CN107024786B - Metal wire crack repairing method of display substrate - Google Patents
Metal wire crack repairing method of display substrate Download PDFInfo
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- CN107024786B CN107024786B CN201710301459.9A CN201710301459A CN107024786B CN 107024786 B CN107024786 B CN 107024786B CN 201710301459 A CN201710301459 A CN 201710301459A CN 107024786 B CN107024786 B CN 107024786B
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G02F1/1309—Repairing; Testing
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Abstract
The invention provides a method for repairing metal wire cracks of a display substrate, which comprises the following steps: coating a dielectric medium containing metal particles on a metal wire of a display substrate, wherein the metal particles and the metal wire are the same metal, loading an alternating current voltage on the metal wire, and maintaining a preset first time length; if the metal wire has cracks, an electric field is generated at the cracks, and the metal particles in the dielectric medium are driven by the electric field to move and converge at the positions of the cracks, so that the metal wire is repaired. The scheme of the invention can omit the detection process of the crack position, improve the repair efficiency and save time and labor. In addition, the electric field is generated to collect metal particles to repair the cracks of the metal wire, compared with a CVD (chemical vapor deposition) repairing mode, the process is simple, the efficiency is high, the time is short, the existing equipment is adopted to repair the metal particles, additional purchase of new equipment is not needed, the modification cost is low, and in addition, the fine cracks can be timely discovered and repaired, so that the product yield is improved.
Description
Technical Field
The invention relates to the technical field of display, in particular to a method for repairing metal wire cracks of a display substrate.
Background
Before a TFT-LCD (thin film transistor-liquid crystal display) is formed into a box, a display substrate of a part of products has more or less line cracks due to process environments and the like. In order to avoid the defects that the circuit can not be repaired or the circuit is difficult to repair in the future, the circuit is repaired at the initial stage of the crack.
In the conventional display substrate, laser CVD (Chemical Vapor Deposition) repair is generally used for repairing the metal line cracks. The specific process is as follows: first, whether the display substrate has open circuit defect is detected. Specifically, a voltage is applied to both ends of a metal wire of the display substrate to form a loop, the resistivity of the entire wire is detected by a sensor, whether the wire has an open defect or not is detected according to the magnitude of the resistivity, and if the open defect exists, the specific position of a crack (namely, the open defect) of the metal wire is further determined. Then, two breakpoints of the metal line are connected through a CVD deposition process, so that the repair is realized. Specifically, as shown in fig. 1, a metal oxycarbide 11 carried by Ar gas is sprayed to a to-be-repaired position of a metal wire 12, and the position is irradiated with a laser 13, so that the metal oxycarbide 11 undergoes a photolysis reaction and a thermolysis reaction, so that metal is deposited on a glass substrate 14, thereby repairing a crack 15 of the metal wire 12.
The existing metal wire crack repair of the display substrate has the following defects:
1. in the process of detecting whether the open circuit defect exists, if the crack of the metal wire is small, the crack is difficult to detect, and correspondingly, the small crack cannot be repaired subsequently, so that the yield of the product is influenced;
2. before repair, the specific position of the metal wire crack needs to be determined manually, which wastes time and labor;
3. the CVD method requires a photolysis reaction by laser irradiation and a chemical reaction such as thermal decomposition, and has a complicated process, a long reaction time, and a low repair efficiency.
Therefore, a solution for repairing metal line cracks of a display substrate is needed to solve the above technical problems.
Disclosure of Invention
The invention provides a method for repairing metal wire cracks of a display substrate, aiming at overcoming the defects in the prior art, and the method is used for at least partially solving the problems that the small metal wire cracks are difficult to detect, and the problems that the metal wire crack repairing process is complex, long in time consumption and low in repairing efficiency.
In order to solve the technical problems, the invention adopts the following technical scheme:
the invention provides a method for repairing metal wire cracks of a display substrate, which comprises the following steps:
coating a dielectric medium containing metal particles on metal wires of a display substrate, wherein the metal particles and the metal wires are the same metal;
and loading alternating current voltage to the metal wire and maintaining the preset first time length.
Further, after maintaining the preset first time period, the method further includes:
and detecting the resistivity of the metal wire, and if the resistivity is greater than a preset threshold value, loading an alternating current voltage to the metal wire and maintaining a preset second time length.
Preferably, the first and second periods of time are 40-50 seconds.
Preferably, the second period of time is equal to the first period of time.
Preferably, the frequency of the alternating voltage is 100 KHz.
Preferably, the alternating voltage is 3v-3.2 v.
Preferably, the dielectric medium containing the metal particles is in a gel state, a liquid sol state, or a liquid crystal state.
Preferably, the metal line is a gate line, a data line or a source drain electrode line, and the metal line is made of at least one of molybdenum, molybdenum-niobium alloy, aluminum-neodymium alloy, titanium and copper.
Preferably, the metal particles are metal nanoparticles.
Preferably, the metal lines of the display substrate are multi-layered;
after one layer of metal wire is prepared, the metal wire is repaired by adopting the method, and after the metal wire is repaired, the next layer of metal wire of the display substrate is prepared and repaired.
The invention can realize the following beneficial effects:
the invention provides a metal wire crack repairing method of a display substrate, which comprises the steps of coating a dielectric medium containing metal particles with the same material as metal wires on the metal wires of the display substrate, applying alternating voltage to the metal wires and maintaining for a period of time, generating an electric field at the cracks if the metal wires have the cracks, driving the metal particles in the dielectric medium to move by the electric field, and converging the metal particles at the crack positions, thereby repairing the metal wires. According to the scheme of the invention, voltage is directly applied to the metal wire, and the electric field is generated only at the position with the crack and the metal particles are correspondingly driven to repair the crack position, so that the detection process of the crack position can be omitted, the specific position of the crack of the metal wire does not need to be detected in advance, the repair efficiency is improved, and time and labor are saved. In addition, the scheme of the invention adopts the generated electric field to gather the metal particles to repair the cracks of the metal wire, compared with the existing CVD repairing mode, the technology is simple, the efficiency is high, the time is short, the method can be realized by adopting the existing equipment, no additional new equipment needs to be purchased, the modification cost is low, and the fine cracks can be timely discovered and repaired, so that the product yield is improved.
Drawings
FIG. 1 is a schematic diagram of a conventional metal line crack repair process for a display substrate;
FIG. 2 is a schematic diagram of a metal line crack repair process of a display substrate according to the present invention;
fig. 3 is a schematic view illustrating a process of repairing a metal line crack of a display substrate according to the present invention.
Illustration of the drawings:
11. metal oxycarbide 12, metal wire 13, laser
14. Glass substrate 15, crack 16, metal particle
17. Dielectric 18, electric field
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
The technical solution of the present application will be described in detail below with reference to fig. 2 and 3.
The invention provides a metal wire crack repairing method of a display substrate, which is used for repairing cracks of metal wires on the display substrate, wherein the display substrate can be an array substrate or an Organic Light-Emitting Diode (OLED) substrate and the like. As shown in fig. 2, the display substrate to be repaired includes: a glass substrate 14 and metal lines 12 formed on the glass substrate 14. The metal line 12 may be a metal line in the display region, such as a gate line, a data line, or a source drain electrode line, or a metal trace in the non-display region, such as a repair line. The material of the metal wire 12 may be at least one of molybdenum, molybdenum-niobium alloy, aluminum-neodymium alloy, titanium, and copper.
If the preparation process is poor or the preparation environment is poor, cracks 15 can be generated on the metal wire 12, and the scheme of the invention can detect and automatically repair the crack defects of the metal wire 12.
The metal line crack repairing method of the display substrate of the present invention can be implemented using an existing OS TEST (open/short circuit TEST) apparatus, the OS TEST apparatus including: a Stage (Stage) and a Sensor (Sensor). The base station is used for bearing a display substrate, is made of granite and has the size of 1100x1300mm, and can fix the display substrate to be detected and repaired in a vacuum adsorption mode. The sensor can move in the direction of the X, Y, Z axis, where the direction of the X, Y axis is two directions perpendicular to each other in a plane parallel to the display substrate, and the direction of the Z axis is a direction perpendicular to the display substrate.
Referring to fig. 2 and 3, the method for repairing a metal line crack of a display substrate according to the present invention includes the steps of:
in step 201, a dielectric 17 containing metal particles 16 is coated on a metal line 12 of a display substrate.
Specifically, a display substrate is placed and fixed on a base of an OS TEST device, and a dielectric 17 containing metal particles 16 is coated on a metal line 12 of the display substrate so that an electric field 18 can be formed in the dielectric 17 when a voltage is subsequently applied.
The dielectric 17 containing the metal particles has low fluidity or no fluidity so that the dielectric 17 does not flow out of the display substrate when the dielectric 17 containing the metal particles 16 is coated on the metal lines 12.
The dielectric medium 17 containing the metal particles may be in a gel state, a liquid sol state, or a liquid crystal state. Of course, any state of the dielectric medium 17 containing metal particles, as long as the metal particles therein can be dragged by the electric field 18 to repair the metal wire 12, is within the scope of the present invention. The dielectric 17 may be water.
A gel is a special dispersion system called gel, wherein colloidal particles or macromolecules in a sol or a solution are connected with each other under certain conditions to form a space network structure, and the gaps of the structure are filled with liquid serving as a dispersion medium, and the gel has no fluidity.
The liquid sol is formed by taking liquid as a dispersion phase and taking the liquid as a dispersion medium, wherein the diameter of colloidal particles is 1-100nm and the colloidal particles are uniformly distributed in the dispersion medium.
The liquid crystal state is a state between a crystalline state and a liquid state, and is a specific substance state which is different from a solid state, a liquid state, and a gas state in a certain temperature range, and has birefringence characteristic of anisotropic crystals and fluidity of liquid. The liquid crystal state is liquid-like and continuous, and the molecules thereof maintain the regular arrangement peculiar to the solid crystal, and the structure thereof is between the crystal and the liquid, so it is also called mesomorphic state, and in the embodiment of the present invention, the dielectric 17 is a lyotropic liquid crystal.
Preferably, the metal particles 16 are metal nanoparticles. Of course, those skilled in the art will appreciate that the metal particles 16 may be atoms, electrons, protons, etc., and any metal particle that can be focused near the electric field 18 is within the scope of the present invention.
The metal particles 16 and the metal wire 12 are made of the same metal, and thus, after the crack 15 is repaired by the metal particles 16, the material of the repaired metal wire 12 at the position of the crack 15 is the same as the material of the metal wire 12 at other positions, thereby ensuring the electrical performance of the metal wire 12.
Specifically, alternating voltages with a frequency of 100KHz and a magnitude of 3v to 3.2v are respectively applied to the two ends of the metal wire 12, and the first duration is maintained. Preferably, the first time period may be 40 to 50 seconds.
When a crack 15 (i.e., an open defect) exists in the metal wire 12 after the ac voltage is applied to the metal wire 12, an electric field 18 (as indicated by an arrow in fig. 2) is generated at the position of the crack 15, and accordingly, the electric field 18 drags the metal particles 16 in the dielectric 17 to the position of the crack 15 and fills the crack 15, thereby repairing the metal wire 12. If there is no crack in the metal wire 12, an electric field is not formed in the dielectric 17 even if an ac voltage is applied to the metal wire 12, and accordingly, the metal particles 16 in the dielectric 17 do not move and do not affect the metal wire 12.
It can be seen from the step 201-202 that the scheme of the present invention can omit the detection procedure of the crack position, and the specific position of the crack 15 of the metal wire 12 does not need to be detected in advance, but the alternating voltage is directly loaded, so that the metal wire 12 can be automatically detected and repaired, the repair efficiency is improved, and the time and the labor are saved. In addition, the scheme of the invention adopts the generated electric field 18 to gather the metal particles 16 to repair the cracks 15 of the metal wire 12, compared with the existing CVD repairing mode, the technology is simple, the efficiency is high, the time is short, the method can be realized by adopting the existing equipment, no additional new equipment is needed to be purchased, the reconstruction cost is low, and the tiny cracks 15 can be timely discovered and repaired, so that the product yield is improved.
In order to ensure that the cracks 15 of the metal lines 12 are completely repaired, further, after the step 202, the metal line crack repairing method of the display substrate may further include the steps of:
Specifically, the X, Y axis parameter of the sensor is adjusted to move the sensor of the OS TEST device to the position of the metal line 12, and the Z axis parameter is adjusted to bring the sensor close to the metal line 12 so as to detect the resistivity of the metal line 12.
If the resistivity is greater than the predetermined threshold, it indicates that the open defect still exists in the metal line 12, i.e. the crack 15 is not completely repaired, and then the repair is continued (i.e. step 204 is executed). If the resistivity is less than or equal to the preset threshold value, the metal wire 12 is repaired, and the repair process is ended if the open circuit defect does not exist.
Specifically, the frequency of the alternating voltage is 100KHz, the size of the alternating voltage is 3v-3.2v, and the second time duration can be 40-50 seconds.
Preferably, the second time period is equal to the first time period, and the second time period may be set according to the detected resistivity of the metal line 12. If the detected resistivity of the metal line 12 does not differ much from the threshold value, the second duration may be set to a smaller value (i.e., less than the first duration); if the detected resistivity of the metal line 12 is much greater than the threshold, the second duration may be set to a greater value (i.e., greater than or equal to the second duration).
After two repairs, the crack 15 of the metal line 12 can be usually repaired, and of course, in order to ensure the repair quality, after step 204, step 203 may be performed again so as to detect the resistivity of the metal line 12 again until the crack 15 of the metal line 12 is completely repaired.
It should be noted that, if the metal lines of the display substrate are multi-layered, one layer of metal line needs to be prepared and repaired, and when the layer of metal line is ensured to have no crack, the next layer of metal line is prepared. Specifically, after one layer of metal wire 12 is prepared, the metal wire 12 is repaired by the method, and after the layer of metal wire 12 is repaired, the next layer of metal wire 12 of the display substrate is prepared and repaired.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (9)
1. A method of repairing a metal line crack in a display substrate, the method comprising:
coating a dielectric medium containing metal particles on metal wires of a display substrate, wherein the metal particles and the metal wires are the same metal;
loading alternating current voltage to the metal wire and maintaining the preset first duration;
detecting the resistivity of the metal wire, and if the resistivity is greater than a preset threshold value, loading an alternating current voltage to the metal wire and maintaining a preset second time length;
when the difference between the resistivity and the threshold is less than or equal to a preset value, the second duration is less than the first duration; when the difference between the resistivity and the threshold is greater than a preset value, the second duration is greater than or equal to the first duration.
2. The method of claim 1, wherein the first and second time periods are 40-50 seconds.
3. The method of claim 1, wherein the second duration is equal to the first duration.
4. The method of claim 1, wherein the alternating voltage has a frequency of 100 KHz.
5. The method of claim 1, wherein the alternating voltage is 3v to 3.2 v.
6. The method of claim 1, wherein the dielectric medium containing the metal particles is in a gel-like, liquid sol-like, or liquid crystal state.
7. The method of claim 1, wherein the metal line is a gate line, a data line or a source drain electrode line, and the metal line is made of at least one of molybdenum, molybdenum-niobium alloy, aluminum-neodymium alloy, titanium and copper.
8. The method of claim 1, wherein the metal particles are metal nanoparticles.
9. The method of any of claims 1-8, wherein the metal lines of the display substrate are multi-layered;
after one layer of metal wire is prepared, the metal wire is repaired by adopting the method, and after the metal wire is repaired, the next layer of metal wire of the display substrate is prepared and repaired.
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| EP3489997B1 (en) * | 2017-11-28 | 2022-06-15 | Mitsubishi Electric R&D Centre Europe B.V. | System for allowing the restoration of an interconnection of a die of a power module |
| CN108519705B (en) * | 2018-03-29 | 2020-09-08 | 深圳市华星光电半导体显示技术有限公司 | Array substrate and display panel |
| CN110602874B (en) * | 2019-09-18 | 2021-03-30 | 昆山工研院新型平板显示技术中心有限公司 | Flexible circuit board, preparation method thereof and display device |
| CN113411982B (en) * | 2021-06-15 | 2022-10-21 | 广东工业大学 | Directional repair method for fine line guided by double-layer stacked electric field |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104019666A (en) * | 2014-06-05 | 2014-09-03 | 莱芜钢铁集团有限公司 | Immediate repairing method for intermediate frequency furnace body crucible |
| CN106409152A (en) * | 2016-09-26 | 2017-02-15 | 昆山工研院新型平板显示技术中心有限公司 | A metal wire, a metal wire self-repairing method and a flexible display screen |
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| CN101581865B (en) * | 2009-06-22 | 2011-01-19 | 友达光电股份有限公司 | Display panel and repair method thereof |
| CN102466900B (en) * | 2010-11-04 | 2015-02-18 | 财团法人工业技术研究院 | Method and system for repairing flat panel display |
| CN104375347B (en) * | 2014-12-04 | 2017-06-06 | 合肥鑫晟光电科技有限公司 | Array base palte, patch, display panel and the method for repairing array base palte |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104019666A (en) * | 2014-06-05 | 2014-09-03 | 莱芜钢铁集团有限公司 | Immediate repairing method for intermediate frequency furnace body crucible |
| CN106409152A (en) * | 2016-09-26 | 2017-02-15 | 昆山工研院新型平板显示技术中心有限公司 | A metal wire, a metal wire self-repairing method and a flexible display screen |
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