment of the present invention, the unit in the above-mentioned period according to initial time to current time At time point, Max.contact stress, the first rotor top at the top of the first rotor with the inner walls of the lobe pump Portion and the equivalent abrasion of relative sliding velocity and the first rotor at the contact point of the inner walls of the lobe pump are Number, the mode of the second wear height of the first rotor of lobe pump is preferably described in acquisition current time：
Obtain the first rotor top and the relative sliding velocity at the contact point of the inner walls of lobe pump and first turn The equivalent coefficient of waste of son, the Max.contact stress p at the current time that will be obtained according to formula (13)maxAnd formula (14) (t)
Simultaneous solution is the second wear height h (t) of the first rotor that can obtain lobe pump described in current time.Formula (14) in, k1For the equivalent coefficient of waste.pmax(t) at the top of the first rotor described in current time and in the housing of the lobe pump The Max.contact stress of wall.vsRelative slip described in current time at contact point at the top of the first rotor with inner walls Speed.
It should be noted that the specific acquisition modes of preset formula (14) are：According to Archard wear extent computation models：
The calculation expression of the second wear height of abrasion is caused by acquisition wear process：Dh=k1pds.Wherein, Vm1 The volume wear of the first rotor caused by the abrasion at the top of the first rotor of lobe pump between the inner walls of lobe pump, S is sliding distance, and H is the material hardness of rotor, K4It is a nondimensional coefficient of waste, k can be used1Instead of the K in formula4/ H, Then k1As the coefficient of waste for having dimension, the abbreviation equivalent coefficient of waste, p is contact stress.Assuming that in the first rotor rotation process Initial contact critical point with the inner walls of lobe pump and the angle disengaged between critical point are ω, the curvature half of housing Footpath r, then s=ω r.So as to obtain：Dh=k1prdω.Further to above formula differential, obtain：
Accordingly, it is possible to obtain the second wear height formula of the first rotor as shown in formula (14).
, can also be according to first wear height at acquired current time it should be noted that in the embodiment of the present invention At the top of Δ δ (t), the second wear height h (t) and lobe pump the first rotor and the lobe pump inner walls it is intrinsic between Gap δ1, establish the precondition that the abrasion at the top of the first rotor of lobe pump between the inner walls of the lobe pump occurs： As h (t) ＜ Δs δ (t)-δ1And Δ δ (t)>δ1When, between the first rotor top of lobe pump and the inner walls of the lobe pump It can wear and tear, when the conditions set forth above are not met, will not between the inner walls of lobe pump at the top of the first rotor of lobe pump It can wear and tear.
In addition, specifically, in the embodiment of the present invention, obtaining the abrasion between the first rotor and second rotor The mode of 3rd wear height of the caused the first rotor can be：The first rotor is obtained relative to bitrochanteric slip Coefficient.Obtain the equivalent load that the second rotor is applied to the first rotor.According to the first rotor relative to bitrochanteric cunning Dynamic coefficient, the second rotor are applied to the equivalent load of the first rotor, the rotating speed of the first rotor, the thickness of rotor and first The abrasion rate coefficient of the bearing of rotor, obtains the 3rd wear height of the first rotor described in current time.Wherein, the first rotor The abrasion rate coefficient of the bearing of rotating speed, the thickness of the first rotor and the first rotor can be stored in advance in depositing for computer 100 In reservoir 120, it can also be inputted by input-output unit 160.
Wherein, in the embodiment of the present invention, the mode for obtaining the equivalent load that the second rotor is applied to the first rotor is excellent Elect as：
According to the intrinsic gap delta between the first rotor and the second rotor2, rotor thickness B, the modulus of elasticity of the first rotor E1, current time accessed in step 501 the first wear height Δ δ (t) and formula
Obtain the equivalent load P that the rotor of current time second is applied at the top of the first rotorDL1(t).It should be noted that The rotor of current time second got by formula (15) is applied to the equivalent load P at the top of the first rotorDL1(t) be with it is current when The 3rd wear height h carved1(t) related function.
Similarly, according to formula
The equivalent load P being applied at the top of the first rotor in the middle part of the second rotor can also be obtainedDL2(t).Certainly, by formula (16) rotor of current time second got is applied to the equivalent load P at the top of the first rotorDL2(t) it is also and current time The bitrochanteric wear height h as caused by the abrasion between the first rotor and the second rotor2(t) related function.Formula (16) In, L is the recess in the middle part of the first rotor to the beeline of the first rotor rotating shaft, S2Bitrochanteric connect with for the first rotor Contacting surface is accumulated, a2For the first rotor and bitrochanteric contact length.
In the embodiment of the present invention, the first rotor can be relative to the acquisition methods of bitrochanteric slide coefficient：First Rotor and the second rotor gear motion.It is located in the unit interval, the first rotor is from contact point A1Move to contact point B1Motion away from From for ds(1), the second rotor is from contact point A2Move to contact point B2Move distance be ds(2).According to the definition of slide coefficient, The first rotor is obtained relative to bitrochanteric slide coefficient ε(1,2)=| ds(1)-ds(2)|/ds(1), the second rotor is relative to first The slide coefficient ε of rotor(2,1)=| ds(1)-ds(2)|/ds(2)。
Specifically, in the embodiment of the present invention, being applied according to the first rotor relative to bitrochanteric slide coefficient, the second rotor Add to the bearing of equivalent load, the rotating speed of the first rotor, the thickness of the first rotor and the first rotor of the first rotor Wear and tear rate coefficient, and the preferred embodiment for obtaining the 3rd wear height of the first rotor described in current time is：
According to accessed the first rotor relative to bitrochanteric slide coefficient ε(1,2), the second rotor be applied to described The equivalent load of one rotor, the rotating speed n of the first rotor, the coefficient of waste k of the thickness B of rotor and rotor2, according to by formula (15) The rotor of current time second of acquisition is applied to the equivalent load P at the top of the first rotorDL1And formula (17) (t)：
Simultaneous solution is that can obtain the 3rd wear height h of current time the first rotor1(t)。
Similarly, the slide coefficient ε according to the second accessed rotor relative to the first rotor(2,1), the bitrochanteric turn The coefficient of waste k of speed, the thickness B of rotor and rotor2.Current time the first rotor according to being obtained by formula (15) is applied to Bitrochanteric equivalent load PDL2And formula (18) (t)：
Simultaneous solution is that can obtain current time second turn as caused by the abrasion between the first rotor and the second rotor The wear height h of son2(t).It should be noted that the rotating speed and thickness of two rotors of lobe pump are equal, and the first rotor Bearing abrasion rate coefficient and bitrochanteric bearing abrasion rate coefficient it is also equal.
It should be noted that the specific acquisition modes of formula (17) and formula (18) are：Mould is calculated by above-mentioned Archard wear extenies Type is understood, within the dt times, if the contact line length of two molded lines of rotor is rotor thickness B, the move distance of the first rotor is ds(1)When, the abrasion between the first rotor and the second rotor causes the wear volume dV of the first rotorm2For：dVm2=B dh1·ds(1).It can further obtain：
Rotor is often turned over one week, and rotor is just contacted once, when rotor speed is n, within dt time, rotor surface Abrasion number of times is ndt.It is hereby achieved that formula (17) and formula (18).
It should be noted that macroscopically, Fig. 6 shows the relation of the wear extent of rotor and the working time of lobe pump, can So that abrasion is divided into three phases：
A. running-in wear stage.Wear rate is over time gradually to reduce by quick increase transitions.It appears in friction Secondary initial operating stage.
B. wear stage is stablized.Friction surface is progressively tended towards stability after break-in, and wear rate is held essentially constant.Friction pair During normal work.
C. sharp wear stage.Wear rate increases sharply over time, and condition of work drastically deteriorates, and causes part quick Fail.
The embodiment of the present invention is that the shell at the top of the first rotor of lobe pump with lobe pump is obtained in the case where stablizing wear stage The second wear height and the mill between the first rotor and the second rotor of the first rotor caused by abrasion between internal wall 3rd wear height of the first rotor caused by damaging.It is, therefore, to be understood that to, in the embodiment of the present invention, above-mentioned formula (10), The coefficient of waste in formula (13), formula (14), formula (17), formula (18) is constant value.
In addition, what the embodiment of the present invention was also changed over time to the vacuum in vacuum tank in the vacuum system set up Vacuum system Performance Degradation Model has carried out simulating, verifying.
The vacuum system Performance Degradation Model that the embodiment of the present invention is set up is emulated by MATLAB, obtains being based on institute The lobe pump performance degradation curve of the vacuum system Performance Degradation Model of foundation.And physical modeling emulation is carried out by ANSYS, obtain To the Performance Degradation Data based on physical model and generate performance degenerated curve.
For example, simulation object is ZJY-600A model lobe pumps.Emulate basic parameter according to the lobe pump of concrete model and Vacuum system is obtained.For example, the volume V of vacuum tank is 15.3 (m3), at the top of the first rotor with the inner walls of lobe pump it Between gap delta1For 0.1 (mm), the theoretical pumping speed S of lobe pumpthFor 2000 (m3/ h), vacuum tank when pumping process starts Interior pressure P0For 101.3 (kPa), rotor material chooses No. 45 steel, slightly vacuumizes the thick process time of taking out of subsystem for 20min, The basic demand of vacuum system is by lobe pump pressure in vacuum tank to be dropped into below 5.2Pa within 20 minutes.
Lobe pump was at work a work period with 20 minutes, and with the performance degradation of lobe pump, lobe pump reaches The ability of vacuum system basic work requirement is gradually reduced.Imitated based on ANSYS physical modelings data and model M ATLAB of the present invention True data, obtains following three groups of simulation comparison curves.Fig. 7 gives lobe pump performance degradation curve (pressure and cycle), characterizes Be that during rotor abrasion amount is accumulated, with the increase of Roots's pump cycle, pressure reaches 5.2Pa in vacuum tank When time used.Fig. 8 gives lobe pump performance degradation curve (time and cycle), characterizes with the increasing of work period Plus, the changing rule of rotor abrasion amount.Fig. 9 gives complete period wear extent change curve, and sign is with the work period Increase, the changing rule of rotor abrasion amount.
In the embodiment of the present invention, by contrasting ANSYS physical modelings simulation result and MATLAB simulation results, it can obtain Go out：(1) the MATLAB simulation results for the vacuum system Performance Degradation Model that the embodiment of the present invention is set up and ANSYS physical simulations As a result it coincide, can be used in characterizing lobe pump performance degradation process.(2) the performance degradation basic process of lobe pump is：In rotor Before abrasion starts, lobe pump performance is relatively steady, after rotor abrasion occurs, and lobe pump performance degradation is obvious, in lobe pump Start performance degradation process when continuous work 2100 hours (6300 cycles), (13482 week when work 4494 is small Phase) after, lobe pump performance can not meet vacuum system requirements, lobe pump failure.
In summary, the embodiment of the present invention passes through lobe pump in vacuum system working model and the first acquired mill Damage height, the second wear height and the 3rd wear height and establish pressure in vacuum system in vacuum tank and lobe pump The relation of working time, and then according to the vacuum in the vacuum tank collected in real time, it is possible to realize to vacuum system The monitoring of performance degradation degree.Compared to the monitoring method of the performance degradation degree of existing vacuum system, the embodiment of the present invention The vacuum system performance degradation measuring method based on lobe pump wear-out failure pattern provided has advantages below：
(1) intuitive.Correlative study more focuses on bearing vibration signal analysis, fore pump accident analysis etc., in tool The correlation for being analyzed acquisition vacuum system performance degradation again by obtaining related vibration signal is needed to believe in body implementation process Breath, it is signal collected not have intuitive.And the embodiment of the present invention directly gathers the data of the vacuum in vacuum tank, root Vacuum system can be just obtained according to the pressure and the relation of the working time of lobe pump in vacuum tank in the vacuum system set up The relevant information of system performance degradation, possesses intuitive.
(2) it is ageing.There is the retardance with the time since signal acquisition to analysis result in correlative study method, past Toward suitable for correction maintenance.And measuring method corresponding speed provided in an embodiment of the present invention is fast, vacuum system can be obtained online Performance state.
(3) convenience.Correlative study method needs the Matching installation in vacuum system to sense accordingly in actual applications Device does not possess convenience to obtain corresponding Monitoring Data.In the preferred embodiments of the present invention, the vacuum for gathering vacuum tank The vacuum-degree monitoring device of degrees of data is carried in vacuum system, without extra install sensor, possesses convenience.
Referring to Fig. 10, being the vacuum based on lobe pump fault mode shown in Fig. 1 of present pre-ferred embodiments offer The high-level schematic functional block diagram of system performance degradation measurement apparatus.The vacuum system performance degradation based on lobe pump fault mode Measurement apparatus 110 includes the first wear height acquisition module 111, the second wear height acquisition module 112, the 3rd wear height and obtained Modulus block 113, relation build module 114 and measurement result acquisition module 115.
First wear height acquisition module 111 is used for the first wear height for obtaining the bearing of the first rotor of lobe pump.
Second wear height acquisition module 112 is used to obtain at the top of the first rotor of lobe pump and in the housing of lobe pump Second wear height of the first rotor caused by the abrasion between wall.
The abrasion that 3rd wear height acquisition module 113 is used to obtain between the first rotor and second rotor causes The first rotor the 3rd wear height.
Relation, which builds module 114, to be used for according to the first acquired wear height, the second wear height, the 3rd wear height And lobe pump working model determines the working time of the pressure and lobe pump in vacuum system in vacuum tank in vacuum system Relation.
Measurement result acquisition module 115 is used to obtain the vacuum in current time vacuum tank, and according to the vacuum The relation of the working time of pressure and lobe pump, measures the performance degradation degree of vacuum system in degree and the vacuum tank.
In several embodiments provided herein, it should be understood that disclosed apparatus and method, it can also pass through Other modes are realized.Device embodiment described above is only schematical, for example, flow chart and block diagram in accompanying drawing Show according to the device of multiple embodiments of the present invention, the architectural framework in the cards of method and computer program product, Function and operation.At this point, each square frame in flow chart or block diagram can represent the one of a module, program segment or code Part a, part for the module, program segment or code is used to realize holding for defined logic function comprising one or more Row instruction.It should also be noted that in some implementations as replacement, the function of being marked in square frame can also with different from The order marked in accompanying drawing occurs.For example, two continuous square frames can essentially be performed substantially in parallel, they are sometimes It can perform in the opposite order, this is depending on involved function.It is also noted that every in block diagram and/or flow chart The combination of individual square frame and block diagram and/or the square frame in flow chart, can use the special base for performing defined function or action Realize, or can be realized with the combination of specialized hardware and computer instruction in the system of hardware.
In addition, each functional module in each embodiment of the invention can integrate to form an independent portion Point or modules individualism, can also two or more modules be integrated to form an independent part.
If the function is realized using in the form of software function module and is used as independent production marketing or in use, can be with It is stored in a computer read/write memory medium.Understood based on such, technical scheme is substantially in other words The part contributed to prior art or the part of the technical scheme can be embodied in the form of software product, the meter Calculation machine software product is stored in a storage medium, including some instructions are to cause a computer equipment (can be individual People's computer, server, or network equipment etc.) perform all or part of step of each of the invention embodiment methods described. And foregoing storage medium includes：USB flash disk, mobile hard disk, read-only storage (ROM, Read-Only Memory), arbitrary access are deposited Reservoir (RAM, Random Access Memory), magnetic disc or CD etc. are various can be with the medium of store program codes.Need Illustrate, herein, such as first and second or the like relational terms be used merely to by an entity or operation with Another entity or operation make a distinction, and not necessarily require or imply between these entities or operation there is any this reality The relation or order on border.Moreover, term " comprising ", "comprising" or its any other variant are intended to the bag of nonexcludability Contain, so that process, method, article or equipment including a series of key elements are not only including those key elements, but also including Other key elements being not expressly set out, or also include for this process, method, article or the intrinsic key element of equipment. In the absence of more restrictions, the key element limited by sentence "including a ...", it is not excluded that including the key element Process, method, article or equipment in also there is other identical element.
The preferred embodiments of the present invention are the foregoing is only, are not intended to limit the invention, for the skill of this area For art personnel, the present invention can have various modifications and variations.Within the spirit and principles of the invention, that is made any repaiies Change, equivalent substitution, improvement etc., should be included in the scope of the protection.It should be noted that：Similar label and letter exists Similar terms is represented in following accompanying drawing, therefore, once being defined in a certain Xiang Yi accompanying drawing, is then not required in subsequent accompanying drawing It is further defined and explained.
The foregoing is only a specific embodiment of the invention, but protection scope of the present invention is not limited thereto, any Those familiar with the art the invention discloses technical scope in, change or replacement can be readily occurred in, should all be contained Cover within protection scope of the present invention.Therefore, protection scope of the present invention described should be defined by scope of the claims.

Claims (10)

1. a kind of vacuum system performance degradation measuring method based on lobe pump fault mode, it is characterised in that vacuum system bag Include vacuum tank and lobe pump, the lobe pump includes the first rotor and the second rotor, the air inlet of the lobe pump with it is described Vacuum tank is connected, and methods described includes：
Obtain the first wear height of the bearing of the first rotor of the lobe pump；
Obtain described in caused by the abrasion at the top of the first rotor as the lobe pump between the inner walls of the lobe pump Second wear height of the first rotor；
The 3rd abrasion for obtaining the first rotor as caused by the abrasion between the first rotor and second rotor is high Degree；
According to Roots in first wear height, second wear height, the 3rd wear height and vacuum system Pressure and the relation of the working time of the lobe pump described in pump work model elaborates in vacuum tank；
The vacuum in vacuum tank described in current time is obtained, according to the pressure in the vacuum and the vacuum tank With the relation of the working time of the lobe pump, the performance degradation degree of the vacuum system is measured.
2. according to the method described in claim 1, it is characterised in that it is described obtain at the top of the first rotor of the lobe pump with Second wear height of the first rotor caused by the abrasion between the inner walls of the lobe pump, including：
Obtain the Max.contact stress at the top of the first rotor with the inner walls of the lobe pump described in current time；
At the unit interval point in the period of initial time to current time, the Max.contact stress, described first Rotor top and the relative sliding velocity and the equivalent of the first rotor at the contact point of the inner walls of the lobe pump The coefficient of waste, obtains second wear height of the first rotor of lobe pump described in current time.
3. method according to claim 2, it is characterised in that in the period according to initial time to current time Unit interval point at, the Max.contact stress, the contact with the inner walls of the lobe pump at the top of the first rotor The equivalent coefficient of waste of relative sliding velocity and the first rotor at point, obtains first of lobe pump described in current time Second wear height of rotor, including：
With reference to the Max.contact stress and formula at the top of the first rotor with the inner walls of the lobe pump：
The second wear height of the first rotor of lobe pump described in current time is obtained, wherein, h (t) is current time institute State the second wear height of the first rotor of lobe pump, pmax(t) it is the first rotor top described in current time and sieve The Max.contact stress being subject at the contact point of the inner walls of thatch pump at the top of the first rotor, vsConnect described in current time Relative sliding velocity at contact at the top of the first rotor with the inner walls, k1For the equivalent coefficient of waste.
4. according to the method in claim 2 or 3, it is characterised in that described in the acquisition current time at the top of the first rotor With the Max.contact stress of the inner walls of the lobe pump, including：
According to the intrinsic gap at the top of first wear height, the first rotor with the inner walls of the lobe pump, institute The thickness of the first rotor and the modulus of elasticity of the first rotor are stated, the first rotor top of lobe pump described in current time is obtained The equivalent load being subject between the inner walls of portion and the lobe pump at contact point at the top of the first rotor；
Described the of lobe pump described in the equivalent load being subject to according to current time at the top of the first rotor and current time The top of one rotor and the contact area of the inner walls, obtain the rotor top of lobe pump described in current time and sieve The Max.contact stress of the inner walls of thatch pump.
5. method according to claim 4, it is characterised in that it is described according to first wear height, described first turn Sub- top and the bullet of the intrinsic gap of the inner walls of the lobe pump, the thickness of the first rotor and the first rotor Property modulus, obtain described in current time at the top of the first rotor of lobe pump between the inner walls of the lobe pump at contact point The equivalent load being subject at the top of the first rotor, including：
According to formula：
Obtain contact point place between the first rotor top of lobe pump described in current time and the inner walls of the lobe pump The equivalent load being subject at the top of the first rotor is stated, wherein, PDL(t) the first rotor top of lobe pump and institute described in current time State between the inner walls of lobe pump at contact point, the inner walls of the lobe pump are applied to working as at the top of the first rotor Loading gage lotus, B is the thickness of the first rotor, E1For the modulus of elasticity of the first rotor, Δ δ (t) is described in current time First wear height of the bearing of the first rotor of lobe pump, δ1The first rotor top and the lobe pump for the lobe pump Inner walls intrinsic gap, h (t) be the first rotor described in current time the second wear height.
6. according to the method described in claim 1, it is characterised in that the bearing of the first rotor includes roller and bearing rib Circle, the first wear height of the bearing of the first rotor for obtaining the lobe pump, including：
According to the volume wear of the bearing of the first rotor, the abrasion rate coefficient of the bearing of the first rotor and described Contact area between the roller of the bearing of the first rotor and the end ring, obtains first of lobe pump described in current time First wear height of the bearing of rotor.
7. according to the method described in claim 1, it is characterised in that the acquisition is by the first rotor and second rotor Between abrasion caused by the first rotor the 3rd wear height, including：
The first rotor is obtained relative to bitrochanteric slide coefficient；
Obtain the equivalent load that second rotor is applied to the first rotor；
The equivalent load of the first rotor, the first rotor are applied to according to the slide coefficient, second rotor The coefficient of waste of rotating speed, the thickness of the first rotor and the first rotor, obtains the first rotor described in current time 3rd wear height.
8. method according to claim 7, it is characterised in that described to be applied according to the slide coefficient, second rotor Add to the equivalent load, the rotating speed of the first rotor, the thickness of the first rotor and described first of the first rotor The coefficient of waste of rotor, obtains the 3rd wear height of the first rotor described in current time, including：
The equivalent load and formula of the first rotor are applied to reference to second rotor： The 3rd wear height of the first rotor described in current time is obtained, wherein, h1(t) it is the 3rd of the first rotor described in current time Wear height, PDL2(t) it is equivalent load that second rotor is applied to the first rotor, ε(1,2)For the first rotor Relative to bitrochanteric slide coefficient, k2For the coefficient of waste of the first rotor of the lobe pump, n is the first rotor Rotating speed, B is the thickness of the first rotor.
9. according to the method described in claim 1, it is characterised in that it is described according to first wear height, second mill Damage lobe pump working model is established in the vacuum tank in height, the 3rd wear height and vacuum system pressure with The relation of the working time of the lobe pump, including：
Taken out according to first wear height, second wear height, the 3rd wear height, the theory of the lobe pump The first rotor top of fast, described lobe pump starts when institute with the intrinsic gap of the inner walls of the lobe pump, pumping process The transmission probability for stating pressure in vacuum tank, the thickness of the first rotor and gas piping obtains the reality of the lobe pump Pumping speed；
When being started according to the actual pumping speed of the lobe pump, pumping process in the vacuum tank pressure, the lobe pump pole Pressure limiting is strong, lobe pump working model in volume and the vacuum system of the vacuum tank, obtains in the vacuum system Vacuum tank in pressure and the lobe pump working time relation.
10. method according to claim 9, it is characterised in that pressure and institute in the vacuum system in vacuum tank The relation for stating the working time of lobe pump is：
Wherein, Sp(t) it is the actual pumping speed of lobe pump described in current time, P (t) is the pressure described in current time in vacuum tank By force；SthFor the theoretical pumping speed of the lobe pump, δ1For at the top of the first rotor of the lobe pump and in the housing of the lobe pump The intrinsic gap of wall, Δ δ (t) is the first wear height of the bearing of the first rotor of lobe pump described in current time, and h (t) is Second wear height of the first rotor described in current time, h1(t) it is the 3rd wear height of the first rotor described in current time, Δ p=Pout-Pin, PinFor the admission pressure of the lobe pump, PoutIt is the pressure at expulsion of the lobe pump, QtotalFor sieve Thatch pumping takes the intrinsic leakage total amount lost during air, P0Pressure, P in the vacuum tank when starting for pumping processjTo be described The ultimate pressure of lobe pump, t1For the most long working time of the lobe pump, K is conductance coefficient, and W is several for the transmission of gas piping Rate, B is the thickness of the first rotor of the lobe pump, and V is the volume of the vacuum tank.
CN201610192881.0A 2016-02-04 2016-03-30 A kind of vacuum system performance degradation measuring method based on lobe pump fault mode Pending CN107035692A (en)

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1398507A2 (en) * 2002-09-10 2004-03-17 Kabushiki Kaisha Toyota Jidoshokki Multistage Roots-type vacuum pump
CN1550674A (en) * 2003-05-19 2004-12-01 ��ʽ��������Զ�֯�������� Roots pump
WO2009074408A2 (en) * 2007-12-13 2009-06-18 Oerlikon Leybold Vacuum Gmbh Vacuum pump, and method for operating a vacuum pump
CN203548214U (en) * 2013-10-08 2014-04-16 上海宏昊企业发展有限公司 Multifunctional detection device for high-vacuum multistage roots pump
CN104756833A (en) * 2015-03-27 2015-07-08 江苏大学 Distributed gravity irrigation photovoltaic system for layer water lifting and energy storage
CN104806881A (en) * 2015-04-03 2015-07-29 广东省佛山水泵厂有限公司 Gas-cooled loop-closed Roots liquid vacuum system and control method thereof
CN105275052A (en) * 2014-06-30 2016-01-27 汤仁民 Automatic water storage control device

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1398507A2 (en) * 2002-09-10 2004-03-17 Kabushiki Kaisha Toyota Jidoshokki Multistage Roots-type vacuum pump
CN1550674A (en) * 2003-05-19 2004-12-01 ��ʽ��������Զ�֯�������� Roots pump
WO2009074408A2 (en) * 2007-12-13 2009-06-18 Oerlikon Leybold Vacuum Gmbh Vacuum pump, and method for operating a vacuum pump
CN203548214U (en) * 2013-10-08 2014-04-16 上海宏昊企业发展有限公司 Multifunctional detection device for high-vacuum multistage roots pump
CN105275052A (en) * 2014-06-30 2016-01-27 汤仁民 Automatic water storage control device
CN104756833A (en) * 2015-03-27 2015-07-08 江苏大学 Distributed gravity irrigation photovoltaic system for layer water lifting and energy storage
CN104806881A (en) * 2015-04-03 2015-07-29 广东省佛山水泵厂有限公司 Gas-cooled loop-closed Roots liquid vacuum system and control method thereof

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