CN106990099A - One kind detection SF6The device and method of mixed gas composition - Google Patents

Abstract

The present invention provides a kind of detection SF₆The device and method of mixed gas composition, is related to mixed gas composition detection technique field.Detection means includes high-voltage DC power supply, gasmetry tank to be detected and spectral detection system, and mixed gas to be measured is filled with measurement tank, and by high voltage direct current gas breakdown, SF is measured using spectral detection system₆Mixed gas discharge plasma light spectral property, to detect SF6 gas componants.The detection SF that the present invention is provided₆The device and method of mixed gas composition, in detection, required under test gas sample size is small, and device is easy to operate, to shorter the time required to the processing procedure of later data, normal work to equipment has little to no effect, can be to the SF in the high-voltage product of longtime running₆The change of mixed gas dielectric composition is detected.

Description

One kind detection SF6The device and method of mixed gas composition

Technical field

The present invention relates to mixed gas composition detection technique field, more particularly to a kind of detection SF₆Mixed gas composition Device and method.

Background technology

SF6 mixed gas can effectively reduce the greenhouse effects effect of SF6 gases in electric switch equipment relative to pure SF6, And can preferably overcome the too low defect for causing pure SF6 gas liquefactions of ambient temperature, gas can be substituted effectively as pure SF6 Use in electric switch.But mixed gas operating air pressure is 0.6MPa~0.7MPa, during equipment long-play There can be the defects such as reveal and composition changes, extreme influence be caused to insulation of electrical installation intensity, due to gas ingredients Change causes each mixed gas filling proportion to be difficult to determine, the composition of mixed gas need to be identified.

The method to SF6 mixed gas purity detectings mainly has Micro Thermal Conductivity Detector and infrared absorption at present.Conductance cell The Cleaning Principle of detector is based on having different thermal conductivity coefficients between different component and carrier gas, during conductance cell detection work, connect Logical carrier gas simultaneously keeps pond body constant temperature, and the carrier gas composition and flow now flowed through is all stable.Flowing through temperature-sensitive element electric current is also Stable, the electric bridge being made up of temperature-sensitive element is in poised state.When the component after chromatogram post separation by carrier gas brings thermal conductivity into Because component is different with the pyroconductivity of carrier gas in pond, thus temperature-sensitive element temperature is changed, and cause resistance to become Change, so as to cause electric bridge uneven, output voltage signal, the size of this signal and the concentration of tested component have functional relation, then Carry out conversion to obtain the component of gas by recorder or chromatographic data processor.Micro Thermal Conductivity Detector has higher measurement essence Degree, but is easily influenceed by environment temperature, even if adding temperature-compensating, using also occurring that null offset is existing after a period of time As.Infrared absorption principle is according to the characteristic that different component gas has selective absorbing to the infrared ray of different wave length The analysis meter of work.The species of gas can be determined by measuring this absorption spectrum, and measurement absorption intensity can determine that tested gas Concentration.Supercritical ultrasonics technology has preferable stability, but measurement accuracy is low.

The content of the invention

For the defect of prior art, the present invention provides a kind of detection SF₆The device and method of mixed gas composition, will be treated Survey mixed gas to be filled with measurement tank, by high voltage direct current gas breakdown, SF is measured using spectral detection system₆Mixed gas Discharge plasma spectral characteristic, to detect SF₆Gas componant.Required under test gas sample size is small during detection, and device Easy to operate, the processing procedure required time to later data is shorter, and the normal work to equipment has little to no effect, can be to length SF in the high-voltage product of phase operation₆The change of mixed gas dielectric composition is detected.

On the one hand, the present invention provides a kind of detection SF₆The device of mixed gas composition, including it is high-voltage DC power supply, to be checked Survey gasmetry tank and spectral detection system；

The high-voltage DC power supply include power frequency pressure regulator, power frequency testing transformer, two current-limiting resistances, high voltage silicon rectifier stack and High-voltage capacitor；The power frequency pressure regulator be connected with power frequency testing transformer after with the first current-limiting resistance, high voltage silicon rectifier stack, high-tension electricity Container is connected, and rectified circuit design is the adjustable high voltage D. C that voltage is 0~100kV, under test gas measurement tank and the The two ends of high-voltage capacitor, composition gas breakdown loop are connected in parallel on after the series connection of two current-limiting resistances again；

The gasmetry tank to be detected connects and composes gas breakdown loop as sampling container with high-voltage DC power supply, Including HIGH-PURITY SILICON glass tank skin, two relative aluminium plate electrodes and upper-lower seal lid；Described two relative aluminium plate electrodes The HIGH-PURITY SILICON glass jar pars intramuralis is sealed in, and upper-lower seal lid is fixed on by the metal screw provided with roll adjustment knob respectively On, metal screw as gasmetry tank to be detected and high-voltage DC power supply connection end；It is provided between two aluminium plate electrodes Certain interval, the metal screw provided with roll adjustment knob is used to adjust the gap length between two aluminium plate electrodes；In lower sealing cover Blow vent provided with connection tracheae, blow vent is used as vacuumizing connector, and under test gas is used as after vacuumize process Air inlet；The tracheae is provided with air gauge and valve, for the air pressure adjustment of gasmetry in-tank mixing gas to be detected, carries Vacuumize process need to be carried out during under test gas to gas passage by taking；

The spectral detection system is mutually independently arranged with gas breakdown loop, including light triggering device, fiber spectrometer and Host computer, the smooth triggering device connects the input of fiber spectrometer, and the output end connection host computer of fiber spectrometer will be surveyed The spectral characteristic information transfer obtained is to host computer；During detection, the light-receiving mouthful alignment on the fibre-optical probe of fiber spectrometer is to be checked The gap of two aluminium plate electrodes in gasmetry tank is surveyed, both are in same horizontal line；The host computer is used for according to light Spectral property calculates electron number densitiy and electron temperature in process gas discharge, with reference to spectral characteristic information to gas componant to be measured Ratio carries out comprehensive analysis.

Further, fiber spectrometer and host computer will carry out following anti-interference process in the spectral detection system： Other positions of fiber spectrometer in addition to wire are wrapped up with metal material material, display screen and power line are removed to host computer Other positions carry out same treatment.

Further, when gas breakdown is discharged, fibre-optical probe is connected by linear fiber with fiber spectrometer, and optical fiber is visited Air line distance between head and fiber spectrometer is that 6m~10m, i.e. optical-fibre channel are 6m~10m；Put according to gas in measurement tank Light-receiving mouthful on the actual conditions of electricity, artificial adjustment fibre-optical probe and two aluminium plate electrodes in gasmetry tank to be detected The distance in gap, to ensure that fiber spectrometer can collect effective spectral information.

On the other hand, the present invention also provides a kind of using above-mentioned device progress detection SF₆The method of mixed gas composition, Comprise the following steps：

Step 1：Vacuumize process is carried out to gasmetry tank to be detected, gas to be detected is filled with gasmetry to be detected Tank, reads the gas atmosphere to be detected extracted, when air pressure reaches default pressure by the air gauge on gasmetry tank to be detected Stop inflation during value；

Step 2：Light triggering device 8 and optical fiber are installed according to the position in aluminium plate electrode gap in gasmetry tank to be detected The position of spectrometer 9, and spectra collection parameter is set, the spectral characteristic information for obtaining spectrum analysis；

Step 3：After each instrument normal work, power frequency pressure regulator is adjusted, uniformly slowly increases gas to be detected and surveys Measuring tank both end voltage, until gas breakdown produces electric arc in gasmetry tank to be detected；

Step 4：When electric arc occurs in gas breakdown, stop boosting immediately, gasmetry tank both end voltage to be detected is dropped Most zero, close high-voltage DC power supply；

Step 5：Optical signal is uploaded to host computer by light triggering device by fiber spectrometer, and automatic data collection contains Spectral Properties The spectrum picture of property information；

Step 6：Host computer extracts the spectral characteristic information of the related spectral line of aluminium atom in spectrum picture, and calculates under test gas Electron number densitiy and electron temperature when puncturing, by spectral characteristic information and obtained electron number densitiy and electron temperature with it is known The corresponding parameter of Initial Composition proportional gas contrasted, by host computer spectrum picture, electron number densitiy and electronics temperature After the comprehensive analysis for spending result of calculation, under test gas mixed proportion is determined.

Further, when carrying out vacuumize process to gasmetry tank to be detected in step 1, by air delivery device, to be detected Gasmetry tank and vavuum pump is sealed connects, opens the valve on gasmetry tank to be detected, then carries out vacuumizing place Reason, when vacuum reaches below 20Pa, closes valve, stops vacuumize process；To the gas to be detected Jing Guo vacuumize process When body examination measuring tank is filled with test gas, the valve of the valve and air delivery device on gasmetry tank to be detected is reopened, to treating Detection gasmetry tank is filled with test gas.

Further, before light triggering device is installed in step 2, light triggering device light need to be made by optical-fiber laser calibration Receiving port, the optical-fibre channel mouthful of fibre-optical probe and the aluminium plate electrode gap of gasmetry tank to be detected are maintained at same horizontal line On, 40cm~60cm distance is kept with time triggering device and gasmetry tank to be detected.

Further, the collection of spectrum picture repeats repeatedly in step 5, until occurring not by the effective of electromagnetic interference Spectrum picture；The method for determining whether effective spectrum picture not by electromagnetic interference is：Judge the corresponding spectral line of labelled atom Whether light intensity amplitude is close to zero, if so, then spectrogram, by electromagnetic interference, is effective if there is higher amplitude otherwise Spectrum picture；The standard of wherein higher amplitude is more than 50 relative light intensities.

Further, when electron temperature when under test gas punctures is calculated in step 6, according to gas discharge theory and atom Emission spectrum is theoretical, and electron temperature is calculated using multiline Slope Method, and chooses aluminium atom for labelled atom, is composed according to aluminium atom Line carries out the calculating of electron temperature, and specific method is：

Formula (2) is obtained according to formula (1) conversion；

Wherein, I represents the aluminium atom plasma resonance light intensity measured, and N represents the molecule sum of under test gas, and v is represented Aluminium atom spectral line frequency, g, A, G and E are respectively the statistical weight of the related spectral line of aluminium atom electron outside nucleus, transition probability, partition letter The excitation energy of number and corresponding energy level, h is Planck's constant, and k is Boltzmann constant, T_eFor the electron temperature in plasma； C is constant, chooses the related spectral line of a plurality of aluminium atom electron outside nucleus, and value is ordinate using ln (I λ/gA), will using E as abscissa The point of series of discrete is obtained, by linear curve fit, slope of a curve, i.e. -1/kT is obtained_e, and then obtain plasma Electron temperature T_e。

Further, when electron number densitiy when under test gas punctures is calculated in step 6, according to excited atom electron outside nucleus The atomic spectral line broadening that transition is measured is the result that adjacent charged particle is acted on excited atom, and the broadening of spectral line is that electron number is close The function of degree, as shown in formula (3), solves the function, and calculate using aluminium atom relevant parameter using a square Stark broadening methods SF₆The electron number densitiy of the plasma conductive channel formed during gas discharge；

Wherein, Δ λ_wFor the halfwidth degree of spectral line peak value, i.e. halfwidth of line；T_eFor the electron temperature of plasma, ω is Aluminium atom electron collision half width (nm), α is aluminum ions ion broadening parameter, n_eFor electron number densitiy；According to the electricity measured The spectral line information of sub- temperature and aluminium atom, electron number densitiy n is obtained using Stark broadening methods_e。

As shown from the above technical solution, the beneficial effects of the present invention are：A kind of detection SF that the present invention is provided₆Gaseous mixture The device and method of body composition, mixed gas to be measured is filled with measurement tank, by high voltage direct current gas breakdown, using spectrum Detecting system measures SF₆Mixed gas discharge plasma light spectral property, to detect SF6 gas componants.Can be to longtime running SF in high-voltage product₆Mixed gas dielectric composition, which changes, to be detected, can basis when gas componant is varied widely High-Voltage Insulation professional knowledge is safeguarded to the product that dielectric is served as with mixed gas.The device operation of the present invention simultaneously Simplicity, very small to the gas flow to be detected that is extracted from product, the operation for treating detection device has little to no effect；To mixing Gas is shorter the time required to carrying out spectral measurement and the processing procedure of the calculating of relevant parameter being carried out using spectral information, can be two The change of mixed gas composition is effectively assessed in hour, effectively avoided to the height electricity using mixed gas as electric meson Influence of the die pressing product when carrying out gas ingredients detection to the engineering long period.

Brief description of the drawings

Fig. 1 is detection SF provided in an embodiment of the present invention₆The apparatus structure schematic diagram of mixed gas composition；

Fig. 2 is the structural representation of gasmetry tank to be detected provided in an embodiment of the present invention；

Fig. 3 is the Stark broadenings parameter of aluminium atom provided in an embodiment of the present invention and the graph of relation of electron temperature；Its In, (a) is the graph of relation of ion broadening parameter and electron temperature；(b) it is the pass of electron collision half width and electron temperature It is curve map；

50%SF when Fig. 4 is 0.1MPa provided in an embodiment of the present invention₆/ 50%CF₄Mixed gas breakdown spectral figure.

In figure：1st, gasmetry tank to be detected；101st, HIGH-PURITY SILICON glass tank skin；102nd, aluminium plate electrode；103rd, upper sealing Lid；104th, lower sealing cover；105th, pull bar；106th, adjustment knob；107th, blow vent；8th, light triggering device；9th, fiber spectrometer； 10th, host computer；11st, fibre-optical probe.

Embodiment

With reference to the accompanying drawings and examples, the embodiment to the present invention is described in further detail.Implement below Example is used to illustrate the present invention, but is not limited to the scope of the present invention.

One kind detection SF₆The device of mixed gas composition, as shown in figure 1, being surveyed including high-voltage DC power supply, gas to be detected Measuring tank 1 and spectral detection system.

High-voltage DC power supply includes power frequency pressure regulator T₁, power frequency testing transformer T₂, two current-limiting resistance R₁With R₂, high pressure Silicon stack D and high-voltage capacitor C.Power frequency pressure regulator T₁With the real testing transformer T of power frequency₂With the first current-limiting resistance R after being connected₁, high pressure Silicon stack D, high-voltage capacitor C connect, and rectified circuit design is the adjustable high voltage D. C that voltage is 0~100kV, gas to be measured Body examination measuring tank and the second current-limiting resistance R₂High-voltage capacitor C two ends, composition gas breakdown loop are connected in parallel on after series connection again.This reality Apply in example, power frequency pressure regulator T₁For 220V/252V type pressure regulators, power frequency reality testing transformer T₂For 252V/100kV type transformations Device, current-limiting resistance R₁And R₂For spend ion water making into water resistance, resistance be 2M Ω, high voltage silicon rectifier stack D be 100kV, 1A type, line Current-limiting resistance R is passed through on road₁Enter with high voltage silicon rectifier stack D rectification circuit to the model 120kV, 0.26 μ F constituted high-voltage capacitor C Row charging.

Gasmetry tank 1 to be detected be may move as sampling container, and gas is connected and composed with high-voltage DC power supply during detection Puncture loop, as shown in Fig. 2 including HIGH-PURITY SILICON glass tank skin 101, two relative aluminium plate electrodes 102 and upper-lower seal lid 103 and 104, the wherein inside radius of HIGH-PURITY SILICON glass tank skin 101 is 3cm, and a height of 10cm, aluminium plate electrode 102 is to pass through chamfering The plane electrode of processing, is high 4.5cm, radius 2.6cm cylinder.Two relative aluminium plate electrodes are sealed in HIGH-PURITY SILICON glass Inside glass tank skin 101, and upper-lower seal is fixed on by the metal screw 105 provided with roll adjustment knob 106 respectively covered, metal spiral shell Bar 105 as gasmetry tank 1 to be detected and high-voltage DC power supply connection end；One is provided between two aluminium plate electrodes 102 Fixed gap, the metal screw 105 provided with roll adjustment knob 106 is used to adjust the gap length between two aluminium plate electrodes 102, this reality Apply in example, in detection, aluminium plate electrode spacing is set as 2mm.Blow vent 107 of the lower sealing cover provided with connection tracheae, lead to Gas port is used as vacuumizing connector, as under test gas air inlet after vacuumize process, the other end connection of tracheae Gas charge and discharge and retracting device, during experiment, under test gas measurement tank has been filled with test gas, it is necessary to disconnect with gas charge and discharge with returning The connection of receiving apparatus.Tracheae is provided with air gauge G₁With valve K₁, the air pressure for mixed gas in gasmetry tank 1 to be detected Regulation, vacuumize process need to be carried out when extracting under test gas to gas passage.

Spectral detection system is mutually independently arranged with gas breakdown loop, including light triggering device 8, fiber spectrometer 9 and on Position machine 10, light triggering device 8 connects the input of fiber spectrometer 9, the output end connection host computer 10 of fiber spectrometer 9, light The distance between optical fiber spectrograph 9 and host computer 10 very little, be attached by a data lines, and fiber spectrometer 9 will be measured Spectral characteristic information transfer is to host computer 10.During detection, the light-receiving mouthful alignment on the fibre-optical probe 11 of fiber spectrometer 9 is to be checked The gap of two aluminium plate electrodes 102 in gasmetry tank 1 is surveyed, both are in in same horizontal line, in the present embodiment, are kept The air line distance of light-receiving mouthful and electrode gap 0.5m.Host computer 10 is used for according in Calculation of Spectral process gas discharge Electron number densitiy and electron temperature, comprehensive analysis is carried out with reference to spectral characteristic information to gas component ratio to be measured.The present embodiment In, fiber spectrometer 9 uses AVANTES-2048 type spectrometers, has the input of eight passages, can be to 200nm-1100nm wave bands The spectrum of scope is acquired, and resolution ratio is 10^-3Nm, the μ s of response time 1.28；Light triggering device 8 is synchronous triggering device, is adopted Constituted with photodiode, the response time is 1 μ s.

Fiber spectrometer 9 and host computer 10 will carry out following anti-interference process in spectral detection system：To fiber spectrum Other positions of instrument 9 in addition to wire are wrapped up with metal material material, to host computer 10 except display screen and power line other Position carries out same treatment, in order to avoid can not be collected correct spectral information by electromagnetic interference in process gas discharge.

When gas breakdown is discharged, fibre-optical probe 11 is connected by linear fiber with fiber spectrometer 9, fibre-optical probe and light The air line distance of optical fiber spectrograph be 6m-10m, i.e., between optical-fibre channel according to discharge scenario selection 6m~10m suitable distance, So that during gas breakdown electric discharge, each measuring instrument in the electromagnetic interference and spectral detection system that are produced in measuring loop keeps one Fixed distance.According to the actual conditions of gas discharge in measurement tank, light-receiving mouthful on artificial adjustment fibre-optical probe 11 with it is to be checked The distance in the gap of two aluminium plate electrodes in gasmetry tank is surveyed, to ensure that fiber spectrometer 9 can collect effective spectrum Information.

In the present embodiment, using said apparatus to containing CF₄SF₆Mixed gas SF₆/CF₄Carry out spectra collection and gas The calculating of electron temperature and electron number densitiy in the plasma channel formed when puncturing, and then analyze the composition ratio of under test gas The change of example.Before testing, the high voltage direct current resource loop in device will pass through security evaluation, and safety is set around loop Area of isolation, in order to avoid producing harm to human body during measure spectrum, each junction and instrument are firmly handled, in detection process Avoid larger electric power so that circuit shake and destructive test or to equipment cause damage.To a kind of SF to be detected₆/CF₄Mixing The method of gas ratio composition specifically includes following steps.

Step 1：Vacuumize process is carried out to gasmetry tank 1 to be detected, by gas SF to be detected₆/CF₄It is filled with to be detected Gasmetry tank 1, passes through the air gauge G on gasmetry tank 1 to be detected₁The gas atmosphere to be detected extracted is read, works as air pressure Stop inflation when reaching preset pressure value.When carrying out vacuumize process to gasmetry tank 1 to be detected, by air delivery device, to be checked Survey gasmetry tank 1 and vavuum pump is sealed connects.In specific implementation, threeway is connected in the end of tracheae, to connect simultaneously Air delivery device and vavuum pump, or when air delivery device and vavuum pump as an integrally formed gas charge and discharge with retracting device when, Tracheae can be directly connected with gas charge and discharge with retracting device.After connecting, the valve on gasmetry tank 1 to be detected is opened K₁, vacuumize process is then carried out, when vacuum reaches below 20Pa, valve K is closed₁, stop vacuumize process.To passing through When the gasmetry tank 1 to be detected of vacuumize process is filled with test gas, the valve on gasmetry tank 1 to be detected is reopened K₁With the deflation valve of air delivery device, the gas SF of mixed proportion to be measured is slowly filled with to gasmetry tank 1 to be detected₆/CF₄, As air gauge G₁When reading is 0.1MPa, valve K is closed₁, stop inflation.

Step 2：Light triggering device 8 and light are installed according to the position in aluminium plate electrode gap in gasmetry tank 1 to be detected The position of optical fiber spectrograph 9, and set light triggering device trigger after the spectra collection time started and Spectral acquisition times section etc. parameter, Spectral characteristic information for obtaining spectrum analysis.Before light triggering device 8 is installed, it need to visit optical fiber by optical-fiber laser calibration First 11 light-receiving mouth is the aluminium plate electrode gap of optical-fibre channel mouthful alignment gasmetry tank 1 to be detected, and both are maintained at same On one horizontal line, 40cm~60cm distance is kept with time triggering device 8 and gasmetry tank 1 to be detected.Fiber spectrometer 9 Spectroscopic calibration is carried out using the light source of specialty after being connected with optical fiber, while the length of optical fiber will reach corresponding requirement, optical fiber Spectrometer 9 and coupled host computer 10 will carry out electromagnetic interference shield.

Step 3：After each instrument normal work, power frequency pressure regulator T is adjusted₁, uniformly slowly increase gas to be detected The both end voltage of tank 1 is measured, until gas breakdown produces electric arc in gasmetry tank 1 to be detected.

Step 4：When electric arc occurs in gas breakdown, stop boosting immediately, the both end voltage of gasmetry tank 1 to be detected is dropped Most zero, close high-voltage DC power supply.

Step 5：Optical signal is uploaded to host computer 10 by light triggering device 8 by fiber spectrometer 9, soft by Avasoft Part automatic data collection contains the spectrum picture of spectral characteristic information.The collection of spectrum picture repeats at least five times, until occurring Not by effective spectrum picture of electromagnetic interference；The method for determining whether effective spectrum picture not by electromagnetic interference is：Judge Whether the light intensity amplitude of the corresponding spectral line of labelled atom is close to zero, if so, then spectrogram is by electromagnetic interference, otherwise, if occurring It is effective spectrum picture during higher amplitude；The standard of wherein higher amplitude is more than 50 relative light intensities.The present embodiment In, labelled atom is aluminium atom.

Step 6：Host computer extracts the light intensity value and spectral line halfwidth degree of the related spectral line of aluminium atom in spectrum picture, and calculates Electron number densitiy and electron temperature when under test gas punctures, by spectral characteristic information and obtained electron number densitiy and electronics temperature Degree is contrasted with the corresponding parameter of known Initial Composition proportional gas, by host computer spectrum picture, electron number densitiy After the comprehensive analysis that result is calculated with electron temperature, under test gas mixed proportion is determined.Wherein, related spectral line is that wavelength is 308.215nm, 309.288nm, 394.404nm, 396.152nm spectral line.

It is theoretical according to gas discharge when calculating electron temperature of under test gas when puncturing, gap puncture completely to be formed etc. Gas ions conductive channel internal ionization reaches dynamic equilibrium with compound, and plasma, which is believed that, is approximately at thermodynamic equilibrium state (TE) it is, theoretical according to atomic emission spectrum, electron temperature is calculated using multiline Slope Method, shown in calculation formula such as formula (1)；

Wherein, I represents the aluminium atom plasma resonance light intensity measured, and N represents the molecule sum of under test gas, and v is represented Aluminium atom spectral line frequency, g, A, G and E are respectively the statistical weight of the related spectral line of aluminium atom electron outside nucleus, transition probability, partition letter The excitation energy of number and corresponding energy level, h is Planck's constant, and k is Boltzmann constant, T_eFor the electron temperature in plasma.

Selection aluminium atom is labelled atom, and the calculating of electron temperature is carried out according to aluminium atom spectral line, is converted according to formula (1) To formula (2)：

Wherein, C is constant, chooses the related spectral line of a plurality of aluminium atom electron outside nucleus, and using ln (I λ/gA) value as ordinate, Using E as abscissa, the point of series of discrete will be obtained, by linear curve fit, obtain slope of a curve, i.e. -1/kT_e, enter And obtain the electron temperature T of plasma_e。

Table 1 is excitation energy, statistical weight and the transition probability related parameter values of the related spectral line of aluminium atom electron outside nucleus, its Medium wavelength represents a kind of aluminium atom electron outside nucleus mode of excitation, i.e., one specific wavelength spectral line.Spectral detection system is detected The electron outside nucleus transition spectral line light intensity value of A1 atoms is substituted into formula (2), calculates the electron temperature obtained in plasma channel.

The molecular properties of the aluminium atom of table 1

Wavelength X (nm)	E(cm-1)	g	A(108s-1)
				308.215	32435.453	4	0.587
309.288	32435.453	4	0.116
				394.404	25347.756	2	0.499
396.152	25347.756	2	0.985

When calculating electron number densitiy when under test gas punctures, the atomic spectra measured according to excited atom electron outside nucleus transition Line broadening is the result that adjacent charged particle is acted on excited atom, and the broadening of spectral line is the function of electron number densitiy, such as formula (3) Shown, the size of Stark broadenings depends on electron number densitiy in plasma.Aluminium atom belongs to non-hydrogen species atom, using square Stark broadening methods solve the function, and calculate SF using aluminium atom relevant parameter₆The plasma conduction formed during gas discharge is logical The electron number densitiy in road；

Wherein, Δ λ_wFor the halfwidth degree of spectral line peak value, i.e. halfwidth of line；ω is aluminium atom electron collision half width (nm), α is aluminum ions ion broadening parameter, n_eFor electron number densitiy.According to the electron temperature and the spectral line of aluminium atom measured Information, electron number densitiy n is obtained using Stark broadening methods_e.Al (394.404nm) stark broadening parameters are as shown in Figure 3.

SF is treated by what method in the present embodiment was measured₆/CF₄Mixed gas is 0.1MPa in air pressure and electrode spacing is 2mm When gas breakdown when the spectrogram that measures it is as shown in Figure 4.Spectral characteristic information in Fig. 4 calculates now electron temperature 2.13×10⁴K, electron number densitiy is 2.62 × 10¹⁷m^-3.When SF6 accounts for 48% in SF6/CF4 mixed gas, electron temperature is 2.09×10⁴K, electron number densitiy is 2.71 × 10¹⁷m^-3；When SF6 mixed proportions be 50% when, electron temperature be 2.25 × 10⁴K, electron number densitiy is 2.47 × 10¹⁷m^-3.Measure electron temperature with SF6 contents increase and raise and under electron number densitiy is in Drop trend.Pass through the correlation computations data and known gas mixed proportion data comparison of under test gas in the present embodiment, it is known that treat SF6/CF4 mixed gas SF6 proportions are surveyed between 48%-50%, ratio of gas mixture in equipment is carried out using this result The calibration and amendment of composition.

A kind of detection SF that the present embodiment is provided₆The device and method of mixed gas composition, device it is easy to operate, it is required Gas volume is in 15cm³Within, the change of mixed gas composition can be detected in 2 hours and finished by device, to rear issue According to processing procedure the time required to it is shorter, the device performance of gas to be detected is had little to no effect, can be in the short period of time Ratio of gas mixture composition in corrective, effectively avoids and the high voltage product using mixed gas as electric meson is being carried out Influence during gas ingredients detection to the engineering long period.

Finally it should be noted that：The above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although The present invention is described in detail with reference to the foregoing embodiments, it will be understood by those within the art that：It still may be used To be modified to the technical scheme described in previous embodiment, or which part or all technical characteristic are equal Replace；And these modifications or replacement, the essence of appropriate technical solution is departed from the model that the claims in the present invention are limited Enclose.

Claims (9)

1. one kind detection SF₆The device of mixed gas composition, it is characterised in that：Including high-voltage DC power supply, gasmetry to be detected Tank and spectral detection system；

The high-voltage DC power supply includes power frequency pressure regulator, power frequency testing transformer, two current-limiting resistances, high voltage silicon rectifier stack and high pressure Capacitor；The power frequency pressure regulator be connected with power frequency testing transformer after with the first current-limiting resistance, high voltage silicon rectifier stack, high-voltage capacitor Series connection, rectified circuit design is the adjustable high voltage D. C that voltage is 0~100kV, under test gas measurement tank and the second limit The two ends of high-voltage capacitor, composition gas breakdown loop are connected in parallel on after leakage resistance series connection again；

The gasmetry tank to be detected connects and composes gas breakdown loop as sampling container with high-voltage DC power supply, including HIGH-PURITY SILICON glass tank skin, two relative aluminium plate electrodes and upper-lower seal lid；Described two relative aluminium plate electrode sealings In the HIGH-PURITY SILICON glass jar pars intramuralis, and upper-lower seal be fixed on by the metal screw provided with roll adjustment knob respectively covered, Metal screw as gasmetry tank to be detected and the high-voltage DC power supply connection end；It is provided between two aluminium plate electrodes Certain interval, the metal screw provided with roll adjustment knob is used to adjust the gap length between two aluminium plate electrodes；In lower sealing cover Blow vent provided with connection tracheae, blow vent is used as vacuumizing connector, and under test gas is used as after vacuumize process Air inlet；The tracheae is provided with air gauge and valve, the air pressure adjustment for gasmetry in-tank mixing gas to be detected；

The spectral detection system is mutually independently arranged with gas breakdown loop, including light triggering device, fiber spectrometer and upper Machine, the smooth triggering device connects the input of fiber spectrometer, the output end connection host computer of fiber spectrometer, by what is measured Spectral characteristic information transfer is to host computer；During detection, the light-receiving mouthful alignment gas to be detected on the fibre-optical probe of fiber spectrometer The gap of two aluminium plate electrodes in body examination measuring tank；The host computer is used for according in Calculation of Spectral process gas discharge Electron number densitiy and electron temperature, comprehensive analysis is carried out with reference to spectral characteristic information to gas component ratio to be measured.

2. a kind of detection SF according to claim 1₆The device of mixed gas composition, it is characterised in that：The spectral detection Fiber spectrometer and host computer will carry out following anti-interference process in system：To other positions of fiber spectrometer in addition to wire Wrapped up with metal material material, to host computer except other positions of display screen and power line carry out same treatment.

3. a kind of detection SF according to claim 1₆The device of mixed gas composition, it is characterised in that：Put in gas breakdown When electric, fibre-optical probe is connected by linear fiber with fiber spectrometer, the air line distance between fibre-optical probe and fiber spectrometer For 6m~10m；According to the actual conditions of gas discharge in measurement tank, light-receiving mouthful on artificial adjustment fibre-optical probe with it is to be detected The distance in the gap of two aluminium plate electrodes in gasmetry tank, is believed with ensureing that fiber spectrometer can collect effective spectrum Breath.

4. one kind detection SF₆The method of mixed gas composition, using the detection SF described in claim 1₆The dress of mixed gas composition Put progress, it is characterised in that：This method comprises the following steps：

Step 1：Vacuumize process is carried out to gasmetry tank to be detected, gas to be detected is filled with gasmetry tank to be detected, The gas atmosphere to be detected extracted is read by the air gauge on gasmetry tank to be detected, when air pressure reaches preset pressure value Stop inflation；

Step 2：Light triggering device 8 and fiber spectrum are installed according to the position in aluminium plate electrode gap in gasmetry tank to be detected The position of instrument 9, and spectra collection parameter is set, the spectral characteristic information for obtaining spectrum analysis；

Step 3：After each instrument normal work, power frequency pressure regulator is adjusted, uniformly slowly increases gasmetry tank to be detected Both end voltage, until gas breakdown produces electric arc in gasmetry tank to be detected；

Step 4：When electric arc occurs in gas breakdown, stop boosting immediately, gasmetry tank both end voltage to be detected is reduced to Zero, close high-voltage DC power supply；

Step 5：Optical signal is uploaded to host computer by light triggering device by fiber spectrometer, and automatic data collection contains spectral characteristic letter The spectrum picture of breath；

Step 6：Host computer extracts the spectral characteristic information of the related spectral line of aluminium atom in spectrum picture, and calculates under test gas and puncture When electron number densitiy and electron temperature, by spectral characteristic information and obtained electron number densitiy and electron temperature with it is known just The corresponding parameter of beginning component ratio gas is contrasted, by host computer spectrum picture, electron number densitiy and electronic thermometer After the comprehensive analysis for calculating result, under test gas mixed proportion is determined.

5. a kind of detection SF according to claim 4₆The method of mixed gas composition, it is characterised in that：In the step 1 It is when carrying out vacuumize process to gasmetry tank to be detected, air delivery device, gasmetry tank to be detected and vavuum pump is sealed Connect, open the valve on gasmetry tank to be detected, vacuumize process is then carried out, when vacuum reaches below 20Pa When, valve is closed, stops vacuumize process；When being filled with test gas to the gasmetry tank to be detected Jing Guo vacuumize process, The valve of the valve and air delivery device on gasmetry tank to be detected is reopened, gas to be measured is filled with to gasmetry tank to be detected Body.

6. a kind of detection SF according to claim 4₆The method of mixed gas composition, it is characterised in that：In the step 2 Before light triggering device is installed, receiving port, the optical-fibre channel of fibre-optical probe of light triggering device light need to be made by optical-fiber laser calibration Mouthful with the holding of the aluminium plate electrode gap of gasmetry tank to be detected in the same horizontal line, with time triggering device with it is to be detected Gasmetry tank keeps 40cm~60cm distance.

7. a kind of detection SF according to claim 4₆The method of mixed gas composition, it is characterised in that：In the step 5 The collection of spectrum picture repeats repeatedly, until there is effective spectrum picture not by electromagnetic interference；Determine whether not by The method of effective spectrum picture of electromagnetic interference is：Whether the light intensity amplitude of the corresponding spectral line of labelled atom is judged close to zero, if It is that then spectrogram, by electromagnetic interference, is effective spectrum picture if there is higher amplitude otherwise；Wherein higher width The standard of value is more than 50 relative light intensities.

8. a kind of detection SF according to claim 4₆The method of mixed gas composition, it is characterised in that：In the step 6 It is theoretical theoretical with atomic emission spectrum according to gas discharge when calculating electron temperature when under test gas punctures, using multiline Slope Method calculates electron temperature, and chooses aluminium atom for labelled atom, and the calculating of electron temperature, tool are carried out according to aluminium atom spectral line Body method is：

Formula (2) is obtained according to formula (1) conversion；

$I=N\frac{hv}{4\mathrm{\π}}\frac{gA}{G}{e}^{-\frac{E}{{\mathrm{kT}}_e}}---\left(1\right)$

$ln\left(\frac{I\mathrm{\λ}}{gA}\right)=-\frac{E}{{\mathrm{kT}}_e}+C---\left(2\right)$

Wherein, I represents the aluminium atom plasma resonance light intensity measured, and N represents the molecule sum of under test gas, and v represents that aluminium is former Sub- spectral line frequency, g, A, G and E be respectively the statistical weight of the related spectral line of aluminium atom electron outside nucleus, transition probability, partition function and The excitation energy of corresponding energy level, h is Planck's constant, and k is Boltzmann constant, T_eFor the electron temperature in plasma；C is normal Number, chooses the related spectral line of a plurality of aluminium atom electron outside nucleus, and using ln (I λ/gA), value is ordinate, using E as abscissa, will obtain The point of series of discrete, by linear curve fit, obtains slope of a curve, i.e. -1/kT_e, and then obtain the electricity of plasma Sub- temperature T_e。

9. a kind of detection SF according to claim 8₆The method of mixed gas composition, it is characterised in that：In the step 6 When calculating electron number densitiy when under test gas punctures, it is according to the atomic spectral line broadening that excited atom electron outside nucleus transition is measured The result that adjacent charged particle is acted on excited atom, the broadening of spectral line is the function of electron number densitiy, as shown in formula (3), is adopted The function is solved with a square Stark broadening methods, and SF is calculated using aluminium atom relevant parameter₆The plasma formed during gas discharge The electron number densitiy of conductive channel；

${\mathrm{\Δ\λ}}_w=\frac{\[1+1.75\×{10}^{-4}{n}_e^{1/4}\mathrm{\α}(1-0.068n_e^{1/6}{T}_e^{-1/2})\]{\mathrm{\ωn}}_e}{{10}^{16}}---\left(3\right)$

Wherein, Δ λ_wFor the halfwidth degree of spectral line peak value, i.e. halfwidth of line；T_eFor the electron temperature of plasma, ω is that aluminium is former Sub- electron collision half width (nm), α is aluminum ions ion broadening parameter, n_eFor electron number densitiy；According to the electronics temperature measured The spectral line information of degree and aluminium atom, electron number densitiy n is obtained using Stark broadening methods_e。