CN107015341A - Optical device, projection optical system, exposure device and article manufacturing method - Google Patents
Optical device, projection optical system, exposure device and article manufacturing method Download PDFInfo
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- CN107015341A CN107015341A CN201710059375.9A CN201710059375A CN107015341A CN 107015341 A CN107015341 A CN 107015341A CN 201710059375 A CN201710059375 A CN 201710059375A CN 107015341 A CN107015341 A CN 107015341A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
The present invention relates to optical device, projection optical system, exposure device and article manufacturing method.It is used to make the deformable mirror equipment of the distorted reflector of speculum there is provided a kind of, the equipment includes：Voice coil motor, it has the magnet installed on the face relative with reflecting surface and the coil arranged at the position in face of magnet；The reference base of hold-in winding；Conduct heat bar, and it is connected to the coil kept in reference base；And collect the stream of the heat from heat transfer bar.Heat transfer bar has free end in the end of the heat-conducting unit relative with being connected to overhang.
Description
Technical field
The present invention relates to optical device, exposure device and article manufacturing method.
Background technology
In the presence of following optical device, wherein it is possible to by using reflecting surface there is the speculum of deformable shape to correct
Aberration in optical system.The speculum is disposed in the light path of optical system, and in order to adjust the shape of speculum,
Through proposing the method using the voice coil motor driven under following state：It is bonded to magnet at the back side of speculum, and
With magnet it is slightly spaced and in face of magnet position at be disposed with coil.
This method makes coil adjacently to each to be arranged with magnet.Then, the heat produced in driving by coil,
Magnet is delivered to from coil via air layer, and speculum is delivered to from magnet.Accordingly, it is difficult to be expectation by mirror deformation
Shape.In written " the VLT Deformable Secondary Mirror such as R.Biasi:integration and
electromechanical tests results”,Proc.SPIE 8447,Adaptive Optics Systems III,
Disclose and be constructed as below in 84472G (September13,2012)：Coil is arranged in the end for being joined to the copper bar of coldplate,
Then, by the heat collection produced by coil into copper bar to reduce the temperature rise of speculum.
In being constructed disclosed in R.Biasi etc., line is only kept by the copper bar extended in the normal direction of speculum
Circle.Range sensor is arranged in reference base corresponding with each voice coil motor between measuring basis base and speculum
Distance, and the shape of speculum is controlled based on measured value.In the case where being constructed disclosed in R.Biasi etc., it is necessary at each
Range sensor is arranged in voice coil motor, then, if speculum has major diameter, needs 100 or more distances to pass
Sensor.Therefore, this may cause the increase of cost.It is therefore desirable to a kind of construction for the quantity for reducing range sensor.If from
Range sensor unless each is removed in each voice coil motor, then needs to produce desired power with feed-forward mode and controls the shape of speculum
Shape.But, in the case where being constructed disclosed in R.Biasi etc., the thermal expansion of copper bar changes the distance between coil and magnet,
And changing thrust constant so that voice coil motor can not produce target force with feed-forward mode.In order to reduce between coil and magnet
Distance change, it is necessary to which coil is fixed in reference base.In this case, reference base be configured to via coil and
Copper bar is attached on coldplate.Therefore, if copper bar and coldplate produce thermal deformation, reference base also due to from deformation
Power that copper bar and coldplate are subject to and deform, and the position skew of coil, this will change thrust constant.So, by voice coil loudspeaker voice coil
The coil of motor is fixed in the construction on datum plate, there is the demand to being constructed as below：Subtract while can cool down coil
The small influence caused by the thermal deformation for arriving datum plate is provided.
The content of the invention
The present invention provides a kind of favourable optical device for example in terms of the performance boost of optical system.
Optical device according to an aspect of the present invention is for making the optical device of the distorted reflector of optical element, institute
Stating optical device includes：Actuator, it is with the magnet installed on the face relative with the reflecting surface and in face of described
The coil arranged at the position of magnet；Bottom plate, it keeps the coil；Heat-conducting unit, it is connected to keeps in the bottom plate
Coil；And cooling unit, it collects the heat from the heat-conducting unit, wherein, the heat-conducting unit is with being connected to
The end of the relative heat-conducting unit of the overhang, with free end.
By description with reference to the accompanying drawings to exemplary embodiment, other features of the invention will be clear.
Brief description of the drawings
Figure 1A to Fig. 1 C is the schematic diagram for the essential structure for showing optical device.
Fig. 2 is the schematic diagram for the construction for showing the optical device according to first embodiment.
Fig. 3 is the schematic diagram for the construction for showing the optical device according to second embodiment.
Fig. 4 is the schematic diagram for the construction for showing the optical device according to 3rd embodiment.
Fig. 5 is the schematic diagram for the construction for showing the optical device according to fourth embodiment.
Fig. 6 is the schematic diagram of the construction for the exposure device for showing Application Optics equipment.
Embodiment
The exemplary embodiment of the present invention is described below with reference to accompanying drawings.
(first embodiment)
Figure 1A is the sectional view for the exemplary essential structure for showing deformable mirror equipment 100.It is referred to as optical device
Deformable mirror equipment 100 be configured to allow for change as optical element speculum 101 reflecting surface shape.
X-axis is set to the direction vertical with the reflecting surface of the speculum 101 before deformation, and Y-axis and Z axis are set by Figure 1A into Fig. 5
It is set to orthogonal in the plane (that is, the parallel plane with the reflecting surface of the speculum 101 before deformation) vertical with X-axis.Instead
Penetrate mirror 101 be thin speculum and make the back side of reflecting surface (hereinafter referred to as " mirror back surface ") centrally through speculum
Fixed part 102 and fixed to reference base 121.The coating that the wavelength for the light to be used will be suitable for is applied to speculum 101
On reflecting surface.In order to suppress due to the generation of form error caused by thermal deformation, in the present embodiment by low-thermal-expansion optics
Glass is set to the material of speculum 101.In addition, in the present embodiment, although being not particularly limited the size of speculum, leading to
Abnormal reflections mirror is directed to about 0.1 meter to 2 meters of overall diameter with about several millimeters to several centimetres of thickness.Such as speculum 101
Overall diameter be about 1 meter, thickness is about 1 centimetre.
The reference base 121 for being referred to as bottom plate keeps speculum 101, displacement transducer 123 and for fixing actuator
Retainer 122.In addition, reference base 121 passes through the hold-in winding 105 of retainer 122.It will be reflected by speculum fixed part 102
Mirror 101 is maintained in reference base 121.The displacement transducer 123 being maintained in reference base 121 measures the table of speculum 101
Face shape.In order to reduce the reduction of measurement accuracy caused by the thermal deformation as caused by the heat from actuator etc., in this reality
Apply in example, the material of reference base 121 is set to low thermal expansion material.
Speculum fixed part 102 for cylinder and is fixed speculum 101 and reference base 121.In the present embodiment, instead
Penetrate mirror fixed part 102 and be arranged such that the center line of speculum 101 and the center lines matching of speculum fixed part 102.But,
The present embodiment is not limited to such construction, so if being that in this context, then can change speculum fixed part 102
Position, shape and quantity.Preferably there is the material of speculum fixed part 102 low thermal expansivity to reduce the shadow of thermal deformation
Ring, and in the present embodiment, speculum fixed part 102 is used as using with the identical low thermal expansion material of reference base 121
Material.Driving voice coil motor 103 causes speculum 101 to be deformed into target shape, but is due to that speculum fixed part 102 will reflect
Mirror 101, which is fixed, makes it not be shifted over, therefore speculum 101 neither translates and is also not in relation to the axle vertical with X-direction in the X direction
Rotation.For example, when driving voice coil motor 103, the total force produced by voice coil motor 103, which differs, is set to zero.But, anti-
The torque that generation is offseted with the torque of the voice coil motor 103 at mirror fixed part 102 is penetrated, therefore speculum 101 does not rotate.As a result
It is that the posture of speculum 101 can be maintained in required accuracy rating, thus necessarily controls the posture of speculum 101.
Voice coil motor 103 is the actuating unit constructed by magnet 104 and coil 105.Figure 1B is shown according to this implementation
The example of the arrangement of magnet 104 in the mirror back surface of example.The magnet 104 for being referred to as movable units is radially placed on
On the face relative with the reflecting surface of speculum 101, and the coil 105 for being referred to as fixed cell is kept via retainer 122
In reference base 121, make coil 105 and magnet 104 slightly spaced.Target shape that can be according to speculum 101 and institute
The precision needed determines the quantity and arrangement of voice coil motor 103.By to coil 105 apply electric current, voice coil motor 103 with magnetic
Lorentz force is produced on the direction for the axle that body and coil intersect.In addition, voice coil motor 103, which has, can make the anti-of speculum 101
Penetrate thrust and drive volume that facial disfigurement is desired shape.The neodymium with high magnetic flux density can for example be used as magnet 104.
Thrust reduces with the increase in the gap between coil 105 and magnet 104, it is therefore necessary to make coil 105 close to magnet 104
To about 0.1 millimeter to several millimeters of the end face for example away from magnet 104.
Arrange component (pack) 106 between magnet 104 and speculum 101, and with adhesive fixation kit 106 and magnetic
The part between part and component 106 and speculum 101 between body 104.Arranged between speculum 101 and magnet 104
Component 106, so as to reduce influence of the thermal deformation of magnet 104 to speculum 101.The material of component 106 is and the phase of speculum 101
Same low thermal expansion material.Retainer 122 is the holding unit for coil 105 to be fixed to reference base 121.
Multiple displacements for being referred to as measuring unit are disposed with position above the reference base 121 to mirror back surface to pass
Sensor 123.On the basis of by the way that reference base 121 is set and distance from reference base 121 to mirror back surface is measured, to obtain
Take the shape information of speculum.The displacement transducer 123 in Figure 1B is radially disposed, however, it is possible to according to the mesh of speculum 101
Shape and required precision is marked to determine the arrangement and number of displacement transducer 123.In the present embodiment, in the angle of reduced cost
On, show example of the quantity less than the quantity (that is, the quantity of coil 105) of actuating unit for causing displacement transducer 123
Property construction, still, the present embodiment not limited to this.
The bar 124 that conducts heat is heat conductor (heat-conducting unit), and heat transfer bar 124 is connected to connect coil 105 and coldplate 125
Knot, and by the heat transfer of coil to coldplate 125.Bar 124 will be conducted heat fixed to cooling by screw 127 via thermally conductive grease
Plate 125.For example, heat transfer bar 124 is made up of copper or aluminium with high thermal conductivity, or such as heat conducting pipe with high thermal conductivity
Unit.The length and thickness of heat transfer bar 124 are determined according to the heating amount of coil and required thermal resistance value.In addition, via viscous
Mixture engages coil 105 and heat transfer bar 124.
The end of coldplate (plate) 125 and the heat transfer bar 124 for being connected to coil 105 is arranged at interval, in coldplate
The stream 126 for being referred to as cooling unit is formed in 125.The temperature controlled refrigerating agent supplied from temperature controller (not shown) is being flowed
Flowed in road 126.Fig. 1 C are the figures for showing to be joined to the example of the heat transfer bar 124 of coldplate 125 and stream 126.By conducting heat
The heat for the coil 105 that bar 124 is collected is collected into the stream 126 formed in coldplate 125.Coldplate 125 can be by
The material with high thermal conductivity of such as copper or aluminium is made.Can be according to the thermal resistance value needed for the heat for collecting coil, refrigerant
The pressure loss etc. determine the shape of stream 126 and the flow of refrigerant.In the present embodiment, stream 126 is multiple, and
Arrange stream to reduce the pressure loss with parallel construction.In addition, it is contemplated that the assembly performance of coldplate, can be constructed with split and cooled down
Plate 125.
Voice coil motor 103, which has, to be used to produce the structure of thrust by applying electric current to coil 105, therefore, coil 105
Heat is produced in driving.The heat of coil is delivered to by magnet 104 from coil 105 by air layer, and by component 106 from
Magnet 104 is delivered to speculum 101.Then, the experience of speculum 101 thermal deformation, so as to speculum 101 can not be deformed and controlled
For desired shape.If in addition, the heat of coil causes the thermal deformation of reference base 121, speculum via retainer 122
Position relationship between 101 and reference base 121 changes.If in addition, reference base 121 produces thermal deformation, position sensing
The position skew of device 123, so that the shape of speculum 101 can not be measured accurately.Therefore, it is necessary to be passed through by coldplate 125
The bar 124 that conducts heat collects the heat of coil 105 and reduces the thermal deformation of reference base 121 and speculum 101.
But, heat transfer bar 124 due to the heat to coil 105 collection and thermal expansion.Especially since heat transfer bar 124
It is made and with big linear expansion coefficient and big Young's modulus as material generally by copper or aluminium, so heat transfer bar
124 produce big thermal stress.Because the two ends for the bar 124 that conducts heat are respectively fixed to coldplate 125 and reference base 121, therefore pass
Hot rod 124 is dependent on thermal expansion to reference base 121 and the applying power of coldplate 125.Particularly, if via retainer 122
To the applying power of reference base 121, then reference base 121 deforms, and can not deform and control to expect speculum 101
Shape.
Therefore, present embodiments provide and be constructed as below, wherein, reduce the benchmark bottom as caused by the thermal expansion of heat transfer bar 124
The deformation of seat 121.Hereinafter, reference picture 2 is described in detail to the cooling construction of the coil 105 in the present embodiment.Fig. 2 is basis
The schematic sectional view of the deformable mirror equipment 300 of first embodiment.The thickness of coldplate 125 is several millimeters to tens millis
Rice.The deformable mirror equipment 300 of the present embodiment has the heat transfer bar 124 and coldplate 125 for being spaced arrangement of turning up the soil, and
And with the air layer 301 arranged between heat transfer bar 124 and coldplate 125.Conduct heat between bar 124 and coldplate 125 away from
From e.g. several microns Dao several millimeters.The heat transfer efficiency conducted heat between bar 124 and coldplate 125 and chimeric (engage) to cooling
It is proportional in face of area (facing area) between the heat transfer bar 124 and coldplate 125 of plate 125.In addition, the heat transfer He of bar 124
The thickness of heat transfer efficiency and air layer 301 between coldplate 125 is inversely proportional.It therefore, it can the heat according to coil and reflection
The rated temperature-rise value of mirror 101 come determine air layer 301 thickness and telescoping part face area.Coldplate 125 can be passed through
Thickness and the diameter of heat transfer bar 124 adjust in face of area.The gas for constituting air layer 301 is not limited to air, and can be with
It is the gas of one-component.
Heat transfer bar 124 has free end in the side of coldplate 125, and is therefore used as starting point from the end linked with coil 105
And free thermal expansion.Therefore, heat transfer bar 124 can reduce the deflection of reference base 121 without applying to reference base 121
Big power.It therefore reduces the change of the distance between coil 105 and magnet 104, and the thrust constant of voice coil motor 103
Variable quantity also become to be acceptable for the present embodiment.Therefore, by using the present embodiment, it can make feedforward control
Desired power is produced with voice coil motor 103 and controls the shape of speculum.
Further, since heat transfer bar 124 is arranged at interval with coldplate 125, therefore the vibration of coldplate 125 can be prevented
Reference base 121 is delivered to by conducting heat bar 124.In addition, in the present embodiment, can easily be assembled and without using
Heat transfer bar 124 is engaged coldplate 125 by the grade of screw 127.For example, assembling coil 105 and heat transfer bar in reference base 121
After 124, also assembling coldplate 125 makes coldplate 125 be alignd with heat transfer bar 124.Now, if coldplate 125 is by split structure
Make, then assembling is more prone to.In addition, after coldplate 125 aligns with reference base 121, the bar 124 that will conduct heat can also be passed through
Reference base 121 is inserted from coldplate 125 and based on the alignment heat transfer bar 124 of coldplate 125, and retainer 122 is fixed to base
Quasi- base 121.In this case, the thickness of management air layer 301 becomes easy.Reference base 121 and coldplate pass through not
The lens drum that shows is fixed.
As described above, the deformable mirror equipment 300 in the present embodiment is configured to so that although the He of coldplate 125
Heat transfer bar 124 is not bonded with each other directly, but the thermal bonding also by air layer 301.It therefore, it can by will be by coil 105
The heat of generation is collected into coldplate 125 by the bar 124 that conducts heat and drawn simultaneously by reducing by the thermal expansion of heat transfer bar 124
The deformation of the reference base 121 risen, to improve the shape control accuracy of optical device.
(second embodiment)
Reference picture 3 is described into another embodiment.In the following description, it is identical or equivalent with above embodiment by pair
Part provide with the reference identical reference in above embodiment, and be omitted or simplified its description.Fig. 3 is basis
The schematic sectional view of the deformable mirror equipment 400 of second embodiment.The heat transfer bar 124 of the present embodiment is close to its end
Low rigid elastomer 401 of the place with truncated cone shape.In addition, coldplate 125 has at the position corresponding with heat transfer bar 124
With the hole 402 of the identical truncated cone shape of elastomer 401, to allow elastomer 401 chimeric with hole 402.Hole 402 can be formed ratio
Elastomer 401 is small so that elastomer 401 can contact without any gap with hole 402.
In the present embodiment, the gap elastomer 401 between heat transfer bar 124 and coldplate 125 is filled.If using tree
Fat, rubber or heat transfer sheet are used as the material of elastomer 401, then the thermal conductivity ratio air 0.026W/mK (23 DEG C) of elastomer 401
Thermal conductivity big tens arrives hundred times.Therefore, even if the gap (thickness of elastomer 401 that will be conducted heat between bar 124 and coldplate 125
Degree) air layer or more several times greater than the air layer in first embodiment that is equal in first embodiment, compared to air layer
Heat transfer efficiency, can also improve from heat transfer bar 124 to coldplate 125 heat transfer efficiency.
Here, heat transfer bar 124 due to coil 105 heat and thermal expansion.But, in the present embodiment, due to elastomer
401 because conduct heat bar 124 thermal expansion and elastic deformation, therefore heat transfer bar 124 sent out from the end linked with coil 105 as starting point
Heat expands, and makes by the power that reference base 121 is subject to be reduced because of the thermal expansion for the bar 124 that conducts heat.In other words, can be by answering
With with sufficiently low rigid elastomer 401, to make the deformation of reference base 121 be reduced in permissible range.Elastomer 401
Can have 10GPa or smaller Young's modulus, and can be by being made such as resin, rubber.At this time it is also possible to by voice coil loudspeaker voice coil
The changing value of the thrust constant of motor 103 is set to acceptable, it is possible to produced feedforward control using voice coil motor 103
Desired power, it is possible to control the shape of speculum.
Further, since the gap between heat transfer bar 124 and coldplate 125 can be made to be more than the biography in the case of air layer
Gap between hot rod 124 and coldplate 125, therefore, if assembling deformable mirror equipment 400, easily alignment heat transfer
Bar 124 and coldplate 125.In other words, even if the off-centring at the center and the hole 402 of coldplate 125 of heat transfer bar 124, elasticity
Elastic deformation also occurs for body 401, so that elastomer 401 and coldplate 125 can be brought into tight contact with each other.As described above, according to this
The deformable mirror equipment 400 of embodiment can be by inserting the elastomer for being used for that the bar 124 that conducts heat to be engaged to coldplate 125
401, to improve the heat transfer efficiency from heat transfer bar 124 to coldplate 125.In addition, by heat transfer bar 124 and coldplate 125 it
Between gap insertion elastomer 401, can reduce reference base 121 because conduct heat bar 124 thermal expansion caused by deformation and
The shape control accuracy of optical device can be improved.
(3rd embodiment)
Hereinafter, another embodiment is described into reference picture 4.In the following description, will pair with the above embodiments phase
With or equivalent part provide with the reference identical reference in embodiment above, and it be omitted or simplified retouch
State.Fig. 4 is the schematic sectional view of the deformable mirror equipment 500 according to 3rd embodiment.At the benchmark bottom of the present embodiment
The stream 502 for being referred to as cooling unit is formed with seat 501.Therefore, according to the deformable mirror equipment 500 of the present embodiment not
Coldplate 125 with the divided mode used in first embodiment and second embodiment.Stream is arranged between heat transfer bar 124
502.The diameter and length of stream can be determined according to the heating amount of coil or the thermal resistance value of needs.Can be in heat transfer bar 124
Be disposed about stream 502, so as to improve cooling effectiveness.In addition, in the present embodiment, there are multiple streams 502, and with simultaneously
Row construction arrangement stream.By shortening with the length of each stream of parallel construction, the pressure loss can be reduced, and can press down
Make the reduction of cooling capacity caused by being raised because of the temperature of cooling agent.The diameter of heat transfer bar 124 in the present embodiment is constructed
For so that the air layer 503 for being referred to as gap between reference base 501 and heat transfer bar 124 is about several microns to several millimeters.
Next, by the description for the effect for providing the present embodiment.Deformable mirror equipment 500 can be by coil 105
The heat transfer of generation is further delivered to reference base 501 to heat transfer bar 124 by air layer 503, and in stream 502
Collect the heat.Due to the thickness of the thickness ratio coldplate 125 in the first embodiment and the second embodiment of reference base 501
It is thicker, therefore relative to first embodiment and second embodiment, the present embodiment has reference base 501 in face of heat transfer bar 124
Bigger area, so as to improve heat transfer efficiency.In addition, heat transfer bar 124 occurs from the end linked with coil 105 as starting point
Thermal expansion, therefore the deformation of reference base 501 can be suppressed without by big power.
In the present embodiment, due to the coldplate 125 in the absence of divided mode, thus can make than first embodiment and
The small deformable mirror equipment of second embodiment.Further, since it is simple in construction and be easy to assembling.Due in reference base 501
Middle formation stream 502, therefore the temperature of reference base 501 essentially becomes the temperature of cooling agent, even if deformable mirror is set
Standby 500 variation of ambient temperature, also reduces the temperature change of reference base 501.In the present embodiment, although the heat transfer He of bar 124
Gap between reference base 501 is air layer 503, but it is also possible to the insertion elastomer similar with second embodiment.As above
It is described, due in the deformable mirror equipment 500 of the present embodiment, forming stream 502 in reference base 501, and pass
Hot rod 124 and coldplate 125 are arranged to have air layer 503 therebetween, therefore can reduce by the thermal expansion of heat transfer bar 124
The deformation of caused reference base 501.
(fourth embodiment)
Hereinafter, reference picture 5 is provided to the description of another embodiment.In the following description, by pair with reality above
Apply the identical or equivalent part of example provide with the reference identical reference in embodiment above, and be omitted or simplified
It is described.Fig. 5 is the schematic sectional view of the deformable mirror equipment 600 according to fourth embodiment.In the present embodiment can
The difference between deformable mirror equipment 500 in deformable reflective mirror device 600 and 3rd embodiment is, this implementation
Example in deformable mirror equipment 600 include heat transfer bar 124, and arranged in reference base 501 be referred to as cooling
The stream 602 of unit is disposed between each coil 105.Can according to the heating amount of coil 105 and the thermal resistance value needed come
Determine the diameter and length of stream 602.It can arrange stream 602 to improve cooling effectiveness close to coil 105.In addition, in this reality
Apply in example, such as the stream 502 in 3rd embodiment, there are multiple streams 602 and stream is arranged with parallel construction.Pass through contracting
The length of short each stream 602 with parallel construction, it is possible to reduce the pressure loss, and can suppress to be raised by coolant temperature
Caused by cooling capacity reduction.The retainer 122 for being referred to as heat-conducting unit in the present embodiment is by with high-termal conductivity
Material is made.
Next, by the description for the effect for providing the present embodiment.Deformable mirror equipment 600 can be by coil 105
The heat of middle generation is delivered to reference base 501 via retainer 122 and collects heat by stream 602.Further, since this
Deformable mirror equipment 600 in embodiment is without heat transfer bar, therefore reference base 501 can suppress reference base 501
Deformation without by big power.In addition, in the present embodiment, retainer 122 can be extended at interval with coil 105, and
Increase the contact area of retainer 122 and reference base 501.In this configuration, heat transfer efficiency can further be improved.
Because the construction does not have the coldplate 125 of divided mode, therefore relative to first embodiment and second embodiment,
The present embodiment can reduce the size of construction.Further, since simple structure and easily assemble.Due to the shape in reference base 501
Temperature into stream 602, therefore reference base 501 essentially becomes the temperature of cooling agent.So, even if deformable mirror is set
Standby 600 variation of ambient temperature, also reduces the temperature change of reference base 501.As noted previously, as variable in the present embodiment
Shape mirror equipment 600 can by the heat produced in coil 105 via retainer 122 be delivered to reference base 501 and
Heat, therefore the bar that need not conduct heat are collected in stream 602, it is thus possible to suppress the base caused by the thermal expansion of heat transfer bar
The deformation of quasi- base 501.
(embodiment of exposure device)
Fig. 6 is the exposure for showing the optical device using one embodiment according to first embodiment into fourth embodiment
The schematic diagram of the construction of device.Exposure device 50 include lamp optical system IL, projection optical system PO, keep mask 55 and
Moveable mask platform MS, holding substrate 56 and the exposure-processed of moveable Substrate table WS and control base board 56 control
Unit 51.Z axis is arranged to parallel with the optical axis of the light from lamp optical system IL outgoing, X-axis and Y-axis be arranged to Z
It is mutually orthogonal in the vertical plane of axle.Lamp optical system IL includes light source and slit (the two is not shown).From being included in photograph
The slit that the light that light source in bright optical system IL is projected for example can be included by lamp optical system IL, on mask 55
The arc exposure area of the length formed on XY directions.Mask 55 and substrate 56 are kept by mask platform MS and Substrate table WS respectively, and
And it is disposed in position (the projection optical system PO object plane and picture of the substantially optical conjugate by projection optical system PO
The position in face) place.Projection optical system PO has predetermined projection multiplying power and projects to the pattern formed on mask 55
On substrate 56.Then, on the direction parallel with projection optical system PO object plane (such as XY directions) with projection optics
The system PO corresponding speed ratio of projection multiplying power, to scan mask platform MS and Substrate table WS.As a result, can be by the shape on mask 55
Into pattern be transferred on substrate 56.
Projection optical system PO is construed as including shaped mirror 52, concave mirror 53 and convex mirror 54.Shaped mirror
52 the first face 52a makes the light path bending for the exposure light for projecting and being transmitted by mask 55 from lamp optical system IL.Then,
Exposure light is incident on the first face 53a of concave mirror 53.By the exposure light of the reflecting surface 53a reflections of concave mirror 53 by convex surface
Mirror 54 reflects and is incident on the reflecting surface 53a of concave mirror 53.Made by the second face 52b of shaped mirror 52 by concave mirror 53
Reflecting surface 53a reflections exposure light light path bending, and exposure light is imaged on substrate.In structure by this way
In the projection optical system PO made, the surface of convex mirror 54 is set to pupil.
In the construction of above-mentioned exposure device 50, for example, it can be used in projection optical system in first embodiment extremely
The optical device described in one embodiment in fourth embodiment, is used as the equipment for the distorted reflector for making concave mirror 53.It is logical
The optical device used in exposure device 50 in any one embodiment of first embodiment into fourth embodiment is crossed, can be with
The reflecting surface 53a of concave mirror 53 is set to deform and can accurately correct the optical aberration in projection optical system PO.
The example for being applied to exposure device is described in the above-described embodiments, but according to any one above-mentioned embodiment
The applicable device of optical device includes, such as the lithographic equipment of resist latent image pattern is formed on substrate.Furthermore, it is possible to by light
Equipment application is learned to laser machining device, fundus photography device, telescope, projection optical system etc..
(embodiment of article manufacturing method)
Article manufacturing method is preferred for manufacturing following article according to an embodiment of the invention, and such as microdevice is (all
Such as semiconductor devices), element with microstructure etc. etc..Article manufacturing method can include：Use foregoing exposure device
The step of latent image pattern (such as exposure-processed) being formed on object；And to foring the thing of latent image pattern in preceding step
The step of body is developed.(oxidation, film forming, it is vapor-deposited, mixes in addition, article manufacturing method can includes other known steps
Miscellaneous, planarization, etching, resist stripping, cutting, bonding, encapsulation etc.).Compared with traditional device making method, the present embodiment
At least one aspect of the article manufacturing method in the performance of article, quality, productivity ratio and production cost there is advantage.
Although with reference to exemplary embodiment, invention has been described, it should be appreciated that, it is public the invention is not restricted to institute
The exemplary embodiment opened.Most wide explanation should be given to the scope of following claims, so that it covers all these changes
Type example and equivalent structure and function.
This application claims the Japanese patent application the 2016-013620th submitted on January 27th, 2016 and in November, 2016
The priority that the Japanese patent application submitted for 29th the 2016-231794th, entire contents are incorporated herein by reference.
Claims (19)
1. a kind of optical device, it is used for the distorted reflector for making optical element, and the optical device includes：
Actuator, it is with the magnet installed on the face relative with the reflecting surface and in the position in face of the magnet
Locate the coil of arrangement；
Bottom plate, it keeps the coil；
Heat-conducting unit, it is connected to the coil kept in the bottom plate；And
Cooling unit, it collects the heat from the heat-conducting unit,
Wherein, the heat-conducting unit has in the end of the heat-conducting unit relative with being connected to the overhang
Free end.
2. optical device according to claim 1, wherein, the heat-conducting unit is spaced from one another with the cooling unit
Ground is arranged.
3. optical device according to claim 1, wherein, the cooling unit is the stream for flowing cooling agent, described
Stream is included in plate, with the heat conduction at the position that the end of the heat-conducting unit with being connected to the coil is spaced apart
Unit interval, which is turned up the soil, arranges the plate.
4. optical device according to claim 1, wherein, the cooling unit is the stream for flowing cooling agent, described
Stream is included in the bottom plate.
5. optical device according to claim 1, the optical device is additionally included in the heat-conducting unit and the cooling
The elastomer with thermal conductivity between unit.
6. optical device according to claim 5, wherein, the Young's modulus of the elastomer is 10GPa or smaller.
7. optical device according to claim 5, wherein, the elastomer is resin.
8. optical device according to claim 5, wherein, the elastomer is rubber.
9. optical device according to claim 3, wherein, there are multiple streams, and institute is arranged with parallel construction
State stream.
10. optical device according to claim 4, wherein, there are multiple streams, and institute is arranged with parallel construction
State stream.
11. optical device according to claim 1, the optical device also includes measuring unit, the measuring unit quilt
It is arranged in the bottom plate, and obtains described by measuring the distance between bottom plate face relative with the reflecting surface
The shape information of optical element,
Wherein, the quantity of the measuring unit is less than the quantity of the actuator.
12. a kind of optical device, it is used for the distorted reflector for making optical element, and the optical device includes：
Actuator, it is with the magnet installed on the face relative with the reflecting surface and in the position in face of the magnet
Locate the coil of arrangement；
Bottom plate, it keeps the coil；And
Cooling unit, it is included in the bottom plate and collects the heat from the coil.
13. optical device according to claim 12, wherein, the cooling unit is the stream for flowing cooling agent, institute
Stream is stated to be included in the bottom plate.
14. optical device according to claim 12, the optical device is additionally included in the cooling unit and the line
Heat-conducting unit between circle,
Wherein, the heat transfer from the coil is given the cooling unit by the heat-conducting unit.
15. optical device according to claim 12, wherein, the cooling unit is arranged in the bottom plate
The coil.
16. optical device according to claim 12, the optical device also includes measuring unit, the measuring unit quilt
It is arranged in the bottom plate, and obtains described by measuring the distance between bottom plate face relative with the reflecting surface
The shape information of optical element,
Wherein, the quantity of the measuring unit is less than the quantity of the actuator.
17. a kind of projection optical system, it includes the optical device according to any one of claim 1 to 16.
18. a kind of exposure device, it is with the lamp optical system for being used to be illuminated mask and according to claim 17
Described projection optical system, the projection optical system projects to the pattern formed on the mask on substrate.
19. a kind of article manufacturing method, methods described includes：
Substrate is exposed using exposure device according to claim 18；And
The substrate of exposure is developed.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016-013620 | 2016-01-27 | ||
| JP2016013620 | 2016-01-27 | ||
| JP2016-231794 | 2016-11-29 | ||
| JP2016231794A JP6866131B2 (en) | 2016-01-27 | 2016-11-29 | Optical equipment, exposure equipment equipped with it, and manufacturing method of goods |
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| Publication Number | Publication Date |
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| CN107015341A true CN107015341A (en) | 2017-08-04 |
| CN107015341B CN107015341B (en) | 2020-08-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710059375.9A Active CN107015341B (en) | 2016-01-27 | 2017-01-24 | Optical device, projection optical system, exposure apparatus, and article manufacturing method |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070286035A1 (en) * | 2006-05-23 | 2007-12-13 | Canon Kabushiki Kaisha | Reflecting apparatus |
| CN102171615A (en) * | 2008-09-30 | 2011-08-31 | 卡尔蔡司Smt有限责任公司 | Microlithographic projection exposure apparatus |
| CN102257421A (en) * | 2008-10-20 | 2011-11-23 | 卡尔蔡司Smt有限责任公司 | Optical module for guiding a radiation beam |
| CN104781715A (en) * | 2012-11-29 | 2015-07-15 | 卡尔蔡司Smt有限责任公司 | Arrangement for actuating at least one optical element in an optical system |
-
2017
- 2017-01-24 CN CN201710059375.9A patent/CN107015341B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070286035A1 (en) * | 2006-05-23 | 2007-12-13 | Canon Kabushiki Kaisha | Reflecting apparatus |
| CN102171615A (en) * | 2008-09-30 | 2011-08-31 | 卡尔蔡司Smt有限责任公司 | Microlithographic projection exposure apparatus |
| CN102257421A (en) * | 2008-10-20 | 2011-11-23 | 卡尔蔡司Smt有限责任公司 | Optical module for guiding a radiation beam |
| CN104781715A (en) * | 2012-11-29 | 2015-07-15 | 卡尔蔡司Smt有限责任公司 | Arrangement for actuating at least one optical element in an optical system |
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| CN107015341B (en) | 2020-08-21 |
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