CN107004622A - A kind of defective products marker recognition device for matrix arrangement chip - Google Patents

A kind of defective products marker recognition device for matrix arrangement chip Download PDF

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Publication number
CN107004622A
CN107004622A CN201780000010.7A CN201780000010A CN107004622A CN 107004622 A CN107004622 A CN 107004622A CN 201780000010 A CN201780000010 A CN 201780000010A CN 107004622 A CN107004622 A CN 107004622A
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CN
China
Prior art keywords
chip
matrix arrangement
image
substrate
defective products
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Granted
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CN201780000010.7A
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Chinese (zh)
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CN107004622B (en
Inventor
赵余成
张伟宏
谭巧灵
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Shenzhen Goodix Technology Co Ltd
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Shenzhen Huiding Technology Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67271Sorting devices

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

The embodiment of the present application provides a kind of defective products marker recognition device for matrix arrangement chip, and described device includes:The mobile device for driving the substrate of the matrix arrangement chip to move, and the camera of IMAQ is carried out to each chip on the substrate, the mobile device makes each chip on the substrate be moved to illumination condition ideal zone, the camera gathers each chip image of the illumination condition ideal zone, and each chip image of collection is spliced into the complete image of the substrate, identify the matrix arrangement chip marked with defective products for the complete image.The embodiment of the present application is used to the defective products marker recognition for efficiently realizing matrix arrangement chip, reduces testing cost, and operating process is simple.

Description

A kind of defective products marker recognition device for matrix arrangement chip
Technical field
The application is related to chip testing technology field, more particularly to a kind of defective products for matrix arrangement chip is marked and known Other device.
Background technology
With the arrival of fingerprint recognition and mobile payment tide, fingerprint chip has welcome explosive growth, and is to meet different Mobile phone business men arises at the historic moment to fingerprint chip different shape and various sizes of requirement, matrix arrangement chip (Strip chips).Square Battle array arrangement chip (Strip chips) is that have many chips into matrix arrangement on a strip substrate, is had between chip and chip Certain space length, so facilitates client to cut into the shape and size of oneself needs.
Often there is the defective products chips such as outward appearance, electric property failure on strip substrate, enter to the defective products chip During row detection, generally by recognizing that defective products mark differentiates whether chip is defective products chip.Recognized not in traditional die test Non-defective unit chip carries out IMAQ and identification only for single chip, by the one-to-many core into matrix arrangement on strip substrate Piece carries out IMAQ and identification causes recognition efficiency low.Also, by one-to-many into matrix arrangement on strip substrate Chip carries out IMAQ, it is necessary to mobile device moves the substrate so that camera is directed at the chip that need to be recognized one by one, causes Testing cost is high, and flow is complicated.
Therefore, the defective products marker recognition of matrix arrangement chip how is efficiently realized, as needing solution badly in the prior art Technical problem certainly.
The content of the invention
In view of this, one of technical problem that the embodiment of the present application is solved is to provide a kind of for matrix arrangement chip Defective products marker recognition device, the defective products marker recognition efficiently to realize matrix arrangement chip, reduce testing cost, and Operating process is simple.
The embodiment of the present application provides a kind of defective products marker recognition device for matrix arrangement chip, including:Drive institute The mobile device that the substrate of matrix arrangement chip is moved is stated, and IMAQ is carried out to each chip on the substrate Camera, the mobile device makes each chip on the substrate be moved to illumination condition ideal zone, the camera collection Each chip image of the illumination condition ideal zone, and each chip image of collection is spliced into the complete graph of the substrate Picture, the matrix arrangement chip marked with defective products is identified for the complete image.
Correspondence said apparatus, the application also provides a kind of defective products mark recognition method for matrix arrangement chip, wraps Include:
Make mobile device that each chip on substrate is moved into illumination condition ideal zone;
Each chip image of the illumination condition ideal zone is gathered by the camera;
Each chip image of collection is spliced into the complete image of the substrate;
The matrix arrangement chip marked with defective products is identified for the complete image.
From above technical scheme, herein described mobile device makes each chip on the substrate be moved to illumination bar Part ideal zone is so that the camera gathers each chip image, and each chip image of collection is spliced into the complete of the substrate Whole image, the matrix arrangement chip marked with defective products is identified for the complete image.Therefore, the mobile device is only Need to drive the substrate to illumination condition ideal zone so that the camera gathers each chip image, without the mobile base Plate is so that camera is directed at the chip that need to be recognized one by one.The application can efficiently realize the defective products mark of matrix arrangement chip Identification, and testing cost is reduced, operating process is simple.
Brief description of the drawings
, below will be to embodiment or existing in order to illustrate more clearly of the embodiment of the present application or technical scheme of the prior art There is the accompanying drawing used required in technology description to be briefly described, it should be apparent that, drawings in the following description are only this Some embodiments described in application, for those of ordinary skill in the art, can also obtain other according to these accompanying drawings Accompanying drawing.
Fig. 1 is the structural representation for the defective products marker recognition device that the application is used for matrix arrangement chip;
Fig. 2 is that the application is used for the reflection signal of substrate surface in the defective products marker recognition device of matrix arrangement chip Figure;
Fig. 3 is that the application is used for illumination condition ideal zone signal in the defective products marker recognition device of matrix arrangement chip Figure;
Fig. 4 is the flow chart for the defective products mark recognition method that the application is used for matrix arrangement chip;
Fig. 5 is that the application is used for the flow chart of step S4 in the defective products mark recognition method of matrix arrangement chip;
Fig. 6 is the schematic diagram that the application is used for that template to be chosen in the defective products mark recognition method of matrix arrangement chip;
Fig. 7 is that the application is used for the flow chart of step S42 in the defective products mark recognition method of matrix arrangement chip;
Fig. 8 is that the application is used for the defective products mark recognition method chips outline drawing of matrix arrangement chip.
Embodiment
Herein described mobile device makes each chip on the substrate be moved to illumination condition ideal zone so that described Camera gathers each chip image, and each chip image of collection is spliced into the complete image of the substrate, for described complete Whole image recognition goes out the matrix arrangement chip marked with defective products.Therefore, the mobile device only needs to drive the substrate To illumination condition ideal zone so that the camera gathers each chip image, without the mobile substrate so that camera one by one It is directed at the chip that need to be recognized.The application can efficiently realize the defective products marker recognition of matrix arrangement chip, and reduce inspection Cost is surveyed, operating process is simple.
Certainly, implementing any technical scheme of the embodiment of the present application must be not necessarily required to while reaching all excellent of the above Point.
In order that those skilled in the art more fully understand the technical scheme in the embodiment of the present application, below in conjunction with the application Accompanying drawing in embodiment, the technical scheme in the embodiment of the present application is clearly and completely described, it is clear that described reality It is only a part of embodiment of the embodiment of the present application to apply example, rather than whole embodiments.Based on the implementation in the embodiment of the present application Example, all other embodiment that those of ordinary skill in the art are obtained should all belong to the scope of the embodiment of the present application protection.
Further illustrate that the embodiment of the present application is implemented with reference to the embodiment of the present application accompanying drawing.
In the following description of exemplary embodiment, with reference to as the accompanying drawing appended by it, wherein passing through the spy shown in graphic mode Determine embodiment to be put into practice.It is understood that other embodiments can use the change with structure can be various by not departing from The scope of embodiment.
Referring to Fig. 1, the application provides a kind of defective products marker recognition device for matrix arrangement chip, including:Drive The mobile device 11 that the substrate of the matrix arrangement chip is moved, and each chip progress image on the substrate is adopted The camera 12 of collection.
The mobile device 11 makes each chip on the substrate 2 be moved to illumination condition ideal zone, the camera Each chip image of the 12 collection illumination condition ideal zones, and each chip image of collection is spliced into the complete of the substrate Whole image, the matrix arrangement chip marked with defective products is identified for the complete image.
Therefore, the mobile device 11 only needs to drive the substrate 2 to illumination condition ideal zone so that the shooting Each chip image of first 12 collection, without the mobile substrate 2 so that camera 12 is directed at the chip that need to be recognized one by one.The application can Efficiently to realize the defective products marker recognition of matrix arrangement chip, and testing cost is reduced, operating process is simple.
In the application one in the specific implementation, because the stock size of strip substrate is the core on 7.6*24cm, strip substrate Piece area is only the 1/100 or smaller of substrate area, therefore in order to which each chip in the complete image of the substrate can be clear It can be seen that, the camera 12 uses the video camera of 5,000,000 pixel resolutions.
Specifically, to reduce the barrel distortion that the camera 12 gathers image, the camera 12 is demarcated, institute The distance of camera lens for stating substrate and the camera is 20cm~25cm, and the camera lens of the camera is using 6mm~12mm focal lengths Wide-angle lens.
It is another in the specific implementation, referring to Fig. 2, because the substrate surface is smooth, being also easy to produce mirror-reflection in the application.For Camera 12 described in specular reflections effect is avoided to carry out IMAQ, the embodiment of the present application arranges light source in substrate both sides, it is ensured that Left and right brightness uniformity.Light source arrangement is arranged using oblique sidelight mode described in the embodiment of the present application.So as to only be produced in substrate surface Diffusing reflection light, diffusing reflection light is weaker, and the influence for carrying out IMAQ to the camera 12 is smaller.
Specifically, because the embodiment of the present application substrate length of side is longer, the light source uses 250*20mm strip source.
Another in the specific implementation, the strip zig is generally 24cm in the application, substrate two ends light is weaker, is Ensure that, referring to Fig. 3, the illumination condition ideal zone is per chips uniform illumination:The gray scale of the matrix arrangement chip is put down The maximum of average and the difference of minimum value are not more than 20 region.
Specifically, the illumination condition ideal zone is:Apart from the interval region of the light source 60mm~200mm.
Correspondence said apparatus, the application also provides a kind of defective products mark recognition method for matrix arrangement chip, joins See Fig. 4, methods described includes:
S1, make mobile device that each chip on substrate is moved into illumination condition ideal zone.
The strip zig is generally 24cm, and substrate two ends light is weaker, to ensure per chips uniform illumination, ginseng See Fig. 3, the illumination condition ideal zone is:The maximum and the difference of minimum value of the average gray of the matrix arrangement chip No more than 20 region.
Specifically, the illumination condition ideal zone is:Apart from the interval region of the light source 60mm~200mm.
S2, each chip image by the camera collection illumination condition ideal zone.
In the application one in the specific implementation, because the stock size of strip substrate is the core on 7.6*24cm, strip substrate Piece area is only the 1/100 or smaller of substrate area, therefore in order to which each chip in the complete image of the substrate can be clear It can be seen that, the camera 12 uses the video camera of 5,000,000 pixel resolutions.
Specifically, to reduce the barrel distortion that the camera 12 gathers image, the camera 12 is demarcated, institute The distance of camera lens for stating substrate and the camera is 20cm~25cm, and the camera lens of the camera is using 6mm~12mm focal lengths Wide-angle lens.
It is another in the specific implementation, referring to Fig. 2, because the substrate surface is smooth, being also easy to produce mirror-reflection in the application.For Camera 12 described in specular reflections effect is avoided to carry out IMAQ, the embodiment of the present application arranges light source in substrate both sides, it is ensured that Left and right brightness uniformity.Light source arrangement is arranged using oblique sidelight mode described in the embodiment of the present application.So as to only be produced in substrate surface Diffusing reflection light, diffusing reflection light is weaker, and the influence for carrying out IMAQ to the camera 12 is smaller.
Specifically, because the embodiment of the present application substrate length of side is longer, the light source uses 250*20mm strip source.
S3, the complete image that each chip image of collection is spliced into the substrate.
In order to more accurately splice the complete image of the substrate, the embodiment of the present application can make the camera multiple The step S2 is performed, i.e., each chip image of illumination condition ideal zone described in multi collect, by the figure of multi collect Complete image as synthesizing the substrate.
Specifically, it is described the step S2 is performed a plurality of times to be generally twice.
S4, for the complete image identify with defective products mark matrix arrangement chip.
In the application one in the specific implementation, referring to Fig. 5, the step S4 includes:
S41, the image for extracting in the complete image each matrix arrangement chip.
The step S41 is specially:Using the chip periphery image and periphery mark as template, pass through template matches Algorithm identifies the position of each chip on the substrate to extract the image of each matrix arrangement chip.
Specifically, referring to Fig. 6, the chip center is avoided as template with lower section 62 using chip top 61 Defective products mark 63.The embodiment of the present application locks the position of each chip on the substrate, so as to carry by template matches Take the image of each matrix arrangement chip.
S42, the image by each matrix arrangement chip, identify the matrix arrangement chip marked with defective products.
Referring to Fig. 7, the step S42 includes:
S421, the profile for extracting each matrix arrangement chip, and calculate the area that the profile is included.
After the image for extracting each matrix arrangement chip, the profile of each matrix arrangement chip is extracted, then calculates in image and takes turns The area that exterior feature is included.Referring to Fig. 8, the profile of the matrix arrangement chip 81 of no defective products mark includes chip pin, there is bad The profile that the profile of the matrix arrangement chip 82 of product mark is marked comprising chip pin and defective products.Therefore, there is defective products mark The area that includes of profile of matrix arrangement chip 82 be more than what the profile of the matrix arrangement chip 81 marked without defective products was included Area.
If S422, the area are more than predetermined threshold value, for the matrix arrangement chip marked with defective products.
Because area of each pin on the image of matrix arrangement chip of matrix arrangement chip is 15mm*10mm= 150mm2, 22 pins are generally comprised per chips, the pin gross area is 3300mm2, the embodiment of the present application set threshold value be 3500mm2, the matrix arrangement chip marked with defective products can be gone out with Effective selection.
Therefore, the mobile device only needs to drive the substrate to illumination condition ideal zone so that the camera is adopted Collect each chip image, without the mobile substrate so that camera is directed at the chip that need to be recognized one by one.The application can be efficient The defective products marker recognition of matrix arrangement chip is realized, and reduces testing cost, operating process is simple.
It will be understood by those skilled in the art that the embodiment of the embodiment of the present application can be provided as method, device (equipment) or Computer program product.Therefore, the embodiment of the present application can be soft using complete hardware embodiment, complete software embodiment or combination The form of the embodiment of part and hardware aspect.Moreover, the embodiment of the present application can be used wherein includes calculating one or more The computer-usable storage medium of machine usable program code (includes but is not limited to magnetic disk storage, CD-ROM, optical memory Deng) on the form of computer program product implemented.
The embodiment of the present application is with reference to according to the method for the embodiment of the present application, device (equipment) and computer program product Flow chart and/or block diagram are described.It should be understood that can be by every in computer program instructions implementation process figure and/or block diagram One flow and/or the flow in square frame and flow chart and/or block diagram and/or the combination of square frame.These computers can be provided Processor of the programmed instruction to all-purpose computer, special-purpose computer, Embedded Processor or other programmable data processing devices To produce a machine so that produce use by the instruction of computer or the computing device of other programmable data processing devices In the dress for realizing the function of being specified in one flow of flow chart or multiple flows and/or one square frame of block diagram or multiple square frames Put.
These computer program instructions, which may be alternatively stored in, can guide computer or other programmable data processing devices with spy Determine in the computer-readable memory that mode works so that the instruction being stored in the computer-readable memory, which is produced, to be included referring to Make the manufacture of device, the command device realize in one flow of flow chart or multiple flows and/or one square frame of block diagram or The function of being specified in multiple square frames.
These computer program instructions can be also loaded into computer or other programmable data processing devices so that in meter Series of operation steps is performed on calculation machine or other programmable devices to produce computer implemented processing, thus in computer or The instruction performed on other programmable devices is provided for realizing in one flow of flow chart or multiple flows and/or block diagram one The step of function of being specified in individual square frame or multiple square frames.
Although having been described for the preferred embodiment of the embodiment of the present application, those skilled in the art once know base This creative concept, then can make other change and modification to these embodiments.So, appended claims are intended to be construed to Including preferred embodiment and fall into having altered and changing for the embodiment of the present application scope.Obviously, those skilled in the art The spirit and scope of various changes and modification without departing from the embodiment of the present application can be carried out to the embodiment of the present application.So, if If these modifications and variations of the embodiment of the present application belong within the scope of the embodiment of the present application claim and its equivalent technologies, Then the embodiment of the present application is also intended to comprising including these changes and modification.

Claims (14)

1. a kind of defective products marker recognition device for matrix arrangement chip, including:Drive the base of the matrix arrangement chip The mobile device that plate is moved, and the camera of IMAQ is carried out to each chip on the substrate, it is characterised in that The mobile device makes each chip on the substrate be moved to illumination condition ideal zone, and the camera gathers the illumination Each chip image of condition ideal zone, and each chip image of collection is spliced into the complete image of the substrate, for institute State complete image and identify the matrix arrangement chip marked with defective products.
2. identifying device according to claim 1, it is characterised in that the camera is using 5,000,000 pixel resolutions Video camera.
3. identifying device according to claim 2, it is characterised in that the distance of camera lens of the substrate and the camera is 20cm~25cm.
4. identifying device according to claim 3, it is characterised in that the camera lens of the camera is burnt using 6mm~12mm Away from wide-angle lens.
5. identifying device according to claim 1, it is characterised in that light source is arranged in the both sides of the substrate.
6. identifying device according to claim 5, it is characterised in that the light source arrangement is arranged using oblique sidelight mode.
7. identifying device according to claim 6, it is characterised in that the light source uses 250mm*20mm strip light Source.
8. identifying device according to claim 1, it is characterised in that the illumination condition ideal zone is:The matrix The maximum of average gray and the difference of minimum value for arranging chip are not more than 20 region.
9. identifying device according to claim 8, it is characterised in that the illumination condition ideal zone is:Distance is described Light source 60mm~200mm interval region.
10. a kind of defective products mark recognition method for matrix arrangement chip, it is characterised in that including:
Make mobile device that each chip on substrate is moved into illumination condition ideal zone;
Each chip image of the illumination condition ideal zone is gathered by the camera;
Each chip image of collection is spliced into the complete image of the substrate;
The matrix arrangement chip marked with defective products is identified for the complete image.
11. recognition methods according to claim 10, it is characterised in that described to identify have for the complete image The matrix arrangement chip of defective products mark includes:
The image of each matrix arrangement chip is extracted in the complete image;
By the image of each matrix arrangement chip, the matrix arrangement chip marked with defective products is identified.
12. recognition methods according to claim 11, it is characterised in that described that each matrix is extracted in the complete image Arrangement chip image be specially:Using the chip periphery image and periphery mark as template, pass through template matching algorithm The position of each chip on the substrate is identified to extract the image of each matrix arrangement chip.
13. recognition methods according to claim 12, it is characterised in that the figure by each matrix arrangement chip Picture, identifies that the matrix arrangement chip marked with defective products includes:
The profile of each matrix arrangement chip is extracted, and calculates the area that the profile is included;
If the area is more than predetermined threshold value, for the matrix arrangement chip marked with defective products.
14. recognition methods according to claim 13, it is characterised in that the predetermined threshold value is 3500mm2
CN201780000010.7A 2017-01-18 2017-01-18 Defective product mark recognition device for matrix arrangement chip Active CN107004622B (en)

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WO2018132981A1 (en) 2018-07-26

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