CN107014526A - A kind of Zinc oxide-base micro nanometer fiber array flexible pressure sensor and preparation method thereof - Google Patents
A kind of Zinc oxide-base micro nanometer fiber array flexible pressure sensor and preparation method thereof Download PDFInfo
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- CN107014526A CN107014526A CN201710290746.4A CN201710290746A CN107014526A CN 107014526 A CN107014526 A CN 107014526A CN 201710290746 A CN201710290746 A CN 201710290746A CN 107014526 A CN107014526 A CN 107014526A
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- fiber array
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- 239000000835 fiber Substances 0.000 title claims abstract description 53
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 title claims abstract description 21
- 239000011701 zinc Substances 0.000 title claims abstract description 21
- 229910052725 zinc Inorganic materials 0.000 title claims abstract description 21
- 238000002360 preparation method Methods 0.000 title claims abstract description 20
- 239000000463 material Substances 0.000 claims abstract description 66
- 239000002033 PVDF binder Substances 0.000 claims abstract description 46
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims abstract description 46
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 241000209094 Oryza Species 0.000 claims abstract description 17
- 235000007164 Oryza sativa Nutrition 0.000 claims abstract description 17
- 239000002131 composite material Substances 0.000 claims abstract description 17
- 235000009566 rice Nutrition 0.000 claims abstract description 17
- 238000001523 electrospinning Methods 0.000 claims abstract description 13
- 238000009987 spinning Methods 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 13
- 239000011241 protective layer Substances 0.000 claims description 10
- 239000012528 membrane Substances 0.000 claims description 9
- 239000002105 nanoparticle Substances 0.000 claims description 9
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 7
- 239000010949 copper Substances 0.000 claims description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 239000005030 aluminium foil Substances 0.000 claims description 6
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 5
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 claims description 5
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 5
- 239000002243 precursor Substances 0.000 claims description 5
- 229920002799 BoPET Polymers 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims description 4
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims description 4
- 238000003756 stirring Methods 0.000 claims description 3
- 238000003491 array Methods 0.000 claims description 2
- 238000007639 printing Methods 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims 1
- 238000000605 extraction Methods 0.000 claims 1
- 238000005265 energy consumption Methods 0.000 abstract description 7
- 230000035945 sensitivity Effects 0.000 abstract description 5
- 239000002086 nanomaterial Substances 0.000 abstract description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 56
- 239000011787 zinc oxide Substances 0.000 description 28
- 230000008859 change Effects 0.000 description 9
- 230000004044 response Effects 0.000 description 6
- 230000008569 process Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000006978 adaptation Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 206010001497 Agitation Diseases 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 235000008429 bread Nutrition 0.000 description 1
- 235000013339 cereals Nutrition 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 230000001617 migratory effect Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002362 mulch Substances 0.000 description 1
- 239000002121 nanofiber Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229920000767 polyaniline Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229920005573 silicon-containing polymer Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000005619 thermoelectricity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/08—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor
Abstract
The invention discloses a kind of Zinc oxide-base micro nanometer fiber array flexible pressure sensor and preparation method thereof, the PVDF/ZnO composite micro-nanos rice fiber array of ordered arrangement made from described pressure sensitive sensor using near field electrospinning is used as sensitive material, the sensitive material is arranged at flexible dielectric substrate surface, the two ends of sensitive material set electrode respectively, and described electrode is set perpendicular to PVDF/ZnO composite micro-nanos rice fiber axial direction.The pressure sensor is made by micro Nano material, can be made into the microsensor of small size, and sensitivity is high, mechanical property can arbitrarily be bent well, and energy consumption is low, preparation method is simple, and cost is low, there is preferable application prospect.
Description
Technical field
The invention belongs to flexible electronic device field, and in particular to a kind of Zinc oxide-base micro nanometer fiber array flexible pressure
Sensor and preparation method thereof.
Background technology
Pressure sensor be monitoring object be under pressure produce electric current (or voltage) a kind of sensor, be a kind of self power generation
Formula sensor.Piezoelectric sensor is force sensitive element, changes electric current (or voltage) by stress to realize to pressure
Detection.Pressure sensor is the on-the-spot test device directly contacted with measured medium, can be used for the public field such as market, hotel
Escalator and automatically-controlled door automatic sensing device, it can also be used to safe automobile air bag, anti-lock braking system, and be widely used in
The fields such as electric power, oil, chemical industry and medical science.
With the development of science and technology, the performance to pressure sensor proposes new challenge, in the urgent need to develop it is miniature,
Flexibility, high accuracy, the pressure sensor of low energy consumption.In order to improve pressure sensor, researchers are made that unremitting effort, in
State patent (patent No. ZL201210196840.0) discloses a kind of preparation method of flexible force sensitive sensor, fine in electrospinning PVDF
Dimension table bread wraps up in polyaniline and constitutes bending strain sensitive layer, but it stills need applied voltage, and energy consumption is larger.
The content of the invention
The technical problem to be solved in the present invention is：Overcoming prior art defect, there is provided a kind of Zinc oxide-base micro nanometer fiber
Array flexible pressure sensor and preparation method thereof.The pressure sensor is made by micro Nano material, can be made into the micro- of small size
Type sensor, and sensitivity is high, mechanical property can arbitrarily be bent well, energy consumption is low, preparation method is simple, and cost is low, has preferably
Application prospect.
In order to solve the above problems, the invention provides a kind of Zinc oxide-base micro nanometer fiber array flexible pressure sensing
Device, described pressure sensitive sensor is with the PVDF (Kynoar) of ordered arrangement made from the electrospinning of near field/ZnO composite micro-nanos rice
Fiber array is as sensitive material, and the sensitive material is arranged at flexible dielectric substrate surface, and the two ends of sensitive material are set respectively
Electrode, described electrode is set perpendicular to PVDF/ZnO composite micro-nanos rice fiber axial direction.
The force-sensing sensor uses PVDF (Kynoar)/ZnO composite micro-nanos of ordered arrangement made from the electrospinning of near field
Rice fiber array is as sensitive material, and the material is made by near field electrospinning method, compared to other sensitive material preparation sides
Method prepares simpler and cost is lower.Nano granular of zinc oxide is a kind of high-end high function fine inorganic product, with pressure
Electrically, non-migratory, absorption and scatters ultraviolet ability, can be used as piezoelectric, piezo-resistance etc..Kynoar (PVDF)
It is the wide variety of high polymer material of a class, it is different according to treatment conditions, a variety of different crystalline phases, wherein α phases can be obtained
With excellent mechanical property, β phases have stronger piezoelectricity, dielectric, thermoelectricity capability；In addition, PVDF also has, raw material is cheap, resistance toization
The advantages of learning corrosivity, oxidative resistance, wearability, good pliability, leads in petrochemical industry, electric, fluorocarbon coating etc.
Domain is widely used, and the combination of two kinds of materials make it that the performance of composite is more superior, PVDF/ZnO composite micro-nanos
Rice fiber is in the electro-spinning process of near field, and PVDF easily forms the β phases with piezoelectric property in the presence of electric field force, while ZnO receives
There is rice grain excellent piezoelectricity to be combined, and promote PVDF/ZnO micro nanometer fibers to have stronger pressure sensibility, in pressure
Power effect produces down the voltage changed with pressure size, therefore in the case of without applied voltage source, directly by the pressure sensing
Device connects ammeter, when sensitive material pressure changes, and ammeter shows that numerical value changes therewith, i.e., without additional power source
The test to sensitive material surface pressing situation of change is realized, the energy consumption compared to the existing pressure sensitive sensor device is lower.
Certainly, the sensor can also coordinate applied voltage source to use, equally can quick senses change in pressure.Existed near field spin processes
PVDF/ZnO composite micro-nanos rice fiber prepared by flexible dielectric substrate surface is as sensitive material, and its specific surface area is relative to tradition
Membrane material it is big, can more preferable senses change in pressure, reaction is more accurately sensitive.And PVDF/ZnO composite micro-nanos rice fiber knot
The characteristics of having closed two kinds of materials has preferable mechanical property, can be with flexible dielectric substrate deformation, and more flexible adaptation is different
Use environment.
It is preferred that, described flexible dielectric substrate is PET films.
It is preferred that, the mass ratio of PVDF and ZnO nano particle is 110 in described sensitive material:1.
It is preferred that, the surface of described sensitive material is also covered with protective layer.Protective layer can preferably protect sensitive material
The service life of material extension sensor, while can completely cut off external environment, prevents from producing interference to sensitive material, makes response signal
It is more accurate.
It is preferred that, described electrode includes the copper cash for being printed in the elargol at force-sensitive material two ends and being connected with elargol.
It is preferred that, described protective layer is PDMS (dimethyl silicone polymer) glued membrane for being coated on sensitive material surface.
The invention also discloses the preparation method of described Zinc oxide-base micro nanometer fiber array flexible pressure sensor, bag
Include following steps：
(1) base material is cut：Suitable material is chosen as flexible dielectric substrate by use demand, and by flexible insulation
Substrate is cut to suitable size；
(2) sensitive material is prepared：Made using low-voltage near field electrical spinning method on the flexible dielectric substrate obtained by step (1)
The PVDF/ZnO composite micro-nanos rice fiber array of standby ordered arrangement is used as sensitive material；
(3) device is assembled：Electrode, which is prepared, in the PVDF/ZnO micro nanometer fiber arrays two ends obtained by step (2) produces pressure
Dependent sensor.
It is preferred that, described step (2) prepares sensitive material：PVDF is dissolved in acetone and dimethylformamide and obtains PVDF
Solution, then mix ZnO nano particle into PVDF solution and stir to obtain spinning precursor solution；Control spinning voltage 2-5 thousand
Volt, spinning are apart from 5-12 millimeters, and flexible dielectric substrate is placed on aluminium foil as substrate is received, by near by aluminium foil as negative electrode
The micro nanometer fiber array for the parallel line shaped that field electrospinning forms ordered arrangement on flexible dielectric substrate produces sensitive material.
It is preferred that, in described step (2) in spinning precursor solution, PVDF mass percent is 21.96%, ZnO
The mass percent of nano particle is 0.20%.
It is preferred that, described step (3) device is assembled：In the PVDF/ZnO micro nanometer fibers array two obtained by step (2)
End prints elargol and draw copper cash along vertical fibers axial direction is used as device electrode.
It is preferred that, the preparation method of described Zinc oxide-base micro nanometer fiber array flexible pressure sensor also includes step
(4) overlay film is protected：Protective layer is used as in PVDF/ZnO micro nanometer fibers array surface coating glued membrane.
The beneficial effects of the invention are as follows：The invention provides a kind of Zinc oxide-base micro nanometer fiber array flexible pressure sensing
Device and preparation method thereof.The pressure sensor is made by micro Nano material, can be made into the microsensor of small size, and sensitivity
High, mechanical property can arbitrarily be bent well, and energy consumption is low, preparation method is simple, and cost is low, there is preferable application prospect.Specifically：
(1) force-sensing sensor is combined micro- using PVDF (Kynoar)/ZnO of ordered arrangement made from the electrospinning of near field
Nanofiber array is made as sensitive material, the material by near field electrospinning method, is prepared compared to other sensitive materials
Method prepares simpler and cost is lower.
(2) PVDF/ZnO composite micro-nanos rice fiber is in the electro-spinning process of near field, and PVDF is easily formed in the presence of electric field force
β phases with piezoelectric property, while there is ZnO nano particle excellent piezoelectricity to be combined, promote the micro-nano fibres of PVDF/ZnO
Dimension has stronger pressure sensibility, while the sensitive material can produce the voltage changed with pressure size under pressure,
Therefore in the case of without applied voltage source, the pressure sensor is directly connected into ammeter, the change of sensitive material pressure
When, ammeter shows that numerical value changes therewith, i.e., be that can be achieved to sensitive material surface pressing situation of change without additional power source
Test, the energy consumption compared to the existing pressure sensitive sensor device is lower.Certainly, the sensor can also coordinate applied voltage source
Use, equally can quick senses change in pressure.
(3) the PVDF/ZnO composite micro-nanos rice fiber prepared near field spin processes on flexible dielectric substrate surface is used as sensitivity
Material, its specific surface area is big relative to traditional membrane material, can more preferable senses change in pressure, reaction is more accurately sensitive.
(4) the characteristics of PVDF/ZnO composite micro-nanos rice fiber combines two kinds of materials has preferable mechanical property as quick
Feel material with flexible dielectric substrate to coordinate, can be with flexible dielectric substrate deformation, the different use environment of more flexible adaptation.
(5) use of sensitive material extension sensor can preferably be protected in the surface of sensitive material also protective mulch
In the life-span, while external environment can be completely cut off, prevent from producing interference to sensitive material, make response signal more accurate.
Brief description of the drawings
Fig. 1：The structural representation of the pliable pressure sensor of embodiment；
Fig. 2：The optical microscope photograph of the PVDF/ZnO composite micro-nanos rice fiber array of embodiment；
Fig. 3：The pressure response curve of the pliable pressure sensor of embodiment during without additional power source；
Fig. 4：The pressure response curve of the pliable pressure sensor of embodiment during additional 5 volts of constant voltage sources；
In figure, 1- flexible dielectric substrates, 2- copper cash, 3-PDMS glued membranes, 4- elargol, 5- sensitive materials.
Embodiment
For the technical characterstic for illustrating this programme can be understood, this programme is illustrated below by embodiment.
A kind of preparation method of Zinc oxide-base micro nanometer fiber array flexible pressure sensor (structure is as shown in Figure 1), its
It is characterised by, comprises the following steps：
(1) base material is cut：The square piece that PET films are cut to 3cm*3cm is used as flexible dielectric substrate 1；
(2) sensitive material is prepared：PVDF powder 2.2g are weighed, are put into flask, 3.9g dimethylformamides are added
(DMF) and 3.9g acetone, 4 hours of 40 DEG C of water-bath magnetic agitations obtain PVDF solution, then add 0.02g's into PVDF solution
ZnO nano particle, continues to stir to ZnO nano particle and is uniformly dispersed to obtain spinning precursor solution；Control spinning voltage 3.5 thousand
Volt, spinning are apart from 7mm, and flexible dielectric substrate 1 is placed on aluminium foil as substrate is received as negative electrode, passes through near field electricity by aluminium foil
The micro nanometer fiber array (as shown in Figure 2) for spinning the parallel line shaped that ordered arrangement is formed on flexible dielectric substrate 1 produces sensitivity
Material 5；
(3) device is assembled：In the PVDF/ZnO micro nanometer fiber array two ends obtained by step (2) along vertical fibers axial direction side
Device electrode is used as to printing elargol 4 and drawing copper cash 2；
(4) overlay film is protected：Protective layer is used as in PVDF/ZnO micro nanometer fibers array surface coating PDMS glued membranes 3.
The structure of the pliable pressure sensor as made from the above method is as shown in figure 1, described pressure sensitive sensor is near
The PVDF/ZnO composite micro-nanos rice fiber array of ordered arrangement made from the electrospinning of field is as sensitive material 5, and the sensitive material 5 is set
In the surface of flexible dielectric substrate 1, described flexible insulation base, 1 is PET films, and the two ends of sensitive material 5 set electrode respectively,
Described electrode includes the copper cash 2 for being printed in the elargol 4 at the two ends of force-sensitive material 5 and being connected with elargol 4, described sensitive material 5
Surface be also covered with protective layer, described protective layer is the PDMS glued membranes 3 for being coated on the surface of sensitive material 5.
Pressure-sensitivity characteristic is tested：The pressure sensor of the present embodiment remains to test pressure in the case of without additional power source
Change, ammeter is connected in the case of without external power supply by the pressure sensor, and pressure is applied to sensitive material, is kept for 10 seconds
Clock, then removes pressure 10 seconds, so with 20 seconds for a cycle, five cycles of iterative cycles, while recording ammeter is shown
Current values, draw current versus time curve, and maximum current is 1.8 × 10-10A, the pliable pressure is passed when producing no additional power source
The pressure response curve (as shown in Figure 3) of sensor.Meanwhile, when accessing external power supply, the pliable pressure sensor can also realize pressure
Power test function, 5 volts of constant voltage sources and ammeter are connected by the pliable pressure sensor, and pressure is applied to sensitive material, are kept
50 seconds, then remove pressure 50 seconds, so with 100 seconds for a cycle, five cycles of iterative cycles, while recording ammeter
Current values are shown, current versus time curve is drawn, current maxima is 2.25 × 10-9Current ratio is under A, with no pressure
Imax/I0=50, the pressure response curve (as shown in Figure 4) of pliable pressure sensor when producing 5 volts of additional power sources.By Fig. 3 and
No matter Fig. 4 can be seen that whether the flexible force sensitive sensor can quickly, sensitively measure reaction in the case of external power supply
Pressure changing.
Illustrative embodiments listed above are only not to technical scheme described in the invention for understanding that the present invention is used
Restriction, about the those of ordinary skill in field, on the basis of technical scheme described in claim, a variety of changes can also be made
Change or deform, all equivalent changes or deformation should all be covered within the claims of the present invention.The present invention is not
Part is described in detail, is the known technology of those skilled in the art of the present technique.
Claims (10)
1. a kind of Zinc oxide-base micro nanometer fiber array flexible pressure sensor, it is characterised in that described pressure sensitive sensor
PVDF/ZnO composite micro-nanos rice fiber array using ordered arrangement made from the electrospinning of near field is as sensitive material, and the sensitive material is set
Flexible dielectric substrate surface is placed in, the two ends of sensitive material set electrode respectively, and described electrode is compound perpendicular to PVDF/ZnO
Micro nanometer fiber axial direction is set.
2. a kind of Zinc oxide-base micro nanometer fiber array flexible pressure sensor as claimed in claim 1, it is characterised in that institute
The flexible dielectric substrate stated is PET films.
3. a kind of Zinc oxide-base micro nanometer fiber array flexible pressure sensor as claimed in claim 1, it is characterised in that institute
The mass ratio of PVDF and ZnO nano particle is 110 in the sensitive material stated:1.
4. a kind of Zinc oxide-base micro nanometer fiber array flexible pressure sensor as claimed in claim 1, it is characterised in that institute
The surface for the sensitive material stated is also covered with protective layer.
5. a kind of Zinc oxide-base micro nanometer fiber array flexible pressure sensor as claimed in claim 1, it is characterised in that institute
The electrode stated includes the copper cash for being printed in the elargol at force-sensitive material two ends and being connected with elargol, and described protective layer is quick to be coated on
Feel the PDMS glued membranes of material surface.
6. the preparation of the Zinc oxide-base micro nanometer fiber array flexible pressure sensor as any one of claim 1 to 5
Method, it is characterised in that comprise the following steps：
(1) base material is cut：Suitable material is chosen as flexible dielectric substrate by use demand, and by flexible dielectric substrate
It is cut to suitable size；
(2) sensitive material is prepared：Being prepared using low-voltage near field electrical spinning method on the flexible dielectric substrate obtained by step (1) is had
The PVDF/ZnO composite micro-nanos rice fiber array of sequence arrangement is used as sensitive material；
(3) device is assembled：Electrode is prepared in the PVDF/ZnO micro nanometer fiber arrays two ends obtained by step (2) and produces the quick biography of pressure
Sensor.
7. the preparation method of Zinc oxide-base micro nanometer fiber array flexible pressure sensor as claimed in claim 6, its feature
It is, described step (2) prepares sensitive material：PVDF is dissolved in acetone and dimethylformamide and obtains PVDF solution, then to
ZnO nano particle is mixed in PVDF solution to stir to obtain spinning precursor solution；Control 2-5 kilovolts of spinning voltage, spinning away from
From 5-12 millimeters, flexible dielectric substrate is placed on aluminium foil as substrate is received, by near field electrospinning soft by aluminium foil as negative electrode
Property dielectric base on form the micro nanometer fiber array of parallel line shaped of ordered arrangement and produce sensitive material.
8. the preparation method of Zinc oxide-base micro nanometer fiber array flexible pressure sensor as claimed in claim 7, its feature
It is, in described step (2) in spinning precursor solution, PVDF mass percent is 21.96%, ZnO nano particle
Mass percent is 0.20%.
9. the preparation method of Zinc oxide-base micro nanometer fiber array flexible pressure sensor as claimed in claim 6, its feature
It is, described step (3) device assembling：In the PVDF/ZnO micro nanometer fiber array two ends obtained by step (2) along vertical fibre
Dimension axial direction printing elargol simultaneously regard copper cash extraction as device electrode.
10. the preparation method of Zinc oxide-base micro nanometer fiber array flexible pressure sensor as claimed in claim 6, its feature
It is, the preparation method of described Zinc oxide-base micro nanometer fiber array flexible pressure sensor also includes step (4) overlay film and protected
Shield：Protective layer is used as in PVDF/ZnO micro nanometer fibers array surface coating glued membrane.
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| CN108251971A (en) * | 2018-01-31 | 2018-07-06 | 西南交通大学 | A kind of flexible piezoelectric nano fibrous membrane and its preparation method and application |
| CN108981981A (en) * | 2018-05-29 | 2018-12-11 | 五邑大学 | One kind is based on doping SnO2The transparent flexible pressure sensor of conductive nano network, and preparation method thereof |
| CN109060199A (en) * | 2018-06-25 | 2018-12-21 | 青岛大学 | A kind of preparation method of piezoelectric transducer and the application of piezoelectric transducer |
| CN109143322A (en) * | 2018-08-22 | 2019-01-04 | 吉林大学 | A kind of geophone based on PVDF piezoelectric nano fiber |
| CN110081808A (en) * | 2018-01-26 | 2019-08-02 | 北京纳米能源与系统研究所 | Difunctional flexible sensor and preparation method thereof, wearable device |
| CN112022173A (en) * | 2020-08-07 | 2020-12-04 | 东南大学 | Flexible piezoelectric sensor applicable to ureteral peristalsis monitoring and manufacturing method thereof |
| CN114383761A (en) * | 2021-11-26 | 2022-04-22 | 北京纳米能源与系统研究所 | Pressure sensor with single-direction conduction function and preparation method and application thereof |
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